CN107164034A - 一种离子注入系统机械真空泵油组合物 - Google Patents

一种离子注入系统机械真空泵油组合物 Download PDF

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CN107164034A
CN107164034A CN201710334651.8A CN201710334651A CN107164034A CN 107164034 A CN107164034 A CN 107164034A CN 201710334651 A CN201710334651 A CN 201710334651A CN 107164034 A CN107164034 A CN 107164034A
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oil
fluid composition
rotary pump
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ion implant
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黄福川
胡雄风
李康春
邓富康
赵金城
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Guangxi University
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    • C10M2215/00—Organic non-macromolecular compounds containing nitrogen as ingredients in lubricant Compositions
    • C10M2215/22—Heterocyclic nitrogen compounds
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    • C10M2219/00—Organic non-macromolecular compounds containing sulfur, selenium or tellurium as ingredients in lubricant compositions
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    • C10M2219/044—Sulfonic acids, Derivatives thereof, e.g. neutral salts
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    • C10M2223/00—Organic non-macromolecular compounds containing phosphorus as ingredients in lubricant compositions
    • C10M2223/02—Organic non-macromolecular compounds containing phosphorus as ingredients in lubricant compositions having no phosphorus-to-carbon bonds
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    • C10M2223/00—Organic non-macromolecular compounds containing phosphorus as ingredients in lubricant compositions
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    • C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
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Abstract

本发明公开了一种离子注入系统机械真空泵油组合物，采用质量比50％的全氟碳油和50％的全氟Ⅰ型聚醚复合作为全合成复合基础油，配合多种复合添加剂，包括：防锈剂、稳定剂、抗氧防腐剂。本发明的组合物具有良好的热氧化安定性、抗氧性、密封材料相溶性、低温流动和扩散性、抗泡、抗乳化、抗氧防腐、防锈蚀性、抗辐射、抗强电磁场等性能；使系统具备低温掺杂，精确地剂量控制，掩获容易，均匀性好的优点。

Description

一种离子注入系统机械真空泵油组合物
技术领域
本发明一种离子注入系统机械真空泵油组合物属于压缩机润滑剂领域。
背景技术
离子注入技术就是一种把掺杂剂的原子引入固体的一种材料改性的方法。其原理是，在真空环境中经过加速的需要掺杂的原子在离子照射(注入)固体材料，从而在所选择的区域形成一个具有特殊性质的表面层(注入层)。离子注入首先是作为一种半导体材料的掺杂技术发展起来。具有低温掺杂，精确地剂量控制，掩获容易，均匀性好这些优点。对于大规模和超大规格集成电路来说，离子注入是一种理想的掺杂工艺。离子注入层是极薄的，同时，离子束的直进性保证注入的离子几乎是垂直地向掺杂，横向扩散及其微小，这样就可以使电路的线条更加纤细，线条间距进一步缩短，从而极大的提高集成度；另外，离子注入技术的高精度和高均匀性，可大幅提高集成电路的成品率。离子注入已经成为半导体器件和集成电路生产的关键工艺之一。而这种材料加工工艺是在高真空度环境下进行的。
现有的机械真空泵油应用于离子注入系统，机械真空泵不能很好解决低温掺杂、精确地剂量控制、掩获不容易、均匀性不好的技术问题。
发明内容
本发明的目的是提供一种具有良好的热氧化安定性、抗氧性、密封材料相溶性、低温流动和扩散性、抗泡、抗乳化、抗氧防腐、防锈蚀性、抗辐射、抗强电磁场性能的离子注入系统机械真空泵油组合物，使系统具备低温掺杂、精确地剂量控制、掩获容易、均匀性好的优点。
本发明采用如下技术方案解决上述技术问题：
一种离子注入系统机械真空泵油组合物，采用质量比50％的全氟碳油和50％的全氟Ⅰ型聚醚复合作为基础油，配合多种复合添加剂，其各自质量百分数的成分组成：
组分 质量百分比含量
基础油 余量
抗氧防腐剂 0.5％～1.5％
稳定剂 0.4％～0.6％
防锈剂 0.1％～0.3％
以上各组分的质量百分比含量为100％。
抗氧防腐剂是质量比50％磷代三嗪和50％的三芳基磷酸酯复合。
稳定剂是苯并咪唑。
防锈剂是质量比50％的三氟醚烷基苯基磷和50％的全氟辛基磺酸复合。
本发明的优点是：
本发明的离子注入系统机械真空泵油组合物具有良好的热氧化安定性、抗氧性、密封材料相溶性、低温流动和扩散性、抗泡、抗乳化、抗氧防腐、防锈蚀性、抗辐射、抗强电磁场性能，使系统具备低温掺杂、精确地剂量控制、掩获容易、均匀性好的优点。
具体实施方式
实施例1：
将下列各组分按百分比含量调和而成：
组分 质量百分比含量
质量比50％的全氟碳油和50％的全氟Ⅰ型聚醚 余量
质量比50％磷代三嗪和50％的三芳基磷酸酯 1％
苯并咪唑 0.5％
质量比50％的三氟醚烷基苯基磷和50％的全氟辛基磺酸 0.2％
以上组分质量百分比总和为100％。
实施例2：
将下列各组分按百分比含量调和而成：
组分 质量百分比含量
质量比50％的全氟碳油和50％的全氟Ⅰ型聚醚复合 余量
质量比50％磷代三嗪和50％的三芳基磷酸酯 1.1％
苯并咪唑 0.5％
质量比50％的三氟醚烷基苯基磷和50％的全氟辛基磺酸 0.2％
以上组分质量百分比总和为100％。
实施例3：
将下列各组分按百分比含量调和而成：
组分 质量百分比含量
质量比50％的全氟碳油和50％的全氟Ⅰ型聚醚复合 余量
质量比50％磷代三嗪和50％的三芳基磷酸酯 1.1％
苯并咪唑 0.6％
质量比50％的三氟醚烷基苯基磷和50％的全氟辛基磺酸 0.2％
以上组分质量百分比总和为100％。
实施例1典型技术指标：
项目 质量指标
40℃运动粘度/(mm2﹒s-1) 128.5
粘度指数 131
密度(20℃)kg/L 1.88
凝点/℃ -67
闪点/℃(开口) 310
分解温度/℃ 388
蒸发损失(22h,100℃)％ 0.8
四球机试验Pb/N 880
烧法负荷PD/N 4230
摩擦系数 0.21
承载能力，齿轮机(FZG)试验/失效等级 11
氧化安定性(旋转氧弹，150℃)/h 7630
橡胶密封适应性指数 6
击穿电压(2.5mm)/KV 81
低温动力粘度 2040(-50℃)
介质损耗因数(90℃) 0.0019
析气性/(μL/min) +4
实施例2典型技术指标：
项目 质量指标
40℃运动粘度/(mm2﹒s-1) 129.9
粘度指数 134
密度(20℃)kg/L 1.91
凝点/℃ -67
闪点/℃(开口) 311
分解温度/℃ 389
蒸发损失(22h,100℃)％ 0.8
四球机试验Pb/N 884
烧法负荷PD/N 4232
摩擦系数 0.21
承载能力，齿轮机(FZG)试验/失效等级 11
氧化安定性(旋转氧弹，150℃)/h 7620
橡胶密封适应性指数 6
击穿电压(2.5mm)/KV 80
低温动力粘度 2065(-50℃)
介质损耗因数(90℃) 0.0017
析气性/(μL/min) +2
实施例3典型技术指标：
项目 质量指标
40℃运动粘度/(mm2﹒s-1) 127.2
粘度指数 136
密度(20℃)kg/L 1.90
凝点/℃ -68
闪点/℃(开口) 313
分解温度/℃ 392
蒸发损失(22h,100℃)％ 0.8
四球机试验Pb/N 887
烧法负荷PD/N 4241
摩擦系数 0.22
承载能力，齿轮机(FZG)试验/失效等级 11
氧化安定性(旋转氧弹，150℃)/h 7660
橡胶密封适应性指数 6
击穿电压(2.5mm)/KV 79
低温动力粘度 2050(-50℃)
介质损耗因数(90℃) 0.0018
析气性/(μL/min) +3

Claims (4)

1.一种离子注入系统机械真空泵油组合物，其特征在于：采用质量比50％的全氟碳油和50％的全氟Ⅰ型聚醚复合作为基础油，配合多种复合添加剂，其各自质量百分数的成分组成：
组分 质量百分比含量 基础油 余量 抗氧防腐剂 0.5％～1.5％ 稳定剂 0.4％～0.6％ 防锈剂 0.1％～0.3％
以上各组分的质量百分比含量为100％。
2.如权利要求1所述的一种离子注入系统机械真空泵油组合物，其特征在于：抗氧防腐剂是质量比50％磷代三嗪和50％的三芳基磷酸酯复合。
3.如权利要求1所述的一种离子注入系统机械真空泵油组合物，其特征在于：稳定剂是苯并咪唑。
4.如权利要求1所述的一种离子注入系统机械真空泵油组合物，其特征在于：防锈剂是质量比50％的三氟醚烷基苯基磷和50％的全氟辛基磺酸复合。
CN201710334651.8A 2017-05-12 2017-05-12 一种离子注入系统机械真空泵油组合物 Pending CN107164034A (zh)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116355675A (zh) * 2021-12-28 2023-06-30 中国石油天然气股份有限公司 一种旋片式真空泵油及旋片式真空泵

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102676285A (zh) * 2012-04-27 2012-09-19 上海德古润滑油有限公司 全氟高温润滑脂
CN103497320A (zh) * 2013-08-09 2014-01-08 金骄特种新材料（集团）有限公司 一种生物基全氟聚醚油及其制备方法
CN105733744A (zh) * 2014-12-11 2016-07-06 中国石油天然气股份有限公司 添加剂及其制备方法、以及聚醚类润滑油组合物
CN106635326A (zh) * 2016-11-25 2017-05-10 南宁市黑晶信息技术有限公司 一种通用型润滑油及其制备方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102676285A (zh) * 2012-04-27 2012-09-19 上海德古润滑油有限公司 全氟高温润滑脂
CN103497320A (zh) * 2013-08-09 2014-01-08 金骄特种新材料（集团）有限公司 一种生物基全氟聚醚油及其制备方法
CN105733744A (zh) * 2014-12-11 2016-07-06 中国石油天然气股份有限公司 添加剂及其制备方法、以及聚醚类润滑油组合物
CN106635326A (zh) * 2016-11-25 2017-05-10 南宁市黑晶信息技术有限公司 一种通用型润滑油及其制备方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116355675A (zh) * 2021-12-28 2023-06-30 中国石油天然气股份有限公司 一种旋片式真空泵油及旋片式真空泵

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Application publication date: 20170915