CN107045265B - The recombination method of tilting scan data in direct-write type lithography machine - Google Patents
The recombination method of tilting scan data in direct-write type lithography machine Download PDFInfo
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
- G03F7/70508—Data handling in all parts of the microlithographic apparatus, e.g. handling pattern data for addressable masks or data transfer to or from different components within the exposure apparatus
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F12/00—Accessing, addressing or allocating within memory systems or architectures
- G06F12/02—Addressing or allocation; Relocation
- G06F12/08—Addressing or allocation; Relocation in hierarchically structured memory systems, e.g. virtual memory systems
- G06F12/10—Address translation
Abstract
The present invention relates to a kind of recombination method, the recombination method of tilting scan data, belongs to the technical field of direct-write type lithography machine tilting data processing in especially a kind of direct-write type lithography machine.The present invention carries out transformation recombination according to obliquity factor, to tilt data, carries out data storage using RAM in FGA, the write-in and reading of data needed for realizing, hardware manufacturing cost can be reduced, the speed of data transformation recombination is improved, to effectively improve exposure resolution ratio and production production capacity.
Description
Technical field
The present invention relates to a kind of recombination method, the recombination side of tilting scan data in especially a kind of direct-write type lithography machine
Method belongs to the technical field of direct-write type lithography machine tilting data processing.
Background technique
Direct-write type lithography machine equipment is also known as the direct transfer equipment of image, is a key in semiconductor and PCB production field
Equipment.Compared with traditional semi-automatic exposure equipment, the mask plate of conventional lithography machine is replaced using pattern generator, so as to
Directly the graph data of computer is exposed on wafer or pcb board, save the making sheet time and makes the expense of mask plate.And it is
Further increasing equipment exposure resolution ratio and production production capacity in the data processing that image directly shifts can use tilting
Data processing method.
Due to the row for using the data processing method and pattern generator digital micro-mirror chip (DMD) of tilting intrinsic
Cloth structure, data after being tilted over cannot need to recombinate by transformation directly as the input data of DMD, it is final arrange in
Existing gap tilt effect, and it is suitable for the data format of DMD eyeglass arrangement.
Generally, the transformation recombination of data can be completed in FPGA, generally use additional addition RAM, the number that will be put in order
According to keeping in RAM, need using when read, but will increase manufacturing cost and hardware complexity in this way.Or using in FPGA
The logical resource in portion carries out data transformation recombination, generally non real-time nature, can seriously reduce data processing speed, and then cannot
Achieve the purpose that scan using tilting well and increases equipment capacity.
Summary of the invention
The purpose of the present invention is overcoming the deficiencies in the prior art, tilting in a kind of direct-write type lithography machine is provided and is swept
The recombination method of data is retouched, hardware manufacturing cost can be reduced, the speed of data transformation recombination is improved, to effectively improve exposure
Resolution ratio and production production capacity.
According to technical solution provided by the invention, the recombination method of tilting scan data in a kind of direct-write type lithography machine,
Described method includes following steps:
Step 1 obtains the data of tilt data according to obliquity factor K to the digital micro-mirror chip DMD of 1920*1080P
Total amount is 2048*K, wherein the bit wide of each tilt data is 256, and each tilt data is divided into K group, and every group of data are
256/K,；The K RAMs temporary for data are chosen in FPGA；
Step 2, by all first positions (256/K) data in 4*K preceding in above-mentioned tilt data 256 data, group
At 1024 data before the first row in 1024 eyeglasses before the first row in digital micro-mirror chip DMD to be written；By above-mentioned inclination
All first (256/K) digit data after in data in 4*K 256 data, form digital micro-mirror chip DMD to be written
1024 data after the first row after middle the first row in 1024 eyeglasses；
By all second positions (256/K) data in 4*K preceding in above-mentioned tilt data 256 data, form to be written
Enter 1024 data before the second row in digital micro-mirror chip DMD before the second row in 1024 eyeglasses, and by above-mentioned tilt data
In after all second positions (256/K) data in 4*K 256 data, form second in digital micro-mirror chip DMD to be written
1024 data after the second row after row in 1024 eyeglasses；
Above-mentioned data building form is repeated, until by K row eyeglass in all tilt data and digital micro-mirror chip DMD
Preceding 1024 eyeglasses, rear 1024 eyeglasses correspond；
Step 3 in 2048 data of the first row, will be divided into 8*K (256/K) in above-mentioned digital micro-mirror chip DMD
Position data, and 2048 data of the first row in digital micro-mirror chip DMD are obtained according to the 8*K of the division position (256/K) data；Its
In, first 256 data of the first row are by first 256 data into (K/2) a 256 data corresponding first
(256/K) position data and (1+4K) a 256 data are first (256/ corresponding to (K/2+4K) a 256 data
K) position data form；
Second 256 data of the first row are by (1+K/2) position data into (K) a 256 data corresponding
One (256/K) position data and (1+9K/2) a 256 data are first corresponding to (5K) a 256 data
(256/K) position data composition；
Above-mentioned data manipulation is repeated, until 256 all data of the first row in digital micro-mirror chip DMD are obtained, and
256 all data of line k in digital micro-mirror chip DMD；
In step 4,256 data all to K row in above-mentioned digital micro-mirror chip DMD, 4*K before division obtains
(256/K) position data and 4*K latter (256/K) data；Wherein, to the preceding 4*K of digital micromirror chip DMD the first row (256/
K) position data, K included in the first 256 data position (256/K) data are respectively written into first address of K RAM
Region, K included in the second 256 data position (256/K) data are respectively written into second address area of K RAM,
Said write operation is repeated, until the K position (256/K) data included in 4*K 256 data are respectively written into K RAM
The 32nd address area；
To the position (256/K) rear 4*K data of digital micromirror chip DMD the first row, in (4*K+1) a 256 data
The K position (256/K) data for being included are respectively written into the 33rd address area of K RAM, (4*K+2) a 256 digit
The K included in the position (256/K) data are respectively written into the 34th address area of K RAM, repeat said write behaviour
Make, until the K position (256/K) data included in 8*K 256 data are respectively written into the 64th bit address region；
K RAM is written with first 256 data in the data sequence that (4*K+1) a 256 data are written in K RAM
In data sequence differ four groups of data；As (K/2) < 32, to preceding 4*K (256/K) position data or rear 4*K (256/K)
Position data, it is identical at interval of (K/2) a 256 data write sequence in K RAM, it is adjacent in (K/2) a 256 data
There are the dislocation of one group of data for data sequence in K RAM of write-in；
Above-mentioned data manipulation is repeated, until 256 all data of K row are written in K RAM；
Step 5, the mode being written according to above-mentioned data, under a clock, while reading the data accessed in K RAM,
To obtain 256 data of write-in needed for each eyeglass in a line eyeglass in digital micro-mirror chip DMD；Repeat above-mentioned data write-in
Operation, until K row eyeglass in digital micro-mirror chip DMD is write full.
It opens up two RAM blocks simultaneously in FPGA, includes K RAM in each RAM block, be written in a RAM block
When data, reading data are carried out to another RAM block.
Advantages of the present invention: according to obliquity factor, carrying out transformation recombination to tilt data, can reduce hardware manufacturing cost,
The speed of data transformation recombination is improved, to effectively improve exposure resolution ratio and production production capacity.
Detailed description of the invention
Fig. 1 be the present invention with obliquity factor K=8 when, the schematic diagram of 256 tilt datas.
Fig. 2 is the present invention in obliquity factor K=8, the total amount of data schematic diagram of tilt data.
Fig. 3 is the present invention in obliquity factor K=8, and the schematic diagram data of the first row eyeglass is written after recombination.
Fig. 4 is the present invention in obliquity factor K=8, and the schematic diagram data of the second row eyeglass is written after recombination.
Fig. 5 is the present invention in obliquity factor K=8, and the schematic diagram in RAM is written in data.
Fig. 6 is the present invention in obliquity factor K=8, the schematic diagram that data are read from RAM.
Fig. 7 is the schematic diagram that the present invention uses ping-pong operation to the reading of data.
Specific embodiment
Below with reference to specific drawings and examples, the invention will be further described.
In order to reduce hardware manufacturing cost, the speed of data transformation recombination is improved, to effectively improve exposure resolution ratio
And production production capacity, the present invention include the following steps:
Step 1 obtains the data of tilt data according to obliquity factor K to the digital micro-mirror chip DMD of 1920*1080P
Total amount is 2048*K, wherein the bit wide of each tilt data is 256, and each tilt data is divided into K group, and every group of data are
256/K,；The K RAMs temporary for data are chosen in FPGA；
Specifically, the quantity of obliquity factor K is consistent with the line number of eyeglass in digital micro-mirror chip DMD, really for one
Fixed digital micro-mirror chip DMD, then obliquity factor K is determined therewith.After obliquity factor K is determined, the total amount of data of tilt data
It determines therewith.The specific value of tilt data, specially this technology related with data to be written in digital micro-mirror chip DMD
Known to the personnel of field, details are not described herein again., generally, the data bit width of RAM is also 256/K.Following specific data recombinations
Change procedure is also completed in FPGA.
Step 2, by all first positions (256/K) data in 4*K preceding in above-mentioned tilt data 256 data, group
At 1024 data before the first row in 1024 eyeglasses before the first row in digital micro-mirror chip DMD to be written；By above-mentioned inclination
All first (256/K) digit data after in data in 4*K 256 data, form digital micro-mirror chip DMD to be written
1024 data after the first row after middle the first row in 1024 eyeglasses；
By all second positions (256/K) data in 4*K preceding in above-mentioned tilt data 256 data, form to be written
Enter 1024 data before the second row in digital micro-mirror chip DMD before the second row in 1024 eyeglasses, and by above-mentioned tilt data
In after all second positions (256/K) data in 4*K 256 data, form second in digital micro-mirror chip DMD to be written
1024 data after the second row after row in 102 eyeglasses；
Above-mentioned data building form is repeated, until by K row eyeglass in all tilt data and digital micro-mirror chip DMD
Preceding 1024 eyeglasses, rear 1024 eyeglasses correspond；
Step 3 in 2048 data of the first row, will be divided into 8*K (256/K) in above-mentioned digital micro-mirror chip DMD
Position data, and 2048 data of the first row in digital micro-mirror chip DMD are obtained according to the 8*K of the division position (256/K) data；Its
In, first 256 data of the first row are by first 256 data into (K/2) a 256 data corresponding first
(256/K) position data and (1+4K) a 256 data are first (256/ corresponding to (K/2+4K) a 256 data
K) position data form；
Second 256 data of the first row are by (1+K/2) position data into (K) a 256 data corresponding
One (256/K) position data and (1+9K/2) a 256 data are first corresponding to (5K) a 256 data
(256/K) position data composition；
Above-mentioned data manipulation is repeated, until 256 all data of the first row in digital micro-mirror chip DMD are obtained, and
256 all data of line k in digital micro-mirror chip DMD；
In the embodiment of the present invention, first 256 data of the first row are by first 256 data to (K/2) a 256
Corresponding first (256/K) position data and (1+4K) a 256 data are a 256 to (K/2+4K) in the data of position
Data corresponding first (256/K) position data composition, in particular to, from first position (256/K) of first 256 data
Data continuously take it is corresponding first (256/K) to (K/2) a 256 data, meanwhile, from a 256 digit of first (1+4K)
According to first (256/K) data continuously take it is corresponding first (256/K) to (K/2+4K) a 256 data, thus
To first 256 data of the first row, following data manipulation modes is similar, no longer describes one by one herein.
In step 4,256 data all to K row in above-mentioned digital micro-mirror chip DMD, 4*K before division obtains
(256/K) position data and 4*K latter (256/K) data；Wherein, to the preceding 4*K of digital micromirror chip DMD the first row (256/
K) position data, K included in the first 256 data position (256/K) data are respectively written into first address of K RAM
Region, K included in the second 256 data position (256/K) data are respectively written into second address area of K RAM,
Said write operation is repeated, until the K position (256/K) data included in 4*K 256 data are respectively written into K RAM
The 32nd address area；
To the position (256/K) rear 4*K data of digital micromirror chip DMD the first row, in (4*K+1) a 256 data
The K position (256/K) data for being included are respectively written into the 33rd address area of K RAM, (4*K+2) a 256 digit
The K included in the position (256/K) data are respectively written into the 34th address area of K RAM, repeat said write behaviour
Make, until the K position (256/K) data included in 8*K 256 data are respectively written into the 64th bit address region；
K RAM is written with first 256 data in the data sequence that (4*K+1) a 256 data are written in K RAM
In data sequence differ four groups of data；As (K/2) < 32, to preceding 4*K (256/K) position data or rear 4*K (256/K)
Position data, it is identical at interval of (K/2) a 256 data write sequence in K RAM, it is adjacent in (K/2) a 256 data
There are the dislocation of one group of data for data sequence in K RAM of write-in；
Above-mentioned data manipulation is repeated, until 256 all data of K row are written in K RAM；
In the embodiment of the present invention, as (K/2) >=32, due to preceding 4*K 256 data, rear 4*K 256 data
Above-mentioned data sequential access relationship is then not present in relationship.
Step 5, the mode being written according to above-mentioned data, under a clock, while reading the data accessed in K RAM,
To obtain 256 data of write-in needed for each eyeglass in a line eyeglass in digital micro-mirror chip DMD；Repeat above-mentioned data write-in
Operation, until K row eyeglass in digital micro-mirror chip DMD is write full.
It include K RAM in each RAM block, to one as shown in fig. 7, opening up two RAM blocks simultaneously in FPGA
In RAM block when write-in data, reading data are carried out to another RAM block.In the embodiment of the present invention, read by the data of two RAM
Extract operation can further increase recombination efficiency, reduce reorganization time.
As shown in Fig. 1 ~ Fig. 6, by taking obliquity factor K=8 as an example, detailed process of the invention is illustrated, specifically:
Fig. 1 is to be tilted over 256 bit data formats exported afterwards, and when obliquity factor K=8, the data of output can be according to K=8
It is divided into 8 groups, every group of data are 32.
As shown in Fig. 2, the total data volume of tilt data is 2048*8=16384 as K=8, it is divided into 64 256,
Each 256 are data structure form shown in Fig. 1, i.e., the total amount of data of the described tilt data corresponds to digital micro-mirror chip
The 8 row eyeglasses of DMD, every row eyeglass need 2048 data.
As shown in Figure 3, Figure 4, the rule of tilt data write-in digital micro-mirror chip DMD are as follows: first 32 256 of tilt data
All first 32 in the data of position, 1024 data are formed, before the first row eyeglass of digital micro-mirror chip DMD is written
In 1024 eyeglasses；All first 32 in rear 32 256 data of tilt data, 1024 data are formed, are write
Enter in rear 1024 eyeglasses of the first row eyeglass of digital micro-mirror chip DMD.
Similarly, all second 32 in preceding 32 256 data of tilt data, form 1024 data, to be written
Enter in preceding 1024 eyeglasses of the second row eyeglass of digital micro-mirror chip DMD；In rear 32 256 data of tilt data
All second 32, form 1024 data, rear 1024 eyeglasses of the second row eyeglass of digital micro-mirror chip DMD to be written
In the middle.And so on, until tilt data can write 8 completely corresponding row eyeglasses.
The data write-in channel width of actually digital micro-mirror chip DMD is similarly 256, the number for recombination of remapping
According to first 256 of the first row eyeglass of digital micro-mirror chip DMD, needing to obtain above-mentioned the 1st obtained in data 256
Position data, the 2nd 256 data, the 3rd 256 data, first 32 data of the 4th 256 data and the 33rd
256 data, the 34th 256 data, the 35th 256 data, first 32 data of the 36th 256 data.Together
Reason, second 256, the first row eyeglass of digital micro-mirror chip DMD need to obtain above-mentioned the 5th 256 digits for obtaining data
According to, the 6th 256 data, the 7th 256 data, first 32 data of the 8th 256 data and the 37th 256
Data, the 38th 256 data, the 39th 256 data, first 32 data of the 40th 256 data.With such
It pushes away, until the first row eyeglass can be write full.
To first 256 of the second row eyeglass of digital micromirror chip DMD, needs to obtain and above-mentioned obtain the 1st of data
A 256 data, the 2nd 256 data, the 3rd 256 data, second 32 data and of the 4th 256 data
33 256 data, the 34th 256 data, the 35th 256 data, second 32 digit of the 36th 256 data
According to.Similarly, second 256, the second row eyeglass needs to obtain above-mentioned the 5th 256 data for obtaining data, the 6th 256
Data, the 7th 256 data, second 32 data of the 8th 256 data and the 37th 256 data, the 38th 256
Position data, the 39th 256 data, second 32 data of the 40th 256 data.And so on, until can be by second
Row eyeglass is write full.
According to above-mentioned data manipulation, obtain that full the third line eyeglass, fourth line eyeglass, fifth line eyeglass, the 6th row mirror can be write
Piece, the 7th row eyeglass, the 8th row eyeglass inclination recombination data.
As shown in figure 5, choosing K=8 RAM according to above-mentioned data recombination conversion process, the data bit width of each RAM is
32.It is obtained after capable of writing the data of completely all eyeglasses after recombination transformation, to the data of the first row eyeglass, is writing data into RAM
When, i.e. 8 32 data that first 256 data are divided into group are respectively written into first address area of 8 RAM；Second
8 32 data that a 256 data are divided into group, rule as illustrated, misplace one group of data, is then respectively written into 8
Second address area of RAM.According to such rule, diagrammatically, preceding 32 256 data are respectively written into 8 RAM
Preceding 32 address areas.
To rear 32 256 data, since 4 32 packet datas that misplace, be respectively written into 8 RAM the 33rd
Address area to the 64th address area.For the write-in RAM process of other row eyeglasses, above description can be referred to, herein not
It repeats again.
As shown in fig. 6, according to the rule of recombination data write-in RAM, it, can be simultaneously from the of RAM1 under a CLK clock
One address area, second address area of RAM2, the third address area of RAM3, RAM4 the 4th address area,
The 33rd address area of RAM5, the 34th address area of RAM6, RAM7 the 35th address area,
The 36th address area of RAM8 reads the 1st 256, the 2nd 256 data, the 3rd 256 data, the 4th 256
First 32 data of position data and the 33rd 256 data, the 34th 256 data, the 35th 256 data, 36
First 32 data of a 256 data reformulate first eyeglass of first 256 data write-in the first row eyeglass
It is interior.
Similarly, can simultaneously from the 5th address area of RAM1, the 6th address area of RAM2, RAM3 the 7th address
Region, the 8th address area of RAM4, the 37th address area of RAM5, the 38th address area of RAM6, RAM7 the 39th
A address area, RAM8 the 40th address area read the 5th 256 data, the 6th 256 data, the 7th 256 digits
According to, first 32 data of the 8th 256 data and the 37th 256 data, the 38th 256 data, the 39th 256
Position data, first 32 data of the 40th 256 data reformulate second 256 digit and the first row mirror are written accordingly
In second eyeglass of piece.And so on, until 8 row eyeglasses are all write full.
As shown in Figure 5, Figure 6, it in the way of being read in such a way that RAM is written in above-mentioned data and from RAM, can reach most
Fast write-in and reading speed, the write-in of 256 all data and read operation, can complete, no under a CLK clock
The time can be increased because of the recombination of data.
Claims (2)
1. the recombination method of tilting scan data in a kind of direct-write type lithography machine, it is characterized in that: the method includes walking as follows
It is rapid:
Step 1 obtains the total amount of data of tilt data according to obliquity factor K to the digital micro-mirror chip DMD of 1920*1080P
For 2048*K, wherein the bit wide of each tilt data is 256, and each tilt data is divided into K group, and every group of data are 256/K
Position,；The K RAMs temporary for data are chosen in FPGA；
Step 2, by all first positions (256/K) data in 4*K preceding in above-mentioned tilt data 256 data, composition to
1024 data before the first row in write-in digital micro-mirror chip DMD before the first row in 1024 eyeglasses；By above-mentioned tilt data
In after all first (256/K) digit data in 4*K 256 data, form in digital micro-mirror chip DMD to be written the
1024 data after the first row after a line in 1024 eyeglasses；
By all second positions (256/K) data in 4*K preceding in above-mentioned tilt data 256 data, number to be written is formed
1024 data before the second row in word micromirror chip DMD before the second row in 1024 eyeglasses, and will be after in above-mentioned tilt data
All second positions (256/K) data in 4*K 256 data, form in digital micro-mirror chip DMD to be written after second row
1024 data after the second row in 1024 eyeglasses；
Above-mentioned data building form is repeated, until by before K row eyeglass in all tilt data and digital micro-mirror chip DMD
1024 eyeglasses, rear 1024 eyeglasses correspond；
Step 3 in 2048 data of the first row, will be divided into 8*K (256/K) digits in above-mentioned digital micro-mirror chip DMD
According to, and 2048 data of the first row in digital micro-mirror chip DMD are obtained according to the 8*K of the division position (256/K) data；Wherein,
First 256 data of the first row are by first 256 data into (K/2) a 256 data corresponding first
(256/K) position data and (1+4K) a 256 data are first (256/ corresponding to (K/2+4K) a 256 data
K) position data form；
Second 256 data of the first row are by (1+K/2) position data into (K) a 256 data corresponding first
(256/K) position data and (1+9K/2) a 256 data are corresponding first (256/K) to (5K) a 256 data
Position data composition；
Above-mentioned data manipulation is repeated, until obtaining 256 all data of the first row in digital micro-mirror chip DMD, and number
256 all data of line k in micromirror chip DMD；
In step 4,256 data all to K row in above-mentioned digital micro-mirror chip DMD, 4*K (256/K) before division obtains
Position data and 4*K latter (256/K) data；Wherein, to the preceding 4*K of digital micromirror chip DMD the first row (256/K) digits
According to, K included in the first 256 data position (256/K) data are respectively written into first address area of K RAM, the
K included in the two 256 data position (256/K) data are respectively written into second address area of K RAM, repeat institute
Write operation is stated, until the K position (256/K) data included in 4*K 256 data are respectively written into the third of K RAM
12 address areas；
To the rear 4*K position (256/K) data of digital micromirror chip DMD the first row, wrapped in (4*K+1) a 256 data
The K that the contains position (256/K) data are respectively written into the 33rd address area of K RAM, in (4*K+2) a 256 data
The included K position (256/K) data are respectively written into the 34th address area of K RAM, repeat said write operation, directly
The 64th bit address region is respectively written into the K position (256/K) data included in 8*K 256 data；
The data sequence that (4*K+1) a 256 data are written in K RAM is written in K RAM with first 256 data
Data sequence differs four groups of data；As (K/2) < 32, to preceding 4*K (256/K) position data or rear 4*K (256/K) digits
According to, it is identical at interval of (K/2) a 256 data write sequence in K RAM, in (K/2) a 256 data, adjacent write-in
There are the dislocation of one group of data for data sequence in K RAM；
Above-mentioned data manipulation is repeated, until 256 all data of K row are written in K RAM；
Step 5, the mode being written according to above-mentioned data, under a clock, while reading the data accessed in K RAM, with
Into digital micro-mirror chip DMD in a line eyeglass write-in needed for each eyeglass 256 data；Repeat above-mentioned data write-in behaviour
Make, until K row eyeglass in digital micro-mirror chip DMD is write full.
2. the recombination method of tilting scan data in direct-write type lithography machine according to claim 1, it is characterized in that:
Two RAM blocks are opened up in FPGA simultaneously, include K RAM in each RAM block, it is right when to data are written in a RAM block
Another RAM block carries out reading data.
Priority Applications (1)
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Denomination of invention: Reorganization of Tilt Scan Data in Direct Write Lithography Effective date of registration: 20221219 Granted publication date: 20190416 Pledgee: Bank of Jiangsu Limited by Share Ltd. Wuxi branch Pledgor: WUXI YSPHOTECH SEMICONDUCTOR TECHNOLOGY CO.,LTD. Registration number: Y2022320010819 |