CN106959482A - Two-dimensional single-stage diffraction grating for extreme ultraviolet - Google Patents
Two-dimensional single-stage diffraction grating for extreme ultraviolet Download PDFInfo
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- CN106959482A CN106959482A CN201710368980.4A CN201710368980A CN106959482A CN 106959482 A CN106959482 A CN 106959482A CN 201710368980 A CN201710368980 A CN 201710368980A CN 106959482 A CN106959482 A CN 106959482A
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- 239000000758 substrate Substances 0.000 claims abstract description 23
- 241000216843 Ursus arctos horribilis Species 0.000 claims description 44
- 238000007639 printing Methods 0.000 claims description 41
- 239000010408 film Substances 0.000 claims description 22
- 239000010409 thin film Substances 0.000 claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- VDGJOQCBCPGFFD-UHFFFAOYSA-N oxygen(2-) silicon(4+) titanium(4+) Chemical compound [Si+4].[O-2].[O-2].[Ti+4] VDGJOQCBCPGFFD-UHFFFAOYSA-N 0.000 claims 1
- 238000009826 distribution Methods 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 description 6
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- 238000005516 engineering process Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
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- 238000002360 preparation method Methods 0.000 description 2
- 238000010183 spectrum analysis Methods 0.000 description 2
- 241000790917 Dioxys <bee> Species 0.000 description 1
- 229910003978 SiClx Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
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- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1838—Diffraction gratings for use with ultraviolet radiation or X-rays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B2005/1804—Transmission gratings
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
The invention discloses a two-dimensional single-stage diffraction grating of extreme ultraviolet light, which comprises: the grating structure comprises a transparent substrate and a grating layer positioned on the surface of the transparent substrate; the grid layer is provided with a plurality of light-transmitting grids and a plurality of light-tight grids; the light-transmitting grid bars and the light-tight grid bars are alternately distributed in a first direction, the light-transmitting grid bars and the light-tight grid bars extend in a second direction, and the first direction is perpendicular to the second direction; in the first direction, two opposite sides of the light-transmitting grid bars are both in a sawtooth shape; and the width of the light-transmitting grid bars in the first direction is the same everywhere. According to the technical scheme, the diffraction is realized through the saw-tooth-shaped light-transmitting grid bars and the light-tight grid bars, the width of the light-transmitting grid bars is unchanged, the light-transmitting grid bars are randomly distributed, so that the width of the light-tight grid bars meets the preset random distribution, and higher harmonics can be eliminated while diffraction is realized on the preset wave band.
Description
Technical field
The present invention relates to field of optical device technology, in particular, it is related to a kind of two-dimentional single-stage for extreme ultraviolet and spreads out
Penetrate grating.
Background technology
Diffraction grating development time is longer, and traditional a series of parallel groove is generally currently used for the grating of spectrometer
The metallic film black and white light grating constituted with lines, the problem of there is multiorder diffractive.Especially in extreme ultraviolet waveband, due to this ripple
There is substantial amounts of atomic resonance line and Absorption Line in section, radiation of any material to this wave band all has serious absorption, or even empty
Gas is no exception, and its absorption length is usually micron or nanometer scale.Therefore, the research of extreme ultraviolet waveband radiation has great
It is difficult.
At present, many diffraction grating devices are applied by invention, and some diffraction grating devices manufacture week using grating
Phase D can suppress the Advanced Diffraction produced by specific wavelength λ when (λ, 2 λ) are interval, however, the wavelength X scope quilt effectively suppressed
(D/2, D) interval has been limited in, and has been difficult by the cycle with current nanometer manufacturing process for short wavelength as extreme ultraviolet ripple
Control is within suitable interval；Some diffraction grating devices combine to suppress the high order of target wavelength using different types of filter disc
Harmonic wave, but in measure spectrum, only to a certain wavelength region effectively, different regions need different insertions to one piece of filter disc
Part, this not only adds manufacturing cost, also makes spectrometer structure become complicated, more importantly this can make to the precision for measuring spectral line
Into very big influence.In a word, in extreme ultraviolet waveband, these methods all hardly result in satisfied effect.
Therefore, design and making can effectively suppress higher hamonic wave, and single-stage easy to process in extreme ultraviolet waveband
The problem of diffraction grating is in the urgent need to address in the development of current spectral analysis technique and application field.
The content of the invention
In order to solve the above problems, the invention provides a kind of two-dimentional single diffraction order grating for extreme ultraviolet, Ke Yi
Extreme ultraviolet waveband effectively suppresses higher hamonic wave, and manufacture craft is simple, low manufacture cost.
To achieve these goals, the present invention provides following technical scheme：
A kind of two-dimentional single diffraction order grating for extreme ultraviolet, the two-dimentional single diffraction order grating includes：Transparent substrates
And the grizzly bar layer positioned at the transparent substrates surface；
The grizzly bar layer has multiple printing opacity grizzly bars and multiple impermeable gratings strips；
The printing opacity grizzly bar and the impermeable gratings strips are alternately distributed in a first direction, and the printing opacity grizzly bar and
The impermeable gratings strips extend in a second direction, and the first direction is perpendicular to the second direction；
In said first direction, the relative both sides of the printing opacity grizzly bar are zigzag；And the printing opacity grizzly bar is in institute
The width stated on first direction is identical everywhere.
It is preferred that, in above-mentioned two-dimentional single diffraction order grating, in said first direction, the two-dimentional single diffraction order grating
Grating constant be P, the width of the printing opacity grizzly bar is P/2, and the width of the impermeable gratings strips in said first direction is
d；And d span is met：
It is preferred that, in above-mentioned two-dimentional single diffraction order grating, the scope of the grating constant is 450nm-550nm, including
Endpoint value.
It is preferred that, in above-mentioned two-dimentional single diffraction order grating, in said first direction, the printing opacity grizzly bar side sawtooth
Width be equal to the grating constant 1/6th.
It is preferred that, in above-mentioned two-dimentional single diffraction order grating, the impermeable gratings strips are gold thin film or Ag films or aluminium
Film or chromium thin film or silicon thin film or silicon nitride film or carborundum films.
It is preferred that, it is described impermeable on the direction perpendicular to the transparent substrates in above-mentioned two-dimentional single diffraction order grating
The thickness range of gratings strips is 100nm-300nm, including endpoint value.
It is preferred that, in above-mentioned two-dimentional single diffraction order grating, the transparent substrates are silica substrate or nitridation silicon substrate
Bottom or silicon carbide substrate.
In the two-dimentional single diffraction order grating for extreme ultraviolet provided by foregoing description, technical solution of the present invention,
The printing opacity grizzly bar and the impermeable gratings strips are set to be alternately distributed in a first direction, and the printing opacity grizzly bar and described
Impermeable gratings strips extend in a second direction, and the first direction is perpendicular to the second direction；In said first direction, institute
State the relative both sides of printing opacity grizzly bar and be zigzag；And the width of the printing opacity grizzly bar in said first direction is identical everywhere.
By adjusting the width of spacing and printing opacity grizzly bar of the printing opacity grizzly bar between, realizing to the same of the diffraction of extreme ultraviolet wave band
When so that diffraction pattern only has 0 grade and positive and negative 1 order diffraction pattern, and can eliminating 2n, 3n, 4n, 5n order diffraction, (n is that non-zero is whole
Number) order diffraction, suppress Advanced Diffraction, reduce noise, improve resolution ratio.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are only this
The embodiment of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can also basis
The accompanying drawing of offer obtains other accompanying drawings.
Fig. 1 is a kind of top view of two-dimentional single diffraction order grating in extreme ultraviolet provided in an embodiment of the present invention；
Fig. 2 is sectional drawing of the two-dimentional single diffraction order grating in AA ' directions shown in Fig. 1；
Fig. 3 is the structural representation of the printing opacity grizzly bar of two-dimentional single diffraction order grating shown in Fig. 1；
Fig. 4 is a kind of diffraction characteristic figure of the two-dimentional standby diffraction grating provided in an embodiment of the present invention to extreme ultraviolet；
Fig. 5 is a kind of diffraction characteristic figure of the two-dimentional standby diffraction grating provided in an embodiment of the present invention to visible ray；
Fig. 6 is a kind of diffraction characteristic figure provided in an embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
It is below in conjunction with the accompanying drawings and specific real to enable the above objects, features and advantages of the present invention more obvious understandable
Applying mode, the present invention is further detailed explanation.
The embodiments of the invention provide a kind of two-dimentional single diffraction order grating for extreme ultraviolet, as shown in Figure 1-Figure 3, figure
1 is a kind of top view of two-dimentional single diffraction order grating in extreme ultraviolet provided in an embodiment of the present invention, and Fig. 2 is two shown in Fig. 1
Sectional drawing of the single diffraction order grating in AA ' directions is tieed up, Fig. 3 is the structure of the printing opacity grizzly bar of two-dimentional single diffraction order grating shown in Fig. 1
Schematic diagram.
Two-dimentional single diffraction order grating provided in an embodiment of the present invention includes：Transparent substrates 11 and positioned at the transparent substrates
The grizzly bar layer on surface；The grizzly bar layer has multiple printing opacity grizzly bars 12 and multiple impermeable gratings strips 13.
The printing opacity grizzly bar 12 and the impermeable gratings strips 13 are alternately distributed on X in a first direction, and the light transmission grid
Bar 12 and the in a second direction Y of impermeable gratings strips 13 extensions, the first direction X is perpendicular to the second direction Y.Institute
First direction X and the second direction Y are stated each parallel to the transparent substrates 11.Third direction Z is perpendicular to the transparent base
Plate 11.
On the first direction X, the relative both sides of the printing opacity grizzly bar 12 are zigzag；And the printing opacity grizzly bar 12
Width on the first direction X is identical everywhere, is P/2.P is the grating constant of the two-dimentional single diffraction order grating.
As shown in figure 3, in order that obtaining the relative both sides of printing opacity grizzly bar 12 is zigzag, the printing opacity grizzly bar 12 includes：
The rectangular strip region 21 that Y extends in a second direction；In a first direction on X, the multiple of the both sides of rectangular strip region 21 are arranged on
Sawtooth 22.
The two dimension can be caused by the width for adjusting grating constant, the width of printing opacity grizzly bar 12 and impermeable gratings strips 13
Single diffraction order grating eliminates the Advanced Diffraction of the wave band while target wave band realizes diffraction.As described above, when the two dimension
When the grating constant of single diffraction order grating is P, it eliminate Advanced Diffraction while diffraction is realized to realize, in the first party
To on X, the width for setting the printing opacity grizzly bar 12 is P/2, and the width of the impermeable gratings strips 13 in said first direction is
D, and d span satisfaction：The width d of different impermeable gratings strips can be different.Impermeable gratings strips
Width d is metRandom distribution relation.
It is d by setting grating constant P and the width of the impermeable gratings strips 13, the two-dimentional single diffraction order can be caused
While grating can realize diffraction to the light wave of different-waveband, and eliminate high order diffraction.
According to the extension principle of grating, width d, the wavelength X of incident light and the incidence angle θ of impermeable gratings strips are met：
dsinθm=m λ
Wherein, θmFor incidence angle, m is ± 1, ± 2, ± 3 ....It can be seen from Fraunhofer diffraction principle, diffracted intensity is public
Formula is：
Wherein, m is diffraction time, and the intensity of different diffraction level is Zero-order diffractive intensity I0With three sinc mathematical expressions
Product.When d meets above-mentioned random distribution, the intensity of 2n, 3n, 4n, 5n order diffraction is zero, to eliminate Advanced Diffraction.
Two-dimentional single diffraction order grating described in the embodiment of the present invention by zigzag printing opacity grizzly bar 12 and it is zigzag not
Printing opacity grizzly bar realizes Diffraction of light wave, while being default random point on grating constant by designing the width of impermeable gratings strips 13
Cloth relation, can eliminate Advanced Diffraction while diffraction is realized, reduce noise, improve resolution ratio.
When the diffraction for extreme ultraviolet, the scope of the grating constant P is 450nm-550nm, including endpoint value.
On the first direction X, the width of the side sawtooth 22 of printing opacity grizzly bar 13 is equal to 1/6th of the grating constant, that is, saws
The width of tooth 22 is equal to P/6.
In the embodiment of the present invention, the impermeable gratings strips 13 are prepared using the material for absorbing extreme ultraviolet.Specifically, described
Impermeable gratings strips 13 can for gold thin film or Ag films or aluminium film or chromium thin film or silicon thin film or silicon nitride film or
Carborundum films.
Optionally, on the direction Z perpendicular to the transparent substrates, the thickness range of the impermeable gratings strips 13 is
100nm-300nm, including endpoint value.The thickness that impermeable gratings strips 13 can be set is 150nm.The transparent substrates 11 are dioxy
SiClx substrate or nitridation silicon base or silicon carbide substrate.
Two-dimentional single diffraction order grating described in the embodiment of the present invention can eliminate 2n, 3n, 4n, and 5n grades of diffraction grating expands
The spectral region that big monopole diffraction grating is detected, completely inhibits noise, effectively solves the pollution of higher hamonic wave
Problem, while the single diffraction order grating that the present invention is designed includes the structure of printing opacity and lighttight binaryzation, it is easy to make, greatly
Simplify technology difficulty, especially in extreme ultraviolet optical system, make modern times spectral analysis technique be applied to extreme ultraviolet ripple
Section.
Two-dimentional single diffraction order optical grating construction described in the embodiment of the present invention is simple, can be with shape by patterning the film
Into the impermeable gratings strips 13 and printing opacity grizzly bar 12 of preset structure, the film can be formed by coating process, pattern this thin
The method of film can be made using the semiconductor technology of standard, it is easy to be processed, preparation method is simple, low manufacture cost.It can lead to
Over etching technique film surface formation random distribution printing opacity grizzly bar 12, to cause the width of light tight grizzly bar 13 into default
Random distribution.
When two-dimentional single diffraction order grating described in the embodiment of the present invention is used for extreme ultraviolet waveband diffraction, it can effectively suppress high
Subharmonic, can be applied among extreme ultraviolet optical system and the measurement of laser plasma diagnosis soft X-ray, to adapt to more
The practical application request of wide scope.
Illustrate that two-dimentional standby diffraction grating eliminates Advanced Diffraction in the embodiment of the present application with reference to specific experimental data
Effect.
Lighttight film is formed on transparent substrates surface.The film can fully absorb extreme ultraviolet.The film can be with
For metal chromium thin film, thickness is 150nm.The lighttight film is etched, the region being etched forms printing opacity grizzly bar, does not etch
Region be impermeable gratings strips.The both sides of the region being etched in a first direction are zigzag, are formed above-mentioned zigzag
Printing opacity grizzly bar.
Printing opacity grizzly bar random distribution on the lighttight film so that the width of impermeable optical thin film is metRandom distribution relation.
When two-dimentional standby diffraction grating described in inventive embodiments is under extreme ultraviolet irradiation, its diffraction characteristic figure such as Fig. 4 institutes
Show, Fig. 4 is a kind of diffraction characteristic figure of the two-dimentional standby diffraction grating provided in an embodiment of the present invention to extreme ultraviolet.
As shown in Figure 4, when incident wavelength is 50nm, on transverse axis ξ, 0 grade and ± 1 order diffraction are only existed.In horizontal stroke in Fig. 4
In the three white hot spots arranged successively on axle ξ, the larger white hot spot of intermediate luminance is 0 grade of color image, its left and right sides
Be respectively ± 1 order diffraction image.On transverse axis ξ, in the absence of other Advanced Diffractions, on longitudinal axis η, in 0 order diffraction image
Diffraction pattern is not present in both sides up and down.Therefore, the two-dimentional standby diffraction grating can as monochromator or spectrometer light splitting
Element is used, and will exclude harmonic pollution problems.
When two-dimentional standby diffraction grating described in inventive embodiments wavelength for 500nm radiation of visible light under, its transverse axis ξ side
Upward diffraction characteristic figure is as shown in figure 5, Fig. 5 is the two-dimentional standby diffraction grating of one kind provided in an embodiment of the present invention to visible ray
Diffraction characteristic figure, the longitudinal axis is relative diffraction in Fig. 5, and transverse axis is diffraction time, it can be seen that 1 grade relative 0 grade being spread out
It is 23.94% to penetrate efficiency, it can be seen that there be two-dimentional standby diffraction grating and conventional sinusoidal diffraction grating described in the embodiment of the present invention
The property of same suppression Advanced Diffraction, on the ξ axles parallel to optical grating diffraction, only exists 0 grade and+1/-1 order diffractions.Do not deposit
In Advanced Diffraction.
As shown in fig. 6, Fig. 6 is a kind of diffraction characteristic figure provided in an embodiment of the present invention, the longitudinal axis is relative diffraction in his Fig. 6
The logarithm of efficiency, transverse axis is diffraction time, can more clearly from be seen, single diffraction order grating can suppress 2n, 3n, 4n, 5n
(n is nonzero integer) order diffraction.The present invention expands the spectral region that monopole diffraction grating is detected, and completely inhibits and makes an uproar
Sound, effectively solves the pollution problem of higher hamonic wave.
By foregoing description, two-dimentional standby diffraction grating described in the embodiment of the present invention passes through zigzag printing opacity grizzly bar
Diffraction is realized with impermeable gratings strips, the width of printing opacity grizzly bar is constant, and the printing opacity grizzly bar of random distribution is set so that impermeable grating
The width of bar meets default random distribution, can realize to presetting Eliminate highter harmonic while wave band realizes diffraction.
The foregoing description of the disclosed embodiments, enables professional and technical personnel in the field to realize or using the present invention.
A variety of modifications to these embodiments will be apparent for those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, it is of the invention
The embodiments shown herein is not intended to be limited to, and is to fit to and principles disclosed herein and features of novelty phase one
The most wide scope caused.
Claims (7)
1. a kind of two-dimentional single diffraction order grating for extreme ultraviolet, it is characterised in that including：Transparent substrates and positioned at described
The grizzly bar layer on transparent substrates surface；
The grizzly bar layer has multiple printing opacity grizzly bars and multiple impermeable gratings strips；
The printing opacity grizzly bar and the impermeable gratings strips are alternately distributed in a first direction, and the printing opacity grizzly bar and described
Impermeable gratings strips extend in a second direction, and the first direction is perpendicular to the second direction；
In said first direction, the relative both sides of the printing opacity grizzly bar are zigzag；And the printing opacity grizzly bar is described
Width on one direction is identical everywhere.
2. two-dimentional single diffraction order grating according to claim 1, it is characterised in that in said first direction, described two
The grating constant for tieing up single diffraction order grating is P, and the width of the printing opacity grizzly bar is P/2, and the impermeable gratings strips are described first
Width on direction is d；And d span is met：
3. two-dimentional single diffraction order grating according to claim 2, it is characterised in that the scope of the grating constant is
450nm-550nm, including endpoint value.
4. two-dimentional single diffraction order grating according to claim 2, it is characterised in that in said first direction, described
The width of gratings strips side sawtooth is equal to 1/6th of the grating constant.
5. two-dimentional single diffraction order grating according to claim 1, it is characterised in that the impermeable gratings strips be gold thin film,
Or Ag films or aluminium film or chromium thin film or silicon thin film or silicon nitride film or carborundum films.
6. two-dimentional single diffraction order grating according to claim 1, it is characterised in that in the side perpendicular to the transparent substrates
Upwards, the thickness range of the impermeable gratings strips is 100nm-300nm, including endpoint value.
7. two-dimentional single diffraction order grating according to claim 1, it is characterised in that the transparent substrates are titanium dioxide silicon substrate
Bottom or nitridation silicon base or silicon carbide substrate.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106597588A (en) * | 2016-12-20 | 2017-04-26 | 中国科学院微电子研究所 | Transmission grating |
| JP2021519952A (en) * | 2018-03-30 | 2021-08-12 | ノースロップ グラマン システムズ コーポレーション | Diffractive optics for hybrid coherent and spectral beam coupling |
| US11215760B2 (en) | 2020-02-25 | 2022-01-04 | Honeywell International Inc. | Device for emission of arbitrary optical beam profiles from a chip to free space |
| CN114815047A (en) * | 2021-01-29 | 2022-07-29 | 格芯(美国)集成电路科技有限公司 | Segmented grating coupler with inverted curvature segments |
| CN116299815A (en) * | 2023-05-22 | 2023-06-23 | 北京亮亮视野科技有限公司 | Two-dimensional diamond grating, optical waveguide and near-eye display device for inhibiting high-order light |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101191855A (en) * | 2006-12-31 | 2008-06-04 | 中国工程物理研究院激光聚变研究中心 | Zigzag Diffraction Grating |
| US20100053611A1 (en) * | 2008-07-29 | 2010-03-04 | The Regents Of The University Of California | Ultra-high Density Diffraction Grating |
| CN103018806A (en) * | 2011-09-20 | 2013-04-03 | 中国科学院微电子研究所 | Sub-wavelength extreme ultraviolet metal transmission grating and manufacturing method thereof |
| CN104111488A (en) * | 2013-10-22 | 2014-10-22 | 中国工程物理研究院激光聚变研究中心 | Design of reflective wave strip sheet with single-stage diffraction characteristic and manufacturing method thereof |
| CN104765086A (en) * | 2015-04-13 | 2015-07-08 | 中国工程物理研究院激光聚变研究中心 | Trapezoid primitive optical grating with single-stage diffraction properties |
| CN106597588A (en) * | 2016-12-20 | 2017-04-26 | 中国科学院微电子研究所 | Transmission grating |
-
2017
- 2017-05-23 CN CN201710368980.4A patent/CN106959482B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101191855A (en) * | 2006-12-31 | 2008-06-04 | 中国工程物理研究院激光聚变研究中心 | Zigzag Diffraction Grating |
| US20100053611A1 (en) * | 2008-07-29 | 2010-03-04 | The Regents Of The University Of California | Ultra-high Density Diffraction Grating |
| CN103018806A (en) * | 2011-09-20 | 2013-04-03 | 中国科学院微电子研究所 | Sub-wavelength extreme ultraviolet metal transmission grating and manufacturing method thereof |
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