CN106646707A - Preparation method of PDMS (polydimethylsiloxane) gradient grating structure - Google Patents
Preparation method of PDMS (polydimethylsiloxane) gradient grating structure Download PDFInfo
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- CN106646707A CN106646707A CN201611015081.8A CN201611015081A CN106646707A CN 106646707 A CN106646707 A CN 106646707A CN 201611015081 A CN201611015081 A CN 201611015081A CN 106646707 A CN106646707 A CN 106646707A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
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Abstract
The present invention belongs to the spectroscopy and spectral analysis technical field and relates to a preparation method of a PDMS (polydimethylsiloxane) gradient grating structure. The preparation method of the PDMS gradient grating structure includes the following steps that: (1) a PDMS liquid is formed, the PDMS liquid stands still at room temperature and is placed in a vacuum drying box, a vacuumizing state is maintained until no bubbles exist in the liquid; (2) the PDMS liquid is taken out and is poured onto the surface of clear polyethylene terephthalate (PET) with a thickness of 0.3 mm, and an obtained object is flattened, vacuumizing is performed for about 10 minutes until no bubbles exist, the obtained object is heated and cured for 3 hours in a vacuum heating box under 65 Celsius degrees, and the object is taken out, and cools, and a PET and PDMS double-layer film with a thickness of 0.8 mm can be obtained; (3) the double-layer film is cut into a 5*1 cm<2> strip, and then the double-layer film is symmetrically bent to 2 cm; (4) the double-layer film is arranged in an oxygen plasma cleaner, and a silicon dioxide-like rigid layer can be generated on the surface of the double-layer film; and (5) the bent double-layer film is flattened, and grating-like folds are formed on the double-layer film. The preparation method has the advantages of simple operation, short processing period and low cost.
Description
Technical field
The present invention relates to spectroscopy and field of spectral analysis technology, and in particular to a kind of preparation of PDMS gradients optical grating construction
Method.
Background technology
Grating is widely used in spectrum analysis, optic communication, integrated optics, information as a kind of important optical element
In the fields such as process, optical measurement.Now there are some researches show, screen periods are less in unit area, bright fringe is brighter, thinner, light
Bar resolution is higher.Therefore, reduce screen periods, improve resolving power, be the important subject in grating technology of preparing.
With developing rapidly for micro-nano-technology, grating preparation technology also achieves marked improvement.The light commonly used at present
Grid preparation technology is mainly photoetching and self-assembling technique.Due to photoetching technique high cost, and it is raw to be not suitable for large area high-volume
Produce；Meanwhile, there is principle interlinking with screen periods structure by forming periodic pleated structure in polymer surfaces, and
This method in nano-particles self assemble, flexible optical device, nematic liquid crystal showing, micro-fluidic chip, stretchable flexibility
The aspect such as electrode and film tolerance is achieved with successful Application.Therefore more or self-assembling method is paid close attention at present.Based on poly- two
Methylsiloxane（PDMS）Self-assembling method be mostly, using PDMS as flexible polymer substrate, to be formed and lining on its surface
The different rigid layer of bottom elastic modelling quantity, when stress exceedes limit stress, structural system unstability, in PDMS film surfaces with regard to shape
Into pleated structure.
The content of the invention
It is contemplated that being directed to the problems referred to above, a kind of preparation method of PDMS gradients optical grating construction is proposed.
Technical program of the present invention lies in：
The preparation method of PDMS gradient optical grating constructions, including following method：
（1）PDMS prepolymers and curing agent are mixed, PDMS liquid is formed, and the PDMS liquid agitations for mixing is uniform, often
Temperature stands 30min, and in being placed on vacuum drying chamber, holding vacuumizes state till bubble-free in liquid；
（2）PDMS liquid is taken out, the surface of the PET of clean 0.3mm thickness is poured over, is laid flat, then vacuumize about 10min,
After bubble-free, be heating and curing 3h in 65 DEG C of heating in vacuum case, after taking out and cooling down, obtain the thick PET of 0.8mm and
PDMS bilayer films；
（3）Bilayer film is cut into into 5 × 1cm2Strip, clamp the two ends of bilayer film with fixture, the distance at two ends is
4cm, then makes bilayer film symmetric curvature to 2cm；
（4）Will be above-mentioned（3）Middle that the bilayer film of bending is positioned in oxygen plasma resist remover, radio-frequency power is 150W, oxygen
Flow 150sccm, process time is 3 ~ 18min, in one layer of class silica rigid layer of bilayer film Surface Creation of bending；
（5）The slow stress that at the uniform velocity discharges makes the bilayer film of bending smooth, and raster-like fold is formed on bilayer film.
Described PDMS prepolymers and curing agent are according to 10：1 mass ratio mixing.
The method have technical effect that：
The present invention proposes a kind of preparation method of PDMS gradients optical grating construction, is prepared for reference to oxygen plasma body processing technology
The neat grating pleated structure of periodic structure.Because stress distribution is uneven during bending, so week can be formed on PDMS films
The phase grating fold different with height, that is, gradient grating.Under the irradiation of fluorescent lamp indoors of this gradient grating, different weeks
The optical grating diffraction angle of phase is different, and film surface is reflected by centrosymmetric colour light band.The gradient grating fold of preparation has
Significantly diffraction phenomena, and the angle of diffraction is changed significantly, and can be widely used for stress measurement.The technological operation is simple, the process-cycle
Short, low cost, is processed to prepare the gradient grating of different cycles, also indicates that this method is a kind of processing gradient grating
Potential effective means, in can be widely applied to the fields such as micro spectrometer, scanner, optical communication.
Specific embodiment
The preparation method of PDMS gradient optical grating constructions, including following method：
（1）By PDMS prepolymers and curing agent according to 10：1 mass ratio mixing, forms PDMS liquid, and by the PDMS for mixing
Liquid agitation is uniform, and normal temperature stands 30min, and in being placed on vacuum drying chamber, holding vacuumizes state until bubble-free is in liquid
Only；
（2）PDMS liquid is taken out, the surface of the PET of clean 0.3mm thickness is poured over, is laid flat, then vacuumize about 10min,
After bubble-free, be heating and curing 3h in 65 DEG C of heating in vacuum case, after taking out and cooling down, obtain the thick PET of 0.8mm and
PDMS bilayer films；
（3）Bilayer film is cut into into 5 × 1cm2Strip, clamp the two ends of bilayer film with fixture, the distance at two ends is
4cm, then makes bilayer film symmetric curvature to 2cm；
（4）Will be above-mentioned（3）Middle that the bilayer film of bending is positioned in oxygen plasma resist remover, radio-frequency power is 150W, oxygen
Flow 150sccm, process time is 3 ~ 18min, in one layer of class silica rigid layer of bilayer film Surface Creation of bending；
（5）The slow stress that at the uniform velocity discharges makes the bilayer film of bending smooth, and raster-like fold is formed on bilayer film.
Claims (2)
- The preparation method of 1.PDMS gradient optical grating constructions, it is characterised in that：Including following method：（1）PDMS prepolymers and curing agent are mixed, PDMS liquid is formed, and the PDMS liquid agitations for mixing is uniform, often Temperature stands 30min, and in being placed on vacuum drying chamber, holding vacuumizes state till bubble-free in liquid；（2）PDMS liquid is taken out, the surface of the PET of clean 0.3mm thickness is poured over, is laid flat, then vacuumize about 10min, After bubble-free, be heating and curing 3h in 65 DEG C of heating in vacuum case, after taking out and cooling down, obtain the thick PET of 0.8mm and PDMS bilayer films；（3）Bilayer film is cut into into 5 × 1cm2Strip, clamp the two ends of bilayer film with fixture, the distance at two ends is 4cm, Then bilayer film symmetric curvature is made to 2cm；（4）Will be above-mentioned（3）Middle that the bilayer film of bending is positioned in oxygen plasma resist remover, radio-frequency power is 150W, oxygen Flow 150sccm, process time is 3 ~ 18min, in one layer of class silica rigid layer of bilayer film Surface Creation of bending；（5）The slow stress that at the uniform velocity discharges makes the bilayer film of bending smooth, and raster-like fold is formed on bilayer film.
- 2. the preparation method of PDMS gradients optical grating construction according to claim 1, it is characterised in that：Described PDMS pre-polymerizations Thing and curing agent are according to 10：1 mass ratio mixing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201611015081.8A CN106646707A (en) | 2016-11-18 | 2016-11-18 | Preparation method of PDMS (polydimethylsiloxane) gradient grating structure |
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| CN201611015081.8A CN106646707A (en) | 2016-11-18 | 2016-11-18 | Preparation method of PDMS (polydimethylsiloxane) gradient grating structure |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107954392A (en) * | 2017-11-28 | 2018-04-24 | 上海理工大学 | The preparation method of PDMS variable period annular micro-fold structures |
| CN108233166A (en) * | 2018-02-06 | 2018-06-29 | 太原理工大学 | Adjustable Random Laser chip and preparation method based on different cycles PDMS folds |
| CN108424543A (en) * | 2018-03-15 | 2018-08-21 | 山东大学 | The preparation method of the force-responsive type surface folding of controllable light transmittance |
| WO2020119469A1 (en) * | 2018-12-12 | 2020-06-18 | 深圳先进技术研究院 | Processing device and processing method for toroidal gratings |
| CN113640907A (en) * | 2021-08-17 | 2021-11-12 | 燕山大学 | Device and method for preparing thin film grating |
-
2016
- 2016-11-18 CN CN201611015081.8A patent/CN106646707A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107954392A (en) * | 2017-11-28 | 2018-04-24 | 上海理工大学 | The preparation method of PDMS variable period annular micro-fold structures |
| CN108233166A (en) * | 2018-02-06 | 2018-06-29 | 太原理工大学 | Adjustable Random Laser chip and preparation method based on different cycles PDMS folds |
| CN108233166B (en) * | 2018-02-06 | 2020-06-16 | 太原理工大学 | Adjustable random laser chip based on PDMS folds with different periods and preparation method |
| CN108424543A (en) * | 2018-03-15 | 2018-08-21 | 山东大学 | The preparation method of the force-responsive type surface folding of controllable light transmittance |
| WO2020119469A1 (en) * | 2018-12-12 | 2020-06-18 | 深圳先进技术研究院 | Processing device and processing method for toroidal gratings |
| CN113640907A (en) * | 2021-08-17 | 2021-11-12 | 燕山大学 | Device and method for preparing thin film grating |
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Application publication date: 20170510 |