CN107062903B - Tube furnace temperature control system and tube furnace - Google Patents
Tube furnace temperature control system and tube furnace Download PDFInfo
- Publication number
- CN107062903B CN107062903B CN201710411781.7A CN201710411781A CN107062903B CN 107062903 B CN107062903 B CN 107062903B CN 201710411781 A CN201710411781 A CN 201710411781A CN 107062903 B CN107062903 B CN 107062903B
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- China
- Prior art keywords
- tube furnace
- temperature
- quartz ampoule
- heating
- heating element
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D11/00—Arrangement of elements for electric heating in or on furnaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D21/00—Arrangements of monitoring devices; Arrangements of safety devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
- F27D2019/0003—Monitoring the temperature or a characteristic of the charge and using it as a controlling value
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
- F27D2019/0028—Regulation
- F27D2019/0034—Regulation through control of a heating quantity such as fuel, oxidant or intensity of current
- F27D2019/0037—Quantity of electric current
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D21/00—Arrangements of monitoring devices; Arrangements of safety devices
- F27D21/0014—Devices for monitoring temperature
Abstract
The present invention provides a kind of tube furnace temperature control system and tube furnace, and the tube furnace temperature control system includes: heating element, is located in quartz ampoule, heats suitable for the sample to surface placed thereon；Temperature element is located in quartz ampoule, and is located at the top of heating element；Temperature element is suitable for carrying out real-time monitoring to the temperature of sample during heating；Transformer is located at outside quartz ampoule, is electrically connected with heating element；Transformer is suitable for heating element and provides voltage, and the heating rate of heating element is adjusted by adjusting the voltage provided；Temperature controller is located at outside quartz ampoule, is electrically connected with temperature element and transformer.Tube furnace temperature control system of the invention is by the way that heating element to be placed in the quartz ampoule of tube furnace, heating element can be used, sample is directly heated, it is heated compared to existing external heat radiation, has many advantages, such as that temperature control is accurate, heating cooling rate is fast, thermal loss is small, is more energy-saving and environmentally friendly.
Description
Technical field
The invention belongs to technical field of temperature control, more particularly to a kind of tube furnace temperature control system and tube furnace.
Background technique
Tube furnace system structure is simple, and heating is convenient, is widely used in ceramic post sintering, material processing, chemical vapor deposition
Experiment, vacuum annealing etc..When different zones need to control different temperatures, it will usually select double temperature-area tubular furnaces.It is existing double
Temperature-area tubular furnace heating system generally uses electrothermal resistance silk to wrap up quartz ampoule, is added by way of heat radiation to sample in pipe
Heat, while reflecting that the temperature of sample in pipe reaches temperature regulation purpose by the temperature of thermocouple measurement quartz ampoule.It is this to add
Hot mode is simple and convenient, but the cooling the disadvantage is that uncontrollable sample is rapidly heated, and not can accurately reflect the actual temperature of sample.It is former
Because being: heat radiation mode heating effect is slower in tube furnace, and the reaction time regulated and controled to sample temperature in pipe is longer；And furnace
High temperature fiber thermal insulation material in thorax can reduce the rate of temperature fall of sample.In addition, especially when the operating temperature of sample in pipe compared with
When low, sample actual temperature error is larger in thermocouple measuring temperature and pipe, it is difficult to accurately be adjusted to the temperature of sample in pipe
Control.Two warm areas of double temperature-area tubular furnaces use independent temperature control program, keep formation temperature in same boiler tube poor.But due to
Two warm areas are closer and irremovable, when two warm area operating temperatures differences are larger, high-temperature region heat diffusion to low temperature
Area controls to influence the temperature of low-temperature space.
Therefore existing double temperature-area tubular furnaces are although easy to operate, heated perimeter is wide, are suitable for most of heating rings
Border, but biggish is differed for be rapidly heated cooling, the warm area operating temperature of accurate regulating and controlling temperature, especially two of sample needs
Special occasions, existing double temperature-area tubular furnaces have been difficult to be competent at.
Summary of the invention
In view of the foregoing deficiencies of prior art, the purpose of the present invention is to provide a kind of tube furnace temperature control systems
And tube furnace, it is rapidly heated cooling, not can accurately reflect for solving to be difficult to control existing for tube furnace sample in the prior art
Two warm areas existing for the problem of actual temperature of sample and existing double temperature-area tubular furnaces are closer and irremovable,
When two warm area operating temperature differences are larger, high-temperature region heat diffusion to low-temperature space is to influence the temperature controlled of low-temperature space
Problem.
In order to achieve the above objects and other related objects, the present invention provides a kind of tube furnace temperature control system, the pipe
The temperature that formula furnace temperature control system is suitable for tube furnace controls, and the tube furnace includes quartz ampoule；The tubular type furnace temperature control
System includes:
Heating element is located in the quartz ampoule；The upper surface of the heating element is equipped with sample deposition domain, described to add
Thermal element is suitable for heating the sample on surface placed thereon；
Temperature element is located in the quartz ampoule, and is located at the top of the heating element；The temperature element is suitable for
Real-time monitoring is carried out to the temperature of sample in heating process；
Transformer is located at outside the quartz ampoule, is electrically connected with the heating element；The transformer is suitable for the heating
Element provides voltage, and the heating rate of heating element is adjusted by adjusting the voltage provided；
Temperature controller is located at outside the quartz ampoule, is electrically connected with the temperature element and the transformer；The temperature
The sample temperature that controller is suitable for detecting according to the temperature element carries out feedback regulation to the transformer, to realize to placement
Real-time monitoring is carried out in the temperature of the sample of the heating element upper surface.
As a kind of preferred embodiment of tube furnace temperature control system of the invention, the heating element includes ceramic heat
One of plate, mica heating plate, sheet metal heating, graphite heating plate or carbon fiber heating plate or at least two combination.
As a kind of preferred embodiment of tube furnace temperature control system of the invention, the temperature element include thermocouple,
Infrared radiation thermometer or thermistor.
As a kind of preferred embodiment of tube furnace temperature control system of the invention, the tube furnace temperature control system is also
Including temperature-compensating line, the temperature element is electrically connected via temperature-compensating line with the temperature controller.
As a kind of preferred embodiment of tube furnace temperature control system of the invention, the tube furnace temperature control system is also
Include:
First group of metal connecting column, between the temperature controller and the temperature element；First group of metal
Connecting column one end is electrically connected via the temperature-compensating line with the temperature element, and the other end is via the temperature-compensating line and institute
State temperature controller electrical connection；
Second group of metal connecting column, between the heating element and the transformer；Second group of metal connection
Column one end is electrically connected via metal wire with the heating element, and the other end is electrically connected via metal wire with the transformer.
The present invention also provides one kind to have tube furnace, and the tube furnace includes:
Quartz ampoule, the quartz ampoule include opposite first end and second end；
The tube furnace temperature control system as described in above-mentioned either a program, the institute in the tube furnace temperature control system
It states heating element and the temperature element is respectively positioned in the quartz ampoule.
As a kind of preferred embodiment of tube furnace of the invention, the tube furnace further include:
First end cover component is fixed on the first end of the quartz ampoule；The first end cover component is equipped with installation through-hole,
The heating element is electrically connected via the installation through-hole with the transformer, the temperature element with the temperature controller
It connects；
Second end cover component is fixed on the second end of the quartz ampoule.
As a kind of preferred embodiment of tube furnace of the invention, the first end cover component includes:
First pressure ring is fixed on the outer wall of the quartz ampoule first end；
First flange disk is detained the open outer side as the quartz ampoule first end, and is fixed on first pressure ring；Institute
Installation through-hole is stated to be located on the first flange disk.
As a kind of preferred embodiment of tube furnace of the invention, the first end cover component further includes the first sealing ring, institute
The first sealing ring is stated between first pressure ring and the first flange disk.
As a kind of preferred embodiment of tube furnace of the invention, the second end cover component includes:
Second pressure ring is fixed on the outer wall of the quartz ampoule second end；
Second flange disk is detained the open outer side as the quartz ampoule second end, and is fixed on second pressure ring.
As a kind of preferred embodiment of tube furnace of the invention, the second end cover component further includes the second sealing ring, institute
The second sealing ring is stated between second pressure ring and the second flange disk.
As a kind of preferred embodiment of tube furnace of the invention, air inlet is additionally provided on the first flange disk；Described
Exhaust outlet is additionally provided on two ring flanges.
As a kind of preferred embodiment of tube furnace of the invention, the tube furnace includes the first warm area and the second warm area, institute
It states quartz ampoule and runs through first warm area and second warm area along its length；Wherein, the heating element and the survey
Warm element is respectively positioned in first warm area.
As a kind of preferred embodiment of tube furnace of the invention, the tube furnace further includes electrothermal resistance silk, the electrothermal resistance
Silk is located in second warm area, and along the quartz ampoule circumferentially around in the outside of the quartz ampoule.
As a kind of preferred embodiment of tube furnace of the invention, the tube furnace further includes tubular type furnace main body；The quartz
Pipe runs through the tubular type furnace main body along its length, and the first end of the quartz ampoule and second end are located at the tubular type
The opposite two sides of furnace main body；The electrothermal resistance silk is located in the tubular type furnace main body.
As described above, tube furnace temperature control system of the invention and tube furnace, have the advantages that of the invention
It is straight to sample that heating element can be used by the way that heating element to be placed in the quartz ampoule of tube furnace in tube furnace temperature control system
Tap into capable heating, heated compared to existing external heat radiation, have temperature control is accurate, heating cooling rate is fast, thermal loss is small,
The advantages that being more energy-saving and environmentally friendly；Temperature element is placed in the quartz ampoule of tube furnace, temperature element abuts sample, can be accurately anti-
Reflect the actual temperature of sample；Feedback regulation by temperature controller to transformer can be realized the temperature to sample in quartz ampoule
Degree carries out real-time monitoring；Due to devising special flange, heating and temperature element are introduced in the quartz ampoule of tube furnace, simultaneously
The heating needs in vacuum condition or particular atmosphere may be implemented in the air-tightness that ensure that whole device.
Detailed description of the invention
Fig. 1 is shown as the structural schematic diagram of the tube furnace temperature control system provided in the embodiment of the present invention one.
Fig. 2 is shown as the structural schematic diagram of the tube furnace provided in the embodiment of the present invention two.
Fig. 3 is shown as the enlarged drawing of the tube furnace first end provided in the embodiment of the present invention two.
Component label instructions
10 quartz ampoules
11 heating elements
12 temperature elements
13 transformers
14 temperature controllers
15 temperature-compensating lines
16 metal wires
17 first groups of metal connecting columns
18 second groups of metal connecting columns
19 first end cover components
191 first pressure rings
192 first flange disks
193 first sealing rings
194 air inlets
20 second end face components
201 exhaust outlets
21 first warm areas
22 second warm areas
23 electrothermal resistance silks
24 tubular type furnace main bodies
Specific embodiment
Illustrate embodiments of the present invention below by way of specific specific example, those skilled in the art can be by this specification
Other advantages and efficacy of the present invention can be easily understood for disclosed content.The present invention can also pass through in addition different specific realities
The mode of applying is embodied or practiced, the various details in this specification can also based on different viewpoints and application, without departing from
Various modifications or alterations are carried out under spirit of the invention.
It please refers to Fig.1 to Fig.3.It should be noted that diagram provided in the present embodiment only illustrates this in a schematic way
The basic conception of invention, though only show in diagram with related component in the present invention rather than package count when according to actual implementation
Mesh, shape and size are drawn, when actual implementation form, quantity and the ratio of each component can arbitrarily change for one kind, and its
Assembly layout form may also be increasingly complex.
Embodiment one
Referring to Fig. 1, the present invention provides a kind of tube furnace temperature control system, the tube furnace temperature control system is suitable for
The temperature of tube furnace controls, and the tube furnace includes quartz ampoule 10；The tube furnace temperature control system includes: heating element
11, the heating element 11 is located in the quartz ampoule 10；The upper surface of the heating element 11 is equipped with sample deposition domain, institute
Heating element 11 is stated to be suitable for heating the sample on surface placed thereon；Temperature element 12, the temperature element 12 are located at
In the quartz ampoule 10, and it is located at the top of the heating element 11；The temperature element 12 is suitable for during heating to sample
The temperature of product carries out real-time monitoring；Transformer 13, the transformer 13 is located at outside the quartz ampoule 10, with the heating element 11
Electrical connection；The transformer 13 is suitable for the heating element 11 and provides voltage, and by adjusting described in the voltage provided adjusting
The heating rate of heating element 11；Temperature controller 14, the temperature controller 14 is located at outside the quartz ampoule 10, with the survey
Warm element 12 and the transformer 13 are electrically connected；The temperature controller 14 is suitable for the sample detected according to the temperature element 12
Temperature carries out feedback regulation to the transformer 13, to realize the temperature to the sample for being placed in 11 upper surface of heating element
Carry out real-time monitoring.The heating element 11 by being placed in the stone of tube furnace by tube furnace temperature control system of the invention
In English pipe 10, the heating element 11 can be used, sample is directly heated, due to during heating only to sample
Heating can quickly transfer heat to sample without heating the quartz ampoule 10, and once the heating element 11 stops
Heating, sample temperature can decline rapidly, heat compared to existing external heat radiation, tubular type furnace temperature control of the invention
System has many advantages, such as that temperature control is accurate, heating cooling rate is fast, thermal loss is small, is more energy-saving and environmentally friendly；By the temperature element
12 are also placed in the quartz ampoule 10 of tube furnace, and the temperature element 12 abuts sample, can accurately reflect the reality of sample
Temperature；Meanwhile the feedback regulation by the temperature controller 14 to the transformer 13, it can be realized to the quartz ampoule 10
The temperature of interior sample carries out real-time monitoring.
As an example, the heating element 11 may include ceramic heating plate, mica heating plate, sheet metal heating, graphite
One of heating plate or carbon fiber heating plate or at least two combination.
As an example, the temperature element 12 may include any of thermocouple, infrared radiation thermometer or thermistor.
As an example, the tube furnace temperature control system further includes temperature-compensating line 15, the temperature element 12 via
Temperature-compensating line 15 is electrically connected with the temperature controller 14.Specifically, the temperature element 12 needs to mend by positive negative temperature
It repays line to be electrically connected with the temperature controller 14, i.e., the described temperature-compensating line 15 includes that positive temperature-compensating line and negative temperature compensate
Line.
As an example, the tube furnace temperature control system further include: first group of metal connecting column 17, first group of gold
Belong to connecting column 17 between the temperature controller 14 and the temperature element 12；First group of metal connecting column, 17 one end
It is electrically connected via the temperature-compensating line 15 with the temperature element 12, the other end is via the temperature-compensating line 15 and the temperature
Controller 14 is spent to be electrically connected；Second group of metal connecting column 18, second group of metal connecting column 18 are located at the heating element 11
Between the transformer 13；Second group of metal connecting column, 18 one end is electrically connected via metal wire 16 and the heating element 11
It connects, the other end is electrically connected via metal wire 16 with the transformer 13.
It should be noted that the quantity of first group of metal connecting column 17 is two, positive temperature-compensating line and negative temperature
Compensating line is electrically connected from different first group of metal connecting columns respectively.
It should be further noted that the quantity of the metal wire 16 is two, it is divided into positive metal contact wires and negative sense
The heating element 11 is electrically connected by metal contact wires with the positive electrode and negative electrode of the transformer 13；Second group of metal
The quantity of connecting column 18 is similarly two, the forward direction metal contact wires and the negative sense metal contact wires respectively from different institutes
Second group of metal connecting column 18 is stated to be electrically connected.
Embodiment two
Please refer to figs. 2 and 3, and the present embodiment also provides a kind of tube furnace, and the tube furnace includes: quartz ampoule 10, described
Quartz ampoule 10 includes opposite first end and second end；The tube furnace temperature control system as described in embodiment one, the pipe
The heating element 11 and the temperature element 12 in formula furnace temperature control system are respectively positioned in the quartz ampoule 10.The pipe
The specific structure of formula furnace temperature control system please refers to embodiment one, is not repeated herein.
As an example, incorporated by reference to Fig. 2 refering to Fig. 3, the tube furnace further include: first end cover component 19, the first end
Face component 19 is fixed on the first end of the quartz ampoule 10；The first end cover component 19 is equipped with installation through-hole (not shown),
The heating element 11 is logical via the installation with the transformer 13, the temperature element 12 and the temperature controller 14
Hole electrical connection；Second end cover component 20, the second end face component 20 are fixed on the second end of the quartz ampoule 10.Described first
End face component 19 and the second end face component 20 are for blocking sealing for the first end of the quartz ampoule 10 and second end respectively.
As an example, the first end cover component 19 includes: the first pressure ring 191, first pressure ring 191 is fixed on close
On the outer wall of 10 first end of quartz ampoule；First pressure ring 191 can be movably connected on the outer wall of the quartz ampoule 10,
It can also be fixed on the outer wall of the quartz ampoule 10 by modes such as welding；First flange disk 192, the first flange disk
192 detain the open outer side as 10 first end of quartz ampoule, and are fixed on first pressure ring 191, the installation through-hole
On the first flange disk 192；Screw hole, institute can be respectively mounted on the first flange disk 192 and first pressure ring 191
First flange disk 192 is stated to be fixed on first pressure ring 191 via screw；The installation through-hole is located at the first flange disk
On 192.
Lead to specifically, first group of metal connecting column 17 and second group of metal connecting column 18 are inserted into the installation
In hole, while first group of metal connecting column 17 and second group of metal connecting column 18 and the first flange disk 192 it
Between by ceramic pipe insulation and seal.
As an example, the first end cover component 19 further includes the first sealing ring 193, first sealing ring 193 is located at
Between first pressure ring 191 and the first flange disk 192.First sealing ring 193 can be but be not limited only to O-shaped close
Seal.The first flange disk 192 is fixed on first pressure ring 191, and the first flange disk 192, which squeezes, compresses described the
One sealing ring 193 makes the deformation of the first sealing ring 193 to seal the quartz ampoule 10.
As an example, the second end cover component 20 includes: the second pressure ring (not shown), second pressure ring, which is fixed on, to be leaned on
On the outer wall of nearly 10 second end of quartz ampoule；The specific knot of the specific structure of second pressure ring and first pressure ring 191
Structure is identical, referring specifically to the description of first pressure ring 191；Second flange disk (not shown), the second flange disk buckle to
In the open outer side of 10 second end of quartz ampoule, and it is fixed on second pressure ring；The second flange disk is compared to institute
The difference for stating first flange disk 192 is: it is provided with installation through-hole on the first flange disk 192, and the second flange disk
On be not provided with installation through-hole, both other structures and mounting means are all the same.
As an example, the second end cover component 20 further includes the second sealing ring (not shown), second sealing ring position
Between second pressure ring and the second flange disk.Second sealing ring is identical as first sealing ring 193, specifically
The description as described in first sealing ring 193 is please referred to, is not repeated herein.
As an example, being additionally provided with air inlet 194 on the first flange disk 192；The row of being additionally provided on the second flange disk
Port 201.
As an example, the tube furnace includes the first warm area 21 and the second warm area 22, the quartz ampoule 20 is square along its length
To through first warm area 21 and second warm 22nd area；Wherein, the heating element 11 and the equal position of the temperature element 12
In in first warm area 21.
As an example, the tube furnace further includes electrothermal resistance silk 23, the electrothermal resistance silk 23 is located at second warm area 22
It is interior, and along the quartz ampoule 10 circumferentially around in the outside of the quartz ampoule 10.The electrothermal resistance silk 23 can be used for institute
The second warm area 22 is stated to be heated.
As an example, the tube furnace further includes tubular type furnace main body 24；The quartz ampoule 10 runs through institute along its length
Tubular type furnace main body 24 is stated, and the first end of the quartz ampoule 10 and second end are located at opposite two of the tubular type furnace main body 24
Side；The electrothermal resistance silk 23 is located in the tubular type furnace main body 24.
As an example, first warm area 21 can be located in the tubular type furnace main body 24, the tubular type can also be located at
Outside furnace main body 24, it is preferable that in the present embodiment, first warm area 21 is located at except the tubular type furnace main body 24, to ensure
The quartz ampoule 10 for stating the first warm area 21 is exposed to except the tubular type furnace main body 24, and user can by the quartz ampoule 10
Home position observation is carried out with the heating process easily to the sample for being located at first warm area 21.
As an example, by adjusting the position of the heating element 11 and the temperature element 12 adjustable described first
Warm area 21, can when the temperature difference of first warm area 21 and second warm area 22 is larger at a distance from second warm area 22
To be effectively prevented from first warm area 21 to the temperature controlled influence of second warm area 22.
In conclusion the present invention provides a kind of tube furnace temperature control system and tube furnace, the tubular type furnace temperature control
The temperature that system is suitable for tube furnace controls, and the tube furnace includes quartz ampoule；The tube furnace temperature control system includes: heating
Element is located in the quartz ampoule；The upper surface of the heating element be equipped with sample deposition domain, the heating element be suitable for pair
The sample on surface placed thereon is heated；Temperature element is located in the quartz ampoule, and is located at the upper of the heating element
Side；The temperature element is suitable for carrying out real-time monitoring to the temperature of sample during heating；Transformer is located at the quartz ampoule
Outside, it is electrically connected with the heating element；The transformer is suitable for the heating element and provides voltage, and by adjusting offer
The heating rate of voltage adjusting heating element；Temperature controller is located at outside the quartz ampoule, with the temperature element and the change
Depressor electrical connection；The sample temperature that the temperature controller is suitable for detecting according to the temperature element carries out the transformer anti-
Feedback is adjusted, to realize that the temperature to the sample for being placed in the heating element upper surface carries out real-time monitoring.Tubular type of the invention
Furnace temperature control system by the way that heating element is placed in the quartz ampoule of tube furnace, can be used heating element to sample directly into
Row heating is heated compared to existing external heat radiation, has that temperature control is accurate, heating cooling rate is fast, thermal loss is small, more
The advantages that energy conservation and environmental protection；Temperature element is placed in the quartz ampoule of tube furnace, temperature element abuts sample, can accurately reflect sample
The actual temperature of product；Feedback regulation by temperature controller to transformer, can be realized to the temperature of sample in quartz ampoule into
Row real-time monitoring.
The above-described embodiments merely illustrate the principles and effects of the present invention, and is not intended to limit the present invention.It is any ripe
The personage for knowing this technology all without departing from the spirit and scope of the present invention, carries out modifications and changes to above-described embodiment.Cause
This, institute is complete without departing from the spirit and technical ideas disclosed in the present invention by those of ordinary skill in the art such as
At all equivalent modifications or change, should be covered by the claims of the present invention.
Claims (15)
1. a kind of tube furnace temperature control system, which is characterized in that the tube furnace temperature control system is suitable for the temperature of tube furnace
Degree control, the tube furnace includes quartz ampoule；The tube furnace temperature control system includes:
Heating element is located in the quartz ampoule；The upper surface of the heating element is equipped with sample deposition domain, the heating unit
Part is suitable for heating the sample on surface placed thereon；
Temperature element is located in the quartz ampoule, and is located at the top of the heating element；The temperature element is suitable for heating
Implementation detecting is carried out to the temperature of sample in the process；
Transformer is located at outside the quartz ampoule, is electrically connected with the heating element；The transformer is suitable for the heating element
Voltage is provided, and adjusts the heating rate of heating element by adjusting the voltage provided；
Temperature controller is located at outside the quartz ampoule, is electrically connected with the temperature element and the transformer；The temperature control
The sample temperature that device is suitable for detecting according to the temperature element carries out feedback regulation to the transformer, to realize to being placed in
The temperature for stating the sample of heating element upper surface carries out real-time monitoring.
2. tube furnace temperature control system according to claim 1, it is characterised in that: the heating element includes that ceramics add
One of hot plate, mica heating plate, sheet metal heating, graphite heating plate or carbon fiber heating plate or at least two combination.
3. tube furnace temperature control system according to claim 1, it is characterised in that: the temperature element includes thermoelectricity
Even, infrared radiation thermometer or thermistor.
4. tube furnace temperature control system according to claim 1, it is characterised in that: the tube furnace temperature control system
It further include temperature-compensating line, the temperature element is electrically connected via temperature-compensating line with the temperature controller.
5. tube furnace temperature control system according to claim 4, it is characterised in that: the tube furnace temperature control system
Further include:
First group of metal connecting column, between the temperature controller and the temperature element；First group of metal connection
Column one end is electrically connected via the temperature-compensating line with the temperature element, and the other end is via the temperature-compensating line and the temperature
Spend controller electrical connection；
Second group of metal connecting column, between the heating element and the transformer；Second group of metal connecting column one
End is electrically connected via metal wire with the heating element, and the other end is electrically connected via metal wire with the transformer.
6. a kind of tube furnace, which is characterized in that the tube furnace includes:
Quartz ampoule, the quartz ampoule include opposite first end and second end；
Tube furnace temperature control system as described in any one of claims 1 to 5, in the tube furnace temperature control system
The heating element and the temperature element are respectively positioned in the quartz ampoule；
The tube furnace include the first warm area and the second warm area, the quartz ampoule run through along its length first warm area and
Second warm area, first warm area are located at except the tubular type furnace main body of the tube furnace, so that user passes through the stone
English pipe carries out home position observation to the heating process for the sample for being located at first warm area.
7. tube furnace according to claim 6, it is characterised in that: the tube furnace further include:
First end cover component is fixed on the first end of the quartz ampoule；The first end cover component is equipped with installation through-hole, described
Heating element is electrically connected via the installation through-hole with the transformer, the temperature element with the temperature controller；
Second end cover component is fixed on the second end of the quartz ampoule.
8. tube furnace according to claim 7, it is characterised in that: the first end cover component includes:
First pressure ring is fixed on the outer wall of the quartz ampoule first end；
First flange disk is detained the open outer side as the quartz ampoule first end, and is fixed on first pressure ring；The peace
Dress through-hole is located on the first flange disk.
9. tube furnace according to claim 8, it is characterised in that: the first end cover component further includes the first sealing ring,
First sealing ring is between first pressure ring and the first flange disk.
10. tube furnace according to claim 9, it is characterised in that: the second end cover component includes:
Second pressure ring is fixed on the outer wall of the quartz ampoule second end；
Second flange disk is detained the open outer side as the quartz ampoule second end, and is fixed on second pressure ring.
11. tube furnace according to claim 10, it is characterised in that: the second end cover component further includes the second sealing
Circle, second sealing ring is between second pressure ring and the second flange disk.
12. tube furnace according to claim 10, it is characterised in that: be additionally provided with air inlet on the first flange disk；Institute
It states and is additionally provided with exhaust outlet on second flange disk.
13. the tube furnace according to any one of claim 6 to 12, it is characterised in that: the heating element and the survey
Warm element is respectively positioned in first warm area.
14. tube furnace according to claim 6, it is characterised in that: the tube furnace further includes electrothermal resistance silk, the electric heating
Resistance silk is located in second warm area, and along the quartz ampoule circumferentially around in the outside of the quartz ampoule.
15. tube furnace according to claim 14, it is characterised in that: the tube furnace further includes tubular type furnace main body；It is described
Quartz ampoule runs through the tubular type furnace main body along its length, and the first end of the quartz ampoule and second end be located at it is described
The opposite two sides of tubular type furnace main body；The electrothermal resistance silk is located in the tubular type furnace main body.
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| CN107062903B true CN107062903B (en) | 2019-09-06 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110736346A (en) * | 2019-10-24 | 2020-01-31 | 江苏能华微电子科技发展有限公司 | diffusion furnace structure |
| CN113124684B (en) * | 2021-04-15 | 2022-09-16 | 内蒙古恒科新材料科技有限公司 | Graphite furnace power transmission system for producing graphite cathode material |
| CN114107942B (en) * | 2021-11-30 | 2022-12-20 | 电子科技大学 | Device and method for preparing graphene film heated in pipe |
| CN115494339A (en) * | 2022-11-15 | 2022-12-20 | 陕西华秦科技实业股份有限公司 | High-precision atmosphere controllable temperature-changing electrical testing system |
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Effective date of registration: 20221025 Address after: 201203 Pudong New Area, Shanghai, China (Shanghai) free trade trial area, 887 Lane 73, Chong Chong Road. Patentee after: PYLON TECHNOLOGIES Co.,Ltd. Address before: 201210 No. 99, Hai Ke Road, Pudong New Area, Pudong New Area, Shanghai. Patentee before: SHANGHAI ADVANCED Research Institute CHINESE ACADEMY OF SCIENCES |