CN109709636A - A kind of processing unit (plant) and processing method of curved surface grating - Google Patents
A kind of processing unit (plant) and processing method of curved surface grating Download PDFInfo
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- CN109709636A CN109709636A CN201811517490.7A CN201811517490A CN109709636A CN 109709636 A CN109709636 A CN 109709636A CN 201811517490 A CN201811517490 A CN 201811517490A CN 109709636 A CN109709636 A CN 109709636A
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- soft template
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- curved surface
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Abstract
The present invention provides a kind of processing unit (plant) of curved surface grating and processing methods, by making PDMS soft template, by the setting of PDMS soft template in coining cavity, it is accurately controlled by the air pressure to the separate space above and below PDMS soft template, realize that PDMS soft template imprints to form curved surface grating using upper and lower pressure difference, method is regulated and controled by Alternatives parameters such as upper and lower cavity pressure difference, template substrate distance, substrate tilt angles simultaneously, so that the efficient accurate production of curved surface grating can be realized.
Description
Technical field
The present invention relates to a kind of processing unit (plant) of grating and processing method more particularly to a kind of processing unit (plant)s of curved surface grating
And processing method.
Background technique
Grating is the core element of spectral instrument.Classified according to the face type of grating substrate, plane grating and song can be divided into
Concave grating, typical curved surface grating have concave grating, convex grating and cylindrical grating etc..Compared with common plane grating, curved surface
Grating is integrated with the dichroism of grating and the focus characteristics of curved optical device.Replace plane grating and song using curved surface grating
The combination of face lens/reflecting mirror optical path, can reduce the number of elements in spectral instrument, to simplify optical path, improve the collection of instrument
Cheng Du and stability.Therefore, curved surface grating has indispensable role in micro spectrometer and imaging spectrometer.
Traditional plane grating is all that at equal intervals, manufacture craft is quite mature.And for curved surface grating,
Its grating line spacing generally requires to change according to certain rules, to achieve the purpose that aberration correction, but this also increases curved surface
The difficulty of preparing grating.
For the manufacture craft of curved surface grating, existing main method has mechanical scratching method, direct write method and holography method, but this
There is the disadvantages of low efficiency, at high cost in a little methods.
Mechanical scratching method is exactly that grating line is processed in substrate using diamond cutter under precision machine tool control.
For mechanical scratching method dependent on high-precision equipment and harsh working environment, processing efficiency is very low, with high costs, is suitable only for adding
Work mother matrix grating.And processing becomes the grating of spacing on curved substrate, undoubtedly proposes more to the kinetic control system of rose engine
High requirement.
Direct writing technology includes laser direct-writing, electron-beam direct writing, focused ion beam direct write etc., that is, utilizes laser beam, electron beam
Or ion beam is scanned exposure to corresponding resist, to obtain grating micro-nano structure.By increasing substrate workbench
Number of degrees of freedom, the production of curved surface grating may be implemented.Direct writing technology can reach very high preparation precision, but need complex and expensive
Equipment, processing efficiency is low, is generally also only used for the preparation of high-precision grating mask plate etc, it is difficult to applied to batch plus
In work production.
Holography method is to form interference field in the photoresist of curved substrate by two beam coherent lights, be can be obtained after exposure development
Photoresist grating, then optical grating construction can be transferred to by curved substrate by ion beam etching.The exposure development technique of holography method compared with
For convenient and efficient, it is easily achieved change spacing by regulating and controlling interference field, but etching technics is still more time-consuming and expensive.
Prior art CN101221358A discloses a kind of curved substrate multi-phase micro-optical based on flexible ultraviolet die mold
Element processing method, the program propose a kind of using Flexible formwork assembly, and micro-nano pattern is transferred to the thinking on curved substrate, is had
Efficient high, advantage at low cost.However, the program is rough conceptual scheme, there is no be directed to curved surface Variable line-space gratings
Production be illustrated, also do not carry out comprehensive analysis and deeply angularly from device design, technology controlling and process and processing unit (plant)
It probes into, really solves the Key technique problem in curved surface grating production.
Summary of the invention
The object of the present invention is to provide a kind of producing device of curved surface grating and production methods, solve existing curved surface grating system
Make the problems such as complex manufacturing technology present in method, process-cycle are long, and process equipment is expensive.The present invention utilizes ultraviolet nanometer pressure
Print technology, using dimethyl silicone polymer soft template (PDMS), by air pressure additional pressure applicator technology realize curved surface grating high efficiency,
The production of low cost.
In order to achieve the above objectives, the present invention adopts the following technical scheme that:
A kind of curved surface grating processing unit (plant), including coining cavity, control gas circuit and ultraviolet source, the coining cavity middle part
It is provided with PDMS soft template, PDMS soft template will imprint cavity and be divided into two separate spaces up and down, and control gas circuit is respectively with upper and lower two
A separate space is connected and accurately controls the air pressure in two separate spaces, and the bottom center of lower separate space is provided with substrate chuck, for processing
The curved substrate of curved surface grating is arranged in substrate chuck upper surface, the height of substrate chuck upper surface and its inclination with horizontal plane
Adjustable angle.
It is provided with PDMS soft template installation position in the middle part of the coining cavity, PDMS soft template is sealingly disposed in PDMS soft template
On installation position.
The control gas circuit includes the tracheae that upper and lower separate space communicates and the vacuum pump, solenoid valve and the air pressure that are arranged on tracheae
Meter accurately controls the air pressure in two separate spaces up and down by solenoid valve and barometer.
The center upper portion of upper separate space is arranged in the ultraviolet source, and the coining cavity is arranged in ultraviolet protection case.
A method of utilizing above-mentioned apparatus processing curve grating, which comprises the steps of:
1) prepared by PDMS soft template；
2) installation of PDMS soft template and pretreatment；
3) it imprints；
4) it demoulds.
Further, the PDMS soft template preparation includes the following steps:
1a) duplication template will be used as in the equidistant grating insertion grating fixture of commercial plane；
1b) multiple spin coating solidifies the mixture of PDMS prepolymer and crosslinking agent in the duplication template, and is embedded at edge
One thin round iron ring, obtains PDMS soft template after solidification.
Further, the installation of PDMS soft template and pretreatment, which refer to, installs PDMS soft template above-mentioned curved surface grating processing
In coining cavity in device, while the spin coating and precuring of uv-curable glue are carried out to curved substrate, and adjust substrate folder
The height of the upper surface of tool and its with the slanted angle of horizontal plane to setting value.
Further, the coining includes the following steps:
3a) to upper and lower two separate space vacuumize processs；
3b) after upper and lower two separate spaces reach setting air pressure, separate space air pressure is constant in holding, reduces lower separate space air pressure, on
The pressure difference of lower separate space makes PDMS mantle plate be bent downwardly deformation, and then fitting is contacted with curved substrate, curved substrate surfaces
Uv-curable glue is filled into the micro-nano structure gap of PDMS soft template under the action of force of impression and capillary force, is opened simultaneously
Ultraviolet source is solidified.
The demoulding refers to after reaching preset imprint time, reduces the air pressure of upper cavity until PDMS soft template is sprung back
The position initial to its, completes entire moulding process.
Further, further include the steps that curved surface grating designs before the preparation of PDMS soft template.
Unique distinction of the invention:
1) technique thinking of the equidistant grating of plane to curved surface Variable line-space gratings: first by reproduction technology, by plane etc.
The micro-nano structure of spacing grating is transferred on PDMS soft template, thereafter by ultraviolet nanometer stamping technique, utilizes soft template
Controllable deforming realizes the controllable variations of spacing, completes the production of curved surface Variable line-space gratings.Soft template preparation and nano impression are
One-pass molding, simple process are efficient；Entire technical process needs not rely on expensive equipment, the equidistant light of plane as motherboard
Grid can be directly using mature commercial product, and process costs are low；
2) force of impression needed for imprinting apparatus provides coining based on gas additional pressure applicator, ensure that the uniformity of force of impression.
Compared with conventional normal pressure imprinting apparatus, the air pressure of separate space up and down of the processing unit (plant) of this programme can all realize independent accurate control
System, ensure that the accurate of force of impression, will not generate deviation because of reasons such as atmospheric oscillations；It is to be isolated that cavity, which is imprinted, with external environment
, the vacuumize process that coining carries out it before starting in addition has been discharged the little particle impurity being likely to remain in cavity, has mentioned
A clean coining environment has been supplied, ensure that last coining quality.
3) by adjusting force of impression (pressure difference between upper separate space and lower separate space body), PDMS soft template and curved substrate away from
The accurate control of grating parameter is realized in optimum organization from, the tilt angle of curved substrate these three imprint parameters.
4) flexible choice of grating flute profile can be achieved, the flute profile of grating depends on the flute profile of plane grating motherboard, therefore can
To select different plane grating motherboards according to application demand, various grating flute profiles can be flexibly produced, common are sawtooth
Shape, rectangle, sinusoidal etc..
Detailed description of the invention
The following further describes the present invention with reference to the drawings:
Fig. 1 is the structural schematic diagram of curved surface grating processing unit (plant) of the present invention；
Fig. 2 is the PDMS soft template scheme of installation in curved surface grating processing method of the present invention；
Fig. 3 is status diagram when being vacuumized in curved surface grating processing method of the present invention；
Fig. 4 is status diagram when being imprinted in curved surface grating processing method of the present invention；
Fig. 5 is status diagram when being demoulded in curved surface grating processing method of the present invention；
Fig. 6 is the structural schematic diagram of curved surface grating；
Fig. 7 is the equidistant optical grating construction schematic diagram of commercial plane used when prepared by PDMS soft template；
Fig. 8 is the PDMS soft template appearance diagram to complete.
Specific embodiment
Below by specific embodiment, the present invention is described in further detail, but embodiments of the present invention are not only
It is limited to this.
The present invention provides a kind of processing unit (plant) of curved surface grating, structure is as shown in Figure 1, include coining cavity 2, control
Gas circuit and ultraviolet source 9 imprint and are provided with PDMS (dimethyl silicone polymer) soft template installation position 5, PDMS soft mode in the middle part of cavity 2
For installing PDMS soft template 6, PDMS soft template 6 will imprint cavity after being mounted on PDMS soft template installation position 5 for plate installation position 5
2 are divided into 4 two separate spaces of upper separate space 3 and lower separate space, are sealed between PDMS soft template 6 and PDMS soft template installation position 5
Processing, going up separate space 3 and lower separate space 4 in this way is two mutually independent seal cavities, on upper separate space 3 and lower separate space 4 respectively with control
Gas circuit processed communicates, and control gas circuit includes the tracheae communicated with upper and lower separate space and the vacuum pump being arranged on tracheae 31, solenoid valve 32
With barometer 33, vacuum pump 31 can carry out vacuumize process to upper separate space 3 and lower separate space 4 by tracheae, be arranged on tracheae
Solenoid valve 32 and barometer 33 can be realized to the real-time monitoring of air pressure in upper separate space 3 and lower separate space 4 and accurate control.
The bottom center of lower separate space 4 is provided with substrate chuck 8, the height of 8 upper surface of substrate chuck and relative level
Tilt adjustable is shelved with the curved substrate 7 for processing curve grating on the upper surface of substrate chuck 8.
Entire coining cavity 2 is arranged in ultraviolet protection case 1, and ultraviolet source 4 is mounted in the top of ultraviolet protection case 1
Centre.Ultraviolet protection case protects experimenter during the experiment from the injury of ultraviolet light.
The present invention also provides a kind of processing method of curved surface grating, this method processes dress using above-mentioned curved surface grating
It sets, specifically comprises the following steps:
The first step carries out curved surface grating design: for the curved surface grating with aberration correction function, needing according to it
Use condition designs the grating grid regularity of distribution.Specifically, as shown in fig. 6, grating space d is along the Y direction (perpendicular to grating
Grid line direction) regularly change, i.e.,
D=d0+d1y+d2y2+…+dnyn
Wherein d0For the grating spacing of base center, behind it is every to become spacing item.Aberration correction requirement is higher, needs to examine
The change spacing item of worry is more.In being normally applied, controlling single order item can be obtained good aberration correction effect, i.e. d
=d0+d1y。
Second step carries out the preparation of PDMS soft template: as shown in fig. 7, the equidistant grating 21 of commercial plane is embedded in grating first
As duplication template in fixture 22, it is contemplated that the grating spacing of the deformation characteristic of Flexible formwork assembly, plane grating motherboard need to be less than song
The d of concave grating0.Then, multiple spin coating solidifies the mixture of PDMS prepolymer and crosslinking agent on the template, and is embedded at edge
One thin round iron ring, the main purpose done so are the rigidity in order to increase soft template edge, finally by solidification obtain as
PDMS soft template shown in Fig. 8 with equidistant micro-nano structure.
Third step is to carry out impression process using curved surface grating processing unit (plant), specifically there is the following steps:
1) as shown in Fig. 2, will make with etc. the PDMS soft template of pitch micro-nano structure be installed to coining cavity
Middle part, while spin coating uv-curable glue 11 and precuring is carried out on curved substrate 7 (in figure be concave glass substrate), later will
Curved substrate 7 is mounted in the substrate chuck 8 of lower 4 bottom of separate space, by adjusting the height and its and water of 8 upper surface of substrate chuck
The slanted angle of plane makes curved substrate 7 be in the height (i.e. PDMS soft template 6 is at a distance from curved substrate 7) set and incline
Rake angle；
2) it vacuumizes: as shown in figure 3, by controlling gas circuit to upper separate space 3 and lower separate space 4 while carrying out vacuumize process,
Until the air pressure of two cavitys reaches preset numerical value, in order to the little particle impurity in lower separate space 4 be discharged, ensure that
Clean coining environment influences to imprint quality in order to avoid causing stamping surface flaw；
3) it imprints: as shown in figure 4, keeping the air pressure of upper separate space 3 constant, continuing the air pressure for reducing lower separate space 4, such PDMS
Soft template 6 will be deformed under the action of pressure difference, and then fitting is contacted with curved substrate 7,7 surface of curved substrate it is ultraviolet
Solidification glue 11 is filled into the micro-nano structure gap of PDMS soft template 6 under the action of force of impression and capillary force, is opened simultaneously
Ultraviolet source 9 is solidified；
4) it demoulds: as shown in figure 5, the air pressure of separate space 3 is until PDMS soft mode in reduction after reaching preset imprint time
Plate 6 recoils to its initial position, completes entire moulding process.In order to guarantee the effect of coining, avoid vacuumizing and most
PDMS mantle plate 6 is contacted with the generation of curved substrate 7 in knockout course afterwards, is always ensured that the upper separate space 3 during the two
Air pressure is slightly less than the air pressure equal to lower separate space 4.
Due to the height of substrate chuck 8 and the tilt adjustable of itself and horizontal plane, by control the two parameters and
The accuracy controlling of grating space variation may be implemented in pressure difference between upper and lower two separate spaces.
The flute profile (i.e. the pattern of Z-direction shown in Fig. 6) of grating depends on the flute profile of plane grating motherboard, therefore can basis
Application demand selects different plane grating motherboards, can flexibly produce various grating flute profiles, common are zigzag (in figure
It is shown), rectangle, sinusoidal etc..
The processing unit (plant) and processing method have successfully produced concave surface Variable line-space gratings sample through the invention.
It is tested through microscopic appearance, concave grating maintains the sawteeth groove of motherboard planar grating, and realizes the rule variation of spacing；It is right
It carries out spectral resolution detection, is better than 1.5nm in the resolution ratio of visible light wave range, demonstrates its aberration correction function.
It should be noted that above-described embodiment is only the section Example for realizing preferred embodiment of the invention, Er Feiquan
Portion's embodiment.Obviously, it is based on the above embodiment of the present invention, those of ordinary skill in the art are not making creative work
Under the premise of other all embodiments obtained, should fall within the scope of the present invention.
Claims (10)
1. a kind of curved surface grating processing unit (plant), including coining cavity, control gas circuit and ultraviolet source, which is characterized in that the pressure
PDMS soft template is provided in the middle part of print cavity, PDMS soft template will imprint cavity and be divided into two separate spaces up and down, control gas circuit point
It is not connected with upper and lower two separate spaces and accurately controls the air pressure in two separate spaces, the bottom center of lower separate space is provided with substrate folder
Tool, for processing curve grating curved substrate setting substrate chuck upper surface, the height of substrate chuck upper surface and its with
The tilt adjustable of horizontal plane.
2. a kind of curved surface grating processing unit (plant) as described in claim 1, which is characterized in that be provided in the middle part of the coining cavity
PDMS soft template installation position, PDMS soft template are sealingly disposed on PDMS soft template installation position.
3. a kind of curved surface grating processing unit (plant) as described in claim 1, which is characterized in that the control gas circuit including up and down every
The tracheae that chamber communicates and vacuum pump, solenoid valve and the barometer being arranged on tracheae, are accurately controlled by solenoid valve and barometer
Air pressure in upper and lower two separate spaces.
4. a kind of curved surface grating processing unit (plant) as described in claim 1, which is characterized in that the ultraviolet source setting it is upper every
The center upper portion of chamber, the coining cavity are arranged in ultraviolet protection case.
5. a kind of method using device processing curve grating described in claim 1, which comprises the steps of:
1) prepared by PDMS soft template；
2) installation of PDMS soft template and pretreatment；
3) it imprints；
4) it demoulds.
6. method as claimed in claim 5, which is characterized in that the PDMS soft template preparation includes the following steps:
1a) duplication template will be used as in the equidistant grating insertion grating fixture of commercial plane；
1b) multiple spin coating solidifies the mixture of PDMS prepolymer and crosslinking agent in the duplication template, and is embedded in one at edge
Thin round iron ring obtains PDMS soft template after solidification.
7. method as claimed in claim 5, which is characterized in that the installation of PDMS soft template and pretreatment refer to PDMS soft template
It installs in the coining cavity in curved surface grating processing unit (plant) described in claim 1, while curved substrate is carried out ultraviolet solid
Change the spin coating and precuring of glue, and adjusts the height of the upper surface of substrate chuck and its with the slanted angle of horizontal plane to setting
Value.
8. method as claimed in claim 5, which is characterized in that the coining includes the following steps:
3a) to upper and lower two separate space vacuumize processs；
3b) after upper and lower two separate spaces reach setting air pressure, separate space air pressure is constant holdings in, reduction time separate space air pressure, up and down every
The pressure difference of chamber makes PDMS soft template be bent downwardly deformation, and then fitting is contacted with curved substrate, curved substrate surfaces it is ultraviolet
Solidification glue is filled into the micro-nano structure gap of PDMS soft template under the action of force of impression and capillary force, is opened simultaneously ultraviolet
Light source is solidified.
9. method as claimed in claim 5, which is characterized in that the demoulding refers to after reaching preset imprint time, drops
The air pressure of low upper cavity recoils to its initial position until PDMS soft template, completes entire moulding process.
10. method as claimed in claim 5, which is characterized in that further include curved surface grating design before the preparation of PDMS soft template
The step of.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811517490.7A CN109709636A (en) | 2018-12-12 | 2018-12-12 | A kind of processing unit (plant) and processing method of curved surface grating |
| PCT/CN2019/121596 WO2020119469A1 (en) | 2018-12-12 | 2019-11-28 | Processing device and processing method for toroidal gratings |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811517490.7A CN109709636A (en) | 2018-12-12 | 2018-12-12 | A kind of processing unit (plant) and processing method of curved surface grating |
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| CN109709636A true CN109709636A (en) | 2019-05-03 |
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| CN201811517490.7A Pending CN109709636A (en) | 2018-12-12 | 2018-12-12 | A kind of processing unit (plant) and processing method of curved surface grating |
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| WO (1) | WO2020119469A1 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111025445A (en) * | 2019-12-10 | 2020-04-17 | 深圳先进技术研究院 | Method and device for manufacturing flexible grating based on PDMS |
| WO2020119469A1 (en) * | 2018-12-12 | 2020-06-18 | 深圳先进技术研究院 | Processing device and processing method for toroidal gratings |
| CN111679554A (en) * | 2020-06-03 | 2020-09-18 | 璞璘科技(杭州)有限公司 | Double-cavity type uniform-pressure nano-imprinting mechanism, nano-imprinting equipment and method |
| CN112526660A (en) * | 2020-11-11 | 2021-03-19 | 歌尔股份有限公司 | Method for manufacturing nano-grating on curved surface, optical device and electronic equipment |
| CN113031141A (en) * | 2021-04-02 | 2021-06-25 | 中国科学院光电技术研究所 | Method for processing blazed grating based on gravity field |
| CN113759451A (en) * | 2021-08-11 | 2021-12-07 | 广州先进技术研究所 | Processing device and preparation method of curved surface grating |
| TWI786998B (en) * | 2021-12-07 | 2022-12-11 | 大陸商業成科技（成都）有限公司 | Polarization grating films for curved surfaces, its manufacturing method and the metallic grating mold thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2020119469A1 (en) * | 2018-12-12 | 2020-06-18 | 深圳先进技术研究院 | Processing device and processing method for toroidal gratings |
| CN111025445A (en) * | 2019-12-10 | 2020-04-17 | 深圳先进技术研究院 | Method and device for manufacturing flexible grating based on PDMS |
| CN111025445B (en) * | 2019-12-10 | 2021-11-30 | 深圳先进技术研究院 | Method and device for manufacturing flexible grating based on PDMS |
| CN111679554A (en) * | 2020-06-03 | 2020-09-18 | 璞璘科技(杭州)有限公司 | Double-cavity type uniform-pressure nano-imprinting mechanism, nano-imprinting equipment and method |
| CN111679554B (en) * | 2020-06-03 | 2021-04-27 | 璞璘科技(杭州)有限公司 | Double-cavity type uniform-pressure nano-imprinting mechanism, nano-imprinting equipment and method |
| CN112526660A (en) * | 2020-11-11 | 2021-03-19 | 歌尔股份有限公司 | Method for manufacturing nano-grating on curved surface, optical device and electronic equipment |
| CN113031141A (en) * | 2021-04-02 | 2021-06-25 | 中国科学院光电技术研究所 | Method for processing blazed grating based on gravity field |
| CN113759451A (en) * | 2021-08-11 | 2021-12-07 | 广州先进技术研究所 | Processing device and preparation method of curved surface grating |
| CN113759451B (en) * | 2021-08-11 | 2023-11-03 | 广州先进技术研究所 | Curved surface grating processing device and preparation method |
| TWI786998B (en) * | 2021-12-07 | 2022-12-11 | 大陸商業成科技（成都）有限公司 | Polarization grating films for curved surfaces, its manufacturing method and the metallic grating mold thereof |
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| Publication number | Publication date |
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| WO2020119469A1 (en) | 2020-06-18 |
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