CN104278249A - Crucible material quantity detection device and method and evaporator - Google Patents
Crucible material quantity detection device and method and evaporator Download PDFInfo
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- CN104278249A CN104278249A CN201310275092.XA CN201310275092A CN104278249A CN 104278249 A CN104278249 A CN 104278249A CN 201310275092 A CN201310275092 A CN 201310275092A CN 104278249 A CN104278249 A CN 104278249A
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- Prior art keywords
- crucible
- material amount
- detecting device
- surplus material
- amount detecting
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/543—Controlling the film thickness or evaporation rate using measurement on the vapor source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a crucible material quantity detection device and method and an evaporator, the crucible material amount detection device comprises a weighing module, which comprises a plurality of sensors arranged on the bottom of a crucible, and is used for sensing the crucible weight; an operation module, which is used for receiving sensed data transmitted by the plurality of sensors and calculating residual material quantity in the crucible; and a control module, which is used for comparing the residual material quantity calculated by the operation module with a set residual material quantity, and sends a control instruction when the calculated residual material quantity is lower than the set residual material quantity. The crucible material quantity detection device can accurately detect the residual material quantity in the crucible.
Description
Technical field
The present invention relates to the rete plated film field in display panel manufacturing processed, particularly relate to a kind of crucible material amount detecting device, a kind of crucible material quantity measuring method and a kind of evaporator with this crucible material amount detecting device.
Background technology
Still based on hot evaporation on current Organic Light Emitting Diode (OLED) establishment of component, and organic materials uses Organic Light Emitting Diode especially to make a upper great link, is not only significant cost ancestor, also concerns processing procedure quality.So in process of production, in the crucible of strict management and control evaporator, organic materials amount will be very important problem.
The existing evaporation source kind for hot evaporation process mainly comprises an evaporation source, concentrating type line evaporation source, single-point linear evaporation source and face evaporation source.For single-point line style evaporation source, as shown in Figure 1, comprise long strip shape body 10, have chamber in body 10, body 10 top arranges some nozzles 12, and body 10 lower center position is communicated with crucible 20.When to substrate 30 evaporated film, crucible 20 is by heating unit (being usually arranged at the both sides of crucible, not shown) heating, and the deposition material in crucible 20 is heated and is gasificated into the chamber that steam enters body 10, spray to substrate 30 through nozzle 12, plate thin film at the lower surface of substrate 30.
In prior art, the organic materials used due to hot evaporation is quite expensive, so the management and control of filler needs very strict, but also because of so, adds the pressure of processing procedure aspect.Often need the processing procedure (run) calculated instantly need fill out the material of quantity, and insert required amount.But it is still surplus how many on earth during the course because the quantity of material in crucible cannot be known exactly.Therefore sometimes just because burning no material and produce the serious variation of product performance.Current used material control and management method has the following two kinds.
The first first calculates the basic consumption of corresponding deposition (DEPO rate), then see how long this processing procedure needs, and estimates that material need consume total amount, inserts quantity of material needed for determining afterwards again.Such as: when deposition (DEPO rate) is for 1A/sec, corresponding basic consumption is 2g/hr.If this processing procedure (run) needs 144hrs consuming time, then need consumption material total amount to be about 2*144=288g, then the quantity of material that this processing procedure is inserted need the amount of being greater than 288 grams.
The second is, quantity of material control is carried out in collocation deposition monitoring sensor (DEPO rate monitor sensor).But this method, once find the numerical value (rate value) of deposition, toward declining, depositing temperature is constantly toward rising, and as shown in Figure 2, the material now in crucible consumes end.
In addition, filler keyholed back plate gimmick preceding method one matching method two use often used at present, occurs, though this kind of judgment mode may know that material consumes end once run into the abnormal conditions of picture shown in Fig. 2, but unusual phenomenon there occurs, so product will be caused abnormal.
So how just can know before material deterioration inside is complete, will keep being considerable problem to processing procedure management and control and product.Therefore, need to design the device that precisely can detect remaining quantity of material in crucible.
Summary of the invention
For problems of the prior art, object of the present invention is for providing a kind of crucible material amount detecting device that precisely can detect remaining quantity of material in crucible.
Another object of the present invention is for providing a kind of crucible material quantity measuring method that precisely can detect remaining quantity of material in crucible.
Another object of the present invention is for providing a kind of evaporator with crucible material amount detecting device of the present invention.
For achieving the above object, technical scheme of the present invention is as follows:
A kind of crucible material amount detecting device, wherein, described crucible material amount detecting device comprises: Weighing module, comprises the multiple sensors being arranged at crucible bottom, for sensing the weight of described crucible; Computing module, for receiving the sense data that described multiple sensor transmits, calculates the surplus material amount in described crucible; Control module, compares with the surplus material amount of setting for described computing module is calculated the surplus material amount of gained, when the surplus material amount calculating gained is less than the surplus material amount of setting, sends a steering order.
Evaporator of the present invention, has crucible material amount detecting device of the present invention.
A kind of crucible material quantity measuring method, wherein, described crucible material quantity measuring method comprises step; Step S1: the sense data being gathered described crucible weight by the multiple sensors being arranged at crucible bottom; Step S2: receive the sense data that described multiple sensor is passed back, calculates the surplus material amount in described crucible; Step S3: the calculating surplus material amount of gained compared with the surplus material amount of setting, when the surplus material amount calculating gained is less than the surplus material amount of setting, sends a steering order.
Beneficial effect of the present invention is, crucible material amount detecting device of the present invention, crucible material quantity measuring method and evaporator, can quantity of material loss in crucible complete before just can know surplus material amount situation in crucible.And the piezoelectric signal of piezoelectric transducer used in the present invention, both in time, also accurately, the burning solution situation knowing deposition material in crucible that can be real-time, therefore can control the surplus material amount in crucible accurately, accuracy rate can reach 100%.Avoiding the variation that the product performance that produces because burning no material in crucible is serious, effectively raising the quality of product, the organic materials for evaporation can be saved, reduction production cost.
Accompanying drawing explanation
The schematic diagram of the evaporation source component of the common evaporator of Fig. 1.
Fig. 2 is the deposition surveillance map of the second material control and management method of prior art.
Fig. 3 is the schematic diagram of crucible.
Fig. 4 is the skeleton diagram of the crucible material amount detecting device of the embodiment of the present invention.
Fig. 5 is the piezoelectric transducer layout of the crucible bottom of the crucible material amount detecting device of the embodiment of the present invention.
Fig. 6 is the skeleton diagram of the computing module of the crucible material amount detecting device of the embodiment of the present invention.
Fig. 7 is the skeleton diagram of the control module of the crucible material amount detecting device of the embodiment of the present invention.
Fig. 8 is the schema of the crucible material quantity measuring method of the embodiment of the present invention.
Embodiment
The exemplary embodiments embodying feature & benefits of the present invention will describe in detail in the following description.It should be understood that the present invention can have various changes in different embodiments, it neither departs from the scope of the present invention, and explanation wherein and accompanying drawing are the use when explain in itself, and is not used to limit the present invention.
The crucible material quantity measuring method of the embodiment of the present invention, can be realized by the crucible material amount detecting device of the embodiment of the present invention, the evaporator of the embodiment of the present invention, have the crucible material amount detecting device of the embodiment of the present invention.
First introduce the crucible material amount detecting device of the embodiment of the present invention below.
As shown in Figure 3 and Figure 4, the crucible material amount detecting device of the embodiment of the present invention, comprises Weighing module, computing module and control module.Below make introductions all round:
One, Weighing module
The Weighing module of the crucible material amount detecting device of the embodiment of the present invention, mainly comprises the multiple sensors being arranged at crucible bottom; These sensors are the weight for sensing crucible, and then accurately infer the surplus material amount in crucible.
And the sensor that the Weighing module of crucible material amount detecting device of the present invention is used, preferably piezoelectric transducer.Piezoelectric transducer is the sensor that the piezoelectric effect produced after utilizing some dielectric medium stress is made.When so-called piezoelectric effect refers to that deformation (comprising bending and telescopic shape change) occurs being subject to the External Force Acting of a direction some dielectric medium, due to the polarization phenomena of internal charge, the phenomenon of electric charge can be produced on its surface.Piezoelectric transducer is cheaply a kind of and the electronic installation easily obtained, and the piezoelectric signal of piezoelectric transducer is both real-time, and accurately, therefore precisely can control the quantity of material in crucible.
As shown in Figure 3, piezoelectric transducer needs to be arranged between the bottom of crucible 2 and the shell 1 of evaporator, because time in working order, the position installing piezoelectric transducer additional is hot environment, therefore, in order to ensure that piezoelectric transducer normally works, piezoelectric transducer preferably can the piezoelectric transducer of resistance to 500 degree of high temperature.Or, also can, by coated for piezoelectric transducer lagging material, make the working temperature of piezoelectric transducer be down to the scope of its normal work.The lagging material used is such as ceramic insulating material, but the present invention is not as limit.
As shown in Figure 5, the crucible material amount detecting device of the embodiment of the present invention, piezoelectric transducer 3 is the bottoms being distributed in crucible 2 in a uniformly distributed manner, smooth bottom crucible 2, if bottom crucible 2 be rectangle, piezoelectric transducer 3 can be uniformly distributed in the bottom of described crucible more in the mode of arranging multiple row.
As shown in Figure 5, bottom crucible 2, the general layout of arranging with two row seven is uniformly dispersed with 14 piezoelectric transducers 3, each piezoelectric transducer 3 detects the region that in the 4(Fig. 5 of its zonule, place, dotted line represents) crucible 2 local weight data, also be divided into 14 zonules 4 bottom crucible 2, one piezoelectric transducer 3 is set in each zonule 4, therefore, the sense data that the weight of crucible 2 should be each piezoelectric transducer 2 add the General Logistics Department and.
Two, computing module
The computing module of the crucible material amount detecting device of the embodiment of the present invention, for receiving the sense data that multiple piezoelectric transducer 3 is passed back, calculates the surplus material amount in crucible 2.
First, the crucible material amount detecting device of the embodiment of the present invention, in order to ensure the real-time that quantity of material detects and accuracy, the frequency of piezoelectric transducer 3 image data close to Real-time Collection, such as, can be 1 time/second, but not as limit.
As shown in Figure 6, computing module can comprise data receipt unit, sum unit and numerical value output unit.
Wherein, the sense data that multiple piezoelectric transducers 3 that the effect of data receipt unit is used to receive Weighing module are sent.The data receipt unit of computing module both can be connected by wired mode of connection with each piezoelectric transducer 3 of Weighing module, also can obtain sense data by the mode of transmission over radio.After receiving the sense data of piezoelectric transducer 3, sense data is sent to sum unit process by data receipt unit.
Sum unit, each sense data transmitted by data receipt unit adds up, and first calculates the weight of crucible 2, then deducts crucible 2 and conduct oneself with dignity, obtain the surplus material amount in crucible 2.The surplus material amount drawn, then be transferred to numerical value output unit.
Numerical value output unit, then the numerical value of the surplus material amount transmitted by sum unit, sends control module to, to determine whether send corresponding steering order by judging.
Three, control module
The control module of the crucible material amount detecting device of the embodiment of the present invention, surplus material amount for the surplus material amount with setting that computing module are calculated gained compares, when the surplus material amount calculating gained is less than the surplus material amount of setting, send a steering order.
The crucible material amount detecting device of the embodiment of the present invention, the steering order sent, can be the instruction stopping heating crucible 2, or stops the instruction of evaporation processing procedure, or send the instruction of the information warning stopping heating, with the change reminding operator to pay close attention to surplus material amount in crucible 2.According to different practical situation, different steering orders can be determined.Also can the quantity of material in crucible when being in different levels, successively send different steering orders, such as, first carry out the instruction warned, then send the instruction stopping heating.
Concrete, as shown in Figure 7, the crucible material amount detecting device of the embodiment of the present invention, its control module comprises numerical value receiving element, sum unit, instruction generation unit and instruction output unit, and each unit is described below:
Numerical value receiving element, the surplus material numerical quantity in the crucible 2 that the numerical value output unit receiving computing module is sent, sends comparing unit to;
Comparing unit, the surplus material amount of surplus material numerical quantity with the setting stored in advance compared, the surplus material value of setting mentioned here, can be more than one; More than one time, can one of them be that correspondence sends the stop value stopping heating signal, also have the corresponding warning value sending information warning, the residue doses (such as 10 grams) in the crucible that warning value is corresponding, is greater than the residue doses (such as 5 grams) in the crucible corresponding to stop value.
The surplus material amount of setting, can be stored in advance in a storage unit of control module, call in order to comparing unit.
Instruction generation unit, its effect is the comparative result that reception comparing unit transmits, if the surplus material numerical quantity of gained is less than the surplus material amount of setting after testing, then generates corresponding steering order; If surplus material amount is not less than the surplus material amount of setting, then do not generate steering order, proceed real-time detection by piezoelectric transducer.
Instruction output unit, its effect is the controller steering order that instruction generation unit generates being exported to evaporator, to realize the action stopping heating crucible, or stops the action of evaporation processing procedure, or sends the action of the information warning stopping heating.
The evaporator of the embodiment of the present invention, after its controller receives the steering order of instruction output unit output, by the control of controller, realize the action stopping heating crucible, or stop the action of current evaporation processing procedure, or send the action of information warning stopping heating, thus the variation avoiding the product performance that produces because burning no material in crucible serious.
Introduce the crucible material quantity measuring method of the embodiment of the present invention below again, the identical or corresponding feature mentioned in a device, when introduction method, repeats no more.
As shown in Figure 8, the crucible material quantity measuring method of the embodiment of the present invention, mainly comprises step S1-step S3.
Step S1 is the sense data being gathered crucible 2 weight by the multiple piezoelectric transducers 3 be arranged at bottom crucible 2;
Step S2 is the sense data that the multiple piezoelectric transducer 3 of reception is passed back, calculates the surplus material amount in crucible 2; Concretely, be that the sense data obtained by described data receipt unit adds up, to calculate the weight of crucible, then deduct crucible deadweight, obtain the surplus material amount in crucible.
Step S2 is calculated the surplus material amount of gained to carry out comparatively with the surplus material amount ratio of setting by step S3, when the surplus material amount calculating gained is less than the surplus material amount of setting, sends a steering order.
The crucible material amount detecting device of the embodiment of the present invention, crucible material quantity measuring method and evaporator, can quantity of material loss in crucible 2 complete before just can know surplus material amount in crucible 2, the piezoelectric signal of piezoelectric transducer 3, both timely, also accurate, therefore can control the surplus material amount in crucible 2 accurately, accuracy rate can reach 100%.Avoiding the variation that the product performance that produces because burning no material in crucible 2 is serious, effectively raising the quality of product, having saved the organic materials for evaporation, reducing production cost.
The change that those skilled in the art do when should recognize the scope and spirit of the present invention disclosed in the claim do not departed from appended by the present invention and retouching, within the protection domain all belonging to claim of the present invention.
Claims (15)
1. a crucible material amount detecting device, wherein, described crucible material amount detecting device comprises:
Weighing module, comprises the multiple sensors being arranged at crucible bottom, for sensing the weight of described crucible;
Computing module, for receiving the sense data that described multiple sensor transmits, calculates the surplus material amount in described crucible;
Control module, compares with the surplus material amount of setting for described computing module is calculated the surplus material amount of gained, when the surplus material amount calculating gained is less than the surplus material amount of setting, sends a steering order.
2. crucible material amount detecting device as claimed in claim 1, wherein, described sensor is piezoelectric transducer.
3. crucible material amount detecting device as claimed in claim 2, wherein said piezoelectric transducer is the piezoelectric transducer of resistance to 500 degree of high temperature.
4. crucible material amount detecting device as claimed in claim 2, wherein, described piezoelectric transducer is coated with lagging material.
5. crucible material amount detecting device as claimed in claim 4, wherein, described lagging material is pottery.
6. crucible material amount detecting device as claimed in claim 2, wherein, the frequency of described piezoelectric transducer image data is 1 time/second.
7. crucible material amount detecting device as claimed in claim 2, wherein, described piezoelectric transducer is uniformly distributed in the bottom of described crucible in the mode of arranging multiple row more.
8. crucible material amount detecting device as claimed in claim 7, wherein, described piezoelectric transducer two row seven row amounts to 14.
9. crucible material amount detecting device as claimed in claim 1, wherein, described steering order is stop the instruction of heating or send the instruction of information warning.
10. crucible material amount detecting device as claimed in claim 1, wherein, described computing module comprises:
Data receipt unit, receives the described sense data that described Weighing module is sent;
Sum unit, the described sense data obtained by described data receipt unit adds up, and to calculate the weight of described crucible, then deducts the deadweight of described crucible, obtains the surplus material amount in described crucible;
Numerical value output unit, sends the surplus material amount that described sum unit calculates gained to described control module.
11. crucible material amount detecting devices as claimed in claim 10, wherein, described data receipt unit is connected by wired or wireless mode with described sensor.
12. crucible material amount detecting devices as claimed in claim 10, wherein, described control module comprises:
Numerical value receiving element, receives the surplus material numerical quantity that described computing module is sent;
Comparing unit, compares described surplus material numerical quantity with the surplus material amount of setting, obtains comparative result;
Instruction generation unit, receives the described comparative result that described comparing unit transmits, if surplus material numerical quantity is less than the surplus material amount of setting, then generates described steering order;
Instruction output unit, the described steering order generated by described instruction generation unit exports.
13. 1 kinds of evaporators, is characterized in that, described evaporator has the arbitrary described crucible material amount detecting device of claim 1-12.
14. 1 kinds of crucible material quantity measuring methods, wherein, described crucible material quantity measuring method comprises step;
Step S1: the sense data being gathered described crucible weight by the multiple sensors being arranged at crucible bottom;
Step S2: receive the sense data that described multiple sensor is passed back, calculates the surplus material amount in described crucible;
Step S3: the calculating surplus material amount of gained compared with the surplus material amount of setting, when the surplus material amount calculating gained is less than the surplus material amount of setting, sends a steering order.
15. crucible material quantity measuring methods as claimed in claim 14, wherein, in step S2, the described sense data obtained by described data receipt unit adds up, to calculate the weight of described crucible, then deduct the deadweight of described crucible, obtain the surplus material amount in described crucible.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310275092.XA CN104278249A (en) | 2013-07-02 | 2013-07-02 | Crucible material quantity detection device and method and evaporator |
| TW102135087A TW201502303A (en) | 2013-07-02 | 2013-09-27 | Crucible material amount measuring device, method and evaporation machine |
| JP2014090079A JP2015010277A (en) | 2013-07-02 | 2014-04-24 | Crucible material amount detection device and method, and vapor deposition apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310275092.XA CN104278249A (en) | 2013-07-02 | 2013-07-02 | Crucible material quantity detection device and method and evaporator |
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| Publication Number | Publication Date |
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| CN104278249A true CN104278249A (en) | 2015-01-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310275092.XA Pending CN104278249A (en) | 2013-07-02 | 2013-07-02 | Crucible material quantity detection device and method and evaporator |
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| Country | Link |
|---|---|
| JP (1) | JP2015010277A (en) |
| CN (1) | CN104278249A (en) |
| TW (1) | TW201502303A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107190236A (en) * | 2017-07-27 | 2017-09-22 | 京东方科技集团股份有限公司 | Crucible, evaporation coating device and evaporation coating method |
| CN108385077A (en) * | 2018-03-02 | 2018-08-10 | 中国计量大学 | A kind of coating apparatus and film plating process for capableing of real-time indirect monitoring thicknesses of layers |
| CN108642451A (en) * | 2018-05-23 | 2018-10-12 | 北京铂阳顶荣光伏科技有限公司 | The control method and device of coating machine, coating machine |
| CN110438453A (en) * | 2019-06-28 | 2019-11-12 | 北京铂阳顶荣光伏科技有限公司 | The prior-warning device and method for early warning of starting material left amount in crucible |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110257775A (en) * | 2019-06-17 | 2019-09-20 | 深圳市华星光电技术有限公司 | Evaporation coating device and evaporation coating method |
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| JPH03274264A (en) * | 1990-03-22 | 1991-12-05 | Matsushita Electric Ind Co Ltd | Weight monitoring system for molten material or sublimating material and its weight control system |
| JP2002235167A (en) * | 2001-02-06 | 2002-08-23 | Toyota Motor Corp | Vacuum vapor deposition apparatus |
| US6889568B2 (en) * | 2002-01-24 | 2005-05-10 | Sensarray Corporation | Process condition sensing wafer and data analysis system |
| JP4126370B2 (en) * | 2002-12-04 | 2008-07-30 | 独立行政法人産業技術総合研究所 | Thin film type piezoelectric sensor |
| KR101167547B1 (en) * | 2007-03-26 | 2012-07-20 | 가부시키가이샤 알박 | Evaporation source, vapor deposition apparatus and method of film formation |
| KR100984148B1 (en) * | 2007-12-21 | 2010-09-28 | 삼성전기주식회사 | Vacuum evaporator |
| US8228170B2 (en) * | 2008-01-10 | 2012-07-24 | International Business Machines Corporation | Using sensors to identify objects placed on a surface |
| KR101141419B1 (en) * | 2010-07-29 | 2012-05-04 | 삼성전기주식회사 | Dissolution property measurement system using piezoelectric sensor |
-
2013
- 2013-07-02 CN CN201310275092.XA patent/CN104278249A/en active Pending
- 2013-09-27 TW TW102135087A patent/TW201502303A/en unknown
-
2014
- 2014-04-24 JP JP2014090079A patent/JP2015010277A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107190236A (en) * | 2017-07-27 | 2017-09-22 | 京东方科技集团股份有限公司 | Crucible, evaporation coating device and evaporation coating method |
| CN108385077A (en) * | 2018-03-02 | 2018-08-10 | 中国计量大学 | A kind of coating apparatus and film plating process for capableing of real-time indirect monitoring thicknesses of layers |
| CN108642451A (en) * | 2018-05-23 | 2018-10-12 | 北京铂阳顶荣光伏科技有限公司 | The control method and device of coating machine, coating machine |
| CN110438453A (en) * | 2019-06-28 | 2019-11-12 | 北京铂阳顶荣光伏科技有限公司 | The prior-warning device and method for early warning of starting material left amount in crucible |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201502303A (en) | 2015-01-16 |
| JP2015010277A (en) | 2015-01-19 |
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Application publication date: 20150114 |