CN107179177A - A kind of optical detection apparatus of light-emittingdiode - Google Patents
A kind of optical detection apparatus of light-emittingdiode Download PDFInfo
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- CN107179177A CN107179177A CN201610136208.5A CN201610136208A CN107179177A CN 107179177 A CN107179177 A CN 107179177A CN 201610136208 A CN201610136208 A CN 201610136208A CN 107179177 A CN107179177 A CN 107179177A
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- emittingdiode
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0403—Mechanical elements; Supports for optical elements; Scanning arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
- G01M11/0214—Details of devices holding the object to be tested
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
The present invention provides a kind of optical detection apparatus of light-emittingdiode, including：One carrier, including：One plummer, the light-emittingdiode to be detected to carry, plummer has a first surface and a second surface relative with the first surface；One supporter, is connected to the plummer, and the supporter convexedly stretches in the first surface of the plummer with a convex portion, so that the supporter and the plummer enclose and set to form a depression jointly；One first vacuum hole, located at the supporter, and first vacuum hole is connected with the depression；And a light receiving device, it is directed towards plummer setting.
Description
Technical field
It is used for detection hair the invention relates to a kind of optical detection apparatus of light-emittingdiode, and particularly with regard to one kind
The detection means of near-infrafed photodiodes luminous intensity.
Background technology
The structure of light-emittingdiode has horizontal, rectilinear and three kinds of crystal covering type.In horizontal light-emittingdiode, it two
Individual electrode is disposed on luminescent layer, therefore luminescent layer is reduced the area of transmitting light source by the masking of electrode, just drops
Its low luminous efficiency.Similarly, one of electrode of vertical light-emitting diode is covered on luminescent layer, also reduces hair
Light efficiency.Relatively, two electrodes of crystal covering type light-emitting diode are disposed on two opposing faces of substrate with luminescent layer, also
That is, luminescent layer will not be influenceed by electrode, thus crystal covering type light-emitting diode is had luminous effect optimal in three kinds of structures
Rate.Meanwhile, crystal covering type light-emitting diode also has less heat fading, is quite suitable for light-emittingdiode illumination component.
In general, light-emittingdiode crystal grain, which must first go through, could carry out the application of reality, light-emittingdiode after test
Testing process be that will be loaded with after the mounted wafer of light-emittingdiode to be carried on the carrier of a detection means, then connect with probe
Touched electrode simultaneously passes to electric current so that light-emittingdiode is luminous, then detects hair through light receiving device (such as integrating sphere or solar cell)
Light characteristic, and by the electrical of probe in detecting light-emittingdiode.
Figure 1A is referred to, a kind of optical detection apparatus 100 of known light-emittingdiode is shown in it.This known luminous two
The detection means 100 of polar body includes a carrier 110, a light receiving device 120 and an optical detector 130.Carrier 110 includes a plummer
(chuck) 140 and the support bearing platform 140 of a supporter (holder) 150, the surface of supporter 150 has a vacuum hole
155.One film spreading 180 (such as blue film or tunica albuginea) to attach plural number light-emittingdiode 170 to be detected on its surface simultaneously
The plural light-emittingdiode 170 to be detected on the surface of film spreading 180 can be made each other within a predetermined distance with each other through expanding brilliant step
Every a clamping inner ring 160A and a clamping outer shroud 160B clamp film spreading 180 and be fixed on outside supporter 150.One pumping dress
Put (not shown) and connect the vacuum hole 155 so that the gas between the carrier and the film spreading 180 to be extracted out, inhale film spreading 180
Invest the surface of plummer 140.During test, survey device 190 at 2 points and connect the positive electrode 175A on the surface of light-emittingdiode 170 respectively and bear
Electrode 175B simultaneously lights light-emittingdiode 170, makes the light that the light-emittingdiode 170 in detection is sent by the receipts of light receiving device 120
Light end 125 is injected, and then the light collected by light receiving device 120 be sent to the optical detector 130 being connected with light receiving device 120 again
To carry out optical detection.
Figure 1B is refer to, is evacuated when using the known optical detection apparatus 100 for light-emittingdiode from vacuum hole 155
When, the film spreading 180 on vacuum hole 155 is understood because being relatively attached at vacuum hole 155 closely and rapidly apart from vacuum hole 155, and directly
Connect stop vacuum hole 155 so that the air between plummer 140 and film spreading 180 can not be discharged smoothly, in turn result in expansion
Opening film 180 smooth can not be attached at the surface of plummer 140, cause a survey device 190 when detecting each light-emittingdiode 170, on
The distance of lower pin, which must elongate reduce when carrier 110 is moved, causes light-emittingdiode 170 by a machine for the scratch of survey device 190
Rate, causes detection speed to reduce.In addition, film spreading 180, which smooth can not be attached at the surface of plummer 140, will also cause a survey device
190 slide in lower pin, or light-emittingdiode 170 easily be subjected to displacement or rotate and cause measure when it is electrically unstable.
In view of this, the present invention is to disclose a kind of optical detection apparatus suitable for light-emittingdiode, uses improvement above-mentioned
The shortcoming of the known optical detection apparatus for light-emittingdiode.
The content of the invention
One of present invention feature is to provide a kind of optical detection apparatus of light-emittingdiode, including：One carrier, including：One
Plummer, the light-emittingdiode to be detected to carry, plummer has a first surface and relative with the first surface
One second surface；One supporter, is connected to the plummer, and the supporter convexedly stretches in the first table of the plummer with a convex portion
Face, so that the supporter and the plummer enclose and set to form a depression jointly；One first vacuum hole, located at the supporter, and this
One vacuum hole is connected with the depression；And a light receiving device, it is directed towards plummer setting.
According to one embodiment of present invention, wherein first vacuum hole is arranged at the convex portion of the supporter.
According to one embodiment of present invention, wherein the convex portion is provided with a side surface, and the side surface is to surround the depression, should
First vacuum hole is located at the side surface.
According to one embodiment of present invention, wherein the convex portion is provided with a upper surface, and the upper surface is held to convexedly stretch in this
Microscope carrier and the surface away from the first surface, wherein, one second vacuum hole is further included, it is convex that second vacuum hole is disposed on this
The upper surface in portion.
According to one embodiment of present invention, wherein the supporter includes a body and an extension, and the convex portion is located at should
Body, the extension connects the body and the plummer, and first vacuum hole is provided at the extension.
According to one embodiment of present invention, there is a gap, the gap is with being somebody's turn to do wherein between the body and the plummer
Depression is connected.
According to one embodiment of present invention, wherein the supporter is to be surrounded on the plummer.
According to one embodiment of present invention, wherein first vacuum hole is located on the supporter.
According to one embodiment of present invention, the wherein quantity of first vacuum hole is several, and adjacent two first true
It is to be separated with a partition wall between emptying aperture.
According to one embodiment of present invention, the wherein plummer is transparent, and the light receiving device is towards the of the plummer
Two surfaces are set.
Brief description of the drawings
What Figure 1A~1B was illustrated is a kind of optical detection apparatus diagrammatic cross-section of known light-emittingdiode.
What Fig. 2A was illustrated is according to embodiments of the present invention one light-emittingdiode optical detection apparatus.
What Fig. 2 B, 2D, 2E were illustrated is that the carrier of according to embodiments of the present invention one light-emittingdiode optical detection apparatus is cutd open
Face schematic diagram.
What Fig. 2 C were illustrated is the carrier top view of according to embodiments of the present invention one light-emittingdiode optical detection apparatus.
What Fig. 3 A~3B was illustrated is the carrier section of according to embodiments of the present invention two light-emittingdiode optical detection apparatus
Schematic diagram.
What Fig. 4 A~4B was illustrated is the carrier section of according to embodiments of the present invention three light-emittingdiode optical detection apparatus
Schematic diagram.
What Fig. 5 A~5B was illustrated is that the plummer of according to embodiments of the present invention four light-emittingdiode optical detection apparatus shows
It is intended to.
What Fig. 6 A~6B was illustrated is that the plummer of according to embodiments of the present invention five light-emittingdiode optical detection apparatus shows
It is intended to.
What Fig. 7 A~7C was illustrated is that the plummer of according to embodiments of the present invention six light-emittingdiode optical detection apparatus shows
It is intended to.
What Fig. 8 A~8C was illustrated is that the section of according to embodiments of the present invention seven, eight light-emittingdiode optical detection apparatus shows
It is intended to.
What Fig. 9 was illustrated is the diagrammatic cross-section of according to embodiments of the present invention nine light-emittingdiode optical detection apparatus.
【Symbol description】
100 known light-emittingdiode optical detection apparatus
200th, 800,800 ', 800 " light-emittingdiode optical detection apparatus
110th, 210,310,410 carrier
120th, 220,720,820 light receiving device
125th, 225,725,825 light end is received
130th, 230,730,830 optical detector
140th, 240,340,440,540,640,740 plummer
150th, 250,350,450 supporter
155 vacuum holes
160A clamps inner ring
160B clamps outer shroud
170th, 270,370,470,570,670,770 light-emittingdiode
175A, 275A, 375A, 475A, 575A, 675A, 775A positive electrode
175B, 275B, 375B, 475B, 575B, 675B, 775B negative electrode
180th, 280,380,480,580,680,780 film spreading
190th, 290,390,490,590,690, device is surveyed at 790 points
240a, 340a, 440a, 540a, 640a, 740a first surface
240b, 340b, 440b, 540b, 640b, 740b second surface
250a, 350a, 450a side surface
350b, 450b upper surface
251st, 351,451 convex portion
255th, the vacuum holes of 355A first
256 partition walls
The vacuum holes of 355B second
260th, 360,460 depression
262A, 362A, 462A clamp inner ring
262B, 362B, 462B clamp outer shroud
271 light-emitting areas
452 bodies
453 extensions
454 gaps
The vacuum holes of 455C the 3rd
541st, 641,741 first area
542nd, 642,742 second area
671 first light-emittingdiodes
672 second light-emittingdiodes
673 the 3rd light-emittingdiodes
781 reflection cavities
783 reflecting layer
784 light-guide devices
784a light harvestings end
826 light extraction ends
850 Wavelength changing elements
850A first wave length bridgewares
850B second wave length bridgewares
The wavelength conversion members of 850C the 3rd
The wavelength conversion members of 850D the 4th
The wavelength conversion members of 850E the 5th
The wavelength conversion members of 850F the 6th
D1 aisle
Embodiment
It will be detailed below making and the occupation mode of the embodiment of the present invention.So it should be noted that present invention offer is permitted
The inventive concepts for being available for applying, it can be implemented with a variety of particular forms more.Although in text with light emitting diode element as an example
The specific embodiment of discussion, so it is only manufacture and use ad hoc fashion of the invention, is not used to limit the scope of the present invention, appoints
The semiconductor element what has similar structure is equally applicable to the present invention.
Embodiment one：
The diagrammatic cross-section illustrated below in conjunction with Fig. 2A~2E, illustrate according to embodiments of the present invention one light-emittingdiode
Optical detection apparatus.
First, Fig. 2A is refer to, the optical detection apparatus of the light-emittingdiode of the embodiment of the present invention one is shown in it
200, optical detection apparatus 200 includes a carrier 210 and a light receiving device 220, and preferably additionally comprises an optical detector 230 and one
Point survey device 290.Carrier 210 includes a plummer (chuck) 240 and the support bearing platform 240 of a supporter (holder) 250,
The plummer 240 is to carry light-emittingdiode 270 to be measured, and the supporter 250 is provided with one first vacuum hole 255, and should
Optical detector 230 and point survey device 290 are directed towards the plummer 240 and set.
Refer to Fig. 2 B and Fig. 2 C, what wherein Fig. 2 B were illustrated be the present embodiment light-emittingdiode optical detection apparatus in
The profile of carrier 210, and the vertical view of the carrier 210 in the light-emittingdiode optical detection apparatus of the present embodiment that Fig. 2 C are illustrated
Figure, wherein, the profile that Fig. 2 B are presented for the hatching B-B ' along Fig. 2 C.
Please also refer to shown in Fig. 2 B, the plummer 240 has an a first surface 240a and second surface 240b, and this first
Surface 240a is relative with second surface 240b, and first surface 240a is to carry light-emittingdiode 270 to be measured.Should
The material of plummer 240 can be transparent or opaque, and the plummer 240 in the present embodiment is to be presented transparent, light is worn
The plummer 240 is crossed, the characteristics of luminescence of crystal covering type light-emitting diode is thereby detected.The plummer 240 of the present embodiment is with transparent
Quartz constituted, in other embodiments of the invention, the material of plummer 240 also can select transparent acryl or glass
Glass.The supporter 250 is that, around plummer 240 and with a convex portion 251, the convex portion 251 is protrude from the plummer 240 the
One surface 240a, makes the convex portion 251 of the supporter 250 define a depression jointly with the first surface 240a of the plummer 240
260.The convex portion 251 has a side surface 250a, and side surface 250a is directed towards and is surrounded on the depression 260, and this is first true
Emptying aperture 255 is communicated in the depression 260, and first vacuum hole 255 of the present embodiment is located at side surface 250a.
Fig. 2 C separately are refer to, are to include several first vacuum holes in the optical detection apparatus of the light-emittingdiode of the present embodiment
Between 255, and adjacent two the first vacuum holes 255 mutually separated with a partition wall 256, several first vacuum holes 255 are
Arrange and be located on the supporter 250, respectively first vacuum hole 255 can be for a circle and with an aperture e.g., from about 2mm；And
In the other embodiment of the present invention, the first vacuum hole 255 is the rectangle stomata for including width about 2mm, the rectangle stomata
It is to be located on the supporter 250.
Fig. 2 D and 2E are refer to, this uses schematic diagram for the light-emittingdiode optical detection apparatus of one embodiment of the invention.
Wherein be that plural number light-emittingdiode 270 to be detected is attached at film spreading 280, film spreading 280 be with clamp inner ring 262A with
Clamping outer shroud 262B is fixed on supporter 250 jointly.Film spreading 280 used in the present embodiment, its material is blue film, in basis
In embodiments of the invention, the material of film spreading 280 can select tunica albuginea, solution glued membrane (UV release tape) or polyphenyl diformazan
Sour second diester (PET).In addition, to make receipts angular of the light-emittingdiode 270 in measurement become big, expansion first can be made through expanding brilliant step
Plural number light-emittingdiode 270 to be detected in the surface of film 280 is each other within a predetermined distance apart from one another by rear, then be fixed in clamping
Between ring 262A and clamping outer shroud 262B, clamping inner ring 262A is then placed in carrier 210 with clamping outer shroud 262B again.By
The air extractor (not shown) for being communicated in first vacuum hole 255 is evacuated to the first vacuum hole 255 of supporter 250, makes to hold
Air between microscope carrier 240 and film spreading 280 is pulled out, and then makes the expansion of covering a plurality of light-emittingdiodes to be detected 270
Film 280 is because being entirely adsorbed in the surface of plummer 240 by negative pressure, as shown in Figure 2 E.
Fig. 2A is refer to, when carrying out the optical detection of light-emittingdiode using optical detection apparatus 200, by the light receiving device
220 are set towards the first surface 240a or second surface 240b of the plummer 240, and are powered and flow to one by one with a survey device 290
Positive and negative electrode 275A, the 275B on each surface of light-emittingdiode 270, sequentially to light each light-emittingdiode crystal grain
270, and the light that the light-emittingdiode 270 in detection is sent is entered through light end 225 is received in light receiving device 220, again finally
Light collected by light receiving device 220 is sent to the optical detector 230 being connected with light receiving device 220 and carries out subsequent optical detection,
The optical detector 230 can be a spectrometer, and the point, which surveys device 290, to be two probes, be connected in detection luminous
The positive electrode 275A and negative electrode 275B of diode 270.When the light-emittingdiode is crystal covering type light-emitting diode, the light receiving device
230 receipts light end 225 is directed towards second surface 240a settings, and the plummer 240 is transparent, makes crystal covering type light-emitting diode
What is sent just penetrates downwards plummer 240, to reach the light receiving device 220 for being located at the lower section of plummer 240 to detect, and works as
When the light-emittingdiode 270 is horizontal or vertical light-emitting diode, then the light receiving device 220 can be towards the plummer 240
First surface 240a or second surface 240b, with appropriate direction carry out receipts light.
Embodiment two：
Illustrate that a kind of light-emitting diodes bulk optics suitable for according to embodiments of the present invention two is examined below in conjunction with Fig. 3 A and 3B
Survey the carrier diagrammatic cross-section of device.
First, Fig. 3 A are refer to, the light-emittingdiode that another is applied to according to embodiments of the present invention two is shown in it
Optical detection apparatus carrier 310.Carrier 310 is on the whole similar to the carrier 210 of embodiment one, including a plummer 340
And the support bearing platform 340 of a supporter 350.The plummer 340 has an a first surface 340a and second surface 340b, and this
One surface 340a is relative with second surface 340b, and first surface 340a is to carry light-emittingdiode to be measured.Should
The material of plummer 340 can be transparent or opaque, and the material of the plummer 340 in the present embodiment is by suprasil institute structure
Into in other embodiments in accordance with the invention, the material of plummer 340 also can select transparent acryl or glass.
The supporter 350 is that the convex portion 351 is to protrude from the plummer around plummer 340 and with a convex portion 351
340 first surface 340a, makes the convex portion 351 of the supporter 350 define one jointly with the first surface 340a of the plummer 340
Depression 360, the convex portion 351 has a side surface 350a, and side surface 350a is directed towards and is surrounded on the depression 360, and this first
Vacuum hole 255 towards the depression 360 and is communicated in the depression 360 located at side surface 350a.The convex portion 351 of the present embodiment
A upper surface 350b is additionally comprised, upper surface 350B is to convexedly stretch in the plummer 340 and away from a first surface 340a table
Face, and upper surface 350b is connected with side surface 350a, the supporter 350 of the present embodiment is located at the convex portion 351 except having
Side surface 350a the first vacuum hole 355A outside, be additionally provided with the second vacuum hole 355B, and second vacuum hole 355B was located at should
The upper surface 350b of convex portion 351.In one embodiment, the supporter 350 is provided with several first vacuum hole 355A and/or several
Second vacuum hole 355B, and the first vacuum hole 355A and/or the second vacuum hole 355B pore size about 2mm, and according to this
In the other embodiment of invention, have between two adjacent first vacuum hole 355A and/or two adjacent second vacuum hole 355B
One partition wall (not shown), and several first vacuum hole 355A and/or the second vacuum hole 355B are to surround the depression 360.
It refer to shown in Fig. 3 B, when being detected using the light-emittingdiode optical detection apparatus of one embodiment of the invention, first carry
Include the film spreading 380 of plural number light-emittingdiode 370 to be detected for a surface, and be fixed on clamping inner ring 362A and clamping
Between outer shroud 362B, then clamping inner ring 362A is placed on carrier 310 with clamping outer shroud 362B again, and clamping inner ring 362A
With clamping outer shroud 362B it is surrounded on outside supporter 350.The present embodiment is provided with the second vacuum hole 355B in supporter 350 can
Improve absorption speed of the film spreading 380 by negative-pressure adsorption to plummer 340 that surface includes plural light-emittingdiode to be detected 370
Rate and the uniformity.In addition, to make receipts angular of the light-emittingdiode 370 in measurement become big, expansion first can be made through expanding brilliant formality
The light-emittingdiode 370 of the plural number detection on the surface of film 380 is each other within a predetermined distance apart from one another by rear, then be fixed on clamping inner ring
Between 362A and clamping outer shroud 362B, then clamping inner ring 362A is placed on carrier 310 with clamping outer shroud 362B again and carried out
Subsequent optical is measured.
Then, by first vacuum hole of the air extractor (not shown) being connected with supporter 350 to supporter 350
355A and the second vacuum hole 355B pumpings, are pulled out the air between plummer 340 and film spreading 380, and then make to cover again
The film spreading 380 of number light-emittingdiode 370 to be detected is equably adsorbed in the first surface 340a of plummer 340 by negative pressure, so
Connect positive and negative electrode 375A, the 375B on each surface of light-emittingdiode 370 one by one with a survey device 390 again afterwards, sequentially light every
One light-emittingdiode 370, and the light for being sent the light-emittingdiode 370 in detection penetrates downwards plummer 340, for another example
As described in embodiment one, into light receiving device (not shown) of the position below carrier 310 and the optical detector being connected with light receiving device (not
Display), carry out subsequent optical detection.
Embodiment three：
Illustrate that a kind of light-emitting diodes bulk optics suitable for according to embodiments of the present invention three is examined below in conjunction with Fig. 4 A~4B
Survey the carrier diagrammatic cross-section of device.
First, Fig. 4 A are refer to, the light-emittingdiode that another is applied to according to embodiments of the present invention three is shown in it
The carrier 410 of optical detection apparatus.Carrier 410 is on the whole similar to the carrier 210 of embodiment one, including a plummer 440 and
The support bearing platform 440 of one supporter 450, the plummer 440 has an a first surface 440a and second surface 440b, and this first
Surface 440a is relative with second surface 440b, and first surface 440a is to carry light-emittingdiode to be measured.This holds
The material of microscope carrier 440 can be transparent or opaque, and the material of the plummer 440 in the present embodiment is by suprasil institute structure
Into in other embodiments in accordance with the invention, the material of plummer 440 also can select transparent acryl or glass.
The supporter 450 is that the convex portion 451 is to protrude from the plummer around plummer 440 and with a convex portion 451
440 first surface 440a, makes the convex portion 451 of the supporter 450 define one jointly with the first surface 440a of the plummer 440
Depression 460, and one the 3rd vacuum hole 455C is provided on the supporter 450.In details of the words, the supporter 450 is that have one
The extension 453 of body 452 and one, the convex portion 451 is provided at the body 452, and the extension 453 is connected to the body 452 and direction
The direction extension of plummer 440, is made between the body 452 and the plummer 440 to be connected with the extension 453, makes the body
452 separate a gap 454 with the plummer 440, and the gap 454 is connected with the depression 460, wherein, one the 3rd vacuum hole
455C is located at the extension 453 and is communicated in the depression 460.
In addition, there are several 3rd vacuum hole 455C in the carrier 410 of the present embodiment, and two adjacent the 3rd vacuum holes
455C gap is provided with a partition wall (not shown), and several 3rd vacuum hole 455C are located on the outer peripheral edge of the plummer 440, should
3rd vacuum hole 455C pore size about 2mm；And in other embodiments in accordance with the invention, the carrier 410 is provided only with one
Individual 3rd vacuum hole 455C, and the 3rd vacuum hole 455C is located on the outer peripheral edge of the plummer 440, the 3rd vacuum hole 355C is in
Existing width about 2mm slot shape.
It refer to shown in Fig. 4 B, when being detected using the light-emittingdiode optical detection apparatus of one embodiment of the invention, first carry
Include the film spreading 480 of plural light-emittingdiode to be detected 470 for a surface, and it is outer with clamping to be fixed on clamping inner ring 462A
Between ring 462B, then will clamping inner ring 462A with clamping outer shroud 462B be placed on carrier 410, and clamping inner ring 462A with clamping
Outer shroud 462B is surrounded on outside supporter (holder) 450.In addition, to make receipts angular of the light-emittingdiode 470 in measurement
Become big, first through expanding brilliant formality the plural light-emittingdiode 470 to be detected on the surface of film spreading 480 can be made mutual within a predetermined distance each other
After separately, then it is fixed between clamping inner ring 462A and clamping outer shroud 462B, is then placed on carrier 410 and is carried out subsequently again
Optical measurement.
Then, the 3rd vacuum hole 455C is evacuated by an air extractor (not shown) being connected with supporter 450, makes to hold
Air between microscope carrier 440 and film spreading 480 is pulled out, and then makes to cover the plural number film spreading of light-emittingdiode 470 to be detected
480 are equably adsorbed in the surface of plummer 440 by negative pressure, then connect each light-emittingdiode one by one again with a survey device 490
Positive and negative electrode 475A, the 475B on 470 surfaces, light each light-emittingdiode 470, and sent light-emittingdiode 470
Light penetrate plummer 440 downwards, for another example described in embodiment one as, into light receiving device (not shown) of the position below carrier 410
And the optical detector (not shown) being connected with light receiving device, carry out subsequent optical detection.
Example IV：
Illustrate the load of according to embodiments of the present invention four light-emittingdiode optical detection apparatus below in conjunction with Fig. 5 A~5B
Plummer schematic diagram in tool.
First, Fig. 5 A are refer to, this is to measure light-emitting diodes to be detected using the plummer 540 of the embodiment of the present invention four
Top view during body 570, plummer 540 goes for such as the light-emittingdiode optical detection apparatus in embodiment one to three
Carrier 210,310,410, and replace its corresponding plummer 240,340,440.The plummer 540 is worn including a kind of controllable light
The material spent thoroughly, makes the light transmittance in the partially or fully region of the plummer 540 have adjustable denaturation, such as to be detected in measurement
During light-emittingdiode 570, the plummer 540 is comprising a first area 541 and a second area 542 around the first area 541.
The light transmittance of the first area 541 and/or the second area 542 is to distinguish modulation by a physical quantity, and this of the present embodiment is held
Microscope carrier 540 is with the second area 542 around first area 541.In detail, the light-emittingdiode 570 of side to be checked is being measured
When, several light-emittingdiodes 570 to be detected are correspondences positioned at the first area 541 of the plummer 540.The plummer 540
Material can include liquid crystal, electrochromism material or liquid metal, and changing the physical quantity of the light transmittance of the plummer 540 can be
Electrically or thermally etc., in the present embodiment, between adjacent light-emittingdiode to be detected 570 separated with an aisle d1, and the carrying
The material of platform 570 includes liquid crystal.
It refer to shown in Fig. 5 B, this attaches one for the surface shown in Fig. 5 A includes the to be detected of a plurality of spaced-apart relations
Light-emittingdiode 570 film spreading 580 plummer 540 stereogram.As described in above example, to make light-emittingdiode
The 570 receipts angular when measuring becomes big, first makes the plural light-emittingdiode to be detected on the surface of film spreading 580 through expanding brilliant formality
570 is separated from each other with aisle d1 each other, then carries out subsequent optical detection.
The surface of plummer 540 of the present embodiment, which is pasted with one, includes the light-emitting diodes to be detected of a plurality of spaced-apart relations
The film spreading 580 of body 570, and each light-emittingdiode 570 is respectively provided with positive and negative electrode 575A, a 575B.When film spreading 580
It is attracted to after the first surface 540a of plummer 540, is the position for first positioning light-emittingdiode 570 to be detected, in favor of
The plummer 540 is subsequently divided into the first area 541 and the second area 542；Then, the saturating of the plummer 540 is changed
Luminosity, makes the first area 541 have the light transmittance different from the second area 542, and several hairs are covered in the first area 541
Near-infrafed photodiodes 570 and aisle d1；And measure the characteristic of giving out light for the light-emittingdiode 570 for being placed in the first area 541.
The optical detecting method of the light-emittingdiode of the present embodiment is first to put to have the light-emittingdiode 570 by scanning
Behind the image of plummer 540, the position to position the light-emittingdiode 570 to be detected on film spreading 580, carried by control
The orientation of liquid crystal molecule in platform 540, makes to cover several light-emittingdiodes 570 to be detected and several aisle d1 the firstth area
The plummer 540 of the lower section of domain 541 is transformed into a transparent area, and the liquid of remaining second area 542 for being not covered by light-emittingdiode 570
Brilliant molecule does not change orientation then, and forms the second area 542 for having different light transmittances from the first area 541.This
In embodiment, the light transmittance of the first area 541 is above the light transmittance of the second area 542.Then with towards the plummer
Positive and negative electrode 575A, 575B that the 540 point survey devices 590 set sequentially contact each light-emittingdiode 570 are detected, to be checked
The light penetration first area 541 that the light-emittingdiode 570 of survey is sent, for another example described in embodiment one as, into position under it
The light receiving device (not shown) of side and the photodetector (not shown) being connected with light receiving device, carry out subsequent optical detection.Wherein, detect
During the light-emittingdiode crystal grain 570 that position is located around, the detection caused by neighbouring other LEDs 570 reflect is missed
Difference, can be compensated for so that position is on film spreading 580 by the reflected light of second area 542 of the position around first area 541
Each light-emittingdiode to be detected 570 have identical or close detection environment, it is to avoid measure light-emittingdiode 570 send out
During light characteristic, because the position of light-emittingdiode 570 is different and caused by error in measurement it is excessive.According to other embodiments of the invention
In, electrochromism material or liquid metal etc. also may be selected in the material that can control light penetration.
Embodiment five：
Illustrate the load of according to embodiments of the present invention five light-emittingdiode optical detection apparatus below in conjunction with Fig. 6 A~6B
Plummer schematic diagram in tool.
First, Fig. 6 A are refer to, this is to measure light-emitting diodes to be detected using the plummer 640 of the embodiment of the present invention five
Top view during body 670, the plummer 640 goes for such as the light-emittingdiode optical detection apparatus in embodiment one to three
Carrier 210,310,410, and replace its corresponding plummer 240,340,440.The plummer 640 and embodiment of the present embodiment
Four plummer 540 is similar, and the plummer 640 includes a kind of material of controllable light penetration, makes its partially or fully region
Light transmittance have adjustable denaturation, such as when measuring light-emittingdiode 670 to be detected, the plummer 640 includes one first area
The second area 642 of domain 641 and one, so that when measuring light-emittingdiode 670 to be detected, first area is adjusted by a physical quantity
641 and/or the light transmittance of the second area 642.The material of the plummer 640 can include liquid crystal, electrochromism material or liquid
State metal, wherein the physical quantity for changing the light transmittance of the plummer 640 can be for electrically or thermally etc..Only, the present embodiment and above-mentioned reality
The difference for applying example four is：During detection, single light-emitting diodes to be detected are only covered in the first area 641 of the plummer 640
Body 670, it is that correspondence is located at the first area 641 to imply that only one light-emittingdiode 670 to be detected, such as Fig. 6 A most lower-left
Light-emittingdiode 670.
Fig. 6 B are refer to, this attaches one for the surface shown in Fig. 6 A includes the hair to be detected of a plurality of spaced-apart relations
The stereogram of the plummer 640 of the film spreading of near-infrafed photodiodes 670.Optical measurement is carried out through the plummer 640 of embodiment five
Method is included：Several light-emittingdiodes 670 are placed on the plummer 640；Position the position of the light-emittingdiode 670；Change
The light transmittance of the plummer 640, makes the plummer 640 divide into a first area 641 and a second area 642, firstth area
A light-emittingdiode 670 to be detected is only covered in domain 641, and the wherein first area 641 is transparent area and has a light transmittance
Higher than the light transmittance of the second area 642；And measure the characteristic of giving out light for the light-emittingdiode 670 for being placed in the first area 641.
The plummer 640 of embodiment five be include liquid crystal material, and through apply voltage change the first area 641 and/or this second
The light transmittance in region 642.
The optical detecting method of the light-emittingdiode of the present embodiment is first to put to have the light-emittingdiode 670 by scanning
Behind the image of plummer 640, the position to position several light-emittingdiodes 670 to be detected on film spreading 680, held by control
The orientation of liquid crystal molecule in microscope carrier 640, makes to cover the plummer below the region of a light-emittingdiode 670 to be detected
640 are transformed into the transparent area, and the liquid crystal molecule in remaining region for being not covered by light-emittingdiode 670 does not change orientation then,
And form the second area 642 that there are different light transmittances from the first area 641.In the present embodiment, the first area 641
Light transmittance is above the second area 642.Then the positive and negative electrode of each light-emittingdiode 670 is contacted with a survey device 690
When 675A, 675B are detected, the light penetration first area 641 that light-emittingdiode 670 to be detected is sent is implemented for another example
As described in example one, into position light receiving device (not shown) thereunder and the optical detector (not shown) being connected with light receiving device, enter
Row subsequent optical is detected.Wherein, during the light-emittingdiode crystal grain 670 that detecting position is located around, because of other neighbouring light-emitting diodes
Detection error caused by the light reflection of body crystal grain 670, can be by the anti-of second area 642 of the position around first area 641
Penetrate light to be compensated for so that each light-emittingdiode to be detected 670 of position on film spreading 680 has identical or close inspection
Survey environment, it is to avoid when measuring 670 characteristics of luminescence of light-emittingdiode, because the position of light-emittingdiode 670 is different and caused by measure
Error is excessive.
The method and the 4th that the optical characteristics for carrying out light-emittingdiode 670 using the plummer 640 of the present embodiment is measured
Embodiment is similar, and Main Differences are that the position of the first area 641 of the plummer 640 of the present embodiment is with different measurement mesh
Position where target light-emittingdiode 670 and change.In detail, it is with several light-emittingdiodes on the plummer 640
670, the first light-emittingdiode 671, the second light-emittingdiode 672 and the 3rd light-emittingdiode 673 as shown in Figure 6A etc., this reality
The optical characteristics method for measurement for applying the light-emittingdiode of example is sequentially to measure above-mentioned first, second and third light-emittingdiode respectively
671st, 672,673, it is adjust plummer 640 the when measuring the optical characteristics of the first light-emittingdiode 671 for example
The position in one region 641, makes the correspondence of first area 641 then be corresponded to positioned at the first light-emittingdiode 671 and second area 642 and is located at
Remaining light-emittingdiode so that the plummer 641 of the lower section of the first light-emittingdiode 671 only to be detected is transparent area, to keep away
Exempt from optical characteristics measurement of the neighbouring other LEDs 670 (such as 672,673) to the first light-emittingdiode 671 and cause reflection
And unintended influence is produced, thereby further lift accuracy of measurement.Similarly, when being intended to measure the second light-emittingdiode
672nd, during three light-emittingdiodes 673, then the position of the first area 641 of plummer 640 is adjusted, makes the correspondence of first area 641
Positioned at the second light-emittingdiode 672 or the 3rd light-emittingdiode 673, and second area 642 is then corresponding positioned at remaining light-emitting diodes
Body 670, makes have identical or close detection environment around measured light-emittingdiode 670.
Embodiment six：
Illustrate the load of according to embodiments of the present invention six light-emittingdiode optical detection apparatus below in conjunction with Fig. 7 A~7C
Plummer schematic diagram in tool.
First, Fig. 7 A are refer to, this is to measure light-emitting diodes to be detected using the plummer 740 of the embodiment of the present invention six
Top view during body 770, the plummer 740 goes for the light-emittingdiode optical detection as described in embodiment one to three
The carrier 210,310,410 of device, and replace its corresponding plummer 240,340,440.The plummer 740 of the present embodiment and reality
The plummer 540 or 640 for applying example four or five is similar, and the plummer 740 includes a kind of material of controllable light penetration, makes its office
The light transmittance of portion or Zone Full has adjustable denaturation, when measuring light-emittingdiode 770 to be detected, to be adjusted by a physical quantity
Whole first area 741 and/or the light transmittance of the second area 742, the material of the plummer 740 can include liquid crystal, electroluminescent change
Color substance or liquid metal, the physical quantity for changing the light transmittance of the plummer 740 can be for electrically or thermally etc..
Fig. 7 B are refer to, this attaches one for the surface shown in Fig. 7 A includes the hair to be detected of a plurality of spaced-apart relations
The three-dimensional side view of the plummer 740 of the film spreading 780 of near-infrafed photodiodes 770.It refer to shown in Fig. 7 C, the plummer of the present embodiment
740 be similar to above-described embodiment four or five, and only the plummer 740 of the present embodiment additionally comprises a reflecting layer 783, and is led through one
The light that optical element 784 is radiated light-emittingdiode 770 is collected and delivered in light receiving device 720.In detail, the plummer 740 is included
The one first surface 740a and second surface 740b relative to first surface 740a, first surface 740a is to carry
Light-emittingdiode 770 to be detected, the reflecting layer 783 is provided on second surface 740b, and the reflecting layer 783 with this second
There is a reflection cavity 781 between the 740b of surface, and there is the light-guide device 784 a light harvesting end 784a, light harvesting end 784a to be knots
Together in the reflection cavity 781 of the carrier 740.Wherein, reflecting layer 783 is made up of the material of tool high reflectance, this implementation
Material from selected high reflectance is barium sulfate.In addition, in other embodiments in accordance with the invention, the reflecting layer
783 also may be selected the materials or Bragg mirror (DBR) structure etc. such as silver, aluminium.Light is carried out through the plummer 740 of embodiment six
The method measured is learned to include：Several light-emittingdiodes 770 are placed on the plummer 740；Position the position of the light-emittingdiode 770
Put；Change the light transmittance of the plummer 740, the plummer 740 is divided into a first area 741 and a second area 742, should
One or several light-emittingdiodes 770 are covered in first area 741, and wherein the first area 741 is transparent area and should with being higher than
The light transmittance of second area 742；And measure the characteristic of giving out light for the light-emittingdiode 770 for being placed in the first area 741.This implementation
The plummer 740 of example is to include liquid crystal material, and changes the first area 741 and/or the second area 742 through voltage is applied
Light transmittance.
The optical detecting method of the light-emittingdiode of the present embodiment is first to put to have the light-emittingdiode 770 by scanning
The image of plummer 740, behind the position of several light-emittingdiodes 770 to be detected on positioning confirmation film spreading 780, by control
The orientation of liquid crystal molecule in plummer 740 processed, makes the area for covering one or more light-emittingdiodes 770 to be detected
Plummer 740 below domain is transformed into the first area 741 of printing opacity, and the liquid in remaining region for being not covered by light-emittingdiode 770
Brilliant molecule does not change orientation then, and forms the second area 742 for having different light transmittances from the first area 741.This
In embodiment, the light transmittance of the first area 741 is above the second area 742.It refer to shown in Fig. 7 C, then with a survey device
When 790 positive and negative electrode 775A, 775B for sequentially contacting each light-emittingdiode 770 are detected, light-emittingdiode to be detected
The 770 light penetration first areas 741 sent enter the reflection cavity 781, and light has by reflection cavity 781 and reflecting layer 783
The reflection of effect ground, makes the light harvesting end 784a of ray guidance to light-guide device 784 be collected and fed into the light receiving device 720, then through light
Detector 730 carries out subsequent optical detection.Wherein, detecting position is in the light-emittingdiode crystal grain 770 at edge, because of other neighbouring
Light-emittingdiode crystal grain 770 reflects caused environmental difference, can be by second area 742 of the position around first area 741
Reflection be compensated for so that each light-emittingdiode to be detected 770 of position on film spreading 780 have it is identical or close
Detect environment, it is to avoid when measuring 770 characteristics of luminescence of light-emittingdiode, because the position of light-emittingdiode 770 is different and caused by amount
Survey error excessive.
Embodiment seven, eight：
Illustrate below in conjunction with Fig. 8 A-8C according to embodiments of the present invention seven and eight light-emittingdiode optical detection apparatus
Schematic diagram.
Fig. 8 A disclose the light-emittingdiode optical detection apparatus 800 of the embodiment of the present invention seven, most of component such as embodiment
Include a carrier 210, a light receiving device 820 and an optical detector 830 described in one.Wherein, the carrier 210 includes a plummer
240, the plummer 240 is provided with a first surface 240a and second surface 240b relative to first surface 240a, and should
First surface 240a is the light-emitting area 271 for carrying light-emittingdiode 270 to be detected；The light receiving device 820 has one to receive
The light extraction end 826 of light end 825 and one, and the receipts light end 825 is directed towards the second surface 240b settings of plummer 240, is somebody's turn to do with collecting
The light that light-emittingdiode 270 is sent, and the optical detector 830 is sent to by the light extraction end 826；The coupling of optical detector 830
The light receiving device 820 is connected to, to detect the light collected by the light receiving device 820.The light-emittingdiode optical detection apparatus 800 is another
Comprising a wavelength conversion member 850, the wavelength conversion member 850 is provided at the light-emitting area 271 of the light-emittingdiode 270 to be detected with being somebody's turn to do
Between the light extraction end 826 of light receiving device 820.The Wavelength changing element 850 of the present embodiment is provided at the receipts light end of light receiving device 820
Between 825 and the second surface 840b of plummer 840, and it is preferred that the Wavelength changing element 850 is removably incorporated into the receipts
The receipts light end 825 of light device 820.
It refer to shown in Fig. 8 B, this is the schematic diagram of the light-emittingdiode optical detection apparatus of the embodiment of the present invention eight, real
Apply light-emittingdiode optical detection apparatus 800 phase of the light-emittingdiode optical detection apparatus 800 ' of example eight substantially with embodiment seven
Together, with a carrier 210, a light receiving device 820, an optical detector 830 and wavelength conversion member 850, difference is embodiment eight
Wavelength conversion member 850 is provided in the light extraction end 826 of light receiving device 820, and it is preferred that the wavelength conversion member 850 is removably tied
Together in the light extraction end 826 of the light receiving device 820.
The wavelength conversion member 850 is the light (such as blue light) for making light-emittingdiode 270 send tool first wave length, part
By Wavelength changing element 850 and the light (such as gold-tinted, feux rouges or green glow) of tool second wave length is converted into, and with the
First, the light of second wave length mixes to form white light.The optical detection dress of light-emittingdiode with the Wavelength changing element 850
800,800 ' are put, is that the simulation luminous diode 270 of energy is adding fluorescent material and the formed light-emittingdiode encapsulation of colloid encapsulation
The characteristics of luminescence of body, assesses whether the characteristics of luminescence meets the specification after encapsulation by being measured in advance before encapsulation, visitor is improved to reach
The effects such as family satisfaction and reduction customer complaint rate.
In above-described embodiment seven, eight, Wavelength changing element 850 includes fluorescent powder film, and Wavelength changing element 850 can
Optionally the replaceable form of design slabbing or tabular, is passing through the first wave length light that light-emittingdiode 270 is sent
The light for having different second wave lengths can be obtained after different Wavelength changing elements 850.In addition, in one embodiment, wavelength convert
Element 850 radiates a first wave length bridgeware 850A of wavelength comprising tool first, and tool second radiates one second ripple of wavelength
Long bridgeware 850B, the first wave length bridgeware 850A are with second wave length bridgeware 850B can be by light-emittingdiode 270
Give out light and excited, and with second to radiate wavelength different for the first radiation wavelength.Specifically, the Wavelength changing element 850 also may be used
With as shown in Figure 8 C for a rotary-disk type structure, the Wavelength changing element 850 include it is a plurality of with different radiation wavelength the
One wavelength conversion member 850A, second wave length bridgeware 850B, the 3rd wavelength conversion member 850C, the 4th wavelength conversion member 850D,
Five wavelength conversion member 850E and the 6th wavelength conversion member 850F, and the Wavelength changing element 850 is rotatably to have selected required
Wavelength conversion member 850 aligns the receipts light end 825 or light extraction end 826 for being incorporated into the light receiving device 820, makes the Wavelength changing element
850 light that tool first wave length can be sent by light-emittingdiode 270 excite and produced the light for having different second wave lengths.
The light-emittingdiode 270 of the present embodiment is unencapsulated, for example, LED Chips for Communication or crystal grain, and pass through wavelength
Conversion element 850 is with characteristic of being given out light after the simulation luminous encapsulation of diode 270 in advance.And the Wavelength changing element 850 shown in Fig. 8 C
Include a plurality of first wave length bridgeware 850A, second wave length bridgeware 850B and the 3rd wavelength with different radiation wavelength
Bridgeware 850C etc., when be intended to simulation luminous diode 270 comprising different wave length bridgeware encapsulation condition give out light characteristic when, only
Corresponding wavelength conversion member 850A, 850B or 850C etc. need to be made to be pointed to light extraction end 825 or light end 826 is received, it is not necessary to dismounting and more
Wavelength conversion member is changed, to improve testing efficiency.
In addition, though embodiment seven, eight is illustrated with the carrier 210 shown in embodiment one, carrier 210 can also basis
Carrier substitution disclosed in embodiments of the invention two to six, will not be repeated here.
Embodiment nine：
Illustrate a kind of signal of according to embodiments of the present invention nine light-emittingdiode optical detection apparatus below in conjunction with Fig. 9
Figure.
Embodiment nine light-emittingdiode optical detection apparatus 800 ", it constructs hair on the whole with above-described embodiment seven, eight
Near-infrafed photodiodes optical detection apparatus 800,800 ' is roughly the same, and Main Differences are the light-emittingdiode optical detection of the present embodiment
The Wavelength changing element 850 of device 800 " is disposed on plummer 240, and Wavelength changing element 850 can be incorporated into plummer 240
First surface 240a or second surface 240b, for example, when Wavelength changing element 850 is incorporated into first surface 240a,
So that the light-emitting area 271 of light-emittingdiode 270 sends the light (such as blue light) of tool first wave length, partly pass through wavelength convert
Element 850 and the light (such as gold-tinted, feux rouges or green glow) for being converted into tool second wave length, and then after by plummer 240,
Light receiving device 820 is set to collect the light (such as white light) of the light mixing with first, second wavelength, then again by optical detector
830 further analyses.The plummer 240 of the present embodiment is with high-penetration degree for the light of first wave length and second wave length.
Wavelength changing element 850 includes fluorescent powder film as described in embodiment seven, eight, in addition, Wavelength changing element 850
It can also select to include several wavelength conversion members (850A~850F) as shown in Figure 8 C；Carrier 210 can also be according to the present invention
Embodiment two to six disclosed in carrier substitution, will not be repeated here.
Although the present invention is disclosed above with preferred embodiment, so it is not limited to the present invention, any affiliated technology
Have usually intellectual in field, without departing from the spirit and scope of the present invention, when can change with combine it is above-mentioned it is various implement
Example.
Claims (10)
1. a kind of optical detection apparatus of light-emittingdiode, including：
One carrier, including：
One plummer, the light-emittingdiode to be detected to carry, the plummer have a first surface and with the first surface
A relative second surface；
One supporter, is connected to the plummer, and the supporter convexedly stretches in the first surface of the plummer with a convex portion, so that
The supporter and the plummer enclose jointly to be set to form a depression；
One first vacuum hole, located at the supporter, and first vacuum hole is connected with the depression；And
One light receiving device, is directed towards plummer setting.
2. the optical detection apparatus of light-emittingdiode according to claim 1, wherein first vacuum hole are arranged at the branch
The convex portion of support body.
3. the optical detection apparatus of light-emittingdiode according to claim 1, the wherein convex portion are provided with a side surface, the side
Surface is to surround the depression, and first vacuum hole is located at the side surface.
, should 4. the optical detection apparatus of light-emittingdiode according to claim 1, the wherein convex portion are provided with a upper surface
Upper surface is to convexedly stretch in the plummer and the surface away from the first surface, wherein, one second vacuum hole is further included, this second
Vacuum hole is disposed on the upper surface of the convex portion.
5. the optical detection apparatus of light-emittingdiode according to claim 1, the wherein supporter include a body and one
Extension, the convex portion is located at the body, and the extension connects the body and the plummer, and first vacuum hole is provided at this and prolonged
Extending portion.
6. have between the optical detection apparatus of light-emittingdiode according to claim 5, the wherein body and the plummer
There is a gap, the gap is connected with the depression.
7. the optical detection apparatus of light-emittingdiode according to claim 1, the wherein supporter are to be surrounded on the carrying
Platform.
8. the optical detection apparatus of light-emittingdiode according to claim 1, wherein first vacuum hole are located on the branch
Support body.
9. the optical detection apparatus of light-emittingdiode according to claim 1, the wherein quantity of first vacuum hole are number
It is individual, it is to be separated with a partition wall between two adjacent the first vacuum holes.
10. the optical detection apparatus of light-emittingdiode according to claim 1, the wherein plummer are transparent, and the receipts
The second surface of light device towards the plummer is set.
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| CN103105705A (en) * | 2011-11-15 | 2013-05-15 | 胜华科技股份有限公司 | Liquid crystal display device |
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| CN108957274B (en) * | 2018-05-30 | 2020-09-29 | 华灿光电（浙江）有限公司 | Point measurement equipment for light-emitting diode chip |
| CN110420865A (en) * | 2019-07-15 | 2019-11-08 | 中导光电设备股份有限公司 | ULED screen substrate detection/backlight of measuring device detects/measures objective table |
| CN113324738A (en) * | 2021-06-02 | 2021-08-31 | 深圳市长方集团股份有限公司 | Flip LED chip testing arrangement |
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