CN107008707A - Manifold cleaning device and manifold cleaning method - Google Patents
Manifold cleaning device and manifold cleaning method Download PDFInfo
- Publication number
- CN107008707A CN107008707A CN201710408539.4A CN201710408539A CN107008707A CN 107008707 A CN107008707 A CN 107008707A CN 201710408539 A CN201710408539 A CN 201710408539A CN 107008707 A CN107008707 A CN 107008707A
- Authority
- CN
- China
- Prior art keywords
- manifold
- cleaning
- pipeline
- solvent
- compressed air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
- B08B9/0321—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid
- B08B9/0328—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid by purging the pipe with a gas or a mixture of gas and liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
Abstract
The invention discloses a kind of manifold cleaning device, it includes manifold cleaning container, manifold container lid, solvent cleaning pipeline and compressed air cleaning pipeline；Wherein manifold cleaning container includes seal and clean-out opening；Manifold container lid includes manifold fixing hole and steam vent；Solvent cleaning pipeline one end is connected with manifold, other end input cleaning solvent；Compressed air cleaning pipeline one end is connected with manifold, other end input compressed air.The present invention also provides a kind of manifold cleaning method, and manifold cleaning device and manifold cleaning method of the invention can effectively be cleaned by the setting of manifold cleaning container to manifold.
Description
Technical field
The present invention relates to pipeline cleaning field, more particularly to a kind of manifold cleaning device and manifold cleaning method.
Background technology
Photoetching gum coating apparatus is needed to be connected with photoresist bucket by manifold, and the photoresist in photoresist bucket is passed through into discrimination
Pipe is transmitted to photoetching gum coating apparatus.The manifold is typically made up of vent manifold and logical liquid manifold, CDA (Clean Dry
Air, compressed air) it is pressed into by vent manifold in photoresist bucket so that photoresist is barrel-shaped into malleation, in photoresist bucket malleation
In the case of, the photoresist in photoresist bucket is transmitted to photoetching gum coating apparatus by logical liquid manifold.
Existing manifold can not be cleaned, and can only carry out simple wiping to manifold surface, with the increase of access times,
Manifold interior can form photoresist crystallization, and photoresist crystallization can cause dirt to the photoresist pipeline on photoetching gum coating apparatus
Dye.
Therefore, it is necessary to a kind of manifold cleaning device is provided, to solve the problems of prior art.
The content of the invention
It is an object of the invention to provide a kind of manifold cleaning device that can be effectively cleaned to manifold；It is existing to solve
Manifold can not effectively be cleaned so that the technical problem polluted to photoresist pipeline.
The embodiment of the present invention provides a kind of manifold cleaning device, and it includes：
Manifold cleaning container, seal with a top for being arranged on the manifold cleaning container and is arranged on described
The clean-out opening of the bottom of manifold cleaning container；
Manifold container lid, is arranged on the opening of the manifold cleaning container, and for sealing the seal, the manifold holds
Device lid, which is provided with least one, is used for the manifold fixing hole and at least one steam vent of secure manifold；
Solvent cleans pipeline, is arranged on the top of the manifold container lid, one end is connected with the manifold, other end input
Cleaning solvent；And
Compressed air cleans pipeline, is arranged on the top of the manifold container lid, one end is connected with the manifold, the other end
Input compressed air.
In manifold cleaning device of the present invention, the manifold includes logical liquid manifold and vent manifold, the discrimination
Pipe fixing hole is including for fixing the logical liquid manifold fixing hole of the logical liquid manifold and for fixing the logical of the vent manifold
Gas manifold fixing hole；
Pipeline is cleaned in one end of the logical liquid manifold with the solvent respectively and compressed air cleaning pipeline is connected；Institute
The other end of logical liquid manifold is stated close to the clean-out opening；
Pipeline is cleaned in one end of the vent manifold with the solvent respectively and compressed air cleaning pipeline is connected；Institute
The other end of vent manifold is stated close to the seal of the manifold cleaning container.
In manifold cleaning device of the present invention, the length of the logical liquid manifold is more than the length of the vent manifold
Degree.
In manifold cleaning device of the present invention, the solvent cleaning pipeline includes being used to control the solvent to clean
The first switch of pipeline, the compressed air cleaning pipeline includes being used to control the second of the compressed air cleaning pipeline to open
Close.
The present invention also provides the manifold cleaning method that a kind of manifold cleaning device is cleaned to manifold, the manifold cleaning
Device includes：
Manifold cleaning container, seal with a top for being arranged on the manifold cleaning container and is arranged on described
The clean-out opening of the bottom of manifold cleaning container；
Manifold container lid, is arranged on the opening of the manifold cleaning container, and for sealing the seal, the manifold holds
Device lid, which is provided with least one, is used for the manifold fixing hole and at least one steam vent of secure manifold；
Solvent cleans pipeline, is arranged on the top of the manifold container lid, one end is connected with the manifold, other end input
Cleaning solvent；And
Compressed air cleans pipeline, is arranged on the top of the manifold container lid, one end is connected with the manifold, the other end
Input compressed air；Wherein described manifold cleaning method includes：
The manifold is fixed on the manifold fixing hole, and closes the clean-out opening；
The solvent is cleaned into pipeline and compressed air cleaning pipeline is connected with described manifold one end；
Pipeline is cleaned by the solvent and inputs cleaning solvent, so that the manifold is soaked in the cleaning solvent
Cleaning；
The clean-out opening is opened to discharge the cleaning solvent；And
Pipeline is cleaned by the compressed air and inputs compressed air, so as to which the manifold is dried up.
It is described that the step that pipeline inputs cleaning solvent is cleaned by the solvent in manifold cleaning method of the present invention
Also include before rapid：
Pipeline is cleaned by the compressed air and inputs compressed air, to carry out purge operation to the manifold.
In manifold cleaning method of the present invention, the manifold includes logical liquid manifold and vent manifold, the discrimination
Pipe fixing hole is including for fixing the logical liquid manifold fixing hole of the logical liquid manifold and for fixing the logical of the vent manifold
Gas manifold fixing hole；
Pipeline is cleaned in one end of the logical liquid manifold with the solvent respectively and compressed air cleaning pipeline is connected；Institute
The other end of logical liquid manifold is stated close to the clean-out opening；
Pipeline is cleaned in one end of the vent manifold with the solvent respectively and compressed air cleaning pipeline is connected；Institute
The other end of vent manifold is stated close to the seal of the manifold cleaning container.
In manifold cleaning method of the present invention, the length of the logical liquid manifold is more than the length of the vent manifold
Degree.
In manifold cleaning method of the present invention, the solvent cleaning pipeline includes being used to control the solvent to clean
The first switch of pipeline, the compressed air cleaning pipeline includes being used to control the second of the compressed air cleaning pipeline to open
Close.
In manifold cleaning method of the present invention, when cleaning pipeline input cleaning solvent by the solvent, institute
First switch unlatching is stated, the second switch is closed；
Compressed air is inputted when cleaning pipeline by the compressed air, the first switch is closed, the second switch
Open.
The manifold cleaning device and manifold cleaning method of the present invention is by the way that manifold is fixed in manifold cleaning container, then
Pipeline is cleaned by solvent and compressed air is cleaned pipeline and cleaned, it is achieved thereby that effective cleaning to manifold, is solved
Existing manifold can not be cleaned effectively, so that the technical problem polluted to photoresist pipeline.
Brief description of the drawings
Technical scheme in order to illustrate the embodiments of the present invention more clearly, makes required in being described below to embodiment
Accompanying drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the present invention, for
For those of ordinary skill in the art, on the premise of not paying creative work, other can also be obtained according to these accompanying drawings
Accompanying drawing.Wherein：
Fig. 1 is the structural representation of the preferred embodiment of the manifold cleaning device of the present invention；
Fig. 2 is the flow chart of the corresponding manifold cleaning method of manifold cleaning device of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.Based on this
Embodiment in invention, it is every other that those of ordinary skill in the art are obtained under the premise of performing creative labour is not made
Embodiment, belongs to the scope of protection of the invention.
Fig. 1 is refer to, Fig. 1 is the structural representation of the preferred embodiment of the manifold cleaning device of the present invention.This is preferred real
Applying the manifold cleaning device 10 of example includes manifold cleaning container 11, manifold container lid 12, solvent cleaning pipeline 13 and compression sky
Gas cleans pipeline 14.
Manifold cleaning container 11 have one be arranged on manifold cleaning container top seal (not shown) and
It is arranged on the clean-out opening 111 of the bottom of manifold cleaning container.Manifold container lid 12 is arranged on the opening of manifold cleaning container, is used for
Seal is sealed, manifold container lid 12 is provided with manifold fixing hole and at least one exhaust that at least one is used for secure manifold
Hole 121；Solvent cleaning pipeline 13 is arranged on the top of manifold container lid 12, and one end is connected with manifold, and other end input cleaning is molten
Agent；Compressed air cleaning pipeline 14 is arranged on the top of manifold container lid 12, and one end is connected with manifold, and other end input compression is empty
Gas.
Specifically, manifold includes logical liquid manifold 151 and vent manifold 152, manifold fixing hole includes being used for fixed logical liquid
The logical liquid manifold fixing hole 121 of manifold 151 and the vent manifold fixing hole 122 for fixing vent manifold 152；Logical liquid manifold
Pipeline 13 is cleaned in 151 one end with solvent respectively and compressed air cleaning pipeline 14 is connected；The other end of logical liquid manifold 151 is approached
Clean-out opening 111；Pipeline 13 is cleaned in one end of vent manifold 152 with solvent respectively and compressed air cleaning pipeline 14 is connected；Ventilation
Seal of the other end of manifold 152 close to manifold cleaning container 11.The length for wherein leading to liquid manifold 151 is more than vent manifold
152 length.
In addition solvent cleaning pipeline 13 includes the first switch 131 for being used to control solvent to clean pipeline 13, and compressed air is clear
Wash the second switch 141 that pipeline 14 includes being used to control compressed air to clean pipeline 14.
The manifold cleaning device 10 of this preferred embodiment is in use, manifold to be fixed on to the manifold of manifold container lid 12 first
On fixing hole, specifically, logical liquid manifold 151 is fixed on logical liquid manifold fixing hole 121, vent manifold 152 is fixed on ventilation discrimination
On pipe fixing hole 122.
Then manifold container lid 12 is closed at the opening of manifold cleaning container 11, to seal the close of manifold cleaning container
Sealing, simultaneously closes off clean-out opening 111.
The second switch 141 on compressed air cleaning pipeline 14 is then turned on, first closed on solvent cleaning pipeline 13
Compressed air on switch 131, compressed air cleaning pipeline 14 carries out purging behaviour to logical liquid manifold 151 and vent manifold 152
Make, the photoresist remained in liquid manifold 151 will be led to and be expelled in manifold cleaning container；Compressed air is from manifold container lid simultaneously
Steam vent 121 on 12 is discharged.
Then the second switch 141 compressed air cleaned on pipeline 14 is closed, and opens the on solvent cleaning pipeline 13
One switch 131, cleaning solvent cleans pipeline 13 by solvent and inputted into manifold cleaning container 12, so logical liquid manifold 151 with
And vent manifold 152 can carry out soaking and washing operation in the cleaning solvent in manifold cleaning container 11.Here preferably will be logical
Liquid manifold 151 is fully immersed in cleaning solvent.
First switch 131 and second switch 141 are then simultaneously closed off, the clean-out opening of the bottom of manifold cleaning container 11 is opened
111, so the cleaning solvent in manifold cleaning container 11 is discharged from clean-out opening 111.
Then the first switch 131 solvent cleaned on pipeline 13 is closed, and opens the on compressed air cleaning pipeline 14
Two switches 141, such compressed air can be blown leading to the cleaning solvent remained on liquid manifold 151 and vent manifold 152
Dry run.Here the other end of preferably logical liquid manifold 151 is close to clean-out opening 111, and the other end of vent manifold 152 is clear close to manifold
Wash the seal of container 11, the compressed air of the discharge of such vent manifold 152 can be very well by cleaning solvent from clean-out opening 111
Middle discharge.
Finally logical liquid manifold 151 and vent manifold 152 are taken out from the manifold fixing hole of manifold container lid 12, so i.e.
Complete the manifold cleaning process of the manifold cleaning device 10 of this preferred embodiment.
The manifold cleaning device of this preferred embodiment can effectively be cleaned by the setting of manifold cleaning container to manifold.
The present invention also provides a kind of manifold cleaning method, refer to Fig. 2, and Fig. 2 is corresponding for the manifold cleaning device of the present invention
Manifold cleaning method flow chart.Above-mentioned manifold cleaning device can be used to carry out for the manifold cleaning method of this preferred embodiment
Implement.
Change manifold cleaning device clear including manifold cleaning container, manifold container lid, solvent cleaning pipeline and compressed air
Wash pipeline.
Manifold cleaning container has the seal at a top for being arranged on manifold cleaning container and is arranged on manifold cleaning
The clean-out opening of the bottom of container.Manifold container lid is arranged on the opening of manifold cleaning container, for sealing seal, manifold container
Lid, which is provided with least one, is used for the manifold fixing hole and at least one steam vent of secure manifold；Solvent cleaning pipeline is arranged on
The top of manifold container lid, one end is connected with manifold, other end input cleaning solvent；Compressed air cleaning pipeline is arranged on manifold
The top of container cover, one end is connected with manifold, other end input compressed air.
Specifically, manifold includes logical liquid manifold and vent manifold, manifold fixing hole includes being used for fixed logical liquid manifold
Logical liquid manifold fixing hole and the vent manifold fixing hole for fixing vent manifold；One end of logical liquid manifold is clear with solvent respectively
Wash pipeline and compressed air cleaning pipeline connection；The other end of logical liquid manifold is close to clean-out opening；One end of vent manifold respectively with
Solvent cleans pipeline and compressed air cleaning pipeline connection；Seal of the other end of vent manifold close to manifold cleaning container.
The length for wherein leading to liquid manifold is more than the length of vent manifold.
Solvent cleaning pipeline includes the first switch for being used to control solvent to clean pipeline, and compressed air cleaning pipeline includes using
The second switch of pipeline is cleaned in control compressed air.
The manifold cleaning method of this preferred embodiment includes：
Step S201, manifold is fixed on manifold fixing hole, and close clean-out opening；
Specifically, logical liquid manifold is fixed on logical liquid manifold fixing hole, vent manifold is fixed on vent manifold fixing hole,
Then manifold container lid is closed at the opening of manifold cleaning container, to seal the seal of manifold cleaning container, closed simultaneously
Close clean-out opening.
Step S202, cleans pipeline by solvent and compressed air cleaning pipeline is connected with manifold one end；To be cleaned
Operation.
Step S203, cleans pipeline by compressed air and inputs compressed air, to carry out purge operation to manifold.
Specifically, the second switch on compressed air cleaning pipeline is opened, the compressed air on compressed air cleaning pipeline
Purge operation is carried out to logical liquid manifold and vent manifold, the photoresist remained in liquid manifold will be led to and be expelled to manifold cleaning appearance
In device；The steam vent discharge that compressed air is covered from manifold container simultaneously.
Step S204, cleans pipeline by solvent and inputs cleaning solvent, so that manifold carries out soaking clear in cleaning solvent
Wash；
Specifically, the second switch that compressed air is cleaned on pipeline is closed, first opened on solvent cleaning pipeline opens
Close, cleaning solvent cleans pipeline by solvent and inputted into manifold cleaning container, so logical liquid manifold and vent manifold can be with
Soaking and washing operation is carried out in cleaning solvent in manifold cleaning container.Here logical liquid manifold is preferably fully immersed in cleaning
In solvent.
Step S205, opens clean-out opening and discharges cleaning solvent；
Specifically, simultaneously close off first switch and second switch, open the clean-out opening of manifold cleaning container bottom, so from
Clean-out opening discharges the cleaning solvent in manifold cleaning container.
Step S206, cleans pipeline by compressed air and inputs compressed air, so as to which manifold is dried up.
Specifically, the first switch that solvent is cleaned on pipeline is closed, second opened on compressed air cleaning pipeline opens
Close, such compressed air can carry out drying operation to leading to the cleaning solvent remained on liquid manifold and vent manifold.Here it is excellent
The other end of liquid manifold is gated close to clean-out opening, the other end of vent manifold so leads to close to the seal of manifold cleaning container
The compressed air of the discharge of gas manifold very well can discharge cleaning solvent from clean-out opening.
Finally logical liquid manifold and vent manifold are taken out from the manifold fixing hole of manifold container lid.So complete this
The manifold cleaning process of the manifold cleaning method of preferred embodiment.
The manifold cleaning device and manifold cleaning method of the present invention is by the way that manifold is fixed in manifold cleaning container, then
Pipeline is cleaned by solvent and compressed air is cleaned pipeline and cleaned, it is achieved thereby that effective cleaning to manifold, is solved
Existing manifold can not be cleaned effectively, so that the technical problem polluted to photoresist pipeline.
In summary, although the present invention it is disclosed above with preferred embodiment, but above preferred embodiment and be not used to limit
The system present invention, one of ordinary skill in the art without departing from the spirit and scope of the present invention, can make various changes and profit
Adorn, therefore protection scope of the present invention is defined by the scope that claim is defined.
Claims (10)
1. a kind of manifold cleaning device, it is characterised in that including：
Manifold cleaning container, seal with a top for being arranged on the manifold cleaning container and is arranged on the manifold
The clean-out opening of the bottom of cleaning container；
Manifold container lid, is arranged on the opening of the manifold cleaning container, for sealing the seal, the manifold container lid
Being provided with least one is used for the manifold fixing hole and at least one steam vent of secure manifold；
Solvent cleans pipeline, is arranged on the top of the manifold container lid, one end is connected with the manifold, other end input cleaning
Solvent；And
Compressed air cleans pipeline, is arranged on the top of the manifold container lid, one end is connected with the manifold, other end input
Compressed air.
2. manifold cleaning device according to claim 1, it is characterised in that the manifold includes logical liquid manifold and ventilation
Manifold, the manifold fixing hole is including for fixing the logical liquid manifold fixing hole of the logical liquid manifold and for fixing described lead to
The vent manifold fixing hole of gas manifold；
Pipeline is cleaned in one end of the logical liquid manifold with the solvent respectively and compressed air cleaning pipeline is connected；It is described logical
The other end of liquid manifold is close to the clean-out opening；
Pipeline is cleaned in one end of the vent manifold with the solvent respectively and compressed air cleaning pipeline is connected；It is described logical
Seal of the other end of gas manifold close to the manifold cleaning container.
3. manifold cleaning device according to claim 2, it is characterised in that the length of the logical liquid manifold is more than described logical
The length of gas manifold.
4. manifold cleaning device according to claim 2, it is characterised in that the solvent cleaning pipeline includes being used to control
The solvent cleans the first switch of pipeline, and the compressed air cleaning pipeline includes being used to control the compressed air cleaning pipe
The second switch in road.
5. a kind of manifold cleaning method that manifold cleaning device is cleaned to manifold, the manifold cleaning device includes：
Manifold cleaning container, seal with a top for being arranged on the manifold cleaning container and is arranged on the manifold
The clean-out opening of the bottom of cleaning container；
Manifold container lid, is arranged on the opening of the manifold cleaning container, for sealing the seal, the manifold container lid
Being provided with least one is used for the manifold fixing hole and at least one steam vent of secure manifold；
Solvent cleans pipeline, is arranged on the top of the manifold container lid, one end is connected with the manifold, other end input cleaning
Solvent；And
Compressed air cleans pipeline, is arranged on the top of the manifold container lid, one end is connected with the manifold, other end input
Compressed air；Characterized in that, the manifold cleaning method includes：
The manifold is fixed on the manifold fixing hole, and closes the clean-out opening；
The solvent is cleaned into pipeline and compressed air cleaning pipeline is connected with described manifold one end；
Pipeline is cleaned by the solvent and inputs cleaning solvent, so that the manifold carries out soaking clear in the cleaning solvent
Wash；
The clean-out opening is opened to discharge the cleaning solvent；And
Pipeline is cleaned by the compressed air and inputs compressed air, so as to which the manifold is dried up.
6. manifold cleaning method according to claim 5, it is characterised in that described that pipeline input is cleaned by the solvent
Also include before the step of cleaning solvent：
Pipeline is cleaned by the compressed air and inputs compressed air, to carry out purge operation to the manifold.
7. manifold cleaning method according to claim 5, it is characterised in that the manifold includes logical liquid manifold and ventilation
Manifold, the manifold fixing hole is including for fixing the logical liquid manifold fixing hole of the logical liquid manifold and for fixing described lead to
The vent manifold fixing hole of gas manifold；
Pipeline is cleaned in one end of the logical liquid manifold with the solvent respectively and compressed air cleaning pipeline is connected；It is described logical
The other end of liquid manifold is close to the clean-out opening；
Pipeline is cleaned in one end of the vent manifold with the solvent respectively and compressed air cleaning pipeline is connected；It is described logical
Seal of the other end of gas manifold close to the manifold cleaning container.
8. manifold cleaning method according to claim 7, it is characterised in that the length of the logical liquid manifold is more than described logical
The length of gas manifold.
9. manifold cleaning method according to claim 7, it is characterised in that the solvent cleaning pipeline includes being used to control
The solvent cleans the first switch of pipeline, and the compressed air cleaning pipeline includes being used to control the compressed air cleaning pipe
The second switch in road.
10. manifold cleaning method according to claim 9, it is characterised in that inputted when cleaning pipeline by the solvent
During cleaning solvent, the first switch is opened, and the second switch is closed；
Compressed air is inputted when cleaning pipeline by the compressed air, the first switch is closed, and the second switch is opened.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710408539.4A CN107008707B (en) | 2017-06-02 | 2017-06-02 | Manifold cleaning device and manifold cleaning method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710408539.4A CN107008707B (en) | 2017-06-02 | 2017-06-02 | Manifold cleaning device and manifold cleaning method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107008707A true CN107008707A (en) | 2017-08-04 |
| CN107008707B CN107008707B (en) | 2019-05-03 |
Family
ID=59452620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710408539.4A Active CN107008707B (en) | 2017-06-02 | 2017-06-02 | Manifold cleaning device and manifold cleaning method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107008707B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109482582A (en) * | 2017-09-13 | 2019-03-19 | 株式会社斯库林集团 | Cleaning apparatus, cleaning method and fluid Supplying apparatus |
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| KR20010095594A (en) * | 2000-04-11 | 2001-11-07 | 정주호 | Washing apparatus of nozzle for salt spray testing system |
| CN1379447A (en) * | 2001-04-10 | 2002-11-13 | 华邦电子股份有限公司 | Chip washing equipment preventing blocking of pipe wall |
| CN203304232U (en) * | 2013-05-16 | 2013-11-27 | 昆山市超声仪器有限公司 | Flexible endoscope cleaning system with closed type cleaning containers |
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| CN109482582B (en) * | 2017-09-13 | 2021-09-07 | 株式会社斯库林集团 | Cleaning tool, cleaning method, and liquid supply device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107008707B (en) | 2019-05-03 |
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