CN107065433A - Drying device - Google Patents
Drying device Download PDFInfo
- Publication number
- CN107065433A CN107065433A CN201710316370.XA CN201710316370A CN107065433A CN 107065433 A CN107065433 A CN 107065433A CN 201710316370 A CN201710316370 A CN 201710316370A CN 107065433 A CN107065433 A CN 107065433A
- Authority
- CN
- China
- Prior art keywords
- drying chamber
- air
- pipeline
- drying
- air outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Drying Of Solid Materials (AREA)
Abstract
The present invention relates to a kind of drying device, drying for mask plate, including drying chamber, the drying chamber port is provided with air knife, and drying chamber side wall is equipped with the air outlet of the air-flow discharge for air knife to be produced close to the position of the bottom of the drying chamber.The beneficial effects of the invention are as follows：The setting of air outlet reduces the generation of bounce-back air-flow, so that reducing influence of the dust that takes up of bounce-back air-flow to mask plate improves product evaporation yield.
Description
Technical field
The present invention relates to LCD product manufacture technology field, more particularly to a kind of drying device.
Background technology
Fine metal mask (FMM Mask) pattern, be by evaporation mode by OLED (Organic Light Emitting Diode,
OrganicLight-EmittingDiode) material is utilized according on preset program evaporation to LTPS (low temperature polycrystalline silicon) backboard
On figure on mask plate, evaporation RGB organic matter to assigned position.Current Dry Bath (drying chamber) 3 bottom is
Enclosed construction (only one hole of discharge opeing), as depicted in figs. 1 and 2, when air knife (AK) 2 carries out downward blow dried mask plate 1
When, due to the almost enclosed structure of the lower part of drying chamber 3, the gas 20 that air knife 2 blows downwards is when saturation, meeting
Upward air-flow 10 is formed, upward air-flow 10 can drive the Particle (dust) of the bottom deposit of drying chamber 3, upward gas
The dusts that stream 10 drives can deposit to the surface of mask plate 1, the mask plate 1 that depositing has dust be put into that evaporation chamber is deposited when
Wait, the quality of evaporation product can be influenceed.
The content of the invention
In order to solve the above-mentioned technical problem, the present invention provides a kind of drying device, the generation of bounce-back air-flow is reduced, so as to subtract
Influence of the dust that bounce-back air-flow takes up less to mask plate.
In order to achieve the above object, the technical solution adopted by the present invention is：A kind of drying device, for the dry of mask plate
Dry, including drying chamber, the drying chamber port is provided with air knife,
Drying chamber side wall is provided with the air-flow for being used for producing air knife close to the position of the bottom of the drying chamber
The air outlet of discharge.
Further, the air outlet is connected by pipeline with vacuum suction structure.
Further, one end that the pipeline is connected with the air outlet is shaped as funnel-form, the pipeline with it is described
The area of one end of air outlet connection is more than the pipeline away from one end inside the drying chamber.
Further, on two relative side walls of the drying chamber, it is provided with corresponding to the port of the drying chamber
The air knife, the one end of the pipeline inside the drying chamber, length in a first direction are equal to the drying chamber
The width of the corresponding side wall in room, the first direction is the width side of the side wall of the corresponding drying chamber of the pipeline
To.
Further, the pipeline is obliquely installed, and the one end of the pipeline away from the air outlet is higher than the pipeline
The one end being connected with the air outlet, the pipeline is stepped close to the inner surface of the drying chamber bottom.
Further, in the drying chamber provided with cause the air-flow of air knife by and stop that the drying chamber bottom is anti-
The one-way check structure that the air-flow of bullet passes through, the one-way check structure setting is between the air outlet and the air knife.
Further, the one-way check structure includes the screen pack that multiple-layer stacked is set.
Further, the drying chamber includes two relative side walls, and each side wall corresponds to the drying chamber
Port is provided with the air knife, and each the position of bottom of the inner surface of the side wall close to the drying chamber goes out provided with described in
Air port, the inner surface of each side wall is equipped with the first dividing plate, bottom angled from first dividing plate to the drying chamber
Set；
The bottom of the drying chamber is provided with coordinates the airflow direction of control air knife to cause air knife with first dividing plate
The second partition discharged from the air outlet of air-flow, the second partition is located between two first dividing plates, described the
The section of two dividing plates is inverted V-arrangement.
Further, first dividing plate has the folding bent to respective side wall close to one end of the drying chamber bottom
Side.
Further, the junction of the flanging and first dividing plate is circular arc.
The beneficial effects of the invention are as follows：The setting of air outlet reduces the generation of bounce-back air-flow, so as to reduce bounce-back air-flow
Influence of the dust taken up to mask plate improves product evaporation yield.
Brief description of the drawings
Fig. 1 represents drying device structural representation in the prior art；
Fig. 2 represents that drying chamber interior air-flow flows to schematic diagram in the prior art；
Fig. 3 represents drying device structural representation in the embodiment of the present invention；
Fig. 4 represents the structural representation of one end that pipeline is connected with air outlet in the embodiment of the present invention；
Fig. 5 represents that pipeline is illustrated close to the partial structurtes of the inner surface of the drying chamber bottom in the embodiment of the present invention
Figure；
Fig. 6 represents the drying device structural representation of another embodiment in the embodiment of the present invention；
Fig. 7 represents one-way check structural representation of the embodiment of the present invention；
Fig. 8 represents the drying device structural representation of the 3rd embodiment in the embodiment of the present invention；
Fig. 9 represents the drying chamber internal gas flow stream in the drying device structure of the 3rd embodiment in the embodiment of the present invention
To schematic diagram.
Embodiment
The feature and principle of the present invention are described in detail below in conjunction with accompanying drawing, the embodiment is only used for explaining this hair
It is bright, protection scope of the present invention is not limited with this.
As shown in figure 3, the present embodiment provides a kind of drying device, for the drying of mask plate, including drying chamber 3, institute
The port of drying chamber 3 is stated provided with air knife 2.
The position of bottom of the side wall of drying chamber 3 close to the drying chamber 3 is provided with the gas for being used for producing air knife 2
Flow the air outlet 11 of discharge.
Air outlet 11 is set in the bottom of drying chamber 3, using the getter action of air outlet 11, changes air flow direction
(changing original bounce-back air-flow) so that air-flow flows out from the air outlet 11 of setting, the direction of arrow is the flow direction of air-flow in Fig. 3,
The influence that the dust of bounce-back air-flow institute band is produced to mask plate is reduced, the evaporation yield of finished product is improved.
The size of the air outlet 11 and the specific set location of air outlet 11 can be set according to actual needs, as long as real
Air-flow discharge, the generation so as to reduce bounce-back air-flow that now air knife 2 is produced.
For the further effective generation for reducing bounce-back air-flow in the present embodiment, the air outlet 11 by pipeline 7 with
Vacuum suction structure is connected.The suction produced using vacuum suction structure further changes the flow direction of air-flow so that air knife 2 is produced
Raw air-flow enters after drying chamber 3, is flowed out from the air outlet 11, the generation of bounce-back air-flow is reduced, so as to reduce air-flow band
Influence of the dust risen to mask plate.
In the present embodiment, one end that the pipeline 7 is connected with the air outlet 11 is shaped as funnel-form, the pipeline 7
The area of the one end being connected with the air outlet 11 is more than the pipeline 11 away from one end inside the drying chamber 3.It is beneficial to
Change to air flow direction.
The concrete shape of the drying chamber 3 can have a variety of, can be cylinder, cuboid etc., in the present embodiment, institute
Drying chamber 3 is stated for a rectangular parallelepiped structure, on two relative side walls of the drying chamber 3, corresponding to the drying chamber 3
Port is provided with the air knife 2, one end inside the drying chamber 3 of the pipeline 7, length in a first direction
(dotted line is indicated in Fig. 4) is equal to the width of the corresponding side wall of the drying chamber 3, and the first direction is the pipeline 7
The width of the side wall of the corresponding drying chamber 3.
As long as the shape of one end that the pipeline 7 is connected with the air outlet 11 can have and a variety of realize that the pipeline 7 is leaned on
One end inside the nearly drying chamber 3, length (dotted line is indicated in Fig. 4) in a first direction are equal to the drying chamber
The width of 3 corresponding side walls, effectively prevents the generation of bounce-back air-flow, and avoids the occurrence of in dead angle, the present embodiment,
One end that the pipeline 7 is connected with the air outlet 11 is shaped as flat funnel-form, saves pipeline 7 in the correspondence of drying chamber 3
Side wall on the space that takes, (shape of one end that the pipeline 7 is connected with air outlet 11 and the shape of air outlet 11 are relative
Answer) one end of the pipeline 7 inside the drying chamber 3 is oval (being not limited to ellipse), the pipeline 7
The length (dotted line is indicated in oval major axis, Fig. 4) on the long side of one end inside the drying chamber 3 is equal to described
The width of the corresponding side wall of drying chamber 3.Coordinate the suction of vacuum suction structure, more effectively change in drying chamber
The flow direction of air-flow, reduces block arrow in the generation of bounce-back air-flow, Fig. 4 and represents air flow direction.
The pipeline 7 can be obliquely installed and can also be horizontally disposed with, and preferred in the present embodiment, the pipeline 7 is tilted and set
Put, when bulky dust is run into, air-breathing can not completely Adsorption bulky dust when, especially
The one end of the pipeline 7 away from the air outlet 11 is higher than one end (i.e. described pipe that the pipeline 7 is connected with the air outlet 11
Road 7 is inclined upwardly setting) when, in order to avoid dust falls within the bottom of drying chamber 3, the pipeline 7 is close to the drying chamber 3
The inner surface of bottom is stepped, as shown in Figure 5.Step structure can accept the dust taken up by air-flow, and avoid dust
Slip down to again in drying chamber 3, cause bulky dust not remove.
As shown in fig. 6, in another embodiment of the present embodiment, provided with so that the air-flow of air knife 2 leads in the drying chamber 3
The one-way check structure 4 that the air-flow of the bottom of drying chamber 3 bounce-back passes through is crossed and stops, the one-way check structure 4 is set
Between the air outlet and the air knife 2.
It is (described unidirectional by the top of one-way check structure 4 when gas flows downwards through the one-way check structure 4
Barrier structure 4 is close to the side of the air knife 2) the dust that gets off of air-flow (air knife 2 produce air-flow) band and the unidirectional resistance
The dust for keeping off the surface of structure 4 deposition can all be entered described in the presence of large wind by the one-way check structure 4
The bottom of drying chamber 3, most of air-flow can be discharged by air outlet, but have remnants straight upper bounce-back air-flow, can band
Dynamic a small amount of dust, when bounce-back air-flow runs into the one-way check structure 4, can play filtering and barrier effect, while described
Under the collective effect of the larger big air-flow of the wind-force of the top of one-way check structure 4, dust will not pass through the one-way check substantially
Structure 4, and then reduce the dust of the attachment of mask plate surface.
The specific constructive form of the one-way check structure 4 can have a variety of, the particular location of the one-way check structure 4
Setting can also be set according to actual needs, as long as realizing the stop of the dust to the lower section of one-way check structure 4, this
In embodiment, the one-way check structure 4 includes the screen pack that multiple-layer stacked is set.
As shown in fig. 7, the one-way check structure includes three layer filtration net：First screen pack 41, the second screen pack 42,
Three screen packs 43, in order to ensure that the dust below the one-way check structure is blocked, first screen pack 41, second is filtered
Net 42, the network of the 3rd screen pack 43 are can be set with interlaced, and the first screen pack 41, the second screen pack 42, the
The sizing grid of three screen packs 43 can also be different.
The one-way check structure also includes causing first screen pack 41, the second screen pack 42, the 3rd screen pack 43
In the adjustable spacing adjustment structure of spacing between any two, the filtering effect of the spacing enhancing screen pack between adjustment adjacent head net
Really, the setting of specific spacing can be set according to actual needs, for example, first screen pack 41, the second screen pack the 42, the 3rd
In screen pack 43, the spacing between adjacent head net can be zero, and identical spacing can also be set between adjacent head net, the
Spacing between one screen pack 41 and the second screen pack 42 can be with the spacing between the second screen pack 42 and the 3rd screen pack 43
It is different that (when one-way check structure includes more than 3 layers screen packs, spacing between adjacent two layers screen pack is from the port of drying chamber
Increase or be sequentially reduced successively to the direction of bottom).
First screen pack 41, the second screen pack 42, the spacing rate of grid of the 3rd screen pack 43 are from the end of drying chamber 3
Mouth can be incremented by successively to the direction of bottom or successively decrease successively or density (the grid setting of the first screen pack 41 arranged in a crossed manner
The grid for setting relatively close, the 3rd screen pack 43 than sparse, the second screen pack 42 grid is set than sparse), this reality
Apply in example preferred, first screen pack 41, the second screen pack 42, the spacing rate of grid of the 3rd screen pack 43 are from drying chamber
The direction of 3 port to bottom is incremented by successively.
It should be noted that the quantity of screen pack can be arranged as required to, three layers of setting is not restricted to.
In the embodiment of the present embodiment the 3rd.As shown in Figure 8 and Figure 9, arrow represents the flow direction of air-flow in figure, described dry
Dry chamber 3 includes two relative side walls, and the port that each side wall corresponds to the drying chamber 3 is provided with the air knife 2, often
The position of bottom of the inner surface of the individual side wall close to the drying chamber 3 is provided with the air outlet, each side wall
Inner surface is equipped with the first dividing plate 5, and first dividing plate 5 is set to the bottom angled of the drying chamber 3；
The bottom of the drying chamber 3 is provided with coordinates the airflow direction of control air knife 2 to cause wind with first dividing plate 5
The second partition 6 that the air-flow of knife 2 is discharged from the air outlet, the second partition 6 is located between two first dividing plates 5,
The section of the second partition 6 is inverted V-arrangement.
The direction of air-flow is controlled using the first dividing plate 5 and second partition 6, arrow in residual vaporous stream, figure is reduced and show
The flow direction of the interior air-flow of drying chamber 3, makes air-flow be easier to drive dust to discharge the drying chamber 3.
In the present embodiment, first dividing plate 5 has to respective side wall close to one end of the bottom of drying chamber 3 to be bent
Flanging 51.Guiding is played a part of in the setting of flanging 51, coordinate beneficial to first dividing plate 5 and the second partition 6 so that
Bring about the desired sensation stream swirling flow, finally discharged from the air outlet.
In order that air-flow is easier swirling flow, the junction of the flanging 51 and first dividing plate 5 is circular arc.
It is described above be present pre-ferred embodiments, it is necessary to explanation, to those skilled in the art,
On the premise of not departing from principle of the present invention, some improvements and modifications can also be made, these improvements and modifications also should be regarded as
The scope of the present invention.
Claims (10)
1. a kind of drying device, for the drying of mask plate, including drying chamber, the drying chamber port is provided with air knife,
Characterized in that,
Drying chamber side wall is provided with the air-flow for being used to produce air knife close to the position of the bottom of the drying chamber and discharged
Air outlet.
2. drying device according to claim 1, it is characterised in that the air outlet passes through pipeline and vacuum suction structure
Connection.
3. drying device according to claim 2, it is characterised in that one end that the pipeline is connected with the air outlet
Funnel-form is shaped as, the area of one end that the pipeline is connected with the air outlet is more than the pipeline away from the drying chamber
Internal one end.
4. drying device according to claim 3, it is characterised in that on two relative side walls of the drying chamber, right
The port of drying chamber described in Ying Yu is provided with the air knife, one end inside the drying chamber of the pipeline, the
Length on one direction is equal to the width of the corresponding side wall of the drying chamber, and the first direction is that the pipeline is corresponding
The width of the side wall of the drying chamber.
5. drying device according to claim 3, it is characterised in that the pipeline is obliquely installed, and the pipeline is remote
One end of the air outlet is higher than one end that the pipeline is connected with the air outlet, and the pipeline is close to the drying chamber bottom
The inner surface in portion is stepped.
6. drying device according to claim 1, it is characterised in that provided with the air-flow for causing air knife in the drying chamber
By and stop the one-way check structure that the air-flow that the drying chamber bottom is rebounded passes through, the one-way check structure setting in
Between the air outlet and the air knife.
7. drying device according to claim 6, it is characterised in that the one-way check structure is set including multiple-layer stacked
Screen pack.
8. drying device according to claim 1, it is characterised in that the drying chamber includes two relative side walls,
The port that each side wall corresponds to the drying chamber is provided with the air knife, and the inner surface of each side wall is close to described dry
The position of the bottom of dry chamber is provided with the air outlet, and the inner surface of each side wall is equipped with the first dividing plate, described first
Dividing plate is set to the bottom angled of the drying chamber；
The bottom of the drying chamber is provided with coordinates the airflow direction of control air knife to cause the gas of air knife with first dividing plate
Flow the second partition discharged from the air outlet, the second partition is located between two first dividing plates, described second every
The section of plate is inverted V-arrangement.
9. drying device according to claim 8, it is characterised in that first dividing plate is close to the drying chamber bottom
One end have to respective side wall bend flanging.
10. drying device according to claim 9, it is characterised in that the junction of the flanging and first dividing plate
For circular arc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710316370.XA CN107065433B (en) | 2017-05-08 | 2017-05-08 | Drying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710316370.XA CN107065433B (en) | 2017-05-08 | 2017-05-08 | Drying device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107065433A true CN107065433A (en) | 2017-08-18 |
| CN107065433B CN107065433B (en) | 2021-01-26 |
Family
ID=59597765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710316370.XA Active CN107065433B (en) | 2017-05-08 | 2017-05-08 | Drying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107065433B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110006226A (en) * | 2019-04-09 | 2019-07-12 | 北京七星华创集成电路装备有限公司 | Drying device |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006003036A (en) * | 2004-06-18 | 2006-01-05 | Shimada Phys & Chem Ind Co Ltd | Drying device |
| CN100440446C (en) * | 2005-03-30 | 2008-12-03 | 大日本网目版制造株式会社 | Substrate treatment device |
| JP2013045877A (en) * | 2011-08-24 | 2013-03-04 | Tokyo Electron Ltd | Substrate processing apparatus |
| CN104438226A (en) * | 2014-12-02 | 2015-03-25 | 京东方科技集团股份有限公司 | Mask plate cleaning system |
| CN204523639U (en) * | 2015-03-18 | 2015-08-05 | 深圳市龙图光电有限公司 | A kind of cleaning device of mask |
| CN105318693A (en) * | 2014-06-16 | 2016-02-10 | 三星显示有限公司 | Apparatus for drying substrate |
| CN105605909A (en) * | 2016-01-15 | 2016-05-25 | 武汉华星光电技术有限公司 | Substrate cleaning method |
| CN105826168A (en) * | 2015-01-28 | 2016-08-03 | 芝浦机械电子株式会社 | Substrate processing device |
| CN103003922B (en) * | 2010-07-14 | 2016-11-02 | Lg化学株式会社 | Comprise the air knife chamber of block piece |
-
2017
- 2017-05-08 CN CN201710316370.XA patent/CN107065433B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006003036A (en) * | 2004-06-18 | 2006-01-05 | Shimada Phys & Chem Ind Co Ltd | Drying device |
| CN100440446C (en) * | 2005-03-30 | 2008-12-03 | 大日本网目版制造株式会社 | Substrate treatment device |
| CN103003922B (en) * | 2010-07-14 | 2016-11-02 | Lg化学株式会社 | Comprise the air knife chamber of block piece |
| JP2013045877A (en) * | 2011-08-24 | 2013-03-04 | Tokyo Electron Ltd | Substrate processing apparatus |
| CN105318693A (en) * | 2014-06-16 | 2016-02-10 | 三星显示有限公司 | Apparatus for drying substrate |
| CN104438226A (en) * | 2014-12-02 | 2015-03-25 | 京东方科技集团股份有限公司 | Mask plate cleaning system |
| CN105826168A (en) * | 2015-01-28 | 2016-08-03 | 芝浦机械电子株式会社 | Substrate processing device |
| CN204523639U (en) * | 2015-03-18 | 2015-08-05 | 深圳市龙图光电有限公司 | A kind of cleaning device of mask |
| CN105605909A (en) * | 2016-01-15 | 2016-05-25 | 武汉华星光电技术有限公司 | Substrate cleaning method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110006226A (en) * | 2019-04-09 | 2019-07-12 | 北京七星华创集成电路装备有限公司 | Drying device |
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| Publication number | Publication date |
|---|---|
| CN107065433B (en) | 2021-01-26 |
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