CN101956047A - Large vacuum annealing furnace - Google Patents
Large vacuum annealing furnace Download PDFInfo
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- CN101956047A CN101956047A CN2010105103523A CN201010510352A CN101956047A CN 101956047 A CN101956047 A CN 101956047A CN 2010105103523 A CN2010105103523 A CN 2010105103523A CN 201010510352 A CN201010510352 A CN 201010510352A CN 101956047 A CN101956047 A CN 101956047A
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Abstract
The invention discloses a large vacuum annealing furnace which is composed of a furnace body, a heating device, a feeding system, a vacuum system, a cooling system and an electric control system, wherein the heating device is arranged in a furnace pipe; the feeding mechanism comprises a feeding trolley, a trailer wagon, a rack and a guide rail along which the rack moves back and forth; the feeding trolley moves back and forth along a steel rail laid in front of a furnace door under the action of a travelling mechanism; the rack travels on the guide rail by a roller row which is composed of a plurality of parallel rollers, and each roller is connected with a roller row frame by a shaft; the vacuum system is used for maintaining the vacuum degree of each annealing stage in the furnace body; the cooling system at least comprises a cooling water system for cooling each group of heaters; the heating device is composed of a plurality of heaters which are mutually and movably connected, and the heaters are installed in the furnace pipe in order; multiple layers of heat shields are arranged between each group of heaters and the inner wall of the furnace pipe; and the a guide rail along which a feeding rack moves back and forth is provided with a group of dismountable sectioned racks which are movably connected.
Description
Technical field
The invention belongs to Equipment for Heating Processing, relate in particular to the large-scale vacuum annealing furnace of rare metals such as a kind of titanium, zirconium.
Background technology
Annealing is that metallic substance or workpiece are heated to certain temperature by processing requirement, through insulation for some time, according to the Reasonable Speed cooling, change a kind of metal heat treatmet technology of metal structure structure and performance (change crystalline-granular texture, thinning microstructure, eliminate stress and softener material) then.Purpose is that metallic substance or workpiece through casting, forging rolling, welding or machining is softening, improves plasticity and toughness, makes its chemical ingredients homogenizing, remove internal residual stress, give full play to metallic substance potential, reach customer requirements, prolong metallic substance work-ing life.
Vacuum annealing is unique processing method that domestic and international aviation is used to remove rare metal alloy hydrogen such as titanium, zirconium, reducing hydrogen richness concentration and to make it to reach security level, thereby guarantee the safe reliability of rare metal alloy structures such as titanium, zirconium at its life period.
For rare metals such as titanium, zirconiums, at high temperature character is active for they, the pollution of the refractory materials that is vulnerable to be in contact with it etc., and easier and carbon, oxygen, nitrogen, hydrogenation are closed, so the heat of these materials is preferably carried out in vacuum environment all the time; So the purpose of vacuum annealing is to reduce oxidation and dehydrogenation simultaneously at annealed, and reduce unrelieved stress.
Determined to require the control of the annealing vacuum tightness of rare metals such as titanium, zirconium to stablize by the performance of rare metals such as titanium, zirconium, workpiece temperature is wanted evenly, and it is clean and tidy that heating environment is wanted, and temperature controlling is wanted accurately, and uniform temperature will be got well.
Development along with sophisticated industries such as Aeronautics and Astronautics, national defence, nuclear powers, rare metal such as titanium, zirconium has obtained widespread use, and the demand of quantity is increased, and joint length also is increased to 10-16M by 3M-6M, even longer, this just needs overlength and jumbo vacuum annealing furnace.
And present vacuum annealing equipment is difficult to satisfy the vacuum annealing of rare metals such as titanium, zirconium.Comparatively Tu Chu defective is:
1, existing domestic the longest be the vacuum annealing furnace of 15 mitron materials, uniform temperature zone is 15M, well heater is a Π font structure, does not seal, working temperature is usually used in 800 ℃, axially, radially maximum temperature difference is ± 10 ℃;
2, feed mechanism mostly is whole bin, is easy to generate moderate finite deformation when being heated, and does not reach the requirement of ideal material level when making the turnover body of heater drive difficulty and charging.And can not adapt to the feeding of irregularly shaped raw material, be stacked, cause the raw material inequality of being heated, can not all reach processing requirement, efficient and quality that influence annealing is greatly produced.
In addition, for overlength of demanding urgently developing and the supporting cooling system follow-up of jumbo vacuum annealing furnace equipment claimed.
Summary of the invention
The purpose of this invention is to provide a kind of large-scale vacuum annealing furnace, its feed mechanism can adapt to the raw material of different size specification and can arbitrarily assemble, and the heating unit temperature homogeneity is good, the complete machine excellent property.
For achieving the above object, the present invention takes following design:
A kind of large-scale vacuum annealing furnace is made up of body of heater, heating unit, feed system, vacuum system, cooling system and electrical control system; Described heating unit places in the flue of body of heater; Described feed mechanism, include feeding chassis, trailer wagon, bin and feed frame along its guide rail of back and forth walking, omnidistance guide rail is made of guide rail that has on the feeding chassis and the intravital track combination of stove, guide rail on the feeding chassis can achieve a butt joint with guide rail in the body of heater, and the feeding chassis rail that the effect lower edge of mechanism is layed in before the fire door of being expert at moves forward and backward; Described bin is arranged on guide rail through roller and is walked, and this roller row be made up of some rollers that are arranged in parallel, and each roller is connected as a single entity by axle and roller framed bent; Described vacuum system is used to keep the vacuum tightness in each stage of annealing in the body of heater; Described cooling system comprises the promising well heater refrigerative cooling water system of respectively organizing at least; Described heating unit is made up of the well heater of some groups of mutual loose joints, and order is installed in the flue, is provided with the several layers thermoscreen between each group well heater and inboard wall of furnace; Described feed frame adopts active the connection along settling one group of dismountable segmentation bin on its guide rail of back and forth walking between each segmentation bin.
Described well heater adopts Cr20Ni80 resistive heating band, and every group of resistive heating tep reel becomes annular mouse cage shape.
Described every group of well heater is separate adjustable warm area, all establishes temperature control and temperature measuring equipment in every district.
Temperature regulating device in described every district is the temperature controller of band communication, and temperature measuring equipment is thermometric thermopair, also is furnished with the vacuumometer of band output control.
Arrange along being placed with roller on its guide rail of back and forth walking at described feed frame, roller row be made up of some rollers that are arranged in parallel, each roller is connected as a single entity by axle and roller framed bent, and the guide rail that the also active bin that connects of described segmentation is welded with below it is placed on roller row and goes up front and back motion freely.
Described each segmentation bin is the frame-type packaging assembly of being made up of some columns and base plate, and wherein, base plate is " well " word mesh shape, and evenly is provided with the structural unit that is used to install column on base plate.
On column, place one deck moved cross beam at least.
Corresponding each adjustable warm area of well heater independently all disposes a cover gas accelerate cooling system, provides the adapter of transfer passage to form by interchanger, magnetic fluid, fast cold blast engine and for fast cold wind.
Advantage of the present invention is:
(1) system design can be satisfied rare metal tubing vacuum annealing process and control requirements such as titanium, zirconium, vacuum and temperature control precision height, and temperature uniformity is good, can satisfy titanium, the harsh requirement of zirconium tubing annealed;
(2) every group of well heater is annular mouse cage shape, and the heating area coverage is big, and property is good symmetrically and evenly; The heater material quick heating can reduce energy consumption, increases the service life, and adopts segmentation independence temperature control, can satisfy various demands of applications;
(3) the feed system connection is simple, easy-to-use, reliable, and the bin distortion is little, and raw material is heated evenly, and can significantly improve annealing production quality;
(4) but utilize the technology of the present invention factory length and the bigger vacuum annealing furnace of capacity, and can guarantee that temperature homogeneity is good, can obtain good recrystallized structure and mechanical property, filled up the domestic blank of overlength, high-capacity vacuum annealing furnace, be of great practical significance for domestic rare metal and titanium production equipment industry development;
(5) the control accuracy height of intelligence instrument distributed control system, dynamic response is fast, can realize annealing furnace vacuum tightness whole process control and stove district temperature high precision and the high uniform temperature control of many warm areas automatically, to improving state of the art, stabilized product quality, cutting down the consumption of energy has remarkable economical and social benefit.
Description of drawings
Fig. 1 is vacuum annealing furnace structural representation of the present invention (master looks left-half).
Fig. 2 is vacuum annealing furnace structural representation of the present invention (master looks right half part).
Fig. 3 is the right view of Fig. 1.
Fig. 4 is a vacuum annealing furnace heating unit structural representation of the present invention.
Fig. 5 is the single heating zone structural representation of vacuum annealing furnace heating unit.
Fig. 6 insulate with porcelain spare structural representation (among Fig. 4 for the present invention
The part enlarged view).
Fig. 7 is among Fig. 4
Part structure for amplifying synoptic diagram.
Fig. 8 a is vacuum annealing furnace feed mechanism structural representation of the present invention (main looking, left part signal).
Fig. 8 b is vacuum annealing furnace feed mechanism structural representation of the present invention (main looking, the signal of right side part).
Fig. 9 is a vacuum annealing furnace feed mechanism structural representation of the present invention (right side is looked).
Figure 10 a is base plate (latticed platform, the left-half) structural representation of vacuum annealing furnace feed mechanism.
Figure 10 b is base plate (latticed platform, the right half part) structural representation of vacuum annealing furnace feed mechanism.
Below in conjunction with drawings and the specific embodiments the present invention is described in further details.
Embodiment
Consult Fig. 1, Fig. 2 and shown in Figure 3, large-scale vacuum annealing furnace of the present invention adopts the horizontal type structure of single chamber, internal heating, is made up of body of heater 1, heating unit 2, feed system 3, vacuum system 4, cooling system 5 and electrical control system.
Described body of heater 1 comprises housing, heating chamber, preceding fire door, back fire door.Body of heater can be the double-deck water-cooling structure of horizontal round shape.Open the door in front and back, the Qianmen charging.Door opening and closing can adopt cylinder push-pull configuration, automatic shutter.Adopt rubber seal between fire door and body of heater flange, reach the high vacuum seal requirement, sealing is stable, reliable.Inflation interface and valve, purging valve, mark temperature interface, leak detection interface etc. also are installed.
Referring to Fig. 4 and Fig. 7, described heating unit is made up of the well heater 1 of many groups of mutual loose joints, and order is installed in the flue, is easy to installation and maintenance and replacing.Be provided with one group of thermoscreen 3 between well heater 1 and flue 2 inwalls, adopt 4-6 layer heat-resistance stainless steel thermoscreen suitable, adopt 5 layers among the embodiment shown in the figure.Under the prerequisite that leaves an amount of thermal elongation leeway, reduce distance between each well heater, to reduce the temperature difference of two district's intersections as far as possible.And adopt segmentation independence temperature control, and every group is separate adjustable warm area, every district is equipped with temperature control and temperature measuring unit, has warm galvanic couple in school and interface, conveniently regulating and controlling.
The heating member of heating unit device 1 adopts Cr20Ni80 resistive heating band, and its resistivity is higher, good processability, hot strength is good, quick heating, energy efficient, with after do not become fragile, long service life has austenite structure, and is nonmagnetic substantially.In addition, every group of resistive heating tep reel becomes annular mouse cage shape (referring to Fig. 2), and the heating area coverage is big, and property is good symmetrically and evenly.When vacuum tightness reaches 1.3 * 10
-2During Pa, resistive heating band 1 is energized heating, makes workpiece reach annealing temperature.Every group of resistive heating tep reel of heating unit of the present invention becomes the axial length of annular mouse cage shape suitable with 15～25 meters, and 20 meters is good.Certainly, its length also can be done the adjustment of any way according to the demand of using.
The burner hearth of horizontal and flue circular concentric is evenly distributed heating member, and flue can guarantee at vertical diameter to thermally equivalents all ± 2 ℃ furnace temperature uniformity coefficient.Simultaneously, because the circular configuration area of dissipation is little, thermosteresis is less, has improved thermo-efficiency, save energy.Flue 2 can two-layerly be made of inside and outside, guarantees that heat resisting temperature is at 1100 ℃.
Described heating unit 1(is the resistive heating band) be fixed on flue 2 inwalls with porcelain spare 5 by insulation, this insulation is adopted high-quality 99% alumina ceramics spare with porcelain spare 5, has anti-depositional texture, guarantees that insulation component can long-term stable operation.
Described anti-depositional texture can be referring to shown in Figure 6, and insulation is fixedlyed connected with resistive heating band 1 by porcelain seat 6 with porcelain spare 5.Be because: under the vacuum environment and the condition of high temperature, the chemical ingredients that volatilizes easily is plated in insulation with on the porcelain spare, causes short circuit, so the porcelain seat 6 of this anti-depositional texture is equivalent to can effectively prevent the generation of short circuit phenomenon for the heating zone has covered a big hat.
Shown in Figure 7 is the structural representation that web plate 7 parts of energising heating are provided for the resistive heating band, thermoscreen and flue are passed in the upper end of this web plate 7, and be communicated with by screw and being bolted on the inboard wall of furnace body and with an end electrode of water cooled electrode, its lower end by screw and be bolted to the mouse cage shape resistive heating band 1 one extreme 12 on, the resistive heating band 1 of mouse cage shape another extreme 11 with another electrode electric connection (referring to Fig. 4, shown in Figure 5) of water cooled electrode 4; Insulation covering 8 is arranged between web plate 7 and thermoscreen and flue.
Be distributed with the thermocouple that a plurality of temperature controls are used in the body of heater of the present invention, control every section heating respectively.And a monitoring thermocouple is arranged, when overtemperature, send guard signal.
Referring to Fig. 8 a, Fig. 8 b and shown in Figure 9, described feed system includes the feeding chassis, the trailer wagon (not shown), bin and feed frame are along its guide rail of back and forth walking, omnidistance guide rail is constituted by guide rail 4 that has on the feeding chassis and the intravital guide rail (not shown) of stove, guide rail on the feeding chassis can achieve a butt joint with guide rail in the body of heater, the feeding chassis rail 6 that the effect lower edge of mechanism is layed in before the fire door of being expert at moves forward and backward, described feeding chassis can be an one-piece construction, also divide the attachment structure form, by one group of split type unit feeding chassis (7 of embodiment shown in the figure, 8,9 and 10) connect and compose.
Improvement of the present invention is: bin is designed to the active mutually connection of plurality of sections and dismountable segmentation bin 1, is placed on the guide rail 4 for its reciprocal walking, and by backgauge post 2 pads.
For make bin operation freely, on guide rail 4, be placed with roller row 5, roller row be made up of many rollers that are arranged in parallel, each roller is connected as a single entity by axle and roller framed bent.The guide rail that the also active bin that connects of described segmentation is welded with below it is placed on roller row and goes up front and back motion freely.
Be prior art for described trailer wagon and travel mechanism, do not give unnecessary details herein.
Vacuum annealing furnace feed mechanism of the present invention is designed to each segmentation bin 1 the frame-type packaging assembly be made up of some columns and base plate, wherein, base plate is " well " word mesh shape, shown in Figure 10 a, Figure 10 b, and on base plate, evenly be provided with the structural unit that is used to install column, the structural unit that this is described to be used to install column can be the open holes of the installation column that evenly is cast with on base plate, can also be other structures that column can be installed.
Whole segmentation bin 1 can arbitrarily be assembled, the layering blowing, can place moved cross beam and integrant material frame on its column, and the form of material frame is that activity can arbitrarily be dismantled, arbitrarily assembling (can select only to adorn one deck or only adorn two layers or the like) as charging, rather than simply be stacked, the being heated evenly property of raw material is good, the product quality height.
Described each segmentation bin is segmented into 15～25 meters formations at length direction, and 20 meters is good, adopts active the connection between every section.
During feed mechanism work, the feeding chassis moves forward, and the guide rail on it docks with the intravital guide rail of stove.After trailer wagon and bin hook was connected, trailer wagon was drawn to the bin in the stove on the guide rail of feeding chassis, and the workpiece on the bin is come out of the stove, and after installing new workpiece on the bin, trailer wagon pushes bin in the stove.The feeding chassis moves backward, and fire door is closed, and carries out heating work.
Described vacuum system, for keeping the higher vacuum that is annealed each stage of anneal of material, vacuum annealing furnace feed mechanism of the present invention is selected many cover diffusion pump units for use, and every cover diffusion pump unit disposes by a pump and the backing system that mechanical pump is formed.Be furnished with the leak detection interface on vacuum pipes at different levels, good seal also is easy to be used for leak detection; Pipe connection uses corrugated stainless steel tubing, prevents the normal operation of vibration influence unit.
The vacuumometer (as the digital vacuumometer of U.S.'s Varian) of band output control is adopted in the vacuum measurement of vacuum annealing furnace apparatus of the present invention, and can assist cold rule and the Pirani gauge of being furnished with corresponding brand to measure the interior high and low vacuum tightness of stove respectively, send vacuumometer to show observed value; Vacuum measurement is answered reasonable Arrangement with regulating, and adopts Pirani gauge to measure fore line pressure; By the PLC machine vacuum system is controlled.
Described cooling system includes cooling water system, comprises water trap, water tank, valve, pipeline and various measuring element, can be conventional cooling water system, also can be designed to report to the police and interlocking to hydraulic pressure, current, water temperature and lack of water.
In order to improve the working efficiency of vacuum annealing furnace apparatus of the present invention, disposed the gas accelerate cooling system.Fast cooling system is made up of parts such as interchanger, magnetic fluid, fast cold blast engine, hose adapter, adapters.When equipment moved to quick refrigerating work procedure, the argon filling air valve was opened, and charges into high-purity argon gas in stove.After furnace inner gas pressure reaches setting point, fan starting in the fast cooling device, hot gas enters heat exchanger, carries out heat exchange, and cooled gas is sent into body of heater through ventilator trunk, cooling workpiece, so cycle operation.In this working process, when furnace pressure was lower than 70KPa, the argon gas valve was just opened automatically, replenished argon gas in stove.
Described electrical control system promptly can adopt conventional control device, also can implement unique automatic control: be made up of some housings, the operation simulation figure of vacuum system and power supply heating system can be arranged on the housing panel.Electrical control system can be with corresponding I/O expansion, communication interface by industrial computer, industrial control configuration software, data collecting card, the temperature controller of band communication, input/output module, PLC(), compositions such as the vacuumometer of band output control, communication interface.Electrical control system also is furnished with each section heating current, temperature and diffusion pump electric current simultaneously and shows.The whole control system all can freely be switched automatically He manually, and operation (control) is furnished with push button commonly used cashier's office in a shop.Calling, move heating schedule can operate from upper computer and main temperature controller respectively.Be attached with operation box at fire door, be convenient to observe and control the turnover of feed mechanism, button and pilot lamp such as this operation box comprises charging, discharging, stop.For electrical control system, can adopt prior art, also can be as required and the new controlled function of Shi Gongjin research and development, it is not as the emphasis of the present patent application, so do not give unnecessary details.
The various embodiments described above can not depart from the scope of the present invention down in addition some variations, thus above explanation comprises and accompanying drawing shown in structure should be considered as exemplary, but not in order to limit the protection domain of the present patent application patent.
Claims (7)
1. a large-scale vacuum annealing furnace is made up of body of heater, heating unit, feed system, vacuum system, cooling system and electrical control system; Described heating unit places in the flue of body of heater; Described feed mechanism, include feeding chassis, trailer wagon, bin and feed frame along its guide rail of back and forth walking, omnidistance guide rail is made of guide rail that has on the feeding chassis and the intravital track combination of stove, guide rail on the feeding chassis can achieve a butt joint with guide rail in the body of heater, and the feeding chassis rail that the effect lower edge of mechanism is layed in before the fire door of being expert at moves forward and backward; Described bin is arranged on guide rail through roller and is walked, and this roller row be made up of some rollers that are arranged in parallel, and each roller is connected as a single entity by axle and roller framed bent; Described vacuum system is used to keep the vacuum tightness in each stage of annealing in the body of heater; Described cooling system comprises the promising well heater refrigerative cooling water system of respectively organizing at least; It is characterized in that:
Described heating unit is made up of the well heater of some groups of mutual loose joints, and order is installed in the flue, is provided with the several layers thermoscreen between each group well heater and inboard wall of furnace;
Described feed frame adopts active the connection along settling one group of dismountable segmentation bin on its guide rail of back and forth walking between each segmentation bin.
2. large-scale vacuum annealing furnace according to claim 1 is characterized in that: described well heater adopts Cr20Ni80 resistive heating band, and every group of resistive heating tep reel becomes annular mouse cage shape.
3. large-scale vacuum annealing furnace according to claim 2 is characterized in that: described every group of well heater is separate adjustable warm area, all establishes temperature control and temperature measuring equipment in every district.
4. large-scale vacuum annealing furnace according to claim 3 is characterized in that: the temperature regulating device in described every district is the temperature controller of band communication, and temperature measuring equipment is thermometric thermopair, also is furnished with the vacuumometer of band output control.
5. large-scale vacuum annealing furnace according to claim 1, it is characterized in that: the frame-type packaging assembly of described each segmentation bin for forming by some columns and base plate, wherein, base plate is " well " word mesh shape, and evenly is provided with the structural unit that is used to install column on base plate.
6. vacuum annealing furnace feed mechanism according to claim 5 is characterized in that: place one deck moved cross beam at least on column.
7. large-scale vacuum annealing furnace according to claim 3, it is characterized in that: corresponding each adjustable warm area of well heater independently, all dispose a cover gas accelerate cooling system, provide the adapter of transfer passage to form by interchanger, magnetic fluid, fast cold blast engine and for fast cold wind.
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| CN201010510352.3A CN101956047B (en) | 2010-10-18 | 2010-10-18 | A kind of large-scale vacuum annealing furnace |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102200393A (en) * | 2011-06-21 | 2011-09-28 | 中国电子科技集团公司第二研究所 | Vacuum heating equipment |
| CN102896186A (en) * | 2011-07-26 | 2013-01-30 | 张家港华裕有色金属材料有限公司 | Method and device for finishing and shaping titanium-titanium alloy U-shaped elbow pipe |
| CN102899472A (en) * | 2011-07-26 | 2013-01-30 | 张家港华裕有色金属材料有限公司 | Titanium and titanium alloy U-shaped bend vacuum heat treatment method and apparatus thereof |
| CN103057108A (en) * | 2011-10-24 | 2013-04-24 | 广州市番禺科腾工业有限公司 | Infrared heating machine |
| CN103394691A (en) * | 2013-07-31 | 2013-11-20 | 湖南顶立科技有限公司 | Method and device for continuously conducting degreasing, sintering, hot forging and/or quenching |
| CN104913601A (en) * | 2014-12-29 | 2015-09-16 | 深圳市信宇人科技有限公司 | Method for baking lithium ion battery or battery pole piece in tunnel mode |
| CN106435136A (en) * | 2016-09-23 | 2017-02-22 | 武汉钢铁股份有限公司 | Sample inlet and outlet device used for box type annealing furnace and using method for sample inlet and outlet device |
| CN106916960A (en) * | 2015-12-28 | 2017-07-04 | 北京有色金属研究总院 | A kind of novel evacuated electron beam furnace |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102200393A (en) * | 2011-06-21 | 2011-09-28 | 中国电子科技集团公司第二研究所 | Vacuum heating equipment |
| CN102896186A (en) * | 2011-07-26 | 2013-01-30 | 张家港华裕有色金属材料有限公司 | Method and device for finishing and shaping titanium-titanium alloy U-shaped elbow pipe |
| CN102899472A (en) * | 2011-07-26 | 2013-01-30 | 张家港华裕有色金属材料有限公司 | Titanium and titanium alloy U-shaped bend vacuum heat treatment method and apparatus thereof |
| CN102896186B (en) * | 2011-07-26 | 2016-05-25 | 张家港华裕有色金属材料有限公司 | Method and the device thereof of the U-shaped bend pipe finishing sizing of titanium or titanium alloy |
| CN103057108A (en) * | 2011-10-24 | 2013-04-24 | 广州市番禺科腾工业有限公司 | Infrared heating machine |
| CN103057108B (en) * | 2011-10-24 | 2015-08-26 | 广州市番禺科腾工业有限公司 | A kind of infrared heater |
| CN103394691A (en) * | 2013-07-31 | 2013-11-20 | 湖南顶立科技有限公司 | Method and device for continuously conducting degreasing, sintering, hot forging and/or quenching |
| CN104913601A (en) * | 2014-12-29 | 2015-09-16 | 深圳市信宇人科技有限公司 | Method for baking lithium ion battery or battery pole piece in tunnel mode |
| CN106916960A (en) * | 2015-12-28 | 2017-07-04 | 北京有色金属研究总院 | A kind of novel evacuated electron beam furnace |
| CN106916960B (en) * | 2015-12-28 | 2019-02-05 | 北京有色金属研究总院 | A kind of vacuum electron beam melting furnace |
| CN106435136A (en) * | 2016-09-23 | 2017-02-22 | 武汉钢铁股份有限公司 | Sample inlet and outlet device used for box type annealing furnace and using method for sample inlet and outlet device |
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