CN107037437B - 厚度测量装置及厚度测量方法 - Google Patents

厚度测量装置及厚度测量方法 Download PDF

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Publication number
CN107037437B
CN107037437B CN201710058139.5A CN201710058139A CN107037437B CN 107037437 B CN107037437 B CN 107037437B CN 201710058139 A CN201710058139 A CN 201710058139A CN 107037437 B CN107037437 B CN 107037437B
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China
Prior art keywords
light
sample
reference surface
distance
reflected
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CN201710058139.5A
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Chinese (zh)
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CN107037437A (zh
Inventor
丰田一贵
泽村义巳
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Otsuka Electronics Co Ltd
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Otsuka Electronics Co Ltd
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Priority to CN202210019117.9A priority Critical patent/CN114325734A/zh
Publication of CN107037437A publication Critical patent/CN107037437A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/02—Measuring arrangements characterised by the use of fluids for measuring length, width or thickness
    • G01B13/06—Measuring arrangements characterised by the use of fluids for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
    • G01S7/4815—Constructional features, e.g. arrangements of optical elements of transmitters alone using multiple transmitters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4816—Constructional features, e.g. arrangements of optical elements of receivers alone

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN201710058139.5A 2016-01-26 2017-01-23 厚度测量装置及厚度测量方法 Active CN107037437B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210019117.9A CN114325734A (zh) 2016-01-26 2017-01-23 厚度测量装置及厚度测量方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-012152 2016-01-26
JP2016012152A JP6725988B2 (ja) 2016-01-26 2016-01-26 厚み測定装置および厚み測定方法

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CN202210019117.9A Division CN114325734A (zh) 2016-01-26 2017-01-23 厚度测量装置及厚度测量方法

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CN107037437A CN107037437A (zh) 2017-08-11
CN107037437B true CN107037437B (zh) 2022-01-18

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CN202210019117.9A Pending CN114325734A (zh) 2016-01-26 2017-01-23 厚度测量装置及厚度测量方法
CN201710058139.5A Active CN107037437B (zh) 2016-01-26 2017-01-23 厚度测量装置及厚度测量方法

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JP (1) JP6725988B2 (ko)
KR (1) KR102229048B1 (ko)
CN (2) CN114325734A (ko)
TW (1) TWI733722B (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6402273B1 (ja) * 2018-05-18 2018-10-10 大塚電子株式会社 光学測定装置及び光学測定方法
JP6402272B1 (ja) * 2018-05-18 2018-10-10 大塚電子株式会社 厚み測定装置及び厚み測定方法
CN108955549A (zh) * 2018-09-11 2018-12-07 深圳立仪科技有限公司 一种透光材料双面测厚装置
CN113251897B (zh) * 2021-05-17 2022-11-11 东北大学秦皇岛分校 一种基于白光干涉的量块测量装置及方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013141537A1 (ko) * 2012-03-19 2013-09-26 (주)파이버프로 광학적 방법을 이용한 두께 및 형상 측정 장치 및 측정 방법

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Publication number Priority date Publication date Assignee Title
US6847458B2 (en) * 2003-03-20 2005-01-25 Phase Shift Technology, Inc. Method and apparatus for measuring the shape and thickness variation of polished opaque plates
JP5060678B2 (ja) * 2008-05-08 2012-10-31 株式会社キーエンス 光学式変位計
JP5124424B2 (ja) 2008-11-17 2013-01-23 株式会社キーエンス 光学式変位計
JP5198418B2 (ja) * 2009-01-28 2013-05-15 株式会社神戸製鋼所 形状測定装置，形状測定方法
JP2011095685A (ja) * 2009-11-02 2011-05-12 Sony Corp 顕微鏡システム及び顕微鏡システムの制御方法
JP6044315B2 (ja) 2012-12-12 2016-12-14 オムロン株式会社 変位計測方法および変位計測装置
JP6130723B2 (ja) * 2013-05-01 2017-05-17 キヤノン株式会社 情報処理装置、情報処理装置の制御方法、及びプログラム
TWI638131B (zh) * 2013-06-17 2018-10-11 普雷茨特光電有限公司 用於獲取距離差之光學量測裝置及光學量測方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013141537A1 (ko) * 2012-03-19 2013-09-26 (주)파이버프로 광학적 방법을 이용한 두께 및 형상 측정 장치 및 측정 방법

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
一种新的膜厚测试技术;孙艳等;《计量技术》;20020328(第03期);全文 *

Also Published As

Publication number Publication date
KR102229048B1 (ko) 2021-03-16
JP2017133869A (ja) 2017-08-03
TW201727188A (zh) 2017-08-01
TWI733722B (zh) 2021-07-21
CN114325734A (zh) 2022-04-12
JP6725988B2 (ja) 2020-07-22
KR20170089403A (ko) 2017-08-03
CN107037437A (zh) 2017-08-11

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