CN107214683A - A kind of arm-and-hand system for black silicon etching cleaning machine - Google Patents
A kind of arm-and-hand system for black silicon etching cleaning machine Download PDFInfo
- Publication number
- CN107214683A CN107214683A CN201710574258.6A CN201710574258A CN107214683A CN 107214683 A CN107214683 A CN 107214683A CN 201710574258 A CN201710574258 A CN 201710574258A CN 107214683 A CN107214683 A CN 107214683A
- Authority
- CN
- China
- Prior art keywords
- arm
- pair
- cleaning machine
- connecting seat
- traversing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J5/00—Manipulators mounted on wheels or on carriages
- B25J5/02—Manipulators mounted on wheels or on carriages travelling along a guideway
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0084—Programme-controlled manipulators comprising a plurality of manipulators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/14—Programme-controlled manipulators characterised by positioning means for manipulator elements fluid
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The invention discloses a kind of arm-and-hand system for black silicon etching cleaning machine, the present invention realizes the simultaneously operating of multiple silicon chip flower baskets in making herbs into wool cleaning process, coordinate corresponding multistation, the production efficiency of silicon wafer wool making can exponentially be improved, the producer can be according to output demand, the quantity of change lifting arm, correspondence station are set, manipulator control program, to select appropriate production efficiency；Structure is novel and efficient, the transverse shifting for realizing manipulator is connected by slide rail, the longitudinal direction lifting of manipulator is realized by Rodless cylinder, it ensure that the gaily decorated basket equipped with silicon chip enters in corresponding station one by one in the presence of manipulator and carry out the processes such as corresponding alkali cleaning, pickling, rinsing, overhaul difficulty small；The reference movement of single mechanical arm and unit plate is easy to the observation of the producer, and flexibly succinct structure makes whole manipulator be easy to PLC controls, therefore the industrial value in terms of automated production is higher.
Description
Technical field
It is more particularly to a kind of to be used for black silicon the present invention relates to a kind of arm-and-hand system field for black silicon etching cleaning machine
The arm-and-hand system of etching cleaning machine.
Background technology
Etching cleaning machine is transported by shifting mechanical arm, through going the techniques such as damage, making herbs into wool, rinsing, neutralization, rinsing to constitute one
The cleaning device of bar full automatic continuous working, mainly by main body, technology groove, shifting mechanical arm, pipe-line system, electric control system
Constituted Deng part.When equipment is run, the gaily decorated basket for filling silicon chip is placed on loading bay, sent the gaily decorated basket successively by shifting mechanical arm
Science and engineering position everywhere is arrived, silicon chip is carried out to go damage layer, making herbs into wool burn into clean, then silicon chip is moved on on discharge pedestal by manipulator, by
Operator takes out the gaily decorated basket, carries out the processing of next step.
In actual production, arm-and-hand system both can with horizontal sliding, also can oscilaltion, therefore for robot manipulator structure
Degree of flexibility and robustness.Also, together enter station in multiple gailys decorated basket, it is existing when carrying out many gaily decorated basket peanut production synchronizations
The arm-and-hand system of technology is difficult to meet above-mentioned requirements because of complicated sluggishness.
The content of the invention
In order to overcome the above-mentioned deficiencies of the prior art, the invention provides a kind of manipulator for black silicon etching cleaning machine
System, can greatly improve the production efficiency of silicon wafer wool making.
To reach above-mentioned purpose, the technical solution adopted for the present invention to solve the technical problems is：One kind is used for black silicon system
The arm-and-hand system of suede cleaning machine, including traversing rail gantry and lifting arm, the traversing rail gantry include some transversely arranged lists
First plate, some unit plates are highly consistent and adjacent spacing is equal, and upper and lower ends be fixedly connected with it is laterally long a pair
Rail, the lifting arm includes being sheathed with transverse arm, elevating lever and the traversing connecting seat being from top to bottom sequentially connected, the transverse arm
A pair of suspension members for hanging silicon chip flower basket, the traversing connecting seat is sticked in a pair of horizontal long rails and is fixed on traversing rail gantry
Side, the width of the traversing connecting seat is equal to the width of unit plate, and the end face of the traversing connecting seat is provided with a pair without bar
Cylinder, is equipped with the sliding block that can be slid up and down, sliding block is fixedly connected with elevating lever described in a pair in the middle part of Rodless cylinder described in a pair
Bottom, the number of the lifting arm not less than 3 and adjacent lifting arm spacing and the spacing phase of adjacent cells plate
Bottom Deng, the traversing connecting seat is provided with laterally driven connector.
Preferably, the unit plate is provided with a pair of square through holes.
Preferably, the suspension member is provided with a pair of hooks in the same direction in forked and bottom.
Preferably, the ratio between the adjacent spacing of the unit plate and local width are 1：1~2:1.
Preferably, the length difference of the traversing connecting seat and unit plate is more than 10cm.
Due to the utilization of above-mentioned technical proposal, the present invention has following beneficial effect compared with prior art：
1. realizing the simultaneously operating of multiple silicon chip flower baskets in making herbs into wool cleaning process, coordinate corresponding multistation, can be exponentially
Improve silicon wafer wool making production efficiency, the producer can according to output demand, change lifting arm quantity, correspondence station set,
Manipulator control program, to select appropriate production efficiency；
2. structure is novel and efficient, the transverse shifting for realizing manipulator is connected by slide rail, manipulator is realized by Rodless cylinder
Longitudinal direction lifting, it is ensured that the gaily decorated basket equipped with silicon chip enter in the presence of the manipulator in corresponding station one by one carry out it is corresponding
The processes such as alkali cleaning, pickling, rinsing, overhaul difficulty small；
3. the reference movement of single mechanical arm and unit plate is easy to the observation of the producer, and flexibly succinct structure makes entirely
Manipulator is easy to PLC controls, therefore the industrial value in terms of automated production is higher.
Brief description of the drawings
Fig. 1 is the structural representation of the present embodiment.
Fig. 2 is the stereogram of mechanical arm in the present embodiment.
In figure：1st, traversing rail gantry；2nd, arm is lifted；3rd, unit plate；4th, horizontal long rail；5th, transverse arm；6th, elevating lever；7th, it is horizontal
Move connecting seat；8th, suspension member；9th, Rodless cylinder；10th, sliding block；11st, laterally driven connector；12nd, square through hole；13rd, link up with.
Embodiment
With reference to specific embodiment, present disclosure is described in further detail：
As shown in figure 1, the present embodiment is the arm-and-hand system applied to black silicon etching cleaning machine, including traversing rail gantry 1 and lifting
Arm 2, traversing rail gantry 1 includes some transversely arranged unit plates 3, and some unit plates 3 are highly consistent and adjacent spacing phase
Deng, and upper and lower ends are fixedly connected with a pair of laterally long rails 4, lifting arm 2 includes transverse arm 5, the liter being from top to bottom sequentially connected
Drop and a pair of suspension members 8 for hanging silicon chip flower basket are sheathed with bar 6 and traversing connecting seat 7, transverse arm 5.
With reference to Fig. 1 and Fig. 2, traversing connecting seat 7 is sticked in a pair of horizontal long rails 4 and is fixed on the traversing side of rail gantry 1, horizontal
The width for moving connecting seat 7 is equal to the width of unit plate 3, and the end face of traversing connecting seat 7 is provided with a pair of Rodless cylinders 9, a pair of nothings
The middle part of bar cylinder 9 is equipped with the sliding block 10 that can be slid up and down, and a pair of sliding blocks 10 are fixedly connected with the bottom of elevating lever 6, lift hand
The number of arm 2 is not less than 3 and the adjacent spacing for lifting arm 2 is equal with the spacing of adjacent cells plate 3, traversing connecting seat 7
Bottom be provided with laterally driven connector 11.
The present invention realizes the simultaneously operating of multiple silicon chip flower baskets in making herbs into wool cleaning process, coordinates corresponding multistation,
The production efficiency of silicon wafer wool making can exponentially be improved, the producer according to output demand, can change the quantity, correspondingly of lifting arm 2
Station is set, manipulator control program, to select appropriate production efficiency；Structure is novel and efficient, passes through slide rail and connects realization
The transverse shifting of manipulator, the longitudinal direction for realizing manipulator by Rodless cylinder 9 is lifted, it is ensured that the gaily decorated basket equipped with silicon chip is in machinery
Enter in the presence of hand in corresponding station one by one and carry out the processes such as corresponding alkali cleaning, pickling, rinsing, overhaul difficulty small；It is single
The reference movement of mechanical arm and unit plate 3 is easy to the observation of the producer, and flexibly succinct structure makes whole manipulator just
In PLC controls, therefore the industrial value in terms of automated production is higher.
The above embodiments merely illustrate the technical concept and features of the present invention, and its object is to allow person skilled in the art
Scholar can understand present disclosure and be carried out, and it is not intended to limit the scope of the present invention, all according to the present invention
The equivalent change or modification that Spirit Essence is made, should all cover within the scope of the present invention.
Claims (5)
1. a kind of arm-and-hand system for black silicon etching cleaning machine, it is characterised in that：Including traversing rail gantry (1) and lifting arm
(2), the traversing rail gantry (1) includes some transversely arranged unit plates (3), and some unit plates (3) are highly consistent
And adjacent spacing is equal, and upper and lower ends are fixedly connected with a pair of laterally long rails (4), and the lifting arm (2) is included by up to
Under the transverse arm (5), elevating lever (6) and the traversing connecting seat (7) that are sequentially connected, being sheathed with a pair on the transverse arm (5) is used to hang
The suspension member (8) of silicon chip flower basket, the traversing connecting seat (7) is sticked in a pair of horizontal long rails (4) and is fixed on traversing rail gantry (1)
Side, the width of the traversing connecting seat (7) is equal to the width of unit plate (3), and the end face of the traversing connecting seat (7) is provided with
The sliding block (10) that can be slid up and down is equipped with the middle part of a pair of Rodless cylinders (9), Rodless cylinder described in a pair (9), described in a pair
Sliding block (10) is fixedly connected with the bottom of elevating lever (6), and the number of the lifting arm (2) is not less than 3 and adjacent lifting arm
(2) spacing is equal with the spacing of adjacent cells plate (3), and the bottom of the traversing connecting seat (7) is provided with laterally driven connection
Part (11).
2. a kind of arm-and-hand system for black silicon etching cleaning machine according to claim 1, it is characterised in that：The list
First plate (3) is provided with a pair of square through holes (12).
3. a kind of arm-and-hand system for black silicon etching cleaning machine according to claim 1, it is characterised in that：It is described to hang
Part (8) is in forked and bottom provided with a pair of hooks in the same direction (13).
4. a kind of arm-and-hand system for black silicon etching cleaning machine according to claim 1, it is characterised in that：The list
The ratio between adjacent spacing and local width of first plate (3) are 1:1~2:1.
5. a kind of arm-and-hand system for black silicon etching cleaning machine according to claim 1, it is characterised in that：The horizontal stroke
The length difference for moving connecting seat (7) and unit plate (3) is more than 10cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710574258.6A CN107214683A (en) | 2017-07-14 | 2017-07-14 | A kind of arm-and-hand system for black silicon etching cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710574258.6A CN107214683A (en) | 2017-07-14 | 2017-07-14 | A kind of arm-and-hand system for black silicon etching cleaning machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107214683A true CN107214683A (en) | 2017-09-29 |
Family
ID=59953374
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710574258.6A Pending CN107214683A (en) | 2017-07-14 | 2017-07-14 | A kind of arm-and-hand system for black silicon etching cleaning machine |
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|---|---|
| CN (1) | CN107214683A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07214013A (en) * | 1994-02-04 | 1995-08-15 | Toyama Kikai Kk | Washing device |
| JP2002159927A (en) * | 2000-11-27 | 2002-06-04 | Ishii Hyoki Corp | Device for cleaning substrate |
| CN201534155U (en) * | 2009-07-02 | 2010-07-28 | 宜昌英汉超声电气有限公司 | Washing machine utilizing mechanical arms to convey parts |
| CN204108167U (en) * | 2014-09-10 | 2015-01-21 | 沈阳众拓机器人设备有限公司 | Press multistation line punching press material moving machine device people and press multistation line punching press carrying production line |
| CN204746968U (en) * | 2015-09-09 | 2015-11-11 | 金华冠华水晶有限公司 | Water bores silver -plated pretreatment belt cleaning device |
-
2017
- 2017-07-14 CN CN201710574258.6A patent/CN107214683A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07214013A (en) * | 1994-02-04 | 1995-08-15 | Toyama Kikai Kk | Washing device |
| JP2002159927A (en) * | 2000-11-27 | 2002-06-04 | Ishii Hyoki Corp | Device for cleaning substrate |
| CN201534155U (en) * | 2009-07-02 | 2010-07-28 | 宜昌英汉超声电气有限公司 | Washing machine utilizing mechanical arms to convey parts |
| CN204108167U (en) * | 2014-09-10 | 2015-01-21 | 沈阳众拓机器人设备有限公司 | Press multistation line punching press material moving machine device people and press multistation line punching press carrying production line |
| CN204746968U (en) * | 2015-09-09 | 2015-11-11 | 金华冠华水晶有限公司 | Water bores silver -plated pretreatment belt cleaning device |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: No.106, Xixian Road, Xinwu District, Wuxi City, Jiangsu Province Applicant after: Wuxi kunsheng Intelligent Equipment Co., Ltd Address before: 214000 No. 30 Wanquan Road, Xishan District, Jiangsu, Wuxi Applicant before: WUXI KUNSHENG TECHNOLOGY Co.,Ltd. |
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| CB02 | Change of applicant information | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170929 |
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| RJ01 | Rejection of invention patent application after publication |