CN115142052B - Control method of coating system and coating system - Google Patents
Control method of coating system and coating system Download PDFInfo
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- CN115142052B CN115142052B CN202110354674.1A CN202110354674A CN115142052B CN 115142052 B CN115142052 B CN 115142052B CN 202110354674 A CN202110354674 A CN 202110354674A CN 115142052 B CN115142052 B CN 115142052B
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- 238000000034 method Methods 0.000 title claims abstract description 66
- 238000000576 coating method Methods 0.000 title claims abstract description 57
- 239000011248 coating agent Substances 0.000 title claims abstract description 56
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 146
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 146
- 239000010439 graphite Substances 0.000 claims abstract description 146
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 12
- 239000010703 silicon Substances 0.000 claims abstract description 12
- 238000007747 plating Methods 0.000 claims description 12
- 230000008569 process Effects 0.000 claims description 7
- 238000004891 communication Methods 0.000 claims description 4
- 238000012545 processing Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 22
- 239000003550 marker Substances 0.000 description 16
- 238000003801 milling Methods 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000009286 beneficial effect Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 101001073212 Arabidopsis thaliana Peroxidase 33 Proteins 0.000 description 1
- 101001123325 Homo sapiens Peroxisome proliferator-activated receptor gamma coactivator 1-beta Proteins 0.000 description 1
- 102100028961 Peroxisome proliferator-activated receptor gamma coactivator 1-beta Human genes 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000001010 compromised effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention is suitable for the technical field of solar cells, and provides a control method of a coating system and the coating system. The coating system comprises a machine and a scanner, wherein the machine is used for coating a silicon wafer carried by a graphite boat, and the control method comprises the following steps: the method comprises the steps of controlling a scanner to scan an identification component of a graphite boat to obtain identification information of the graphite boat; inquiring historical information corresponding to the identification information according to the identification information; determining control information of the machine according to the history information; and the control machine operates according to the control information. Therefore, the identification information of the graphite boat is obtained by scanning the identification component of the graphite boat, so that the corresponding historical information is obtained, and the control information is automatically determined based on the historical information of the graphite boat, so that the identification of the graphite boat and the control of the machine are not needed to be manually participated, and the efficient and accurate identification of the graphite boat and the control of the machine are facilitated.
Description
Technical Field
The invention belongs to the technical field of solar cells, and particularly relates to a control method of a coating system and the coating system.
Background
In the photovoltaic industry, silicon wafers are typically coated with an anti-reflective film by chemical vapor deposition (Chemical Vapour Deposition, CVD) equipment, which loads the wafers by graphite boats.
With the continued development of the photovoltaic industry, there is a need to more systematically manage various information in production. Generally, a number is set for each graphite boat, and before the graphite boat is subjected to the process, the number of the graphite boat is manually input on an industrial personal computer so as to record the process of each graphite boat or the silicon wafer carried by the graphite boat, thereby being convenient for tracing products. And, can discern the graphite boat based on the serial number of graphite boat to carry out manual control to the board. However, manual intervention is inefficient and prone to error.
Based on the method, how to efficiently and accurately identify the graphite boat and control the operation of the machine table becomes a technical problem to be solved urgently.
Disclosure of Invention
The application provides a control method of a coating system and the coating system, and aims to solve the problem of how to efficiently and accurately identify a graphite boat and control the operation of a machine.
In a first aspect, the present application provides a method for controlling a coating system. The coating system comprises a machine and a scanner, wherein the machine is used for coating a silicon wafer borne by a graphite boat, and the control method comprises the following steps:
controlling the scanner to scan the identification component of the graphite boat so as to obtain the identification information of the graphite boat;
Inquiring historical information corresponding to the identification information according to the identification information;
determining control information of the machine according to the history information;
and controlling the machine to run according to the control information.
Optionally, the history information includes a history use number, and the control method includes:
judging whether the historical use times are larger than preset times or not;
when the historical use times are smaller than or equal to the preset times, entering the step of determining the control information of the machine according to the historical information;
and prompting alarm information under the condition that the historical use times are larger than the preset times.
Optionally, the control method includes:
determining whether the graphite boat is matched with the machine or not;
under the condition that the graphite boat is matched with the machine, entering the step of determining the control information of the machine according to the history information;
and prompting alarm information under the condition that the graphite boat is not matched with the machine.
Optionally, the history information includes size data, the control information includes adjustment data, and determining the control information of the machine according to the history information includes:
Determining adjustment data of the machine according to the size data;
controlling the machine to run according to the control information, including:
and controlling the machine table to adjust according to the adjustment data so as to adapt to the size of the graphite boat.
Optionally, the coating system includes a server in communication with the machine, controls the scanner to scan the identification component of the graphite boat to obtain the identification information of the graphite boat, and includes:
the machine station controls the scanner to scan the identification component of the graphite boat so as to obtain the identification information of the graphite boat, and sends the identification information to the server;
inquiring historical information of the graphite boat according to the identification information, wherein the historical information comprises:
the server inquires historical information of the graphite boat according to the identification information;
the control method comprises the following steps:
the machine station sends the updated data of the graphite boat to the server;
and the server updates the history information according to the update data.
Optionally, the control method includes:
the server sends the history information before updating to the machine;
the machine processes the history information before updating to determine the updated data.
Optionally, the control method includes:
the machine station determines whether the history information corresponds to the identification information;
entering a step of processing the history information before updating by the machine to determine the updated data under the condition that the history information corresponds to the identification information;
and under the condition that the history information does not correspond to the identification information, the machine prompts alarm information.
Optionally, the control method includes:
controlling a lens of the scanner to move a preset distance from a first position to a second position; when the lens is positioned at the first position, the scanner focuses on the identification component;
and when the lens is positioned at the second position, controlling the scanner to scan the identification component.
Optionally, the numerical range of the preset distance is: greater than or equal to-5 mm and less than or equal to-2 mm, and greater than or equal to 2mm and less than or equal to 5mm.
In a second aspect, the application further provides a coating system. The coating system comprises a machine table, a scanner and a processor, wherein the machine table is used for coating the silicon wafers borne by the graphite boat, the processor is connected with the machine table and the scanner, and the processor is used for executing the control method.
According to the control method of the coating system and the coating system, the identification information of the graphite boat is obtained by scanning the identification component of the graphite boat, so that the corresponding historical information is obtained, and the control information is automatically determined based on the historical information of the graphite boat, so that the graphite boat is identified and the machine is controlled without manual participation, and the efficient and accurate identification of the graphite boat and the control of the machine are facilitated.
Drawings
FIG. 1 is a flow chart of a control method of a coating system according to an embodiment of the present application;
FIG. 2 is a schematic diagram of a coating system according to an embodiment of the present application;
FIG. 3 is a flow chart of a control method of a coating system according to an embodiment of the present application;
FIG. 4 is a flow chart of a control method of a coating system according to an embodiment of the present application;
FIG. 5 is a flow chart of a control method of a coating system according to an embodiment of the present application;
FIG. 6 is a flow chart of a control method of a coating system according to an embodiment of the present application;
FIG. 7 is a flow chart of a control method of a coating system according to an embodiment of the present application;
FIG. 8 is a flow chart of a control method of a coating system according to an embodiment of the present application;
FIG. 9 is a flow chart of a control method of a coating system according to an embodiment of the present application;
FIG. 10 is a schematic block diagram of a plating system according to an embodiment of the present application;
FIG. 11 is a schematic perspective view of a graphite boat in a coating system according to an embodiment of the present application;
FIG. 12 is a schematic plan view of an identified component in the coating system according to an embodiment of the application;
FIG. 13 is a schematic plan view showing a part of the construction of the identification component in the plating system according to the embodiment of the application;
FIG. 14 is a schematic cross-sectional view of a portion of the structure of an identification component in a plating system according to an embodiment of the application;
FIG. 15 is a schematic cross-sectional view of a portion of the structure of an identification component in a plating system according to an embodiment of the application;
FIG. 16 is a schematic cross-sectional view of a portion of the structure of an identification component in the plating system of an embodiment of the application;
FIG. 17 is a schematic cross-sectional view of a portion of the structure of an identified component in a plating system according to an embodiment of the application.
Description of main reference numerals:
coating system 1000, machine 110, scanner 120, server 130, processor 1001;
the graphite boat 100, the body 10, the connecting portion 12, the boat feet 14, the three-dimensional marking portion 20, the base plate 22, the three-dimensional marking piece 24, the side wall 26, the protruding distance A of the side wall 26, the protruding distance B of the three-dimensional marking piece 24, the depth C of the three-dimensional marking piece 24, and the distance D between two adjacent three-dimensional marking pieces 24.
DETAILED DESCRIPTION OF EMBODIMENT (S) OF INVENTION
The present application will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present application more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the application.
In the prior art, the identification of the graphite boat and the control of the machine are both manually inserted. However, manual intervention is inefficient and prone to error. The application provides a control method of a coating system and the coating system, wherein identification information of a graphite boat is obtained by scanning an identification part of the graphite boat, so that corresponding historical information is obtained, and further control information of a machine is determined, so that the identification of the graphite boat and the control of the machine do not need to be manually participated, and the high-efficiency and accurate identification of the graphite boat and the control of the machine are facilitated.
Referring to fig. 1 and 2, the present application provides a control method of a plating system 1000. The coating system 1000 includes a machine 110 and a scanner 120, the machine 110 is used for coating a silicon wafer carried by a graphite boat, and the control method includes:
step S11: the control scanner 120 scans the identification component of the graphite boat to obtain identification information of the graphite boat;
Step S12: inquiring historical information corresponding to the identification information according to the identification information;
step S17: determining control information of the machine 110 according to the history information;
step S18: the control station 110 operates according to the control information.
In the coating system 1000 of the embodiment of the application, the identification information of the graphite boat is obtained by scanning the identification component of the graphite boat so as to obtain the corresponding historical information, and the control information is automatically determined based on the historical information of the graphite boat, so that the identification of the graphite boat and the control of the machine 110 do not need to be manually participated, and the efficient and accurate identification of the graphite boat and the control of the machine 110 are facilitated.
Moreover, because the control information is determined based on the historical information of the graphite boat, the control of the machine 110 can be adapted to the graphite boat, which is beneficial to guaranteeing the coating effect.
Specifically, in step S11 of the present embodiment, the identification information includes the number of the graphite boat. Each graphite boat corresponds to a number that distinguishes one graphite boat from the other. The number of the graphite boat may be at least one of a number, a letter, a symbol, and a character. The number of the graphite boat can be 1 bit, 2 bits, 3 bits, 4 bits or character strings of other numbers. The specific form of numbering is not limited herein.
In other embodiments, the identification information may also include at least one of a name, a size, a material, etc. of the graphite boat. Specific contents representing the identification information are not limited herein.
In this embodiment, the identification component includes a substrate and a plurality of three-dimensional identification pieces provided on the substrate, and the plurality of three-dimensional identification pieces form a two-dimensional code on the orthographic projection of the substrate, and each three-dimensional identification piece includes a curved surface. In other words, the identification member of the present embodiment is a three-dimensional identification member. Therefore, the graphite boat can be identified based on the two-dimensional code, and the tedious and error-prone of manual input are avoided. Further, the plurality of three-dimensional markers may improve the recognizability of the three-dimensional marker based on the depth information thereof, and the three-dimensional marker including the curved surface may improve the contrast of the three-dimensional marker based on the curvature thereof. Thus, the graphite boat is advantageously and efficiently identified.
It will be appreciated that in other embodiments, the identification member may be a two-dimensional identification member, such as a two-dimensional code, number, character, etc. attached to a graphite boat. In other alternative embodiments, the identification feature may also include numbers, characters, text, etc. engraved or affixed in the graphite boat. Image recognition can be performed on a picture taken by a scanner, such as a camera, to identify the identification information. The specific form of the identification means and the specific manner of identification of the identification means are not limited herein.
Specifically, in this embodiment, the scanner includes an embedded two-dimensional code scanning module, and the embedded two-dimensional code scanning module can directly use an RJ45 interface, and is used by all chemical vapor deposition (Chemical Vapor Deposition, CVD) devices through a general TCP communication protocol.
Further, CVD equipment includes, but is not limited to, plasma enhanced chemical vapor deposition (Plasma Enhanced Chemical Vapor Deposition, PECVD) equipment, fabrication equipment for passivating emitter back contact cells (Passivated Emitter Rear Contact, PERC), and the like.
In step S12, history information corresponding to the identification information may be queried out of the plurality of history information according to the identification information. Therefore, the screening is performed based on the identification information, the screened historical information is guaranteed to be related to the identification information, the follow-up control information determined based on the historical information can be guaranteed to be suitable for the graphite boat, and therefore the film coating effect is guaranteed.
Specifically, the historical information includes, but is not limited to, historical number of uses of the graphite boat, calibration data, on-line time, calibration time, product information, job ticket number, and the like. The specific content of the history information is not limited here.
In step S17, the control information includes, but is not limited to, control signals, control parameters, adjustment data, and the like. The specific content of the control information is not limited here.
In step S18, the controllable machine is started or closed according to the control signal; the controllable machine platform is used for coating the silicon wafers carried by the graphite boat according to the control parameters; the controllable machine is adjusted according to the adjustment data so as to adapt to the size of the graphite boat. The specific case in which the control station operates according to the control information is not limited here.
Referring again to fig. 2, the plating system 1000 may further include a server 130, where the server 130 communicates with the machine 110.
In the present embodiment, step S11 is performed by the machine 110, step S12 is performed by the server 130, step S17 is performed by the server 130, and step S18 is performed by the machine. In other words, in the present embodiment: the machine 110 controls the scanner 120 to scan the identification component of the graphite boat to obtain the identification information of the graphite boat; the machine 110 sends the identification information to the server 130; the server 130 queries the history information corresponding to the identification information according to the identification information and determines the control information of the machine 110 according to the history information; the server 130 sends the control information to the machine 110; the machine 110 operates according to the control information.
In this way, the inquiry history information and the determination control information are transmitted to the server 130, and the scanning of the identification component and the control of the machine are transmitted to the machine, so that the decision speed is improved, the reliability of identification and control is ensured, and the graphite boat can be efficiently and accurately identified and the machine can be controlled to operate.
In particular, the server 130 may be a server of a manufacturing enterprise production process execution management system (Manufacturing Execution System, MES system).
Note that any one of steps S11, S12, S17, and S18 may be executed by the machine 110 or the server 130, and the execution subject of the steps is not limited herein. In other words, the foregoing is merely an example and is not representative of the limitations on the execution subject of the steps.
Similarly, the following steps may be performed by the machine 110 or the server 130, unless otherwise specified. The explanation and description of the execution body will be referred to the foregoing, and the description will not be repeated for the sake of redundancy.
Referring to fig. 3, optionally, the history information includes a history usage number, and the control method includes:
step S131: judging whether the historical use times are larger than preset times or not; and enter step S17 if the number of times of history use is less than or equal to the preset number of times;
step S132: and prompting alarm information under the condition that the historical use times are larger than the preset times.
Therefore, the use times of the graphite boat can be limited by the preset times, and the problem that the coating effect is poor due to the fact that the use times of the graphite boat are too high is avoided. Specifically, the historical usage times refer to the times that the graphite boat is used by the machine, that is, the times that the graphite boat is operated by the machine. Specifically, the preset number of times includes, but is not limited to, 1 time, 2 times, 3 times, 4 times, or other number. Specific values of the preset number of times are not limited herein. The preset times can be input into the coating system by a worker, and can also be calculated based on the acquired parameters. The source of the predetermined number of times is not limited here.
Specifically, the alarm information can be prompted by at least one mode of broadcasting voice, playing alarm bell, displaying caption and lighting alarm lamp. The specific form and specific prompting mode of the alarm information are not limited herein.
Alternatively, in the case where the historical number of uses is greater than the preset number, the stage 110 may be controlled to operate so that the graphite boat is removed from the stage 110. Thus, the automatic discharge of the graphite boat is realized.
Referring to fig. 4, optionally, the control method includes:
step S141: determining whether the graphite boat is matched with the machine 110; and step S17 is performed when the graphite boat is matched with the machine 110;
step S142: in the event that the graphite boat is not matched with the platen 110, an alarm message is prompted.
In this way, under the condition that the graphite boat is not matched with the machine 110, the control method is timely alarmed and stopped, so that errors caused by the fact that the control method is continuously executed when the graphite boat is not matched with the machine 110 are avoided, and safety and reliability of control are guaranteed.
Specifically, in step S141, a pre-stored correspondence and a number of the machine 110 may be obtained, and whether the graphite boat is matched with the machine 110 may be determined according to the correspondence, the identification information of the graphite boat, and the number of the machine 110. Further, in the case that the identification information of the graphite boat and the number of the machine 110 are determined to correspond according to the correspondence, it is determined that the graphite boat is matched with the machine 110; in the case that the identification information of the graphite boat and the number of the machine 110 are determined not to correspond according to the correspondence relationship, it is determined that the graphite boat is not matched with the machine 110. In this manner, it may be determined whether the graphite boat is matched with the stage 110 based on the pre-stored correspondence.
Specifically, in step S141, the history information includes the machine data matched with the graphite boat, and the number of the machine 110 may also be obtained; in the case that the machine data includes the number of the machine 110, determining that the graphite boat matches the machine 110; in the case that the station data does not include the number of the station 110, it is determined that the graphite boat does not match the station 110. In this manner, it may be determined whether the graphite boat matches the platen 110 based on the history information.
The specific manner of determining whether the graphite boat is matched to the platen 110 is not limited herein.
Similarly, the alarm information can be prompted by at least one of broadcasting voice, playing alarm bell, displaying caption, and lighting alarm lamp. The specific form and specific prompting mode of the alarm information are not limited herein.
Alternatively, in the event that the graphite boat does not match the platen 110, the platen 110 may be controlled to operate to remove the graphite boat from the platen 110. Thus, the automatic discharge of the graphite boat is realized.
Referring to fig. 5, optionally, the history information includes size data, the control information includes adjustment data, and step S17 includes:
step S171: determining adjustment data of the machine 110 according to the size data;
step S18 includes:
step S181: the control stage 110 adjusts according to the adjustment data to adapt to the size of the graphite boat.
Thus, the adjustment data of the machine 110 is determined according to the size data of the graphite boat, so that the machine 110 is adapted to the size of the graphite boat after being adjusted according to the adjustment data, thereby being beneficial to ensuring the smoothness of the coating process and ensuring the coating effect. Thus, the precision problem of PRPE automation can be solved, and the method is a complete set of automation solution.
Specifically, the size data includes various sizes of graphite boats. Such as the length, width, height of the graphite boat. Specifically, in step S171, the target size of the machine 110 may be determined according to the size data, the current size of the graphite boat may be obtained, and the adjustment data of the machine 110 may be determined according to the current size and the target size. The target size is the size of the platen 110 when the platen 110 is mated with a graphite boat. The adjustment data is the data that needs to be adjusted in the process of adjusting the machine 110 from the current size to the target size.
Referring to fig. 6, optionally, the plating system 1000 includes a server 130 in communication with the machine 110, and step S11 includes:
step S111: the machine 110 controls the scanner 120 to scan the identification component of the graphite boat to obtain the identification information of the graphite boat, and sends the identification information to the server 130;
Step S12 includes:
step S121: the server 130 queries history information corresponding to the identification information according to the identification information;
the control method comprises the following steps:
step S161: the machine 110 sends the updated data of the graphite boat to the server 130;
step S163: the server 130 updates the history information according to the update data.
In this way, the server 130 stores and updates the history information, so that the machine 110 does not need to store all the history information, and the storage burden of the machine 110 is reduced. In addition, all the history information is centrally managed by the server 130, so that the management and inquiry of the history information are more convenient, and the error-prone caused by the fact that the history information is scattered on each machine 110 is avoided.
Specifically, the update data includes, but is not limited to, the number of the current machine 110, the current work order number, the current product information, the current number of uses. The specific content of the update data is not limited here.
In the example of fig. 6, step S161 and step S163 occur before step S17. It will be appreciated that in other examples, steps S161 and S163 may occur after step S17. The specific order of execution of the steps is not limited herein.
Referring to fig. 7, optionally, the control method includes:
step S162: the server 130 determines whether the update data corresponds to the history information; and in the case where the update data corresponds to the history information, go to step S163;
step S164: in the case where the history information does not correspond to the identification information, the station 110 prompts the alarm information.
Thus, foolproof is realized, the history information is still updated according to the updated data when the updated data does not correspond to the history information, and the accuracy of the history information is ensured, so that the machine 110 is accurately controlled. It will be appreciated that there is a possibility of error in the transmission of data between the station 110 and the server 130. Therefore, the error data can be prevented from affecting the historical information, and the alarm can be given in time when the error is found, so that the manager knows the error, and the fault detection is convenient.
Specifically, the update data may include a first number, where the first number is a number of a graphite boat currently located in the machine 110, the history information may include a second number, where the second number is a number of a graphite boat corresponding to the history information, and the update data is determined to correspond to the history information when the first number and the second number are the same; in the case where the first number and the second number are different, it is determined that the update data does not correspond to the history information. Therefore, whether the updated data corresponds to the historical information or not can be determined according to the serial number of the graphite boat, and the efficiency is high.
Similarly, the alarm information can be prompted by at least one of broadcasting voice, playing alarm bell, displaying caption, and lighting alarm lamp. The specific form and specific prompting mode of the alarm information are not limited herein.
Referring to fig. 8, optionally, the control method includes:
step S151: the server 130 sends the history information before the update to the machine 110;
step S153: the station 110 processes the pre-update history information to determine updated data.
Thus, the update data is determined according to the history information before update, so that the update data is related to the history information, and the update data is ensured to update the history information. In addition, the update data is determined by the machine 110, so that the data collected by the machine 110 is uploaded to the server 130.
Specifically, the station 110 may determine the content of the history information according to the history information before updating, and determine the data related to the content of the history information as the updated data. For example, the history information before the update includes the number of the station 110 using the graphite boat, and the station may determine that the update data includes the number of the current station 110. In this way, the machine 110 simply and conveniently knows which data needs to be determined as the update data, so that errors and confusion of the update data are avoided, and the accuracy and efficiency of updating the history information are guaranteed.
Referring to fig. 9, optionally, the control method includes:
step S152: the machine 110 determines whether the history information corresponds to the identification information; and proceeds to step S153 if the history information corresponds to the identification information;
step S154: in the case where the history information does not correspond to the identification information, the station 110 prompts the alarm information.
Therefore, foolproof is realized, the history information before update is still processed to determine the update data when the history information does not correspond to the identification information, and the accuracy of the update data is ensured, so that the history information is ensured to be accurately updated. It will be appreciated that there is a possibility of error in the transmission of data between the station 110 and the server 130. Therefore, the error data can be prevented from affecting the historical information, and the alarm can be given in time when the error is found, so that the manager knows the error, and the fault detection is convenient.
Specifically, the identification information may include a third number, where the third number is the number of the graphite boat currently located in the machine 110, the history information may include a fourth number, where the fourth number is the number of the graphite boat corresponding to the history information, and the identification information is determined to correspond to the history information when the third number and the fourth number are the same; in the case where the third number and the fourth number are different, it is determined that the identification information does not correspond to the history information. Therefore, whether the identification information corresponds to the historical information or not can be determined according to the number of the graphite boat, and the efficiency is high.
Similarly, the alarm information can be prompted by at least one of broadcasting voice, playing alarm bell, displaying caption, and lighting alarm lamp. The specific form and specific prompting mode of the alarm information are not limited herein.
Optionally, the control method includes:
controlling the lens of the scanner 120 to move a preset distance from the first position to move to the second position; wherein, when the lens is at the first position, the scanner 120 focuses on the identification component;
when the lens is in the second position, the scanner 120 is controlled to scan the identification component.
In this way, it is ensured that the identification means can be identified. It will be appreciated that the identification means has the problem of being unable to capture identification within a clear field of view. For example, when the identification member is a dot-shaped two-dimensional code, the identification member cannot be captured and recognized in a clear field of view. And the lens is moved from the first position with clear imaging to the second position by a preset distance, so that the scanned image is slightly blurred, and the identification component can be identified.
Specifically, when the lens is in the first position, since the scanner 120 focuses on the identification member, the image scanned by the scanner 120 when the lens is in the first position is clear. After the lens is moved to the second position, the scanned image is blurred because the position of the lens is changed and refocusing is not performed.
Optionally, the range of values of the preset distance is: greater than or equal to-5 mm and less than or equal to-2 mm, and greater than or equal to 2mm and less than or equal to 5mm. In this way, the image scanned by the scanner 120 at the second position is not recognized by mistake due to over-blurring or is not recognized by too much clarity, which is beneficial to ensuring the accuracy of the scanned identification information.
Specifically, the preset distance is, for example: -5mm, -4.3mm, -4mm, -3.2mm, -2.8mm, -2mm, 2.6mm, 3.1mm, 3.7mm, 4.8mm, 5mm. Specific values of the preset distance are not limited herein.
Referring to fig. 10, the present application further provides a coating system 1000. The coating system 1000 includes a machine 110, a scanner 120, and a processor 1001, where the machine 110 is used to coat a silicon wafer carried by a graphite boat, the processor 1001 is connected to the machine 110 and the scanner 120, and the processor 1001 is used to execute a control method as described above.
For example, perform: step S11: the control scanner 120 scans the identification component of the graphite boat to obtain identification information of the graphite boat;
step S12: inquiring historical information corresponding to the identification information according to the identification information;
step S17: determining control information of the machine 110 according to the history information;
Step S18: the control station 110 operates according to the control information.
In the coating system 1000 of the embodiment of the invention, the identification information of the graphite boat is obtained by scanning the identification component of the graphite boat so as to obtain the corresponding historical information, and the control information is automatically determined based on the historical information of the graphite boat, so that the identification of the graphite boat and the control of the machine 110 do not need to be manually participated, and the efficient and accurate identification of the graphite boat and the control of the machine 110 are facilitated.
Note that the processor 1001 may be a processor of the machine 110; may be a processor of server 130; the processor 1001 may also include a processor of the machine 110 and a processor of the server 130. In other words, any of the above control methods may be performed by the machine 110, the server 130, or both the machine 110 and the server 130. For the explanation and explanation of the execution body, please refer to the foregoing, and the description is omitted herein for avoiding redundancy.
Further, the processors of the machine 110 include, but are not limited to, programmable logic controllers (Programmable Logic Controller, PLCs) and industrial personal computers.
Please note that, for other explanation and explanation of the coating system 1000, please refer to the explanation and explanation of the control method, which is omitted herein for redundancy.
As previously described, the platen 110 is used to coat silicon wafers carried by a graphite boat that includes identification features. The structure of the graphite boat, and in particular the structure of the identification means, is further described below.
Note that the foregoing "identification means" includes the following "three-dimensional identification portion". In other words, the "three-dimensional identification" hereinafter is one embodiment of the foregoing "identification means". The following "three-dimensional identification portion" is used to explain the foregoing "identification member" and does not represent a limitation of the foregoing "identification member".
Referring to fig. 11 and 12, a graphite boat 100 provided in an embodiment of the present application includes a body 10 and a three-dimensional identifier 20 disposed on the body 10, the three-dimensional identifier 20 includes a substrate 22 and a plurality of three-dimensional identifiers 24 disposed on the substrate 22, the plurality of three-dimensional identifiers 24 form a two-dimensional code by orthographic projection of the substrate 22, and each three-dimensional identifier 24 includes a curved surface.
In the graphite boat 100 of the embodiment of the application, the two-dimensional codes are formed by the orthographic projections of the plurality of three-dimensional identifiers 24 on the substrate 22, so that the graphite boat 100 can be identified based on the two-dimensional codes, and the complexity and the error of manual input are avoided. Moreover, the plurality of three-dimensional markers 24 may improve the identifiability of the three-dimensional marker 20 based on the depth information thereof, and the three-dimensional marker 24 including a curved surface may improve the contrast of the three-dimensional marker 20 based on the curvature thereof. In this way, the graphite boat 100 is advantageously efficiently and accurately identified.
It can be understood that in the related art, when the PECVD apparatus is coating a silicon wafer carried by a graphite boat, the mark of the graphite boat is also easily coated and discolored, resulting in poor contrast, so that the mark has poor identifiability and cannot be used continuously. Moreover, even if the three-dimensional mark portion of depth is formed by grooving, the contrast ratio of the groove inner wall and the non-grooved edge portion is still poor at some angles, resulting in still poor recognition.
In the present application, however, since the three-dimensional marking member 24 includes a curved surface, the three-dimensional marking member 24 exhibits a good contrast even when the color of the three-dimensional marking member is similar to that of the surrounding object after the continuous coating, thereby making the three-dimensional marking portion 20 highly recognizable and enabling the three-dimensional marking portion 20 to be continuously used.
Further, in the present application, the three-dimensional marking member 24 has a depth, and even if the three-dimensional marking member 24 is similar in color to the surrounding object, the three-dimensional marking member 24 can be distinguished from the surrounding object based on the depth information, thereby making the three-dimensional marking portion 20 excellent in recognizability.
In particular, the number of three-dimensional identifiers 24 may be 1, 2, 3, 5, 15, 23, or other numbers, the specific number of three-dimensional identifiers 24 not being limited herein.
Referring again to fig. 11, optionally, the body 10 includes a connection portion 12 and a plurality of boat feet 14, the boat feet 14 are connected by the connection portion 12, and the three-dimensional identifier 20 is disposed on an outer surface of the connection portion 12. Thus, the three-dimensional identifier 20 is located at a lower position, and does not interfere with the normal operation of the graphite boat 100. Further, the three-dimensional identification portion 20 is provided on the outer surface of the connection portion 12, so that the three-dimensional identification portion 20 can be photographed and recognized.
Specifically, the connection 12 includes, but is not limited to, a connection tube, a connection rod, or other types of components, and the specific form of the connection 12 is not limited herein.
Alternatively, the graphite boat 100 includes a displacement mechanism, where the three-dimensional marking portion 20 is provided, for movement under the force of external force to change the position of the three-dimensional marking portion 20. In this way, the position of the three-dimensional identification portion 20 is caused to change so as to be photographed and recognized.
Specifically, the displacement mechanism may include a sliding rail and a sliding groove, the sliding rail is disposed on the three-dimensional identification portion 20, the sliding groove is formed on the connecting portion 12, and the sliding rail can move along the sliding groove under the action of external force to drive the three-dimensional identification portion 20 to move. In this way, changing the position of the three-dimensional identification portion 20 at the connection portion 12 can be simply and conveniently achieved.
Alternatively, the three-dimensional marking part 20 may include a first connector, and the body 10 may include a plurality of second connectors having different positions, and the three-dimensional marking part 20 is fixedly connected with the body 10 in a state that the second connectors are mated with the first connectors. In this way, the position of the three-dimensional marking portion 20 in the body 10 can be changed by changing the second connector that mates with the first connector so as to be photographed and recognized by the three-dimensional marking portion 20.
Specifically, the first connecting member may be one of a screw and a screw hole, and the second connecting member may be the other of a screw and a screw hole, and the first connecting member and the second connecting member may be connected by screw. In other examples, the first connector and the second connector may be connected by snaps, velcro, adhesive tape, or other means. The description is not limited thereto.
Referring to fig. 13, alternatively, the three-dimensional identifier 24 may be circular in orthographic projection on the substrate 22. In this way, the dot-shaped two-dimensional codes are formed by the orthographic projection of the plurality of three-dimensional identifiers 24 on the substrate 22, so that the recognition is facilitated, and the recognition efficiency is improved.
It will be appreciated that in other examples, the orthographic projection of the three-dimensional identifier 24 on the substrate 22 may be elliptical, racetrack, or other shape, without limitation.
Referring to fig. 14, 15 and 16, the three-dimensional identifier 24 may alternatively be hemispherical. In this way, the spherical surface provides a better contrast of the three-dimensional marker 24, which is advantageous for improving the recognizability of the three-dimensional marker 20.
It will be appreciated that in other examples, the three-dimensional identifier 24 may be spherical, ellipsoidal, or otherwise shaped, and the particular shape of the three-dimensional identifier 24 is not limited herein.
Referring to fig. 14, optionally, each three-dimensional identifier 24 protrudes outwardly from the base 22. In this manner, the three-dimensional identifier 24 is made to form a height difference with the base plate 22, which is advantageous for improving the recognizability of the three-dimensional identifier 24 based on depth.
Specifically, the three-dimensional identifier 24 includes a bottom plane provided on the substrate 22 and a curved surface protruding from the substrate 22.
In this way, the contact surface between the three-dimensional identifier 24 and the substrate is made to be a plane, so that the three-dimensional identifier 24 is ensured to be stably connected with the substrate 22 and cannot easily fall off. And the curved surface protruding from the base plate 22 provides the three-dimensional identifier 24 with good contrast, thereby ensuring the identifiability of the three-dimensional identifier 24.
Referring to fig. 15, alternatively, the three-dimensional marking part 20 includes a sidewall 26 protruding outward from the edge of the substrate 22, the protruding direction of the sidewall 26 is the same as the protruding direction of the three-dimensional marking member 24, and the protruding distance a of the sidewall 26 is greater than the protruding distance B of the three-dimensional marking member 24.
In this way, the side wall 26 can maintain the interval between the three-dimensional identifier 24 and the external object when the external object approaches the three-dimensional identifier 24, so as to avoid the three-dimensional identifier 24 from being worn by the external object due to direct contact between the three-dimensional identifier 24 and the external object, thereby avoiding the curved surface of the three-dimensional identifier 24 from being damaged, and being beneficial to ensuring the identifiability of the three-dimensional identifier 24.
Referring to fig. 16, optionally, each three-dimensional identifier 24 is recessed inwardly from the base 22. In this manner, the three-dimensional identifier 24 is made to form a height difference with the base plate 22, which is advantageous for improving the recognizability of the three-dimensional identifier 24 based on depth.
Specifically, the curved surface of the three-dimensional identifier 24 is recessed inward from the surface of the substrate 22. It will be appreciated that, since the curved surface of the three-dimensional identifier 24 is lower than the surface of the substrate 22, the surface of the substrate 22 can maintain the spacing between the curved surface of the three-dimensional identifier 24 and the foreign object, thereby avoiding damage to the curved surface of the three-dimensional identifier 24 and ensuring the identifiability of the three-dimensional identifier 24.
In addition, when the three-dimensional identification part 20 is manufactured, only the pit is needed to be dug from the base plate 22 to remove the part corresponding to the curved surface of the three-dimensional identification piece 24, the process is simple and convenient, the time consumption is short, and the efficiency is high.
Referring to fig. 17, optionally, a portion of the three-dimensional indicia 24 is recessed inwardly from the base 22 and the remaining three-dimensional indicia 24 protrude outwardly from the base 22. In this manner, the three-dimensional identifier 24 is made to form a height difference with the base plate 22, which is advantageous for improving the recognizability of the three-dimensional identifier 24 based on depth.
For the explanation and description of this portion, refer to the portions related to fig. 14 and fig. 16, and are not repeated here to avoid redundancy.
Referring again to fig. 14 and 16, the three-dimensional identifier 24 may optionally have a depth C ranging from: greater than 1mm and less than 4mm. In this way, the depth of the three-dimensional marker 24 is in a reasonable range, so that the three-dimensional marker can be prevented from being covered after multiple coating due to too small depth, and the three-dimensional marker 20 can be prevented from being poor in structural strength due to too large depth.
Note that in the example of fig. 14, the depth C of the three-dimensional marker 24 is the distance from the highest point of the three-dimensional marker 24 to the upper surface of the substrate 22. In the example of fig. 16, the depth C of the three-dimensional identifier 24 is the distance from the lowest point of the three-dimensional identifier 24 to the upper surface of the substrate 22.
In the example of fig. 14 and 16, the depth C of the three-dimensional identifier 24 is 2mm. In this way, the identifiability of the three-dimensional marker 24 and the structural strength of the three-dimensional marker 20 can be combined.
In other examples, the depth C of the three-dimensional identifier 24 is 1mm; in yet another example, the depth C of the three-dimensional identifier 24 is 4mm; in yet another example, the depth C of the three-dimensional identifier 24 is 1.2mm; in yet another example, the depth C of the three-dimensional identifier 24 is 1.8mm; in yet another example, the depth C of the three-dimensional identifier 24 is 2.1mm; in yet another example, the depth C of the three-dimensional identifier 24 is 2.5mm; in yet another example, the depth C of the three-dimensional identifier 24 is 3.3mm; in yet another example, the depth C of the three-dimensional identifier 24 is 3.6mm; in yet another example, the depth C of the three-dimensional identifier 24 is 3.8mm. Specific values of the depth C of the three-dimensional identifier 24 are not limited herein.
Referring again to fig. 13, alternatively, the spacing D between two adjacent three-dimensional identifiers 24 may range from: greater than 0.4mm and less than 4mm.
In this way, the distance D between two adjacent three-dimensional identifiers 24 is in a reasonable range, so that difficult processing and poor recognition caused by too small distance D are avoided, and too large volume of the three-dimensional identifier 20 caused by too large distance D is also avoided.
Note that "adjacent" herein means that there is no space between the two three-dimensional identifiers 24. In other words, if there is a void between two three-dimensional identifiers 24, then the two three-dimensional identifiers 24 are not adjacent. For example, in the example of fig. 13, three-dimensional identifier 24a is not adjacent to three-dimensional identifier 24b, and three-dimensional identifier 24b is adjacent to three-dimensional identifier 24 c.
In the example of fig. 13, the spacing D of two adjacent three-dimensional identifiers 24 is 0.86mm. In this manner, the identifiability of the three-dimensional identifier 24 and the reasonable volume of the three-dimensional identifier 20 may be compromised.
In another example, the spacing D between two adjacent three-dimensional identifiers 24 is 0.4mm; in another example, the spacing D between two adjacent three-dimensional identifiers 24 is 0.48mm; in yet another example, the spacing D of two adjacent three-dimensional identifiers 24 is 0.72mm; in yet another example, the spacing D of two adjacent three-dimensional identifiers 24 is 1.8mm; in another example, the spacing D between two adjacent three-dimensional identifiers 24 is 2.1mm; in yet another example, the spacing D of two adjacent three-dimensional identifiers 24 is 2.4mm; in yet another example, the spacing D of two adjacent three-dimensional identifiers 24 is 3.3mm; in another example, the spacing D between two adjacent three-dimensional identifiers 24 is 3.6mm; in yet another example, the spacing D between two adjacent three-dimensional identifiers 24 is 4mm. Specific values of the spacing D between adjacent two three-dimensional identifiers 24 are not limited herein.
Alternatively, a cnc engraving machine may be used to engrave the substrate to obtain the substrate 22 and the three-dimensional identifier 24. The spacing D between two adjacent three-dimensional identifiers 24 may be 1.2-1.8 times the diameter of the cutter head. Thus, the moving range of the cutter head between the two adjacent three-dimensional identifiers 24 is suitable, and the problem that the cutter head is difficult to move or the cutter head is easy to damage the three-dimensional identifiers 24 due to the small distance D between the two adjacent three-dimensional identifiers 24 is avoided.
In the present application, the spacing D of adjacent two three-dimensional identifiers 24 may be 1.5 times the diameter of the cutter head.
In other examples, the spacing D of two adjacent three-dimensional identifiers 24 may be 1.2 times the diameter of the cutter head; in yet another example, the spacing D of two adjacent three-dimensional identifiers 24 may be 1.3 times the diameter of the cutter head; in yet another example, the spacing D of two adjacent three-dimensional identifiers 24 may be 1.4 times the diameter of the cutter head; in yet another example, the spacing D of two adjacent three-dimensional identifiers 24 may be 1.6 times the diameter of the cutter head; in yet another example, the spacing D of two adjacent three-dimensional identifiers 24 may be 1.7 times the diameter of the cutter head; in yet another example, the spacing D of two adjacent three-dimensional identifiers 24 may be 1.8 times the diameter of the cutter head. The specific number relationship of the spacing D between two adjacent three-dimensional identifiers 24 and the bit diameter is not limited herein.
Specifically, the range of diameters of the cutter head of the cnc engraving and milling machine may be: 0.4-2.0mm. Thus, the diameter of the cutter head is rich, the cutter head can be selected according to actual production conditions, and the problem that the structural strength of the three-dimensional identification part 20 is too poor due to the overlarge diameter of the cutter head is avoided.
In the application, the diameter of the cutter head of the engraving and milling machine is 0.6mm. Thus, the diameter of the cutter head is suitable, and the cutter head is convenient to engrave on the base material.
In another example, the diameter of the cutter head of the engraving and milling machine is 0.4mm; in another example, the diameter of the cutter head of the engraving and milling machine is 0.46mm; in yet another example, the diameter of the cutter head of the cnc engraving and milling machine is 0.5mm; in yet another example, the diameter of the cutter head of the cnc engraving and milling machine is 0.8mm; in another example, the diameter of the cutter head of the engraving and milling machine is 1.2mm; in yet another example, the diameter of the cutter head of the cnc engraving and milling machine is 1.7mm; in still another example, the diameter of the cutter head of the cnc engraving and milling machine is 2.0mm. Specific values of the diameter of the cutter head of the engraving and milling machine are not limited herein.
Optionally, the three-dimensional indicia 20 may also be injection molded. The specific manner of manufacturing the three-dimensional marker 20 is not limited herein.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.
Claims (9)
1. The control method of the coating system is characterized in that the coating system comprises a machine and a scanner, the machine is used for coating the silicon wafer carried by the graphite boat, and the control method comprises the following steps:
controlling the scanner to scan the identification component of the graphite boat so as to obtain the identification information of the graphite boat;
inquiring historical information corresponding to the identification information according to the identification information;
determining control information of the machine according to the history information;
controlling the machine to run according to the control information;
the history information includes size data, the control information includes adjustment data, and determining the control information of the machine according to the history information includes:
determining the target size of the machine according to the size data;
acquiring the current size of the machine;
determining adjustment data of the machine according to the current size and the target size;
controlling the machine to run according to the control information, including:
And controlling the machine table to adjust according to the adjustment data so as to adapt to the size of the graphite boat.
2. The method according to claim 1, wherein the history information includes a history of the number of times of use, the method comprising:
judging whether the historical use times are larger than preset times or not;
when the historical use times are smaller than or equal to the preset times, entering the step of determining the control information of the machine according to the historical information;
and prompting alarm information under the condition that the historical use times are larger than the preset times.
3. The method for controlling a plating system according to claim 1, wherein the control method comprises:
determining whether the graphite boat is matched with the machine or not;
under the condition that the graphite boat is matched with the machine, entering the step of determining the control information of the machine according to the history information;
and prompting alarm information under the condition that the graphite boat is not matched with the machine.
4. The method of claim 1, wherein the plating system includes a server in communication with the machine, and wherein controlling the scanner to scan the identification component of the graphite boat to obtain the identification information of the graphite boat comprises:
The machine station controls the scanner to scan the identification component of the graphite boat to obtain the identification information of the graphite boat, and sends the identification information to the server;
inquiring historical information corresponding to the identification information according to the identification information, wherein the method comprises the following steps:
the server inquires historical information corresponding to the identification information according to the identification information;
the control method comprises the following steps:
the machine station sends the updated data of the graphite boat to the server;
and the server updates the history information according to the update data.
5. The method according to claim 4, wherein the control method comprises:
the server sends the history information before updating to the machine;
the machine processes the history information before updating to determine the updated data.
6. The method according to claim 5, wherein the control method comprises:
the machine station determines whether the history information corresponds to the identification information;
entering a step of processing the history information before updating by the machine to determine the updated data under the condition that the history information corresponds to the identification information;
And under the condition that the history information does not correspond to the identification information, the machine prompts alarm information.
7. The method for controlling a plating system according to claim 1, wherein the control method comprises:
controlling a lens of the scanner to move a preset distance from a first position to a second position; when the lens is positioned at the first position, the scanner focuses on the identification component;
and when the lens is positioned at the second position, controlling the scanner to scan the identification component.
8. The method according to claim 7, wherein the range of values of the predetermined distance is: greater than or equal to-5 mm and less than or equal to-2 mm, and greater than or equal to 2mm and less than or equal to 5mm.
9. A coating system, characterized in that the coating system comprises a machine for coating a silicon wafer carried by a graphite boat, a scanner and a processor connected to the machine and the scanner, the processor being adapted to execute the control method according to any one of claims 1 to 8.
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