CN202323016U - Large-scale annular vapor deposition furnace - Google Patents
Large-scale annular vapor deposition furnace Download PDFInfo
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- CN202323016U CN202323016U CN2012201059494U CN201220105949U CN202323016U CN 202323016 U CN202323016 U CN 202323016U CN 2012201059494 U CN2012201059494 U CN 2012201059494U CN 201220105949 U CN201220105949 U CN 201220105949U CN 202323016 U CN202323016 U CN 202323016U
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Abstract
The utility model relates to the technical field of carbon/carbon composite vapor deposition equipment and particularly discloses a large-scale annular vapor deposition furnace. The large-scale annular vapor deposition furnace comprises a furnace body, a furnace cover and a furnace bottom plate, wherein a cylinder-shaped insulating cylinder, an outer heater and an outer deposition cylinder are arranged in the furnace body in sequence from inside to outside. The large-scale annular vapor deposition furnace is characterized in that an inner deposition cylinder is arranged in the outer deposition cylinder; a cylinder-shaped inner heater is arranged in the inner deposition cylinder; an annular furnace chamber is formed between the inner deposition cylinder and the outer deposition cylinder; a furnace chamber cover is arranged at the top of the annular furnace chamber; an annular deposition bottom plate is arranged at the bottom of the annular furnace chamber; a plurality of air inlet pipes are arranged on the furnace bottom plate; an insulating cover is arranged at the top of the insulating cylinder; and the air inlet pipes are uniformly distributed in a circle along the annular deposition bottom plate. Compared with the prior art, the large-scale annular vapor deposition furnace has the advantages that the space of the furnace chamber can be fully utilized, the large-scale annular vapor deposition furnace is adapted to deposition of large-scale annular workpieces and small-sized workpieces, the heating-up time is shorter, the temperature uniformity and the product consistency are better, the manufacturing cost is low, and the maintenance is convenient.
Description
Technical field
The utility model relates to carbon/carbon composite vapor deposition apparatus technical field, relates in particular to a kind of large-sized annular gaseous phase deposition stove.
Background technology
Chemical vapour deposition is called for short CVI (Chemical vapor infiltrtion), is the first-selected process method of making carbon/carbon composite, and it is that the charcoal fiber preform is placed in the special-purpose CVI stove; Be heated to and require temperature; Feed gaseous precursor (hydrocarbon polymer), diffuse to after the decomposing gas and contain in the more macroporous precast body, with carbon laydown around the charcoal fiber and in the hole; Make the precast body densification, finally form carbon/carbon composite.According to temperature and pressure-controlling and gas flow in the CVI technological process, can it be divided into isothermal method, pressure differential method and thermal gradient method etc.Because process method is different, used CVI stove is also incomplete same.Corresponding to above-mentioned three kinds of process methodes three kinds of different deposition type of furnaces are arranged also, i.e. isothermal method CVI stove, pressure differential method CVI stove and thermal gradient method CVI stove.
At present, the carbon/carbon composite production field, above-mentioned three kinds of deposition type of furnaces, its burner hearth pattern basically all is the round shape burner hearth, promptly in body of heater, is provided with a round shape cartridge heater.Like Medium frequency induction CVI stove, charcoal pipe CVI stove, two vacuum C VI stoves etc.Deposition effect is preferably Medium frequency induction CVI stove relatively, but owing to receive the restriction of induction coil processing difficulties, can't satisfy large-scale carbon/carbon composite product needed; Thin material post or many stock columns charcoal pipe CVI stove, its existing size of burner hearth is also less, can only deposit small-sized charcoal/charcoal product; Though two vacuum C VI stoves can satisfy large-scale carbon/carbon composite product needed, because its size of burner hearth is big, the stove TRT is long, and radial temperature difference is also big, and is difficult for fully loaded production, thereby causes the furnace cavity waste, increases the deposition cost.
The utility model content
The utility model provides a kind of large-sized annular gaseous phase deposition stove to the deficiency of prior art, and it can be produced the big products of annular, also can produce the small dimension product, and the burner hearth quick heating, and production cost is low.
The technical scheme that the utility model solves the problems of the technologies described above is following: a kind of large-sized annular gaseous phase deposition stove; Comprise body of heater, bell and drop-bottom, in said body of heater, be provided with round shape heat-preservation cylinder, outer heating element, external sediment tube from outside to inside successively, its characteristics are; Deposition tube in said external sediment tube, also being provided with; Be provided with round shape internal heat generation body in the deposition tube in said, in said, form annular furnace between deposition tube and the external sediment tube, the bottom of said annular furnace is provided with annular deposition base plate; Said drop-bottom is provided with a plurality of inlet pipe, and the top of said heat-preservation cylinder is provided with insulation cover.
Compared with present technology the utility model has following distinguishing feature and effect:
1. different with the large-scale CVI stove of tradition, this equipment is annular furnace, can make full use of furnace cavity, reasonably combined shove charge product; Both can deposit large-sized annular workpiece and miniature workpiece, can a plurality of stock columns be set through being distributed in the inlet pipe of sediment chamber again, produce workpiece such as deposition dish-type in enormous quantities; Like aircraft brake charcoal dish etc., be difficult for causing the furnace cavity waste, reduce the deposition cost, simultaneously owing to be inside and outside heating; TRT is shorter, and temperature homogeneity is better, and homogeneity of product is better; And have the technology suitability strong, can be used for isothermal method differential pressure method CVI technology, cost is cheap relatively, safeguards characteristics such as comparatively convenient.
2. the utility model is specially adapted to the production in enormous quantities of carbon/carbon brake disc.The carbon/carbon brake disc precast body overlays outside stove on the lifting boatswain chair, the inlet pipe center of packing into and being distributed in drop-bottom, and each inlet pipe is furnished with independent air supply plant, can effectively control quality product.
On the basis of technique scheme, the utility model can also be done following improvement.
Further, the top of said annular furnace is provided with the burner hearth lid.
Adopt the beneficial effect of above-mentioned further scheme to be, can make burner hearth form an enclosed space, it is even with internal temperature to help being rapidly heated.
Further, said inlet pipe is uniformly distributed with along said annular deposition base plate ringwise.
Adopt the beneficial effect of above-mentioned further scheme to be, the minimax size of cartridge type product is confirmed body of heater, bell and drop-bottom size and corresponding power supply, vacuum tightness etc. on the estimation, confirms to be uniformly distributed with the quantity of stock column and inlet pipe then.
Further, the inside of said outer heating element and internal heat generation body is respectively equipped with the first outer heating element thermocouple well and internal heat generation body heat galvanic couple pipe, and the said first outer heating element thermocouple well and internal heat generation body heat galvanic couple pipe are fixed on the said bell.
Adopt the beneficial effect of above-mentioned further scheme to be, can insert thermocouple temperature measurement easily, reach temperature purpose in the control stove.
Further, be connected with external power electrode and interior power electrode on said outer heating element and the internal heat generation body respectively, said external power electrode is connected independently mains separately with interior power electrode.
Adopt the beneficial effect of above-mentioned further scheme to be, inside and outside heating element is independent power supply system, does not disturb mutually, guarantees that fire box temperature is even, and the quality product high conformity is convenient to control the batch products quality.
Further, said body of heater, bell and drop-bottom are provided with the water jacket structure.
Adopt the beneficial effect of above-mentioned further scheme to be, adopt water jacket can play good whole furnace insulation effect, improve energy utilization rate.
Further, also be provided with support ring between said annular deposition base plate and the said drop-bottom, said annular deposition base plate and support ring are carbon/carbon composite, are evenly equipped with pore on the said annular deposition base plate.
Adopt the beneficial effect of above-mentioned further scheme to be, support ring can make between said annular deposition base plate and the said drop-bottom and keep certain space, is convenient to the diffuser setting.Gas forms the preheating cavity through diffuser entering annular deposition base plate, deposition backplanes support ring, and gas gets into the sediment chamber through the even pore that deposits on the base plate through annular after the preheating.
Further, said outer heating element and internal heat generation body are processed by graphite material.
Adopt the beneficial effect of above-mentioned further scheme to be, graphite material is to select as the routine of heating element.
Further, also be provided with the second outer heating element thermocouple well on the said body of heater.
Adopt the beneficial effect of above-mentioned further scheme to be, the second outer heating element thermocouple well is used to detect the temperature between outer heating element and the external sediment tube.
Description of drawings
Fig. 1 is the annular gaseous phase deposition stove structural representation of the utility model;
Fig. 2 is the A-A sectional view of Fig. 1;
Fig. 3 loads in mixture large tube-like charcoal/charcoal product for the utility model and small-sized charcoal/charcoal product time space is arranged synoptic diagram;
Fig. 4 is the A-A sectional view of Fig. 3;
Fig. 5 arranges synoptic diagram for the utility model carbon/carbon brake disc product time space of packing into;
Fig. 6 is the A-A sectional view of Fig. 5.
At Fig. 1 in Fig. 6,1, drop-bottom; 2, body of heater; 3, bell; 4, vacuum interface; 5, internal heat generation body heat galvanic couple pipe; 6, the first outer heating element thermocouple well; 7, insulation cover; 8, heat-preservation cylinder; 9, external sediment tube; 10, interior deposition tube; 11, internal heat generation body; 12, the second outer heating element thermocouple well; 13, outer heating element; 14, annular deposition base plate; 15, support ring; 16, burner hearth lid; 17, heat-preservation cylinder base; 18, external power electrode; 19, inlet pipe; 20, interior power electrode; 21, large tube-like charcoal/charcoal product; 22, small-sized charcoal/charcoal product; 23, carbon/carbon brake disc product.
Embodiment
Below in conjunction with accompanying drawing the principle and the characteristic of the utility model are described, institute gives an actual example and only is used to explain the utility model, is not the scope that is used to limit the utility model.
As depicted in figs. 1 and 2, a kind of large-sized annular gaseous phase deposition stove comprises body of heater 2, bell 3 and drop-bottom 1; In said body of heater 2, be provided with round shape heat-preservation cylinder 8, outer heating element 13, external sediment tube 9 from outside to inside successively; Deposition tube 10 in said external sediment tube 9, also being provided with is provided with round shape internal heat generation body 11 in the said interior deposition tube 10, in said, forms annular furnace between deposition tube 10 and the external sediment tube 9; The top of said annular furnace is provided with burner hearth lid 16; The bottom of said annular furnace is provided with annular deposition base plate 14, and said drop-bottom 1 is provided with a plurality of inlet pipe 19, and the top of said heat-preservation cylinder 8 is provided with insulation cover 7.
Concrete setting also comprises, also is provided with vacuum interface 4 on the said bell 3, so that body of heater 2 is vacuumized.Bottom at said heat-preservation cylinder 8 also is provided with heat-preservation cylinder base 17.
Said inlet pipe 19 is uniformly distributed with along said annular deposition base plate 14 ringwise.
The inside of said outer heating element 13 and internal heat generation body 11 is respectively equipped with the first outer heating element thermocouple well 6 and is fixed on the said bell 3 with internal heat generation body heat galvanic couple pipe 5 with internal heat generation body heat galvanic couple pipe 5, the said first outer heating element thermocouple well 6.
Be connected with external power electrode 18 and interior power electrode 20 respectively on said outer heating element 13 and the internal heat generation body 11, said external power electrode 18 is connected independently mains separately with interior power electrode 20.
Said body of heater 2, bell 3 and drop-bottom 1 are provided with the water jacket structure.
Also be provided with support ring 15 between said annular deposition base plate 14 and the said drop-bottom 1, said annular deposition base plate 14 is a carbon/carbon composite with support ring 15.Be evenly equipped with pore on the said annular deposition base plate 14.
Said outer heating element 13 and internal heat generation body 11 are processed by graphite material.
Also be provided with the second outer heating element thermocouple well 12 on the said body of heater 2.
Like Fig. 3 and shown in Figure 4, for the utility model loads in mixture large tube-like charcoal/charcoal product and small-sized charcoal/charcoal product time space layout synoptic diagram.In this example; Stove annular chamber sediment chamber is φ 1800 * φ 800 * 2000mm, and large tube-like charcoal/charcoal product 21 of the φ 1000-φ 1700 that can pack into is like large-scale thermoscreen; Simultaneously can load in mixture small-sized charcoal/charcoal product 22, like U-shaped heating element, crucible, guide shell, sheet material etc.
Like Fig. 5 and shown in Figure 6, arrange synoptic diagram for the utility model carbon/carbon brake disc product 23 time spaces of packing into, its body of heater size is identical with last example; Can install 7 stock columns; 50 of each stock column dress carbon/carbon brake discs amount to 350 dishes, perhaps each stock column deposition U-shaped heating element, crucible, guide shell etc.
The above is merely the preferred embodiment of the utility model, and is in order to restriction the utility model, not all within the spirit and principle of the utility model, any modification of being done, is equal to replacement, improvement etc., all should be included within the protection domain of the utility model.
Claims (9)
1. large-sized annular gaseous phase deposition stove; Comprise body of heater, bell and drop-bottom, in said body of heater, be provided with round shape heat-preservation cylinder, outer heating element, external sediment tube from outside to inside successively, it is characterized in that; Deposition tube in said external sediment tube, also being provided with; Be provided with round shape internal heat generation body in the deposition tube in said, in said, form annular furnace between deposition tube and the external sediment tube, the bottom of said annular furnace is provided with annular deposition base plate; Said drop-bottom is provided with a plurality of inlet pipe, and the top of said heat-preservation cylinder is provided with insulation cover.
2. large-sized annular gaseous phase deposition stove according to claim 1 is characterized in that, the top of said annular furnace is provided with the burner hearth lid.
3. large-sized annular gaseous phase deposition stove according to claim 1 and 2 is characterized in that, said inlet pipe is uniformly distributed with along said annular deposition base plate ringwise.
4. large-sized annular gaseous phase deposition stove according to claim 1; It is characterized in that; The inside of said outer heating element and internal heat generation body is respectively equipped with the first outer heating element thermocouple well and internal heat generation body heat galvanic couple pipe, and the said first outer heating element thermocouple well and internal heat generation body heat galvanic couple pipe are fixed on the said bell.
5. according to claim 1,2 or 4 described large-sized annular gaseous phase deposition stoves; It is characterized in that; Be connected with external power electrode and interior power electrode on said outer heating element and the internal heat generation body respectively, said external power electrode is connected independently mains separately with interior power electrode.
6. according to claim 1,2 or 4 described large-sized annular gaseous phase deposition stoves, it is characterized in that said body of heater, bell and drop-bottom are provided with the water jacket structure.
7. according to claim 1,2 or 4 described large-sized annular gaseous phase deposition stoves; It is characterized in that; Also be provided with support ring between said annular deposition base plate and the said drop-bottom, said annular deposition base plate and support ring are carbon/carbon composite, are evenly equipped with pore on the said annular deposition base plate.
8. large-sized annular gaseous phase deposition stove according to claim 7 is characterized in that, said outer heating element and internal heat generation body are processed by graphite material.
9. large-sized annular gaseous phase deposition stove according to claim 8 is characterized in that, also is provided with the second outer heating element thermocouple well on the said body of heater.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201059494U CN202323016U (en) | 2012-03-20 | 2012-03-20 | Large-scale annular vapor deposition furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012201059494U CN202323016U (en) | 2012-03-20 | 2012-03-20 | Large-scale annular vapor deposition furnace |
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| CN202323016U true CN202323016U (en) | 2012-07-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2012201059494U Expired - Fee Related CN202323016U (en) | 2012-03-20 | 2012-03-20 | Large-scale annular vapor deposition furnace |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109234704A (en) * | 2018-11-27 | 2019-01-18 | 湖南顶立科技有限公司 | A kind of vapor deposition apparatus |
| WO2023143085A1 (en) * | 2022-01-29 | 2023-08-03 | 隆基绿能科技股份有限公司 | Chemical vapor deposition furnace, chemical vapor deposition system, and furnace loading structure for chemical vapor deposition |
-
2012
- 2012-03-20 CN CN2012201059494U patent/CN202323016U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109234704A (en) * | 2018-11-27 | 2019-01-18 | 湖南顶立科技有限公司 | A kind of vapor deposition apparatus |
| WO2023143085A1 (en) * | 2022-01-29 | 2023-08-03 | 隆基绿能科技股份有限公司 | Chemical vapor deposition furnace, chemical vapor deposition system, and furnace loading structure for chemical vapor deposition |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120711 Termination date: 20150320 |
|
| EXPY | Termination of patent right or utility model |