CN107045951A - A kind of electric capacity measuring method of chip capacitor element - Google Patents
A kind of electric capacity measuring method of chip capacitor element Download PDFInfo
- Publication number
- CN107045951A CN107045951A CN201610079838.3A CN201610079838A CN107045951A CN 107045951 A CN107045951 A CN 107045951A CN 201610079838 A CN201610079838 A CN 201610079838A CN 107045951 A CN107045951 A CN 107045951A
- Authority
- CN
- China
- Prior art keywords
- electrode
- capacitance
- electric capacity
- measuring method
- capacity measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
Abstract
The invention provides a kind of electric capacity measuring method of chip capacitor element, including step：A. measurement carries capacitance, electrode area and the thickness of electrode of the capacitor of dieelctric sheet；B. calculation medium piece and interelectrode gap thickness；C. the capacitance of electrode after measurement is deposited or sprayed；D. the measurement result of dieelctric sheet is calibrated according to gap thickness.The present invention has both saved material, avoids wasting unnecessary loss of cycle again, makes being optimal of efficiency of production.
Description
Technical field
The present invention relates to the electric capacity measuring method of capacitor, in particular to condenser dielectric piece is in electrode evaporation
Preceding progress electric capacity measuring method.
Background technology
At present, chip capacitor typically using evaporation or spraying method make two electrodes face, then then at
Solder tails on two electrode surfaces, finally measure the capacitance of capacitor, and other experiments to judge done electricity again
Whether the quality of container meets design requirement.But in terms of quality control angle, this is simultaneously unreasonable.Therefore, people
After chip capacitor medium is suppressed or is drawn in flakes, capacitance measurement need to be carried out to the dieelctric sheet.Due to now
It is electrodeless on condenser dielectric, its electric capacity measuring can only be completed by additional electrodes, when capacitor is situated between
The dielectric constant of matter less (εr≤ 10) when, the dieelctric sheet capacitance data so measured are more accurate, but work as
When the relative dielectric constant of capacitor dielectric material is larger, because electrode is not yet done on dielectric material two sides, during measurement
Can only there can be gap between two sides outer patch or piezoelectricity pole, electrode and condenser dielectric piece at this moment, this
Gap has a strong impact on generation to the measurement result of capacitance.The capacitance value meeting substantial deviation actual value measured,
Judgement of the manufacturer to product quality is easily misled, so as to bring loss to capacitor production.
Electric capacity is carried out before evaporation or coating electrode it is an object of the invention to provide a kind of chip capacitor element
The method of measurement so that passed through to electric capacity measuring result of the chip capacitor element before evaporation or coating electrode
Check, that is, obtain accurate capacitance value, and while reaching reinforcement control of product quality, measurement can be made again
Fast, easily implement and also measurement result accurately and reliably.
The content of the invention
In order to overcome the drawbacks described above of prior art, the present invention proposes a kind of capacitance of chip capacitor element
Measuring method, it is characterised in that including step：A. measurement carries the capacitance of the capacitor of dieelctric sheet, electricity
Pole-face is accumulated and thickness of electrode；B. calculation medium piece and interelectrode gap thickness；C. after measurement is deposited or sprayed
The capacitance of electrode；D. the measurement result of dieelctric sheet is calibrated according to gap thickness.
Step A includes, during measurement constant voltage electrodes, capacitance, electrode area and the electrode of n series capacitor
Thickness.
Step B includes, and calculates n dieelctric sheet and interelectrode gap thickness averageWith area average
Step C includes, the two sides of evaporation or coating electrode, and polarization scribbles the electrode of electrocondution slurry.
The surface spraying of electrode has diamond or equadag coating；The thickness of coating is 0.1mm-1.0mm；Using grinding
Mill mode carries out roughness adjustment to sprayed surface.
The gap thickness of i-th of condenser dielectric piece is calculated as follows：
In above formula, CiFor i-th of dieelctric sheet capacitance, CNiCapacitance after being deposited or spray for i-th of electrode,
SiFor the area of i-th of dieelctric sheet, ε0For relative dielectric constant.
The average of the air gap capacitance is calculated as follows：
The capacitance value of the dieelctric sheet is calculated as follows：
With immediate prior art ratio, the technical scheme that the present invention is provided has the advantages that：
1st, the present invention measures the capacitance and constant voltage electrodes in the measurements of chip capacitor dieelctric sheet by calculating
Air gap thickness, to check the measurement result of condenser dielectric piece, makes measurement result tend to accurately judge this batch of electricity
The quality condition of vessel media piece, can be prevented effectively from underproof condenser dielectric piece and be flowed into next procedure, and
Created conditions for underproof condenser dielectric piece reprocessing；
2nd, the present invention has both saved material, avoids wasting unnecessary loss of cycle again, reaches the efficiency of production
To optimization.
Brief description of the drawings
Fig. 1 is the air gap equivalent circuit of the invention；
Fig. 2 is condenser dielectric chip capacitor measurement schematic diagram of the invention.
Embodiment
The detection means to the present invention is described in further detail below in conjunction with the accompanying drawings.
The present invention is clamped capacitor dielectric piece to be measured using two electrodes of a set of constant pressure, measures n
The capacitance C of individual condenser dielectric piece in this case1、C2…Ci…Cn, measure these condenser dielectric pieces
Area S1、S2…Si…SnAnd thickness d1、d2…di…dn, then by the electrode of this n condenser dielectric piece
Two sides is deposited or sprayed, and is then carried out electric capacity measuring again in this electrode system again, is obtained product true
Capacitance C under stateN1、CN2…CNi…CNn, now, can not be deposited or spray by calculating to obtain
When under electrode conditions with the capacitance of this set electrode measurement condenser dielectric piece, between condenser dielectric piece and electrode
Air gap thickness, because electrode is fixed structure and constant pressure, it is therefore contemplated that in this condition
Under, when measuring the capacitance of condenser dielectric piece using the electrode system, the relatively-stationary air of thickness can be produced
Gap deltai, the capacitance of this air gap is Cδi, by CδiIt counter can release Air gap thickness δi, and with
With gap thickness δ in measurement afterwardsiCalibration measurement result is gone, obtains and is more accurately not yet deposited or sprays electricity
The actual capacitance amount or true dielectric constant of condenser dielectric piece during pole, and the batch products quality is done in advance
Go out to assess, it is to avoid because of the loss brought without intermediate mass control process.
Such as Fig. 1 for when there is the air gap, at this moment the equivalent circuit of measurement has
When constant voltage electrodes are measured, the actual capacitance and gap capacitance of dieelctric sheet are series relationship；Evaporation is sprayed
The two sides after-polarization of electrode scribbles the electrode of electrocondution slurry.The surface spraying of electrode has diamond or equadag coating；
The thickness of coating is 0.1mm-1.0mm；And roughness adjustment is carried out to sprayed surface using lapping mode.
CiFor the capacitance that measures of i-th of condenser dielectric piece under constant voltage electrodes, CNiTo be deposited or spraying
Apply the actual capacitance amount of i-th of condenser dielectric piece after electrode, CδiFor i-th of condenser dielectric piece measurement space-time
The capacitance in gas gap；
Due to CiAnd CNiIt is measured given value, and has
(2) formula is arranged
Calculated by (3) and obtain Air gap thickness value δ1、δ2......δn, average can be obtained
The electric capacity of the air gap when thus can be used to estimate each condenser dielectric piece measurement
It can then be obtained by (6)：
The capacitance value of every chip capacitor device element substrate after being checked, when calculate obtained capacitance value with
When design load deviation is little, then it is good to show this batch of substrate quality, when calculating obtained capacitance value with setting
Evaluation has relatively large deviation, when particularly much smaller, then can determine that this batch of substrate quality has problem.Thus may be used
This batch of substrate is processed into the next procedure that no longer circulates, and avoids unnecessary loss.
Electrode 1 as shown in Figure 2 is constant pressure movable electrode, and electrode 2 is base, and the capacitor of non-Top electrode is situated between
Matter piece 3 is placed between electrode 1,2, at this moment can form air gap between condenser dielectric piece 3 and electric level 1,2
(δ1、δ2) 4, air gap 4 can use the equivalent δ of an air gap=(δ1+δ2).So pass through a group capacitor medium
Piece 3 can measure C1、C2……CnCapacitance, then by this group capacitor dieelctric sheet two sides be deposited
Top electrode, at this moment the air gap delta gap that disappeared fall, therefore, the actual capacitance amount of this group capacitor dieelctric sheet can be measured
CN1、CN2……CNn, can be calculated by the thickness of condenser dielectric piece, area and obtain air gap thickness, air gap
Capacitance so that by (7) formula checked after condenser dielectric piece capacitance, this capacitance with
Design load relatively can determine that the quality condition of this batch of condenser dielectric.I.e. the present invention is by measuring electrodeless electricity
The capacitance of vessel media piece is the quality state that can determine that condenser dielectric piece.Therefore, the present invention is particularly suitable
In industrialized production in enormous quantities environment.When the chip capacitor dieelctric sheet of particularly high-k does not do electrode
Capacitance measurement, do not use the present invention to carry out the check of the air gap influence, measurement result often occurs
Gross differences, and easily occur erroneous judgement and cause damage.
For example：A diameter of 20mm, relative dielectric constant is 3000, piece thickness 2mm circular piece medium, false
If two electrodes are respectively 1 μm with dieelctric sheet gap, then it can obtain:
Dieelctric sheet actual capacitance amount CN1=4.17 × 103PF=4170pF
Air-gap capacitance amount Cδ1=1390pF
Survey capacitance C1=1042.5pF
It can be seen that, measured value C1With CN1It is just too wide in the gap, can substantially it be judged by accident if direct application,
And adopt the present invention and use the check of (7) formula to obtain：
It can be seen that the capacitance C' after checkN1With dieelctric sheet actual capacitance amount CN1Unanimously, now make to dieelctric sheet
Quality estimation will be correct.
The electric capacity measuring carried out when chip capacitor dielectric material is molded and is also manufactured without electrode, it is particularly small quantities of
Amount formed sheet does the electric capacity measuring before and after electrode, it is established that it is determined that in electrode system, formed sheet does electricity
In extremely preceding electric capacity measuring, the relation of the air thickness between electrode and sheet material, so that by (6) formula and (7) formula
Obtain it is electrodeless under the conditions of condenser dielectric sheet material capacitance, and the quality to the batch of material makes evaluation.
Finally it should be noted that：The above embodiments are merely illustrative of the technical solutions of the present invention rather than it is limited
System, although the present invention is described in detail with reference to above-described embodiment, those of ordinary skill in the art
It should be understood that：The embodiment of the present invention can still be modified or equivalent substitution, and without departing from
Any modification of spirit and scope of the invention or equivalent substitution, it all should cover the claim model in the present invention
Among enclosing.
Claims (9)
1. a kind of electric capacity measuring method of chip capacitor element, it is characterised in that including step：
A. measurement carries capacitance, electrode area and the thickness of electrode of the capacitor of dieelctric sheet；
B. the dieelctric sheet and the interelectrode gap thickness are calculated；
C. the capacitance of the electrode after measurement is deposited or sprayed；
D. the measurement result of the dieelctric sheet is calibrated according to the gap thickness.
2. electric capacity measuring method according to claim 1, it is characterised in that the step A includes,
When measuring constant voltage electrodes, capacitance, electrode area and the thickness of electrode of n series capacitor.
3. electric capacity measuring method according to claim 1, it is characterised in that the step B includes,
Calculate the n dieelctric sheets and interelectrode gap thickness averageWith area average
4. electric capacity measuring method according to claim 2, it is characterised in that the step C includes,
The two sides of the electrode is deposited or sprays, and polarization scribbles the electrode of electrocondution slurry.
5. electric capacity measuring method according to claim 4, it is characterised in that the surface spray of the electrode
Scribble diamond or equadag coating；The thickness of the coating is 0.1mm-1.0mm.
6. electric capacity measuring method according to claim 5, it is characterised in that using lapping mode to spray
Apply surface and carry out roughness adjustment.
7. electric capacity measuring method according to claim 3, it is characterised in that
The gap thickness of i-th of condenser dielectric piece is calculated as follows：
In above formula, CiFor i-th of dieelctric sheet capacitance, CNiCapacitance after being deposited or spray for i-th of electrode,
SiFor the area of i-th of dieelctric sheet, ε0For relative dielectric constant.
8. electric capacity measuring method according to claim 7, it is characterised in that
The average of the air gap capacitance is calculated as follows：
9. electric capacity measuring method according to claim 8, it is characterised in that
The capacitance value of the dieelctric sheet is calculated as follows：
1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610079838.3A CN107045951A (en) | 2016-02-04 | 2016-02-04 | A kind of electric capacity measuring method of chip capacitor element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610079838.3A CN107045951A (en) | 2016-02-04 | 2016-02-04 | A kind of electric capacity measuring method of chip capacitor element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107045951A true CN107045951A (en) | 2017-08-15 |
Family
ID=59542629
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610079838.3A Pending CN107045951A (en) | 2016-02-04 | 2016-02-04 | A kind of electric capacity measuring method of chip capacitor element |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107045951A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5528153A (en) * | 1994-11-07 | 1996-06-18 | Texas Instruments Incorporated | Method for non-destructive, non-contact measurement of dielectric constant of thin films |
| CN1236090A (en) * | 1997-12-19 | 1999-11-24 | 泽韦格路瓦有限公司 | Device for measuring properties of textile product |
| CN101017185A (en) * | 2006-02-08 | 2007-08-15 | 财团法人工业技术研究院 | Testing method of capacitance component mounted inside and testing system thereof |
| CN101046491A (en) * | 2006-03-28 | 2007-10-03 | 松下电工株式会社 | Capacitive sensor |
| US8094432B2 (en) * | 2008-05-12 | 2012-01-10 | Murata Manufacturing Co., Ltd. | Multilayer ceramic electronic component and method for manufacturing the same |
| CN104375010A (en) * | 2014-11-06 | 2015-02-25 | 陕西华星电子开发有限公司 | Device for measuring capacitance of ceramic capacitor under high voltage (DC<=3KV) |
| US20150145531A1 (en) * | 2013-11-26 | 2015-05-28 | Li Lin | Method, system and apparatus for capacitive sensing |
-
2016
- 2016-02-04 CN CN201610079838.3A patent/CN107045951A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5528153A (en) * | 1994-11-07 | 1996-06-18 | Texas Instruments Incorporated | Method for non-destructive, non-contact measurement of dielectric constant of thin films |
| CN1236090A (en) * | 1997-12-19 | 1999-11-24 | 泽韦格路瓦有限公司 | Device for measuring properties of textile product |
| CN101017185A (en) * | 2006-02-08 | 2007-08-15 | 财团法人工业技术研究院 | Testing method of capacitance component mounted inside and testing system thereof |
| CN101046491A (en) * | 2006-03-28 | 2007-10-03 | 松下电工株式会社 | Capacitive sensor |
| US8094432B2 (en) * | 2008-05-12 | 2012-01-10 | Murata Manufacturing Co., Ltd. | Multilayer ceramic electronic component and method for manufacturing the same |
| US20150145531A1 (en) * | 2013-11-26 | 2015-05-28 | Li Lin | Method, system and apparatus for capacitive sensing |
| CN104375010A (en) * | 2014-11-06 | 2015-02-25 | 陕西华星电子开发有限公司 | Device for measuring capacitance of ceramic capacitor under high voltage (DC<=3KV) |
Non-Patent Citations (2)
| Title |
|---|
| ASTM: "Standard Test Methods for AC Loss Characteristics and Permittivity (Dielectric Constant) of Solid Electrical Insulation", 《AN AMERICAN NATIONAL STANDARD》 * |
| 马坚刚 等: "基于AD7746的电容法间隙测量应用系统研究", 《传感器与微系统》 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9879971B2 (en) | Device for film thickness measurement and method for film thickness measurement | |
| EP3094951A1 (en) | Capacitive pressure-measuring cell having at least one temperature sensor and pressure measurement method | |
| CN109636717A (en) | Lithium battery is coated with determination method, system, equipment and storage medium | |
| KR20130079584A (en) | Coating apparatus and coating-film forming system | |
| CN102331424A (en) | Coating quality on-line detection method based on image recognition technology | |
| JP2018041616A (en) | Coating device of electrode paste | |
| CN113782819A (en) | Method for determining edge distance of winding core tab and method for correcting winding equipment | |
| CN109698147B (en) | Wafer etching system and wafer etching method | |
| CN107045951A (en) | A kind of electric capacity measuring method of chip capacitor element | |
| CN103346142B (en) | The method of contact hole etching amount in test key structure and monitoring etching technics | |
| EP3527932A1 (en) | Thickness meter for battery material | |
| CN104535231A (en) | Resistance strain gauge switching device for testing steel rail residual stress and testing method | |
| US20190201952A1 (en) | System and Method for Manufacturing Electrode for Secondary Battery | |
| CN104278249A (en) | Crucible material quantity detection device and method and evaporator | |
| CN202770473U (en) | Flexible multi-parameter sensor | |
| CN102881578A (en) | Method for etching polycrystalline silicon gates | |
| CN105448765A (en) | Thickness measurement method for metal films | |
| CN102749815B (en) | The detection method of alignment precision | |
| CN105215760B (en) | Alignment device, alignment detecting method and alignment system | |
| CN208238738U (en) | A kind of electrodes of lithium-ion batteries thickness measurement online device | |
| WO2019241368A1 (en) | Methods of measuring and/or mapping tire tread thickness from outside the tire and related devices/systems | |
| CN105021865A (en) | A voltage measurement method allowing compensation | |
| CN102878887B (en) | Method for detecting mounting precision of continuous casting secondary cooling water spraying device | |
| CN105163572B (en) | Die height adjusting device, system and method on a kind of press-connection machine | |
| CN203026497U (en) | Electric leakage test structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170815 |
|
| RJ01 | Rejection of invention patent application after publication |