CN107204810A - A kind of optical fiber telecommunications system - Google Patents
A kind of optical fiber telecommunications system Download PDFInfo
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- CN107204810A CN107204810A CN201710347987.8A CN201710347987A CN107204810A CN 107204810 A CN107204810 A CN 107204810A CN 201710347987 A CN201710347987 A CN 201710347987A CN 107204810 A CN107204810 A CN 107204810A
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
- H04B10/501—Structural aspects
- H04B10/503—Laser transmitters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/0004—Devices characterised by their operation
- H01L33/0008—Devices characterised by their operation having p-n or hi-lo junctions
- H01L33/0012—Devices characterised by their operation having p-n or hi-lo junctions p-i-n devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/34—Materials of the light emitting region containing only elements of group IV of the periodic system
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/07—Arrangements for monitoring or testing transmission systems; Arrangements for fault measurement of transmission systems
- H04B10/075—Arrangements for monitoring or testing transmission systems; Arrangements for fault measurement of transmission systems using an in-service signal
- H04B10/079—Arrangements for monitoring or testing transmission systems; Arrangements for fault measurement of transmission systems using an in-service signal using measurements of the data signal
- H04B10/0799—Monitoring line transmitter or line receiver equipment
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B10/00—Transmission systems employing electromagnetic waves other than radio-waves, e.g. infrared, visible or ultraviolet light, or employing corpuscular radiation, e.g. quantum communication
- H04B10/50—Transmitters
- H04B10/516—Details of coding or modulation
Abstract
The present invention relates to a kind of optical fiber telecommunications system, including：Sense light signal transmitter, optical sender, wave multiplexer, circulator, sensing optical signal receiving converter, data receiver analyzer and optical fiber；Sensing light signal transmitter is electrically connected to wave multiplexer to send sensing optical signal to wave multiplexer；Optical sender is electrically connected to wave multiplexer to send the optical signal of generation to wave multiplexer；Wave multiplexer electrically connects circulator and sent so that sensing optical signal and optical signal are carried out into formation multiplex signal after multiplex processing to circulator；Circulator is electrically connected to optical fiber and the sensing optical signal of return is scattered in optical fiber so that multiplex signal is sent to optical fiber and receiving；Sensing optical signal receiving converter is electrically connected to circulator to receive the sensing optical signal of scattering return and be converted into electric signal；Data receiver analyzer is electrically connected to sensing optical signal receiving converter to receive electric signal and dissection process.
Description
Technical field
The invention belongs to technical field of optical fiber communication, more particularly to a kind of optical fiber telecommunications system.
Background technology
Optical fiber telecommunications system is that, using light as carrier wave, the glass-pulling by the use of very high purity into superfine optical fiber is used as biography
Defeated medium, by light-to-current inversion, uses up to transmit the communication system of information.It is at full speed with Internet business and communication industry
Development, the information-based development to world production power and human society brings great promotion.Fiber optic communication is used as informationization
One of major technique pillar, will turn into 21 century most important strategic industry.
At present, most basic optical fiber telecommunications system is made up of data source, light transmitting terminal, optical channel and photoreceiver.Its
In, conventional optical sender using semiconductor laser (LD) as light source device, light source operationally between long or temperature
When too high, the power of output can reduce, and cause the optical signal of output unstable.
The content of the invention
In order to solve the above-mentioned technical problem, the invention provides a kind of optical fiber telecommunications system.
The embodiment provides a kind of optical fiber telecommunications system, including：
Sense light signal transmitter, optical sender, wave multiplexer, circulator, sensing optical signal receiving converter, data receiver
Analyzer and optical fiber；Wherein,
The sensing light signal transmitter is electrically connected to the wave multiplexer to send sensing optical signal to the wave multiplexer；
The optical sender is electrically connected to the wave multiplexer to send the optical signal of generation to the wave multiplexer；
The wave multiplexer electrically connects the circulator sensing optical signal and the optical signal are carried out into multiplex processing
Multiplex signal is formed afterwards to send to the circulator；
The circulator is electrically connected to the optical fiber to send the multiplex signal to the optical fiber and receive the light
The sensing optical signal of return is scattered in fibre；
Sensing optical signal receiving converter is electrically connected to the circulator to receive the sensing optical signal that scattering is returned
And it is converted into electric signal；
Data receiver analyzer is electrically connected to the sensing optical signal receiving converter to receive the electric signal and parse
Processing.
In one embodiment of the invention, the sensing light signal transmitter includes laser transmitting set and CD-ROM driver,
The sensing optical signal receiving converter includes light splitting wave filter and optical-electrical converter, and the data receiver analyzer includes data
Receiver and data parser.
In one embodiment of the invention, the laser transmitting set produces the laser signal that wavelength is 1064nm.
In one embodiment of the invention, the light splitting wave filter is used to extract to scatter the described of return in the optical fiber
Sense the scattering spectrum of optical signal.
In one embodiment of the invention, data parser includes communication interface, for the data after parsing to be passed through
The communication interface is connected with terminal device.
In one embodiment of the invention, the optical sender includes：
Input circuit, scrambler and encoding operation are carried out for the electric signal to input；
Modulation circuit, electrically connects the input circuit, for the electric signal after scrambler and coding to be modulated, shape
Into modulated signal；
Light source module, electrically connects the modulation circuit, for driving the light source module according to modulated signal and producing light
Signal.
In one embodiment of the invention, in addition to light detection module and alarm output circuit；Wherein,
The light detection module is used for the optical signal for detecting the light source module output, the alarm output circuit electrical connection
The light detection module is detected and alarmed for the working condition to the light source module.
In one embodiment of the invention, the light source module includes light emitting diode, lead and lens；Wherein, institute
State input of the positive and negative pin with the light source module that lead is used to connect the light emitting diode；The lens are arranged at institute
State in the light-emitting area of light emitting diode for assembling and transmit the optical signal.
In one embodiment of the invention, the light emitting diode is longitudinal P iNGeLED；Wherein described longitudinal direction
PiNGeLED includes：
N-type Si substrates；
It is intrinsic Ge layers, it is laminated on the N-type Si substrates；
Si layers of p-type, is laminated on the intrinsic Ge layers；
Positive electrode, is prepared on the p-type Si layers；
Negative electrode, is prepared on the N-type Si substrates.
In one embodiment of the invention, the wavelength for the light source that the light emitting diode is sent is 1550nm.
Compared with prior art, the invention has the advantages that：
1) the longitudinal P iNGeLED that the present invention is used, high with Ge epitaxial layers crystal mass, Ge epitaxial layer dislocation densities are low
Advantage so that further improve light emitting diode luminous efficiency；
2) optical fiber telecommunications system that the present invention is provided is communicated and sensed while realizing in same optical fiber, has saved light
Fine resource, is greatly reduced production cost；The system integrated level is high, can will communication and sensing device it is highly integrated, reduce and be
The complexity of system, is easy to daily be installed on maintenance.
Brief description of the drawings
Below in conjunction with accompanying drawing, the embodiment to the present invention is described in detail.
Fig. 1 is a kind of optical fiber telecommunications system structural representation provided in an embodiment of the present invention；
Fig. 2 is a kind of structural representation of optical sender provided in an embodiment of the present invention；
Fig. 3 is a kind of structural representation of optical sender input circuit provided in an embodiment of the present invention；
Fig. 4 is a kind of structural representation of optical sender light source module provided in an embodiment of the present invention；
Fig. 5 illustrates for a kind of light emitting diode construction for optical sender light source module provided in an embodiment of the present invention
Figure；
Fig. 6 is a kind of intrinsic Ge layers of Rotating fields schematic diagram of light emitting diode provided in an embodiment of the present invention；
Fig. 7 a- Fig. 7 j are a kind of preparation work of light emitting diode for optical sender light source module of the embodiment of the present invention
Skill schematic diagram；
Fig. 8 is a kind of LRC processes schematic diagram provided in an embodiment of the present invention；
Fig. 9 illustrates for another light emitting diode construction for optical sender light source module provided in an embodiment of the present invention
Figure.
Embodiment
Further detailed description is done to the present invention with reference to specific embodiment, but embodiments of the present invention are not limited to
This.
Embodiment one
Fig. 1 is refer to, Fig. 1 is a kind of optical fiber telecommunications system structural representation provided in an embodiment of the present invention, and the optical fiber leads to
Letter system 50 includes：
Sense light signal transmitter 55, optical sender 51, wave multiplexer 52, circulator 53, sensing optical signal receiving converter
56th, data receiver analyzer 57 and optical fiber 54；Wherein,
The sensing light signal transmitter 55 is electrically connected to the wave multiplexer 52 and closed so that sensing optical signal is sent to described
Ripple device 52；
The optical sender 51 is electrically connected to the wave multiplexer 52 to send the optical signal of generation to the wave multiplexer 52；
The wave multiplexer 52 electrically connects the circulator 53 the sensing optical signal and the optical signal are carried out into multiplex
Multiplex signal is formed after processing to send to the circulator 53；
The circulator 53 is electrically connected to the optical fiber 54 the multiplex signal is sent to the optical fiber 54 and received
The sensing optical signal of return is scattered in the optical fiber 54；
Sensing optical signal receiving converter 56 is electrically connected to the circulator 53 to receive the sense light that scattering is returned
Signal is simultaneously converted into electric signal；
Data receiver analyzer 57 is electrically connected to the sensing optical signal receiving converter 56 to receive the electric signal simultaneously
Dissection process.
Wherein, the sensing light signal transmitter 55 includes laser transmitting set and CD-ROM driver, and the sensing optical signal connects
Receiving converter 56 includes light splitting wave filter and optical-electrical converter, and the data receiver analyzer 57 includes data sink and data
Resolver.
Wherein, the laser transmitting set produces the laser signal that wavelength is 1064nm.
Wherein, the light splitting wave filter is used for the scattering for extracting the sensing optical signal that return is scattered in the optical fiber 54
Spectrum.
Wherein, data parser includes communication interface, for the data after parsing to be passed through into the communication interface and terminal
Equipment is connected.
Wherein, the optical sender 51 includes：
Input circuit, scrambler and encoding operation are carried out for the electric signal to input；
Modulation circuit, electrically connects the input circuit, for the electric signal after scrambler and coding to be modulated, shape
Into modulated signal；
Light source module, electrically connects the modulation circuit, for driving the light source module according to modulated signal and producing light
Signal.
Wherein, optical fiber telecommunications system also includes light detection module and alarm output circuit；
Wherein, the light detection module is used for the optical signal for detecting the light source module output, the alarm output circuit
The light detection module is electrically connected to be detected and alarmed for the working condition to the light source module.
Wherein, the light source module includes light emitting diode, lead and lens；Wherein, the lead is used to connect described
The positive and negative pin of light emitting diode and the input of the light source module；The lens are arranged at the luminous of the light emitting diode
For assembling and transmit the optical signal on face.
Wherein, the light emitting diode is longitudinal P iNGeLED；
Wherein described longitudinal P iNGeLED includes：
N-type Si substrates；
It is intrinsic Ge layers, it is laminated on the N-type Si substrates；
Si layers of p-type, is laminated on the intrinsic Ge layers；
Positive electrode, is prepared on the p-type Si layers；
Negative electrode, is prepared on the N-type Si substrates.
Wherein, the wavelength for the light source that the light emitting diode is sent is 1550nm.
Embodiment two
Fig. 1 is continued referring to, Fig. 1 is a kind of optical fiber telecommunications system structural representation provided in an embodiment of the present invention.Wherein
Optical fiber telecommunications system structure includes：
Optical sender 51, wave multiplexer 52, circulator 53, optical fiber 54, sensing light signal transmitter 55, sensing optical signal are received
Converter 56, data receiver analyzer 57.
Sensing light signal transmitter 55 will sense optical signal and send to wave multiplexer 52, and optical sender 51 is by the optical signal of generation
Send to wave multiplexer 52, wave multiplexer 52 is sent to circulator after the sensing optical signal and the optical signal are carried out into multiplex processing
53 and optical fiber 54.Sensing optical signal is scattered backward in optical fiber 54, and back scattering sensing optical signal passes through the return of circulator 53
Port input sensing optical signal receiving converter 56, sensing optical signal receiving converter 56 receives the sensing optical signal that scattering is returned
And opto-electronic conversion is carried out, electric signal input data is received into reception and parsing that analyzer 57 enters horizontal electrical signal.
Wherein, sensing light signal transmitter 55 includes laser transmitting set and CD-ROM driver.
Sensing optical signal receiving converter 56 includes light splitting wave filter and optical-electrical converter.
Data receiver analyzer 57 includes data sink and data parser.
Wherein, optical sender 51 is used to convert the electrical signal to optical signal, and information is transmitted in light；51 turns of optical sender
The wavelength of optical signal changed is 1550nm.
Wherein, wave multiplexer 52 will sense the light letter that optical signal and optical sender 51 are produced using wavelength-division multiplex wave multiplexer 52
Number carry out multiplex, be sent to circulator 53.
Wherein, circulator 53 uses the circulator 53 of optical fiber 54, is transmitted for multiplex to be sent in optical fiber 54, and
The sensing optical signal of the back scattering returned in optical fiber 54 is received, is transmitted to sensing optical signal receiving converter 56.
Wherein, laser transmitting set is used to produce initial sensing optical signal, is wavelength 1064nm, power 0-40mW continuous light
Signal.
Wherein, CD-ROM driver, for Electro-optical Modulation and is driven, the continuous optical signal modulation that laser transmitting set is produced
Into required pulsed optical signals.
Wherein, optical-electrical converter, receives scattering sensing optical signal backward, using optical fiber 54 and Transflective filter plate group first
Close, back scattering is sensed into Rayleigh scattering light, Stokes ratio, anti-Stokes scattering light in optical signal etc. isolates
Come；Secondly, back scattering sensing optical signal is detected using high sensitivity APD avalanche diodes, back scattering sense light is believed
Number converted electrical number.
Wherein, data collection processor uses high-speed data acquisition chip and high speed FPGA process chips, to the electricity of conversion
Signal is analyzed and handled.
Wherein, analysis result can be preserved and shown.
The electric signal of information to be sent is converted into optical signal by optical sender 51, is injected into optical fiber 54 and is transmitted.Light
The optical signal that emitter 51 is exported is injected into optical fiber 54 after wave multiplexer 52 and circulator 53 to be transmitted.Sense optical signal
Transmitter 55 sends the continuous optical signal of certain power, defeated by an input port of wave multiplexer 52 after driving by modulating
Enter, be input to after the multiplex of wave multiplexer 52 by the input port of circulator 53 in optical fiber 54.Simultaneous transmission two in optical fiber 54
The optical signal of different wave length.Sensing optical signal can produce rear orientation light in optical fiber 54, and back scattering sensing optical signal passes through
The return port of circulator 53 is input to sensing optical signal receiving converter 56, and light splitting, filtering, photoelectricity are carried out to rear orientation light
Conversion.Electric signal is changed into using photodetection principle.Rayleigh, Brillouin, Raman etc. are extracted not according to different measurement parameters
Same back scattering spectrum.Electric signal input data is received into reception and parsing that analyzer 57 enters horizontal electrical signal, using at a high speed
Data acquisition chip and high speed FPGA process chips, are analyzed and are handled to the electric signal of conversion, show that corresponding optical fiber is passed
Feel data.The result data of analysis can carry out the display and storage of data in a computer.
Embodiments of the invention realize communication and sensed simultaneously in same optical fiber, have saved fiber resource, significantly
Reduce production cost；The system integrated level is high, can be highly integrated by communication and sensing device, reduces the complicated journey of system
Degree, is easy to daily be installed on maintenance.
Embodiment three
Fig. 2 is refer to, Fig. 2 is a kind of structural representation of optical sender provided in an embodiment of the present invention, the optical sender
30 include：
Input circuit 31, scrambler and encoding operation are carried out for the electric signal to input；
Drive circuit 32, electrically connects the input circuit 31, for the electric signal after scrambler and coding to be adjusted
System, forms modulated signal；
Light source module 33, electrically connects the drive circuit 32, for driving the light source module 33 simultaneously according to modulated signal
Produce optical signal；
Temperature-control circuit 34, electrically connects the light source module 33, the operating temperature for stablizing the light source module 33.
Wherein, as shown in figure 3, Fig. 3 is a kind of structural representation of optical sender input circuit provided in an embodiment of the present invention
Figure, the input circuit 31 includes：The input interface 101 that is sequentially connected electrically, equalizer amplifier 102, code conversion module 103,
Multiplexing module 104, scrambler coding module 105.
Wherein, the input circuit 31 also includes：Clock Extraction module 106；
Further, one end of the Clock Extraction module 106 electrically connects the equalizer amplifier 102, other end difference
Electrically connect the code conversion module 103, the Multiplexing module 104, the scrambler coding module 105.
Wherein, input interface 101 is used for receiving the pulse signal of electric terminal (PCM) input, and this interface is commonly referred to as electricity
Interface.
Wherein, equalizer amplifier 102 be used for pulse signals carry out it is balanced, compensation as the decay produced by cable transmission and
Distortion, so as to correct decoding.
Wherein, Clock Extraction module 106 is used to be used as time reference to code conversion and scrambler process offer clock signal.
Wherein, code conversion module 103 is used to code stream being transformed to unipolar " 0 ", " 1 " nonreturn to zero code (i.e. NRZ codes).
Because balanced device output is HDB3 codes, three value bipolar codes (i.e.+1,0, -1).And light source can only be with having light and unglazed with " 0 "
" 1 " correspondence, it is therefore desirable to pass through code conversion circuit.
Wherein, Multiplexing module 104 refers to using high capacity transmission channel come while transmitting the user profile of multiple low capacity
And the process of Overhead.
Wherein, scrambler coding module 105 is used for, if occurring the situation of long even " 0 " or long even " 1 " in information code current, it will
Extraction to clock signal brings difficulty, adds scrambler circuit, reaches that " 0 " code and " 1 " code equiprobability occur.In actual optical fiber
In communication system, in addition to needing transmission main signal, in addition it is also necessary to realize some other functions, such as the error code of uninterrupted business is supervised
The functions such as survey, section communication contact, official traffic, monitoring, it is therefore desirable to increase some letters on the basis of signal after scrambler
Redundancy is ceased, that is, carries out line coding.
Wherein, drive circuit 32, also referred to as modulation circuit, the electric signal after scrambler is by modulation circuit to light source
It is modulated, allows the light signal strength that light source is sent to change with the change of electric signal code stream.
Wherein, the optical sender also includes light detection module 35 and alarm output circuit 36；
Further, the light detection module 35 is used for the optical signal for detecting that the light source module 33 is exported, the alarm
Output circuit 36 electrically connects the light detection module 35 and is detected and reported for the working condition to the light source module 33
It is alert.
Wherein, as shown in figure 4, Fig. 4 is a kind of structural representation of optical sender light source module provided in an embodiment of the present invention
Figure, the light source module 33 includes light emitting diode 111, lead 113 and lens 112；
Wherein, the lead 113 is used for the positive and negative pin and the light source module 33 for connecting the light emitting diode 111
Input；The lens 112 are arranged in the light-emitting area of the light emitting diode 111 to assemble and transmit the light letter
Number.
Example IV
Fig. 5 is refer to, Fig. 5 is a kind of light emitting diode for optical sender light source module provided in an embodiment of the present invention
Structural representation；Longitudinal P iNGe light emitting diodes 10 can include：P-type Si substrates 11 and stack gradually in the p-type Si
Intrinsic Ge layers 12 and N-type Si layers 13 on substrate 11.
Wherein, the light emitting diode 10 also includes positive electrode 14 and negative electrode 15, and the positive electrode 14 connects the p-type
Si substrates 11, the negative electrode 15 connects the N-type Si layers 13.
Further, the negative electrode 15 and the positive electrode 14 are aluminum.
Alternatively, Fig. 6 is referred to, Fig. 6 is a kind of intrinsic Ge layers of layer of light emitting diode provided in an embodiment of the present invention
Structural representation.The intrinsic Ge layers 12 can include Ge inculating crystal layers 121, crystallization Ge layers 122 and Ge epitaxial layers 123 successively.
Further, described crystallization Ge122 layers be located at the Ge inculating crystal layers 121 on Ge body layers by laser it is brilliant again
The formation of chemical industry skill；Wherein, the parameter of laser crystallization process again includes：Optical maser wavelength is 808nm, laser spot size
10mm × 1mm, laser power is 1.5kW/cm2, laser traverse speed is 25mm/s.
Wherein, the Ge inculating crystal layers thickness is 40~50nm；The Ge body layers thickness is 150~250nm.
The embodiment of the present invention, has the advantage for preparing low-dislocation-density Ge epitaxial layers by LRC (laser again crystallization) technology,
The device architecture of formation has the advantages that Ge epitaxial layer dislocation densities are low, and utilizes it as GeLED active areas on Si substrates, very
Improve device light emitting efficiency well.
Embodiment five
It refer to a kind of hair for optical sender light source module that Fig. 7 a- Fig. 7 j, Fig. 7 a- Fig. 7 j are the embodiment of the present invention
The preparation technology schematic diagram of optical diode, the preparation method comprises the following steps：
S101, selection doping concentration are 5 × 1018cm-3P type single crystal silicon (Si) substrate slice 001, as shown in Figure 7a.
S102, at a temperature of 275 DEG C~325 DEG C, using CVD techniques Si substrate surfaces grow 40~50nm Ge seed crystals
Layer 002, as shown in Figure 7b.
S103, at a temperature of 500 DEG C~600 DEG C, using CVD techniques Ge seed crystal surfaces grow 150~250nm Ge
Body layer 003, as shown in Figure 7 c.
S104, using CVD techniques in Ge body layer 100~150nm of superficial growth SiO2Oxide layer 004, such as Fig. 7 d institutes
Show.
S105, the whole backing material including single crystal Si substrate, Ge inculating crystal layers, Ge body layers and oxide layer is heated to
700 DEG C, continuous to utilize the laser whole backing material of crystallization process crystallization again, wherein optical maser wavelength is 808nm, laser spot size
10mm × 1mm, laser power is 1.5kW/cm2, laser traverse speed is 25mm/s, and then high annealing, is at the same time introduced
Tensile stress.
Specifically, Fig. 8 is referred to, Fig. 8 is a kind of LRC processes schematic diagram provided in an embodiment of the present invention.LRC techniques
I.e. crystallization (Laser Re-Crystallization, abbreviation LRC) technique is a kind of method of thermal induced phase transition crystallization to laser again, is led to
Laser heat treatment is crossed, makes the dislocation defects of Ge epitaxial layers fusing recrystallization, laterally release Ge epitaxial layers on Si substrates, can not only obtain
High-quality Ge epitaxial layers are obtained, simultaneously as LRC techniques accurately control crystalline areas, are on the one hand avoided in common process
Material interface characteristic is good between Si, Ge exclusive problem between Si substrates and Ge epitaxial layers, another aspect Si/Ge.
S106, dry etch process etching oxidation layer 004 is utilized, etching oxidation layer forms the empty substrates 005 of Ge, such as Fig. 7 e institutes
Show.
S107, using depressurize the μ m-thick of CVD growth 1 Ge layers (for the ease of diagram watch, by the Ge layers and crystalline substance after crystallization
The Ge grown after change is laminated be i-Ge layers 006) growth temperature be 330 DEG C, as depicted in fig. 7f.Because this epitaxial layer is served as a contrast in Ge void
Basal surface growth, so Ge quality is preferably, lattice mismatch rate is relatively low.
S108,90~110nm of deposit thick N-type polycrystalline Si 007, doping concentration is 1 × 1020cm-3, as shown in figure 7g.
S109, at room temperature, uses HCl:H2O2:H2O=1:1:20 chemical solvent, is carried out with steady rate 100nm/min
Mesa etch, exposes Si layers of p-type and does metal contact, as shown in Fig. 7 h.
S110, using pecvd process, passivation layer 008 thick 150~200nm of deposit, isolation table top makes electrical contact with extraneous.
Fall the SiO of designated area with etching technics selective etch2Contact hole is formed, as shown in figure 7i.
S111, the Al layers 009 for utilizing electron beam evaporation deposit 150~200nm thickness.Selective eating away is carved using etching technics
The metal Al of designated area, carries out planarization process, as shown in Fig. 7 j using CMP technique.
The present embodiment, based on Si substrates under LRC process conditions and the good advantage of Ge epitaxial layer interfaces characteristic, utilizes p-Si/
i-Ge/n++- Si structure LED, device architecture is simple, and process costs are low.
Embodiment six
Fig. 9 is refer to, Fig. 9 is another light-emitting diodes for optical sender light source module provided in an embodiment of the present invention
Tubular construction schematic diagram.Longitudinal P iNGe light emitting diodes 20, including：N-type Si substrates 21；Intrinsic Ge layers 22, are laminated in the N
On type Si substrates 21；P-type Si layers 23, are laminated on the intrinsic Ge layers 22；Positive electrode 24, is prepared on the p-type Si layers 23；
Negative electrode 25, is prepared on the N-type Si substrates 21.
Alternatively, the intrinsic Ge layers 22 include Ge inculating crystal layers, Ge layers of crystallization and Ge epitaxial layers successively.
In addition, described crystallization Ge layers are that crystallization process is formed again by laser for Ge body layers on being located at the Ge inculating crystal layers
's；Wherein, the parameter of laser crystallization process again includes：Optical maser wavelength is 808nm, laser spot size 10mm × 1mm, is swashed
Luminous power is 1.5kW/cm2, laser traverse speed is 25mm/s.
Alternatively, the doping concentration of the N-type Si substrates 21 is 1 × 1020cm-3, the doping concentration of the p-type Si layers 23
For 5 × 1018cm-3。
In addition, the light emitting diode 20 also includes passivation layer 26, the passivation layer 26 can be SiO2Material, its thickness is
150~200nm.
Alternatively, the positive electrode 24 and the negative electrode 25 are Cr or Au materials, and its thickness is 150~200nm.
To sum up, specific case used herein to the structure of a kind of optical sender of the invention and optical fiber telecommunications system and
Embodiment is set forth, and the explanation of above example is only intended to the method and its core concept for helping to understand the present invention；
Simultaneously for those of ordinary skill in the art, according to the thought of the present invention, can in specific embodiments and applications
There is change part, to sum up, this specification content should not be construed as limiting the invention, and protection scope of the present invention should be with appended
Claim be defined.
Claims (10)
1. a kind of optical fiber telecommunications system, it is characterised in that including：
Sense light signal transmitter, optical sender, wave multiplexer, circulator, sensing optical signal receiving converter, data receiver analysis
Device and optical fiber；Wherein,
The sensing light signal transmitter is electrically connected to the wave multiplexer to send sensing optical signal to the wave multiplexer；
The optical sender is electrically connected to the wave multiplexer to send the optical signal of generation to the wave multiplexer；
The wave multiplexer electrically connects the circulator sensing optical signal and the optical signal are carried out into shape after multiplex processing
Sent into multiplex signal to the circulator；
The circulator is electrically connected to the optical fiber multiplex signal is sent to the optical fiber and received in the optical fiber
Scatter the sensing optical signal returned；
Sensing optical signal receiving converter is electrically connected to the circulator to receive the sensing optical signal of scattering return and turn
Change electric signal into；
Data receiver analyzer is electrically connected to the sensing optical signal receiving converter to receive the electric signal and dissection process.
2. optical fiber telecommunications system according to claim 1, it is characterised in that the sensing light signal transmitter includes laser
Transmitter and CD-ROM driver, the sensing optical signal receiving converter include light splitting wave filter and optical-electrical converter, the data
Receiving analyzer includes data sink and data parser.
3. optical fiber telecommunications system according to claim 2, it is characterised in that the laser transmitting set produces wavelength and is
1064nm laser signal.
4. optical fiber telecommunications system according to claim 2, it is characterised in that the light splitting wave filter is used to extract the light
The scattering spectrum of the sensing optical signal of return is scattered in fibre.
5. optical fiber telecommunications system according to claim 2, it is characterised in that data parser includes communication interface, is used for
Data after parsing are connected by the communication interface with terminal device.
6. optical fiber telecommunications system according to claim 1, it is characterised in that the optical sender includes：
Input circuit, scrambler and encoding operation are carried out for the electric signal to input；
Modulation circuit, electrically connects the input circuit, for the electric signal after scrambler and coding to be modulated, is formed and adjusted
Signal processed；
Light source module, electrically connects the modulation circuit, for driving the light source module according to modulated signal and producing optical signal.
7. optical fiber telecommunications system according to claim 1, it is characterised in that also including light detection module and alarm output electricity
Road；Wherein,
The light detection module is used for the optical signal for detecting the light source module output, and the alarm output circuit electrical connection is described
Light detection module is detected and alarmed for the working condition to the light source module.
8. optical fiber telecommunications system according to claim 1, it is characterised in that the light source module include light emitting diode,
Lead and lens；Wherein, the lead is used for input of the positive and negative pin with the light source module for connecting the light emitting diode
End；The lens are arranged in the light-emitting area of the light emitting diode to assemble and transmit the optical signal.
9. optical fiber telecommunications system according to claim 8, it is characterised in that the light emitting diode is longitudinal direction
PiNGeLED；Wherein described longitudinal P iNGeLED includes：
N-type Si substrates；
It is intrinsic Ge layers, it is laminated on the N-type Si substrates；
Si layers of p-type, is laminated on the intrinsic Ge layers；
Positive electrode, is prepared on the p-type Si layers；
Negative electrode, is prepared on the N-type Si substrates.
10. optical fiber telecommunications system according to claim 9, it is characterised in that the light that the light emitting diode is sent
The wavelength in source is 1550nm.
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Application publication date: 20170926 |