CN1379447A - Chip washing equipment preventing blocking of pipe wall - Google Patents
Chip washing equipment preventing blocking of pipe wall Download PDFInfo
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- CN1379447A CN1379447A CN 01116837 CN01116837A CN1379447A CN 1379447 A CN1379447 A CN 1379447A CN 01116837 CN01116837 CN 01116837 CN 01116837 A CN01116837 A CN 01116837A CN 1379447 A CN1379447 A CN 1379447A
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- tube wall
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Abstract
An equipment for washing chips features its additional cleaner for pipeline. Under the trigger of liquid drainage action, the gas supply into the gas pipeline is stopped, but a cleaning liquid that dissolves the particles in the gas pipeline is introduced into it to clean the inner surface of the pipeline. After cleaning is finished, the cleaning liuqid is cut off and gas is supplied into the gas pipeline again.
Description
The relevant a kind of chip washing/cleaning equipment of the present invention, particularly relevant a kind of chip washing/cleaning equipment that prevents tube wall obstruction function that has.
In semiconductor fabrication now, the chip washing/cleaning equipment is the frequent and indispensable device of a use.See also Fig. 1 shown in, it is the structural representation of conventional chip washing/cleaning equipment, wherein reservoir 11 is in order to store clean solution, buffer oxide layer etching solution (Buffer HF for example, be called for short BHF or Buffer OxideEtcher, be called for short BOE), and be to make the controller 12 of chip washing/cleaning equipment effectively grasp the liquid level of cleaning solution in the reservoir 11, and be provided with a pressure type liquid level sensor 13 (Pressure Leveling Sensor), it is to utilize after by described pressure type liquid level sensor 13 pipeline 14 to feed to the stored liquid of described reservoir 11 again an inert gas (being generally nitrogen), pressure type liquid level sensor 13 this moment measured gas atmosphere value in pipeline 14 changes, just can correspondingly obtain the height change of stored liquid levels in the reservoir 11, and can send the low liquid level (Low Level) of representative respectively, suitable liquid level (Fix Level), the LL of high level (High Level), FL, three kinds of liquid level signals of HL can be carried out automatic drain and the action of presenting liquid shown in Fig. 2 flow chart whereby to described controller 12.
The chip-count of being cleaned when the chip washing/cleaning equipment has reached a preset number, just represent that the clean solution in the reservoir 11 needs to change, this moment, controller 12 just sent a discharge opeing signal to being communicated in a tapping valve 15 that cleans reservoir 11 bottoms, tapping valve 15 is opened this moment, clean solution in the reservoir 11 just can be discharged, at the same time, pressure type liquid level sensor 13 continues the height change of stored liquid levels in the corresponding reservoir 11 and sends LL, three kinds of liquid level signals of FL or HL are to described controller 12, and receive pressure type liquid level sensor 13 when sending the liquid level signal of LL when controller 12, controller 12 just controls and cuts out after described tapping valve 15 is opened one period set time (in order to guarantee to clean the complete emptying of solution) again, controller 12 is again after the control valve (not shown) of feed flow pipeline (not shown) is sent feedback liquid signal then, the feed flow pipeline just begins feed flow in reservoir 11, receives until controller 12 to stop after pressure type liquid level sensor 13 sends the liquid level signal of FL.
And because above-mentioned 14 gases that feed again in the liquid of described reservoir 11 extremely with described pressure type liquid level sensor 13 by the road generally are to use nitrogen (N
2), and for considering the cleanliness factor on the manufacture craft, employed nitrogen passes through drying program all specially, to remove unnecessary aqueous vapor.Therefore work as this drying nitrogen and be passed into clean solution; especially buffer oxide layer etching solution (the Buffer HF that high concentration is saturated; be called for short BHF or Buffer OxideEtcher; be called for short BOE) etc. during the aqueous solution; can produce the phenomenon of a large amount of suctions; the moisture that causes being attached to solution on the pipeline 14 exit tube walls will be separated out solute because of drying; and then cause particulate to be attached to tube wall even blocking pipeline; make pressure type liquid level sensor 13 can't operate as normal to detect correct liquid level; therefore necessary shut down for drainage is with detergent line obstruction place; chemical liquid and waste of time had so both been caused as buffer oxide layer etching solution etc.; easily cause cleaning personnel's chemistry injury again, and the shortcoming that how to overcome above-mentioned prior art is an exploitation main target of the present invention.
A purpose of the present invention provides a kind of chip washing/cleaning equipment that prevents tube wall obstruction function that has, and it can avoid cleaning fluid and waste of time and cleaning personnel's chemistry injury.
Another object of the present invention provides a kind of chip washing/cleaning equipment that prevents tube wall obstruction function that has, it can reduce the unsaturation of described gas, thereby and then reduces described gas to enter saturated solution and produce particulate and separate out the phenomenon of stopping up tube wall and prevent that tube wall from stopping up.
For achieving the above object, of the present invention have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, it comprises: one cleans the solution storage device, stores one and cleans solution, when the chip-count of being cleaned arrives a preset number, then described clean solution storage device carries out discharge opeing action; One supply air line feeds a gas to described clean solution, and the air pressure in the described supply air line is that the liquid level with described clean solution changes; One pressure type liquid level sensor is connected in described supply air line, and the air pressure change in the corresponding described supply air line is sent a liquid level signal to described clean solution storage device; Be characterized in, also comprise: an automatic flushing device, the triggering of corresponding described discharge opeing action, make described supply air line stop gas being fed in the described clean solution, and the cleaning fluid of separating out particulate that provides solubilized to be jammed in the described supply air line to described supply air line cleans to carry out tube wall, and cut off the described liquid level signal that described pressure type liquid level sensor exports described clean solution storage device to, and after cleaning finishes, make cleaning fluid stop to enter described supply air line and stop tube wall and clean, make gas reenter described supply air line and recover the described liquid level signal of described pressure type liquid level sensor, prevent that to clean automatically tube wall from stopping up by tube wall to described clean solution storage device output.
For achieving the above object, of the present invention have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, comprise: one cleans the solution storage device, and it stores cleans the required clean solution of chip, carries out a discharge opeing action when chip-count of being cleaned arrives a preset number and work as; One supply air line feeds a gas to cleaning in the solution, and the air pressure in the described supply air line is to change with the liquid level of cleaning solution; One pressure type liquid level sensor is connected in described supply air line, and the air pressure change in the corresponding described supply air line is sent a liquid level signal to described clean solution storage device; One cleaning fluid pipeline is communicated on the supply air line that leads to described clean solution storage device, and it is used for being jammed in to described supply air line supply solubilized the cleaning fluid of separating out particulate of described supply air line; An and cup-shaped joint, it is used to make described cleaning fluid pipeline to be communicated to the supply air line that leads to described clean solution storage device, to store described cleaning fluid and to strengthen the contact area of described cleaning fluid and described gas, so as to reducing the unsaturation of described gas, and then reduce described gas to enter saturated solution and produce particulate and separate out the phenomenon of stopping up tube wall.
According to above-mentioned conception, the automatic flushing device that the present invention sets up comprises following assembly: a triple valve, a cleaning fluid pipeline, a cleaning valve, a controlled switch and a timer.And the effect of each assembly is as follows: first end of described triple valve is connected in described pressure type liquid level sensor, second end is connected on the supply air line that leads to described reservoir, the 3rd end is communicated to atmosphere, it also is electrically connected on described controller, switch between one second state that one first state that first end is communicated with second end and first end are communicated with the 3rd end in order to the triggering of corresponding described discharge opeing signal, described cleaning fluid pipeline be connected in described triple valve second end and lead to described reservoir supply air line between, in order to cleaning fluid that the described particulate of a solubilized is provided to the supply air line that leads to described reservoir, described cleaning valve is to be arranged on the described cleaning fluid pipeline, whether enters the described supply air line that leads to described reservoir in order to control described cleaning fluid; Described controlled switch is to be electrically connected on described pressure type liquid level sensor and described controller, the triggering of corresponding described discharge opeing signal and conducting or open circuit; And described timer is to be electrically connected between described controller, described pressure type liquid level sensor, described triple valve and described cleaning valve,, send one again and stop purge signal behind timing one Preset Time in order to the triggering that is subjected to the described discharge opeing signal that described controller sends to described pressure type liquid level sensor, described triple valve and described cleaning valve.
According to above-mentioned conception, have and prevent that tube wall from stopping up cleaning fluid pipeline described in the chip washing/cleaning equipment of function and being connected in described triple valve second end and leading to joint between the supply air line of described reservoir, it is to be a cup-shaped joint, in order to store described cleaning fluid and to strengthen the contact area of described cleaning fluid and described gas.
According to above-mentioned conception, have and prevent that tube wall from stopping up and be stored in the chip washing/cleaning equipment of function that to clean solution in the described reservoir be a buffer oxide layer etching solution (Buffer HF is called for short BHF or Buffer Oxide Etcher, is called for short BOE).
According to above-mentioned conception, have and prevent that tube wall from stopping up that gas is an inert gas described in the chip washing/cleaning equipment of function.
According to above-mentioned conception, have and prevent that tube wall from stopping up that inert gas is nitrogen (N2), air or argon gas (Ar) described in the chip washing/cleaning equipment of function.
According to above-mentioned conception, has gas described in the chip washing/cleaning equipment that prevents tube wall obstruction function through dried.
According to above-mentioned conception, have and prevent that tube wall from stopping up that cleaning fluid is water (H described in the chip washing/cleaning equipment of function
2O).
According to above-mentioned conception, have and prevent that tube wall from stopping up that controlled switch is a relay (Relay) described in the chip washing/cleaning equipment of function.
Because chip washing/cleaning equipment of the present invention has additional an automatic flushing device, it can change the neutral gear of cleaning solution in described chip washing/cleaning equipment carry out the cleaning of described supply air line tube wall, and can avoid the outlet tube wall of described supply air line to suffer the obstruction of particulate; It also in due course machine carry out tube wall and clean, and under the prerequisite that does not influence the work of described chip washing/cleaning equipment, realize the function that prevents that tube wall from stopping up.
For clearer understanding purpose of the present invention, characteristics and above-mentioned and other advantage, preferred embodiment of the present invention is elaborated below in conjunction with accompanying drawing.
Fig. 1 is the structural representation for the existing chip washing/cleaning equipment;
Fig. 2 carries out automatic drain and the action flow chart of presenting liquid for the existing chip washing/cleaning equipment;
Fig. 3 is the structural representation of the chip washing/cleaning equipment of a preferred embodiment of the present invention;
Fig. 4 is that a preferred embodiment of the present invention is carried out automatic drain, feedback liquid and cleaned the action flow chart of tube wall to prevent that tube wall from stopping up automatically.
See also Fig. 3, it is the structural representation of the chip washing/cleaning equipment of a preferred embodiment of the present invention.As shown in the figure, it includes clean solution storage device, tapping valve supply air line 22, pressure type liquid level sensor 23 and the automatic flushing device that is constituted with reservoir 21, controller 24 and tapping valve 25.Store in the described reservoir 21 and clean the required clean solution of chip, for example buffer oxide layer etching solution (Buffer HF is called for short BHF or Buffer Oxide Etcher, is called for short BOE).Described supply air line 22 feeds a kind of inert gas to the stored buffer oxide layer etching solution of described reservoir 21, air pressure in the wherein said supply air line 22 is to change with the liquid level of cleaning solution in the described reservoir 21, therefore can cooperate with described pressure type liquid level sensor 23 and detect the liquid level of cleaning solution in the described reservoir 21.After the air pressure change of described pressure type liquid level sensor 23 in detecting described supply air line 22, send a liquid level signal, for example the signal of liquid level (LL), suitable liquid level (FL) or three kinds of different liquid levels of high level (HL) is hanged down in representative, to described controller 24, make described controller 24 can monitor the liquid level of described reservoir 21 at any time, to make the corresponding measure of any necessity.In addition, when the chip-count that described controller 24 is also cleaned in described chip washing/cleaning equipment arrives a preset number, send a discharge opeing signal, make it to open discharge opeing to change the chip cleaning fluid to described tapping valve 25.Automatic flushing device of the present invention is convenient to carry out this moment tube wall and is cleaned action.
As shown in Figure 3, in a preferred embodiment of the present invention, described automatic flushing device comprises a triple valve 26, a cleaning valve 27, a cleaning fluid pipeline 28, a controlled switch 29 and a timer 30.First end of described triple valve 26 is connected in described pressure type liquid level sensor 23, the second ends and is connected on the supply air line 22 that leads to described reservoir, and the 3rd end is communicated to atmosphere.How chip washing/cleaning equipment of the present invention realizes preventing that tube wall from stopping up and the effect of cleaning automatically, then sees also flow chart shown in Figure 4.
When the chip-count of being cleaned when described chip washing/cleaning equipment arrives a preset number, controller 24 just sends a discharge opeing signal to described tapping valve 25, make it to open to carry out the discharge opeing action, this moment, the discharge opeing signal also triggered the described timer 30 one section Preset Time that picks up counting, and be sent to described triple valve 26 by described timer 30, cleaning valve 27 and controlled switch 29, described cleaning valve 27 is opened, described triple valve 26 switches to second state (first end is connected to the 3rd end) by first state (first end is connected to second end), and described controlled switch 29 is open circuit, like this, the cleaning fluid in the described cleaning fluid pipeline 28 just can enter described supply air line 22 and carries out tube wall and clean.In addition, in order to prevent that cleaning fluid from pouring in down a chimney back pressure type liquid level sensor 23 and avoiding too much gas breakdown pressure formula liquid level sensor 23, when described controller 24 sends described discharge opeing signal, also block the described liquid level signal that described pressure type liquid level sensor 23 exports described controller to simultaneously, produce misoperation to prevent controller.At described timer 30 behind the described section Preset Time that described discharge opeing signal triggering is postponed, be after the tube wall cleaning finishes, described timer 30 sends one and stops purge signal to cut out described cleaning valve 27, described triple valve 26 is switched to first state and the described controlled switch 29 of conducting, at this moment, cleaning fluid just stops to enter supply air line 22, and gas recovers to enter described supply air line 22, and described pressure type liquid level sensor 23 also recovers to export to the described controller 24 of liquid level signal simultaneously.So just, the tube wall of reaching a circulation cleans automatically.
For realizing better automatic clenaing effect, the joint that described cleaning fluid pipeline 28 is communicated on the supply air line 22 that leads to described reservoir 21 is preferably a cup-shaped joint 31.Because when cleaning valve 27 is closed, when cleaning fluid stops to enter supply air line 22, cleaning fluid will reside in the pipeline, and cup-shaped joint 31 can be in order to store described cleaning fluid and to strengthen the contact area of described cleaning fluid and described gas, because the vapour pressure of gas under constant temperature is definite value, cleaning fluid will evaporate in the gas, so as to reducing the unsaturation of described gas, and then reduce described gas to enter saturated solution and will produce particulate and separate out the phenomenon of stopping up tube wall.
In addition, aspect the gas that cooperates the clean solution running of chip, to for example buffer oxide layer etching solution (Buffer HF commonly used, be called for short BHF or Buffer Oxide Etcher, abbreviation BOE) cleaning fluid, the inert gas that supply air line 22 is provided can be nitrogen (N2), air or the argon gas (Ar) through dry run.In this case, provide to described supply air line 22 by described cleaning fluid pipeline 28 and can be water (H in order to the cleaning fluid that cleans tube wall
2O).Described controlled switch 29 can adopt relay (Relay).Certainly, the present invention is applicable to that also any working pressure formula liquid level sensor 23 carries out liquid level monitoring and have tube wall stopping up on the chip washing/cleaning equipment of puzzlement.
Claims (23)
1. one kind has the chip washing/cleaning equipment that prevents tube wall obstruction function, comprising:
One cleans the solution storage device, stores one and cleans solution, and when the chip-count of being cleaned arrives a preset number, then described clean solution storage device carries out discharge opeing action;
One supply air line feeds a gas to described clean solution, and the air pressure in the described supply air line is that the liquid level with described clean solution changes;
One pressure type liquid level sensor is connected in described supply air line, and the air pressure change in the corresponding described supply air line is sent a liquid level signal to described clean solution storage device; It is characterized in that, also comprise:
One automatic flushing device, the triggering of corresponding described discharge opeing action, make described supply air line stop gas being fed in the described clean solution, and the cleaning fluid of separating out particulate that provides solubilized to be jammed in the described supply air line to described supply air line cleans to carry out tube wall, and cut off the described liquid level signal that described pressure type liquid level sensor exports described clean solution storage device to, and after cleaning finishes, make cleaning fluid stop to enter described supply air line and stop tube wall and clean, make gas reenter described supply air line and recover the described liquid level signal of described pressure type liquid level sensor, prevent that to clean automatically tube wall from stopping up by tube wall to described clean solution storage device output.
2. as claimed in claim 1 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, is characterized in that described clean solution storage device comprises:
One reservoir is in order to store clean solution;
One controller is electrically connected on described pressure type liquid level sensor, and in order to receiving described liquid level signal, and the chip-count that corresponding described chip washing/cleaning equipment cleaned arrives described preset number and sends a discharge opeing signal; And
One tapping valve is electrically connected on described controller, and the triggering of corresponding described discharge opeing signal and close or open is in order to finish described discharge opeing action.
3. as claimed in claim 2 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, is characterized in that described automatic flushing device comprises:
One triple valve, its first end is connected in described pressure type liquid level sensor, second end is connected in the supply air line that leads to described reservoir, the 3rd end is communicated to atmosphere, it is electrically connected on described controller, switches between one second state that one first state that first end is communicated with second end and first end are communicated with the 3rd end in order to the triggering of corresponding described discharge opeing signal;
One cleaning fluid pipeline is connected in described triple valve second end and leads between the supply air line of described reservoir, it in order to cleaning fluid that the described particulate of a solubilized is provided to the supply air line that leads to described reservoir;
One cleaning valve is arranged on the described cleaning fluid pipeline, whether enters the described supply air line that leads to described reservoir in order to control described cleaning fluid;
One controlled switch is electrically connected on described pressure type liquid level sensor and described controller, the triggering of its corresponding described discharge opeing signal and conducting or open circuit; And
One timer, be electrically connected on described controller, described pressure type liquid level sensor, between described triple valve and the described cleaning valve, in order to the triggering that is subjected to the described discharge opeing signal that described controller sends and behind timing one Preset Time, send one again and stop purge signal to described pressure type liquid level sensor, described triple valve and described cleaning valve, and then when described controller sends described discharge opeing signal and discharges the stored liquid of described reservoir to trigger described tapping valve to open, the described cleaning valve of described discharge opeing signal triggering is opened, described triple valve switches to second state and described controlled switch opens circuit, with carrying out the tube wall cleaning so that cleaning fluid enters the supply air line that leads to described reservoir, prevent the described liquid level signal that cleaning fluid enters described pressure type liquid level sensor and blocks described pressure type described controller that liquid level sensor exports to, and close later described cleaning valve in described Preset Time, described triple valve is switched to first state and described controlled switch conducting, clean with stop tube wall so that cleaning fluid stops to enter the supply air line that leads to described reservoir, the described liquid level signal that gas is entered lead to the supply air line of described reservoir and recover described pressure type described controller that liquid level sensor exports to stops up to prevent tube wall.
4. as claimed in claim 3 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, it is characterized in that, described cleaning fluid pipeline is connected in described triple valve second end and leads to joint between the supply air line of described reservoir, described joint is a cup-shaped joint, in order to store described cleaning fluid and to strengthen the contact area of described cleaning fluid and described gas.
5. as claimed in claim 3 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, is characterized in that described controlled switch is a relay (Relay).
6. as claimed in claim 1 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, it is characterized in that, the clean solution that is stored in the described clean solution storage device is a buffer oxide layer etching solution (Buffer HF is called for short BHF or Buffer Oxide Etcher, is called for short BOE).
7. as claimed in claim 1 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, is characterized in that described gas is a kind of inert gas.
8. as claimed in claim 7 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, is characterized in that described gas is to be nitrogen (N2).
9. as claimed in claim 7 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, is characterized in that described gas is air.
10. as claimed in claim 7 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, is characterized in that described gas is an argon gas (Ar)
11. as claimed in claim 1 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, it is characterized in that described gas is through dried.
12. as claimed in claim 1 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, is characterized in that described cleaning fluid is water (H
2O).
13. one kind has and prevents that tube wall from stopping up the chip washing/cleaning equipment of function, comprising:
One cleans the solution storage device, and it stores cleans the required clean solution of chip, carries out a discharge opeing action when chip-count of being cleaned arrives a preset number and work as;
One supply air line feeds a gas to cleaning in the solution, and the air pressure in the described supply air line is to change with the liquid level of cleaning solution;
One pressure type liquid level sensor is connected in described supply air line, and the air pressure change in the corresponding described supply air line is sent a liquid level signal to described clean solution storage device;
One cleaning fluid pipeline is communicated on the supply air line that leads to described clean solution storage device, and it is used for being jammed in to described supply air line supply solubilized the cleaning fluid of separating out particulate of described supply air line; And
One cup-shaped joint, it is used to make described cleaning fluid pipeline to be communicated to the supply air line that leads to described clean solution storage device, to store described cleaning fluid and to strengthen the contact area of described cleaning fluid and described gas, so as to reducing the unsaturation of described gas, and then reduce described gas to enter saturated solution and produce particulate and separate out the phenomenon of stopping up tube wall.
14. as claimed in claim 13 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, is characterized in that described clean solution storage device comprises:
One reservoir is in order to store clean solution;
One controller is electrically connected on described pressure type liquid level sensor, and in order to receiving described liquid level signal, and the chip-count that corresponding described chip washing/cleaning equipment cleaned arrives described preset number and sends a discharge opeing signal; And
One tapping valve is electrically connected on described controller, and the triggering of corresponding described discharge opeing signal and close or open is in order to finish described discharge opeing action.
15. as claimed in claim 14 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, it is characterized in that, also comprise:
One triple valve, its first end is connected in described pressure type liquid level sensor, second end is connected on the supply air line that leads to described reservoir, the 3rd end is communicated to atmosphere, it also is electrically connected on described controller, switches between one second state that one first state that first end is communicated with second end and first end are communicated with the 3rd end in order to the triggering of corresponding described discharge opeing signal;
One cleaning valve is arranged on the described cleaning fluid pipeline, whether enters the supply air line that leads to described reservoir in order to control described cleaning fluid;
One controlled switch is electrically connected on described pressure type liquid level sensor and described controller, the triggering of its corresponding described discharge opeing signal and conducting or open circuit; And
One timer, be electrically connected on described controller, described pressure type liquid level sensor, between described triple valve and the described cleaning valve, in order to the triggering that is subjected to the described discharge opeing signal that described controller sends and behind timing one Preset Time, send one again and stop purge signal to described pressure type liquid level sensor, described triple valve and described cleaning valve, and then when described controller sends described discharge opeing signal and discharges the stored liquid of described reservoir to trigger described tapping valve to open, making described discharge opeing signal can trigger described cleaning valve opens, described triple valve switches to second state and described controlled switch opens circuit, with carrying out the tube wall cleaning so that cleaning fluid enters the described supply air line that leads to described reservoir, prevent the described liquid level signal that cleaning fluid enters described pressure type liquid level sensor and blocks described pressure type described controller that liquid level sensor exports to, and close later described cleaning valve in described Preset Time, described triple valve is switched to first state and described controlled switch conducting, clean with stop tube wall so that cleaning fluid stops to enter the supply air line that leads to described reservoir, the described liquid level signal that gas is entered lead to the supply air line of described reservoir and recover described pressure type described controller that liquid level sensor exports to stops up to prevent tube wall.
16. as claimed in claim 13 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, it is characterized in that, the clean solution that is stored in the described clean solution storage device is a kind of buffer oxide layer etching solution (BufferHF is called for short BHF or Buffer Oxide Etcher, is called for short BOE).
17. as claimed in claim 13 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, is characterized in that described gas is an inert gas.
18. as claimed in claim 17 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, is characterized in that described inert gas is to be nitrogen (N2).
19. as claimed in claim 17 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, is characterized in that described gas is air.
20. as claimed in claim 17 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, is characterized in that described gas is an argon gas (Ar).
21. as claimed in claim 13 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, it is characterized in that described gas is through dried.
22. as claimed in claim 13 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, is characterized in that described cleaning fluid is water (H2O).
23. as claimed in claim 13 have prevent that tube wall from stopping up the chip washing/cleaning equipment of function, is characterized in that described controlled switch is a relay (Relay).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB011168374A CN1310291C (en) | 2001-04-10 | 2001-04-10 | Chip washing equipment preventing blocking of pipe wall |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB011168374A CN1310291C (en) | 2001-04-10 | 2001-04-10 | Chip washing equipment preventing blocking of pipe wall |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1379447A true CN1379447A (en) | 2002-11-13 |
| CN1310291C CN1310291C (en) | 2007-04-11 |
Family
ID=4662626
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB011168374A Expired - Lifetime CN1310291C (en) | 2001-04-10 | 2001-04-10 | Chip washing equipment preventing blocking of pipe wall |
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| CN (1) | CN1310291C (en) |
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| CN103094150A (en) * | 2011-10-28 | 2013-05-08 | 上海华虹Nec电子有限公司 | Washing device using wet method |
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| KR0179783B1 (en) * | 1995-12-19 | 1999-04-15 | 문정환 | Cleaning apparatus of semiconductor wafer |
| JPH1126423A (en) * | 1997-07-09 | 1999-01-29 | Sugai:Kk | Method and apparatus for processing semiconductor wafer and the like |
| JP2000183008A (en) * | 1998-12-11 | 2000-06-30 | Nec Kansai Ltd | Cleaning-device for chip member |
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- 2001-04-10 CN CNB011168374A patent/CN1310291C/en not_active Expired - Lifetime
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| CN102569008A (en) * | 2010-12-08 | 2012-07-11 | 无锡华润上华科技有限公司 | Hydrofluoric acid disposal system |
| CN102152917A (en) * | 2011-02-14 | 2011-08-17 | 常州亿晶光电科技有限公司 | Liquid replenishing and storing tank with filter device |
| CN103094150A (en) * | 2011-10-28 | 2013-05-08 | 上海华虹Nec电子有限公司 | Washing device using wet method |
| CN103094150B (en) * | 2011-10-28 | 2015-12-02 | 上海华虹宏力半导体制造有限公司 | A kind of wet method decontaminating apparatus |
| CN104425310A (en) * | 2013-09-05 | 2015-03-18 | 中芯国际集成电路制造(上海)有限公司 | Chemical cleaning system |
| CN104425310B (en) * | 2013-09-05 | 2017-07-14 | 中芯国际集成电路制造(上海)有限公司 | Chemically-cleaning device |
| CN104613732A (en) * | 2013-11-05 | 2015-05-13 | 有研新材料股份有限公司 | Before-epitaxy polished section rapid drying method after cleaning |
| CN107919299A (en) * | 2016-10-11 | 2018-04-17 | 盟立自动化股份有限公司 | Tank level control system and method |
| CN107008707A (en) * | 2017-06-02 | 2017-08-04 | 武汉华星光电技术有限公司 | Manifold cleaning device and manifold cleaning method |
| CN112543673A (en) * | 2019-06-27 | 2021-03-23 | 北京康肯环保设备有限公司 | Waste gas harm-removing unit |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1310291C (en) | 2007-04-11 |
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