CN202403441U - Helium circulating cooling system - Google Patents

Helium circulating cooling system Download PDF

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Publication number
CN202403441U
CN202403441U CN2011204909778U CN201120490977U CN202403441U CN 202403441 U CN202403441 U CN 202403441U CN 2011204909778 U CN2011204909778 U CN 2011204909778U CN 201120490977 U CN201120490977 U CN 201120490977U CN 202403441 U CN202403441 U CN 202403441U
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CN
China
Prior art keywords
helium
equipment
pressure buffer
low pressure
buffer equipment
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Expired - Lifetime
Application number
CN2011204909778U
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Chinese (zh)
Inventor
徐力
蒋渊
陈盛云
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SHANGHAI PNC PROCESS SYSTEMS CO Ltd
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SHANGHAI PNC PROCESS SYSTEMS CO Ltd
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Priority to CN2011204909778U priority Critical patent/CN202403441U/en
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Publication of CN202403441U publication Critical patent/CN202403441U/en
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Abstract

The utility model embodiment discloses a helium circulating cooling system, which comprises helium bottles, a filtering and decompressing unit, low pressure buffering equipment, a pressurizing device, high pressure buffering equipment, after-cooling equipment and a heat exchanger, wherein an output end of the helium bottle is connected with a helium supplementing input side of the low pressure buffering equipment through the filtering and decompressing unit; a cold gas output end of the heat exchanger is connected with a circulating gas input side of the low pressure buffering equipment; the low pressure buffering equipment, the pressurizing device and the high pressure buffering equipment are sequentially connected to correspondingly treat helium sequentially; and a hot helium output end of the after-cooling equipment is connected with a gas input end of the heat exchanger. Helium is circularly utilized in a circulating gas path, so that the utilization amount of helium is saved and the cost is reduced; the two helium bottles are provided, one is used and the other helium bottle is spare, so that continuous supply of helium is ensured; through self check and regulation on gas pressure by using a pneumatic valve and/or a mass flow meter, the operation is convenient and the regulating timeliness is improved.

Description

A kind of circulated helium cooling system
Technical field
The utility model relates to processing cooling technology field, more particularly, relates to a kind of circulated helium cooling system.
Background technology
The long crystalline substance of sapphire is one of device such as LED raw material commonly used; In the process of carrying out the long brilliant production and processing of sapphire; Need the heat production position of the long brilliant equipment of sapphire be lowered the temperature; For example, the temperature of cutting part can reach more than 800 ℃ in normal operation, generally adopts helium to lower the temperature.
Existing helium cooling cooling system is to carry out heat exchange with the heat production position helium is derived the process pressure-reducing valve from helium tank after, and helium enters atmosphere completion cooling after taking away heat.
Yet; There is following shortcoming at least in existing helium cooling system; Owing to helium is derived from the high pressure helium gas cylinder having carried out heat exchange and is entered atmosphere later on and fail recycle and cause the high problem of cooling cost; Existing helium cooling system adopts single bottle of helium supplying mode, and cooling system need temporarily quit work and carry out the helium tank replacing when helium is used up, and can not guarantee continuous cooling.Secondly, existingly carry out helium gas circuit on/off operation and all adopt manual form, when carrying out gas circuit pressure and adjustment,, and influenced the crudy of sapphire length crystalline substance because adjustment has automatically in time brought inconvenience not only for operation and processing.
The utility model content
In view of this, the utility model provides a kind of circulated helium cooling system, practices thrift helium, guarantees that helium is without interruption and improves the purpose that air-flow is adjusted promptness to realize helium cooling system.
A kind of circulated helium cooling system comprises: helium tank, filtration decompressing unit, low pressure buffer equipment, supercharging device, high-pressure buffer equipment, equipment to be cooled and heat exchanger, wherein:
The output of said helium tank is connected with low pressure buffer equipment helium supply input side through said filtration decompressing unit;
The cold air output of said heat exchanger is connected with low pressure buffer equipment recyclegas input side;
Said low pressure buffer equipment, supercharging device, high-pressure buffer equipment connect helium successively and carry out handled successively;
The hot helium output of said equipment to be cooled is connected with the gas input of said heat exchanger.
In order to improve such scheme:
Said helium tank is provided with two, is respectively first helium tank and second helium tank, and said first helium tank is connected with a filtration decompressing unit respectively with the second row helium tank gas output end mouth, and one of them helium tank carries out current air feed, and another is subsequent use.
Said filtration decompressing unit is specially pressure-reducing valve, Pressure gauge and the filter that the direction from said helium tank, exported according to helium connects successively.
Said system also comprises:
Be connected in the pressure sensor between said low pressure buffer equipment and the said supercharging device.
Direction according to helium from said filtration decompressing unit to said low pressure buffer equipment helium supply input side, the aeration valve and the check valve that between said filtration decompressing unit and said low pressure buffer equipment, connect successively.
According to the direction of helium, be connected in mass flowmenter and pneumatic operated valve between said high-pressure buffer equipment and the said equipment to be cooled successively from said high-pressure buffer equipment to said equipment input side to be cooled.
With said mass flowmenter and the parallelly connected subsequent use pneumatic operated valve of pneumatic operated valve combination.
Preferably:
Said aeration valve is specially pneumatic operated valve.
Said supercharging device is a booster pump.
Said low pressure buffer equipment and said high-pressure buffer equipment are specially low pressure buffer jar and high-pressure buffering pot.
Can find out from above-mentioned technical scheme; Low pressure buffer equipment, supercharging device, high-pressure buffer equipment, equipment to be cooled and heat exchanger are set up the circulation gas circuit for reusing; Said helium is recycling in the circulation gas circuit through low pressure buffer, supercharging, high-pressure buffer, high temperature and heat exchange cooling back; Practice thrift the use amount of helium, reduced cost; Said helium tank is set to two, and the using and the reserved have guaranteed the without interruption of helium; The gas pressure that pneumatic operated valve and/or mass flowmenter are set in the said system automatically detects and the adjustment combination, not only handled easily and processing and improved the promptness that air-flow is adjusted.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below only is some embodiment of the utility model, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the disclosed a kind of circulated helium cooling system structure sketch map of the utility model embodiment;
Fig. 2 is the disclosed a kind of circulated helium cooling system structure sketch map of the another embodiment of the utility model.
The specific embodiment
To combine the accompanying drawing among the utility model embodiment below, the technical scheme among the utility model embodiment is carried out clear, intactly description, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the utility model protection.
The utility model embodiment discloses a kind of circulated helium cooling system, practices thrift helium, guarantees that helium is without interruption and improves the purpose that air-flow is adjusted promptness to realize helium cooling system.
Fig. 1 shows a kind of circulated helium cooling system, comprising:
Helium tank 11, filtration decompressing unit 12, low pressure buffer equipment 13, supercharging device 14, high-pressure buffer equipment 15, equipment to be cooled 16 and heat exchanger 17, wherein:
The output of said helium tank 11 is connected with low pressure buffer equipment 13 helium supply input sides through said filtration decompressing unit 12;
Need to prove that said filtration decompressing unit 12 is specially from said helium tank 11 pressure-reducing valve, Pressure gauge and the filter that the direction of output connects successively, the combinations thereof form is not limited to certainly.
The cold air output of said heat exchanger 17 is connected with low pressure buffer equipment 13 recyclegas input sides;
Said low pressure buffer equipment 13, supercharging device 14, high-pressure buffer equipment 15 connects successively and helium is carried out handled successively;
Said equipment to be cooled 16 hot helium outputs are connected with the gas input of said heat exchanger 17.
This embodiment is constructed as low pressure buffer equipment 13, supercharging device 14, high-pressure buffer equipment 15, equipment to be cooled 16 and heat exchanger 17 the circulation gas circuit that can reuse; Said helium is recycling in the circulation gas circuit through low pressure buffer, supercharging, high-pressure buffer, high temperature and heat exchange cooling back; Practice thrift the use amount of helium, reduced cost.
Fig. 2 shows another circulated helium cooling system; Comprise: two helium tanks comprise: first helium tank 21 and second helium tank 22, and said first helium tank 21 is connected with a filtration decompressing unit respectively with second helium tank, 22 gas output end mouths; One of them helium tank carries out current air feed; Another is subsequent use, and what identified among the figure is that first helium tank 21 carries out air feed, and second helium tank 22 is subsequent use.
As shown in the figure:
(said low pressure buffer equipment is specially pressure-reducing valve 211, Pressure gauge 212 and the filter 213 that the direction of output from said helium tank 21 is connected successively with filtering decompressing unit at said helium tank (is example with first helium tank 21); And go out to be equipped with Pressure gauge, filter GF and switch valve HPG at first helium tank and the second helium tank gas delivery port, so that pressure is carried out in more accurate control and gas circuit is smooth:
Open HPI (L) valve of switch valve in first helium tank 21 and connection thereof, helium flow is crossed gasket type filter GF (L) (gasket type filter), and pressure-reducing valve 211 arrival ends replenish helium through the decompression back to low pressure buffer equipment 24.When using up, first helium tank, 21 helium (in cyclic process, have gas leakage or loss; And the integral replacing of path helium) after; Close first helium tank, 21 switch valves and the HPI that is connected (L) valve; Open the switch of second helium tank 22 and the HPI of connection (R) valve thereof, continue to get into pressure-reducing valve 211 arrival ends, thereby guaranteed the without interruption of source of the gas.
Direction according to helium from said filtration decompressing unit to said low pressure buffer equipment 24 helium supply input sides; The aeration valve that between said filtration decompressing unit and low pressure buffer equipment 24, is connected successively 214 check valves 215, said aeration valve 214 and check valve 215, above-mentioned valve and the pressure sensor 216 that is connected between said low pressure buffer equipment 24 and the supercharging device 25 are used:
When pressure sensor 216 force value were lower than the threshold pression value of setting, said aeration valve 214 was opened and is carried out replenishing of helium, after pressure sensor 216 force value are higher than upper limit set value, closed, thereby guaranteed that helium is sufficient in the circulatory system.
Direction according to helium from high-pressure buffer equipment 26 to said equipment 27 input sides to be cooled is connected in mass flowmenter 217 and moving valve 218 visible and said mass flowmenter 217 pneumatic operated valves 218 and parallelly connected subsequent use pneumatic operated valves 219 from figure between said high-pressure buffer equipment 26 and the said equipment 27 to be cooled successively.
Said mass flowmenter 217 is with real-time detection flow and cooperate pneumatic operated valve 218 to regulate flow, can adjust helium gas flow automatically according to equipment 27 operation different phases to be cooled, and it is more simple and convenient that operating personnel are operated;
The cold air output of said heat exchanger 28 is connected with low pressure buffer equipment 24 recyclegas input sides.
Need to prove, in the present embodiment:
Valve, valve member can select VCR cutting ferrule joint to improve sealing and stainless steel 316L material to improve surface smoothness;
Said supercharging device is a booster pump.
Said low pressure buffer equipment and said high-pressure buffer equipment are specially low pressure buffer jar and high-pressure buffering pot.
Certainly, above-mentioned concrete way of realization is selected for use in the system in the present embodiment, but is not limited to the above-mentioned form of enumerating as preferred, can adjust and replace according to the real system kit form.
In sum:
The utility model embodiment is set up the circulation gas circuit for reusing with low pressure buffer equipment, supercharging device, high-pressure buffer equipment, equipment to be cooled and heat exchanger; Said helium is recycling in the circulation gas circuit through low pressure buffer, supercharging, high-pressure buffer, high temperature and heat exchange cooling back; Practice thrift the use amount of helium, reduced cost; Said helium tank is set to two, and the using and the reserved have guaranteed the without interruption of helium; The gas pressure that pneumatic operated valve and/or mass flowmenter are set in the said system automatically detects and the adjustment combination, not only handled easily and processing and improved the promptness that air-flow is adjusted.
Each embodiment adopts the mode of going forward one by one to describe in this specification, and what each embodiment stressed all is and the difference of other embodiment that identical similar part is mutually referring to getting final product between each embodiment.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the utility model.Multiple modification to these embodiment will be conspicuous concerning those skilled in the art, and defined General Principle can realize under the situation of spirit that does not break away from the utility model or scope in other embodiments among this paper.Therefore, the utility model will can not be restricted to these embodiment shown in this paper, but will meet and principle disclosed herein and features of novelty the wideest corresponding to scope.

Claims (10)

1. a circulated helium cooling system is characterized in that, comprising: helium tank, filtration decompressing unit, low pressure buffer equipment, supercharging device, high-pressure buffer equipment, equipment to be cooled and heat exchanger, wherein:
The output of said helium tank is connected with low pressure buffer equipment helium supply input side through said filtration decompressing unit;
The cold air output of said heat exchanger is connected with low pressure buffer equipment recyclegas input side;
Said low pressure buffer equipment, supercharging device, high-pressure buffer equipment connect helium successively and carry out handled successively;
The hot helium output of said equipment to be cooled is connected with the gas input of said heat exchanger.
2. system according to claim 1; It is characterized in that; Said helium tank is provided with two, is respectively first helium tank and second helium tank, and said first helium tank is connected with a filtration decompressing unit respectively with the second row helium tank gas output end mouth; One of them helium tank carries out current air feed, and another is subsequent use.
3. system according to claim 2 is characterized in that, said filtration decompressing unit is specially pressure-reducing valve, Pressure gauge and the filter that the direction from said helium tank, exported according to helium connects successively.
4. system according to claim 1 is characterized in that, also comprises: be connected in the pressure sensor between said low pressure buffer equipment and the said supercharging device.
5. system according to claim 4; It is characterized in that; Also comprise: the direction according to helium from said filtration decompressing unit to said low pressure buffer equipment helium supply input side, the aeration valve and the check valve that between said filtration decompressing unit and said low pressure buffer equipment, connect successively.
6. system according to claim 5 is characterized in that said aeration valve is specially pneumatic operated valve.
7. system according to claim 1; It is characterized in that; Also comprise:, be connected in mass flowmenter and pneumatic operated valve between said high-pressure buffer equipment and the said equipment to be cooled successively according to the direction of helium from said high-pressure buffer equipment to said equipment input side to be cooled.
8. system according to claim 6 is characterized in that, also comprises and said mass flowmenter and the parallelly connected subsequent use pneumatic operated valve of pneumatic operated valve combination.
9. system according to claim 1 is characterized in that, said supercharging device is a booster pump.
10. system according to claim 1 is characterized in that, said low pressure buffer equipment and said high-pressure buffer equipment are specially low pressure buffer jar and high-pressure buffering pot.
CN2011204909778U 2011-11-30 2011-11-30 Helium circulating cooling system Expired - Lifetime CN202403441U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011204909778U CN202403441U (en) 2011-11-30 2011-11-30 Helium circulating cooling system

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Application Number Priority Date Filing Date Title
CN2011204909778U CN202403441U (en) 2011-11-30 2011-11-30 Helium circulating cooling system

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CN202403441U true CN202403441U (en) 2012-08-29

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CN2011204909778U Expired - Lifetime CN202403441U (en) 2011-11-30 2011-11-30 Helium circulating cooling system

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102425876A (en) * 2011-11-30 2012-04-25 上海至纯洁净系统科技股份有限公司 Helium circulating cooling system
CN111023652A (en) * 2019-12-11 2020-04-17 广东电网有限责任公司 Helium gas circulating cooling system, design method, equipment and storage medium

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102425876A (en) * 2011-11-30 2012-04-25 上海至纯洁净系统科技股份有限公司 Helium circulating cooling system
CN111023652A (en) * 2019-12-11 2020-04-17 广东电网有限责任公司 Helium gas circulating cooling system, design method, equipment and storage medium

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C14 Grant of patent or utility model
GR01 Patent grant
CP02 Change in the address of a patent holder
CP02 Change in the address of a patent holder

Address after: No. 170 purple sea road, Minhang District, Shanghai

Patentee after: Shanghai PNC Process Systems Co., Ltd.

Address before: 200241 03A 1, Ting 1 building, 555 Dongchuan Road, Minhang District, Shanghai.

Patentee before: Shanghai PNC Process Systems Co., Ltd.

CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20120829