CN209456565U - A kind of vacuum chamber bleeding point heating device - Google Patents
A kind of vacuum chamber bleeding point heating device Download PDFInfo
- Publication number
- CN209456565U CN209456565U CN201822106715.1U CN201822106715U CN209456565U CN 209456565 U CN209456565 U CN 209456565U CN 201822106715 U CN201822106715 U CN 201822106715U CN 209456565 U CN209456565 U CN 209456565U
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- heater strip
- bleeding point
- even heat
- heat plate
- vacuum chamber
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Abstract
The utility model discloses a kind of vacuum chamber bleeding point heating devices, including the even heat plate at bleeding point is arranged in vacuum chamber, even heat plate is equipped with and the consistent opening of bleeding point, heater strip is installed in the underrun heater strip fixed plate of even heat plate, the S-type sinuous shape of heater strip is evenly distributed on even heat plate bottom surface, heater strip both ends are cold end, and cold end passes through vacuum tank body wall by static seal and connect with electrode is introduced.The heating device of the utility model heats bleeding point in the indoor heater strip of vacuum and even heat plate by setting; heating effect is good, high-efficient; easy to use, even heat plate can ensure that the temperature uniformity in bleeding point region also can be very good protection heater strip in order to avoid substrate fragment causes to damage to heater strip.
Description
Technical field
The utility model relates to technical field of vacuum plating, specially a kind of vacuum chamber bleeding point heating device.
Background technique
Vacuum chamber bleeding point position (vacuum chamber and vacuum line junction) is passed in and out in continuous coating apparatus for production line,
Due to the regular circulation change under the vacuum and atmosphere, cause regular at the position gas condensation phenomenon occur and cause very
Empty exhaust capacity decline causes productive temp to extend to influence the vacuum chamber vacuum degree.Traditional settling mode is even
The vacuum line connect is externally wrapped with one or more layers heating tape and solves condensation phenomenon in the position by heating.Due to traditional approach
It is to be under atmospheric environment, heat caused by heating tape can be taken away by outside air, so that the heat drop of incoming evacuated interior
It is low, and it is comparatively laborious when each maintenance must all to remove device.
Summary of the invention
For above-mentioned problems of the prior art, it is good, easy to use that the utility model provides a kind of heating effect
Vacuum chamber bleeding point heating device.
The technical solution adopted in the utility model is as follows: a kind of vacuum chamber bleeding point heating device, including is arranged true
Even heat plate in empty van body at bleeding point, even heat plate be equipped with the consistent opening of bleeding point, add in the underrun of even heat plate
Heated filament fixed plate is equipped with heater strip, and the S-type sinuous shape of heater strip is evenly distributed on even heat plate bottom surface, heater strip two
End is cold end, and cold end passes through vacuum tank body wall by static seal and connect with electrode is introduced.
Further, the heater strip is armouring heater strip.
Further, thermocouple is additionally provided at even heat plate.
The heating device of the utility model heats bleeding point in the indoor heater strip of vacuum and even heat plate by setting, adds
Thermal effect is good, high-efficient, easy to use, and even heat plate can ensure that the temperature uniformity in bleeding point region also can be very good protection and add
Heated filament is in order to avoid substrate fragment causes to damage to heater strip；Heater strip uses armouring heater strip, safety, long service life；Heater strip
Electrode feedthrough is designed using cold end, is connect by static seal with vacuum chamber, it is ensured that vacuum degree in vacuum chamber is unaffected；Heat
Galvanic couple energy real-time monitoring and control heating temperature.
Detailed description of the invention
Fig. 1 is the overall structure diagram of the utility model.
Fig. 2 is the heating part structural schematic diagram of the utility model.
Specific embodiment
For the ease of understanding the utility model, below in conjunction with Figure of description and preferred embodiment to the utility model
Work more comprehensively, meticulously describes, but the protection scope of the utility model is not limited to embodiment in detail below.
As shown in Figure 1 and Figure 2, a kind of vacuum chamber bleeding point heating device of the utility model, including be arranged in vacuum
Even heat plate 2 in cabinet 1 at bleeding point, even heat plate 2 be equipped with the consistent opening of bleeding point, in the underrun of even heat plate 2
Heater strip fixed plate 3 is equipped with heater strip 4, and heater strip 4 is armouring heater strip, and the S-type sinuous shape of heater strip 4 is uniform
It is distributed in 2 bottom surface of even heat plate, 4 both ends of heater strip are cold end, and cold end passes through vacuum tank body wall by static seal 5 and introduces electrode 6
Connection.Thermocouple is additionally provided at even heat plate.
The heating device of the utility model heats bleeding point in the indoor heater strip of vacuum and even heat plate by setting, adds
Thermal effect is good, high-efficient, easy to use, and even heat plate can ensure that the temperature uniformity in bleeding point region also can be very good protection and add
Heated filament is in order to avoid substrate fragment causes to damage to heater strip；Heater strip uses armouring heater strip, safety, long service life；Heater strip
Electrode feedthrough is designed using cold end, is connect by static seal with vacuum chamber, it is ensured that vacuum degree in vacuum chamber is unaffected；Heat
Galvanic couple energy real-time monitoring and control heating temperature.
With the help of the introduction present in aforementioned specification and relevant drawings, the technology people of the utility model fields
Member will be appreciated that many modifications and other embodiments of the utility model.It will consequently be understood that the utility model is not limited to
Disclosed specific embodiment, modification and other embodiments are to be considered as included in scope of the appended claims.Although this
Specific term is used in text, they are only used with generic and descriptive sense, rather than limitation.
Claims (3)
1. a kind of vacuum chamber bleeding point heating device, it is characterised in that: even at bleeding point including being arranged in vacuum chamber
Hot plate, even heat plate be equipped with the consistent opening of bleeding point, heating is installed in the underrun heater strip fixed plate of even heat plate
Silk, the S-type sinuous shape of heater strip are evenly distributed on even heat plate bottom surface, and heater strip both ends are cold end, and cold end passes through quiet
Hermetically passing vacuum tank body wall is connect with electrode is introduced.
2. a kind of vacuum chamber bleeding point heating device as described in claim 1, it is characterised in that: the heater strip is armouring
Heater strip.
3. a kind of vacuum chamber bleeding point heating device as described in claim 1, it is characterised in that: be additionally provided at even heat plate
Thermocouple.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822106715.1U CN209456565U (en) | 2018-12-15 | 2018-12-15 | A kind of vacuum chamber bleeding point heating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822106715.1U CN209456565U (en) | 2018-12-15 | 2018-12-15 | A kind of vacuum chamber bleeding point heating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209456565U true CN209456565U (en) | 2019-10-01 |
Family
ID=68040793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822106715.1U Active CN209456565U (en) | 2018-12-15 | 2018-12-15 | A kind of vacuum chamber bleeding point heating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209456565U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112973524A (en) * | 2019-12-02 | 2021-06-18 | 西安新三力汽车零部件有限公司 | Dispersion devices that graphite alkene used |
-
2018
- 2018-12-15 CN CN201822106715.1U patent/CN209456565U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112973524A (en) * | 2019-12-02 | 2021-06-18 | 西安新三力汽车零部件有限公司 | Dispersion devices that graphite alkene used |
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