CN110006226A - Drying device - Google Patents
Drying device Download PDFInfo
- Publication number
- CN110006226A CN110006226A CN201910282058.2A CN201910282058A CN110006226A CN 110006226 A CN110006226 A CN 110006226A CN 201910282058 A CN201910282058 A CN 201910282058A CN 110006226 A CN110006226 A CN 110006226A
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- CN
- China
- Prior art keywords
- cavity
- drying device
- closing chamber
- gas
- air inlet
- Prior art date
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/003—Supply-air or gas filters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B23/00—Heating arrangements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B9/00—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards
- F26B9/06—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards in stationary drums or chambers
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Drying Of Solid Materials (AREA)
Abstract
The present invention provides a kind of drying device, including cavity, further includes: cavity upper cover, the openable and closable top that cavity is set, and closing chamber is constituted with cavity in closure, the closing chamber is for holding object to be dried；Inlet duct, the side wall along cavity is arranged, for conveying dry gas into closing chamber；The sidewall bottom of cavity is arranged in air extractor, for extracting the gas in closing chamber；Heating device is set on the side wall of cavity, for heating to closing chamber.Drying device provided by the invention not only can thoroughly dry mask plate, significantly improve OLED product yield；And device structure is simple, drying process is easily controllable, plant maintenance is convenient, drying time shortens, and so as to improve production efficiency, reduces maintenance cost.
Description
Technical field
The present invention relates to technical field of drying, in particular to a kind of drying device.
Background technique
Organic Electricity laser diode (Organic Light-Emitting Diode, OLED) shows that screen has self-luminous
Characteristic, use very thin coating of organic material and glass substrate, when a current passes through, these organic materials will be sent out
Light, since OLED display screen has, visible angle is big, contrast is high, power consumption is low, reaction speed is fast, can be used for flexibility panel
And the characteristic of use temperature range extensively etc., industrial prospect are boundless, it is considered to be flat-panel screens application skill of new generation
Art.
Vapor deposition is one of core process of OLED, and the high-precision metal mask plate used is the key that evaporation process group
Part.Mask plate is after used a period of time, it is necessary to clean to it, to remove organic material of surface attachment, to guarantee
The vapor deposition accuracy of mask plate.Currently, NMP (N-Methyl pyrrolidone) solution that the cleaning of mask plate is widely used, to nmp solution
Remaining medical fluid is had after organic material is washed off to be attached on mask plate, then uses the HFE solution of highly volatile by NMP raffinate
Removal.But the mask plate after over cleaning still can a small amount of HFE solution of remaining and water vapour, the residual meeting of both impurity
Subsequent evaporation process is influenced, to influence the luminescent properties of OLED.
Summary of the invention
The present invention is directed at least solve one of the technical problems existing in the prior art, a kind of drying device is proposed,
Not only object to be dried can thoroughly be dried, significantly improve OLED product yield；And device structure is simple, dry
Process is easily controllable, plant maintenance is convenient, drying time shortens, and so as to improve production efficiency, reduces maintenance cost.
To achieve the above object, the present invention provides a kind of drying devices, including cavity, further includes:
Cavity upper cover, the openable and closable top that the cavity is set, and closing chamber is constituted with the cavity in closure,
The closing chamber is for holding object to be dried；
Inlet duct, the side wall along the cavity is arranged, for conveying dry gas into the closing chamber；
The sidewall bottom of the cavity is arranged in air extractor, for extracting the gas in the closing chamber；
Heating device is set on the side wall of the cavity, for heating to the closing chamber.
Optionally, the inlet duct includes multiple groups gas circuit group, and multiple groups gas circuit group is equal along the axial direction of the side wall of the cavity
Even distribution；
Every group of gas circuit group includes one or more air inlet branch road, and a plurality of air inlet branch road is spaced setting along the vertical direction；Often
The outlet side of air inlet branch road described in item is connected to the closing chamber, for spraying the dry gas.
Optionally, the inlet duct further include:
Air inlet main road, outlet side are connect with the inlet end of air inlet branch road described in each item in gas circuit group described in each group；?
The first on-off switch is provided on the air inlet main road；
Gas source connect with the inlet end of the air inlet main road, is used to provide the described dry gas.
Optionally, air filter, pressure reducing valve and oil sprayer are provided on the air inlet main road.
Optionally, the object to be dried includes mask plate.
Optionally, the air extractor includes:
Exhaust pipe is provided with the second on-off switch on the exhaust pipe；
Aspiration pump is arranged on the exhaust pipe, for extracting the gas in the closing chamber by the exhaust pipe
Body.
Optionally, on the exhaust pipe, and the upstream for being located at second on-off switch is provided with non-return valve.
Optionally, first on-off switch includes Pneumatic gate valve or solenoid valve；Second on-off switch includes gas
Dynamic gate valve or solenoid valve.
Optionally, the drying device further includes the drain line that the cavity bottom is arranged in, described close for being discharged
Seal intracavitary liquid；Third on-off valve is provided in the drain line.
Optionally, the heating device includes one or more fire-bars, and multiple fire-bars are spaced set along the vertical direction
It sets；The fire-bar is wrapped on the side wall of the cavity.
Optionally, one or more reinforcing rib is provided on the side wall of the cavity, and a plurality of reinforcing rib is along vertical side
It is arranged to interval；The reinforcing rib is along the cavity circumferentially around setting.
Optionally, the drying device further includes upper cover driving mechanism, and the upper cover driving mechanism includes:
Hinges are connect with the cavity and the cavity upper cover respectively；
Cylinder, for driving the cavity upper cover to open and close.
Beneficial effects of the present invention:
Drying device provided by the present invention may be constructed by setting cavity and openable and closable cavity upper cover for containing
The closing chamber of object to be dried is put, so as to avoid in the drying process, the particulate matter in outside air enters cavity and dirt
Contaminate mask plate.Meanwhile temperature and vacuum degree in closing chamber are properly increased by heating device and air extractor, exposure mask can be made
Remaining medical fluid evaporates in plate, then blows dry gas to mask plate by inlet duct again, exposure mask is further dried
Plate finally makes mask plate reach thoroughly dry state, to significantly improve OLED product yield.Moreover, inlet duct and
Heating device is arranged on the side wall of cavity, and intake uniformity and heating uniformity can be improved, so as to improve drying
Uniformity.Drying device provided by the invention, structure is simple,
Drying process is easily controllable, easy to maintain, drying time shortens, and so as to improve production efficiency, reduces maintenance
Cost.
Detailed description of the invention
Fig. 1 is a kind of existing structural schematic diagram of the drying device of mask plate；
Fig. 2 is the structural schematic diagram of drying device provided in an embodiment of the present invention；
Fig. 3 is the flow diagram of drying means provided in an embodiment of the present invention；And
Fig. 4 is the flow diagram of step 3 used in the embodiment of the present invention.
Specific embodiment
To make those skilled in the art more fully understand technical solution of the present invention, the present invention is mentioned with reference to the accompanying drawing
The drying device of confession is described in detail.
As shown in Figure 1, being a kind of existing drying device of mask plate.The device includes that can accommodate mask plate 12 vertically
Chamber 100, blowning installation and exhaust apparatus, wherein blowning installation is set to the top of chamber 100, and including being oppositely arranged
The first air knife 51 and the second air knife 52, the two to opposite two surfaces of mask plate 12 for blowing from top to bottom.Chamber 100
The two sides of sidewall bottom be provided with the first opening 21 and the second opening 22, the two respectively with the first air knife 41 and the second air knife 42
Ipsilateral setting.Exhaust apparatus includes downtake pipe 61 and second exhaust pipe 62, and the two is opened with the first opening 21 and second respectively
Mouth 22 is connected, the gases for being discharged in chamber 100.In addition, in the bottom of chamber 100, and it is located at the lower section of mask plate 12 also
It is provided with the dry net 10 for adsorbing steam.In the drying process, the first air knife 51 and the second air knife 52 are from top to bottom to covering
Two opposite surfaces of template 12 are blown, while the gas in chamber 100 is discharged into respectively from the first opening 21 and the second opening 22
Downtake pipe 61 and second exhaust pipe 62.
But above-mentioned drying device is inevitably present following defect in practical applications:
First, due to the top of chamber 100 be it is open, chamber 100 does not completely enclose, cause during drying,
Particulate matter in air is easy to the mask plate that pollution has cleaned up；
Second, since the top of chamber 100 is arranged in the first air knife 41 and the second air knife 42, and blow from top to bottom, it leads
The drying effect of mask plate 12 in the vertical direction is caused to have differences, so that adverse effect is brought to subsequent process uniformity,
And the drying effect of 12 bottom of mask plate is poor, is unable to satisfy technique requirement.
Third, dry net 10 replaces inconvenience after water suction saturation, difficulty is brought to later maintenance, maintenance cost is higher.
Fourth, this drying device can only be dried under the conditions of normal pressure and temperature, drying effect is bad, causes in mask plate 12 still
Residual steam is had to stay.
Fifth, the production time is too long, production efficiency is influenced.
To solve one of defect existing for above-mentioned drying device, referring to Fig. 2, the embodiment of the present invention provides a kind of dry dress
It sets comprising cavity 1, cavity upper cover 2, inlet duct 3, air extractor 4 and heating device, wherein the top of cavity 1, which has, opens
Mouthful；The openable and closable top that cavity 1 is set of cavity upper cover 2, the opening of cavity 1 can be opened or closed, and on cavity
Lid 2 constitutes closing chamber 11 with cavity 1 in closure, for holding object 6 to be dried.This way it is possible to avoid in the drying process,
Particulate matter in outside air enters cavity 1 and pollutes object 6 to be dried.
Drying device provided in an embodiment of the present invention can be applied to dry mask plate etc., and object to be dried includes exposure mask
Plate.
Preferably, reinforcing rib (not shown) is provided on the side wall of cavity 1, for improving the intensity of cavity 1, from
And guaranteeing cavity 1 can not be deformed under condition of negative pressure.Specifically, reinforcing rib can be welded on the outer of the side wall of cavity 1
On surface and/or inner surface, and reinforcing rib can be one or more, and a plurality of reinforcing rib is spaced setting along the vertical direction,
To improve intensity of the cavity 1 in the vertical direction at different location；Also, every reinforcing rib is the annular of closure, and along cavity 1
Circumferentially around setting, to improve the integral strength of cavity 1 in its circumferential direction.In practical applications, the ring body shape of reinforcing rib
Should be consistent with the sidewall shape of cavity 1, for example, the sidewall shape of cavity 1 is rectangle；Corresponding, reinforcing rib is rectangular
Ring body.
Optionally, material used by cavity 1 includes stainless steel, such as SUS304.
In the present embodiment, fixture (not shown) is additionally provided in cavity 1, the fixture is for fixed to dry vertically
Dry object 6, that is, the thickness direction of object 6 to be dried is horizontally disposed, so that object to be dried 6 can be in vertical placement.
In the present embodiment, drying device further includes upper cover driving mechanism (not shown), for driving cavity upper cover 2
Folding.Specifically, upper cover driving mechanism includes hinges and cylinder, wherein hinges respectively with cavity 1 and cavity upper cover
2 connections, to realize the hinged of the two；Cylinder is for driving cavity upper cover to open and close.Certainly, in practical applications, can also adopt
With the openable and closable connection cavity 1 of other articulated manners and cavity upper cover 2.In addition, other than cylinder, can also using electric cylinders or
Other driving sources of person's hydraulic cylinder etc..It is of course also possible to use manual mode driving cavity upper cover 2 opens and closes.
Inlet duct 3 is arranged along the side wall of cavity 1, for conveying dry gas into closing chamber 11.In the present embodiment,
Inlet duct 3 include two groups of gas circuit groups, respectively the first gas circuit group 31 and the second gas circuit group 32, the two respectively with object to be dried
6 both side surface is corresponding, for exporting dry gas to the both side surface of object 6 to be dried respectively.Due to two groups of gas circuit groups
It is arranged on the side wall of cavity 1, this is compared with the mode for spraying gas from top to bottom from the top of cavity in the prior art, Ke Yiti
The uniform drying of high object 6 to be dried in the vertical direction guarantees the dry of object 6 to be dried each position in the vertical direction
Dry effect can reach technique requirement.Certainly, in practical applications, gas circuit group may be three groups, four groups or five groups with
On, and multiple groups gas circuit group is uniformly distributed along the axial direction of the side wall of cavity 1.
In the present embodiment, the first gas circuit group 31 includes four the first air inlet branch roads 311, and four the first air inlet branch roads
311 interval settings along the vertical direction；The outlet side of every first air inlet branch road 311 is connected to closing chamber 11, for spraying drying
Gas.Likewise, the second gas circuit group 32 includes four the second air inlet branch roads 321, and four the second air inlet branch roads 321 are along vertical side
It is arranged to interval；The outlet side of every second air inlet branch road 321 is connected to closing chamber 11, for spraying dry gas.By
A plurality of air inlet branch road is set on vertical direction, can be further improved the uniform drying of mask plate 6 in the vertical direction.
Preferably, the outlet side of four the first air inlet branch roads 311 goes out with four the second air inlet branch roads 321 correspondingly
Gas end flush, to guarantee the uniform drying of 6 both side surface of mask plate.
It should be noted that in practical applications, the quantity of the air inlet branch road in every group of gas circuit group is also possible to one, two
Item, three or five or more.
In the present embodiment, inlet duct further includes air inlet main road 33 and gas source 35, wherein the outlet side of air inlet main road 33
It is connect with the inlet end of each air inlet branch road in each group gas circuit group；Gas source 35 is connect with the inlet end of air inlet main road 33, by gas
The dry gas that source 35 provides is separately flowed into each air inlet branch road in each group gas circuit group by air inlet main road 33.Optionally,
Gas source 35 is that factory service end supplies gas source.
In addition, the first on-off switch 34 is provided on air inlet main road 33, for opening or closing air inlet main road 33.It is preferred that
, which uses the autocontrol valve of Pneumatic gate valve or solenoid valve etc., to realize automation control.
Optionally, air filter 36, pressure reducing valve 38 and oil sprayer 37 are provided on air inlet main road 33, to guarantee into
The cleaning of stable gas pressure and gas in gas main road 33.
The sidewall bottom of cavity 1 is arranged in air extractor 4, for extracting the gas in closing chamber 11.It is closed in cavity upper cover 2
When conjunction, since closing chamber 11 is in closed state, the gas in closing chamber 11 is extracted by air extractor 4 at this time, can be improved
The pressure of closing chamber 11, so as to promote the medical fluid on object 6 to be dried to volatilize, is mentioned with making it have certain vacuum degree
High drying effect.
In the present embodiment, air extractor 4 includes exhaust pipe 41 and aspiration pump 43, wherein the setting of exhaust pipe 41 exists
The sidewall bottom of cavity 1；Aspiration pump 43 is arranged on exhaust pipe 41, for being extracted in closing chamber 1 by exhaust pipe 41
Gas.Also, the second on-off switch 42 is provided on exhaust pipe 41, for being switched on or switched off exhaust pipe 41.Preferably,
Second on-off switch 42 uses the autocontrol valve of Pneumatic gate valve or solenoid valve etc., to realize automation control.
Preferably, on exhaust pipe 41, and the upstream for being located at the second on-off switch 42 is provided with non-return valve 44, can be with
Gas suck-back is prevented, so as to avoid the vacuum degree of closing chamber 1 from being destroyed, while avoiding returning to gaseous contamination closing chamber 1.
Preferably, drying device further includes the drain line 7 that 1 bottom of cavity is arranged in, for being discharged in seal chamber 11
Liquid, the liquid mostly come from waste liquid when waste liquid or cleaning chamber 1 after cleaning object 6 to be dried；Also, in drain
Third on-off valve 8 is provided on pipeline 7, for being switched on or switched off drain line 7.Preferably, the third on-off valve 8 is using such as
The autocontrol valve of Pneumatic gate valve or solenoid valve etc., to realize automation control.
Heating device is set on the side wall of cavity 1, for heating to closing chamber 11.It, can be with by heating device 5
The temperature in closing chamber 11 is properly increased, is allowed to that object 6 to be dried can be promoted under the conditions of higher temperature higher than room temperature
On medical fluid volatilization, so as to improve drying effect.
In the present embodiment, heating device includes two fire-bars 5, and two fire-bars 5 are spaced setting along the vertical direction,
Can be improved the temperature uniformity of closing chamber 11 in the vertical direction；Also, each fire-bar 5 is wrapped in the side wall of cavity 1
On, to improve the temperature uniformity of closing chamber 11 in its circumferential direction.Certainly, in practical applications, fire-bar 5 may be one
Or three or more.In addition, fire-bar 5 can be heating adhesive tape, and it is pasted onto the side-wall outer side of cavity 1.
It should be noted that in practical applications, heating device can also use other heating elements, such as heater strip
Deng.
In conclusion drying device provided in an embodiment of the present invention, by the way that cavity 1 and openable and closable cavity upper cover 2 is arranged,
It may be constructed the closing chamber 11 for holding mask plate, the particulate matter so as to avoid in the drying process, in outside air
Into cavity 1 and pollute mask plate.Meanwhile by heating device and air extractor 4 properly increase temperature in closing chamber 11 and
Vacuum degree can be such that remaining medical fluid in object 6 to be dried evaporates, then again by inlet duct 3 to object 6 to be dried
Dry gas is blowed, object 6 to be dried is further dried, object 6 to be dried is finally made to reach thoroughly dry state, thus aobvious
Work improves OLED product yield.Moreover, inlet duct and heating device are arranged on the side wall of cavity, air inlet can be improved
Uniformity and heating uniformity, so as to improve uniform drying.
Drying device provided by the invention, structure is simple, drying process is easily controllable, easy to maintain, drying time contracting
It is short, so as to improve production efficiency, reduce maintenance cost.
As shown in figure 3, the embodiment of the present invention also provides a kind of drying means, use provided in an embodiment of the present invention above-mentioned
Object 6 to be dried is dried in drying device, the drying means the following steps are included:
Cavity 1 is heated to preset temperature using heating device by S1；
S2 opens cavity upper cover 2, and object 6 to be dried is sent in cavity 1；
S3, closed housing upper cover 2, and using air extractor 4 to the gas in closing chamber 11, until the pressure of closing chamber 11
Reach preset pressure；
S4 opens inlet duct 3, so that inlet duct 3 blows object 6 to be dried after by the first predetermined time
Dry gas is sent, while opening air extractor 4, with the gas being discharged in closing chamber 11；
S5 closes inlet duct 3 and air extractor 4, and open cavity upper cover 2 after by the second predetermined time, with
Object 6 to be dried is taken out from cavity 1.
Preferably, the value range of above-mentioned first predetermined time is in 10s-15s.Within this time range, it is ensured that residual
The medical fluid and steam stayed in object 6 to be dried thoroughly volatilizees and evaporates.
Preferably, as shown in figure 4, above-mentioned steps S3 further comprises:
S31, closed housing upper cover 2；
S32 is extracted with first rate and the first duration to the gas in closing chamber 11 using air extractor 4；
S33 is extracted with the second rate and the second duration to the gas in closing chamber 11 using air extractor 4；
Wherein, the second rate is less than first rate；Second duration is greater than the first duration.
By the way that pumping process is divided into two stages, that is, step S32 and step S33, and the speed of exhaust of step S32
Comparatively fast, pumpdown time is shorter, closing chamber 11 can be made to be rapidly achieved vacuum state in this way, so as to improve process efficiency；And
The speed of exhaust of step S33 is slower, and pumpdown time is longer, can guarantee that the vacuum degree of closing chamber 11 can accurately reach in this way and set
Definite value, so as to improve technique accuracy.Preferably, first rate 1000L/min；A length of 5s when first；Second rate
For 250L/min；A length of 20s when second.
In conclusion drying means provided in an embodiment of the present invention, by suitably being mentioned by heating device and air extractor 4
Temperature and vacuum degree in high closing chamber 11 can be such that remaining medical fluid in object 6 to be dried evaporates, then again by into
Device of air 3 blows dry gas to object 6 to be dried, and object 6 to be dried is further dried, and finally reaches object 6 to be dried
Thoroughly dry state, to significantly improve OLED product yield.Moreover, drying means provided by the invention, dried
Journey is easily controllable, drying time shortens, and so as to improve production efficiency, reduces maintenance cost.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses
Mode, however the present invention is not limited thereto.For those skilled in the art, essence of the invention is not being departed from
In the case where mind and essence, various changes and modifications can be made therein, these variations and modifications are also considered as protection scope of the present invention.
Claims (12)
1. a kind of drying device, including cavity, which is characterized in that further include:
Cavity upper cover, the openable and closable top that the cavity is set, and closing chamber is constituted with the cavity in closure, it is described
Closing chamber is for holding object to be dried；
Inlet duct, the side wall along the cavity is arranged, for conveying dry gas into the closing chamber；
The sidewall bottom of the cavity is arranged in air extractor, for extracting the gas in the closing chamber；
Heating device is set on the side wall of the cavity, for heating to the closing chamber.
2. drying device according to claim 1, which is characterized in that the inlet duct includes multiple groups gas circuit group, multiple groups
Gas circuit group is uniformly distributed along the axial direction of the side wall of the cavity；
Every group of gas circuit group includes one or more air inlet branch road, and a plurality of air inlet branch road is spaced setting along the vertical direction；Every institute
The outlet side for stating air inlet branch road is connected to the closing chamber, for spraying the dry gas.
3. drying device according to claim 2, which is characterized in that the inlet duct further include:
Air inlet main road, outlet side are connect with the inlet end of air inlet branch road described in each item in gas circuit group described in each group；Described
The first on-off switch is provided on air inlet main road；
Gas source connect with the inlet end of the air inlet main road, is used to provide the described dry gas.
4. drying device according to claim 3, which is characterized in that be provided with air filtration on the air inlet main road
Device, pressure reducing valve and oil sprayer.
5. drying device according to claim 3, which is characterized in that the object to be dried includes mask plate.
6. drying device according to claim 1, which is characterized in that the air extractor includes:
Exhaust pipe is provided with the second on-off switch on the exhaust pipe；
Aspiration pump is arranged on the exhaust pipe, for extracting the gas in the closing chamber by the exhaust pipe.
7. drying device according to claim 6, which is characterized in that on the exhaust pipe, and be located at described second
The upstream of on-off switch is provided with non-return valve.
8. the drying device according to claim 3 or 6, which is characterized in that first on-off switch includes Pneumatic gate valve
Or solenoid valve；Second on-off switch includes Pneumatic gate valve or solenoid valve.
9. drying device described in -7 any one according to claim 1, which is characterized in that the drying device further includes setting
Liquid in the drain line of the cavity bottom, for being discharged in the seal chamber；Is provided in the drain line
Three on-off valves.
10. drying device described in -7 any one according to claim 1, which is characterized in that the heating device includes one
Or multiple fire-bars, and multiple fire-bars are spaced setting along the vertical direction；The fire-bar is wrapped on the side wall of the cavity.
11. drying device described in -7 any one according to claim 1, which is characterized in that set on the side wall of the cavity
It is equipped with one or more reinforcing rib, and a plurality of reinforcing rib is spaced setting along the vertical direction；Week of the reinforcing rib along the cavity
To around setting.
12. drying device described in -7 any one according to claim 1, which is characterized in that on the drying device further includes
Lid driving mechanism, the upper cover driving mechanism include:
Hinges are connect with the cavity and the cavity upper cover respectively；
Cylinder, for driving the cavity upper cover to open and close.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910282058.2A CN110006226A (en) | 2019-04-09 | 2019-04-09 | Drying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910282058.2A CN110006226A (en) | 2019-04-09 | 2019-04-09 | Drying device |
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| CN110006226A true CN110006226A (en) | 2019-07-12 |
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| CN201910282058.2A Pending CN110006226A (en) | 2019-04-09 | 2019-04-09 | Drying device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112222079A (en) * | 2020-09-24 | 2021-01-15 | 合肥维信诺科技有限公司 | Cleaning and drying system and cleaning and drying method |
| CN114293122A (en) * | 2022-01-13 | 2022-04-08 | 马鞍山钢铁股份有限公司 | Air knife sealing device suitable for zinc-aluminum-magnesium production line and use method |
| CN115077207A (en) * | 2022-06-20 | 2022-09-20 | 合肥维信诺科技有限公司 | Cleaning and drying system and cleaning and drying method |
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| US20070175499A1 (en) * | 2003-12-15 | 2007-08-02 | Yuval Yassour | Method for cleaning surfaces using parallel flow |
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| CN105276934A (en) * | 2015-11-11 | 2016-01-27 | 同济大学 | Drying device and technique for optical elements washed through chemical wet process |
| CN106369985A (en) * | 2016-10-18 | 2017-02-01 | 东莞宇宙电路板设备有限公司 | Air knife assembly and drying device |
| CN107065433A (en) * | 2017-05-08 | 2017-08-18 | 京东方科技集团股份有限公司 | Drying device |
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| CN207050342U (en) * | 2017-06-14 | 2018-02-27 | 广西克鲁尼茶叶生物科技有限公司 | A kind of tea grounds water barrier device |
| CN208187034U (en) * | 2018-05-21 | 2018-12-04 | 京东方科技集团股份有限公司 | A kind of mask plate drying device and manufacture system |
| CN109140927A (en) * | 2018-08-23 | 2019-01-04 | 重庆市嘉凌新科技有限公司 | Chip drying mechanism |
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| CN112222079A (en) * | 2020-09-24 | 2021-01-15 | 合肥维信诺科技有限公司 | Cleaning and drying system and cleaning and drying method |
| CN114293122A (en) * | 2022-01-13 | 2022-04-08 | 马鞍山钢铁股份有限公司 | Air knife sealing device suitable for zinc-aluminum-magnesium production line and use method |
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