CN202583787U - Electric control system for gallium arsenide single crystal furnace - Google Patents
Electric control system for gallium arsenide single crystal furnace Download PDFInfo
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- CN202583787U CN202583787U CN2011205344549U CN201120534454U CN202583787U CN 202583787 U CN202583787 U CN 202583787U CN 2011205344549 U CN2011205344549 U CN 2011205344549U CN 201120534454 U CN201120534454 U CN 201120534454U CN 202583787 U CN202583787 U CN 202583787U
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Abstract
An embodiment of the utility model provides an electric control system for a gallium arsenide single crystal furnace. The system comprises a central control part, a motion control part, a gas control part, a temperature control pat, a water channel detection part and an operation panel, wherein the motion control part, the gas control part, the temperature control part, the water channel detection part and the operation panel are connected with the central control part respectively. The central control part comprises a communication module, a programmable logic controller and an input and output module. The programmable logic controller is communicated with the operation panel through the communication module and is communicated with the motion control part, the gas control part, the temperature control part and the water channel detection part through the input and output module. According to the embodiment, the precision and the reliability of the production process of gallium arsenide materials can be improved. The electric control system for the gallium arsenide single crystal furnace is easy to realize functional expansion, and the electric energy consumption is lowered.
Description
Technical field
The utility model relates to the electrical control field, especially relates to a kind of arsenide gallium monocrystal stove electric control system.
Background technology
In recent decades, the increasingly extensive and diversification of using at microelectronics and optoelectronic areas along with gallium arsenide (GaAs) material, and its traditional functions of equipment that is used to produce arsenide gallium monocrystal can not satisfy the multiple demand of market product; Especially the electric control system of arsenide gallium monocrystal stove mainly is the control method that adopts relay; What this control method adopted is manual wiring, the installation of fixing, if production run is changed to some extent, the design circuit wiring is installed again; Possibly on the basis of original equipment, transform hardly; It can not change along with the process reform of production, its Electric Machine Control part control accuracy and poor reliability, and a large amount of relays can produce a large amount of heat and noise; Consume a large amount of electric energy, can not satisfy technological requirement.
The utility model content
The utility model embodiment provides a kind of arsenide gallium monocrystal stove electric control system, is used to improve the precision and the reliability of gallium arsenide (GaAs) manufacture of materials process, realizes the function expansion easily, reduces power consumption.
The utility model embodiment provides a kind of arsenide gallium monocrystal stove electric control system; It is characterized in that; This system comprises: center control section, motion control part, gas control section, temperature control part branch, test section, water route and guidance panel, and motion control part, gas control section, temperature control part branch, test section, water route link to each other with the center control section respectively with guidance panel; The center control section comprises communication module and programmable logic controller (PLC); Programmable logic controller (PLC) communicates through communication module and guidance panel, and communicates through its input/output module and motion control part, gas control section, temperature control part branch and test section, water route; Motion control partly comprises auxiliary relay, dc driver and motor, and auxiliary relay links to each other with input/output module and dc driver, and motor links to each other with dc driver; The gas control section comprises: mass flowmeter and gas pressure regulator, and mass flowmeter links to each other with input/output module with gas pressure regulator; The temperature control part branch comprises: connector and multistage temperature controller, and the multistage temperature controller links to each other with said input/output module through connector; The test section, water route comprises cooling-water temperature sensor, water pressure gauge and water flow sensor, and cooling-water temperature sensor links to each other with input/output module, and water pressure gauge and water flow sensing unit link to each other with input/output module.
Preferably, input/output module comprises digital quantity input/output module and analog quantity input/output module among the utility model embodiment.
Preferably; Digital input module is the TM5SDI12D type digital quantity input module of Schneider company among the utility model embodiment; The numeral output module is the TM5SDO12T type digital quantity output module of Schneider company; Analog input module is Schneider company 12 TM5SAI4L types analog quantity load module and 16 s' a TM5SAI4H type analog quantity load module, and analog output module is the TM5SAO4L type analog output module of Schneider company.
Preferably; Motor also comprises a scrambler among the utility model embodiment; Said scrambler is used for feedback signal is divided into two-way; One the tunnel feeds back to said dc driver as negative-feedback signal, constitutes a closed-loop path with said dc driver, and another road feeds back to said programmable logic controller (PLC).
Preferably; The utility model embodiment also comprises well heater; Said well heater links to each other with said multistage temperature controller, and said well heater is used for feedback signal is divided into two-way, and one the tunnel feeds back to said multistage temperature controller as negative-feedback signal; Constitute a closed-loop path with said multistage temperature controller, another road feeds back to said programmable logic controller (PLC).
Preferably, the utility model embodiment also comprises a signal controller, and said signal controller is used for the signal controlling that feeds back to said multistage temperature controller in preset range.
Preferably, programmable logic controller (PLC) is the M258 type programmable logic controller (PLC) of Schneider company among the utility model embodiment.
Preferably; Dc driver is respect work north the DC torque controller PWM1000 and the unit 130LCX-1 of electrical machinery plant slightly among the utility model embodiment; Perhaps said dc driver is the 815-BR-21 dc controller, the motor V730-012 that unit Sanyo produces.
Preferably, temperature controller is 3508 temperature controllers among the utility model embodiment, platinum rhodium 10 thermopairs.
Preferably, guidance panel is a contact panel among the utility model embodiment.
The utility model embodiment has adopted the center control section of programmable logic controller (PLC) as electric control system, has promoted system performance and can be so that system has flexibly integrated functionality, local control function and remote control function flexibly; PWM type high precision dc driver has partly been adopted in the utility model embodiment motion control in addition; This driver is that employing MM type servoamplifier is a core component; The H bridge of being made up of high-speed power MOSFET or IGBT device moves with bipolar PWM mode; Drive direct current generator, have high precision, high stability, high-level efficiency, high configuration dirigibility.At last, the temperature control part of the utility model embodiment divides and to have adopted the control of multistage temperature, has realized arsenide gallium monocrystal temperature controllable in process of production
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art; The accompanying drawing of required use is done to introduce simply in will describing embodiment below; Obviously, the accompanying drawing in describing below only is some embodiment of the utility model, for those of ordinary skills; Under the prerequisite of not paying creative work property, can also obtain other accompanying drawing according to these accompanying drawings.
The single system structural drawing of a kind of arsenide gallium monocrystal stove electric control system that Fig. 1 provides for the utility model embodiment;
The detailed system structural drawing of a kind of arsenide gallium monocrystal stove electric control system that Fig. 2 provides for the utility model embodiment.
Embodiment
To combine the accompanying drawing among the utility model embodiment below, the technical scheme among the utility model embodiment is carried out clear, intactly description, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the utility model protection.
Be illustrated in figure 1 as the single system structural drawing of a kind of arsenide gallium monocrystal stove electric control system that the utility model embodiment provides, be illustrated in figure 2 as the detailed system structural drawing of a kind of arsenide gallium monocrystal stove electric control system that the utility model embodiment provides.
The arsenide gallium monocrystal stove electric control system of the utility model embodiment comprises that center control section 110, motion control part 120, gas control section 130, temperature control part divide 140, test section, water route 150 and guidance panel 160.Motion control part 120, gas control section 130, temperature control part divide 140, test section, water route 150 links to each other with center control section 110 respectively with guidance panel 160.
Center control section 110 communication modules 111, programmable logic controller (PLC) 112 and input/output module 113; Programmable logic controller (PLC) 112 communicates through communication module 111 and guidance panel 160; And through input/output module 113 and motion control part 120, gas control section 130, temperature control part divide 140 and test section, water route 150 communicate, input/output module 113 is the part of programmable logic controller (PLC) 112.
An embodiment as the utility model; Programmable logic controller (PLC) 112 is the M258 type programmable logic controller (PLC) of Schneider company; This programmable logic controller (PLC) 112 is programmable logic controller (PLC)s of new generation of Schneider Electric Devices very-high performance, superpower extended capability and the super compact fuselage released, adopts this logic controller can the elevator system performance and can be so that system has flexibly integrated functionality, local control function and remote control function flexibly.
An embodiment as the utility model; Input/output module 113 can comprise digital input and output modules and analog input output module simultaneously; Wherein digital input module is the TM5SDI12D type digital quantity input module of Schneider company; The numeral output module is the TM5SDO12T type digital quantity output module of Schneider company; Analog input module is Schneider company 12 TM5SAI4L types analog quantity load module and 16 s' a TM5SAI4H type analog quantity load module, and analog output module is the TM5SAO4L type analog output module of Schneider company.After adopting multiple input/output module, the utility model embodiment only needs simple connection promptly can form different application systems, for control system increases more function.
An embodiment as the utility model can also comprise a power module, and this power module links to each other with power supply, is used to The whole control system electric energy is provided.
An embodiment as the utility model; Dc driver 122 can the DC torque controller PWM1000 and the motor 123 of electrical machinery plant be unit 130LCX-1 slightly for the north of respecting work; Perhaps dc driver 122 is the 815-BR-21 of u s company, the motor V730-012 that motor 123 is produced for Sanyo.Dc driver 122 can have a plurality of, be operated in respectively at a slow speed, fast, change down, go up under the states such as commentariess on classics, dc driver 122 also can only have one certainly, under above-mentioned state, switches respectively.
The workflow of motion control part 120 is following:
A given numerical value on guidance panel 160; Through internal storage numerical value is passed to programmable logic controller (PLC) 112 corresponding input ports; Inner at programmable logic controller (PLC) 112 through obtaining corresponding control signal according to certain operations formula and program segment; Through delivery outlet this control signal is passed to dc driver 122, this control signal goes out the result at the dc driver 122 inner sequential operations that configured through inside, and the result who draws is through the motion of transmission line control motor 123.Simultaneously; Give through guidance panel 160 and to fix the instruction of becoming a full member and rotating to, counter motion, quick rotation, slow rotation, middling speed; Process programmable logic controller (PLC) 112, dc driver 122 are controlled down and are made motor 123 carry out forward, counter motion by the instruction of setting, thereby it is moving in the arsenide gallium monocrystal growth course, to drive earthenware by lower shaft.
An embodiment as the utility model; In motor 123, can also comprise a scrambler; Divide two-way with data line with feedback signal through this scrambler; One the tunnel inputs to the corresponding interface of dc driver 122 as negative-feedback signal through the scrambler cable, makes dc driver 122 and motor 123 constitute a closed loop, and another road inputs to programmable logic controller (PLC) 112 as position signalling; If the position signalling value corresponding surpasses the maximal value of programmable logic controller (PLC) input port; Then must it be dwindled certain multiple and make it can get into programmable logic controller (PLC) 112, become rate signal do the conversion of ratio in programmable logic controller (PLC) 112 inside after, again this signal of speed is input to the numeral that touch-screen or numerical value indicator gauge carry out speed and show through a signal controlling module.
In the present embodiment; Can go into the stove solenoid valve with what open carbon monoxide, argon gas, go into furnace gases for 112 1 given signals of programmable logic controller (PLC) through guidance panel 160, simultaneously the force value through guidance panel 160 given carbon monoxide, argon gas, the flow of going into furnace gases mass flowmeter 131 and pressure controller 132.In addition, the feedback signal of mass flowmeter 131 and gas pressure regulator 132 can also feed back to programmable logic controller (PLC) 112, through after its inter-process, is input to the touch-screen of guidance panel 160, shows its flow value and force value.
As an embodiment of the utility model, gas control section 130 can also comprise vacuum meter 133, and this vacuum machine 133 is such as innovating the ZD0-53B that vacuum technique company produces for northern appearance.
Temperature control part divides 140 to comprise: connector 141 and multistage temperature controller 142, this multistage temperature controller 142 links to each other with programmable logic controller (PLC) 112 through connector 141.In addition, this temperature control part divides 140 can also comprise well heater 143, and well heater 143 links to each other with multistage temperature controller 142.In the present embodiment, multistage temperature controller 142 can for Britain company 3508 with platinum rhodium 10 thermopairs of u s company, thereby it is controllable in 0～3 ℃/minute to guarantee tiltedly to become cooling rate (1300 ℃～800 ℃).
Temperature control part divides 140 workflow following:
Give multistage temperature controller 142 input signals through programmable logic controller (PLC) 112; Signal magnitude required in this input signal and the well heater 143 is corresponding, through this signal well heater 143 is heated, and feedback signal is divided into two-way simultaneously; One the tunnel feeds back to multistage temperature controller 142 as negative-feedback signal; Make well heater 143 and multistage temperature controller 142 constitute a closed-loop path, and come the temperature of control heater, thereby the arsenide gallium monocrystal growth is in the stable thermal field through the inner pid algorithm of temperature controller; Another road feeds back to programmable logic controller (PLC) 112; Programmable logic controller (PLC) 112 carries out communication through communication module 111 and guidance panel 160, thereby is presented on the touch-screen, makes the operator can hold the growth course of whole arsenide gallium monocrystal clearly.
Test section, water route 150 comprises cooling-water temperature sensor 151, water pressure gauge 152 and water flow sensing unit 153, and cooling-water temperature sensor 151 links to each other with programmable logic controller (PLC) 112, and water pressure gauge 152 and water flow sensing unit 153 link to each other with input/output module 113.In the present embodiment, cooling-water temperature sensor 151 can be the FD-T1 of Keyemce company production, and water flow sensor 153 can be the FD-M50AY that Keyemce company produces.
Cooling-water temperature sensor 151 will measure to such an extent that signal feeds back to programmable logic controller (PLC) 112 through data line, process serial ports, and FPGA control 112 is connected with guidance panel 160 through communication module 111, and the display part of water temperature on touch-screen shows in real time.
As stated, guidance panel 160 can be a contact panel in the present embodiment, and the engineering staff can be provided with parameter, video data, watch-dog state, describe the robotization control procedure with forms such as curve or animations with it according to technological requirement.Touch-screen in the present embodiment can be divided into 5 pictures: 1, key frame comprises heter temperature demonstration, furnace chamber pressure display, vacuum demonstration, water temperature demonstration, discharge demonstration, movement velocity demonstration, system running state and alarm condition demonstration etc.2, speed system, comprise that various states in key frame show, power settings, the setting value of the control of three en-block movements are arranged, the unlatching that the carbon mono oxide mixture flow flows into and stopping to be set, the demonstration of time set.3, crystal growth, comprise that various states in key frame show, the demonstration of the crystal growth situation at each of six sections temperature place is arranged time.4, parameter setting, comprise that various states in key frame show, the setting of technological parameter is arranged, comprise the setting of setting, movement velocity and time of setting, the discharge of setting, the CO gas flow of six sections temperature at different time place.5, system alarm comprises the various states demonstrations in key frame that five big types alarm and demonstrations are arranged.
The utility model embodiment has adopted the center control section of programmable logic controller (PLC) as electric control system, has promoted system performance and can be so that system has flexibly integrated functionality, local control function and remote control function flexibly; PWM type high precision dc driver has partly been adopted in the utility model embodiment motion control in addition; This driver is that employing MM type servoamplifier is a core component; The H bridge of being made up of high-speed power MOSFET or IGBT device moves with bipolar PWM mode; Drive direct current generator, have high precision, high stability, high-level efficiency, high configuration dirigibility.At last, the temperature control part of the utility model embodiment divides and to have adopted the control of multistage temperature, has realized arsenide gallium monocrystal temperature controllable in process of production.
Above-described specific embodiment; Purpose, technical scheme and beneficial effect to the utility model have carried out further explain, it should be understood that the above is merely the specific embodiment of the utility model; And be not used in the protection domain that limits the utility model; All within the spirit and principle of the utility model, any modification of being made, be equal to replacement, improvement etc., all should be included within the protection domain of the utility model.
Claims (10)
1. arsenide gallium monocrystal stove electric control system; It is characterized in that; Said system comprises: center control section, motion control part, gas control section, temperature control part branch, test section, water route and guidance panel, and said motion control part, gas control section, temperature control part branch, test section, water route link to each other with said center control section respectively with guidance panel;
Said center control section comprises communication module and programmable logic controller (PLC); Said programmable logic controller (PLC) communicates through said communication module and said guidance panel, and communicates through its input/output module and said motion control part, gas control section, temperature control part branch and test section, water route;
Said motion control partly comprises auxiliary relay, dc driver and motor, and said auxiliary relay links to each other with said input/output module and said dc driver, and said motor links to each other with said dc driver;
Said gas control section comprises: mass flowmeter and gas pressure regulator, and said mass flowmeter links to each other with said input/output module with gas pressure regulator;
Said temperature control part branch comprises: connector and multistage temperature controller, and said multistage temperature controller links to each other with said input/output module through said connector;
Test section, said water route comprises cooling-water temperature sensor, water pressure gauge and water flow sensor, and said cooling-water temperature sensor links to each other with said input/output module, and said water pressure gauge and said water flow sensing unit link to each other with said input/output module.
2. arsenide gallium monocrystal stove electric control system as claimed in claim 1 is characterized in that said input/output module comprises digital quantity input/output module and analog quantity input/output module.
3. arsenide gallium monocrystal stove electric control system as claimed in claim 2; It is characterized in that; Digital input module is the TM5SDI12D type digital quantity input module of Schneider company; The numeral output module is the TM5SDO12T type digital quantity output module of Schneider company, and analog input module is Schneider company 12 TM5SAI4L types analog quantity load module and 16 s' a TM5SAI4H type analog quantity load module, and analog output module is the TM5SAO4L type analog output module of Schneider company.
4. arsenide gallium monocrystal stove electric control system as claimed in claim 1; It is characterized in that; Said motor also comprises a scrambler, and said scrambler is used for feedback signal is divided into two-way, and one the tunnel feeds back to said dc driver as negative-feedback signal; Constitute a closed-loop path with said dc driver, another road feeds back to said programmable logic controller (PLC).
5. arsenide gallium monocrystal stove electric control system as claimed in claim 1; It is characterized in that, also comprise well heater, said well heater links to each other with said multistage temperature controller; Said well heater is used for feedback signal is divided into two-way; One the tunnel feeds back to said multistage temperature controller as negative-feedback signal, constitutes a closed-loop path with said multistage temperature controller, and another road feeds back to said programmable logic controller (PLC).
6. like claim 4 or 5 described arsenide gallium monocrystal stove electric control systems, it is characterized in that also comprise a signal controller, said signal controller is used for the signal controlling that feeds back to said multistage temperature controller in preset range.
7. arsenide gallium monocrystal stove electric control system as claimed in claim 1 is characterized in that, said programmable logic controller (PLC) is the M258 type programmable logic controller (PLC) of Schneider company.
8. arsenide gallium monocrystal stove electric control system as claimed in claim 1; It is characterized in that; Said dc driver is respect work north the DC torque controller PWM1000 and the unit 130LCX-1 of electrical machinery plant slightly; Perhaps said dc driver is the 815-BR-21 dc driver, the motor V730-012 that unit Sanyo produces.
9. arsenide gallium monocrystal stove electric control system as claimed in claim 1 is characterized in that said temperature controller is 3508 temperature controllers, platinum rhodium 10 thermopairs.
10. arsenide gallium monocrystal stove electric control system as claimed in claim 1 is characterized in that said guidance panel is a contact panel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205344549U CN202583787U (en) | 2011-12-20 | 2011-12-20 | Electric control system for gallium arsenide single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205344549U CN202583787U (en) | 2011-12-20 | 2011-12-20 | Electric control system for gallium arsenide single crystal furnace |
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| Publication Number | Publication Date |
|---|---|
| CN202583787U true CN202583787U (en) | 2012-12-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011205344549U Expired - Fee Related CN202583787U (en) | 2011-12-20 | 2011-12-20 | Electric control system for gallium arsenide single crystal furnace |
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| CN (1) | CN202583787U (en) |
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2011
- 2011-12-20 CN CN2011205344549U patent/CN202583787U/en not_active Expired - Fee Related
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121205 Termination date: 20141220 |
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| EXPY | Termination of patent right or utility model |