CN110571171A - Calibration method and calibration system of gas flow controller and gas inlet device - Google Patents
Calibration method and calibration system of gas flow controller and gas inlet device Download PDFInfo
- Publication number
- CN110571171A CN110571171A CN201910828034.2A CN201910828034A CN110571171A CN 110571171 A CN110571171 A CN 110571171A CN 201910828034 A CN201910828034 A CN 201910828034A CN 110571171 A CN110571171 A CN 110571171A
- Authority
- CN
- China
- Prior art keywords
- gas flow
- value
- controller
- flow controller
- compensation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
Abstract
The invention provides a calibration method, a calibration system and an air inlet device of a gas flow controller, wherein the calibration method of the gas flow controller comprises the following steps: s1, receiving a gas flow rate set value of the gas flow rate controller input by a user, and outputting the gas flow rate set value to the gas flow rate controller; s2, detecting the actual gas flow value of the pipeline where the gas flow controller is located through a gas flow sensor; s3, judging whether the absolute value of the difference value between the set value of the gas flow and the actual gas flow is less than or equal to a preset threshold value; if so, acquiring a gas flow compensation value corresponding to the gas flow set value according to a pre-established compensation relationship, and outputting the gas flow compensation value to the gas flow controller; if not, alarming. By the invention, the convenience of debugging and maintaining the flow controller is improved.
Description
Technical Field
The invention relates to the field of semiconductor manufacturing, in particular to a calibration method, a calibration system and a gas inlet device of a gas flow controller.
background
The plasma etcher is a manufacturing device of integrated circuit devices and can be divided into a transmission cavity and a process cavity. In the process chamber, a radio frequency power supply provides energy, reaction gas is ionized under a vacuum condition to form a large number of plasmas, and the plasmas and a wafer generate various physical and chemical reactions under certain pressure and temperature, so that the surface performance of the material is changed, and the etching process of the wafer is completed.
in the etching process, a certain flow of reaction gas needs to be introduced into the process chamber, and the flow of the reaction gas is set through the flow controller. In general, the output of the flow controller will deviate, which causes the difference between the actual gas flow and the set value to be large, and affects the process result. To ensure the accuracy of the gas flow into the process chamber, the output of the flow controller needs to be periodically checked and calibrated.
the existing calibration methods are generally as follows: and calculating the flow output to the process chamber, comparing the flow with a set flow value, and if the deviation is larger, alarming on an interface of the upper computer to prompt a worker that the flow controller outputs the deviation and needs to be calibrated.
the gas flow value actually introduced into the process chamber is calculated according to the following flow calculation formula (1):
in equation (1), Q is the gas flow rate, R is the coefficient, V is the vessel volume, T is the gas temperature, and P' is the pressure rise rate.
The existing gas flow calibration method calculates the actual output flow through a formula (1), and the application premise of the formula (1) is as follows: 1. the volume of the container, namely the process chamber and the process pipeline is known; 2. the gas temperature is constant in the calibration process; 3. the pressure rise rate is known.
In practical applications, the above preconditions are difficult to guarantee, mainly because:
The volume of the process chamber is mostly calculated value in design, and the length of the process pipeline is also estimated value, so that certain error exists in the volume of the container.
in the flow calibration process, gas is not heated before being introduced into the chamber, and the gas is heated by the temperature of the chamber after being introduced into the chamber, namely, the gas temperature is not constant in the calibration process. In addition, the chamber temperature also fluctuates during this process and is not stable.
the pressure rise rate is calculated through a chamber pressure rise value within a certain time, and the chamber pressure value is read through a process gauge and a chamber gauge. However, the two gauges have different measurement ranges and different accuracies, so that the pressure sampling value of the gauge has a certain error, and further the pressure rise rate has an error.
Therefore, the existing calibration mode has high maintenance cost and seriously influences the debugging efficiency of the whole machine.
Disclosure of Invention
The invention aims to at least solve one technical problem in the prior art, and provides a calibration method, a calibration system and an air inlet device of a gas flow controller.
To achieve the object of the present invention, there is provided a calibration method of a gas flow controller, the method comprising the steps of:
S1, receiving a gas flow rate set value of the gas flow rate controller input by a user, and outputting the gas flow rate set value to the gas flow rate controller;
S2, detecting the actual gas flow value of the pipeline where the gas flow controller is located through a gas flow sensor;
S3, judging whether the absolute value of the difference value between the set value of the gas flow and the actual gas flow is less than or equal to a preset threshold value; if so, acquiring a gas flow compensation value corresponding to the gas flow set value according to a pre-established compensation relationship, and outputting the gas flow compensation value to the gas flow controller; if not, alarming;
Wherein, the compensation relation is used for representing the corresponding relation between different gas flow set values and one corresponding gas flow compensation value of the gas flow controller in the range of the gas flow controller; and each gas flow compensation value is an actual gas flow value which is output to the gas flow controller when the actual gas flow value of the pipeline where the gas flow controller is located is equal to the set gas flow value.
Preferably, the step S1 further includes the steps of:
S11, receiving the gas flow rate set value of the gas flow rate controller inputted by the user, and determining whether the gas flow rate set value is within the range of the gas flow rate controller; if yes, go to step S12; if not, ending the flow;
S12: the gas flow rate set value is output to the gas flow rate controller, and step S2 is executed.
Preferably, the compensation relationship is established by:
S01, selecting N gas flow set values in the range of the gas flow controller in sequence from small to big;
S02, detecting an actual gas flow value of a pipeline where the gas flow controller is located, where i is 1,2, and N is a total number of the gas flow set values, corresponding to the ith gas flow set value, by the gas flow sensor;
S03, calculating the absolute value of the difference between the ith gas flow set value and the corresponding actual gas flow value, judging whether the absolute value of the difference exceeds the error allowable range, if not, adjusting the gas flow value output by the gas flow controller until the actual gas flow value of the pipeline where the gas flow controller is located is equal to the ith gas flow set value, setting the gas flow value output by the gas flow controller at the moment as the gas flow compensation value corresponding to the ith gas flow set value, and recording;
s04, judging whether i is equal to N, if yes, executing step S05; if not, making i equal to i +1, and returning to the step S02;
S05, performing linear fitting according to the N gas flow set values and the gas flow compensation values corresponding to the N gas flow set values one by one to obtain a functional relation between the N gas flow set values and the gas flow compensation values corresponding to the N gas flow set values one by one, and taking the functional relation as the compensation relation.
Preferably, in the step S05, a least square method is used for linear fitting.
Preferably, the magnitude of the ith said flow set point satisfies the following equation:
S(i)＝Smax*i/10
Wherein S is(i)is the ith flow set value; smaxis the maximum flow value of the range of the gas flow controller.
Preferably, after the step S2 and before the step S3, the method further includes a step S4:
s4: and outputting a gas flow value with the value of 0 to the gas flow controller.
Preferably, in step S03, if the absolute value of the difference between the ith gas flow rate set value and the corresponding actual gas flow rate value exceeds an allowable error range, an alarm is issued.
As another technical solution, the present invention also provides a calibration system for a gas flow controller, including:
A control unit, a gas flow sensor; wherein the content of the first and second substances,
The gas flow sensor is used for detecting an actual gas flow value of a pipeline where the gas flow controller is located and sending the actual gas flow value to the control unit;
the control unit is used for receiving a gas flow set value of the gas flow controller input by a user and outputting the gas flow set value to the gas flow controller; judging whether the absolute value of the difference value between the set gas flow value and the actual gas flow value is less than or equal to a preset threshold value or not; if so, acquiring a gas flow compensation value corresponding to the gas flow set value according to a pre-established compensation relationship, and outputting the gas flow compensation value to the gas flow controller; if not, alarming;
Wherein, the compensation relation is used for representing the corresponding relation between different gas flow set values of the gas flow controller in the range of the gas flow controller and the gas flow compensation value corresponding to one of the different gas flow set values; and each gas flow compensation value is an actual gas flow value which is output to the gas flow controller when the actual gas flow value of the pipeline where the gas flow controller is located is equal to the set gas flow value.
As another technical solution, the present invention further provides an intake device, including an intake pipe, and a gas flow controller and an on-off valve that are disposed on the intake pipe, where the on-off valve is located downstream of the gas flow controller, and further including: the calibration system of gas flow controller in this application, wherein, gas flow sensor sets up on the intake pipe, and is located the low reaches of on-off valve.
the invention has the following beneficial effects:
According to the technical scheme of the calibration method and the calibration system of the gas flow controller, when the absolute value of the difference value between the gas flow set value and the actual gas flow value is smaller than or equal to a preset threshold value, a gas flow compensation value corresponding to the gas flow set value is obtained according to a pre-established compensation relation, and the gas flow compensation value is output to the gas flow controller; the method can compensate the actual gas flow value of the gas flow controller on line according to the pre-established compensation relationship, provides a calibration means for the calibration of the gas flow controller, fills the blank that the existing gas flow controller has no compensation, does not need to replace the gas flow controller or a gas flow controller supplier to calibrate the output of the gas flow controller when the output error of the gas flow controller is large, and improves the convenience of equipment debugging and maintenance; in conclusion, the technical scheme of the calibration method and the calibration system for the gas flow controller provided by the invention saves the maintenance cost of the gas flow controller, reduces the time consumption for calibrating the gas flow controller, and improves the debugging and maintenance convenience and debugging efficiency of the gas flow controller.
according to the technical scheme of the gas inlet device, the gas flow controller calibration system comprises the gas flow controller calibration system, the actual output value of the gas flow controller can be compensated on line according to the pre-established compensation relation, the maintenance cost of the gas flow controller is saved, the time consumption for calibrating the gas flow controller is reduced, and the debugging convenience and the debugging efficiency of the gas flow controller are improved.
Drawings
FIG. 1 is a block flow diagram of a method for calibrating a gas flow controller according to an embodiment of the present invention;
FIG. 2 is a block diagram of a process for establishing a compensation relationship according to an embodiment of the present invention;
FIG. 3 is a block flow diagram of a method for calibrating a gas flow controller according to an embodiment of the present invention;
FIG. 4 is a block flow diagram of a method of calibrating a gas flow controller according to another embodiment of the present invention;
Fig. 5 is a schematic structural diagram of a calibration system of a gas flow controller according to an embodiment of the present invention.
fig. 6 is a schematic structural diagram of an air intake device according to an embodiment of the present invention.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the calibration method, the calibration system and the gas inlet device of the gas flow controller provided by the present invention are described in detail below with reference to the accompanying drawings.
As shown in fig. 1, a flow chart of a calibration method of a gas flow controller according to an embodiment of the present invention is provided, where the calibration method of a flow controller according to an embodiment of the present invention includes:
step S1: and receiving a gas flow set value of the gas flow controller input by a user, and outputting the gas flow set value to the gas flow controller.
step S2: and detecting the actual gas flow value of the pipeline where the gas flow controller is located through the gas flow sensor.
Step S3: judging whether the absolute value of the difference value between the set gas flow value and the actual gas flow value is less than or equal to a preset threshold value or not; if yes, go to step S4; if not, go to step S6.
Step S4: and acquiring a gas flow compensation value corresponding to the gas flow set value according to a pre-established compensation relation.
the compensation relation is used for representing the corresponding relation between different gas flow set values of the gas flow controller in the range of the gas flow controller and the gas flow compensation value corresponding to the gas flow set value; each gas flow compensation value is an actual gas flow value which is output to the gas flow controller when the actual gas flow value of the pipeline where the gas flow controller is located is equal to the gas flow set value.
As shown in fig. 2, a flow chart of a method for establishing a compensation relationship in the embodiment of the present invention is shown, where the method for establishing a compensation relationship in the embodiment includes:
step 01: n gas flow set values are selected within the range of the gas flow controller in sequence from small to large, wherein N is larger than or equal to 1.
Optionally, the magnitude of the ith flow rate set value satisfies the following formula:
S(i)＝Smax*i/10
Wherein S is(i)Is the ith flow set value; smaxThe maximum flow value for the span of the gas flow controller, i is 1, 2. In this embodiment, setting i to 10 can implement ten-point calibration of the flow controller; when i is 10, S(10)I.e., the maximum flow value of the range of the flow controller, i.e., the full range of the flow controller. Of course, the present embodiment is not limited to ten-point calibration. In the embodiment, a plurality of flow set values are selected relative to a single flow set value, so that the subsequently obtained compensation relation is more accurate, the calibration efficiency of the flow controller is further improved, and the calibration reliability is ensured.
Step 02: and detecting the actual gas flow value of the pipeline where the gas flow controller is located corresponding to the ith gas flow set value through a gas flow sensor, wherein i is 1, 2. Specifically, in this embodiment, the actual gas flow value is directly obtained by the gas flow sensor, and compared with the conventional method that calculates the actual gas flow value by using a formula, the error of the actual flow is reduced, the time for obtaining the actual gas flow is greatly shortened, the calibration accuracy is remarkably improved, and the error value of any calibration point can be obtained.
Step 03: and calculating the absolute value of the difference between the ith gas flow set value and the actual gas flow value corresponding to the ith gas flow set value, judging whether the absolute value of the difference exceeds the error allowable range, and if not, executing step 04.
Specifically, the error allowable range is determined by the accuracy of the gas flow controller.
Step 04: and adjusting the gas flow value output by the gas flow controller until the actual gas flow value of the pipeline where the gas flow controller is located is equal to the ith gas flow set value, setting the gas flow value output by the gas flow controller at the moment as a gas flow compensation value corresponding to the ith gas flow set value, and recording.
further, in step 04, if the absolute value of the difference between the ith gas flow rate set value and the corresponding actual gas flow rate value exceeds the error allowable range, an alarm may be issued. In the embodiment, when the difference value between the set gas flow value and the corresponding actual gas flow value exceeds the error allowable range, an alarm is thrown out, so that a worker can be conveniently and timely notified to maintain.
Step 05: judging whether i is equal to N, if so, performing step 06; if not, go to step 08.
step 06: and performing linear fitting according to the N gas flow set values and the gas flow compensation values corresponding to the N gas flow set values to obtain a functional relation between the N gas flow set values and the gas flow compensation values corresponding to the N gas flow set values, and taking the functional relation as a compensation relation.
Step 07: and (6) ending.
Step 08: let i equal i +1 and return to step 02.
in some embodiments of the present invention, the linear fit may be performed by a least squares method. The least square method is matched by the optimal function of the minimum error square sum searching data, and the principle is simple and easy to realize. Of course, other fitting methods can be used, and the present invention is not limited thereto.
In the embodiment of the invention, by utilizing the functional relation, any gas flow set value has a gas flow compensation value corresponding to the gas flow set value within the range of the gas flow controller, so that the full compensation effect on the range of the gas flow controller can be realized, the compensation comprehensiveness is ensured, and the accuracy of the actual output of the gas flow in the normal process is ensured.
step S5: and outputting the gas flow compensation value to the gas flow controller.
Step S6: and (6) ending.
Step S7: an alarm is given and step S6 is executed. According to the calibration method of the gas flow controller provided by the embodiment of the invention, when the absolute value of the difference value between the gas flow set value and the actual gas flow value is less than or equal to the preset threshold value, the gas flow compensation value corresponding to the gas flow set value is obtained according to the pre-established compensation relation, and the gas flow compensation value is output to the gas flow controller. The embodiment of the invention can perform online compensation on the actual gas flow value of the gas flow controller according to the pre-established compensation relationship, provides a calibration means for the calibration of the gas flow controller, fills the blank that the existing gas flow controller has no compensation, does not need to replace the gas flow controller or a gas flow controller supplier to calibrate the output of the gas flow controller when the output error of the gas flow controller is larger, and improves the convenience of equipment debugging and maintenance; therefore, according to the embodiment, the maintenance cost of the gas flow controller is saved, the time consumed for calibrating the gas flow controller is reduced, and the debugging convenience and the debugging efficiency of the gas flow controller are improved.
further, the technical scheme provided by the embodiment can compensate the flow controller of which the output value does not exceed the compensation range, and alarm the controller of which the output value exceeds the compensation range, so that the reliable operation of the flow controller is guaranteed.
as shown in fig. 3, a flow chart of a calibration method for a flow controller according to an embodiment of the present invention is shown, where the calibration method for a flow controller according to the embodiment of the present invention includes:
Step 100: and starting.
Step 101: receiving a gas flow set value of the gas flow controller input by a user, and judging whether the gas flow set value is in the range of the gas flow controller; if yes, go to step 102; if not, go to step 108.
Step 102: and outputting the set value of the gas flow to the gas flow controller.
step 103: and detecting the actual gas flow value of the pipeline where the gas flow controller is located through the gas flow sensor.
step 104: judging whether the absolute value of the difference value between the set gas flow value and the actual gas flow value is less than or equal to a preset threshold value or not; if yes, go to step 105; if not, go to step 108.
Step 105: and obtaining a gas flow compensation value corresponding to the gas flow set value according to a pre-established compensation relation.
Step 106: and outputting the gas flow compensation value to the gas flow controller.
Step 107: and (6) ending.
step 108: an alarm is given and step 107 is executed.
According to the calibration method of the gas flow controller provided by the embodiment of the invention, when the gas flow set value of the gas flow controller input by a user is received, whether the gas flow set value is in the range of the gas flow controller is judged, and when the gas flow set value is in the range of the gas flow controller, the gas flow set value is output to the gas flow controller. The embodiment can judge the effectiveness of the gas flow set value input by the user, and ensures the safety and effectiveness of the calibration of the gas flow controller.
As shown in fig. 4, a flow chart of another calibration method for a flow controller according to an embodiment of the present invention is shown, where the calibration method for a flow controller according to an embodiment of the present invention includes:
Step 200: and starting.
Step 201: receiving a gas flow set value of the gas flow controller input by a user, and judging whether the gas flow set value is in the range of the gas flow controller; if yes, go to step 202; if not, go to step 208.
Step 202: and outputting the set value of the gas flow to the gas flow controller.
Step 203: and detecting the actual gas flow value of the pipeline where the gas flow controller is located through the gas flow sensor.
Step 204: and outputting a gas flow value of 0 to the gas flow controller.
Step 205: judging whether the absolute value of the difference value between the set gas flow value and the actual gas flow value is less than or equal to a preset threshold value or not; if yes, go to step 206; if not, go to step 209.
Step 206: and acquiring a gas flow compensation value corresponding to the gas flow set value according to a pre-established compensation relation.
step 207: and outputting the gas flow compensation value to the gas flow controller.
Step 208: and (6) ending.
step 209: an alarm is given and step 208 is executed.
according to the calibration method of the gas flow controller provided by the embodiment of the invention, after the actual gas flow value of the pipeline where the gas flow controller is located is detected through the gas flow sensor, the gas flow value with the value of 0 is output to the gas flow controller, so that the medium in the pipeline where the gas flow controller is located is closed, the waste of the medium is avoided, and the calibration cost of the gas flow controller is saved.
As another technical solution, an embodiment of the present invention further provides a calibration system for a gas flow controller, as shown in fig. 5, which is a schematic structural diagram of the calibration system for a gas flow controller provided in the embodiment of the present invention, in this embodiment, the calibration system for a gas flow controller includes: a control unit 1 and a gas flow sensor 2.
the gas flow sensor 2 is used for detecting an actual gas flow value of a pipeline where the gas flow controller is located, and sending the actual gas flow value to the control unit 1.
The control unit 1 is used for receiving a gas flow set value of the gas flow controller 3 input by a user and outputting the gas flow set value to the gas flow controller 3; judging whether the absolute value of the difference value between the set gas flow value and the actual gas flow value is less than or equal to a preset threshold value or not; if so, acquiring a gas flow compensation value corresponding to the gas flow set value according to a pre-established compensation relationship, and outputting the gas flow compensation value to the gas flow controller 3; if not, alarming; wherein, the compensation relation is used for showing the corresponding relation between different gas flow set values of the gas flow controller 3 in the range and the gas flow compensation value corresponding to one of the set values; each gas flow rate compensation value is an actual gas flow rate value outputted to the gas flow rate controller 3 when the actual gas flow rate value of the pipeline in which the gas flow rate controller 3 is located is equal to the gas flow rate set value.
According to the calibration system of the gas flow controller provided by the embodiment of the invention, the actual gas flow value of the pipeline where the flow controller is located is detected through the gas flow sensor, formula calculation is not used, the error of the actual flow is reduced, the time for obtaining the actual gas flow is greatly shortened, and the calibration accuracy is obviously improved; furthermore, the actual gas flow value of the gas flow controller can be compensated online according to the pre-established compensation relationship, a calibration means is provided for the calibration of the gas flow controller, the blank that the existing gas flow controller is not compensated is filled, when the output error of the gas flow controller is large, the gas flow controller does not need to be replaced or a gas flow controller supplier does not need to calibrate the output of the gas flow controller, and the convenience of equipment debugging and maintenance is improved; therefore, the fourth embodiment of the invention saves the maintenance cost of the gas flow controller, reduces the time consumption for calibrating the gas flow controller, and improves the debugging and maintenance convenience and debugging efficiency of the gas flow controller.
as another technical solution, the present invention further provides an air intake device, as shown in fig. 6, which is a schematic structural diagram of the air intake device provided in the embodiment of the present invention.
In an embodiment of the present invention, an air intake device includes: air inlet pipe 4 and setting up gas flow controller 3 and the on-off valve 5 on air inlet pipe 4, on-off valve 5 is located the low reaches of gas flow controller 3, and air inlet unit still includes: the calibration system for a gas flow controller according to any of the embodiments described above, wherein the gas flow sensor 2 is arranged on the inlet line 4 downstream of the on-off valve 5. In fig. 6, the Flow controller 3 is again identified as a MFC (Mass Flow Meter), and the gas inlet line 4 is used to deliver gas to the chamber 6. Further, in fig. 6, the control unit 1 is electrically connected to the flow sensor 2 and the flow controller 3, respectively, and is configured to collect a value of the flow sensor 2 and output a gas flow compensation value to the flow controller 3.
The gas inlet device provided by the embodiment of the invention comprises the calibration system of the gas flow controller in the embodiment, and can also automatically compensate the gas flow controller according to the pre-established compensation relationship, so that the maintenance cost is saved, the time consumption for calibrating the gas flow controller is reduced, and the convenience for debugging and maintaining the gas flow controller is improved.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (9)
1. A method of calibrating a gas flow controller, the method comprising the steps of:
S1, receiving a gas flow rate set value of the gas flow rate controller input by a user, and outputting the gas flow rate set value to the gas flow rate controller;
s2, detecting the actual gas flow value of the pipeline where the gas flow controller is located through a gas flow sensor;
s3, judging whether the absolute value of the difference value between the set value of the gas flow and the actual gas flow is less than or equal to a preset threshold value; if so, acquiring a gas flow compensation value corresponding to the gas flow set value according to a pre-established compensation relationship, and outputting the gas flow compensation value to the gas flow controller; if not, alarming;
Wherein, the compensation relation is used for representing the corresponding relation between different gas flow set values and one corresponding gas flow compensation value of the gas flow controller in the range of the gas flow controller; and each gas flow compensation value is an actual gas flow value which is output to the gas flow controller when the actual gas flow value of the pipeline where the gas flow controller is located is equal to the set gas flow value.
2. The method for calibrating a gas flow controller of claim 2, wherein said step S1 further comprises the steps of:
S11, receiving the gas flow rate set value of the gas flow rate controller inputted by the user, and determining whether the gas flow rate set value is within the range of the gas flow rate controller; if yes, go to step S12; if not, ending the flow;
s12: the gas flow rate set value is output to the gas flow rate controller, and step S2 is executed.
3. The method of calibrating a gas flow controller of claim 1 or 2, wherein said compensation relationship is established by:
S01, selecting N gas flow set values in the range of the gas flow controller in sequence from small to big;
s02, detecting an actual gas flow value of a pipeline where the gas flow controller is located, where i is 1,2, and N is a total number of the gas flow set values, corresponding to the ith gas flow set value, by the gas flow sensor;
S03, calculating the absolute value of the difference between the ith gas flow set value and the corresponding actual gas flow value, judging whether the absolute value of the difference exceeds the error allowable range, if not, adjusting the gas flow value output by the gas flow controller until the actual gas flow value of the pipeline where the gas flow controller is located is equal to the ith gas flow set value, setting the gas flow value output by the gas flow controller at the moment as the gas flow compensation value corresponding to the ith gas flow set value, and recording;
S04, judging whether i is equal to N, if yes, executing step S05; if not, making i equal to i +1, and returning to the step S02;
S05, performing linear fitting according to the N gas flow set values and the gas flow compensation values corresponding to the N gas flow set values one by one to obtain a functional relation between the N gas flow set values and the gas flow compensation values corresponding to the N gas flow set values one by one, and taking the functional relation as the compensation relation.
4. The method of calibrating a gas flow controller according to claim 3, wherein in step S05, a linear fit is performed by a least square method.
5. The method of calibrating a gas flow controller of claim 2, wherein the magnitude of the ith said flow setpoint satisfies the following equation:
S(i)＝Smax*i/10
Wherein S is(i)is the ith flow set value; smaxIs the maximum flow value of the range of the gas flow controller.
6. The method of calibrating a gas flow controller of claim 1 or 2, further comprising, after said step S2 and before said step S3, the step S4 of:
s4: and outputting a gas flow value with the value of 0 to the gas flow controller.
7. the method of calibrating a gas flow controller according to claim 3, wherein in step S03, an alarm is issued if the absolute value of the difference between the ith gas flow set value and the corresponding actual gas flow value exceeds an allowable error range.
8. A calibration system for a gas flow controller, comprising: a control unit, a gas flow sensor; wherein the content of the first and second substances,
The gas flow sensor is used for detecting an actual gas flow value of a pipeline where the gas flow controller is located and sending the actual gas flow value to the control unit;
The control unit is used for receiving a gas flow set value of the gas flow controller input by a user and outputting the gas flow set value to the gas flow controller; judging whether the absolute value of the difference value between the set gas flow value and the actual gas flow value is less than or equal to a preset threshold value or not; if so, acquiring a gas flow compensation value corresponding to the gas flow set value according to a pre-established compensation relationship, and outputting the gas flow compensation value to the gas flow controller; if not, alarming;
wherein, the compensation relation is used for representing the corresponding relation between different gas flow set values of the gas flow controller in the range of the gas flow controller and the gas flow compensation value corresponding to one of the different gas flow set values; and each gas flow compensation value is an actual gas flow value which is output to the gas flow controller when the actual gas flow value of the pipeline where the gas flow controller is located is equal to the set gas flow value.
9. an air inlet device comprises an air inlet pipeline, a gas flow controller and an on-off valve, wherein the gas flow controller and the on-off valve are arranged on the air inlet pipeline, the on-off valve is positioned at the downstream of the gas flow controller, and the air inlet device is characterized by further comprising: the calibration system for a gas flow controller of claim 8, wherein said gas flow sensor is disposed on said intake line downstream of said on-off valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910828034.2A CN110571171B (en) | 2019-09-03 | 2019-09-03 | Calibration method and calibration system of gas flow controller and gas inlet device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910828034.2A CN110571171B (en) | 2019-09-03 | 2019-09-03 | Calibration method and calibration system of gas flow controller and gas inlet device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110571171A true CN110571171A (en) | 2019-12-13 |
| CN110571171B CN110571171B (en) | 2022-05-27 |
Family
ID=68777624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910828034.2A Active CN110571171B (en) | 2019-09-03 | 2019-09-03 | Calibration method and calibration system of gas flow controller and gas inlet device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110571171B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111441437A (en) * | 2020-05-06 | 2020-07-24 | 深圳市博电电子技术有限公司 | Intelligent closestool flow calibration method and device and intelligent closestool |
| CN111501027A (en) * | 2019-12-27 | 2020-08-07 | 清华大学无锡应用技术研究院 | Method for uniformly controlling flow field of chemical vapor deposition equipment |
| CN111855179A (en) * | 2020-07-27 | 2020-10-30 | 北京七星华创流量计有限公司 | Calibration method and calibration device for fluid mass flow controller |
| CN113061872A (en) * | 2020-01-02 | 2021-07-02 | 长鑫存储技术有限公司 | Flow calibration system and method and gas supply system |
| CN113161265A (en) * | 2021-04-16 | 2021-07-23 | 北京北方华创微电子装备有限公司 | Gas concentration control method, gas concentration control device, and semiconductor device |
| CN113687666A (en) * | 2021-08-19 | 2021-11-23 | 上海智能新能源汽车科创功能平台有限公司 | Gas supply method, system and device of fuel cell testing system |
| CN114533224A (en) * | 2022-03-25 | 2022-05-27 | 深圳市创谷科技发展有限公司 | Pneumoperitoneum machine operation control method and device and pneumoperitoneum machine |
| CN115948727A (en) * | 2023-01-10 | 2023-04-11 | 江苏微导纳米科技股份有限公司 | Gas flow calibration device and method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003254878A (en) * | 2002-02-28 | 2003-09-10 | Avl List Gmbh | Measurement system for exhaust gas |
| JP2009087126A (en) * | 2007-10-01 | 2009-04-23 | Hitachi Metals Ltd | Mass flow control device and real gas mass flow control method |
| CN101501597A (en) * | 2006-08-03 | 2009-08-05 | 日立金属株式会社 | Flow control using mass flow controller |
| CN102576231A (en) * | 2009-12-25 | 2012-07-11 | 株式会社堀场Stec | Mass flow controller system |
| CN104076830A (en) * | 2014-06-12 | 2014-10-01 | 北京七星华创电子股份有限公司 | Mass flow control device, system and method used for integrated gas delivery system |
| CN104750125A (en) * | 2013-12-31 | 2015-07-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Calibrating method and device for mass flow controller |
| US20180286705A1 (en) * | 2015-08-17 | 2018-10-04 | Ichor Systems, Inc. | Fluid control system |
| CN109696216A (en) * | 2018-12-24 | 2019-04-30 | 中国科学院微电子研究所 | Compensation method, device, storage medium, processor and the system of flow signal |
-
2019
- 2019-09-03 CN CN201910828034.2A patent/CN110571171B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003254878A (en) * | 2002-02-28 | 2003-09-10 | Avl List Gmbh | Measurement system for exhaust gas |
| CN101501597A (en) * | 2006-08-03 | 2009-08-05 | 日立金属株式会社 | Flow control using mass flow controller |
| JP2009087126A (en) * | 2007-10-01 | 2009-04-23 | Hitachi Metals Ltd | Mass flow control device and real gas mass flow control method |
| CN102576231A (en) * | 2009-12-25 | 2012-07-11 | 株式会社堀场Stec | Mass flow controller system |
| CN104750125A (en) * | 2013-12-31 | 2015-07-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Calibrating method and device for mass flow controller |
| CN104076830A (en) * | 2014-06-12 | 2014-10-01 | 北京七星华创电子股份有限公司 | Mass flow control device, system and method used for integrated gas delivery system |
| US20180286705A1 (en) * | 2015-08-17 | 2018-10-04 | Ichor Systems, Inc. | Fluid control system |
| CN109696216A (en) * | 2018-12-24 | 2019-04-30 | 中国科学院微电子研究所 | Compensation method, device, storage medium, processor and the system of flow signal |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111501027A (en) * | 2019-12-27 | 2020-08-07 | 清华大学无锡应用技术研究院 | Method for uniformly controlling flow field of chemical vapor deposition equipment |
| CN111501027B (en) * | 2019-12-27 | 2022-01-21 | 清华大学无锡应用技术研究院 | Method for uniformly controlling flow field of chemical vapor deposition equipment |
| CN113061872A (en) * | 2020-01-02 | 2021-07-02 | 长鑫存储技术有限公司 | Flow calibration system and method and gas supply system |
| CN111441437A (en) * | 2020-05-06 | 2020-07-24 | 深圳市博电电子技术有限公司 | Intelligent closestool flow calibration method and device and intelligent closestool |
| CN111441437B (en) * | 2020-05-06 | 2021-10-26 | 深圳市博电电子技术有限公司 | Intelligent closestool flow calibration method and device and intelligent closestool |
| CN111855179A (en) * | 2020-07-27 | 2020-10-30 | 北京七星华创流量计有限公司 | Calibration method and calibration device for fluid mass flow controller |
| CN113161265A (en) * | 2021-04-16 | 2021-07-23 | 北京北方华创微电子装备有限公司 | Gas concentration control method, gas concentration control device, and semiconductor device |
| CN113161265B (en) * | 2021-04-16 | 2024-04-16 | 北京北方华创微电子装备有限公司 | Gas concentration control method, gas concentration control device and semiconductor device |
| CN113687666A (en) * | 2021-08-19 | 2021-11-23 | 上海智能新能源汽车科创功能平台有限公司 | Gas supply method, system and device of fuel cell testing system |
| CN113687666B (en) * | 2021-08-19 | 2023-11-03 | 上海智能新能源汽车科创功能平台有限公司 | Gas supply method, system and device of fuel cell test system |
| CN114533224A (en) * | 2022-03-25 | 2022-05-27 | 深圳市创谷科技发展有限公司 | Pneumoperitoneum machine operation control method and device and pneumoperitoneum machine |
| CN115948727A (en) * | 2023-01-10 | 2023-04-11 | 江苏微导纳米科技股份有限公司 | Gas flow calibration device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110571171B (en) | 2022-05-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110571171B (en) | Calibration method and calibration system of gas flow controller and gas inlet device | |
| US10876870B2 (en) | Method of determining flow rate of a gas in a substrate processing system | |
| KR101425007B1 (en) | Mass flow verifiers capable of providing different volumes, and related methods | |
| JP5222935B2 (en) | Gas flow rate verification unit | |
| US8205629B2 (en) | Real time lead-line characterization for MFC flow verification | |
| JP5337542B2 (en) | Mass flow meter, mass flow controller, mass flow meter system and mass flow controller system including them | |
| US10684159B2 (en) | Methods, systems, and apparatus for mass flow verification based on choked flow | |
| US7881886B1 (en) | Methods for performing transient flow prediction and verification using discharge coefficients | |
| CN100473956C (en) | Gas flow rate calibrating method | |
| CN101536159A (en) | Methods for performing actual flow verification | |
| KR20180100203A (en) | Flow control device, flow rate calibration method of flow control device, flow measurement device and flow measurement method using flow measurement device | |
| JP2013084857A (en) | Gas flow rate monitoring system | |
| US20110125445A1 (en) | Thermal type mass flow meter, and thermal type mass flow control device | |
| US20040149031A1 (en) | Bubble level meter and related method | |
| US10871786B2 (en) | Substrate processing system and method of determining flow rate of gas | |
| WO2004020958A1 (en) | Thermal flowmeter | |
| CN113981415B (en) | Method and device for determining abnormal operation of flowmeter of tubular PECVD system | |
| CN109738043A (en) | A method of for discharging designated volume liquid | |
| JP2018063642A (en) | Method of obtaining gas output flow rate outputted by flow controller of substrate processing apparatus | |
| US10775211B2 (en) | Real-time vessel monitoring system | |
| CN100498626C (en) | Gas calibration method for semiconductor equipment | |
| JP7027441B2 (en) | Methods for detecting leaks in energy converter systems | |
| CN106908197B (en) | A kind of pressure gauge temperature drift calibration bearing calibration | |
| CN106556479A (en) | A kind of heat loss survey device and its heat loss survey method | |
| KR102598332B1 (en) | System and Method for evaluating water vapor pumping performance of a vacuum pump |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |