CN107081248B - Decompression drying device and method - Google Patents
Decompression drying device and method Download PDFInfo
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- CN107081248B CN107081248B CN201710288188.8A CN201710288188A CN107081248B CN 107081248 B CN107081248 B CN 107081248B CN 201710288188 A CN201710288188 A CN 201710288188A CN 107081248 B CN107081248 B CN 107081248B
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- 230000006837 decompression Effects 0.000 title claims abstract description 96
- 238000001035 drying Methods 0.000 title claims abstract description 88
- 238000000034 method Methods 0.000 title claims description 27
- 239000000758 substrate Substances 0.000 claims abstract description 79
- 238000012546 transfer Methods 0.000 claims abstract description 32
- 238000005192 partition Methods 0.000 claims description 47
- 230000001276 controlling effect Effects 0.000 claims description 16
- 238000004891 communication Methods 0.000 claims description 12
- 230000001105 regulatory effect Effects 0.000 claims description 8
- 238000012544 monitoring process Methods 0.000 claims description 6
- 238000005086 pumping Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 4
- 238000000605 extraction Methods 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 12
- 230000000694 effects Effects 0.000 abstract description 6
- 229920002120 photoresistant polymer Polymers 0.000 abstract description 6
- 239000011347 resin Substances 0.000 abstract description 6
- 229920005989 resin Polymers 0.000 abstract description 6
- 239000011248 coating agent Substances 0.000 abstract description 5
- 238000000576 coating method Methods 0.000 abstract description 5
- 230000007547 defect Effects 0.000 abstract description 5
- 239000012528 membrane Substances 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 25
- 238000001291 vacuum drying Methods 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 210000002489 tectorial membrane Anatomy 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
- B05D3/0493—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases using vacuum
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
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- Microelectronics & Electronic Packaging (AREA)
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- Drying Of Solid Materials (AREA)
Abstract
The invention provides a decompression drying device and a decompression drying method, which adopt a stepping chamber and a sectional decompression mode to carry out vacuum decompression drying on a substrate coated with materials such as photoresist or insulating resin on the surface. Drying device adopts the baffle to divide into two at least subchambers with drying chamber, and every subchamber can realize the decompression speed and the transfer rate of independent control treating the dry base plate to can be according to the type of treating dry substrate surface coating material, and the membrane thickness of difference, carry out accurate control to decompression drying process, obtain even decompression drying effect. In addition, the invention provides a decompression drying device, a substrate to be dried is in a moving state on a conveying device, and the defects caused by fixed contact positions of the substrate to be dried and a supporting pin are avoided.
Description
Technical Field
The present invention relates generally to a vacuum drying apparatus and method, and more particularly, to a vacuum drying apparatus and method for a substrate for a display device.
Background
In a conventional drying process for a display substrate, a vacuum drying apparatus is generally used, which first transfers a substrate coated with a material such as a photoresist or an insulating resin into a chamber of the drying apparatus, then closes an inlet of the chamber, simultaneously discharges the gas in the entire chamber by an air pump, and rapidly reduces the pressure in the chamber to evaporate a solvent (diluent) component in the material such as the photoresist or the insulating resin on the substrate for drying.
The conventional reduced pressure drying technology generally has the problem that the drying object is not uniformly dried.
Disclosure of Invention
Technical problem to be solved
In view of the above-mentioned drawbacks, embodiments of the present invention provide a reduced-pressure drying apparatus and method, which are used to solve the technical problem of uneven drying of a film layer in the prior art. In at least one embodiment, the technical problem that transfer marks and the like occur due to long-time contact of a substrate to be dried and a supporting pin in the drying process is solved.
(II) technical scheme
In order to achieve the above purpose, the embodiment of the invention adopts the following technical scheme:
a reduced pressure drying apparatus comprising: a decompression chamber configured to accommodate an object to be dried; the conveying device is at least partially arranged in the reduced pressure chamber and is configured to convey the object to be dried and control the conveying speed of the object to be dried in the reduced pressure chamber; at least one baffle disposed within the reduced pressure chamber configured to divide the reduced pressure chamber into at least two sub-chambers; a pressure reduction system in gas communication with the pressure reduction chamber configured to control a rate of pressure reduction within at least one of the subchambers.
Optionally, in the pressure reducing device provided by an embodiment of the present invention, the pressure reducing system includes an air exhaust portion and an on-off valve; wherein the pumping section is in gas communication with the decompression chamber and is configured to exhaust and decompress the decompression chamber; the opening angle of the on-off valve is controllable and is configured to regulate the exhaust speed of at least one of the pumping parts.
Alternatively, in the pressure reducing device provided in an embodiment of the present invention, the air extracting portions are disposed in one-to-one correspondence with the on-off valves, and the opening angles of the individual on-off valves can be controlled individually.
Optionally, in the pressure reducing device provided in an embodiment of the present invention, a single sub-chamber is in air communication with at least one of the air-extracting portions, and the opening angle of the on-off valve, which is provided in one-to-one correspondence with the air-extracting portion, is adjusted to adjust a pressure reducing speed in the single sub-chamber.
Optionally, in the pressure reducing device provided in an embodiment of the present invention, the conveying device includes: a transfer roller disposed within the chamber; a transfer roller disposed on the transfer roller and configured to transfer the object to be dried in the decompression chamber.
Optionally, in the pressure reducing device provided by an embodiment of the present invention, the rotation speed of the conveying roller in at least one of the sub-chambers may be independently controlled.
Optionally, in the pressure reducing device provided in an embodiment of the present invention, the device further includes at least one partition board control portion, disposed outside the pressure reducing chamber, configured to drive the partition board to move, so as to form at least two closed sub-chambers.
Optionally, in the pressure reducing device provided in an embodiment of the present invention, a position sensor is further disposed on the conveying device, and configured to monitor a position signal of the object to be dried and convey the position signal to the partition board control portion, and the partition board control portion determines a position of the object to be dried according to the position signal and determines whether to drive the partition board to move to form the sealed sub-chamber.
Optionally, in the pressure reducing device provided in an embodiment of the present invention, a dryness detecting sensor is further disposed in the at least one sub-chamber, and configured to monitor dryness of the object to be dried, transmit the dryness signal to the conveying device, and determine whether to regulate and control a rotation speed of the conveying device according to the dryness signal.
Optionally, in the pressure reduction device provided in an embodiment of the present invention, the device further includes an air supply system disposed outside the pressure reduction chamber, where the air supply system includes at least two air supply portions, and the air supply portions are in air communication with the chamber and configured to supply air to the pressure reduction chamber to increase air pressure in the pressure reduction chamber.
Optionally, in the pressure reducing device provided in an embodiment of the present invention, a single gas supply portion is disposed in one-to-one correspondence with a single sub-chamber.
Optionally, in the pressure reducing device provided in an embodiment of the present invention, the gas supply portion and the gas exhaust portion in at least one of the sub-chambers are disposed in a one-to-one correspondence.
At least one embodiment of the present invention also provides a reduced pressure drying method, including:
placing the object to be dried in the decompression chamber; and the object to be dried is subjected to reduced pressure drying by controlling the conveying speed of the conveying device in at least one sub-chamber and the pressure reduction speed of the pressure reduction system.
Optionally, in the pressure reduction method provided by an embodiment of the present invention, the control of the conveying speed of the conveying device and the pressure reduction speed of the pressure reduction system in at least one of the sub-chambers controls the pressure reduction speed in a single sub-chamber by controlling the opening angles of the on-off valves disposed in one-to-one correspondence with the pumping portions.
Optionally, in the decompression method provided by an embodiment of the present invention, the control of the conveying speed of the conveying device in at least one of the sub-chambers controls the horizontal movement speed of the object to be dried in a single sub-chamber by controlling the rotation speed of the conveying roller in at least one of the sub-chambers.
Optionally, in a pressure reduction method provided by an embodiment of the present invention, the method further includes: through the position signal of waiting for the dry thing of position sensor monitoring to the baffle control division conveys position signal, the baffle control division passes through position signal judges wait dry thing position to judge whether drive baffle removes in order to form airtight subchamber.
Optionally, in a pressure reduction method provided by an embodiment of the present invention, the method further includes: through at least one in the subchamber the dryness fraction that treats the dry thing that the sensor monitoring was detected to the dryness fraction, to conveyer conveys the dryness fraction signal, through whether the judgement of dryness fraction signal is regulated and control conveyer's rotational speed is used for regulating and control treat that the dry thing is in horizontal transfer rate in the subchamber.
Optionally, in a pressure reduction method provided by an embodiment of the present invention, the method further includes: through at least one the one-to-one sets up in the subchamber the air feed portion with the portion of bleeding simultaneously to the subchamber air feed with bleed for accurate control is single atmospheric pressure in the subchamber.
(III) advantageous effects
The invention provides a decompression drying device and a decompression drying method, which adopt a stepping chamber and a sectional decompression mode to carry out vacuum decompression drying on a substrate coated with materials such as photoresist or insulating resin on the surface. Drying device adopts the baffle to divide into two at least subchambers with drying chamber, and every subchamber can realize the decompression speed and the transfer rate of independent control treating the dry base plate to can be according to the type of treating dry substrate surface coating material, and the membrane thickness of difference, carry out accurate control to decompression drying process, obtain even decompression drying effect.
In addition, the invention provides a decompression drying device, a substrate to be dried is in a moving state on a conveying device, and the defects caused by fixed contact positions of the substrate to be dried and a supporting pin are avoided.
Drawings
FIG. 1 is a schematic cross-sectional view of a vacuum drying apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic top view of a conveyor roller of a vacuum drying apparatus according to an embodiment of the present invention;
FIG. 3 is a schematic cross-sectional view of a vacuum drying apparatus according to another embodiment of the present invention;
FIG. 4 is a flowchart illustrating a method for driving the partition to move by the partition control unit according to an embodiment of the present invention;
description of reference numerals: 10 a chamber; 11 an inlet; 12 an outlet; 20 supporting rollers; 21 supporting the roller; 22 a transfer roller; 23 a partition plate; 24 a conveying roller; 25: a control unit; 30 an exhaust system; 31 an exhaust line; 32a to 32f opening and closing valves; 33a to 33f suction portions; 34 a vacuum exhaust device; 40 an air supply system; 41 air supply pipeline; 42 a-42 c air supply parts; 43 air source.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
In the description of the present invention, it should be noted that the terms "upper", "lower", "surface", "end", "top", "lower", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "disposed" and "connected" are to be interpreted broadly, e.g., as a fixed connection, a detachable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
As shown in fig. 1, a reduced pressure drying apparatus according to an embodiment of the present invention includes: a decompression chamber 10 configured to accommodate an object to be dried; the decompression chamber 10 is provided with an inlet 11 and an outlet 12 for the entry and exit of the material to be dried; a transfer device disposed in the decompression chamber 10 and configured to transfer the object to be dried in the decompression chamber 10; at least one partition 23 disposed within the reduced-pressure chamber 10, configured to divide the reduced-pressure chamber 10 into at least two sub-chambers; a depressurization system 30 in gas communication with the depressurization chamber 10 configured to regulate a depressurization rate within the at least one subchamber.
The invention provides a decompression drying device and a drying method, which adopt a stepping chamber and a sectional decompression mode to carry out vacuum decompression drying on a substrate coated with materials such as photoresist or insulating resin on the surface. Drying device adopts the baffle to divide into two at least subchambers with drying chamber, will treat that the drying object is arranged in decompression chamber 10, treats the drying object through the decompression speed of controlling different subchambers and carries out decompression drying. Every subchamber accessible decompression system accurate control decompression speed is provided with conveyer in the cavity, treats the horizontal movement speed of dry base plate in every subchamber through conveyer individual control to can be according to the type of treating dry base plate surface coating material, and the membrane thickness of difference, carry out accurate control to decompression drying process, obtain even decompression drying effect.
In addition, the substrate to be dried is in a moving state on the conveying device, and the substrate to be dried is in a moving state on the conveying device, so that the defects caused by the fact that the contact position of the substrate to be dried and the supporting pin is fixed are avoided.
The structure of the decompression drying device and the method thereof provided by the embodiment of the invention are explained in the following with reference to the attached drawings.
Example one
The present embodiment provides a decompression drying device. As shown in fig. 1, the device structure includes: a decompression chamber 10 configured to accommodate a substrate to be dried; the decompression chamber 10 is provided with an inlet 11 and an outlet 12 for the entrance and exit of the substrate to be dried; a transfer device disposed within the decompression chamber 10 and configured to transfer the substrate to be dried within the decompression chamber 10; at least one partition 23 disposed within the reduced-pressure chamber 10, configured to divide the reduced-pressure chamber 10 into at least two sub-chambers; a depressurization system 30 in gas communication with the depressurization chamber 10 configured to regulate a depressurization rate within the at least one subchamber.
The invention provides a decompression drying device, which is used for carrying out vacuum decompression drying on a substrate coated with materials such as photoresist or insulating resin on the surface in a stepping type cavity and sectional decompression mode, a drying cavity is divided into at least two sub-cavities by a partition board, a to-be-dried object is placed in a decompression cavity 10, the decompression speed of at least one sub-cavity is controlled by a decompression system 30 to carry out decompression drying on the to-be-dried object, and the horizontal movement speed of the to-be-dried substrate in each sub-cavity is controlled by a conveying device, so that the decompression drying process can be accurately controlled according to the type of the materials coated on the surface of the to-be-dried substrate and different film thicknesses, and a uniform decompression drying effect is obtained.
Optionally, the decompression system 30 includes air-extracting portions 33a to 33f and on-off valves 32a to 32f, the air-extracting portions 33a to 33f are formed outside the decompression chamber 10, are in gas communication with the decompression chamber 10, and are configured to perform air-exhaust decompression on the decompression chamber 10; the opening angle of the on-off valves 32 a-32 f is controllable and configured to regulate the exhaust velocity within at least one of the sub-chambers.
Optionally, the switch valves 32a to 32f are in one-to-one correspondence with the air exhaust portions 33a to 33f, and a single sub-chamber may include at least one air exhaust portion and a switch valve disposed in one-to-one correspondence therewith, and perform air exhaust and pressure reduction in the pressure reduction chamber 10 in a state where the inlet 11 and the outlet 12 of the pressure reduction chamber 10 are closed, and by controlling different opening angles of the switch valves 32a to 32f, the air exhaust speed in each sub-chamber is controlled individually and accurately.
Optionally, the decompression system 30 further comprises a vacuum exhaust 34 configured to exhaust the gas extracted by the gas extraction portion from the decompression chamber 10.
Optionally, the conveying device includes a conveying roller 24 and a conveying roller 22, the conveying roller 24 is disposed in the decompression chamber 10, the conveying roller 22 is disposed on the conveying roller 24, and the conveying roller 22 is configured to convey the substrate to be dried in the decompression chamber 10.
Optionally, the conveying roller 24 is in the difference the rotational speed can be regulated and control alone in the region of subchamber, and then regulates and control conveying roller 22's rotational speed, is used for controlling respectively treat that dry base plate is in the characteristics of treating dry base plate coating tectorial membrane layer to the difference in direction of transfer such as horizontal direction moving speed in the subchamber can be realized, and the regulation is treated that the dwell time of dry base plate is controllable in single subchamber, ensures to treat the effective drying of dry base plate in each subchamber.
Alternatively, the transfer rollers 22 may be individually adjustable to achieve precise adjustment of the horizontal movement speed within the sub-chamber of the substrate to be dried.
Optionally, the conveying rollers 22 can be independently controlled, and the speed of different conveying rollers 22 is different, so that the rotation angle of the substrate to be dried in the conveying plane can be adjusted in the chamber, and the drying speed or the drying degree of different areas on the substrate can be more uniform.
Optionally, as shown in fig. 2, the plurality of conveying rollers 22 are disposed on the conveying rollers 24 at equal intervals, and the positions of the conveying rollers 22 on two adjacent conveying rollers 24 are staggered, so that uniform stress of the substrate to be dried in the horizontal movement process can be realized, and the problem of poor transfer marks and other poor technologies caused by long-time contact between the substrate to be dried and the supporting pins in the drying process is solved.
Optionally, the decompression drying device further includes a supporting roller 20 configured to support the conveying roller 24 to ensure that the conveying roller 24 is at the same level, and supporting rollers 21 disposed on the supporting roller 20 at equal intervals for conveying the substrate to be dried in cooperation with the conveying rollers 22.
Optionally, in the reduced-pressure drying apparatus provided by the first embodiment of the present invention, the single sub-chamber and the at least one air-extracting portion and the at least one switch valve disposed corresponding thereto are used to achieve independent and precise control of the air-discharging speed in each sub-chamber.
Optionally, if the size of the substrate to be dried is large, the substrate occupies a region range of more than one sub-chamber, and the decompression speeds of the sub-chambers can be controlled to be the same or different according to the size characteristics of the substrate to be dried.
Optionally, in the decompression drying apparatus provided in the first embodiment of the present invention, the rotation speed of the conveying roller 24 may be independently controlled in different regions of the sub-chamber, so that the rotation speed of the conveying roller 22 may be controlled, the substrate to be dried is in a moving state on the conveying roller 22, and the defects caused by the fixed contact position between the substrate to be dried and the supporting pins are avoided, and the rotation speed of the conveying roller 22 may be adjusted to realize the controllable drying duration of the substrate to be dried in each sub-chamber divided sub-chamber, and in the whole decompression drying process, the conveying roller is in a moving state, and the defects such as transfer marks and the like caused by the constant contact between the substrate to be dried and the conveying roller 22 in a long time may be avoided.
Alternatively, the rotation speed of the transfer roll 24 may be regulated to be different in each sub-chamber region, and may also be regulated to be the same in the transfer roll 24.
Alternatively, the rotation speed of the transfer roller 22 may be individually controlled to further precisely control the drying time period of the substrate to be dried in each of the chamber-dividing sub-chambers.
Optionally, the decompression drying device further includes a support roller 20 configured to support the transport roller 24 to ensure that the transport roller 24 is at the same level, and a support roller 21 disposed on the support roller 20 at equal intervals to transport the substrate in cooperation with the transport roller 22.
It should be noted that, in the decompression drying device provided in the first embodiment of the present invention, the conveying roller 24, the conveying roller 22, the supporting roller 20 and the supporting roller 21 may be arranged at the installation position and number according to actual needs, and are not limited to the specific positions and numbers shown in fig. 1 and fig. 2 provided in the present invention.
It should be noted that, in the decompression drying device provided in the first embodiment of the present invention, the installation positions and the number of the partition plates 23 for dividing the sub-chambers may be set according to actual needs, and are not limited to the positions and the number of the partition plates in fig. 1 of the device provided in the present invention.
In the decompression drying apparatus according to the first embodiment of the present invention, the suction portions 33a to 33f and the on-off valves 32a to 32f in the decompression system 30 may be installed at positions and in numbers according to actual needs, and are not limited to the positions and the numbers of the suction portions and the on-off valves in fig. 1 of the apparatus according to the present invention.
Example two
In addition to the first embodiment, the present embodiment provides a reduced pressure drying apparatus. Fig. 3 shows a schematic view of another reduced-pressure drying apparatus according to the present embodiment. Unlike the first embodiment, as shown in fig. 3, in the decompression drying apparatus, the partition 23 is moved by driving and controlling the partition control part 25 disposed outside the decompression chamber 10, so as to form at least two closed sub-chambers.
Optionally, a position sensor is disposed on the conveying roller 24, and configured to monitor the position of the substrate to be dried on the conveying roller 22 during the decompression drying process, when the substrate to be dried is conveyed into a sub-chamber divided by the partition 23, the sensor disposed on the conveying roller 24 in the sub-chamber transmits a position signal of the substrate to be dried to the partition control portion 25, and the partition control portion 25 determines the position of the object to be dried according to the position signal and determines whether to drive the partition to move, so as to form a closed sub-chamber.
For example, the size of the substrate to be dried is within the range of a single sub-chamber, when the substrate to be dried is conveyed into a certain sub-chamber, the horizontal movement speed of the substrate to be dried in the single sub-chamber can be independently controlled by controlling the rotating speed of the conveying roller 22, the sensor on the conveying roller 24 transmits the position signal of the substrate to be dried to the partition plate control portion 25, the partition plate control portion 25 judges the position of the object to be dried according to the position signal, and judges and drives the partition plate corresponding to the single sub-chamber to move, so that a closed sub-chamber is formed, and the substrate to be dried is sufficiently dried in the single sub-chamber.
For example, the size of the substrate to be dried is large, and the substrate to be dried occupies an area range exceeding one sub-chamber, at this time, the decompression speed of some sub-chambers corresponding to the size of the substrate to be dried is controlled to be the same or different according to the size of the substrate to be dried, and the position signal of the substrate to be dried is transmitted to the partition plate control portion 25 by the sensor on the transmission roller 24, and the partition plate control portion 25 judges the position of the object to be dried according to the position signal and judges and drives some sub-chamber partition plate corresponding to the position of the substrate to move so as to form a closed sub-chamber, so that the substrate to be dried is sufficiently dried in some sub-chambers corresponding to the size of.
Alternatively, the diaphragm control section 25 is a servo motor.
It should be noted that, in the decompression drying device provided in the second embodiment of the present invention, the partition board control portion 25 may be installed at any position and number according to actual needs, and is not limited to the specific position and number shown in fig. 3 provided in the present invention.
It should be noted that the number and the position of the sensors on the conveying roller 24 may be set according to the range of the sub-chamber divided by the partition 23, as long as the signal of the sensor can be realized in the time period when the substrate to be dried is located in a certain sub-chamber, the partition 23 can effectively move, and therefore the number and the position of the sensors are not limited herein.
EXAMPLE III
In addition to the first embodiment, the present embodiment provides a reduced pressure drying apparatus. Still be provided with base plate dryness fraction in at least one subchamber and detect the sensor, be configured to the degree of drying of monitoring base plate to conveying roller 24 the dryness fraction signal, conveying roller 24 judge through the dryness fraction signal of the base plate that detects whether regulate and control the rotational speed of conveying roller 24, be used for the horizontal transfer rate of regulation and control base plate in the subchamber.
It should be noted that, in the decompression drying device provided in the third embodiment of the present invention, the dryness detection sensors may be installed at positions and in numbers according to actual needs, and this embodiment is not particularly limited.
Example four
In addition to the first embodiment, the present embodiment provides a reduced pressure drying apparatus. As shown in fig. 1, the decompression drying apparatus further includes an air supply system 40 including air supply portions 42a to 42c, which are in air communication with the decompression chamber 10, and which supply air into the decompression chamber 10 to restore the atmospheric pressure in the chamber after the decompression drying process of the substrate in the chamber is completed.
Alternatively, the single gas supply portions 42a to 42c are provided in one-to-one correspondence with the single sub-chambers.
Optionally, the air supply parts 42a to 42c in the area of at least one sub-chamber are arranged in one-to-one correspondence with the air exhaust parts 33a to 33f, so as to realize that in the air exhaust and pressure reduction process, the air exhaust and air exhaust can be simultaneously opened to more accurately control the pressure reduction speed in the single sub-chamber.
Optionally, the gas supply system 40 includes a conduit 41 for delivering gas to the gas supplies 42 a-42 c, and a gas source 43.
Alternatively, gas source 43 is a nitrogen gas source, and conduit 41 delivers nitrogen gas to gas supplies 42 a-42 c to facilitate further drying of the substrates with nitrogen gas.
It should be noted that the number and positions of the air supply portions and the air exhaust portions are set by dividing the area of the sub-chambers by the partition plate 23, as long as the air exhaust and the air exhaust can be simultaneously opened to more accurately control the decompression speed in the single sub-chamber, and therefore the number and positions of the air supply portions and the air exhaust portions are not limited to the specific positions and numbers shown in fig. 1.
EXAMPLE five
On the basis of the first embodiment, the present embodiment provides a reduced pressure drying method, which includes S1-S2.
S1: and placing the object to be dried in the decompression chamber.
The substrate to be dried is transferred from the inlet 11 to the decompression chamber 10 by the transfer roller 22, and then the inlet 11 and the outlet 12 are closed.
S2: and the object to be dried is subjected to reduced pressure drying by controlling the conveying speed of the conveying device in at least one sub-chamber and the pressure reduction speed of the pressure reduction system.
Optionally, the conveying speed of the conveying device and the exhaust speed of the pressure reducing system in at least one of the sub-chambers are controlled, and different opening angles of the switch valves of the pressure reducing system 30 corresponding to each sub-chamber divided by the regulating and controlling partition plates are used for realizing independent and accurate control of the exhaust speed in each sub-chamber.
Optionally, the conveying speed of the conveying device in at least one of the sub-chambers is controlled, and the rotating speed of the conveying roller 24 is set to further regulate and control the rotating speed of the conveying roller 22, so as to control the horizontal movement speed of the substrate to be dried in different sub-chambers partitioned by the partition boards in the drying chamber, so as to ensure the pressure control in each sub-chamber, so as to achieve sufficient drying of the coating material layer on the substrate in each sub-chamber;
optionally, the conveying speed of the conveying device in at least one of the sub-chambers is controlled, and the conveying roller 22 can be independently regulated and controlled, so that the horizontal movement speed in the sub-chamber of the substrate to be dried can be accurately adjusted.
Optionally, the method further comprises: the partition plate 23 is controlled by the partition plate control parts 25 arranged in one-to-one correspondence with the partition plates to move to form a closed sub-chamber, so as to further realize accurate control of the decompression speed in each sub-chamber, and a specific method is shown in fig. 4.
401: the substrate is transferred into the sub-chamber, and a sensor provided on the transfer roller 24 monitors a position signal of the substrate to be dried;
402: the sensor transmits a position signal of the substrate to be dried to the partition board control part 25, and the partition board control part 25 judges the position of the object to be dried according to the position signal and judges whether to drive the partition board to move so as to form the closed sub-chamber.
403: treat that dry substrate size is in single sub-chamber regional scope, and when treating that dry substrate conveying to certain sub-chamber regional scope, baffle control portion 25 passes through position signal judges that the baffle that drive and single sub-chamber correspond removes in order to form airtight sub-chamber to guarantee the abundant drying of substrate in single sub-chamber.
404: treat that the size of drying substrate is great, has occupied the regional scope of more than a subchamber, and when treating that drying substrate conveying to certain subchamber regional within range, baffle control portion 25 passes through position signal judges that the baffle that drive and the corresponding certain subchamber of substrate position correspond removes in order to form airtight subchamber to guarantee the abundant drying of substrate in several subchambers.
For example, the size of the substrate to be dried occupies the area range of the first and second sub-chambers, and when the substrate to be dried is conveyed to the area range of the first and second sub-chambers, the partition control part 25 determines to drive the partition corresponding to the second sub-chamber corresponding to the substrate position to move to form a closed sub-chamber by the position signal, so as to ensure sufficient drying of the substrate in the first and second sub-chambers.
Optionally, the method further includes monitoring the dryness of the object to be dried by the dryness detection sensor in at least one of the sub-chambers, transmitting the dryness signal to the conveying device, and determining whether to regulate and control the rotation speed of the conveying device according to the dryness signal so as to regulate and control the horizontal conveying speed of the object to be dried in the sub-chamber.
Optionally, the method further includes, after the step of decompressing the substrate, first delivering gas to the decompression chamber 10 through the gas supply portion of the gas supply system 40 to ensure that the chamber uniformly increases the gas pressure, and avoiding adverse effects on the substrate caused by too fast recovery speed of the gas pressure.
Optionally, the method further includes performing a substrate decompression process, and supplying nitrogen gas to the decompression chamber 10 through a gas supply portion of the gas supply system 40.
The above embodiments are only configured to illustrate the present invention, but not to limit the present invention, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, so that all equivalent technical solutions also belong to the scope of the present invention, and the scope of the present invention should be defined by the claims.
Claims (15)
1. A reduced pressure drying apparatus, characterized in that the apparatus comprises:
a decompression chamber configured to accommodate an object to be dried;
the conveying device is at least partially arranged in the reduced pressure chamber and is configured to convey the object to be dried and control the conveying speed of the object to be dried in the reduced pressure chamber;
at least one baffle disposed within the reduced pressure chamber configured to divide the reduced pressure chamber into at least two sub-chambers;
a pressure reduction system in gas communication with the pressure reduction chamber configured to control a rate of pressure reduction within at least one of the subchambers;
the device also comprises at least one partition board control part which is arranged outside the decompression cavity, drives the partition board to move according to the position signal of the object to be dried so as to form at least two closed sub-cavities, and places the substrate to be dried in the closed sub-cavities for decompression drying;
the conveying device is further provided with a position sensor which is configured to monitor a position signal of the object to be dried and convey the position signal to the partition board control portion, and the partition board control portion judges the position of the object to be dried through the position signal and judges whether to drive the partition board to move so as to form the closed sub-chamber.
2. The apparatus of claim 1, wherein the pressure relief system comprises a suction portion and an on-off valve; wherein the content of the first and second substances,
the air extraction part is in air communication with the decompression chamber and is configured to exhaust and decompress the decompression chamber;
the opening angle of the on-off valve is controllable and is configured to regulate the exhaust speed of at least one of the pumping parts.
3. The apparatus according to claim 2, wherein the suction portions are provided in one-to-one correspondence with the on-off valves, and the opening angles of the individual on-off valves are individually controllable.
4. The apparatus according to claim 3, wherein the single sub-chamber is in gas communication with at least one of the pumping sections, and the opening angle of the on-off valve arranged in one-to-one correspondence with the pumping section is adjusted to adjust the pressure reduction rate in the single sub-chamber.
5. The apparatus of claim 1, wherein the conveying means comprises:
a transfer roller disposed in the decompression chamber;
a transfer roller disposed on the transfer roller and configured to transfer the object to be dried in the decompression chamber.
6. The apparatus of claim 5 wherein the rotational speed of said transfer roll within at least one of said subchambers is individually controllable.
7. The apparatus according to claim 1, wherein a dryness detection sensor is further disposed in the at least one sub-chamber, and configured to monitor dryness of the object to be dried, transmit the dryness signal to the conveying device, and determine whether to regulate the rotation speed of the conveying device according to the dryness signal.
8. The apparatus of claim 1, further comprising a gas supply system disposed outside the reduced pressure chamber, the gas supply system comprising at least two gas supplies in gas communication with the chamber configured to supply gas to the reduced pressure chamber to increase the reduced pressure chamber gas pressure.
9. The apparatus of claim 8, wherein said gas supply portions are disposed in one-to-one correspondence with said sub-chambers.
10. The apparatus of claim 9 wherein said gas supply and evacuation sections within said subchambers are arranged in one-to-one correspondence.
11. A reduced-pressure drying method based on the reduced-pressure drying apparatus according to any one of claims 1 to 10, the method comprising:
placing the object to be dried in the decompression chamber;
drying the object to be dried under reduced pressure by controlling the conveying speed of the conveying device in at least one sub-chamber and the pressure reduction speed of the pressure reduction system;
and monitoring to obtain a position signal of the object to be dried, transmitting the position signal to the partition board control part, and judging whether to drive the partition board to move to form the closed sub-chamber or not by the partition board control part according to the position signal.
12. The method of claim 11, wherein said controlling a transfer rate of said transfer device and a depressurization rate of said depressurization system within at least one of said subchambers comprises: the exhaust speed in the sub-chambers is controlled by controlling the opening angles of the switch valves which are arranged in one-to-one correspondence with the air exhaust parts.
13. The method of claim 11 wherein said controlling the conveying speed of said conveying means within at least one of said subchambers comprises: and controlling the horizontal movement speed of the object to be dried in the single sub-chamber by controlling the rotating speed of the conveying roller in at least one sub-chamber.
14. The method of claim 11, further comprising:
through at least one the dryness fraction of treating the dry thing of the indoor dryness fraction detection sensor monitoring of subchamber, to conveyer conveying dryness fraction signal, through whether regulation and control are judged to the dryness fraction signal conveyer's rotational speed is used for regulating and control treat the dry thing and be in horizontal transfer rate in the subchamber.
15. The method of claim 11, further comprising:
through at least one the air feed portion that the one-to-one set up in the subchamber with bleed the portion simultaneously to the subchamber air feed with bleed for accurate control is single atmospheric pressure in the subchamber.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR0170421B1 (en) * | 1992-04-16 | 1999-03-30 | 이노우에 아키라 | Spindrier |
| CN201698998U (en) * | 2010-06-24 | 2011-01-05 | 京东方科技集团股份有限公司 | Base plate processing device |
| CN103234328A (en) * | 2013-03-28 | 2013-08-07 | 京东方科技集团股份有限公司 | Method for baseplate drying under reduced pressure and device thereof |
| CN103903959A (en) * | 2012-12-26 | 2014-07-02 | 大日本网屏制造株式会社 | Decompression drying device and decompression drying method |
| CN205488061U (en) * | 2016-03-17 | 2016-08-17 | 京东方科技集团股份有限公司 | Substrate processing system |
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2017
- 2017-04-27 CN CN201710288188.8A patent/CN107081248B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR0170421B1 (en) * | 1992-04-16 | 1999-03-30 | 이노우에 아키라 | Spindrier |
| CN201698998U (en) * | 2010-06-24 | 2011-01-05 | 京东方科技集团股份有限公司 | Base plate processing device |
| CN103903959A (en) * | 2012-12-26 | 2014-07-02 | 大日本网屏制造株式会社 | Decompression drying device and decompression drying method |
| CN103234328A (en) * | 2013-03-28 | 2013-08-07 | 京东方科技集团股份有限公司 | Method for baseplate drying under reduced pressure and device thereof |
| CN205488061U (en) * | 2016-03-17 | 2016-08-17 | 京东方科技集团股份有限公司 | Substrate processing system |
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| CN107081248A (en) | 2017-08-22 |
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