CN107008707B - Manifold cleaning device and manifold cleaning method - Google Patents
Manifold cleaning device and manifold cleaning method Download PDFInfo
- Publication number
- CN107008707B CN107008707B CN201710408539.4A CN201710408539A CN107008707B CN 107008707 B CN107008707 B CN 107008707B CN 201710408539 A CN201710408539 A CN 201710408539A CN 107008707 B CN107008707 B CN 107008707B
- Authority
- CN
- China
- Prior art keywords
- manifold
- cleaning
- pipeline
- solvent
- compressed air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
- B08B9/0321—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
- B08B9/0328—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid by purging the pipe with a gas or a mixture of gas and liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning In General (AREA)
Abstract
The invention discloses a kind of manifold cleaning devices comprising manifold cleaning container, manifold container lid, solvent cleaning pipeline and compressed air clean pipeline；Wherein manifold cleaning container includes seal and cleaning hole；Manifold container lid includes manifold fixation hole and gas vent；Solvent cleaning pipeline one end is connect with manifold, and the other end inputs cleaning solvent；Compressed air cleaning pipeline one end is connect with manifold, and the other end inputs compressed air.The present invention also provides a kind of manifold cleaning method, manifold cleaning device of the invention and manifold cleaning method can effectively clean manifold by the setting of manifold cleaning container.
Description
Technical field
The present invention relates to pipeline cleaning fields, more particularly to a kind of manifold cleaning device and manifold cleaning method.
Background technique
Photoetching gum coating apparatus needs to connect by manifold with photoresist barrels, and the photoresist in photoresist barrels is passed through discrimination
Pipe is transmitted on photoetching gum coating apparatus.The manifold is generally made of vent manifold and logical liquid manifold, CDA (Clean Dry
Air, compressed air) it is pressed into photoresist barrels by vent manifold, so that photoresist barrels form positive pressure, in photoresist barrels positive pressure
In the case where, the photoresist in photoresist barrels is transmitted on photoetching gum coating apparatus by logical liquid manifold.
Existing manifold can not be cleaned, and can only carry out simple wiping to manifold surface, with the increase of number of use,
Manifold interior will form photoresist crystallization, and photoresist crystallization can cause dirt to the photoresist pipeline on photoetching gum coating apparatus
Dye.
Therefore, it is necessary to a kind of manifold cleaning device is provided, to solve the problems of prior art.
Summary of the invention
The purpose of the present invention is to provide one kind can be to the manifold cleaning device that manifold is effectively cleaned；It is existing to solve
Manifold can not effectively be cleaned, thus the technical issues of being polluted to photoresist pipeline.
The embodiment of the present invention provides a kind of manifold cleaning device comprising:
Manifold cleaning container, the seal at the top that the manifold cleaning container is arranged in one and setting are described
The cleaning hole of the bottom of manifold cleaning container；
The opening of the manifold cleaning container is arranged in manifold container lid, and for sealing the seal, the manifold holds
Device lid is provided at least one manifold fixation hole and at least one gas vent for secure manifold；
Solvent cleans pipeline, and the top of the manifold container lid is arranged in, and one end is connect with the manifold, other end input
Cleaning solvent；And
Compressed air cleans pipeline, the top of the manifold container lid is arranged in, one end is connect with the manifold, the other end
Input compressed air.
In manifold cleaning device of the present invention, the manifold includes logical liquid manifold and vent manifold, the discrimination
Pipe fixation hole includes logical liquid manifold fixation hole for fixing the logical liquid manifold and for fixing the logical of the vent manifold
Gas manifold fixation hole；
Pipeline is cleaned in one end of the logical liquid manifold with the solvent respectively and compressed air cleaning pipeline is connect；Institute
The other end of logical liquid manifold is stated close to the cleaning hole；
Pipeline is cleaned in one end of the vent manifold with the solvent respectively and compressed air cleaning pipeline is connect；Institute
The other end of vent manifold is stated close to the seal of the manifold cleaning container.
In manifold cleaning device of the present invention, the length of the logical liquid manifold is greater than the length of the vent manifold
Degree.
In manifold cleaning device of the present invention, the solvent cleaning pipeline includes for controlling the solvent cleaning
The first switch of pipeline, the compressed air cleaning pipeline include opening for controlling the second of the compressed air cleaning pipeline
It closes.
The present invention also provides the manifold cleaning method that a kind of manifold cleaning device cleans manifold, the manifold cleaning
Device includes:
Manifold cleaning container, the seal at the top that the manifold cleaning container is arranged in one and setting are described
The cleaning hole of the bottom of manifold cleaning container；
The opening of the manifold cleaning container is arranged in manifold container lid, and for sealing the seal, the manifold holds
Device lid is provided at least one manifold fixation hole and at least one gas vent for secure manifold；
Solvent cleans pipeline, and the top of the manifold container lid is arranged in, and one end is connect with the manifold, other end input
Cleaning solvent；And
Compressed air cleans pipeline, the top of the manifold container lid is arranged in, one end is connect with the manifold, the other end
Input compressed air；Wherein the manifold cleaning method includes:
The manifold is fixed on the manifold fixation hole, and closes the cleaning hole；
The solvent is cleaned pipeline and compressed air cleaning pipeline to connect with described manifold one end；
Pipeline is cleaned by the solvent and inputs cleaning solvent, so that the manifold is impregnated in the cleaning solvent
Cleaning；
It opens the cleaning hole cleaning solvent is discharged；And
Pipeline is cleaned by the compressed air and inputs compressed air, to dry up the manifold.
It is described that the step that pipeline inputs cleaning solvent is cleaned by the solvent in manifold cleaning method of the present invention
Before rapid further include:
Pipeline is cleaned by the compressed air and inputs compressed air, to carry out purge operation to the manifold.
In manifold cleaning method of the present invention, the manifold includes logical liquid manifold and vent manifold, the discrimination
Pipe fixation hole includes logical liquid manifold fixation hole for fixing the logical liquid manifold and for fixing the logical of the vent manifold
Gas manifold fixation hole；
Pipeline is cleaned in one end of the logical liquid manifold with the solvent respectively and compressed air cleaning pipeline is connect；Institute
The other end of logical liquid manifold is stated close to the cleaning hole；
Pipeline is cleaned in one end of the vent manifold with the solvent respectively and compressed air cleaning pipeline is connect；Institute
The other end of vent manifold is stated close to the seal of the manifold cleaning container.
In manifold cleaning method of the present invention, the length of the logical liquid manifold is greater than the length of the vent manifold
Degree.
In manifold cleaning method of the present invention, the solvent cleaning pipeline includes for controlling the solvent cleaning
The first switch of pipeline, the compressed air cleaning pipeline include opening for controlling the second of the compressed air cleaning pipeline
It closes.
In manifold cleaning method of the present invention, when cleaning pipeline input cleaning solvent by the solvent, institute
First switch unlatching is stated, the second switch is closed；
Compressed air is inputted when cleaning pipeline by the compressed air, the first switch is closed, the second switch
It opens.
Manifold cleaning device and manifold cleaning method of the invention is by the way that manifold to be fixed in manifold cleaning container, then
Pipeline is cleaned by solvent and compressed air is cleaned pipeline and cleaned, to realize effective cleaning to manifold, is solved
Existing manifold can not be cleaned effectively, thus the technical issues of polluting to photoresist pipeline.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other
Attached drawing.Wherein:
Fig. 1 is the structural schematic diagram of the preferred embodiment of manifold cleaning device of the invention；
Fig. 2 is the flow chart of the corresponding manifold cleaning method of manifold cleaning device of the invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, rather than whole embodiments.Based on this
Embodiment in invention, those of ordinary skill in the art are obtained every other under the premise of not making creative labor
Embodiment shall fall within the protection scope of the present invention.
Fig. 1 is please referred to, Fig. 1 is the structural schematic diagram of the preferred embodiment of manifold cleaning device of the invention.This is preferred real
The manifold cleaning device 10 for applying example includes that manifold cleaning container 11, manifold container lid 12, solvent cleaning pipeline 13 and compression are empty
Gas cleans pipeline 14.
Manifold cleaning container 11 have one be arranged in manifold cleaning container top seal (not shown) and
The cleaning hole 111 of the bottom of manifold cleaning container is set.The opening of manifold cleaning container is arranged in manifold container lid 12, is used for
Seal is sealed, manifold container lid 12 is provided at least one for the manifold fixation hole of secure manifold and at least one exhaust
Hole 123；The top of manifold container lid 12 is arranged in solvent cleaning pipeline 13, and one end is connect with manifold, and other end input cleaning is molten
Agent；The top of manifold container lid 12 is arranged in compressed air cleaning pipeline 14, and one end is connect with manifold, and other end input compression is empty
Gas.
Specifically, manifold includes logical liquid manifold 151 and vent manifold 152, manifold fixation hole includes for fixed logical liquid
The logical liquid manifold fixation hole 121 of manifold 151 and the vent manifold fixation hole 122 for fixing vent manifold 152；Logical liquid manifold
Pipeline 13 is cleaned in 151 one end with solvent respectively and compressed air cleaning pipeline 14 is connect；The other end of logical liquid manifold 151 is close
Clean hole 111；Pipeline 13 is cleaned in one end of vent manifold 152 with solvent respectively and compressed air cleaning pipeline 14 is connect；Ventilation
Seal of the other end of manifold 152 close to manifold cleaning container 11.The length for wherein leading to liquid manifold 151 is greater than vent manifold
152 length.
Furthermore solvent cleaning pipeline 13 includes the first switch 131 for controlling solvent cleaning pipeline 13, and compressed air is clear
Washing pipeline 14 includes the second switch 141 for controlling compressed air cleaning pipeline 14.
Manifold in use, is fixed on the manifold of manifold container lid 12 by the manifold cleaning device 10 of this preferred embodiment first
On fixation hole, specifically, logical liquid manifold 151 is fixed on logical liquid manifold fixation hole 121, vent manifold 152 is fixed on ventilation discrimination
On pipe fixation hole 122.
Manifold container lid 12 is then closed to the opening of manifold cleaning container 11, to seal the close of manifold cleaning container
Sealing simultaneously closes off cleaning hole 111.
The second switch 141 on compressed air cleaning pipeline 14 is then turned on, first on solvent cleaning pipeline 13 is closed
Switch 131, the compressed air that compressed air is cleaned on pipeline 14 carry out purging behaviour to logical liquid manifold 151 and vent manifold 152
Make, i.e., remaining photoresist in logical liquid manifold 151 is expelled in manifold cleaning container；Compressed air is from manifold container lid simultaneously
Gas vent 123 on 12 is discharged.
Then the second switch 141 that compressed air is cleaned on pipeline 14 is closed, opens the on solvent cleaning pipeline 13
One switch 131, cleaning solvent by solvent clean pipeline 13 be input in manifold cleaning container 12, in this way lead to liquid manifold 151 with
And vent manifold 152 can carry out soaking and washing operation in the cleaning solvent in manifold cleaning container 11.Here will preferably lead to
Liquid manifold 151 is fully immersed in cleaning solvent.
First switch 131 and second switch 141 are then simultaneously closed off, the cleaning hole of 11 bottom of manifold cleaning container is opened
111, it is discharged in this way from cleaning hole 111 by the cleaning solvent in manifold cleaning container 11.
Then the first switch 131 that solvent cleans on pipeline 13 is closed, opens the on compressed air cleaning pipeline 14
Two switches 141, such compressed air can blow remaining cleaning solvent on logical liquid manifold 151 and vent manifold 152
Dry run.Here for the other end of preferably logical liquid manifold 151 close to cleaning hole 111, the other end of vent manifold 152 is clear close to manifold
Wash the seal of container 11, the compressed air of the discharge of such vent manifold 152 can be very well by cleaning solvent from cleaning hole 111
Middle discharge.
Finally logical liquid manifold 151 and vent manifold 152 are taken out from the manifold fixation hole of manifold container lid 12, so i.e.
Complete the manifold cleaning process of the manifold cleaning device 10 of this preferred embodiment.
The manifold cleaning device of this preferred embodiment can effectively clean manifold by the setting of manifold cleaning container.
The present invention also provides a kind of manifold cleaning methods, and referring to figure 2., Fig. 2 is that manifold cleaning device of the invention is corresponding
Manifold cleaning method flow chart.Above-mentioned manifold cleaning device can be used to carry out for the manifold cleaning method of this preferred embodiment
Implement.
Changing manifold cleaning device includes that manifold cleaning container, manifold container lid, solvent cleaning pipeline and compressed air are clear
Wash pipeline.
There is manifold cleaning container the seal at a top that manifold cleaning container is arranged in and setting to clean in manifold
The cleaning hole of the bottom of container.The opening of manifold cleaning container is arranged in manifold container lid, for sealing seal, manifold container
Lid is provided at least one manifold fixation hole and at least one gas vent for secure manifold；Solvent cleans pipeline setting and exists
The top of manifold container lid, one end are connect with manifold, and the other end inputs cleaning solvent；Compressed air is cleaned pipeline and is arranged in manifold
The top of container cover, one end are connect with manifold, and the other end inputs compressed air.
Specifically, manifold includes logical liquid manifold and vent manifold, manifold fixation hole includes for fixed logical liquid manifold
Logical liquid manifold fixation hole and the vent manifold fixation hole for fixing vent manifold；One end of logical liquid manifold is clear with solvent respectively
Pipeline is washed to connect with compressed air cleaning pipeline；The close cleaning hole of the other end of logical liquid manifold；One end of vent manifold respectively with
Solvent cleans pipeline and connects with compressed air cleaning pipeline；Seal of the other end of vent manifold close to manifold cleaning container.
The length for wherein leading to liquid manifold is greater than the length of vent manifold.
Solvent cleaning pipeline includes the first switch for controlling solvent cleaning pipeline, and it includes using that compressed air, which cleans pipeline,
In the second switch of control compressed air cleaning pipeline.
The manifold cleaning method of this preferred embodiment includes:
Manifold is fixed on manifold fixation hole by step S201, and closes cleaning hole；
Specifically, logical liquid manifold is fixed on logical liquid manifold fixation hole, vent manifold is fixed on vent manifold fixation hole,
The opening that manifold container lid is then closed to manifold cleaning container is closed simultaneously with sealing the seal of manifold cleaning container
Close cleaning hole.
Solvent is cleaned pipeline and compressed air cleaning pipeline and connect with manifold one end by step S202；To be cleaned
Operation.
Step S203 cleans pipeline by compressed air and inputs compressed air, to carry out purge operation to manifold.
Specifically, opening the second switch on compressed air cleaning pipeline, compressed air cleans the compressed air on pipeline
Purge operation is carried out to logical liquid manifold and vent manifold, i.e., remaining photoresist in logical liquid manifold is expelled to manifold cleaning and held
In device；The gas vent discharge that compressed air is covered from manifold container simultaneously.
Step S204 cleans pipeline by solvent and inputs cleaning solvent, so that manifold carries out impregnating clearly in cleaning solvent
It washes；
Specifically, the second switch that compressed air is cleaned on pipeline is closed, first opened on solvent cleaning pipeline is opened
It closes, cleaning solvent cleans pipeline by solvent and is input in manifold cleaning container, and leading to liquid manifold and vent manifold in this way can be with
Soaking and washing operation is carried out in the cleaning solvent in manifold cleaning container.Here logical liquid manifold is preferably fully immersed in cleaning
In solvent.
Step S205 opens cleaning hole and cleaning solvent is discharged；
Specifically, simultaneously close off first switch and the second switch, open the cleaning hole of manifold cleaning container bottom, in this way from
It cleans hole the cleaning solvent in manifold cleaning container is discharged.
Step S206 cleans pipeline by compressed air and inputs compressed air, to dry up manifold.
Specifically, the first switch that solvent cleans on pipeline is closed, second opened on compressed air cleaning pipeline is opened
It closes, such compressed air can carry out drying operation to remaining cleaning solvent on logical liquid manifold and vent manifold.Here excellent
The other end of liquid manifold is gated close to cleaning hole, the other end of vent manifold leads in this way close to the seal of manifold cleaning container
Cleaning solvent can be discharged from cleaning hole very well for the compressed air of the discharge of gas manifold.
Finally logical liquid manifold and vent manifold are taken out from the manifold fixation hole of manifold container lid.This is completed in this way
The manifold cleaning process of the manifold cleaning method of preferred embodiment.
Manifold cleaning device and manifold cleaning method of the invention is by the way that manifold to be fixed in manifold cleaning container, then
Pipeline is cleaned by solvent and compressed air is cleaned pipeline and cleaned, to realize effective cleaning to manifold, is solved
Existing manifold can not be cleaned effectively, thus the technical issues of polluting to photoresist pipeline.
In conclusion although the present invention has been disclosed above in the preferred embodiment, but above preferred embodiment is not to limit
The system present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention
Decorations, therefore protection scope of the present invention subjects to the scope of the claims.
Claims (9)
1. a kind of manifold cleaning device characterized by comprising
Manifold cleaning container, the seal at the top that the manifold cleaning container is arranged in one and setting are in the manifold
The cleaning hole of the bottom of cleaning container；
The opening of the manifold cleaning container is arranged in manifold container lid, for sealing the seal, the manifold container lid
It is provided at least one manifold fixation hole and at least one gas vent for secure manifold；
Solvent cleans pipeline, and the top of the manifold container lid is arranged in, and one end is connect with the manifold, other end input cleaning
Solvent；And
Compressed air cleans pipeline, and the top of the manifold container lid is arranged in, and one end is connect with the manifold, other end input
Compressed air, wherein the manifold includes logical liquid manifold and vent manifold, and the manifold fixation hole includes for described in fixed
Lead to the logical liquid manifold fixation hole of liquid manifold and the vent manifold fixation hole for fixing the vent manifold；The logical liquid manifold
One end respectively with the solvent clean pipeline and the compressed air cleaning pipeline connect；Another termination of the logical liquid manifold
The nearly cleaning hole；Pipeline is cleaned in one end of the vent manifold with the solvent respectively and compressed air cleaning pipeline connects
It connects；Seal of the other end of the vent manifold close to the manifold cleaning container.
2. manifold cleaning device according to claim 1, which is characterized in that the length of the logical liquid manifold is greater than described logical
The length of gas manifold.
3. manifold cleaning device according to claim 1, which is characterized in that the solvent cleaning pipeline includes for controlling
The first switch of the solvent cleaning pipeline, the compressed air cleaning pipeline includes for controlling the compressed air cleaning pipe
The second switch in road.
4. the manifold cleaning method that a kind of manifold cleaning device cleans manifold, the manifold cleaning device include:
Manifold cleaning container, the seal at the top that the manifold cleaning container is arranged in one and setting are in the manifold
The cleaning hole of the bottom of cleaning container；
The opening of the manifold cleaning container is arranged in manifold container lid, for sealing the seal, the manifold container lid
It is provided at least one manifold fixation hole and at least one gas vent for secure manifold；
Solvent cleans pipeline, and the top of the manifold container lid is arranged in, and one end is connect with the manifold, other end input cleaning
Solvent；And
Compressed air cleans pipeline, and the top of the manifold container lid is arranged in, and one end is connect with the manifold, other end input
Compressed air；It is characterized in that, the manifold cleaning method includes:
The manifold is fixed on the manifold fixation hole, and closes the cleaning hole；
The solvent is cleaned pipeline and compressed air cleaning pipeline to connect with described manifold one end；
Pipeline is cleaned by the solvent and inputs cleaning solvent, so that the manifold carries out impregnating clearly in the cleaning solvent
It washes；
It opens the cleaning hole cleaning solvent is discharged；And
Pipeline is cleaned by the compressed air and inputs compressed air, to dry up the manifold.
5. manifold cleaning method according to claim 4, which is characterized in that described to clean pipeline input by the solvent
Before the step of cleaning solvent further include:
Pipeline is cleaned by the compressed air and inputs compressed air, to carry out purge operation to the manifold.
6. manifold cleaning method according to claim 4, which is characterized in that the manifold includes logical liquid manifold and ventilation
Manifold, the manifold fixation hole include logical liquid manifold fixation hole for fixing the logical liquid manifold and described logical for fixing
The vent manifold fixation hole of gas manifold；
Pipeline is cleaned in one end of the logical liquid manifold with the solvent respectively and compressed air cleaning pipeline is connect；It is described logical
The other end of liquid manifold is close to the cleaning hole；
Pipeline is cleaned in one end of the vent manifold with the solvent respectively and compressed air cleaning pipeline is connect；It is described logical
Seal of the other end of gas manifold close to the manifold cleaning container.
7. manifold cleaning method according to claim 6, which is characterized in that the length of the logical liquid manifold is greater than described logical
The length of gas manifold.
8. manifold cleaning method according to claim 6, which is characterized in that the solvent cleaning pipeline includes for controlling
The first switch of the solvent cleaning pipeline, the compressed air cleaning pipeline includes for controlling the compressed air cleaning pipe
The second switch in road.
9. manifold cleaning method according to claim 8, which is characterized in that clear when cleaning pipeline input by the solvent
When washing solvent, the first switch is opened, and the second switch is closed；
Compressed air is inputted when cleaning pipeline by the compressed air, the first switch is closed, and the second switch is opened.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710408539.4A CN107008707B (en) | 2017-06-02 | 2017-06-02 | Manifold cleaning device and manifold cleaning method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710408539.4A CN107008707B (en) | 2017-06-02 | 2017-06-02 | Manifold cleaning device and manifold cleaning method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107008707A CN107008707A (en) | 2017-08-04 |
| CN107008707B true CN107008707B (en) | 2019-05-03 |
Family
ID=59452620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710408539.4A Active CN107008707B (en) | 2017-06-02 | 2017-06-02 | Manifold cleaning device and manifold cleaning method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107008707B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6917839B2 (en) * | 2017-09-13 | 2021-08-11 | 株式会社Ｓｃｒｅｅｎホールディングス | Cleaning equipment, cleaning methods and liquid supply equipment |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100374116B1 (en) * | 2000-04-11 | 2003-03-03 | 지엠대우자동차기술 주식회사 | Washing apparatus of nozzle for salt spray testing system |
| CN1310291C (en) * | 2001-04-10 | 2007-04-11 | 华邦电子股份有限公司 | Chip washing equipment preventing blocking of pipe wall |
| CN203304232U (en) * | 2013-05-16 | 2013-11-27 | 昆山市超声仪器有限公司 | Flexible endoscope cleaning system with closed type cleaning containers |
| CN204148064U (en) * | 2014-03-27 | 2015-02-11 | 上海华力微电子有限公司 | A kind of cleaning device of liquid nozzle and cleaning platform |
| JP2015205262A (en) * | 2014-04-23 | 2015-11-19 | 株式会社ディスコ | Washing equipment |
-
2017
- 2017-06-02 CN CN201710408539.4A patent/CN107008707B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN107008707A (en) | 2017-08-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203578303U (en) | Fine cleaning and drying device for inner wall and outer wall of sampling probe | |
| CN206632087U (en) | A kind of laboratory glass container automatic washing and drying unit | |
| CN107008707B (en) | Manifold cleaning device and manifold cleaning method | |
| CN203737653U (en) | Cleaning platform for laboratory | |
| CN108213001A (en) | The retracting device and method of centrifuge tube are consumed in a kind of heavy metal-polluted soil continuous mode | |
| CN105208782B (en) | The automatic etching apparatus of circuit board | |
| CN106824945A (en) | A kind of laboratory glass container automatic washing and drying unit | |
| CN205183263U (en) | Porous glass board absorption tube self - cleaning ware | |
| CN206305137U (en) | A kind of outer wall cleaning device for sample introduction needle | |
| CN106442029A (en) | SF6 sampling device for GIS equipment | |
| CN211247632U (en) | Cleaning device for U-shaped porous glass plate absorption tube | |
| CN206064942U (en) | A kind of inner tubule surface automatic clearing apparatuss | |
| CN107649438A (en) | The wiper mechanism and its control method of etching machine air knife | |
| CN205209850U (en) | Dissolved gas drive rock core wash oil system | |
| CN206747166U (en) | A kind of supercriticality purging system | |
| CN105057271A (en) | Method for cleaning sample vials in batches | |
| CN105251740B (en) | A kind of device and method for eliminating water quality online analyzer memory effect | |
| KR20090070735A (en) | Fluid dispensing device and cleaning method thereof | |
| CN205816350U (en) | A kind of viscosity pipet cleaning machine | |
| CN204769777U (en) | Nuclear -magnetism pipe purger | |
| CN204222070U (en) | The cleaning device of polyurethane foaming machine mixing head | |
| CN207412918U (en) | A kind of intelligent filtering device | |
| CN209238553U (en) | A kind of silica gel string cleaning device | |
| CN206296276U (en) | A kind of sample introduction needle purging system | |
| CN205217537U (en) | Test tube washing and device that spin -dries |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |