CN107045265A - The recombination method of tilting scan data in direct-write type lithography machine - Google Patents
The recombination method of tilting scan data in direct-write type lithography machine Download PDFInfo
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
- G03F7/70508—Data handling in all parts of the microlithographic apparatus, e.g. handling pattern data for addressable masks or data transfer to or from different components within the exposure apparatus
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F12/00—Accessing, addressing or allocating within memory systems or architectures
- G06F12/02—Addressing or allocation; Relocation
- G06F12/08—Addressing or allocation; Relocation in hierarchically structured memory systems, e.g. virtual memory systems
- G06F12/10—Address translation
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Abstract
The present invention relates to a kind of recombination method, the recombination method of tilting scan data, belongs to the technical field of direct-write type lithography machine tilting data processing in especially a kind of direct-write type lithography machine.The present invention enters line translation restructuring to tilt data, data storage is carried out using RAM in FGA according to obliquity factor, the write-in and reading of data needed for realizing, hardware manufacturing cost can be reduced, the speed of data conversion restructuring is improved, so as to effectively improve exposure resolution ratio and production production capacity.
Description
Technical field
The present invention relates to a kind of recombination method, the restructuring side of tilting scan data in especially a kind of direct-write type lithography machine
Method, belongs to the technical field of direct-write type lithography machine tilting data processing.
Background technology
Direct-write type lithography machine equipment is also known as the direct transfer equipment of image, is a key in semiconductor and PCB production fields
Equipment.Compared with traditional semi-automatic exposure equipment, it replaces the mask plate of conventional lithography machine using pattern generator, so as to
Directly the graph data of computer is exposed on wafer or pcb board, the making sheet time is saved and makes the expense of mask plate.And be
Further raising equipment exposure resolution ratio and production production capacity, in the data processing that image is directly shifted, can use tilting
Data processing method.
Due to the data processing method using tilting, and the intrinsic row of pattern generator digital micro-mirror chip (DMD)
Cloth structure, input data that the data after being tilted over can not be directly as DMD, it is necessary to by conversion restructuring, it is final arrange be in
Existing gap tilt effect, and it is suitable for the data format of DMD eyeglass arrangements.
Usually, the conversion restructuring of data can be completed in FPGA, generally using extra addition RAM, by the number put in order
According to keeping in RAM, it is necessary to be read when using, but can so increase manufacturing cost and hardware complexity.Or using in FPGA
The logical resource progress data conversion restructuring in portion, generally non real-time nature, data processing speed can be seriously reduced, and then can not
The purpose that increase equipment capacity is scanned using tilting is reached well.
The content of the invention
The purpose of the present invention is to overcome the deficiencies in the prior art to be swept there is provided tilting in a kind of direct-write type lithography machine
The recombination method of data is retouched, it can reduce hardware manufacturing cost, the speed of data conversion restructuring is improved, so as to effectively improve exposure
Resolution ratio and production production capacity.
The recombination method of tilting scan data in the technical scheme provided according to the present invention, a kind of direct-write type lithography machine,
Methods described comprises the following steps：
Step 1, the digital micro-mirror chip DMD to 1920*1080P, according to obliquity factor K, obtain the data of tilt data
Total amount is 2048*K, wherein, the bit wide of each tilt data is 256, and each tilt data is divided into K groups, and every group of data are
256/K, K=2n, n=1,2,3 ... ..., 8；The K RAMs temporary for data are chosen in FPGA；
Step 2, by all first (256/K) positions data in 4*K 256 data before in above-mentioned tilt data, group
1024 data before the first row into digital micro-mirror chip DMD to be written before the first row in 1024 eyeglasses；By above-mentioned inclination
All first (256/K) digit data after in data in 4*K 256 data, constitute digital micro-mirror chip DMD to be written
1024 data after the first row after middle the first row in 1024 eyeglasses；
By all second (256/K) positions data in preceding 4*K 256 data in above-mentioned tilt data, constitute to be written
Enter 1024 data before the second row in digital micro-mirror chip DMD before the second row in 1024 eyeglasses, and by above-mentioned tilt data
In after all second (256/K) positions data in 4*K 256 data, constitute second in digital micro-mirror chip DMD to be written
1024 data after the second row after row in 102 eyeglasses；
Above-mentioned data building form is repeated, until by K row eyeglasses in all tilt datas and digital micro-mirror chip DMD
Preceding 1024 eyeglasses, rear 1024 eyeglasses are corresponded；
Step 3, by 2048 data of the first row in above-mentioned digital micro-mirror chip DMD, be divided into 64 256 digits
According to, and obtain 2048 data of the first row in digital micro-mirror chip DMD according to 64 256 data of division；Wherein, the first row
First 256 data by first 256 data corresponding first (256/K) position into (K/2) individual 256 data
Data and (1+4K) individual 256 data are to corresponding first (256/K) position data of (K/2+4K) individual 256 data
Composition；
Second 256 data of the first row are by (1+K/2) position data into (K) individual 256 data corresponding
One (256/K) position data and (1+9K/2) individual 256 data are corresponding first to (5K) individual 256 data
(256/K) position data composition；
Above-mentioned data manipulation is repeated, until 256 all data of the first row in digital micro-mirror chip DMD are obtained, and
256 all data of line k in digital micro-mirror chip DMD；
In step 4,256 data all to K rows in above-mentioned digital micro-mirror chip DMD, division obtains first 32 256
Data and rear 32 256 data；Wherein, to preceding 32 256 data of digital micromirror chip DMD the first rows, first 256
K (256/K) position data included in data are respectively written into K RAM first address area, second 256 data
Included in K (256/K) positions data be respectively written into K RAM second address area, repeat said write and operate, directly
K RAM the 32nd address area is respectively written into K (256/K) position data included in the 32nd 256 data
Domain；
To rear 32 256 data of digital micromirror chip DMD the first rows, K included in the 33rd 256 data
(256/K) position data are respectively written into included in K RAM the 33rd address area, the 34th 256 data K
(256/K) position data are respectively written into K RAM the 34th address area, said write operation are repeated, until the 64th
K (256/K) position data included in 256 data are respectively written into the 64th bit address region；
33rd 256 data write the data order in K RAM and write with first 256 data in K RAM
Data order differs four groups of data；As (K/2)<When 32, to preceding 32 256 data or rear 32 256 data, at interval of
(K/2) individual 256 data write sequence in K RAM is identical, in (K/2) individual 256 data, in K RAM of adjacent write-in
Data order there is the dislocation of one group of data；
Above-mentioned data manipulation is repeated, until 256 all data of K rows are write in K RAM；
Step 5, the mode write according to above-mentioned data, under a clock, while the data accessed in K RAM are read,
To obtain 256 data write in digital micro-mirror chip DMD in a line eyeglass needed for each eyeglass；Repeat above-mentioned data write-in
Operation, until K row eyeglasses in digital micro-mirror chip DMD are write into full.
Opened up simultaneously in FPGA comprising K RAM in two RAM blocks, each RAM block, to being write in a RAM block
During data, reading data are carried out to another RAM block.
Advantages of the present invention：According to obliquity factor, line translation restructuring is entered to tilt data, hardware manufacturing cost can be reduced,
The speed of data conversion restructuring is improved, so as to effectively improve exposure resolution ratio and production production capacity.
Brief description of the drawings
Fig. 1 for the present invention with obliquity factor K=8 when, the schematic diagram of 256 tilt datas.
Fig. 2 is of the invention in obliquity factor K=8, the data total amount schematic diagram of tilt data.
Fig. 3 is the schematic diagram data of the invention for writing the first row eyeglass after restructuring in obliquity factor K=8.
Fig. 4, in obliquity factor K=8, writes the schematic diagram data of the second row eyeglass to be of the invention after restructuring.
Fig. 5 is of the invention in obliquity factor K=8, the schematic diagram in data write-in RAM.
Fig. 6 is of the invention in obliquity factor K=8, the schematic diagram that data are read from RAM.
Fig. 7 uses the schematic diagram of ping-pong operation for the present invention to the reading of data.
Embodiment
With reference to specific drawings and examples, the invention will be further described.
In order to be able to reduce hardware manufacturing cost, the speed of data conversion restructuring is improved, so as to effectively improve exposure resolution ratio
And production capacity is produced, the present invention comprises the following steps：
Step 1, the digital micro-mirror chip DMD to 1920*1080P, according to obliquity factor K, obtain the data of tilt data
Total amount is 2048*K, wherein, the bit wide of each tilt data is 256, and each tilt data is divided into K groups, and every group of data are
256/K, K=2n, n=1,2,3 ... ..., 8；The K RAMs temporary for data are chosen in FPGA；
Specifically, obliquity factor K quantity is consistent with the line number of eyeglass in digital micro-mirror chip DMD, for one really
Fixed digital micro-mirror chip DMD, then obliquity factor K determine therewith.After obliquity factor K determinations, the data total amount of tilt data
Determine therewith.The concrete numerical value of tilt data, specially this technology relevant with data to be written in digital micro-mirror chip DMD
Known to the personnel of field, here is omitted., usually, RAM data bit width is also 256/K.Following specific data recombinations
Change procedure is also completed in FPGA.
Step 2, by all first (256/K) positions data in 4*K 256 data before in above-mentioned tilt data, group
1024 data before the first row into digital micro-mirror chip DMD to be written before the first row in 1024 eyeglasses；By above-mentioned inclination
All first (256/K) digit data after in data in 4*K 256 data, constitute digital micro-mirror chip DMD to be written
1024 data after the first row after middle the first row in 1024 eyeglasses；
By all second (256/K) positions data in preceding 4*K 256 data in above-mentioned tilt data, constitute to be written
Enter 1024 data before the second row in digital micro-mirror chip DMD before the second row in 1024 eyeglasses, and by above-mentioned tilt data
In after all second (256/K) positions data in 4*K 256 data, constitute second in digital micro-mirror chip DMD to be written
1024 data after the second row after row in 102 eyeglasses；
Above-mentioned data building form is repeated, until by K row eyeglasses in all tilt datas and digital micro-mirror chip DMD
Preceding 1024 eyeglasses, rear 1024 eyeglasses are corresponded；
Step 3, by 2048 data of the first row in above-mentioned digital micro-mirror chip DMD, be divided into 64 256 digits
According to, and obtain 2048 data of the first row in digital micro-mirror chip DMD according to 64 256 data of division；Wherein, the first row
First 256 data by first 256 data corresponding first (256/K) position into (K/2) individual 256 data
Data and (1+4K) individual 256 data are to corresponding first (256/K) position data of (K/2+4K) individual 256 data
Composition；
Second 256 data of the first row are by (1+K/2) position data into (K) individual 256 data corresponding
One (256/K) position data and (1+9K/2) individual 256 data are corresponding first to (5K) individual 256 data
(256/K) position data composition；
Above-mentioned data manipulation is repeated, until 256 all data of the first row in digital micro-mirror chip DMD are obtained, and
256 all data of line k in digital micro-mirror chip DMD；
In the embodiment of the present invention, first 256 data of the first row are by first 256 data to (K/2) individual 256
Corresponding first (256/K) position data and (1+4K) individual 256 data are individual 256 to (K/2+4K) in the data of position
Corresponding first (256/K) position data composition of data, is specifically referred to, from first (256/K) position of first 256 data
Data continuously take it is corresponding first (256/K) to (K/2) individual 256 data, meanwhile, from individual 256 digits of first (1+4K)
According to first (256/K) data continuously take it is corresponding first (256/K) to (K/2+4K) individual 256 data so that
To first 256 data of the first row, following data manipulation modes is similar, no longer describes one by one herein.
In step 4,256 data all to K rows in above-mentioned digital micro-mirror chip DMD, division obtains first 32 256
Data and rear 32 256 data；Wherein, to preceding 32 256 data of digital micromirror chip DMD the first rows, first 256
K (256/K) position data included in data are respectively written into K RAM first address area, second 256 data
Included in K (256/K) positions data be respectively written into K RAM second address area, repeat said write and operate, directly
K RAM the 32nd address area is respectively written into K (256/K) position data included in the 32nd 256 data
Domain；
To rear 32 256 data of digital micromirror chip DMD the first rows, K included in the 33rd 256 data
(256/K) position data are respectively written into included in K RAM the 33rd address area, the 34th 256 data K
(256/K) position data are respectively written into K RAM the 34th address area, said write operation are repeated, until the 64th
K (256/K) position data included in 256 data are respectively written into the 64th bit address region；
33rd 256 data write the data order in K RAM and write with first 256 data in K RAM
Data order differs four groups of data；As (K/2)<When 32, to preceding 32 256 data or rear 32 256 data, at interval of
(K/2) individual 256 data write sequence in K RAM is identical, in (K/2) individual 256 data, in K RAM of adjacent write-in
Data order there is the dislocation of one group of data；
Above-mentioned data manipulation is repeated, until 256 all data of K rows are write in K RAM；
In the embodiment of the present invention, when (K/2) >=32, due to the pass with preceding 32 256 data, rear 32 256 data
System, then in the absence of above-mentioned data order access relationships.
Step 5, the mode write according to above-mentioned data, under a clock, while the data accessed in K RAM are read,
To obtain 256 data write in digital micro-mirror chip DMD in a line eyeglass needed for each eyeglass；Repeat above-mentioned data write-in
Operation, until K row eyeglasses in digital micro-mirror chip DMD are write into full.
As shown in fig. 7, opened up comprising K RAM in two RAM blocks, each RAM block, to one in FPGA simultaneously
In RAM block during write-in data, reading data are carried out to another RAM block.In the embodiment of the present invention, read by two RAM data
Extract operation, can further increase recombination efficiency, reduce reorganization time.
As shown in Fig. 1~Fig. 6, by taking obliquity factor K=8 as an example, the detailed process to the present invention is illustrated, specifically：
Fig. 1 is to be tilted over 256 bit data formats exported afterwards, during obliquity factor K=8, and the data of output can be according to K=
8 are divided into 8 groups, and every group of data are 32.
As shown in Fig. 2 when as K=8, the total data volume of tilt data is 2048*8=16384, is divided into 64 256
Position, each 256 are the data structure form shown in Fig. 1, i.e., the total amount of data correspondence digital micro-mirror of described tilt data
Chip DMD 8 row eyeglasses, often row eyeglass need 2048 data.
As shown in Figure 3, Figure 4, tilt data write-in digital micro-mirror chip DMD rule is：First 32 256 of tilt data
All first 32 in the data of position, constitute before 1024 data, write-in digital micro-mirror chip DMD the first row eyeglass
Among 1024 eyeglasses；All first 32 in rear 32 256 data of tilt data, 1024 data are constituted, are write
Among rear 1024 eyeglasses for the first row eyeglass for entering digital micro-mirror chip DMD.
Similarly, all second 32 in preceding 32 256 data of tilt data, constitute 1024 data, to be written
Among preceding 1024 eyeglasses for the second row eyeglass for entering digital micro-mirror chip DMD；In rear 32 256 data of tilt data
All second 32, constitute 1024 data, rear 1024 eyeglasses of digital micro-mirror chip DMD to be written the second row eyeglass
It is central.By that analogy, until tilt data can write 8 completely corresponding row eyeglasses.
Actually digital micro-mirror chip DMD data write-in channel width is similarly 256, the number for restructuring of remapping
According to first 256 of, digital micro-mirror chip DMD the first row eyeglass, it is necessary to obtain above-mentioned the 1st 256 obtained in data
Position data, the 2nd 256 data, the 3rd 256 data, first 32 data of the 4th 256 data and the 33rd
256 data, the 34th 256 data, the 35th 256 data, first 32 data of the 36th 256 data.Together
Reason, 256, digital micro-mirror chip DMD the first row eyeglass second is, it is necessary to obtain above-mentioned the 5th 256 digits for obtaining data
According to, the 6th 256 data, the 7th 256 data, first 32 data of the 8th 256 data and the 37th 256
Data, the 38th 256 data, the 39th 256 data, first 32 data of the 40th 256 data.With such
Push away, until the first row eyeglass can be write to full.
First 256 to digital micromirror chip DMD the second row eyeglass above-mentioned obtain the 1st of data, it is necessary to obtain
Individual 256 data, the 2nd 256 data, the 3rd 256 data, second 32 data and of the 4th 256 data
33 256 data, the 34th 256 data, the 35th 256 data, second 32 digit of the 36th 256 data
According to.Similarly, second 256, the second row eyeglass, it is necessary to obtain above-mentioned the 5th 256 data for obtaining data, the 6th 256
Data, the 7th 256 data, second 32 data of the 8th 256 data and the 37th 256 data, the 38th 256
Position data, the 39th 256 data, second 32 data of the 40th 256 data.By that analogy, until can be by second
Row eyeglass is write full.
According to above-mentioned data manipulation, obtain that full the third line eyeglass, fourth line eyeglass, fifth line eyeglass, the 6th row mirror can be write
Piece, the 7th row eyeglass, the inclination recombination data of the 8th row eyeglass.
As shown in figure 5, according to above-mentioned data recombination conversion process, choosing K=8 RAM, each RAM data bit width
For 32.Obtain to write after the data of completely all eyeglasses after restructuring conversion, to the data of the first row eyeglass, writing data into
During RAM, i.e., 8 32 data that first 256 data are divided into group are respectively written into 8 RAM first address area；The
8 32 data that two 256 data are divided into group, rule as illustrated, misplace one group of data, is then respectively written into 8
Individual RAM second address area.According to such a rule, diagrammatically, preceding 32 256 data are respectively written into 8
RAM preceding 32 address areas.
To rear 32 256 data, since 4 32 grouped datas that misplace, the 33rd in 8 RAM is respectively written into
Address area to the 64th address area.For the write-in RAM processes of other row eyeglasses, described above is may be referred to, herein not
Repeat again.
As shown in fig. 6, RAM rule is write according to recombination data, can be simultaneously from the of RAM1 under a CLK clock
One address area, RAM2 second address area, RAM3 the 3rd address area, RAM4 the 4th address area,
RAM5 the 33rd address area, RAM6 the 34th address area, RAM7 the 35th address area,
RAM8 the 36th address area read the 1st 256, the 2nd 256 data, the 3rd 256 data, the 4th 256
First 32 data of position data and the 33rd 256 data, the 34th 256 data, the 35th 256 data, 36
First 32 data of individual 256 data, reformulate first eyeglass that first 256 data writes the first row eyeglass
It is interior.
Similarly, can simultaneously from RAM1 the 5th address area, RAM2 the 6th address area, RAM3 the 7th address
Region, RAM4 the 8th address area, RAM5 the 37th address area, RAM6 the 38th address area, the 39th of RAM7 the
Individual address area, RAM8 the 40th address area read the 5th 256 data, the 6th 256 data, the 7th 256 digits
According to, first 32 data of the 8th 256 data and the 37th 256 data, the 38th 256 data, the 39th 256
Position data, first 32 data of the 40th 256 data, reformulate second 256 digit and write the first row mirror according to this
In second eyeglass of piece.By that analogy, until 8 row eyeglasses are all write into full.
As shown in Figure 5, Figure 6, in the way of being read in the way of above-mentioned data write-in RAM and from RAM, it can reach most
Fast write-in and reading speed, the write-in of all 256 data and read operation, can be completed, no under a CLK clock
The time can be increased because of the restructuring of data.
Claims (2)
1. the recombination method of tilting scan data in a kind of direct-write type lithography machine, it is characterized in that：Methods described includes following step
Suddenly：
Step 1, the digital micro-mirror chip DMD to 1920*1080P, according to obliquity factor K, obtain the data total amount of tilt data
For 2048*K, wherein, the bit wide of each tilt data is 256, and each tilt data is divided into K groups, and every group of data are 256/K
Position, K=2n, n=1,2,3 ... ..., 8；The K RAMs temporary for data are chosen in FPGA；
Step 2, by all first (256/K) positions data in 4*K 256 data before in above-mentioned tilt data, composition is treated
Write 1024 data before the first row in digital micro-mirror chip DMD before the first row in 1024 eyeglasses；By above-mentioned tilt data
In after all first (256/K) digit data in 4*K 256 data, constitute in digital micro-mirror chip DMD to be written the
1024 data after the first row after a line in 1024 eyeglasses；
By all second (256/K) positions data in preceding 4*K 256 data in above-mentioned tilt data, number to be written is constituted
1024 data before the second row in word micromirror chip DMD before the second row in 1024 eyeglasses, and by after in above-mentioned tilt data
All second (256/K) positions data in 4*K 256 data, are constituted in digital micro-mirror chip DMD to be written after second row
1024 data after the second row in 102 eyeglasses；
Above-mentioned data building form is repeated, until by before K row eyeglasses in all tilt datas and digital micro-mirror chip DMD
1024 eyeglasses, rear 1024 eyeglasses are corresponded；
Step 3,64 256 data in 2048 data of the first row in above-mentioned digital micro-mirror chip DMD, will be divided into, and
2048 data of the first row in digital micro-mirror chip DMD are obtained according to the 64 of division 256 data；Wherein, the of the first row
One 256 data corresponding first (256/K) digit into (K/2) individual 256 data by first 256 data
According to and (1+4K) individual 256 data to corresponding first (256/K) position data group of (K/2+4K) individual 256 data
Into；
Second 256 data of the first row are by (1+K/2) position data into (K) individual 256 data corresponding first
(256/K) position data and (1+9K/2) individual 256 data are corresponding first (256/K) to (5K) individual 256 data
Position data composition；
Above-mentioned data manipulation is repeated, until 256 all data of the first row in digital micro-mirror chip DMD are obtained, and numeral
256 all data of line k in micromirror chip DMD；
In step 4,256 data all to K rows in above-mentioned digital micro-mirror chip DMD, division obtains preceding 32 256 data
With rear 32 256 data；Wherein, to preceding 32 256 data of digital micromirror chip DMD the first rows, first 256 data
Included in K (256/K) positions data be respectively written into institute in K RAM first address area, second 256 data
Comprising K (256/K) positions data be respectively written into K RAM second address area, said write operation is repeated, up to the
K (256/K) position data included in 32 256 data are respectively written into K RAM the 32nd address area；
To rear 32 256 data of digital micromirror chip DMD the first rows, K included in the 33rd 256 data
(256/K) position data are respectively written into included in K RAM the 33rd address area, the 34th 256 data K
(256/K) position data are respectively written into K RAM the 34th address area, said write operation are repeated, until the 64th
K (256/K) position data included in 256 data are respectively written into the 64th bit address region；
33rd 256 data write the data that the data order in K RAM is write in K RAM with first 256 data
Order differs four groups of data；As (K/2)<When 32, to preceding 32 256 data or rear 32 256 data, at interval of (K/2)
Individual 256 data write sequence in K RAM is identical, in (K/2) individual 256 data, the data in K RAM of adjacent write-in
There is the dislocation of one group of data in order；
Above-mentioned data manipulation is repeated, until 256 all data of K rows are write in K RAM；
Step 5, the mode write according to above-mentioned data, under a clock, while the data accessed in K RAM are read, with
256 data write into digital micro-mirror chip DMD in a line eyeglass needed for each eyeglass；Repeat above-mentioned data write-in behaviour
Make, until K row eyeglasses in digital micro-mirror chip DMD are write into full.
2. the recombination method of tilting scan data in direct-write type lithography machine according to claim 1, it is characterized in that：
Opened up simultaneously in FPGA comprising K RAM in two RAM blocks, each RAM block, it is right when to writing data in a RAM block
Another RAM block carries out reading data.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710131473.9A CN107045265B (en) | 2017-03-07 | 2017-03-07 | The recombination method of tilting scan data in direct-write type lithography machine |
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| CN201710131473.9A CN107045265B (en) | 2017-03-07 | 2017-03-07 | The recombination method of tilting scan data in direct-write type lithography machine |
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| CN107506153A (en) * | 2017-09-26 | 2017-12-22 | 深信服科技股份有限公司 | A kind of data compression method, data decompression method and related system |
| CN109656101A (en) * | 2018-12-07 | 2019-04-19 | 东莞市多普技术研发有限公司 | A kind of data processing method of digital micro-mirror dip sweeping |
| WO2020238118A1 (en) * | 2019-05-27 | 2020-12-03 | 苏州苏大维格科技集团股份有限公司 | Photoetching method |
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Denomination of invention: Reorganization of Tilt Scan Data in Direct Write Lithography Effective date of registration: 20221219 Granted publication date: 20190416 Pledgee: Bank of Jiangsu Limited by Share Ltd. Wuxi branch Pledgor: WUXI YSPHOTECH SEMICONDUCTOR TECHNOLOGY CO.,LTD. Registration number: Y2022320010819 |