CN107005023B - 激光传感器模块 - Google Patents

激光传感器模块 Download PDF

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Publication number
CN107005023B
CN107005023B CN201580069482.9A CN201580069482A CN107005023B CN 107005023 B CN107005023 B CN 107005023B CN 201580069482 A CN201580069482 A CN 201580069482A CN 107005023 B CN107005023 B CN 107005023B
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China
Prior art keywords
laser
pulse
cavity surface
current
surface emitting
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CN201580069482.9A
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English (en)
Chinese (zh)
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CN107005023A (zh
Inventor
H.J.梅恩奇
A.M.范德里
S.格龙恩伯恩
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Tongkuai Optoelectronic Device Co ltd
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Koninklijke Philips NV
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18361—Structure of the reflectors, e.g. hybrid mirrors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
    • H01S5/06209—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes in single-section lasers
    • H01S5/06216—Pulse modulation or generation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/10—Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483—Details of pulse systems
    • G01S7/486—Receivers
    • G01S7/4865—Time delay measurement, e.g. time-of-flight measurement, time of arrival measurement or determining the exact position of a peak
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/024—Arrangements for thermal management
    • H01S5/02469—Passive cooling, e.g. where heat is removed by the housing as a whole or by a heat pipe without any active cooling element like a TEC
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18305—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] with emission through the substrate, i.e. bottom emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/42—Arrays of surface emitting lasers
    • H01S5/423—Arrays of surface emitting lasers having a vertical cavity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
    • H01S5/042—Electrical excitation ; Circuits therefor
    • H01S5/0428—Electrical excitation ; Circuits therefor for applying pulses to the laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14—External cavity lasers
    • H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18386—Details of the emission surface for influencing the near- or far-field, e.g. a grating on the surface

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Semiconductor Lasers (AREA)
  • Measurement Of Optical Distance (AREA)
CN201580069482.9A 2014-12-19 2015-12-11 激光传感器模块 Active CN107005023B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP14199083.8 2014-12-19
EP14199083 2014-12-19
PCT/EP2015/079396 WO2016096647A1 (en) 2014-12-19 2015-12-11 Laser sensor module

Publications (2)

Publication Number Publication Date
CN107005023A CN107005023A (zh) 2017-08-01
CN107005023B true CN107005023B (zh) 2020-03-24

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CN201580069482.9A Active CN107005023B (zh) 2014-12-19 2015-12-11 激光传感器模块

Country Status (7)

Country Link
US (1) US10680411B2 (https=)
EP (1) EP3235078B1 (https=)
JP (1) JP6849593B2 (https=)
CN (1) CN107005023B (https=)
BR (1) BR112017012605A2 (https=)
RU (1) RU2696335C2 (https=)
WO (1) WO2016096647A1 (https=)

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EP3493339B1 (en) * 2017-12-04 2022-11-09 ams AG Semiconductor device and method for time-of-flight and proximity measurements
DK3517998T3 (da) * 2018-01-24 2024-02-19 Leica Geosystems Ag Luftbåren lidar pulsfrekvensmodulation
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WO2019227975A1 (zh) 2018-05-30 2019-12-05 Oppo广东移动通信有限公司 激光投射器的控制系统、终端和激光投射器的控制方法
CN108963750B (zh) * 2018-07-18 2023-08-29 度亘激光技术（苏州）有限公司 一种vcsel和apd集成芯片及其制备方法
DE102019215831A1 (de) * 2019-10-15 2021-04-15 Robert Bosch Gmbh Verfahren zur Erzeugung von Lichtpulsen eines Lidar-Systems
US12152870B2 (en) 2020-02-07 2024-11-26 Ams Sensors Asia Pte. Ltd. Sensing method and sensor system
US11594852B2 (en) * 2020-05-08 2023-02-28 Microsoft Technology Licensing, Llc Pulse shaping to reduce pulse history effects in pulsed lasers
US11635495B1 (en) 2021-03-26 2023-04-25 Aeye, Inc. Hyper temporal lidar with controllable tilt amplitude for a variable amplitude scan mirror
US11630188B1 (en) * 2021-03-26 2023-04-18 Aeye, Inc. Hyper temporal lidar with dynamic laser control using safety models
US20220308219A1 (en) 2021-03-26 2022-09-29 Aeye, Inc. Hyper Temporal Lidar with Controllable Detection Intervals Based on Environmental Conditions
US11822016B2 (en) 2021-03-26 2023-11-21 Aeye, Inc. Hyper temporal lidar using multiple matched filters to orient a lidar system to a frame of reference
US20230044929A1 (en) 2021-03-26 2023-02-09 Aeye, Inc. Multi-Lens Lidar Receiver with Multiple Readout Channels
US11300667B1 (en) 2021-03-26 2022-04-12 Aeye, Inc. Hyper temporal lidar with dynamic laser control for scan line shot scheduling
US20220317249A1 (en) 2021-03-26 2022-10-06 Aeye, Inc. Hyper Temporal Lidar with Switching Between a Baseline Scan Mode and a Pulse Burst Mode
JP2023116281A (ja) * 2022-02-09 2023-08-22 株式会社小糸製作所 投光器、及び測定装置
DE102022103899B4 (de) 2022-02-18 2025-03-20 Schwind Eye-Tech-Solutions Gmbh Behandlungsvorrichtung für eine Augenbehandlung, Verfahren, Computerprogramm und computerlesbares Medium
DE102023104674A1 (de) * 2023-02-27 2024-08-29 Trumpf Photonic Components Gmbh VCSEL zum Erzeugen eines Laserlichts

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Also Published As

Publication number Publication date
EP3235078B1 (en) 2022-02-02
US10680411B2 (en) 2020-06-09
WO2016096647A1 (en) 2016-06-23
CN107005023A (zh) 2017-08-01
RU2017125504A (ru) 2019-01-21
RU2696335C2 (ru) 2019-08-01
JP6849593B2 (ja) 2021-03-24
RU2017125504A3 (https=) 2019-05-22
JP2018505548A (ja) 2018-02-22
US20190097393A1 (en) 2019-03-28
EP3235078A1 (en) 2017-10-25
BR112017012605A2 (pt) 2018-01-16

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Effective date of registration: 20200624

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Patentee after: Tongkuai optoelectronic device Co.,Ltd.

Address before: Eindhoven, Netherlands

Patentee before: KONINKLIJKE PHILIPS N.V.