CN100339513C - Electric control system of zone-melted silicon single crystal furnace - Google Patents
Electric control system of zone-melted silicon single crystal furnace Download PDFInfo
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- CN100339513C CN100339513C CNB2006100134779A CN200610013477A CN100339513C CN 100339513 C CN100339513 C CN 100339513C CN B2006100134779 A CNB2006100134779 A CN B2006100134779A CN 200610013477 A CN200610013477 A CN 200610013477A CN 100339513 C CN100339513 C CN 100339513C
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- 239000013078 crystal Substances 0.000 title claims abstract description 26
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 23
- 229910052710 silicon Inorganic materials 0.000 title claims description 23
- 239000010703 silicon Substances 0.000 title claims description 23
- 239000007789 gas Substances 0.000 claims abstract description 84
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 46
- 230000033001 locomotion Effects 0.000 claims abstract description 39
- 229910052786 argon Inorganic materials 0.000 claims abstract description 23
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 15
- 238000004891 communication Methods 0.000 claims abstract description 7
- 230000008859 change Effects 0.000 claims description 13
- 239000012535 impurity Substances 0.000 claims description 12
- 229910052757 nitrogen Inorganic materials 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 230000008901 benefit Effects 0.000 abstract description 3
- 229910001873 dinitrogen Inorganic materials 0.000 abstract 1
- 238000000034 method Methods 0.000 description 13
- 230000008569 process Effects 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
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Abstract
The present invention relates to large equipment for producing a zone silicon-melted single crystal, particularly to an electric control system of a zone silicon-melted single crystal furnace for producing a zone silicon-melted single crystal in a gas-phase doping type. The electric control system of the present invention comprises a central control part, a motor control part, a control panel and a doping-gas control part, wherein the central control part comprises a communication module and a programmable logic controller which is connected with an input/output module and an analogue quantity input/output module; the motor control part comprises a digital motion controller, an interconnecting module, a manual speed adjusting encoder, a servo driver and a servo motor; the doping-gas control part comprises a gas mass flowmeter and a doping box part, wherein the gas mass flowmeter for argon gas and nitrogen gas is used for a gas protecting part, and the control panel is in a touch screen type. The system of the present invention has the advantages of convenient operation, high control accuracy and high reliability, so that the system meets the technological requirements of diversified products.
Description
Technical field
The present invention relates to a kind of main equipment that is used for the production area silicon crystal, particularly a kind of electric control system of zone-melted silicon single crystal furnace that is used to produce vapor doping zone-melted silicon single crystal.
Technical background
In recent years, because the develop rapidly of electron trade, the diversification of product demand, its the traditional function of equipment that is used for the production area silicon crystal can not satisfy the processing requirement of diversification product, especially the electric control system of zone-melted silicon single crystal stove mainly adopts the control method of rly., what this control method adopted is the fixed wiring mode, in case change to some extent in the production process, must redesign circuit is connected and installed, if therefore transform quite difficulty on the basis of original equipment, and it can not be along with product changes the change of technology in process of production, and the control accuracy and the poor reliability of its electric machine control part can not satisfy processing requirement.In addition, must add the impurity gas control section in order to draw vapor doping zone-melted silicon single crystal, therefore, the electric control system of developing the zone melting single-crystal stove that satisfies diversification product processing requirement is imperative.
Summary of the invention
Problem in view of above-mentioned prior art exists the objective of the invention is to: in order to satisfy the processing requirement of diversification product, improve the precision and the reliability of equipment, to realize automatization control, the spy provides a kind of electric control system of zone-melted silicon single crystal furnace.That this system has is easy to operate, control accuracy and reliability advantages of higher, thereby satisfies the processing requirement of diversification product.
The technical scheme that the present invention takes is: a kind of electric control system of zone-melted silicon single crystal furnace is characterized in that: comprise center control section, electric machine control part, control panel and impurity gas control section; The programmable logic controller that described center control section includes the communication module device and links to each other with input/output module, analog quantity input/output module; Described motor controling part branch comprises digital motion controller, interconnecting modules, manual governing encoder, servo-driver and servomotor; Described impurity gas control section comprises the argon gas that gas shield partly uses, the mass-flow gas meter and the doping case part of nitrogen; Described control panel is the touch-screen type control panel, and wherein, touch screen control panel is connected with the communication module of programmable logic controller; Programmable logic controller is connected with digital motion controller by serial ports; The input/output module of programmable logic controller partly is connected with argon gas, the mass-flow gas meter of nitrogen, the doping case of two interconnecting modules and described doping control section respectively by relief relay; Described manual governing encoder is connected with the X-E axle socket of digital motion controller; Two interconnecting modules are connected with E-H axle socket with the X-W axle of digital motion controller respectively, described servomotor comprise rotating motor, down rotating motor, go up speed motor, speed motor and coil mobile motor and connect servo-driver respectively down, and change, change down, go up speed, following speed and coil socket by servo-driver and going up of two interconnecting modules and be connected.
Touch-screen has played very crucial effect as this operation of equipment control section.Its inside function is powerful, can show a plurality of controls interface under same screen, according to the operated action of program complete operation person that designs in advance.The touch-screen of zone-melted silicon single crystal stove is divided into 4 interfaces: 1, key frame.Comprise: Su control and display part up and down; The conversion switch and the demonstration of voltage, electric current, power; Switch that coil moves and display part; Hydraulic-pressure sleeve moves up and down switch; The switch of timer and demonstration or the like; 2, be provided with.Comprise: Su quick travel up and down; The time of timer is provided with; And the quick travel of coil or the like.3, gas vacuum.Comprise: the demonstration of vacuum pump switch and vacuum tightness; Argon gas is fast and at a slow speed gas-filled switching tube and the argon gas setting and the demonstration of flow of aerating air at a slow speed: switch of vent valve or the like up and down.4, gas doping: the doping airshed is set; Argon flow amount is set; Go into the stove flow set; Doping gas system pressure sets and the unlatching of each magnetic valve, close.And touch-screen can be used with programmable logic controller, thus saved greatly because needed rly. and winding displacement when self-locking or interlocking, and saved very big space.
Programmable logic controller has played the effect of forming a connecting link as the center control section of this equipment.When the operator sends given signal and is transferred in the programmable logic controller on touch-screen, programmable logic controller is transferred to the function unit execution by relief relay with control signal again according to its outside relief relay of the time variable control of having finished.And can be according to the different input of selecting for use, output module is accepted the signal of different types of signal source, and can be by changing the ratio that its internal processes changes input and output.The programmable logic controller biggest advantage is and can be used with multiple components and parts, for example touch-screen, digital motion controller etc.
The electric machine control part mainly is the control method that has adopted manual governing encoder, digital motion controller, motor servo driver and servomotor to combine with programmable logic controller.Its center control section is exactly a digital motion controller, it is one of now more advanced in the world independent control, it has strong functions, can control a plurality of various control such as stroke, speed, acceleration, retarded velocity, time-delay by program simultaneously.For example: in growth vapor doping zone-melted silicon single crystal process,, can finish by changing its internal processes to aspects such as following control aspect, coil of becoming a full member the counter-rotating change move.Add with motor servo driver and servomotor and be used, make its accuracy and stability also obtain guarantee.
Doping case part mainly is custom-designed in order to grow the gas phase doping monocrystalline, its inside comprises mass-flow gas meter, gas pressure regulator and magnetic valve, it mainly acts on exactly impurity gas is mixed mutually with argon gas, open corresponding solenoid valve for given signal of programmable logic controller by the operator by touch-screen in due course, after by pressure controller unnecessary gas being discharged again, the impurity gas of required flow is entered furnace chamber, growth gas phase doping monocrystalline.Its control mainly is after setting the flow of each mass-flow gas meter by touch-screen, control signal with each mass-flow gas meter, in programmable logic controller, be converted to the input signal of mass flowmeter by the address that configures in advance with programmable logic controller, input to mass flowmeter, the size of pilot-gas flow.Feed back to programmable logic controller by mass flowmeter again,, be input to the digital display portion of touch-screen, show its flow through after the processing of its inside.Make it in control, reach accurate to vapor doping zone-melted silicon single crystal resistivity.
Description of drawings
Fig. 1 is a functional block diagram of the present invention and as Figure of abstract.
Fig. 2 is the inner functional block diagram of doping case among Fig. 1.
Embodiment:
With reference to Fig. 1,2, described doping case partly comprises argon gas, the gas that mixes, go into mass-flow gas meter, pressure controller and magnetic valve that stove uses; Wherein magnetic valve is connected with the input/output module of programmable logic controller by relief relay respectively; Argon gas, the gas that mixes, go into the mass-flow gas meter pressure-controlling that stove uses and be connected with the input/output module of programmable logic controller.
Described programmable logic controller is the C200HG type programmable logic controller that Omron Corp produces, its input, output point are ID216 type load module and the OD219 type output module that Omron Corp produces, and the analog quantity load module of employing and analog output module are AD003 type analog quantity load module and the DA003 type analog output module that Omron Corp produces.
The DMC2280 type digital motion controller that described digital motion controller is produced for GALIL company, motor servo driver is that a day intrinsic safety river company produces SGDM08ADA type motor servo driver, commentaries on classics is gone up in its control, the following servomotor that changes, goes up speed, following fast four axles is the SGMAH-08AAA41 type AC servo motor that day intrinsic safety river company produces, and the servomotor that control coil moves is day SGMAH-08A1A41 type AC servo motor of intrinsic safety river company production.
The mass-flow gas meter that described gas shield part nitrogen, argon gas use is 5850 types (nitrogen), 5851 types (argon gas) mass-flow gas meter that BROOKS company produces; Doping gas, the argon gas of doping case part and go into mass-flow gas meter and the pressure controller thereof that stove uses and be 5850 type mass-flow gas meters (argon gas) and the 5866 type pressure controllers (argon gas) that BROOKS company produces.
The electric control system of zone-melted silicon single crystal furnace flow process is divided into the two parts:
Center control section flow process is: the operator sends instruction by touch-screen, arrives communication module through data line, again through sending to programmable logic controller after the change of communication module to signal.Again by programmable logic controller according to the prior program that edits, portion carries out dividing after the computing three tunnel outputs within it.The first via: the control signal as motor is input to digital motion controller, and the motion of motor is controlled.The second the tunnel:, finish the control of the whole rly. part of single crystal growing furnace by output point control relief relay according to the input signal of each input point.Third Road:, the set(ting)value of the mass-flow gas meter outside mass-flow gas meter in the doping case and the doping case is controlled by analog quantity (voltage) output unit output voltage signal.The feedback signal of the feedback signal of mass-flow gas meter, the feedback signal of vacuumometer, voltage of supply, and a plurality of feedback signals such as signal of supply current feedback signal after by the current/voltage-converted module all be to feed back in the programmable logic controller through analog quantity (voltage) input block, through after the Signal Processing, feed back to the display part of touch-screen, show situation about being controlled.
Motor controling part branch flow process is: the manual governing encoder by each axle (go up to change, change down, go up speed, speed, coil move down) is imported given signal through data line to digital motion controller, the operation result of the program that process digital motion controller inside has configured, be connected with the respective socket of interconnecting modules by data line, use respective socket that data line passes through interconnecting modules respectively to (go up change, change down, go up speed, speed, coil move down) each servo-driver input control signal more respectively, control each every motion.With data line feedback signal is divided into two-way respectively by the encoder that itself carries on each servomotor again, feed back in each different electric machine control system, one the tunnel inputs on the respective socket of motor servo driver as reverse feedback by the encoder cable, make itself and motor form a closed loop, make motor running speed accurate and stable aspect on more safe and reliable.Another road inputs to digital motion controller as position signal, be used to control the stroke of servomotor and the time of time-delay, input to programmable logic controller by digital motion controller again, after the conversion of ratio is done by portion within it, again signal is input to the control touch-screen and carries out the numeral demonstration, make the operator can be clearly seen that the movement velocity of motor, and make control corresponding.
In addition, the wiring of each contact of pilot contactor of controlling of programmable logic controller by line bank convert to behind the data line be connected with the respective socket of interconnecting modules the direction of motion of controlling each spindle motor and fast with at a slow speed switching.The operator can pass through the given programmable logic controller (PLC) controls signal of touch-screen easily, finishes above action.
The main application of electric control system of zone-melted silicon single crystal furnace in the zone-melted vapor doping silicon monocrystal growth:
By under change hands moving speed governing encoder and import given signal to digital motion controller through data line, the operation result of the program that process digital motion controller inside has configured, be connected with the respective socket of interconnecting modules by data line, the servo-driver input control signal that the respective socket of using data line to pass through interconnecting modules is more respectively changeed downwards respectively, control is the motion of rotating motor down.With data line feedback signal is divided into two-way respectively by changeing the encoder that itself carries on the servomotor down again, the one tunnel inputs to the respective socket of motor servo driver as reverse feedback by the encoder cable, makes itself and motor form a closed loop.Another road inputs to digital motion controller as position signal, be used to control the stroke of servomotor and the time of time-delay, input to programmable logic controller by digital motion controller again, after the conversion of ratio is done by portion within it, again signal is input to touch-screen and descends the numeral of rotary speed to show.Give to fix by touch-screen simultaneously and become a full member to, heterodromous instruction, and forward, the setting of heterodromous time, control down rotating motor through programmable logic controller, digital motion controller, servo-driver and carry out forward, reversing motion, thereby drive monocrystalline by lower shaft and carry out forward, reversing motion in that the zone-melted vapor doping silicon monocrystal growth is little according to the time of setting by the time of setting.
2. import given signal through data line to digital motion controller by heater coil manual governing encoder, the operation result of the program that process digital motion controller inside has configured, be connected with the respective socket of interconnecting modules by data line, use respective socket that data line passes through interconnecting modules respectively to the servo-driver input control signal of heater coil more respectively, control is the motion of rotating motor down.With data line feedback signal is divided into two-way respectively by changeing the encoder that itself carries on the servomotor down again, the one tunnel inputs to the respective socket of motor servo driver as reverse feedback by the encoder cable, makes itself and motor form a closed loop.Another road inputs to digital motion controller as position signal, be used to control the stroke of servomotor and the time of time-delay, input to programmable logic controller by digital motion controller again, after the conversion of ratio is done by portion, again signal is input to the numeral demonstration that touch-screen carries out heater coil miles of relative movement within it.
3. doping case part is very crucial for the growth of vapor doping zone-melted silicon single crystal, be to set impurity gas, argon gas, go into the flow of furnace gases mass flowmeter and the pressure of pressure controller by touch-screen, these control signals are converted to the input signal of mass flowmeter and pressure controller in programmable logic controller by the address that configures in advance with programmable logic controller, input to mass rate and take into account pressure controller, the pressure of the size of pilot-gas flow and doping case system; Open impurity gas, argon gas, go into the stove magnetic valve for given signal of programmable logic controller by touch-screen simultaneously, at this moment, impurity gas, argon gas, go into the furnace gases mass flowmeter and control each flow according to given flow set, pressure controller is set the gaseous tension of controlled doping case system according to given pressure, and with unnecessary gas discharge system, mixed impurity gas enters furnace chamber by the impurity gas mass flowmeter according to set(ting)value, the growth vapor doping zone-melted silicon single crystal.Its control mainly is to feed back to programmable logic controller by mass flowmeter again by touch-screen, through after the processing of its inside, is input to the digital display portion of touch-screen, shows its flow.Make it in control, reach accurate to the zone-melted vapor doping single crystal silicon resistivity.
Claims (4)
1. an electric control system of zone-melted silicon single crystal furnace is characterized in that: comprise center control section, electric machine control part, control panel and impurity gas control section; Described center control section comprises the programmable logic controller that contains communication module and link to each other with input/output module, analog quantity input/output module; Described motor controling part branch comprises digital motion controller, interconnecting modules, manual governing encoder, servo-driver and servomotor; Described impurity gas control section comprises the argon gas that gas shield partly uses, the mass-flow gas meter and the doping case part of nitrogen; Described control panel is the touch-screen type control panel, and wherein, touch screen control panel is connected with the communication module of programmable logic controller; Programmable logic controller is connected with digital motion controller by serial ports; The input/output module of programmable logic controller partly is connected with argon gas, the mass-flow gas meter of nitrogen, the doping case of two interconnecting modules and described doping control section respectively by relief relay; Described manual governing encoder is connected with the X-E axle socket of digital motion controller; Two interconnecting modules are connected with E-H axle socket with the X-W axle of digital motion controller respectively, described servomotor comprise rotating motor, down rotating motor, go up speed motor, speed motor and coil mobile motor and connect servo-driver respectively down, and change, change down, go up speed, following speed and coil socket by servo-driver and going up of two interconnecting modules and be connected; Described doping case partly comprises argon gas, the gas that mixes, go into mass-flow gas meter, pressure controller and magnetic valve that stove uses; Wherein magnetic valve is connected with the input/output module of programmable logic controller by relief relay respectively; Argon gas, the gas that mixes, go into mass-flow gas meter, the pressure controller that stove uses and be connected with the input/output module of programmable logic controller.
2. electric control system of zone-melted silicon single crystal furnace as claimed in claim 1, it is characterized in that: described programmable logic controller is the C200HG type programmable logic controller that Omron Corp produces, its input, output point are ID216 type load module and the OD219 type output module that Omron Corp produces, and the analog quantity load module of employing and analog output module are AD003 type analog quantity load module and the DA003 type analog output module that Omron Corp produces.
3. electric control system of zone-melted silicon single crystal furnace as claimed in claim 1, it is characterized in that: the DMC2280 type digital motion controller that described digital motion controller is produced for GALIL company, motor servo driver is that a day intrinsic safety river company produces SGDM08ADA type motor servo driver, commentaries on classics is gone up in its control, the following servomotor that changes, goes up speed, following fast four axles is the SGMAH-08AAA41 type AC servo motor that day intrinsic safety river company produces, and the servomotor that control coil moves is day SGMAH-08A1A41 type AC servo motor of intrinsic safety river company production.
4. electric control system of zone-melted silicon single crystal furnace as claimed in claim 1 is characterized in that: the mass-flow gas meter that the nitrogen of described gas shield part, argon gas use is 5850 types, the 5851 type mass-flow gas meters that BROOKS company produces; Doping gas, the argon gas of doping case part and go into mass-flow gas meter and the pressure controller thereof that stove uses and be 5850 type mass-flow gas meters and the 5866 type pressure controllers that BROOKS company produces.
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| CNB2006100134779A CN100339513C (en) | 2006-04-19 | 2006-04-19 | Electric control system of zone-melted silicon single crystal furnace |
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| CNB2006100134779A CN100339513C (en) | 2006-04-19 | 2006-04-19 | Electric control system of zone-melted silicon single crystal furnace |
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| CN100339513C true CN100339513C (en) | 2007-09-26 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101728232B (en) * | 2008-10-22 | 2012-07-04 | 北京中科信电子装备有限公司 | Control method for preventing process gas from mixing from hardware |
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| CN102912443B (en) * | 2012-10-17 | 2016-02-17 | 北京七星华创电子股份有限公司 | Silicon carbide crystal growth furnace control system |
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Address after: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Country or region after: China Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. Country or region before: China Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |