CN107204810A - A kind of optical fiber telecommunications system - Google Patents
A kind of optical fiber telecommunications system Download PDFInfo
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- 238000004891 communication Methods 0.000 claims description 39
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- 229910052751 metal Inorganic materials 0.000 description 2
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
- H04B10/501—Structural aspects
- H04B10/503—Laser transmitters
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/0004—Devices characterised by their operation
- H01L33/0008—Devices characterised by their operation having p-n or hi-lo junctions
- H01L33/0012—Devices characterised by their operation having p-n or hi-lo junctions p-i-n devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/34—Materials of the light emitting region containing only elements of Group IV of the Periodic Table
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/07—Arrangements for monitoring or testing transmission systems; Arrangements for fault measurement of transmission systems
- H04B10/075—Arrangements for monitoring or testing transmission systems; Arrangements for fault measurement of transmission systems using an in-service signal
- H04B10/079—Arrangements for monitoring or testing transmission systems; Arrangements for fault measurement of transmission systems using an in-service signal using measurements of the data signal
- H04B10/0799—Monitoring line transmitter or line receiver equipment
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
- H04B10/516—Details of coding or modulation
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- Computer Networks & Wireless Communication (AREA)
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Abstract
The present invention relates to a kind of optical fiber telecommunications system, including：Sense light signal transmitter, optical sender, wave multiplexer, circulator, sensing optical signal receiving converter, data receiver analyzer and optical fiber；Sensing light signal transmitter is electrically connected to wave multiplexer to send sensing optical signal to wave multiplexer；Optical sender is electrically connected to wave multiplexer to send the optical signal of generation to wave multiplexer；Wave multiplexer electrically connects circulator and sent so that sensing optical signal and optical signal are carried out into formation multiplex signal after multiplex processing to circulator；Circulator is electrically connected to optical fiber and the sensing optical signal of return is scattered in optical fiber so that multiplex signal is sent to optical fiber and receiving；Sensing optical signal receiving converter is electrically connected to circulator to receive the sensing optical signal of scattering return and be converted into electric signal；Data receiver analyzer is electrically connected to sensing optical signal receiving converter to receive electric signal and dissection process.
Description
Technical Field
The invention belongs to the technical field of optical fiber communication, and particularly relates to an optical fiber communication system.
Background
An optical fiber communication system is a communication system in which light is used as a carrier, and information is transmitted by light through photoelectric conversion using an extremely fine optical fiber made of glass with extremely high purity as a transmission medium. With the rapid development of the internet business and the communication industry, informatization brings great promotion to the development of world productivity and human society. Optical fiber communication is one of the main technical pillars for informatization, and is certainly becoming the most important strategic industry in the 21 st century.
At present, the most basic optical fiber communication system consists of a data source, an optical transmitter, an optical channel and an optical receiver. In a conventional optical transmitter, a semiconductor Laser (LD) is used as a light source device, and when the light source is operated for too long time or at too high temperature, the output power is reduced, which results in unstable output optical signals.
Disclosure of Invention
In order to solve the above technical problem, the present invention provides an optical fiber communication system.
An embodiment of the present invention provides an optical fiber communication system, including:
the device comprises a sensing optical signal transmitter, an optical transmitter, a wave combiner, a circulator, a sensing optical signal receiving converter, a data receiving analyzer and an optical fiber; wherein,
the sensing optical signal transmitter is electrically connected to the combiner to transmit the sensing optical signal to the combiner;
the optical transmitter is electrically connected to the combiner to transmit the generated optical signal to the combiner;
the wave combiner is electrically connected with the circulator so as to combine the sensing optical signal and the optical signal to form a combined signal and send the combined signal to the circulator;
the circulator is electrically connected to the optical fiber to send the combined wave signal to the optical fiber and receive the sensing optical signal scattered and returned in the optical fiber;
a sensing optical signal receiving converter is electrically connected to the circulator to receive the scattering return sensing optical signal and convert the scattering return sensing optical signal into an electric signal;
the data receiving analyzer is electrically connected with the sensing optical signal receiving converter to receive the electric signal and analyze and process the electric signal.
In one embodiment of the invention, the sensing optical signal transmitter comprises a laser transmitter and an optical driver, the sensing optical signal receiving converter comprises an optical splitting filter and an optical-to-electrical converter, and the data receiving analyzer comprises a data receiver and a data analyzer.
In one embodiment of the invention, the laser transmitter generates a laser signal having a wavelength of 1064 nm.
In one embodiment of the present invention, the optical splitting filter is used for extracting a scattering spectrum of the sensing optical signal scattered and returned in the optical fiber.
In one embodiment of the invention, the data parser comprises a communication interface for connecting the parsed data with the terminal device through the communication interface.
In one embodiment of the invention, the optical transmitter comprises:
an input circuit for performing scrambling and encoding operations on an input electrical signal;
the modulation circuit is electrically connected with the input circuit and is used for modulating the scrambling codes and the coded electric signals to form modulation signals;
and the light source module is electrically connected with the modulation circuit and used for driving the light source module according to the modulation signal and generating an optical signal.
In one embodiment of the invention, the device further comprises a light monitoring module and an alarm output circuit; wherein,
the optical monitoring module is used for detecting the optical signal output by the light source module, and the alarm output circuit is electrically connected with the optical monitoring module and is used for detecting and alarming the working state of the light source module.
In one embodiment of the present invention, the light source module includes a light emitting diode, a lead wire, and a lens; the lead is used for connecting the positive pin and the negative pin of the light emitting diode with the input end of the light source module; the lens is arranged on the light emitting surface of the light emitting diode and used for converging and transmitting the optical signal.
In one embodiment of the invention, the light emitting diode is a longitudinal pingee led; wherein the vertical PinGeLED comprises:
an N-type Si substrate;
the intrinsic Ge layer is stacked on the N-type Si substrate;
a P-type Si layer stacked on the intrinsic Ge layer;
a positive electrode prepared on the P-type Si layer;
and the negative electrode is prepared on the N-type Si substrate.
In one embodiment of the present invention, the light source transmitted by the light emitting diode has a wavelength of 1550 nm.
Compared with the prior art, the invention has the following beneficial effects:
1) the longitudinal PinGeeLED adopted by the invention has the advantages of high Ge epitaxial layer crystal quality and low Ge epitaxial layer dislocation density, thereby further improving the luminous efficiency of the light-emitting diode;
2) the optical fiber communication system provided by the invention realizes communication and sensing in the same optical fiber, saves optical fiber resources and greatly reduces production cost; the system has high integration level, can highly integrate the communication and sensing devices, reduces the complexity of the system, and is convenient to install in maintenance in daily life.
Drawings
The following detailed description of embodiments of the invention will be made with reference to the accompanying drawings.
Fig. 1 is a schematic structural diagram of an optical fiber communication system according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of an optical transmitter according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of an input circuit of an optical transmitter according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of an optical source module of an optical transmitter according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of a light emitting diode for a light source module of an optical transmitter according to an embodiment of the present invention;
fig. 6 is a schematic layer structure diagram of an intrinsic Ge layer of a light emitting diode according to an embodiment of the present invention;
fig. 7a to 7j are schematic diagrams illustrating a manufacturing process of a light emitting diode for a light source module of an optical transmitter according to an embodiment of the present invention;
FIG. 8 is a schematic view of an LRC process according to an embodiment of the present invention;
fig. 9 is a schematic structural diagram of another light emitting diode for an optical source module of an optical transmitter according to an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to specific examples, but the embodiments of the present invention are not limited thereto.
Example one
Referring to fig. 1, fig. 1 is a schematic structural diagram of an optical fiber communication system according to an embodiment of the present invention, where the optical fiber communication system 50 includes:
a sensing optical signal transmitter 55, an optical transmitter 51, a combiner 52, a circulator 53, a sensing optical signal receiving converter 56, a data receiving analyzer 57 and an optical fiber 54; wherein,
the sensing optical signal transmitter 55 is electrically connected to the combiner 52 to transmit the sensing optical signal to the combiner 52;
the optical transmitter 51 is electrically connected to the combiner 52 to transmit the generated optical signal to the combiner 52;
the combiner 52 is electrically connected to the circulator 53 to combine the sensing optical signal and the optical signal to form a combined signal, and the combined signal is sent to the circulator 53;
the circulator 53 is electrically connected to the optical fiber 54 to transmit the combined signal to the optical fiber 54 and receive the sensing optical signal scattered back in the optical fiber 54;
a sensing optical signal receiving converter 56 electrically connected to the circulator 53 to receive the sensing optical signal scattered back and convert it into an electrical signal;
the data receiving analyzer 57 is electrically connected to the sensing optical signal receiving converter 56 to receive the electrical signal and analyze it.
Wherein the sensing optical signal transmitter 55 includes a laser transmitter and an optical driver, the sensing optical signal receiving converter 56 includes a spectral filter and an optical-to-electrical converter, and the data receiving analyzer 57 includes a data receiver and a data parser.
Wherein the laser transmitter generates a laser signal with a wavelength of 1064 nm.
Wherein the optical splitting filter is used for extracting the scattering spectrum of the sensing optical signal scattered back in the optical fiber 54.
The data analyzer comprises a communication interface, and is used for connecting the analyzed data with the terminal equipment through the communication interface.
Wherein the optical transmitter 51 includes:
an input circuit for performing scrambling and encoding operations on an input electrical signal;
the modulation circuit is electrically connected with the input circuit and is used for modulating the scrambling codes and the coded electric signals to form modulation signals;
and the light source module is electrically connected with the modulation circuit and used for driving the light source module according to the modulation signal and generating an optical signal.
The optical fiber communication system also comprises an optical monitoring module and an alarm output circuit;
the optical monitoring module is used for detecting optical signals output by the light source module, and the alarm output circuit is electrically connected with the optical monitoring module and used for detecting and alarming the working state of the light source module.
Wherein the light source module comprises a light emitting diode, a lead wire and a lens; the lead is used for connecting the positive pin and the negative pin of the light emitting diode with the input end of the light source module; the lens is arranged on the light emitting surface of the light emitting diode and used for converging and transmitting the optical signal.
Wherein the light emitting diode is a longitudinal PingoLED;
wherein the vertical PinGeLED comprises:
an N-type Si substrate;
the intrinsic Ge layer is stacked on the N-type Si substrate;
a P-type Si layer stacked on the intrinsic Ge layer;
a positive electrode prepared on the P-type Si layer;
and the negative electrode is prepared on the N-type Si substrate.
Wherein the wavelength of the light source sent by the light emitting diode is 1550 nm.
Example two
Referring to fig. 1, fig. 1 is a schematic structural diagram of an optical fiber communication system according to an embodiment of the present invention. Wherein the optical fiber communication system structure includes:
the optical transmitter 51, the combiner 52, the circulator 53, the optical fiber 54, the sensing optical signal transmitter 55, the sensing optical signal receiving converter 56, and the data receiving analyzer 57.
The sensing optical signal transmitter 55 transmits a sensing optical signal to the combiner 52, the optical transmitter 51 transmits the generated optical signal to the combiner 52, and the combiner 52 performs combining processing on the sensing optical signal and the optical signal and transmits the combined signal to the circulator 53 and the optical fiber 54. The sensing optical signal is scattered backward in the optical fiber 54, the backscattered sensing optical signal is input to the sensing optical signal receiving converter 56 through the return port of the circulator 53, the sensing optical signal receiving converter 56 receives the scattered returning sensing optical signal and performs photoelectric conversion, and the electric signal is input to the data receiving analyzer 57 to perform receiving and analyzing of the electric signal.
The sensor optical signal transmitter 55 includes a laser transmitter and an optical driver.
The sensing optical signal receiving converter 56 includes a spectral filter and an optical-to-electrical converter.
The data reception analyzer 57 includes a data receiver and a data parser.
The optical transmitter 51 is used for converting an electrical signal into an optical signal and transmitting information in light; the optical transmitter 51 converts the optical signal to a wavelength of 1550 nm.
The multiplexer 52 is a wavelength division multiplexing multiplexer 52, and multiplexes the sensing optical signal and the optical signal generated by the optical transmitter 51, and transmits the multiplexed signal to the circulator 53.
The circulator 53 adopts an optical fiber 54 and a circulator 53, and is used for sending the combined wave into the optical fiber 54 for transmission, and receiving the backscattered sensing optical signal returned from the optical fiber 54 and transmitting the sensing optical signal to a sensing optical signal receiving converter 56.
The laser transmitter is used for generating an initial sensing optical signal which is a continuous optical signal with the wavelength of 1064nm and the power of 0-40 mW.
The optical driver is used for electro-optical modulation and driving, and modulates the continuous optical signal generated by the laser transmitter into the required pulse optical signal.
The photoelectric converter firstly receives the backscattered sensing light signals, and separates Rayleigh scattered light, Stokes scattered light, anti-Stokes scattered light and the like in the backscattered sensing light signals by adopting the combination of the optical fiber 54 and the transflective filter; secondly, a high-sensitivity APD avalanche diode is adopted to detect the backscattering sensing optical signal, and the backscattering sensing optical signal is converted into an electric signal.
The data acquisition processor adopts a high-speed data acquisition chip and a high-speed FPGA processing chip to analyze and process the converted electric signals.
Wherein, the analysis result can be stored and displayed.
The optical transmitter 51 converts an electrical signal of information to be transmitted into an optical signal, and injects the optical signal into an optical fiber 54 for transmission. The optical signal output from the optical transmitter 51 passes through the combiner 52 and the circulator 53 and is injected into the optical fiber 54 for transmission. The sensor optical signal transmitter 55 transmits a continuous optical signal of a certain power, and the continuous optical signal is modulated and driven, then input through one input port of the combiner 52, and then input into the optical fiber 54 through the input port of the circulator 53 after being combined by the combiner 52. Optical signals of two different wavelengths are simultaneously transmitted in optical fiber 54. The sensing optical signal generates backward scattering light in the optical fiber 54, and the backward scattering sensing optical signal is input to the sensing optical signal receiving converter 56 through the return port of the circulator 53, and is subjected to light splitting, filtering and photoelectric conversion. And the signal is converted into an electric signal by utilizing a photoelectric detection principle. And extracting different backscattering spectrums of Rayleigh, Brillouin, Raman and the like according to different measurement parameters. The electrical signals are input into a data receiving analyzer 57 for receiving and analyzing the electrical signals, and the converted electrical signals are analyzed and processed by adopting a high-speed data acquisition chip and a high-speed FPGA processing chip to obtain corresponding optical fiber sensing data. The result data of the analysis can be displayed and stored in a computer.
The embodiment of the invention realizes communication and sensing in the same optical fiber, saves optical fiber resources and greatly reduces production cost; the system has high integration level, can highly integrate the communication and sensing devices, reduces the complexity of the system, and is convenient to install in maintenance in daily life.
EXAMPLE III
Referring to fig. 2, fig. 2 is a schematic structural diagram of an optical transmitter 30 according to an embodiment of the present invention, where the optical transmitter includes:
an input circuit 31 for performing scrambling and encoding operations on an input electrical signal;
a driving circuit 32, electrically connected to the input circuit 31, for modulating the electrical signal after scrambling and encoding to form a modulated signal;
the light source module 33 is electrically connected with the driving circuit 32 and is used for driving the light source module 33 according to a modulation signal and generating an optical signal;
and the temperature control circuit 34 is electrically connected to the light source module 33 and is used for stabilizing the working temperature of the light source module 33.
As shown in fig. 3, fig. 3 is a schematic structural diagram of an input circuit of an optical transmitter according to an embodiment of the present invention, where the input circuit 31 includes: the device comprises an input interface 101, an equalizing amplifier 102, a code pattern conversion module 103, a multiplexing module 104 and a scrambling code coding module 105 which are electrically connected in sequence.
Wherein the input circuit 31 further comprises: a clock extraction module 106;
furthermore, one end of the clock extraction module 106 is electrically connected to the balanced amplifier 102, and the other end is electrically connected to the code pattern transformation module 103, the multiplexing module 104, and the scrambling code encoding module 105, respectively.
The input interface 101 is used to receive a pulse signal inputted by an electrical terminal (PCM), and is generally called an electrical interface.
The equalizer amplifier 102 is used to equalize the pulse signal, compensate for attenuation and distortion caused by cable transmission, and decode the signal correctly.
The clock extraction module 106 is configured to provide a clock signal as a time reference for the pattern conversion and scrambling process.
The code pattern conversion module 103 is configured to convert the code stream into a unipolar "0" and a "1" non-return-to-zero code (i.e., NRZ code). Because the equalizer outputs the HDB3 code, a three-valued bipolar code (i.e., +1, 0, -1). The light source can only use light or no light corresponding to '0' and '1', so that a code pattern conversion circuit is needed.
The multiplexing module 104 refers to a process for simultaneously transmitting a plurality of low-capacity user information and overhead information by using a high-capacity transmission channel.
The scrambling code encoding module 105 is used for adding a scrambling code circuit to achieve probabilities of occurrence of '0' codes and '1' codes and the like if the situation of long connection of '0' or long connection of '1' occurs in the information code stream, which brings difficulty to extraction of clock signals. In an actual optical fiber communication system, besides the need to transmit a main signal, some other functions need to be implemented, such as functions of error code monitoring, inter-zone communication, official communication, monitoring, etc. of an uninterrupted service, so that some information redundancy needs to be added on the basis of a signal after scrambling, that is, line coding is performed.
The driving circuit 32, also called as a modulation circuit, modulates the light source by the electrical signal after scrambling through the modulation circuit, so that the intensity of the optical signal emitted by the light source changes with the change of the electrical signal code stream.
Wherein the optical transmitter further comprises an optical monitoring module 35 and an alarm output circuit 36;
further, the optical monitoring module 35 is configured to detect an optical signal output by the light source module 33, and the alarm output circuit 36 is electrically connected to the optical monitoring module 35 and configured to detect and alarm the working state of the light source module 33.
As shown in fig. 4, fig. 4 is a schematic structural diagram of a light source module of an optical transmitter according to an embodiment of the present invention, where the light source module 33 includes a light emitting diode 111, a lead 113, and a lens 112;
the lead 113 is used for connecting the positive pin and the negative pin of the light emitting diode 111 with the input end of the light source module 33; the lens 112 is disposed on a light emitting surface of the light emitting diode 111 for converging and transmitting the light signal.
Example four
Referring to fig. 5, fig. 5 is a schematic structural diagram of a light emitting diode for a light source module of an optical transmitter according to an embodiment of the present invention; the vertical pin light emitting diode 10 may include: a P-type Si substrate 11, and an intrinsic Ge layer 12 and an N-type Si layer 13 sequentially stacked on the P-type Si substrate 11.
The light emitting diode 10 further comprises a positive electrode 14 and a negative electrode 15, wherein the positive electrode 14 is connected with the P-type Si substrate 11, and the negative electrode 15 is connected with the N-type Si layer 13.
Further, the negative electrode 15 and the positive electrode 14 are aluminum materials.
Optionally, referring to fig. 6, fig. 6 is a schematic view of a layer structure of an intrinsic Ge layer of a light emitting diode according to an embodiment of the present invention. The intrinsic Ge layer 12 may include a Ge seed layer 121, a crystallized Ge layer 122, and a Ge epilayer 123 in this order.
Further, the crystallized Ge122 layer is formed by a laser recrystallization process of the Ge main body layer on the Ge seed layer 121, wherein the parameters of the laser recrystallization process comprise that the laser wavelength is 808nm, the laser spot size is 10mm × 1mm, and the laser power is 1.5kW/cm2The laser moving speed was 25 mm/s.
Wherein the thickness of the Ge seed crystal layer is 40-50 nm; the thickness of the Ge main body layer is 150-250 nm.
According to the embodiment of the invention, the advantage of preparing the Ge epitaxial layer with low dislocation density is achieved through an LRC (laser re-crystallization) technology, the formed device structure has the advantage of low dislocation density of the Ge epitaxial layer, and the device structure is used as a GeLED active region on a Si substrate, so that the luminous efficiency of the device is well improved.
EXAMPLE five
Referring to fig. 7a to 7j, fig. 7a to 7j are schematic views illustrating a manufacturing process of a light emitting diode for an optical source module of an optical transmitter according to an embodiment of the present invention, the manufacturing method includes the following steps:
s101, selecting the doping concentration to be 5 × 1018cm-3As shown in fig. 7a, P-type single crystal silicon (Si) substrate sheet 001.
S102, growing a Ge seed crystal layer 002 of 40-50 nm on the surface of the Si substrate by utilizing a CVD process at the temperature of 275-325 ℃, as shown in figure 7 b.
S103, growing a 150-250 nm Ge main body layer 003 on the surface of the Ge seed crystal layer by utilizing a CVD process at the temperature of 500-600 ℃, as shown in figure 7 c.
S104, growing 100-150 nm SiO on the surface of the Ge main body layer by using a CVD process2Oxide layer 004, as shown in fig. 7 d.
S105, heating the whole substrate material comprising the single crystal Si substrate, the Ge seed layer, the Ge main body layer and the oxide layer to 700 ℃, and continuously crystallizing the whole substrate material by utilizing a laser recrystallization process, wherein the laser wavelength is 808nm, the laser spot size is 10mm, × 1mm and the laser power is 1.5kW/cm2The laser moving speed was 25mm/s, and then high-temperature annealing was performed while introducing tensile stress.
Specifically, referring to fig. 8, fig. 8 is a schematic view of an LRC process method according to an embodiment of the present invention. The LRC process, namely Laser Re-Crystallization (LRC for short), is a thermal phase transition Crystallization method, and through Laser heat treatment, a Ge epitaxial layer on a Si substrate is melted and recrystallized, and dislocation defects of the Ge epitaxial layer are transversely released, so that the Ge epitaxial layer with high quality can be obtained, and meanwhile, because the LRC process can accurately control a Crystallization area, the problem of mutual expansion of Si and Ge between the Si substrate and the Ge epitaxial layer in the conventional process is avoided, and the material interface characteristic between the Si and the Ge is good.
S106, etching the oxide layer 004 by using a dry etching process, and etching the oxide layer to form the Ge virtual substrate 005 as shown in FIG. 7 e.
S107, growing a 1 μm thick Ge layer (for convenience of illustration, the crystallized Ge layer and the crystallized Ge layer grown are combined to be the i-Ge layer 006) by reduced pressure CVD at a growth temperature of 330 ℃ as shown in FIG. 7 f. Because the epitaxial layer grows on the surface of the Ge virtual substrate, the quality of Ge is better and the lattice mismatch rate is lower.
S108, depositing N-type polycrystalline Si 007 with the thickness of 90-110 nm and the doping concentration of 1 × 1020cm-3As shown in fig. 7 g.
S109, room temperature, using HCl H2O2:H2Mesa etching was performed with a chemical solvent of 1:1: 20O at a stable rate of 100nm/min to expose the P-type Si layer for metal contact, as shown in fig. 7 h.
S110, depositing a passivation layer 008 with the thickness of 150-200 nm by using a PECVD (plasma enhanced chemical vapor deposition) process, and isolating the table top from being in electric contact with the outside. Selectively etching off SiO in the designated region by etching process2Contact holes are formed as shown in fig. 7 i.
S111, depositing an Al layer 009 with a thickness of 150-200 nm by electron beam evaporation. The metal Al in the designated area is selectively etched away by an etching process, and a planarization process is performed by a CMP technique, as shown in fig. 7 j.
In the embodiment, based on the advantage of good interface characteristics of the Si substrate and the Ge epitaxial layer under the LRC process condition, p-Si/i-Ge/n is utilized++And the LED with the Si structure has a simple device structure and low process cost.
EXAMPLE six
Referring to fig. 9, fig. 9 is a schematic structural diagram of another light emitting diode for an optical source module of an optical transmitter according to an embodiment of the present invention. The vertical Pinge light emitting diode 20 comprises: an N-type Si substrate 21; an intrinsic Ge layer 22 laminated on the N-type Si substrate 21; a P-type Si layer 23 stacked on the intrinsic Ge layer 22; a positive electrode 24 prepared on the P-type Si layer 23; and a negative electrode 25 prepared on the N-type Si substrate 21.
Optionally, the intrinsic Ge layer 22 includes a Ge seed layer, a crystallized Ge layer, and a Ge epilayer in this order.
In addition, the crystallized Ge layer is formed by a Ge main body layer positioned on the Ge seed crystal layer through a laser recrystallization process, wherein the parameters of the laser recrystallization process comprise that the laser wavelength is 808nm, the laser spot size is 10mm × 1mm, and the laser power is 1.5kW/cm2The laser moving speed was 25 mm/s.
Optionally, the doping concentration of the N-type Si substrate 21 is 1 × 1020cm-3The doping concentration of the P-type Si layer 23 is 5 × 1018cm-3。
In addition, the light emitting diode 20 further includes a passivation layer 26, and the passivation layer 26 may be SiO 262The material has a thickness of 150 to 200 nm.
Optionally, the positive electrode 24 and the negative electrode 25 are made of Cr or Au materials, and the thickness of the positive electrode and the negative electrode is 150-200 nm.
In summary, the structure and implementation of an optical transmitter and an optical fiber communication system according to the present invention are described herein by using specific examples, and the above description of the examples is only used to help understanding the method and the core idea of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention, and the scope of the present invention should be subject to the appended claims.
Claims (10)
1. A fiber optic communication system, comprising:
the device comprises a sensing optical signal transmitter, an optical transmitter, a wave combiner, a circulator, a sensing optical signal receiving converter, a data receiving analyzer and an optical fiber; wherein,
the sensing optical signal transmitter is electrically connected to the combiner to transmit the sensing optical signal to the combiner;
the optical transmitter is electrically connected to the combiner to transmit the generated optical signal to the combiner;
the wave combiner is electrically connected with the circulator so as to combine the sensing optical signal and the optical signal to form a combined signal and send the combined signal to the circulator;
the circulator is electrically connected to the optical fiber to send the combined wave signal to the optical fiber and receive the sensing optical signal scattered and returned in the optical fiber;
a sensing optical signal receiving converter is electrically connected to the circulator to receive the scattering return sensing optical signal and convert the scattering return sensing optical signal into an electric signal;
the data receiving analyzer is electrically connected with the sensing optical signal receiving converter to receive the electric signal and analyze and process the electric signal.
2. A fiber optic communication system according to claim 1, wherein the sensing optical signal transmitter includes a laser transmitter and an optical driver, the sensing optical signal receiving converter includes an optical splitting filter and an optical-to-electrical converter, and the data receiving analyzer includes a data receiver and a data parser.
3. A fiber optic communication system according to claim 2, wherein the laser transmitter generates a laser signal having a wavelength of 1064 nm.
4. A fiber optic communication system according to claim 2, wherein the optical splitting filter is configured to extract a scattered spectrum of the sensor optical signal scattered back in the optical fiber.
5. A fiber optic communication system according to claim 2 wherein the data parser comprises a communication interface for connecting the parsed data to the terminal device via the communication interface.
6. A fiber optic communication system according to claim 1, wherein the optical transmitter comprises:
an input circuit for performing scrambling and encoding operations on an input electrical signal;
the modulation circuit is electrically connected with the input circuit and is used for modulating the scrambling codes and the coded electric signals to form modulation signals;
and the light source module is electrically connected with the modulation circuit and used for driving the light source module according to the modulation signal and generating an optical signal.
7. A fiber optic communication system according to claim 1, further comprising an optical monitoring module and an alarm output circuit; wherein,
the optical monitoring module is used for detecting the optical signal output by the light source module, and the alarm output circuit is electrically connected with the optical monitoring module and is used for detecting and alarming the working state of the light source module.
8. A fiber optic telecommunications system according to claim 1, wherein the light source module includes a light emitting diode, a lead wire, and a lens; the lead is used for connecting the positive pin and the negative pin of the light emitting diode with the input end of the light source module; the lens is arranged on the light emitting surface of the light emitting diode and used for converging and transmitting the optical signal.
9. A fiber optic telecommunications system according to claim 8, wherein the light emitting diodes are longitudinal pingee leds; wherein the vertical PinGeLED comprises:
an N-type Si substrate;
the intrinsic Ge layer is stacked on the N-type Si substrate;
a P-type Si layer stacked on the intrinsic Ge layer;
a positive electrode prepared on the P-type Si layer;
and the negative electrode is prepared on the N-type Si substrate.
10. An optical fiber communication system according to claim 9, wherein said light source transmitted by said light emitting diode has a wavelength of 1550 nm.
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