CN107122419A - A kind of graphite boat access times statistical method based on MES system - Google Patents
A kind of graphite boat access times statistical method based on MES system Download PDFInfo
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- CN107122419A CN107122419A CN201710213787.3A CN201710213787A CN107122419A CN 107122419 A CN107122419 A CN 107122419A CN 201710213787 A CN201710213787 A CN 201710213787A CN 107122419 A CN107122419 A CN 107122419A
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- G—PHYSICS
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- G06M1/27—Design features of general application for representing the result of count in the form of electric signals, e.g. by sensing markings on the counter drum
- G06M1/272—Design features of general application for representing the result of count in the form of electric signals, e.g. by sensing markings on the counter drum using photoelectric means
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
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- G06—COMPUTING; CALCULATING OR COUNTING
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- G06F16/20—Information retrieval; Database structures therefor; File system structures therefor of structured data, e.g. relational data
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Abstract
The present invention provides a kind of graphite boat access times statistical method based on MES system, comprises the following steps：S1：When graphite boat enters film coating equipment, the boat number and currently used number of times of graphite boat are obtained, and by the graphite boat data Cun Chudao film coating equipment servers of acquisition；S2：The graphite boat data being stored in the film coating equipment server are read by MES system server, and are shown on the display screen of MES system.The present invention to film coating equipment system by setting, the graphite boat of input is set to use data transmission to film coating equipment server, film coating equipment server data and MES system are interacted again, so that the behaviour in service of graphite boat is intuitively presented in MES system, can timely, accurate management and control graphite boat access times, so as to reduce plated film aberration fraction defective.
Description
Technical field
The invention belongs to coating technique field, it is related to a kind of graphite boat access times statistical method based on MES system.
Background technology
The technical principle of plasma reinforced chemical vapour deposition (PECVD) is to make energy source, sample using low temperature plasma
Product are placed under low pressure on the negative electrode of glow discharge, sample is warming up to predetermined temperature using glow discharge (or separately adding heater)
Degree, then passes to appropriate reacting gas, and gas forms solid through series of chemical and plasma reaction in sample surfaces
State film.Chemical formula is：3SiH4+4NH3→Si3N4+6H2。
As shown in figure 1, being shown as the structural representation of PECVD film coating equipments.Fig. 2 be shown as the A-A of structure shown in Fig. 1 to
Profile.Fig. 3 is shown as the enlarged drawing in region shown in dotted-line ellipse frame in Fig. 1.When PECVD reacts, with penetrating for about 13.56MHZ
Frequency power is added to one of them battery lead plate (graphite boat piece)；Alternating current produces the free electron between two battery lead plates (graphite boat piece)
Concussion, so that knock-on reaction room gas, makes it dissociate, and energy produces a large amount of active groups transferring when collision.
While reaction forms solid film on crystal silicon chip surface, it can also be used in graphite boat piece surface attachment to one
Determine after number of times, it will the electric conductivity of influence graphite boat piece, contact of the crystal silicon chip with graphite boat piece can be also influenceed in addition, is caused
Crystal silicon chip bad order ratio is raised.Each factory has in the industry carries out control to the access times of graphite boat, defined using secondary
Number is had nothing in common with each other with method of control.
Existing graphite boat access times method of control mainly has following four：
1st, graphite boat access times are calculated by single processing time：Day access times=24 (hour) * 60 (minute) * stoves
Pipe number/processing time/board graphite boat quantity.The shortcoming of this method is：When board exception or making technology error, number of times is present
Larger difference.
2nd, graphite boat access times are calculated by daily output：Day access times=board Gross Output/per boat shipped quantity/
Board graphite boat quantity.The shortcoming of this method is：Accuracy is poor
3rd, manual record access times are passed through：Graphite boat is passed in and out information and all recorded by producers every time, comes off duty tired
Meter.The shortcoming of this method is：In labor intensive man-hour, increase management difficulty.
4th, checked by board server：Looked into by Centrotherm board CCC servers and take graphite boat access times.
The shortcoming of this method is：There is search access right, inquiry is inconvenient.
Therefore, a kind of graphite boat access times statistical method based on MES system how is provided, with timely, accurate management and control
Graphite boat access times, so that plated film aberration fraction defective is reduced, as those skilled in the art's important skill urgently to be resolved hurrily
Art problem
The content of the invention
The shortcoming of prior art in view of the above, it is an object of the invention to provide a kind of graphite based on MES system
Boat access times statistical method, it is poor for solving graphite boat access times method of control accuracy in the prior art, expend people
Power man-hour, inquiry is inconvenient, causes the problem of crystal silicon chip bad order ratio is raised.
In order to achieve the above objects and other related objects, a kind of graphite boat based on MES system of present invention offer uses secondary
Number statistical method, comprises the following steps：
S1：When graphite boat enters film coating equipment, the boat number and currently used number of times of graphite boat are obtained, and by the stone of acquisition
In black boat data Cun Chudao film coating equipment servers；
S2：The graphite boat data being stored in the film coating equipment server are read by MES system server, and shown
Onto the display screen of MES system.
Alternatively, in the step S1, when graphite boat enters film coating equipment, film coating equipment computer software interface is passed through
The boat number and currently used number of times of graphite boat are manually entered, the film coating equipment server is by the graphite boat data record of input.
Alternatively, in the step S2, the MES system server reads the film coating equipment by JAVA formulas and taken
The document content for device record graphite boat data of being engaged in, and the content in the document is parsed, read the boat number and access times in document
It is written to database to specify in table, database described in the MES system server lookup specifies the data in table, and is shown to described
On display screen.
Alternatively, as defined in being reached when graphite boat after access times, and reached the standard grade again after over cleaning, the MES system
Server resets the original access times of the graphite boat.
Alternatively, the MES system server is updated the data according to predetermined period.
Alternatively, the MES system server update data comprise the following steps：JAVA formulas are called to inquire about in database
Graphite boat data, and by the graphite boat data in the database and the film coating equipment server record graphite boat data
Document content is contrasted, if graphite boat data change, by graphite boat number new on the film coating equipment server
Specified according to write into Databasce in table.
Alternatively, the predetermined period is one hour.
Alternatively, the MES system server also judges whether graphite boat access times reach early warning by JAVA formulas
Number of times or more than setting number of times, and judges whether to need to be transmitted operation, is taken if so, then sending prompting message to default mail
Business device.
Alternatively, the film coating equipment is plasma reinforced chemical vapour deposition film coating equipment.
As described above, the graphite boat access times statistical method based on MES system of the present invention, with following beneficial effect
Really：The present invention makes the graphite boat of input use data transmission to film coating equipment service by being set to film coating equipment system
Device, then film coating equipment server data and MES system are interacted so that the behaviour in service of graphite boat is intuitively presented on MES
In system.The present invention changes the way of demographic's number of times, and system captures number of times automatically, reduces manually, can improve accurate
Property.The present invention is once changed into updating the data by predetermined period from every order of classes or grades at school statistics, is updated once within such as one hour, promptness is strong.
Intuitively presented the invention enables graphite boat state, data system record, trackability is strong.The present invention can also use secondary in graphite boat
Number is to reach early warning number of times or carry out mail reminder more than when setting number of times.The present invention effectively reduces cost of labor and managed into
This, by accurate management and control, makes CVD stations aberration fraction defective be down to 0.5% by 0.9%, is conducive to improving productivity effect.
Brief description of the drawings
Fig. 1 is shown as the structural representation of PECVD film coating equipments.
Fig. 2 is shown as the A-A of structure shown in Fig. 1 to profile.
Fig. 3 is shown as the enlarged drawing in region shown in dotted-line ellipse frame in Fig. 1.
Fig. 4 is shown as the flow chart of the graphite boat access times statistical method based on MES system of the present invention.
Fig. 5 is shown as the schematic diagram of the graphite boat access times statistical method based on MES system of the present invention.
Component label instructions
S1~S2 steps
Embodiment
Illustrate embodiments of the present invention below by way of specific instantiation, those skilled in the art can be by this specification
Disclosed content understands other advantages and effect of the present invention easily.The present invention can also pass through specific realities different in addition
The mode of applying is embodied or practiced, the various details in this specification can also based on different viewpoints with application, without departing from
Various modifications or alterations are carried out under the spirit of the present invention.
Fig. 4 is referred to Fig. 5.It should be noted that the diagram provided in the present embodiment only illustrates this in a schematic way
The basic conception of invention, then in schema only display with relevant component in the present invention rather than according to package count during actual implement
Mesh, shape and size are drawn, and kenel, quantity and the ratio of each component can be a kind of random change during its actual implementation, and its
Assembly layout kenel may also be increasingly complex.
The present invention provides a kind of graphite boat access times statistical method based on MES system, referring to Fig. 4, being shown as this
The flow chart of method, comprises the following steps：
S1：When graphite boat enters film coating equipment, the boat number and currently used number of times of graphite boat are obtained, and by the stone of acquisition
In black boat data Cun Chudao film coating equipment servers；
S2：The graphite boat data being stored in the film coating equipment server are read by MES system server, and shown
Onto the display screen of MES system.
As an example, the film coating equipment is plasma reinforced chemical vapour deposition film coating equipment.In the present embodiment, with
Exemplified by Centrotherm PECVD film coating equipments, every film coating equipment has a computer to control four boiler tubes, and passes through
CCCRM (Centrotherm Cell Controller Recipe Manager) software comes tissue, management and input/output work
Skill etc..Merely illustrative herein, in other embodiments, the film coating equipment can also use the film coating equipment of other models, this
Place should not too be limited the scope of the invention.
The MES system is manufacturing enterprise's production process execution system, is a set of Manufacture Enterprise workshop execution level
Production information management system.MES can be provided for enterprise including Manufacturing Data Management, plan scheduling management, production scheduling pipe
Reason, stock control, quality management, human resource management, work centre/equipment control, instrument tool management, purchasing management, into
The management modules such as this management, project kanban system, production process control, bottom data integrated analysis, the integrated decomposition of upper layer data.
As an example, the MES system is divided into 9 modules：It is workform management module, production procedure tracing module, basic
Material management module (include graphite boat management system), handling of goods and materials module, authority management module, Reports module, warehouse module,
Statistical Process Control module, IV enquiry modules.This 9 modules from job cardss-work order distribution-work order transfer the production of material-work order-
The job streams such as work order accounting processing-processing procedure procedural test data-each account production report inquiry-work order input work-finishing operation
Journey is completed in MES system, and staff can be understood that work order produces accounting processing by MES, and the work order is current
The relevant informations such as process status.
Specifically, in the step S1, when graphite boat enters film coating equipment, passing through film coating equipment computer software interface
The boat number and currently used number of times of graphite boat are manually entered, the film coating equipment server is by the graphite boat data record of input.
In the step S2, the MES system server reads the film coating equipment server record graphite boat by JAVA formulas
The document content of data, and parse the content in the document, reads boat number and access times in document and is written to database and specify
In table, database described in the MES system server lookup specifies the data in table, and is shown on the display screen.
As an example, the document format of the document content is .ini, carried by the film coating equipment server.The number
Oracle database is used according to storehouse.
Specifically, graphite boat needs to be cleaned after reaching defined access times, reached the standard grade again again after cleaning.This implementation
In example, after graphite boat reaches defined access times, and reached the standard grade again after over cleaning, the MES system server should
The original access times of graphite boat are reset, and restart to count.
Further, as defined in being reached when graphite boat after access times, in the MES system, by boat Status Change
During to disassemble, the MES system server transfers the document of the film coating equipment server record graphite boat data by program
Content, deletes the boat number and access times data of the graphite boat.As shown in figure 5, being shown as the stone based on MES system of the present invention
The schematic diagram of black boat access times statistical method.
In order to ensure in the promptness of data renewal, the present invention, the MES system server updates number according to predetermined period
According to.As an example, the predetermined period, which is one hour, i.e., one hour, updates a data, promptness is strong.Certainly, it is described default
Cycle can be adjusted as needed
Specifically, the MES system server update data comprise the following steps：JAVA formulas are called to inquire about in database
Graphite boat data, and by the graphite boat data in the database and the film coating equipment server record graphite boat data
Document content is contrasted, if graphite boat data change, by graphite boat number new on the film coating equipment server
Specified according to write into Databasce in table.
It is of the invention based on MES in order to avoid the excessive graphite boat of access times is continuing with causing coating quality to decline
The step of graphite boat access times statistical method of system still further comprises prompting.
Specifically, the MES system server judges whether graphite boat access times reach early warning time by JAVA formulas
Count or more than setting number of times, and judge whether to need to be transmitted operation, if so, then sending prompting message to default mail service
Device, to remind manufacturing department, research and development department and equipment portion administrative staff to be disassembled in time to graphite boat.
As an example, access times reach early warning number of times, mail reminder 1 time, access times exceed after setting number of times, every time
There is mail reminder.
It was verified that the graphite boat access times statistical method based on MES system of the present invention is by accurate management and control, can be with
CVD stations aberration fraction defective is set to be down to 0.5% by 0.9%.
In summary, the graphite boat access times statistical method of the invention based on MES system passes through to film coating equipment system
System is set, and makes the graphite boat of input using data transmission to film coating equipment server, then by film coating equipment server data
Interacted with MES system so that the behaviour in service of graphite boat is intuitively presented in MES system.The present invention changes personnel's system
The way of metering number, system captures number of times automatically, reduces manually, can improve accuracy.The present invention is counted once by every order of classes or grades at school
It is changed into updating the data by predetermined period, updates once within such as one hour, promptness is strong.It is in intuitively the invention enables graphite boat state
Existing, data system record, trackability is strong.The present invention can also be to reach early warning number of times or more than setting in graphite boat access times
Mail reminder is carried out during number of times.The present invention effectively reduces cost of labor and management cost, by accurate management and control, makes CVD stations color
Poor fraction defective is down to 0.5% by 0.9%, is conducive to improving productivity effect.So, the present invention effectively overcomes of the prior art
Various shortcoming and have high industrial utilization.
The above-described embodiments merely illustrate the principles and effects of the present invention, not for the limitation present invention.It is any ripe
Know the personage of this technology all can carry out modifications and changes under the spirit and scope without prejudice to the present invention to above-described embodiment.Cause
This, those of ordinary skill in the art is complete without departing from disclosed spirit and institute under technological thought such as
Into all equivalent modifications or change, should by the present invention claim be covered.
Claims (9)
1. a kind of graphite boat access times statistical method based on MES system, it is characterised in that comprise the following steps：
S1：When graphite boat enters film coating equipment, the boat number and currently used number of times of graphite boat are obtained, and by the graphite boat of acquisition
In data Cun Chudao film coating equipment servers；
S2：The graphite boat data being stored in the film coating equipment server are read by MES system server, and are shown to
On the display screen of MES system.
2. the graphite boat access times statistical method according to claim 1 based on MES system, it is characterised in that：In institute
State in step S1, when graphite boat enters film coating equipment, the boat of graphite boat is manually entered by film coating equipment computer software interface
Number and currently used number of times, the film coating equipment server is by the graphite boat data record of input.
3. the graphite boat access times statistical method according to claim 1 based on MES system, it is characterised in that：In institute
State in step S2, the MES system server reads the film coating equipment server record graphite boat data by JAVA formulas
Document content, and parse the content in the document, read boat number and access times in document and be written to database and specify in table,
Database described in the MES system server lookup specifies the data in table, and is shown on the display screen.
4. the graphite boat access times statistical method according to claim 1 based on MES system, it is characterised in that：Work as stone
Mo Zhou is reached after defined access times, and is reached the standard grade again after over cleaning, and the MES system server is original by the graphite boat
Access times reset.
5. the graphite boat access times statistical method according to claim 1 based on MES system, it is characterised in that：It is described
MES system server is updated the data according to predetermined period.
6. the graphite boat access times statistical method according to claim 5 based on MES system, it is characterised in that：It is described
MES system server update data comprise the following steps：The graphite boat data for calling JAVA formulas to inquire about in database, and by institute
The document content for stating graphite boat data and the film coating equipment server record graphite boat data in database is contrasted, such as
Fruit graphite boat data change, then graphite boat data write into Databasce new on the film coating equipment server are specified into table
In.
7. the graphite boat access times statistical method according to claim 5 based on MES system, it is characterised in that：It is described
Predetermined period is one hour.
8. the graphite boat access times statistical method according to claim 1 based on MES system, it is characterised in that：It is described
MES system server also judges whether graphite boat access times reach early warning number of times or more than setting number of times by JAVA formulas,
And judge whether to need to be transmitted operation, if so, then sending prompting message to default mail server.
9. the graphite boat access times statistical method according to claim 1 based on MES system, it is characterised in that：It is described
Film coating equipment is plasma reinforced chemical vapour deposition film coating equipment.
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| CN109935640A (en) * | 2019-04-02 | 2019-06-25 | 江苏微导纳米装备科技有限公司 | A kind of film plating process of crystal silicon solar energy battery |
| CN110983301A (en) * | 2019-12-23 | 2020-04-10 | 通威太阳能（安徽）有限公司 | High-frequency automatic plating supplementing method for P equipment of coated pipe |
| CN114111620A (en) * | 2022-01-28 | 2022-03-01 | 杭州利珀科技有限公司 | Optical detection system and method for graphite boat body of crystalline silicon battery |
| CN115142052A (en) * | 2021-03-30 | 2022-10-04 | 浙江爱旭太阳能科技有限公司 | Control method of film coating system and film coating system |
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| CN115142052A (en) * | 2021-03-30 | 2022-10-04 | 浙江爱旭太阳能科技有限公司 | Control method of film coating system and film coating system |
| CN115142052B (en) * | 2021-03-30 | 2023-12-01 | 浙江爱旭太阳能科技有限公司 | Control method of coating system and coating system |
| CN114111620A (en) * | 2022-01-28 | 2022-03-01 | 杭州利珀科技有限公司 | Optical detection system and method for graphite boat body of crystalline silicon battery |
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