CN106970449A - A kind of heavy caliber crystal photoelement face type prediction and the regulating system and method that reproduce - Google Patents
A kind of heavy caliber crystal photoelement face type prediction and the regulating system and method that reproduce Download PDFInfo
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- CN106970449A CN106970449A CN201710367034.8A CN201710367034A CN106970449A CN 106970449 A CN106970449 A CN 106970449A CN 201710367034 A CN201710367034 A CN 201710367034A CN 106970449 A CN106970449 A CN 106970449A
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
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Abstract
The invention discloses a kind of prediction of heavy caliber crystal photoelement face type and the regulating system and method that reproduce, regulating system includes rectangle frame, optical element and composite module;Composite module is fixedly connected on rectangle frame, optical element is fixedly connected on inside rectangle frame by composite module, the bottom surface of optical element and the support beam contact surface of composite module carry out contact installation, and the top surface of optical element and the pressure of composite module apply face and torque applies face and carries out contact installation;The chucking power of bite and the size of torque can carry out separately adjustable;The torque of composite module applies structure of the process using loading of floating, and the process of torque adjustment will not produce influence to optical element and pressure adjustment process.The present invention uses structure simple and easy to apply based on single-point calibration multiple spot coupling calculation and peripheral force and torque adjustment mode, realizes the fine adjustment to optical elements of large caliber face type.
Description
Technical field
The present invention relates to a kind of prediction of heavy caliber crystal photoelement face type and the regulating system and method that reproduce, belong to machine
Tool is designed and mechanical analysis technical field.
Background technology
The profile control of optical elements of large caliber is the key problem of guarantee beam quality in large-scale light path system.According to light
For the general thinking of road system building, it is exactly to each optical element in light path to solve this to inscribe most commonly seen method
Face type be controlled, it is ensured that all optical element faces type all as far as possible is close to a preferable plane.Such solution
No doubt without mistake, even if however, the face type of each optical element has controlled to own at a relatively high level, a light path
It will be a huge face type error that the face type error of optical element, which accumulates together, to the shadow of the beam quality of final output
Sound is non-negligible.Then we can think deeply this problem from opposite thinking, since whole light path system has accumulated which
Certain face type error, certain face type distortion is generated to light beam, then it is contemplated that on this basis to an optics member
Part applies certain face type error, and the face type direction of error that the face type error applied is accumulated with light path is on the contrary, so as to light
The face type error of system plays certain compensating action, and then improves the output beam quality of light path.
The content of the invention
In view of this, the invention provides a kind of heavy caliber crystal photoelement face type prediction with reproduce regulating system and
Method, uses structure simple and easy to apply using single-point calibration multiple spot coupling calculation and peripheral force and torque adjustment mode as base
Plinth, realizes the fine adjustment to optical elements of large caliber face type.
A kind of prediction of heavy caliber crystal photoelement face type and the regulating system reproduced, the regulating system include rectangle frame,
Optical element and composite module;
The composite module is fixedly connected on rectangle frame, and the optical element is fixedly connected on rectangle by composite module
Inframe portion, the bottom surface of the optical element and the support beam contact surface of composite module carry out contact installation, the top surface of optical element
Apply face with the pressure of composite module and torque applies face and carries out contact installation;The chucking power of bite and the size of torque
Carry out separately adjustable;The torque of composite module applies structure of the process using loading of floating, and the process of torque adjustment will not be to light
Learn element and pressure adjustment process produces influence.
Further, described optical element is a square plate part, and two plane is respectively bottom surface and top surface;
Described rectangle frame is a square hollow frame class part, and a plane thereon is rectangle frame working face, described
There are eight composite modules that groove is installed on rectangle frame working face, each described composite module, which is installed on groove, there are two combinations
There is a composite module mounting hole on module mounting plane, each described composite module mounting plane.
Further, the composite module includes two composite module mounting screws, a composite module magic seat, one
Support beam, torque applies beam, and a pressure applies beam, a torque retaining spring, a pressure retaining spring, in one
Empty force snesor a, torque adjusts spring, a pressure-adjusting spring, a torque adjusting screw and a pressure adjustment spiral shell
Nail;
The both sides of described composite module magic seat, which respectively have on a flat board seat, described flat board seat, a combination
Having on module connecting hole, described flat board seat on an one-level step, described one-level step has a pressure retaining spring peace
Fill hole, a pressure retaining spring mounting surface, a pressure-adjusting screw mounting hole and a two stage steps, two grades of described platforms
There is a support beam that square opening, a support beam mounting surface and a torque adjusting screw stomidium are installed on rank;
Have a support beam contact surface in described support beam, a upper parallel support beam, a lower parallel support beam and
There are a torque retaining spring mounting hole, a torque retaining spring peace on one support beam basal plane, described support beam basal plane
Dress face and a torque adjusting screw mounting hole;
Described torque, which applies, to be had a torque to apply the upper torque in one, face to apply beam on beam, a lower torque apply beam and
One torque applies beam basal plane, and described torque, which applies on beam basal plane, a hollow force snesor mounting hole, a hollow power
Sensor mounting surface and a torque adjusting screw connecting hole;
Described pressure, which applies, has two pressure to apply face on beam, two upper pressure apply beam, and two lower pressure apply beam
Apply beam basal plane with a pressure, described pressure, which applies on beam basal plane, a hollow pressure sensor mounting hole, one
Hollow pressure sensor mounting surface and a pressure apply beam via;
Described hollow force snesor has a sensor installation thereon for the cirque structure part of an Intermediate Gray through hole
There is a pressure-adjusting spring peace on face, a sensor joint face and a sensor wire, described sensor joint face
Fill hole, a pressure-adjusting spring mounting surface and a sensor via;
Each described composite module using two composite module mounting screws by two composite module connecting holes with
Two composite module mounting holes on described rectangle frame are attached;Described optical element passes through bottom surface and the combination die
The support beam contact surface of block carries out contact installation;The pressure that described optical element passes through described top surface and described composite module
Power applies face and torque applies face and carries out contact installation;Described support beam is pacified by described support beam mounting surface and support beam
Fill square opening and carry out cooperation installation with described composite module magic seat;Described torque retaining spring is fixed by described torque
Position spring mounting surface and torque retaining spring mounting hole carry out contact installation with described support beam;Described torque retaining spring
Apply the reverse side progress contact installation that the torque on beam applies beam basal plane with described torque;A described hollow force snesor
Apply the hollow force snesor mounting hole and hollow force snesor mounting surface on beam by the back side of its own and described torque
Carry out contact installation;Described torque adjustment spring is installed by described pressure-adjusting spring mounting surface and pressure-adjusting spring
Hole carries out contact installation with described hollow force snesor;Described torque adjusting screw by described torque adjust spring,
Sensor via, torque adjusting screw connecting hole, torque retaining spring, torque adjusting screw mounting hole and torque adjusting screw end
Hole adjusts spring, hollow force snesor, torque to described torque and applies beam, torque retaining spring, support beam and composite module
Magic seat is attached installation;Described pressure retaining spring positions bullet by described pressure retaining spring mounting hole and pressure
Spring mounting surface carries out contact installation with described composite module magic seat;Described pressure retaining spring applies beam with the pressure
Pressure apply beam basal plane the back side carry out contact installation;The hollow force snesor of another described by it is described it is hollow just
Pressure sensor mounting hole and hollow pressure sensor mounting surface apply beam with described pressure and are attached installation;Described
Pressure-adjusting spring is entered by pressure-adjusting spring mounting surface and pressure-adjusting spring mounting hole with described hollow force snesor
Row contact is installed;Described pressure-adjusting screw applies beam, pressure by described pressure-adjusting spring, sensor via, pressure
Power retaining spring and pressure-adjusting screw mounting hole apply beam, pressure to described pressure-adjusting spring, hollow force snesor, pressure
Power retaining spring and composite module magic seat are attached installation.
A kind of heavy caliber crystal photoelement face type prediction is with the adjusting method reproduced, and the step of this method is realized is as follows:
The first step:In eight power of surrounding uniform layout and the application point of torque of described optical element, including application point A
59, application point B 60, application point C 61, application point D 62, application point E 63, application point F 64, application point G 65 and application point H
66;
Second step:The top surface of described optical element is carried out it is discrete turn to n point, it is all to press a first up and then down, first left side
The mode of rear right is arranged, and the face type of optical element is 0 in the ideal situation, you can be expressed as following formula:
x0=[x01 x02 … x0n]
Wherein x0The face offset of optical element various discrete point in the ideal situation is represented, ideally x01、x02、…
x0nValue be 0;
3rd step:Apply 1N normal pressure at application point A 59, measurement obtains the face offset of now each point, represents such as
Under:
xF1=[xF11 xF12 … xF1n]
xF1Represent A points apply 1 Newton force face offset a little;xF11Represent in the case where A points apply 1 Newton force
Face type at first discrete point, xF1nRepresent the face type at n-th of discrete point in the case where A points apply 1 Newton force;
4th step:Using step 3 identical method respectively with point B 60, application point C 61, application point D 62, act on
Apply the normal pressure of 1 newton at point E 63, application point F 64, application point G 65 and application point H 66, obtain its corresponding face type,
It is expressed as follows respectively:
5th step:Apply 0.01N.m torque at application point A 59, measurement obtains the face offset of now each point, represents
It is as follows:
xM1=[xM11 xM12 … xM1n]
xM1Represent that the torgue measurement for applying 0.01N.m at A59 obtains the face offset of now each point;
6th step:Using step 5 identical method respectively with point B 60, application point C 61, application point D62, application point
Apply 0.01N.m torque at E 63, application point F 64, application point G 65 and application point H 66, obtain its corresponding face type, point
It is not expressed as follows:
7th step:Assuming that the target face type reached required for us can be expressed as follows:
xT=[xT1 xT2 … xTn]
xTRepresent in target face type face type a little, xT1Represent the target face type on first discrete point;
8th step:In order to reach the target face type in step 7, can first it assume with the power and torque minute on point A 59
1N and a2 times of 0.01N.m that Wei be a1 times, with the power and torque on point B 60 be respectively b1 times 1N and b2 times
Power and torque on 0.01N.m, application point C 61 are respectively the power on c1 times of 1N and c2 times of 0.01N.m, application point D 62
It is respectively that power and torque on d1 times of 1N and d2 times of 0.01N.m, application point E 63 is respectively e1 times of 1N and e2 with torque
Power and torque on 0.01N.m again, application point F 64 are respectively on f1 times of 1N and f2 times of 0.01N.m, application point G 65
Power and torque be respectively g1 times of 1N and g2 times of 0.01N.m, power and torque on application point H 66 are respectively h1 times
1N and h2 times of 0.01N.m;Under such stress condition, actual face type can be expressed as follows:
xS=a1*xF1+a2*xM1+b2*xF2+b2*xM2…h1*xF8+h2*xM8+x0
A1 represents the unknowm coefficient of the power of A points position, and a2 represents the unknowm coefficient of the torque of A points position;
9th step:The difference for compensating obtained face type and target face type by above-mentioned multipoint clamping can be expressed as follows:
Δ x=xS-xT
Tenth step:In order to allow the face type that multipoint clamping compensation is obtained as close as target face type, it is necessary to by following
The mode of ring iterative is solved to 16 variables such as a1, a2, b1, b2 ... h1, the h2 included of Δ x in step 9, wherein making
| Δ x | one group of solution of minimalization is optimal solution, and then can be tried to achieve by the relation in step 8 in each effect
Power and the size of torque that point place needs, the project installation for guiding opticses element use process.
Beneficial effect:
1st, adjustment system architecture of the invention is simple and easy to apply, is that can be achieved only with common adjustment workbin test module
Local Light deformation clamping to optical elements of large caliber, and the chucking power of bite and the size of torque can carry out independent tune
Section.The torque of the present invention applies structure of the process using loading of floating, and passes through torque retaining spring basic guarantee optical element
Thickness, adjusts spring by torque and carries out torque fine setting, and the module of whole torque loading can be relative to combination
Module carries out fine motion, and the process of institute's moment adjustment will not produce any added influence to optical element and pressure adjustment process.
2nd, face type prediction of the invention and compensation method, which have been broken, traditional depends raising face type alone to improve consolidating for beam quality
Determine thinking, open proposes by manufacturing the method for slight error to compensate original system face type error.Because manufacture
One small face type error reaches that the state close to fully-flattened is simply more than one face type of control, therefore the present invention
The prediction of face type can effectively reduce the face type requirement of other optical elements in light path system with compensation method, improve light path system
That unites builds efficiency, reduces cost, engineering difficulty is reduced, with larger Practical meaning.
Brief description of the drawings
Fig. 1 is overall structure diagram of the invention;
Fig. 2 is overall structure of the explosion figure of the invention;
Fig. 3 is composite module Structure explosion diagram of the invention;
Fig. 4 is composite module profile of the invention;
Fig. 5 is optical element bite schematic layout pattern of the invention.
Wherein, 1, rectangle frame, 2, composite module, 3, optical element, 4, composite module groove is installed, 5, composite module installs
Plane, 6, composite module mounting hole, 7, rectangle frame working face, 8, top surface, 9, bottom surface, 10, composite module magic seat, 11, combination
Module connecting hole, 12, torque adjusting screw mounting hole, 13, flat board seat, 14, lower parallel support beam, 15, upper parallel support beam,
16th, torque retaining spring mounting surface, 17, support beam contact surface, 18, support beam, 19, pressure apply face, 20, lower pressure applies
Beam, 21, upper pressure apply beam, 22, torque apply face, 23, lower torque apply beam, 24, upper torque apply beam, 25, torque apply
Beam, 26, hollow force snesor mounting hole, 27, hollow force snesor mounting surface, 28, hollow force snesor, 29, torque adjustment bullet
Spring, 30, torque adjusting screw, 31, sensor joint face, 32, sensor mounting surface, 33, pressure-adjusting screw, 34, pressure adjusts
Whole spring, 35, sensor via, 36, pressure-adjusting spring mounting surface, 37, pressure-adjusting spring mounting hole, 38, pickup wire
Cable, 39, hollow pressure sensor mounting hole, 40, hollow pressure sensor mounting surface, 41, pressure apply beam via, 42,
Pressure applies beam basal plane, 43, pressure apply beam, 44, torque apply beam basal plane, 45, torque adjusting screw connecting hole, 46, torque
Retaining spring, 47, pressure retaining spring, 48, torque retaining spring mounting hole, 49, support beam basal plane, 50, pressure retaining spring
Mounting hole, 51, pressure retaining spring mounting surface, 52, pressure-adjusting screw mounting hole, 53, one-level step, 54, two stage steps,
55th, composite module mounting screw, 56, support beam mounting surface, 57, support beam square opening is installed, 58, torque adjusting screw stomidium,
59th, application point A, 60, application point B, 61, application point C, 62, application point D, 63, application point E, 64, application point F, 65, application point G,
66th, application point H.
Embodiment
The present invention will now be described in detail with reference to the accompanying drawings and examples.
As shown in Figure 1, the invention provides a kind of prediction of heavy caliber crystal photoelement face type and the regulation system reproduced
System, the system includes a rectangle frame 1, an optical element 3 and eight composite modules 2.
As shown in Figure 2, described optical element 3 is a square plate part, and two plane is respectively the He of bottom surface 9
Top surface 8.Described rectangle frame 1 is a square hollow frame class part, and a plane thereon is rectangle frame working face
7, there are on described rectangle frame working face 7 eight composite modules that grooves 4 are installed, each described composite module installs groove 4
On have on two composite module mounting planes 5, each described composite module mounting plane 5 and have a composite module mounting hole
6。
As shown in figures 3 and 4, the composite module 2 includes two composite module mounting screws 55, a composite module evil spirit
Art seat 10 a, support beam 18 a, torque applies beam 25, and a pressure applies beam 43, a torque retaining spring 46, one
Pressure retaining spring 47, a hollow force snesor 28 a, torque adjusts spring 29, a pressure-adjusting spring 34, one
Torque adjusting screw 30, a pressure-adjusting screw 33;
Described composite module magic seat 10 is a block class part that is complex-shaped but having a direction symmetry,
Its both sides, which respectively has on a flat board seat 13, described flat board seat 13, a composite module connecting hole 11, described flat board
Having on seat 13 has a pressure retaining spring mounting hole 50, a pressure on an one-level step 53, described one-level step 53
In retaining spring mounting surface 51, a pressure-adjusting screw mounting hole 52 and a two stage steps 54, described two stage steps 54
There is a support beam that square opening 57, a support beam mounting surface 56 and a torque adjusting screw stomidium 58 are installed;
There is parallel branch under parallel support beam 15 on a support beam contact surface 17, one, one in described support beam 18
Supportting on beam 14 and a support beam basal plane 49, described support beam basal plane 49 has a torque retaining spring mounting hole 48, one
Torque retaining spring mounting surface 16 and a torque adjusting screw mounting hole 12;
Described torque, which applies, has a torque to apply the upper torque application beam 24 in 22 1, face on beam 25, a lower torque is applied
Plus beam 23 and a torque apply beam basal plane 44, described torque, which applies on beam basal plane, a hollow force snesor mounting hole
26, a hollow force snesor mounting surface 27 and a torque adjusting screw connecting hole 45;
Described pressure, which applies, has two pressure to apply face 19 on beam 43, two upper pressure apply beam 21, two lower pressure
Apply beam 20 and a pressure applies beam basal plane 42, described pressure, which applies on beam basal plane 42, a hollow pressure sensor
Mounting hole 39, a hollow pressure sensor mounting surface 40 and a pressure apply beam via 41.
Described hollow force snesor 28 has a sensor peace thereon for the cirque structure part of an Intermediate Gray through hole
There is a pressure on dress face 32, a sensor joint face 31 and a sensor wire 38, described sensor joint face 31
Adjust spring mounting hole 37, a pressure-adjusting spring mounting surface 36 and a sensor via 35.
Each described composite module 2 passes through two composite module connecting holes using two composite module mounting screws 55
11 are attached installation with two composite module mounting holes 6 on described rectangle frame 1;Described optical element 3 passes through bottom surface 9
Contact installation is carried out with the support beam contact surface 17 of the composite module 2;Described optical element 3 by top surface 8 with it is described
The pressure of composite module 2 applies face 19 and torque applies face 22 and carries out contact installation.Described support beam 18 passes through described branch
Support beam mounting surface 56 and support beam installs square opening 57 and carries out contact installation with described composite module magic seat 10;Described power
Square retaining spring 46 passes through described torque retaining spring mounting surface 16 and torque retaining spring mounting hole 48 and described support
Beam 18 carries out contact installation.The torque that described torque retaining spring 46 applies with described torque on beam 25 applies beam basal plane 44
Reverse side carry out contact installation.A described hollow force snesor 28 applies beam by the back side of its own with described torque
Hollow force snesor mounting hole 26 and hollow force snesor mounting surface 27 on 25 carry out contact installation.Described torque adjustment bullet
Spring 29 passes through described pressure-adjusting spring mounting surface 36 and pressure-adjusting spring mounting hole 37 and described hollow force snesor
28 carry out contact installation.Described torque adjusting screw 30 adjusts spring 29, sensor via 35, torque by described torque
Adjusting screw connecting hole 45, torque retaining spring 46,58 pairs of institutes of torque adjusting screw mounting hole 12 and torque adjusting screw stomidium
Torque adjustment spring 29, hollow force snesor 28, torque application beam 25, torque retaining spring 46, support beam 18 and the combination stated
Module magic seat is attached installation;Described pressure retaining spring 47 passes through described pressure retaining spring mounting hole 50 and pressure
Power retaining spring mounting surface 51 carries out contact installation with described composite module magic seat 10;Described pressure retaining spring 47 with
The back side that the pressure applies the pressure application beam basal plane 42 of beam 43 carries out contact installation;The hollow power sensing of another described
Device 28 passes through described hollow pressure sensor mounting hole 39 and hollow pressure sensor mounting surface 40 and described pressure
Apply beam 43 and be attached installation;Described pressure-adjusting spring 34 adjusts bullet by pressure-adjusting spring mounting surface 36 and pressure
Spring mounting hole 37 carries out contact installation with described hollow force snesor 28;Described pressure-adjusting screw 33 passes through described pressure
Power adjustment spring 34, sensor via 35, pressure apply 52 pairs of beam 43, pressure retaining spring 47 and pressure-adjusting screw mounting hole
Described pressure-adjusting spring 34, hollow force snesor 28, pressure application beam 43, pressure retaining spring 47 and composite module magic
Seat is attached installation.
Present invention also offers a kind of prediction of heavy caliber crystal photoelement face type and the adjusting method reproduced, this method is real
Existing step is as follows:
The first step:In eight power of surrounding uniform layout and the application point of torque of described optical element, including application point A
59, application point B 60, application point C 61, application point D 62, application point E 63, application point F 64, application point G 65 and application point H
66, as shown in Figure 5;
Second step:The top surface of described optical element is carried out it is discrete turn to n point, it is all to press a first up and then down, first left side
The mode of rear right is arranged, and the face type of optical element is 0 in the ideal situation, you can be expressed as following formula:
x0=[x01 x02 … x0n]
Wherein x0The face offset of optical element various discrete point in the ideal situation is represented, ideally x01、x02、…
x0nValue be 0;
3rd step:Apply 1N normal pressure at application point A 59, measurement obtains the face offset of now each point, represents such as
Under:
xF1=[xF11 xF12 … xF1n]
xF1Represent A points apply 1 Newton force face offset a little;xF11Represent in the case where A points apply 1 Newton force
Face type at first discrete point, xF1nRepresent the face type at n-th of discrete point in the case where A points apply 1 Newton force;
4th step:Using step 3 identical method respectively with point B 60, application point C 61, application point D 62, act on
Apply the normal pressure of 1 newton at point E 63, application point F 64, application point G 65 and application point H 66, obtain its corresponding face type,
It is expressed as follows respectively:
5th step:Apply 0.01N.m torque at application point A 59, measurement obtains the face offset of now each point, represents
It is as follows:
xM1=[xM11 xM12 … xM1n]
xM1Represent that the torgue measurement for applying 0.01N.m at A59 obtains the face offset of now each point;
6th step:Using step 5 identical method respectively with point B 60, application point C 61, application point D62, application point
Apply 0.01N.m torque at E 63, application point F 64, application point G 65 and application point H 66, obtain its corresponding face type, point
It is not expressed as follows:
7th step:Assuming that the target face type reached required for us can be expressed as follows:
xT=[xT1 xT2 … xTn]
xTRepresent in target face type face type a little, xT1Represent the target face type on first discrete point;
8th step:In order to reach the target face type in step 7, can first it assume with the power and torque minute on point A 59
1N and a2 times of 0.01N.m that Wei be a1 times, with the power and torque on point B 60 be respectively b1 times 1N and b2 times
Power and torque on 0.01N.m, application point C 61 are respectively the power on c1 times of 1N and c2 times of 0.01N.m, application point D 62
It is respectively that power and torque on d1 times of 1N and d2 times of 0.01N.m, application point E 63 is respectively e1 times of 1N and e2 with torque
Power and torque on 0.01N.m again, application point F 64 are respectively on f1 times of 1N and f2 times of 0.01N.m, application point G 65
Power and torque be respectively g1 times of 1N and g2 times of 0.01N.m, power and torque on application point H 66 are respectively h1 times
1N and h2 times of 0.01N.m;Under such stress condition, actual face type can be expressed as follows:
xS=a1*xF1+a2*xM1+b2*xF2+b2*xM2…h1*xF8+h2*xM8+x0
A1 represents the unknowm coefficient of the power of A points position, and a2 represents the unknowm coefficient of the torque of A points position;
9th step:The difference for compensating obtained face type and target face type by above-mentioned multipoint clamping can be expressed as follows:
Δ x=xS-xT
Tenth step:In order to allow the face type that multipoint clamping compensation is obtained as close as target face type, it is necessary to by following
The mode of ring iterative is solved to 16 variables such as a1, a2, b1, b2 ... h1, the h2 included of Δ x in step 9, wherein making
| Δ x | one group of solution of minimalization is optimal solution, and then can be tried to achieve by the relation in step 8 in each effect
Power and the size of torque that point place needs, the project installation for guiding opticses element use process.
In summary, presently preferred embodiments of the present invention is these are only, is not intended to limit the scope of the present invention.
Within the spirit and principles of the invention, any modification, equivalent substitution and improvements made etc., should be included in the present invention's
Within protection domain.
Claims (4)
1. a kind of heavy caliber crystal photoelement face type prediction and the regulating system reproduced, it is characterised in that the regulating system bag
Include rectangle frame, optical element and composite module;
The composite module is fixedly connected on rectangle frame, and the optical element is fixedly connected in rectangle frame by composite module
Portion, the bottom surface of the optical element and the support beam contact surface of composite module carry out contact installation, the top surface and group of optical element
The pressure of matched moulds block applies face and torque applies face and carries out contact installation;The chucking power of bite and the size of torque can be carried out
It is separately adjustable;The torque of composite module applies structure of the process using loading of floating, and the process of torque adjustment will not be to optics member
Part and pressure adjustment process produce influence.
2. type prediction in heavy caliber crystal photoelement face as claimed in claim 1 and the regulating system reproduced, it is characterised in that
Described optical element is a square plate part, and two plane is respectively bottom surface and top surface;Described rectangle frame is one
Individual square hollow frame class part, a plane thereon is to have on rectangle frame working face, described rectangle frame working face
Eight composite modules install groove, and each described composite module, which is installed on groove, two composite module mounting planes, institute
There is a composite module mounting hole on each the composite module mounting plane stated.
3. type prediction in heavy caliber crystal photoelement face as claimed in claim 1 or 2 and the regulating system reproduced, its feature exist
In the composite module includes two composite module mounting screws, a composite module magic seat, a support beam, a power
Square applies beam, and a pressure applies beam, a torque retaining spring, a pressure retaining spring, a hollow force snesor, one
Individual torque adjusts spring, a pressure-adjusting spring, a torque adjusting screw and a pressure-adjusting screw;
The both sides of described composite module magic seat, which respectively have on a flat board seat, described flat board seat, a composite module
Having on connecting hole, described flat board seat has a pressure retaining spring mounting hole on an one-level step, described one-level step,
In one pressure retaining spring mounting surface, a pressure-adjusting screw mounting hole and a two stage steps, described two stage steps
There is a support beam that square opening, a support beam mounting surface and a torque adjusting screw stomidium are installed;
There is a support beam contact surface in described support beam, a upper parallel support beam, a lower parallel support beam and one
There are a torque retaining spring mounting hole, a torque retaining spring mounting surface on support beam basal plane, described support beam basal plane
With a torque adjusting screw mounting hole;
Described torque, which applies, has a torque to apply the upper torque application beam in one, face on beam, a lower torque applies beam and one
Torque applies beam basal plane, and described torque, which applies, a hollow force snesor mounting hole on beam basal plane, a hollow power sensing
Device mounting surface and a torque adjusting screw connecting hole;
Described pressure, which applies, has two pressure to apply face on beam, two upper pressure apply beam, and two lower pressure apply Liang Heyi
Individual pressure applies beam basal plane, and described pressure, which applies on beam basal plane, a hollow pressure sensor mounting hole, and one hollow
Pressure sensor mounting surface and a pressure apply beam via;
Described hollow force snesor has a sensor mounting surface, one thereon for the cirque structure part of an Intermediate Gray through hole
There is a pressure-adjusting spring mounting hole on individual sensor joint face and a sensor wire, described sensor joint face,
One pressure-adjusting spring mounting surface and a sensor via;
Each described composite module using two composite module mounting screws by two composite module connecting holes with it is described
Rectangle frame on two composite module mounting holes be attached;Described optical element passes through bottom surface and the composite module
Support beam contact surface carries out contact installation;Described optical element is applied by the pressure of described top surface and described composite module
Plus face and torque apply face and carry out contact installation;Described support beam passes through described support beam mounting surface and support beam installation side
Shape hole carries out cooperation installation with described composite module magic seat;Described torque retaining spring positions bullet by described torque
Spring mounting surface and torque retaining spring mounting hole carry out contact installation with described support beam;Described torque retaining spring and institute
The reverse side that the torque that the torque stated applies on beam applies beam basal plane carries out contact installation;A described hollow force snesor passes through
The hollow force snesor mounting hole and hollow force snesor mounting surface that the back side of its own applies with described torque on beam are carried out
Contact is installed;Described torque adjustment spring by described pressure-adjusting spring mounting surface and pressure-adjusting spring mounting hole with
Described hollow force snesor carries out contact installation;Described torque adjusting screw adjusts spring, sensing by described torque
Device via, torque adjusting screw connecting hole, torque retaining spring, torque adjusting screw mounting hole and torque adjusting screw stomidium pair
Described torque adjustment spring, hollow force snesor, torque application beam, torque retaining spring, support beam and composite module magic
Seat is attached installation;Described pressure retaining spring is pacified by described pressure retaining spring mounting hole and pressure retaining spring
Dress face carries out contact installation with described composite module magic seat;Described pressure retaining spring applies the pressure of beam with the pressure
The back side that power applies beam basal plane carries out contact installation;The hollow force snesor of another described passes through described hollow normal pressure
Sensor mounting hole and hollow pressure sensor mounting surface apply beam with described pressure and are attached installation;Described pressure
Adjustment spring is connect by pressure-adjusting spring mounting surface and pressure-adjusting spring mounting hole with described hollow force snesor
Touch and install;Described pressure-adjusting screw is fixed by described pressure-adjusting spring, sensor via, pressure application beam, pressure
Position spring and pressure-adjusting screw mounting hole are fixed to described pressure-adjusting spring, hollow force snesor, pressure application beam, pressure
Position spring and composite module magic seat are attached installation.
4. a kind of heavy caliber crystal photoelement face type prediction and the adjusting method reproduced, it is characterised in that what this method was realized
Step is as follows:
The first step:In eight power of surrounding uniform layout and the application point of torque of described optical element, including application point A 59,
Application point B 60, application point C 61, application point D 62, application point E 63, application point F 64, application point G 65 and application point H
66;
Second step:The top surface of described optical element is carried out it is discrete turn to n point, it is all press it is first up and then down, first left and then right
Mode arranged, in the ideal situation the face type of optical element be 0, you can be expressed as following formula:
x0=[x01 x02 … x0n]
Wherein x0The face offset of optical element various discrete point in the ideal situation is represented, ideally x01、x02、…x0nValue
It is 0;
3rd step:Apply 1N normal pressure at application point A 59, measurement obtains the face offset of now each point, is expressed as follows:
xF1=[xF11 xF12 … xF1n]
xF1Represent A points apply 1 Newton force face offset a little;xF11Represent in the case where A points apply 1 Newton force the
Face type at one discrete point, xF1nRepresent the face type at n-th of discrete point in the case where A points apply 1 Newton force;
4th step:Using step 3 identical method respectively with point B 60, application point C 61, application point D 62, application point E
Apply the normal pressure of 1 newton at 63, application point F 64, application point G 65 and application point H 66, obtain its corresponding face type, respectively
It is expressed as follows:
xF2=[xF21 xF22 … xF2n]
xF3=[xF31 xF32 … xF3n]
xF8=[xF81 xF82 … xF8n]
5th step:Apply 0.01N.m torque at application point A 59, measurement obtains the face offset of now each point, is expressed as follows:
xM1=[xM11 xM12 … xM1n]
xM1Represent that the torgue measurement for applying 0.01N.m at A59 obtains the face offset of now each point;
6th step:Using step 5 identical method respectively with point B 60, application point C 61, application point D62, application point E
Apply 0.01N.m torque at 63, application point F 64, application point G 65 and application point H 66, obtain its corresponding face type, respectively
It is expressed as follows:
xM2=[xM21 xM22 … xM2n]
xM3=[xM31 xM32 … xM3n]
xM8=[xM81 xM82 … xM8n]
7th step:Assuming that the target face type reached required for us can be expressed as follows:
xT=[xT1 xT2 … xTn]
xTRepresent in target face type face type a little, xT1Represent the target face type on first discrete point;
8th step:In order to reach the target face type in step 7, first assume to be respectively a1 times with the power and torque on point A 59
1N and a2 times of 0.01N.m, be respectively b1 times of 1N and b2 times of 0.01N.m, application point C with the power and torque on point B 60
Power and torque on 61 are respectively that power and torque on c1 times of 1N and c2 times of 0.01N.m, application point D 62 are respectively d1 times
1N and d2 times of 0.01N.m, power and torque on application point E 63 are respectively e1 times of 1N and e2 times of 0.01N.m, effect
Power and torque on point F 64 are respectively that power and torque on f1 times of 1N and f2 times of 0.01N.m, application point G 65 are respectively
G1 times of 1N and g2 times of 0.01N.m, power and torque on application point H 66 be respectively h1 times 1N and h2 times
0.01N.m;Under such stress condition, actual face type is expressed as follows:
xS=a1*xF1+a2*xM1+b2*xF2+b2*xM2…h1*xF8+h2*xM8+x0
A1 represents the unknowm coefficient of the power of A points position, and a2 represents the unknowm coefficient of the torque of A points position;
9th step:The difference for compensating obtained face type and target face type by above-mentioned multipoint clamping is expressed as follows:
Δ x=xS-xT
Tenth step:In order to allow the face type that multipoint clamping compensation is obtained as close as target face type, it is necessary to changed by circulation
The mode in generation is solved to 16 variables such as a1, a2, b1, b2 ... h1, the h2 included of Δ x in step 9, wherein causing | Δ
X | one group of solution of minimalization is optimal solution, and then can be tried to achieve by the relation in step 8 in each application point place
The power and the size of torque needed, the project installation for guiding opticses element uses process.
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