CN105779944A - Linear evaporating source used for preparing CIGS solar battery - Google Patents
Linear evaporating source used for preparing CIGS solar battery Download PDFInfo
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- CN105779944A CN105779944A CN201410816245.1A CN201410816245A CN105779944A CN 105779944 A CN105779944 A CN 105779944A CN 201410816245 A CN201410816245 A CN 201410816245A CN 105779944 A CN105779944 A CN 105779944A
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Abstract
The invention relates to a linear evaporating source used for preparing a CIGS solar battery and belongs to the technical field of solar batteries. The linear evaporating source used for preparing a CIGS solar battery is characterized in that a furnace body resistance wire of the linear evaporating source used for preparing a CIGS solar battery adopts a partitioned heating mode and is separately heated by a bottom heater, a side heating wire and a top heating unit; a heating wire of the bottom heater is coiled in a bottom even wire groove; the side heating wire is evenly arranged in a wiring groove in the outer side of a furnace body; the side heating wire is wrapped by a thermal insulating layer; and the top heating unit is arranged above a lower insulating cover plate, and an upper insulating cover plate is placed on the top heating unit. The linear evaporating source has the advantages that temperature control is accurate, evaporating quantity is stable, the activity of material molecules is improved, the reaction activity of materials is improved, technical flexibility is strong, material deposition effect can be adjusted at random, continuous linear deposition effect is stably obtained during industrial production, and the like.
Description
Technical field
The invention belongs to technical field of solar cells, particularly relate to a kind of linear evaporation source for preparing CIGS solar cell.
Background technology
The many employing single evaporation sources of segmentation of depositional mode being presently used for the linear sources of evaporation coating are multiple point source, to reach to obtain the effect of uniform deposition.Utilize the linear evaporation source that aforesaid way works all can obtain the linear evaporation source that deposition is stable.In thin film deposition preparation process, we require that line is stable, repeatability is strong, controllability is strong, also to have maintenance simultaneously, repair feature easy, adaptable.
1. patent of invention 201210570207.3 (application number) discloses a kind of CIGS coevaporation linear sources device and using method thereof.This linear evaporation source patent has merely related to the arrangement mode of linear sources group, does not relate to the detailed construction in single linear source.And linear sources arranged in parallel is also required to realize process goal on the basis in single linear source of steady-state evaporation amount can obtain.This patent of invention is partial to linear sources using method and non-device more thus.
2. patent of invention 201210551773.X (application number) discloses this patent of layout of a kind of copper indium gallium selenide film battery coevaporation linear sources is the linear deposit effect obtaining different element by changing the arrangement mode of evaporation source, has only carried out the arrangement mode of linear sources theoretically analyzing and determining.Not clear and definite provides a clear and definite concrete structure.And in the technical process of multielement coevaporation, multiple evaporation source is used in conjunction with will certainly producing to influence each other.Above-mentioned patent is only carried out the using method analysis of linear sources from theoretical side, without the technical problem such as concrete structure and enforcement thereof proposing the clear and definite stable linear sources being suitable for industrialization life-time service.
Summary of the invention
The present invention solves that the technical problem existed in known technology provides a kind of linear evaporation source for preparing CIGS solar cell.
It is an object of the invention to provide one and there is temperature control accurately, stable evaporation capacity, improve the activity of material molecule, improve the reactivity of material, technological flexibility is strong, material deposition effect can be adjusted at any time, it is achieved in industrialized production, stably obtain the linear evaporation source for preparing CIGS solar cell of the features such as continuously linear deposition effect.
The innovation point that the present invention takes is embodied in following aspect:
1. resistance wire adopts the mode of partition heating, by the heating interval of same body of heater carrying out detailed control to reach to obtain the purpose of steady-state evaporation amount.
2. adopt the mode in additional cracking source, top, evaporation source exit is carried out high-temperature process, obtain the Se atmosphere that activity is higher, the purpose of intensified response effect.
3. by the mode of heater interpolation external insulation layer and outside water-cooled is reduced influencing each other between high temperature source and cold temperature source.
4. realize the evaporation source adaptability to different evaporation conditionses by the additional nozzle form in change top.
5. the adaptability of evaporation source is realized further by adding source stove turning rack.
The present invention is adopted the technical scheme that for the linear evaporation source preparing CIGS solar cell:
A kind of linear evaporation source for preparing CIGS solar cell, is characterized in: the body of heater resistance wire for preparing the linear evaporation source of CIGS solar cell adopts partition heating mode, is divided into bottom heater, heating side edges silk and top firing unit；The heater strip of bottom heater coils in the wire casing of bottom even, heating side edges silk is distributed in the trough outside body of heater, heating side edges silk outer cladding heat-insulation layer, top heater unit is inserted above lower insulation cover plate, and top heater unit places insulation cover plate.
The present invention can also adopt the following technical scheme that for the linear evaporation source preparing CIGS solar cell
The described linear evaporation source for preparing CIGS solar cell, is characterized in: the impact that the outside mode adopting water-cooled of the heat-insulation layer of heating side edges silk outer cladding reduces between high temperature source and cold temperature source.
The described linear evaporation source for preparing CIGS solar cell, is characterized in: the mode of water-cooled is waterbaffle, is connected with cooling water in waterbaffle.
The described linear evaporation source for preparing CIGS solar cell, is characterized in: the opening mode of the material evaporation mouth of body of heater is the additional nozzle form in top, it is achieved the evaporation source adaptability to various evaporation conditionses.
The described linear evaporation source for preparing CIGS solar cell, is characterized in: body of heater adopts graphite or stainless steel, heating side edges silk adopts armouring nickel chromium triangle heater strip.
The described linear evaporation source for preparing CIGS solar cell, is characterized in: lower insulation cover plate Ceramics material, is connected with the form adopting mechanical seal between body of heater.
The described linear evaporation source for preparing CIGS solar cell, is characterized in: lower insulation cover plate lower protrusion constitutes mechanical seal with the groove on edge on body of heater.
The present invention has the advantage that and has the benefit effect that
The technical scheme that linear evaporation source for preparing CIGS solar cell is brand-new owing to have employed the present invention, compared with prior art, the invention have the characteristics that:
1. body of heater of the present invention adopts partition heating to control, and makes the temperature of evaporation source control more accurate, and evaporation capacity is more stable.Heater strip is distributed in the trough outside body of heater, and external add-in has heat-insulation layer, and heater strip can also be protected to a certain extent by heat-insulation layer while promoting body of heater heats.
2. top of the present invention adopts the top firing parts that graphite material is prepared from, and the temperature of charge in evaporation source exit has been promoted, has improved the activity of material molecule further, improve the reactivity of material.
3. the disconnectable top arrangement of employing activity of the present invention, reaches adjustment material deposition effect at any time, increases the purpose of technological flexibility.
Accompanying drawing explanation
Fig. 1 is entirety of the present invention assembling schematic diagram.
Fig. 2 is body of heater heating side edges line and material holds schematic diagram.Heater strip adopts armouring nickel chromium triangle heater strip, and body of heater adopts graphite or stainless steel, and CD is heating side edges silk lead-in wire.
Fig. 3 is bottom heater heater wire cabling situation.It is heater strip outside lead that heater strip coils AB in the wire casing of bottom even.
Fig. 4 is the state after evaporation source additional thermal insulation.Heat-insulation layer adopt graphite material or other be applicable in chamber to use the insulation material of environment.
Fig. 5 ensures that the impact in Se source is preferably minimized by high temperature source, according to using whether environmental selection installs outside waterbaffle additional.Waterbaffle material selection stainless steel, becomes line mode to adopt the mode of stainless steel materials outside weldings rustless steel pipeline.
Fig. 6 is insulation cover plate under evaporation source.Material selection ceramic material.The form adopting mechanical seal between this parts with body of heater is connected.Cover plate lower protrusion constitutes mechanical seal with the groove on edge on body of heater.
Fig. 7 is the plan structure schematic diagram of insulation cover plate under Fig. 6 evaporation source.
Fig. 8 is evaporation source top heater unit.This unit heater adopts machining graphite molding, or adopts metal resistance to oxidation material.This patent is for graphite.In the edge that top heater unit is embedded under evaporation source insulation cover plate upper surface.
Fig. 9 is insulation cover plate on evaporation source.Material selection ceramic material.
Figure 10 is evaporation source top material evaporation mouth.
Wherein, 1-material evaporation mouth, insulation cover plate on 2-evaporation source, insulation cover plate under 3-evaporation source, 4-top heater unit, 5-bottom heater, 6-body of heater, 7-heat-insulation layer, 8-heating side edges line, 9-material, 10-evaporates source waterbaffle, 11-thermocouple wire.
Detailed description of the invention
For the summary of the invention of the present invention, feature and effect can be further appreciated that, hereby enumerate following example, and it be as follows to coordinate accompanying drawing to describe in detail:
Embodiment 1
Accompanying drawings 1 to Figure 10.
A kind of linear evaporation source for preparing CIGS solar cell, body of heater resistance wire adopts partition heating mode, is divided into bottom heater, heating side edges silk and top firing unit；The heater strip of bottom heater coils in the wire casing of bottom even, heating side edges silk is distributed in the trough outside body of heater, heating side edges silk outer cladding heat-insulation layer, top heater unit is inserted above lower insulation cover plate, and top heater unit places insulation cover plate.
The outside mode adopting water-cooled of the heat-insulation layer of heating side edges silk outer cladding reduces the impact between high temperature source and cold temperature source.The mode of water-cooled is waterbaffle, is connected with cooling water in waterbaffle.
The opening mode of body of heater material evaporation mouth is the additional nozzle form in top, it is achieved the evaporation source adaptability to various evaporation conditionses.Body of heater adopts graphite or stainless steel, and heating side edges silk adopts armouring nickel chromium triangle heater strip.Lower insulation cover plate Ceramics material, lower insulation cover plate lower protrusion constitutes mechanical seal with the groove on edge on body of heater.
The concrete structure of the present embodiment and fabrication and installation process thereof:
Preparing the linear evaporation source of CIGS solar cell, owing to Se gas has a strong oxidizing property, equipment needs to heat under fine vacuum to 300～1500 DEG C again simultaneously, thus this equipment material adopt corrosion-resistant, resistance to oxidation, high temperature resistant and discharge quantity little material.And the ferritic stainless steel of high chrome contents also has the features such as high-temperature oxidation resistance is good, thermal coefficient of expansion is little make it have very strong decay resistance and antioxygenic property because its chrome content height causes while.Device feature adopts rustless steel to prepare, and body of heater 6 may be used without this kind of material.Except rustless steel, high purity graphite is also a kind of little resistance to oxidation of discharge quantity, and resistant to elevated temperatures material material evaporation mouth 1, body of heater 6, top heater unit 4 all can adopt this kind of material to prepare.Bottom heater 5, heating side edges line 8 heater strip adopt armouring nichrome wire heating.Insulation cover plate 2 on evaporation source, under evaporation source, insulation cover plate 3 adopts ceramic material to prepare.Heat-insulation layer 7 adopt graphite material or other be applicable in chamber to use the insulation material of environment.Thermocouple wire 11 temperature of charge selects suitable thermocouple.
As shown in Figure 1, uniform winding heating side edges line 8 outside body of heater 6.Heating side edges line 8 go between CD access external power source controller.Body of heater 6 bottom even fluting complexion cabling as shown in bottom heater 5, heater wire lead-in wire AB.At heater strip outer cladding heat-insulation layer 7.Decide whether to install additional waterbaffle 10 outside evaporation source according to using environment difference.Insulation cover plate under evaporation source 3 is snapped on body of heater 6 in the groove on edge.Top heater unit 4 is inserted under evaporation source above insulation cover plate 3, and puts into the spacing edge of its surrounding.Top heater unit 4 is placed insulation cover plate 2 on evaporation source.Draw-in groove in material evaporation mouth 1 forms mechanical seal with the male cooperation of insulation cover plate 2 on evaporation source.After material evaporation mouth 1 placement, insulation cover plate 2 on evaporation source, insulation cover plate 3 under evaporation source, top heater unit 4, all embed in material evaporation mouth 1.Thermocouple wire 11 is directly sent in material by the perforate of sidewall appropriate location.
The use procedure of the present invention:
Apparatus of the present invention directly can use after being connected to vacuum chamber inside by crunch seal device.In use heater wire and thermocouple wire outside need use resistance to oxidation insulation outsourcing flexible cord (or similar protective measure) to protect, it is prevented that corroded by work atmosphere in life-time service process.
In use can install water collar outside body of heater additional depending on different operating environment or simply install shielding additional.
It should be noted that in use it is noted that heat produced by heater wire is carried out adequate shielding, reduce its impact that thermocouple wire group is normally used with this.
If in use technique needs this product to may also connect to the enterprising enforcement use of direction adjusting apparatus.
Heater wire and thermocouple wire can normally use after being connected to power-supply controller of electric.Through degasification in use procedure, add heat abstraction external insulation layer contents and vaporisable matter.
Except the material evaporation mouth described in this patent, the opening mode of material evaporation mouth can have various ways.If selecting this vaporising device of high-performance heater strip to go for the evaporation of other materials.When evaporation capacity is excessive this evaporation source also can between body of heater 6 and material evaporation mouth 1 reload buffer device, stable to ensure deposition effect after steam is flow to row buffering.The type of buffer unit is not limited only to tabletting or the part flow arrangement with heating.
The present embodiment has described temperature and controls accurately, and stable evaporation capacity improves the activity of material molecule, improve the reactivity of material, technological flexibility is strong, can adjust material deposition effect at any time, it is achieved stably obtain the advantages such as continuously linear deposition effect in industrialized production.
Claims (7)
1. for preparing a linear evaporation source for CIGS solar cell, it is characterized in that: the body of heater resistance wire for preparing the linear evaporation source of CIGS solar cell adopts partition heating mode, is divided into bottom heater, heating side edges silk and top firing unit；The heater strip of bottom heater coils in the wire casing of bottom even, heating side edges silk is distributed in the trough outside body of heater, heating side edges silk outer cladding heat-insulation layer, top heater unit is inserted above lower insulation cover plate, and top heater unit places insulation cover plate.
2. the linear evaporation source for preparing CIGS solar cell according to claim 1, is characterized in that: the impact that the outside mode adopting water-cooled of the heat-insulation layer of heating side edges silk outer cladding reduces between high temperature source and cold temperature source.
3. the linear evaporation source for preparing CIGS solar cell according to claim 2, is characterized in that: the mode of water-cooled is waterbaffle, is connected with cooling water in waterbaffle.
4. the linear evaporation source for preparing CIGS solar cell according to claim 1, is characterized in that: the opening mode of the material evaporation mouth of body of heater is the additional nozzle form in top, it is achieved the evaporation source adaptability to various evaporation conditionses.
5. the linear evaporation source for preparing CIGS solar cell according to claim 1, is characterized in that: body of heater adopts graphite or stainless steel, and heating side edges silk adopts armouring nickel chromium triangle heater strip.
6. the linear evaporation source for preparing CIGS solar cell according to claim 1, is characterized in that: lower insulation cover plate Ceramics material, is connected with the form adopting mechanical seal between body of heater.
7. the linear evaporation source for preparing CIGS solar cell according to claim 6, is characterized in that: lower insulation cover plate lower protrusion constitutes mechanical seal with the groove on edge on body of heater.
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| CN201410816245.1A CN105779944A (en) | 2014-12-23 | 2014-12-23 | Linear evaporating source used for preparing CIGS solar battery |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109957761A (en) * | 2017-12-14 | 2019-07-02 | 湘潭宏大真空技术股份有限公司 | Based on linear evaporator vacuum coating uniset |
| CN109957755A (en) * | 2017-12-14 | 2019-07-02 | 湘潭宏大真空技术股份有限公司 | Optics evaporation in vacuo coating machine |
| CN109957779A (en) * | 2017-12-14 | 2019-07-02 | 湘潭宏大真空技术股份有限公司 | Electrode continous way magnetron sputtering coating single side production line before thin-film solar cells |
| CN112609160A (en) * | 2020-12-29 | 2021-04-06 | 尚越光电科技股份有限公司 | Evaporation source heating structure of CIGS co-evaporation method |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109957761A (en) * | 2017-12-14 | 2019-07-02 | 湘潭宏大真空技术股份有限公司 | Based on linear evaporator vacuum coating uniset |
| CN109957755A (en) * | 2017-12-14 | 2019-07-02 | 湘潭宏大真空技术股份有限公司 | Optics evaporation in vacuo coating machine |
| CN109957779A (en) * | 2017-12-14 | 2019-07-02 | 湘潭宏大真空技术股份有限公司 | Electrode continous way magnetron sputtering coating single side production line before thin-film solar cells |
| CN112609160A (en) * | 2020-12-29 | 2021-04-06 | 尚越光电科技股份有限公司 | Evaporation source heating structure of CIGS co-evaporation method |
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Application publication date: 20160720 |