CN107062903A - Tube furnace temperature control system and tube furnace - Google Patents
Tube furnace temperature control system and tube furnace Download PDFInfo
- Publication number
- CN107062903A CN107062903A CN201710411781.7A CN201710411781A CN107062903A CN 107062903 A CN107062903 A CN 107062903A CN 201710411781 A CN201710411781 A CN 201710411781A CN 107062903 A CN107062903 A CN 107062903A
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- CN
- China
- Prior art keywords
- temperature
- tube furnace
- quartz ampoule
- heating element
- control system
- Prior art date
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D11/00—Arrangement of elements for electric heating in or on furnaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D21/00—Arrangements of monitoring devices; Arrangements of safety devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
- F27D2019/0003—Monitoring the temperature or a characteristic of the charge and using it as a controlling value
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
- F27D2019/0028—Regulation
- F27D2019/0034—Regulation through control of a heating quantity such as fuel, oxidant or intensity of current
- F27D2019/0037—Quantity of electric current
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D21/00—Arrangements of monitoring devices; Arrangements of safety devices
- F27D21/0014—Devices for monitoring temperature
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Control Of Resistance Heating (AREA)
- Resistance Heating (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Abstract
The present invention provides a kind of tube furnace temperature control system and tube furnace, and the tube furnace temperature control system includes：Heating element heater, in quartz ampoule, is heated suitable for the sample to surface placed thereon；Temperature element, in quartz ampoule, and positioned at the top of heating element heater；The temperature that temperature element is suitable to sample in heating process is monitored in real time；Transformer, outside quartz ampoule, is electrically connected with heating element heater；Transformer is suitable for heating element heater and provides voltage, and by adjusting the heating rate of the voltage-regulation heating element heater provided；Temperature controller, outside quartz ampoule, is electrically connected with temperature element and transformer.The tube furnace temperature control system of the present invention is by the way that heating element heater is placed in the quartz ampoule of tube furnace, it can use heating element heater is direct to sample to heat, heated compared to existing outside heat radiation, have the advantages that temperature control is accurate, heating cooling rate is fast, thermal loss is small, more energy-conserving and environment-protective.
Description
Technical field
The invention belongs to technical field of temperature control, more particularly to a kind of tube furnace temperature control system and tube furnace.
Background technology
Tube furnace system architecture is simple, and heating is convenient, is widely used in ceramic post sintering, material process, chemical vapor deposition
Experiment, vacuum annealing etc..When different zones need control different temperatures, it will usually the double temperature-area tubular furnaces of selection.It is existing double
Temperature-area tubular furnace heating system typically using electrothermal resistance silk parcel quartz ampoule, is added by way of heat radiation to sample in pipe
Heat, while reflecting that the temperature of sample in pipe reaches temperature adjusting purpose by the temperature of thermocouple measurement quartz ampoule.It is this to add
Hot mode is simple and convenient, but has the disadvantage to be difficult to control to sample and be rapidly heated cooling, it is impossible to accurately reflect the actual temperature of sample.It is former
Because being：Heat radiation mode heating effect is slower in tube furnace, and the reaction time regulated and controled to sample temperature in pipe is longer；And stove
High temperature fiber insulation material in thorax can reduce the rate of temperature fall of sample.In addition, especially when sample in pipe operating temperature compared with
When low, sample actual temperature error is larger in thermocouple measuring temperature and pipe, it is difficult to which the temperature to sample in pipe is accurately adjusted
Control.Two warm areas of double temperature-area tubular furnaces use independent temperature control program, make to form temperature difference in same boiler tube.But, due to
Two warm areas are closer to the distance and irremovable, when two warm area operating temperature differences are larger, high-temperature region heat diffusion to low temperature
Area is so as to influence the temperature control of low-temperature space.
Therefore, existing pair of temperature-area tubular furnace is although easy to operate, heated perimeter is wide, it is adaptable to most of heating rings
Border, but differ larger for sample need to be rapidly heated cooling, the warm area operating temperature of accurate regulating and controlling temperature, especially two
Special occasions, existing pair of temperature-area tubular furnace has been difficult to be competent at.
The content of the invention
The shortcoming of prior art in view of the above, it is an object of the invention to provide a kind of tube furnace temperature control system
And tube furnace, it is rapidly heated cooling for solving the sample that is difficult to control to that tube furnace in the prior art is present, it is impossible to accurately reflect
The problem of actual temperature of sample, and two warm areas that existing pair of temperature-area tubular furnace is present are closer to the distance and irremovable,
When two warm area operating temperature differences are larger, high-temperature region heat diffusion to low-temperature space is so as to influence the temperature controlled of low-temperature space
Problem.
In order to achieve the above objects and other related objects, the present invention provides a kind of tube furnace temperature control system, the pipe
Formula furnace temperature control system is suitable to the temperature control of tube furnace, and the tube furnace includes quartz ampoule；The tube furnace temperature control
System includes：
Heating element heater, in the quartz ampoule；The upper surface of the heating element heater is provided with sample deposition domain, described to add
Thermal element is suitable to heat the sample on surface placed thereon；
Temperature element, in the quartz ampoule, and positioned at the top of the heating element heater；The temperature element is suitable to
The temperature of sample is monitored in real time in heating process；
Transformer, outside the quartz ampoule, is electrically connected with the heating element heater；The transformer is suitable for the heating
Element provides voltage, and by adjusting the heating rate of the voltage-regulation heating element heater provided；
Temperature controller, outside the quartz ampoule, is electrically connected with the temperature element and the transformer；The temperature
The sample temperature that controller is suitable to detect according to the temperature element carries out feedback regulation to the transformer, to realize to placing
Real-time monitoring is carried out in the temperature of the sample of the heating element heater upper surface.
As a kind of preferred scheme of the tube furnace temperature control system of the present invention, the heating element heater includes ceramic heat
Plate, mica heating plate, sheet metal heating, graphite heating plate or one kind in carbon fiber heating plate or at least two combination.
As the present invention tube furnace temperature control system a kind of preferred scheme, the temperature element include thermocouple,
Infrared radiation thermometer or thermistor.
As a kind of preferred scheme of the tube furnace temperature control system of the present invention, the tube furnace temperature control system is also
Including temperature-compensating line, the temperature element is electrically connected via temperature-compensating line with the temperature controller.
As a kind of preferred scheme of the tube furnace temperature control system of the present invention, the tube furnace temperature control system is also
Including：
First group of metal connecting pole, between the temperature controller and the temperature element；First group of metal
Connecting pole one end is electrically connected via the temperature-compensating line with the temperature element, and the other end is via the temperature-compensating line and institute
State temperature controller electrical connection；
Second group of metal connecting pole, between the heating element heater and the transformer；Second group of metal connection
Post one end is electrically connected via metal wire with the heating element heater, and the other end is electrically connected via metal wire with the transformer.
The present invention also provides a kind of with tube furnace, and the tube furnace includes：
Quartz ampoule, the quartz ampoule includes relative first end and the second end；
Institute in tube furnace temperature control system as described in above-mentioned either a program, the tube furnace temperature control system
State heating element heater and the temperature element is respectively positioned in the quartz ampoule.
As a kind of preferred scheme of the tube furnace of the present invention, the tube furnace also includes：
First end-cap assembly, is fixed on the first end of the quartz ampoule；First end-cap assembly is provided with installation through-hole,
The heating element heater is electrically connected with the transformer, the temperature element and the temperature controller via the installation through-hole
Connect；
Second end-cap assembly, is fixed on the second end of the quartz ampoule.
As a kind of preferred scheme of the tube furnace of the present invention, first end-cap assembly includes：
First pressure ring, is fixed on the outer wall of the quartz ampoule first end；
First flange disk, detains the open outer side as the quartz ampoule first end, and be fixed on first pressure ring；Institute
Installation through-hole is stated on the first flange disk.
As a kind of preferred scheme of the tube furnace of the present invention, first end-cap assembly also includes the first sealing ring, institute
The first sealing ring is stated to be located between first pressure ring and the first flange disk.
As a kind of preferred scheme of the tube furnace of the present invention, second end-cap assembly includes：
Second pressure ring, is fixed on the outer wall at the end of quartz ampoule second；
Second flange disk, detains the open outer side as the end of quartz ampoule second, and be fixed on second pressure ring.
As a kind of preferred scheme of the tube furnace of the present invention, second end-cap assembly also includes the second sealing ring, institute
The second sealing ring is stated to be located between second pressure ring and the second flange disk.
As a kind of preferred scheme of the tube furnace of the present invention, air inlet is additionally provided with the first flange disk；Described
Exhaust outlet is additionally provided with two ring flanges.
As a kind of preferred scheme of the tube furnace of the present invention, the tube furnace includes the first warm area and the second warm area, institute
State quartz ampoule and run through first warm area and second warm area along its length；Wherein, the heating element heater and the survey
Warm element is respectively positioned in first warm area.
As a kind of preferred scheme of the tube furnace of the present invention, the tube furnace also includes electrothermal resistance silk, the electrothermal resistance
Silk is located in second warm area, and along the quartz ampoule circumferentially around in the outside of the quartz ampoule.
As a kind of preferred scheme of the tube furnace of the present invention, the tube furnace also includes tubular type furnace main body；The quartz
Pipe runs through the tubular type furnace main body along its length, and the first end of the quartz ampoule and the second end are located at the tubular type respectively
The relative both sides of furnace main body；The electrothermal resistance silk is located in the tubular type furnace main body.
As described above, the tube furnace temperature control system and tube furnace of the present invention, have the advantages that：The present invention's
Tube furnace temperature control system can use heating element heater straight to sample by the way that heating element heater is placed in the quartz ampoule of tube furnace
Capable heating is tapped into, is heated compared to existing outside heat radiation, with temperature control is accurate, heating cooling rate is fast, thermal loss is small,
More energy-conserving and environment-protective the advantages of；Temperature element is placed in the quartz ampoule of tube furnace, temperature element abuts sample, can be accurately anti-
Reflect the actual temperature of sample；Feedback regulation by temperature controller to transformer, can realize the temperature to sample in quartz ampoule
Degree carries out real-time monitoring；Due to devising special flange, heating and temperature element are introduced in the quartz ampoule of tube furnace, simultaneously
It ensure that the air-tightness of whole device, it is possible to achieve the heating in vacuum condition or particular atmosphere needs.
Brief description of the drawings
Fig. 1 is shown as the structural representation of the tube furnace temperature control system provided in the embodiment of the present invention one.
Fig. 2 is shown as the structural representation of the tube furnace provided in the embodiment of the present invention two.
Fig. 3 is shown as the enlarged drawing of the tube furnace first end provided in the embodiment of the present invention two.
Component label instructions
10 quartz ampoules
11 heating element heaters
12 temperature elements
13 transformers
14 temperature controllers
15 temperature-compensating lines
16 metal wires
17 first groups of metal connecting poles
18 second groups of metal connecting poles
19 first end-cap assemblies
191 first pressure rings
192 first flange disks
193 first sealing rings
194 air inlets
20 second end face components
201 exhaust outlets
21 first warm areas
22 second warm areas
23 electrothermal resistances silk
24 tubular type furnace main bodies
Embodiment
Illustrate embodiments of the present invention below by way of specific instantiation, those skilled in the art can be by this specification
Disclosed content understands other advantages and effect of the present invention easily.The present invention can also pass through specific realities different in addition
The mode of applying is embodied or practiced, the various details in this specification can also based on different viewpoints with application, without departing from
Various modifications or alterations are carried out under the spirit of the present invention.
Fig. 1 is referred to Fig. 3.It should be noted that the diagram provided in the present embodiment only illustrates this in a schematic way
The basic conception of invention, though only display is with relevant component in the present invention rather than according to package count during actual implement in diagram
Mesh, shape and size are drawn, and form, quantity and the ratio of each component can be a kind of random change during its actual implementation, and its
Assembly layout form may also be increasingly complex.
Embodiment one
Referring to Fig. 1, the present invention provides a kind of tube furnace temperature control system, the tube furnace temperature control system is suitable to
The temperature control of tube furnace, the tube furnace includes quartz ampoule 10；The tube furnace temperature control system includes：Heating element heater
11, the heating element heater 11 is located in the quartz ampoule 10；The upper surface of the heating element heater 11 is provided with sample deposition domain, institute
Heating element heater 11 is stated to be suitable to heat the sample on surface placed thereon；Temperature element 12, the temperature element 12 is located at
In the quartz ampoule 10, and positioned at the top of the heating element heater 11；The temperature element 12 is suitable in heating process to sample
The temperature of product is monitored in real time；Transformer 13, the transformer 13 is located at outside the quartz ampoule 10, with the heating element heater 11
Electrical connection；The transformer 13 is suitable for the heating element heater 11 and provides voltage, and by adjusting described in the voltage-regulation provided
The heating rate of heating element heater 11；Temperature controller 14, the temperature controller 14 is located at outside the quartz ampoule 10, is surveyed with described
Warm element 12 and the transformer 13 are electrically connected；The temperature controller 14 is suitable to the sample detected according to the temperature element 12
Temperature carries out feedback regulation to the transformer 13, to realize the temperature of the sample to being positioned over the upper surface of heating element heater 11
Carry out real-time monitoring.The tube furnace temperature control system of the present invention is by the way that the heating element heater 11 to be placed in the stone of tube furnace
In English pipe 10, can use the heating element heater 11 is direct to sample to heat, due in heating process only to sample
Heating can quickly transfer heat to sample without heating the quartz ampoule 10, and once the heating element heater 11 stops
Heating, sample temperature can decline rapidly, be heated compared to existing outside heat radiation, the tube furnace temperature control of the invention
System has the advantages that temperature control is accurate, heating cooling rate is fast, thermal loss is small, more energy-conserving and environment-protective；By the temperature element
12 are also placed in the quartz ampoule 10 of tube furnace, and the temperature element 12 abuts sample, can accurately reflect the reality of sample
Temperature；Meanwhile, by the feedback regulation of 14 pairs of the temperature controller transformer 13, it can realize to the quartz ampoule 10
The temperature of interior sample carries out real-time monitoring.
As an example, the heating element heater 11 can include ceramic heating plate, mica heating plate, sheet metal heating, graphite
One kind or at least two combination in heating plate or carbon fiber heating plate.
As an example, the temperature element 12 can include any of thermocouple, infrared radiation thermometer or thermistor.
As an example, the tube furnace temperature control system also include temperature-compensating line 15, the temperature element 12 via
Temperature-compensating line 15 is electrically connected with the temperature controller 14.Specifically, the temperature element 12 needs to mend by positive negative temperature
Repay line to electrically connect with the temperature controller 14, i.e., described temperature-compensating line 15 includes positive temperature-compensating line and negative temperature is compensated
Line.
As an example, the tube furnace temperature control system also includes：First group of metal connecting pole 17, first group of gold
Belong to connecting pole 17 to be located between the temperature controller 14 and the temperature element 12；Described first group of metal connecting pole 17 one end
Electrically connected via the temperature-compensating line 15 with the temperature element 12, the other end is via the temperature-compensating line 15 and the temperature
Degree controller 14 is electrically connected；Second group of metal connecting pole 18, second group of metal connecting pole 18 is located at the heating element heater 11
Between the transformer 13；Described second group of one end of metal connecting pole 18 is electrically connected via metal wire 16 with the heating element heater 11
Connect, the other end is electrically connected via metal wire 16 with the transformer 13.
It should be noted that the quantity of first group of metal connecting pole 17 is two, positive temperature-compensating line and negative temperature
Compensating line is electrically connected from different first group of metal connecting poles respectively.
It should be further stated that, the quantity of the metal wire 16 is two, is divided into positive metal contact wires and negative sense
Metal contact wires, the heating element heater 11 is electrically connected with the positive pole of the transformer 13 with negative pole；Second group of metal
The quantity of connecting pole 18 is similarly two, the positive metal contact wires and the negative sense metal contact wires respectively from different institutes
Second group of metal connecting pole 18 is stated to electrically connect.
Embodiment two
Fig. 2 and Fig. 3 is referred to, the present embodiment also provides a kind of tube furnace, and the tube furnace includes：Quartz ampoule 10, it is described
Quartz ampoule 10 includes relative first end and the second end；Tube furnace temperature control system as described in embodiment one, the pipe
The heating element heater 11 and the temperature element 12 in formula furnace temperature control system are respectively positioned in the quartz ampoule 10.The pipe
The concrete structure of formula furnace temperature control system refers to embodiment one, is not repeated herein.
As an example, referring to Fig. 3 incorporated by reference to Fig. 2, the tube furnace also includes：First end-cap assembly 19, the first end
Face component 19 is fixed on the first end of the quartz ampoule 10；First end-cap assembly 19 is provided with installation through-hole (not shown),
The heating element heater 11 installs logical with the temperature controller 14 with the transformer 13, the temperature element 12 via described
Hole is electrically connected；Second end-cap assembly 20, the second end face component 20 is fixed on the second end of the quartz ampoule 10.Described first
End face component 19 and the second end face component 20 are used for the stifled sealing of the first end and the second end seal of the quartz ampoule 10 respectively.
As an example, first end-cap assembly 19 includes：First pressure ring 191, first pressure ring 191 is fixed on close
On the outer wall of the first end of quartz ampoule 10；First pressure ring 191 can be movably connected on the outer wall of the quartz ampoule 10,
It can also be fixed on by modes such as welding on the outer wall of the quartz ampoule 10；First flange disk 192, the first flange disk
192 detain the open outer side as the first end of quartz ampoule 10, and are fixed on first pressure ring 191, the installation through-hole
On the first flange disk 192；Screw, institute can be respectively mounted on the first flange disk 192 and first pressure ring 191
First flange disk 192 is stated to be fixed on first pressure ring 191 via screw；The installation through-hole is located at the first flange disk
On 192.
Lead to specifically, first group of metal connecting pole 17 and second group of metal connecting pole 18 are inserted into described install
In hole, while first group of metal connecting pole 17 and second group of metal connecting pole 18 and the first flange disk 192 it
Between by ceramic pipe insulation and seal.
As an example, first end-cap assembly 19 also includes the first sealing ring 193, first sealing ring 193 is located at
Between first pressure ring 191 and the first flange disk 192.First sealing ring 193 can be but be not limited only to O-shaped close
Seal.The first flange disk 192 is fixed on first pressure ring 191, and the first flange disk 192 extruding compresses described the
One sealing ring 193 deforms first sealing ring 193 to seal the quartz ampoule 10.
As an example, second end-cap assembly 20 includes：Second pressure ring (not shown), second pressure ring, which is fixed on, to be leaned on
On the outer wall at the nearly end of quartz ampoule 10 second；The specific knot of the concrete structure of second pressure ring and first pressure ring 191
Structure is identical, specifically refers to the description of first pressure ring 191；Second flange disk (not shown), the second flange disk buckle to
Open outer side in the end of quartz ampoule 10 second, and be fixed on second pressure ring；The second flange disk is compared to institute
The difference for stating first flange disk 192 is：It is provided with installation through-hole on the first flange disk 192, and the second flange disk
On be not provided with installation through-hole, both other structures and mounting means all same.
As an example, second end-cap assembly 20 also includes the second sealing ring (not shown), the second sealing ring position
Between second pressure ring and the second flange disk.Second sealing ring is identical with first sealing ring 193, specifically
The description as described in first sealing ring 193 is referred to, is not repeated herein.
As an example, being additionally provided with air inlet 194 on the first flange disk 192；The row of being additionally provided with the second flange disk
Gas port 201.
As an example, the tube furnace includes the first warm area 21 and the second warm area 22, the quartz ampoule 20 is square along its length
To through first warm area 21 and second warm 22nd area；Wherein, the equal position of the heating element heater 11 and the temperature element 12
In in first warm area 21.
As an example, the tube furnace also includes electrothermal resistance silk 23, the electrothermal resistance silk 23 is located at second warm area 22
It is interior, and along the quartz ampoule 10 circumferentially around in the outside of the quartz ampoule 10.The electrothermal resistance silk 23 can be used for institute
The second warm area 22 is stated to be heated.
As an example, the tube furnace also includes tubular type furnace main body 24；The quartz ampoule 10 runs through institute along its length
Tubular type furnace main body 24 is stated, and the first end of the quartz ampoule 10 and the second end are located at relative two of the tubular type furnace main body 24 respectively
Side；The electrothermal resistance silk 23 is located in the tubular type furnace main body 24.
As an example, first warm area 21 can be located in the tubular type furnace main body 24, the tubular type can also be located at
Outside furnace main body 24, it is preferable that in the present embodiment, first warm area 21 is located at outside the tubular type furnace main body 24, to ensure
The quartz ampoule 10 for stating the first warm area 21 is exposed to outside the tubular type furnace main body 24, and user can by the quartz ampoule 10
Home position observation is carried out with the heating process for the sample for being easily pointed to first warm area 21.
As an example, described first can be adjusted by the position for adjusting the heating element heater 11 and the temperature element 12
The distance of warm area 21 and second warm area 22, can when the temperature difference of first warm area 21 and second warm area 22 is larger
To be effectively prevented from first warm area 21 to the temperature controlled influence of second warm area 22.
In summary, the present invention provides a kind of tube furnace temperature control system and tube furnace, the tube furnace temperature control
System is suitable to the temperature control of tube furnace, and the tube furnace includes quartz ampoule；The tube furnace temperature control system includes：Heating
Element, in the quartz ampoule；The upper surface of the heating element heater be provided with sample deposition domain, the heating element heater be suitable to pair
The sample on surface placed thereon is heated；Temperature element, in the quartz ampoule, and positioned at the upper of the heating element heater
Side；The temperature that the temperature element is suitable to sample in heating process is monitored in real time；Transformer, positioned at the quartz ampoule
Outside, electrically connected with the heating element heater；The transformer is suitable for the heating element heater and provides voltage, and by adjusting offer
The heating rate of voltage-regulation heating element heater；Temperature controller, outside the quartz ampoule, with the temperature element and the change
Depressor is electrically connected；The sample temperature that the temperature controller is suitable to detect according to the temperature element is carried out instead to the transformer
Feedback regulation, real-time monitoring is carried out with the temperature for realizing the sample to being positioned over the heating element heater upper surface.The tubular type of the present invention
Furnace temperature control system can use heating element heater directly to enter sample by the way that heating element heater is placed in the quartz ampoule of tube furnace
Row heating, is heated compared to existing outside heat radiation, with temperature control is accurate, heating cooling rate is fast, thermal loss is small, more
The advantages of energy-conserving and environment-protective；Temperature element is placed in the quartz ampoule of tube furnace, temperature element abuts sample, can accurately reflect sample
The actual temperature of product；Feedback regulation by temperature controller to transformer, can realize and the temperature of sample in quartz ampoule is entered
Row real-time monitoring.
The above-described embodiments merely illustrate the principles and effects of the present invention, not for the limitation present invention.It is any ripe
Know the personage of this technology all can carry out modifications and changes under the spirit and scope without prejudice to the present invention to above-described embodiment.Cause
This, those of ordinary skill in the art is complete without departing from disclosed spirit and institute under technological thought such as
Into all equivalent modifications or change, should by the present invention claim be covered.
Claims (15)
1. a kind of tube furnace temperature control system, it is characterised in that the tube furnace temperature control system is suitable to the temperature of tube furnace
Degree control, the tube furnace includes quartz ampoule；The tube furnace temperature control system includes：
Heating element heater, in the quartz ampoule；The upper surface of the heating element heater is provided with sample deposition domain, the heating unit
Part is suitable to heat the sample on surface placed thereon；
Temperature element, in the quartz ampoule, and positioned at the top of the heating element heater；The temperature element is suitable in heating
During implementation detecting is carried out to the temperature of sample；
Transformer, outside the quartz ampoule, is electrically connected with the heating element heater；The transformer is suitable for the heating element heater
Voltage is provided, and by adjusting the heating rate of the voltage-regulation heating element heater provided；
Temperature controller, outside the quartz ampoule, is electrically connected with the temperature element and the transformer；The temperature control
The sample temperature that device is suitable to detect according to the temperature element carries out feedback regulation to the transformer, to realize to being positioned over
The temperature for stating the sample of heating element heater upper surface carries out real-time monitoring.
2. tube furnace temperature control system according to claim 1, it is characterised in that：The heating element heater includes ceramics and added
Hot plate, mica heating plate, sheet metal heating, graphite heating plate or one kind in carbon fiber heating plate or at least two combination.
3. tube furnace temperature control system according to claim 1, it is characterised in that：The temperature element includes thermoelectricity
Even, infrared radiation thermometer or thermistor.
4. tube furnace temperature control system according to claim 1, it is characterised in that：The tube furnace temperature control system
Also include temperature-compensating line, the temperature element is electrically connected via temperature-compensating line with the temperature controller.
5. tube furnace temperature control system according to claim 4, it is characterised in that：The tube furnace temperature control system
Also include：
First group of metal connecting pole, between the temperature controller and the temperature element；First group of metal connection
Post one end is electrically connected via the temperature-compensating line with the temperature element, and the other end is via the temperature-compensating line and the temperature
Spend controller electrical connection；
Second group of metal connecting pole, between the heating element heater and the transformer；Second group of metal connecting pole one
End is electrically connected via metal wire with the heating element heater, and the other end is electrically connected via metal wire with the transformer.
6. a kind of tube furnace, it is characterised in that the tube furnace includes：
Quartz ampoule, the quartz ampoule includes relative first end and the second end；
In tube furnace temperature control system as any one of claim 1 to 5, the tube furnace temperature control system
The heating element heater and the temperature element are respectively positioned in the quartz ampoule.
7. tube furnace according to claim 6, it is characterised in that：The tube furnace also includes：
First end-cap assembly, is fixed on the first end of the quartz ampoule；First end-cap assembly is provided with installation through-hole, described
Heating element heater is electrically connected with the transformer, the temperature element with the temperature controller via the installation through-hole；
Second end-cap assembly, is fixed on the second end of the quartz ampoule.
8. tube furnace according to claim 7, it is characterised in that：First end-cap assembly includes：
First pressure ring, is fixed on the outer wall of the quartz ampoule first end；
First flange disk, detains the open outer side as the quartz ampoule first end, and be fixed on first pressure ring；The peace
Through hole is filled to be located on the first flange disk.
9. tube furnace according to claim 8, it is characterised in that：First end-cap assembly also includes the first sealing ring,
First sealing ring is located between first pressure ring and the first flange disk.
10. tube furnace according to claim 9, it is characterised in that：Second end-cap assembly includes：
Second pressure ring, is fixed on the outer wall at the end of quartz ampoule second；
Second flange disk, detains the open outer side as the end of quartz ampoule second, and be fixed on second pressure ring.
11. tube furnace according to claim 10, it is characterised in that：Second end-cap assembly also includes the second sealing
Circle, second sealing ring is located between second pressure ring and the second flange disk.
12. tube furnace according to claim 10, it is characterised in that：Air inlet is additionally provided with the first flange disk；Institute
State and be additionally provided with exhaust outlet on second flange disk.
13. the tube furnace according to any one of claim 5 to 12, it is characterised in that：The tube furnace includes the first temperature
Area and the second warm area, the quartz ampoule run through first warm area and second warm area along its length；Wherein, it is described to add
Thermal element and the temperature element are respectively positioned in first warm area.
14. tube furnace according to claim 13, it is characterised in that：The tube furnace also includes electrothermal resistance silk, the electricity
Thermal resistance wire is located in second warm area, and along the quartz ampoule circumferentially around in the outside of the quartz ampoule.
15. tube furnace according to claim 14, it is characterised in that：The tube furnace also includes tubular type furnace main body；It is described
Quartz ampoule runs through the tubular type furnace main body along its length, and the first end of the quartz ampoule and the second end are respectively positioned at described
The relative both sides of tubular type furnace main body；The electrothermal resistance silk is located in the tubular type furnace main body.
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| CN201710411781.7A CN107062903B (en) | 2017-06-05 | 2017-06-05 | Tube furnace temperature control system and tube furnace |
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| CN110736346A (en) * | 2019-10-24 | 2020-01-31 | 江苏能华微电子科技发展有限公司 | diffusion furnace structure |
| CN113124684A (en) * | 2021-04-15 | 2021-07-16 | 内蒙古恒科新材料科技有限公司 | Graphite furnace power transmission system for producing graphite cathode material |
| CN114107942A (en) * | 2021-11-30 | 2022-03-01 | 电子科技大学 | Device and method for preparing graphene film heated in pipe |
| CN115494339A (en) * | 2022-11-15 | 2022-12-20 | 陕西华秦科技实业股份有限公司 | High-precision atmosphere controllable temperature-changing electrical testing system |
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|---|---|
| CN107062903B (en) | 2019-09-06 |
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Effective date of registration: 20221025 Address after: 201203 Pudong New Area, Shanghai, China (Shanghai) free trade trial area, 887 Lane 73, Chong Chong Road. Patentee after: PYLON TECHNOLOGIES Co.,Ltd. Address before: 201210 No. 99, Hai Ke Road, Pudong New Area, Pudong New Area, Shanghai. Patentee before: SHANGHAI ADVANCED Research Institute CHINESE ACADEMY OF SCIENCES |
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