CN207365687U - ITO target sintering furnace - Google Patents
ITO target sintering furnace Download PDFInfo
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- CN207365687U CN207365687U CN201721401273.2U CN201721401273U CN207365687U CN 207365687 U CN207365687 U CN 207365687U CN 201721401273 U CN201721401273 U CN 201721401273U CN 207365687 U CN207365687 U CN 207365687U
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- oxygen
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- ito target
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Abstract
The utility model discloses a kind of ITO target sintering furnace, including grate, furnace body is provided with the upper bracket of grate, insulating layer is provided with furnace body；It is provided with positioning guide rail on the lower carriage of grate, the crane for placing ITO target base substrate to be sintered is provided with the grate between positioning guide rail；Atmosphere control system, heating control system and master controller are additionally provided with the furnace body；Water-cooling jacket is additionally provided between the furnace body and insulating layer, the water-cooling control system that control water-cooling jacket carries out cooling operations, the output terminal of the controlled end connection master controller of the water-cooling control system are provided with furnace body.The utility model can be such that the temperature in burner hearth rapidly rises or falls, and then realize the purpose for rapidly and accurately adjusting temperature rate, crystal grain of the ITO target in sintering process, hole, consistency is reached optimum state, substantially increase the sintering quality of ITO target.
Description
Technical field
ITO target production technical field is the utility model is related to, particularly a kind of ITO target sintering furnace.
Background technology
With developing rapidly for science and technology, electronics industry occupies huge share in the market, many in electronics industry market
Electronic product has all used flat-panel screens, such as flat-panel screens, LCD computer, LCD TV etc..ITO target is three oxygen
Change the mixture of two indiums and stannic oxide, be important source material prepared by ito thin film, ITO target has higher heat-resisting punching because of it
Performance, thermal conductivity and mechanical strength are hit, and resistivity is relatively low, additionally it is possible to improve the service life of electronic product, therefore conduct
Main material is applied to the manufacture of flat liquid crystal display, there is wide and important answer in terms of electronics industry, information industry
With.Need to produce electronic product through material based on oversintering ability after ITO target body preparation shaping.
Chinese patent CN104296529B discloses a kind of atmosphere clock hood type furnace available for ITO target sintering, for sintering
ITO target base substrate；Including furnace body, grate, cooling system, control climate regulating system and temperature control system, cooling system bag
Include centrifugal blower, air filter and cooling duct road.The atmosphere clock hood type furnace due to using gas cooling mode, exist with
Lower defect：1）Cooling gas is directly entered burner hearth and is cooled down, due to containing oxygen in cooling gas, the atmosphere in burner hearth
It can not accurately be adjusted, certain influence is produced to the sintering quality of ITO target；2）Cooling gas is directly entered meeting after burner hearth
The gas of control climate regulating system output with providing oxygen produces turbulent flow, influences the sintering quality of ITO target；3）Cooling speed
Degree is slower, extends the sintering period, not only causes the waste of human and material resources, financial resources, it is often more important that have impact on ITO target
Sintering quality.
Utility model content
The utility model technical issues that need to address there is provided a kind of sintering furnace for ITO target sintering, can
The temperature of sintering furnace is accurately and fast adjusted, reliable guarantee is provided to improve the sintering quality of ITO target.
In order to solve the above technical problems, technical solution adopted in the utility model is as follows.
ITO target sintering furnace, including the grate being made of lower carriage and upper bracket, are provided with stove on the upper bracket of grate
Body, is provided with insulating layer in furnace body；It is provided with positioning guide rail on the lower carriage of grate, is provided with the grate between positioning guide rail
Moved up and down on positioning guide rail, the crane for placing ITO target base substrate to be sintered；It is additionally provided with the furnace body to stove
The atmosphere control system of oxygen is passed through in thorax, for controlling in burner hearth the heating control system of heating-up temperature and for controlling gas
The master controller of atmosphere control system and heating control system coordinative operation；Water cooling folder is additionally provided between the furnace body and insulating layer
Set, is provided with the water-cooling control system that control water-cooling jacket carries out cooling operations on furnace body, the water-cooling control system it is controlled
The output terminal of end connection master controller.
Above-mentioned ITO target sintering furnace, the water-cooling control system include cooling water source, connection cooling water source and water-cooling jacket
The water inlet pipe of bottom, the outlet pipe for being arranged on water-cooling jacket top and the water-cooling controller being arranged on water inlet pipe, the water
The output terminal of the controlled end connection master controller of cold control.
Above-mentioned ITO target sintering furnace, the heating control system include power supply, fire box temperature controller, phase-shift control device,
Isolated buck transformer, heat Si-Mo rod and the thermocouple being arranged at the top of furnace body, and the output terminal of the power supply is sequentially connected
Phase-shift control device, isolated buck transformer and heating Si-Mo rod, the controlled end connection fire box temperature controller of phase-shift control device
Output terminal；The output terminal of the input terminal connection thermocouple of the master controller, the output terminal connection fire box temperature control of master controller
The controlled end of device processed.
Above-mentioned ITO target sintering furnace, the heating Si-Mo rod are provided with more, and more heating Si-Mo rods are in burner hearth annular
It is arranged on the side of ITO target to be sintered.
Above-mentioned ITO target sintering furnace, the atmosphere control system include source of oxygen, oxygen flux control device, oxygen heating
Device, oxygen temperature controller, the digital pressure gauge being arranged on furnace body and towards the oxygen ascending pipe of burner hearth and to outside furnace body
The exhaust pipe of exhaust；The output terminal of the source of oxygen is sequentially connected oxygen flux control device and oxygen heater, oxygen by pipeline
The output terminal of the controlled end connection oxygen temperature controller of hot-air heater；The output terminal connection master controller of the digital pressure gauge
Input terminal, the controlled end of the output terminal of master controller respectively with oxygen temperature controller and oxygen flux control device is connected.
Above-mentioned ITO target sintering furnace, oxygen distributor, oxygen distribution are provided with the output channel of the oxygen heater
Device is provided with multiple output ports, and every output port connects an oxygen ascending pipe, the output of all oxygen ascending pipes respectively
Hold the side of even cloth ITO target to be sintered in burner hearth.
Above-mentioned ITO target sintering furnace, the furnace body are the double-deck knot made of 304 food and medicine level stainless steel materials
Structure.
As a result of above technical scheme, technological progress acquired by the utility model is as follows.
The setting of the utility model water-cooling jacket and water-cooling control system, can make the temperature in burner hearth rapidly rise or
Decline, and then realize the purpose for rapidly and accurately adjusting temperature rate, make crystal grain of the ITO target in sintering process, hole
Gap, consistency reach optimum state, substantially increase the sintering quality of ITO target.
Brief description of the drawings
Fig. 1 is the structure diagram of the utility model；
Fig. 2 is the control principle block diagram of the utility model.
Wherein：1. furnace body, 2. water-cooling jackets, 3. insulating layers, 4. digital pressure gauges, 5. flowmeters, 6.ITO target material blank bodies,
7. Si-Mo rod is heated, 8. thermocouples, 9. cranes, 10. positioning guide rails, 11. lower carriages, 12. upper brackets, 13. oxygen ascending pipes,
14. exhaust pipe.
Embodiment
The utility model is further elaborated below in conjunction with specific embodiment.
A kind of ITO target sintering furnace, its structure as shown in Figure 1, the grate including being made of lower carriage 11 and upper bracket 12,
Furnace body 1 is provided with the upper bracket of grate, insulating layer 3 is provided with furnace body 1, water cooling is additionally provided between furnace body 1 and insulating layer 3
Chuck 2；It is provided with positioning guide rail 10 on the lower carriage of grate, is provided with the grate between positioning guide rail on positioning guide rail
Lower movement, the crane 9 for placing ITO target base substrate to be sintered.Atmosphere control system, computer heating control system are provided with furnace body
System, water-cooling control system and master controller, in the composition and system of each system each component connection relation as shown in Fig. 2,
Wherein atmosphere control system is used to be passed through oxygen into burner hearth, adjusts sintering atmosphere；Heating control system is used to control in burner hearth
Heating-up temperature；Water-cooling control system is used to control water-cooling jacket to carry out cooling operations, and master controller is then used to control control climate
System, heating control system and water-cooling control system coordinative operation, so as to provide guarantee to sinter out the ITO target of high quality.
Water-cooling control system includes cooling water source, the water inlet pipe for connecting cooling water source and water-cooling jacket bottom, is arranged on water
The outlet pipe on cold chuck top and the water-cooling controller being arranged on water inlet pipe, the controlled end connection main control of water-cooling controller
The output terminal of device.Master controller controls water-cooling controller to work according to temperature in burner hearth, further water-cooling controller control
The flow of cooling water in water-cooling jacket, so as to control cooling rate, rapidly and precisely adjusts temperature rate, is burning target
Crystal grain, hole, consistency obtain optimum state in knot.
Heating control system includes power supply, fire box temperature controller, phase-shift control device, isolated buck transformer, heating silicon
Molybdenum bar 7 and the thermocouple 8 being arranged at the top of furnace body；The output terminal of power supply is sequentially connected phase-shift control device, isolated buck transformation
Device and heating Si-Mo rod, the output terminal of the controlled end connection fire box temperature controller of phase-shift control device；The input terminal of master controller
Connect the output terminal of thermocouple, the controlled end of the output terminal connection fire box temperature controller of master controller.Master controller is according to warm
Temperature value to export regulating command to phase-shift control device by fire box temperature controller in the burner hearth that galvanic couple measures, and then adjusts and add
The firing rate of hot Si-Mo rod.In the present embodiment, there is provided more heating Si-Mo rods, and more heating Si-Mo rods are in burner hearth annular
The side of ITO target to be sintered is arranged on, to ensure that the temperature in burner hearth is uniform；Pyrometer fire-end among roof of the furnace, and
Cold end ensure that measurement of furnace temperature, the precision of control, avoids measurement error caused by cold junction temperature outside furnace body；Heat silicon molybdenum
Rod avoids pollution of the heating element to target using possessing the high quality silicon molybdenum bar of international most advanced level, and improve operation can
By property, prolong the service life.
Atmosphere control system includes source of oxygen, oxygen flux control device, oxygen heater, oxygen temperature controller, setting
Digital pressure gauge 4 on furnace body and the oxygen ascending pipe 13 towards burner hearth and the exhaust pipe 14 that is vented to outside furnace body；Oxygen
The output terminal in source is sequentially connected oxygen flux control device and oxygen heater, the controlled end connection oxygen of oxygen heater by pipeline
The output terminal of gas temperature controller；The digital pressure gauge output terminal connection master controller input terminal, master controller it is defeated
Controlled end of the outlet respectively with oxygen temperature controller and oxygen flux control device is connected.In the present embodiment, in oxygen heater
Output channel in be provided with oxygen distributor, oxygen distributor is provided with multiple output ports, and every output port connects respectively
Connect an oxygen ascending pipe, the side of the even cloth of output terminal ITO target to be sintered in burner hearth of all oxygen ascending pipes, so that real
The multiple spot injection form of oxygen is showed, ensure that oxygen flow field field uniformly, rationally, effectively increases oxygen and target table in burner hearth
The linear velocity of face contact, makes atmosphere protection more efficient, prevents the missing of oxygen, improves target quality.
For the utility model to ensure the pure and heat insulation effect of environment in burner hearth, furnace body is using 304 food and medicine levels
Stainless steel materials make double-decker, burner hearth inner thermal insulating layer all using high-purity 1800M and 1500M thermal insulation board, can
By ensure that sintering target purity.In addition, the burner hearth furnace roof of the utility model uses splicing construction, more 99 corundum of furnace roof liner
Pipe, avoids the problem of high temperature sintering lower hearth cracks, furnace roof collapses, and extends the service life of sintering furnace.
Claims (7)
1.ITO target sintering furnaces, including by lower carriage（11）And upper bracket（12）The grate of composition, sets up on the upper bracket of grate
There is furnace body（1）, furnace body（1）Inside it is provided with insulating layer（3）；Positioning guide rail is provided with the lower carriage of grate（10）, positioning guide rail
Between grate in be provided with moved up and down on positioning guide rail, the crane for placing ITO target base substrate to be sintered（9）；
The atmosphere control system that oxygen is passed through into burner hearth, the heating for controlling heating-up temperature in burner hearth are additionally provided with the furnace body
Control system and the master controller for controlling atmosphere control system and heating control system coordinative operation；It is characterized in that：
The furnace body（1）And insulating layer（3）Between be additionally provided with water-cooling jacket（2）, be provided with furnace body control water-cooling jacket carry out it is cold
But the water-cooling control system of operation, the output terminal of the controlled end connection master controller of the water-cooling control system.
2. ITO target sintering furnace according to claim 1, it is characterised in that：The water-cooling control system includes cooling water
Source, connection cooling water source and water-cooling jacket bottom water inlet pipe, be arranged on the outlet pipe on water-cooling jacket top and be arranged on into
Water-cooling controller on water pipe, the output terminal of the controlled end connection master controller of the water-cooling controller.
3. ITO target sintering furnace according to claim 1, it is characterised in that：The heating control system includes power supply, stove
Bore temperature controller, phase-shift control device, isolated buck transformer, heating Si-Mo rod（7）And it is arranged on the thermoelectricity at the top of furnace body
It is even（8）, the output terminal of the power supply is sequentially connected phase-shift control device, isolated buck transformer and heating Si-Mo rod, phase-shift control
The output terminal of the controlled end connection fire box temperature controller of device；The output terminal of the input terminal connection thermocouple of the master controller,
The controlled end of the output terminal connection fire box temperature controller of master controller.
4. ITO target sintering furnace according to claim 3, it is characterised in that：The heating Si-Mo rod is provided with more, more
Root heating Si-Mo rod is arranged on the side of ITO target to be sintered in burner hearth annular.
5. ITO target sintering furnace according to claim 1, it is characterised in that：The atmosphere control system include source of oxygen,
Oxygen flux control device, oxygen heater, oxygen temperature controller, the digital pressure gauge being arranged on furnace body（4）And lead to
The oxygen ascending pipe of burner hearth（13）With the exhaust pipe being vented to outside furnace body（14）；The output terminal of the source of oxygen by pipeline successively
Connect oxygen flux control device and oxygen heater, the output terminal of the controlled end connection oxygen temperature controller of oxygen heater；
The input terminal of the output terminal connection master controller of the digital pressure gauge, the output terminal of master controller are controlled with oxygen temperature respectively
Device is connected with the controlled end of oxygen flux control device.
6. ITO target sintering furnace according to claim 5, it is characterised in that：In the output channel of the oxygen heater
Oxygen distributor is provided with, oxygen distributor is provided with multiple output ports, and every output port connects an oxygen note respectively
Enter pipe, the side of the even cloth of output terminal ITO target to be sintered in burner hearth of all oxygen ascending pipes.
7. ITO target sintering furnace according to any one of claims 1 to 6, it is characterised in that：The furnace body is using 304
The double-decker that food and medicine level stainless steel materials make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721401273.2U CN207365687U (en) | 2017-10-27 | 2017-10-27 | ITO target sintering furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721401273.2U CN207365687U (en) | 2017-10-27 | 2017-10-27 | ITO target sintering furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207365687U true CN207365687U (en) | 2018-05-15 |
Family
ID=62421396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721401273.2U Active CN207365687U (en) | 2017-10-27 | 2017-10-27 | ITO target sintering furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207365687U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111609698A (en) * | 2020-06-03 | 2020-09-01 | 福建阿石创新材料股份有限公司 | ITO target blank drying and degreasing device and method |
| CN113294993A (en) * | 2021-05-14 | 2021-08-24 | 苏州伦可新材料技术有限公司 | Normal pressure sintering device |
| CN115893989A (en) * | 2022-12-29 | 2023-04-04 | 芜湖映日科技股份有限公司 | Process method for refining ITO target material micro grain structure and enhancing mechanical strength |
-
2017
- 2017-10-27 CN CN201721401273.2U patent/CN207365687U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111609698A (en) * | 2020-06-03 | 2020-09-01 | 福建阿石创新材料股份有限公司 | ITO target blank drying and degreasing device and method |
| CN113294993A (en) * | 2021-05-14 | 2021-08-24 | 苏州伦可新材料技术有限公司 | Normal pressure sintering device |
| CN115893989A (en) * | 2022-12-29 | 2023-04-04 | 芜湖映日科技股份有限公司 | Process method for refining ITO target material micro grain structure and enhancing mechanical strength |
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