CN106953225A

CN106953225A - A kind of lath electric discharge preionization transversely-excited atmosphere-pressure laser

Info

Publication number: CN106953225A
Application number: CN201610009867.2A
Authority: CN
Inventors: 张志远; 邬江兴; 王伟平; 张宁; 邬东建; 王蓓
Original assignee: Beijing Bodeheng Laser Technology Co Ltd
Current assignee: Beijing Bodeheng Laser Technology Co Ltd
Priority date: 2016-01-06
Filing date: 2016-01-06
Publication date: 2017-07-14
Anticipated expiration: 2036-01-06
Also published as: CN106953225B

Abstract

The present invention provides a kind of lath (SLAB) electric discharge preionization transverse excitation atmosphere (TEA) laser, abbreviation SLAB-TEA lasers, it is theed improvement is that, discharging structure is combined with the SLAB-TEA that the TEA main discharges Top electrode being arranged in vacuum chamber, TEA main discharges bottom electrode, SLAB sparking electrodes, TEA main discharge spacing support bars and SLAB preionized discharge spacing support chip are constituted, optical resonator with the compound discharging structure length direction two ends are arranged on, is arranged at the gas disturbance device below the compound discharging structure.The technical scheme that the present invention is provided can produce higher initiating electron density, and the cooling (displacement) of gas medium is realized in Three-dimensional Flow mode, it is easy to mould the main discharge plasma of large volume ideal form, main discharge is conducive to produce higher laser power, preionization technique is more brief, and cost is less expensive.

Description

A kind of lath electric discharge preionization transversely-excited atmosphere-pressure laser

Technical field

The present invention relates to lath (SLAB) electric discharge, transverse excitation atmosphere (TEA) field of laser device technology, specifically Say and be related to a kind of lath electric discharge preionization transversely-excited atmosphere-pressure laser, abbreviation SLAB-TEA lasers.

Background technology

The triggered optics scientific revolution of the laser appearance sixties in last century, is progress of human society and human thinking The expansion of breadth and depth generates huge and far-reaching influence.Especially in manufacturing technology field, occur in that with laser technology Based on brand-new " laser thought, ways and means ", it is hard relative to traditional machinery to remove (turning, milling, mill , boring, brill, punching press etc.) processing technology, laser machine and show the good characteristic, materials with high melting point such as flexible, fine Laser 3D printing be even more triggered mechanical manufacturing field deepgoing revolution change, CO₂Laser is in this majestic Key player is play always in " light technology " revolution tide of boundless, so far, still with excellent cost performance, is similar to reason The beam quality thought, extensive industrial process applications, optimal biological medical effect, best air penetrability etc. are significantly Feature and gain great popularity.

CO₂Laser is born more than halfth century, (is put with form, discharging structure, gas work cooling in electric excitation direction Change) change by very long differentiation and diversified forms in terms of mode, technology development have been subjected to glass tube whole sealed-off state, Gas transverse flowing, gas indulge (axle) to flowing, the generation of diffusively cooled mode four.The type of cooling of gas working dielectric Be industry generally acknowledge have change for meaning technical characteristic.

CO₂In laser family, forth generation device --- RF excited diffusion cooling plate waveguide CO₂Laser is (referred to as SLAB-CO₂Laser) be gas laser technology an important breakthrough, be used as the allusion quotation of continuous output high power laser Type device, with continuous output, the remarkable advantage such as power is big, light beam matter is good, cost performance is high, in many important applications Field, particularly field of industrial processing are used widely, and are current state-of-the-art high-power CO₂One of laser device. And transverse excitation atmosphere CO₂Laser (abbreviation TEACO₂Laser) be then gas laser technology another is great Break through, the typical device of high-peak power is exported as pulse, with that peak power is high, single pulse energy is big etc. is significantly excellent Point.Undergo the development of over half a century, CO₂Laser is as industrial process applications main force laser device, although in system Make technically quite ripe, but the technical defect of existing device, the deficiency of performance, being not met by higher level should Actual demand.

The existing typical SLAB-CO continuously exported₂Laser is in discharging structure, electric excitation mode, gas working dielectric There is technological deficiency in terms of the type of cooling：

First, in terms of discharging structure, existing high-power SLAB-CO₂The discharging structure middle plate strip waveguide electrode of laser Discharge face both optical resonance waveguide surface, electric discharge spacing is that fiber waveguide spacing d is strictly limited in 1.5mm≤d ＜ 6mm models Enclose, the air pressure p value of uniform and stable electric discharge is relatively low, usually less than about 30kp so that pd products (air pressure, spacing) are smaller, The output laser power of the laser is improved only by increase machining area, it is impossible to pass through this more effective technique that gets up steam Approach is realized.

Second, in terms of electric excitation mode, RF excited is provided in the PWM pulse amplitude modulation modes controlled as gas discharge RF energy, although accurately control the degree of ionization of lath (SLAB) electric discharge, but pulse amplitude modulation or wave chopping technology can not The peak power of radio-frequency pulse is greatly improved, the electric excitation energy needed for bigger pd products gas glow discharge is also just can not meet Amount.

3rd, in terms of the type of cooling of gas working dielectric, also lack now compared to glass tube whole sealed-off state, crossing current, (vertical) stream of axle, the diffusion cooling more effective gas working dielectric cooling means of these four modes.By above three essence The restriction of technological deficiency, current separate unit SLAB-CO₂Laser is on the premise of high light beam quality is kept to further carry Up to more than ten, tens so hundreds of kw prior arts do not accomplish that power output is not enough although beam quality is high also, because Diameter for underpower laser beam focus operating point will be small, and Rayleigh range (depth of focus) is just short, and this seriously constrains sharp The application and development of light advanced manufacturing technology.

The typical device TEACO of the pulse output of existing high level₂Technically still also there are some roots in laser Person's character defect：

First, existing sparking electrode is certain stationary plane type and structure being pre-designed, the dynamic change of opposing gas ionization Process is " static state ", on the premise of not yet making clear of big pd values gas discharge characteristic completely in theory, sparking electrode This face type solidified in advance is difficult to tackle many " changes " that not exclusively determine with " quiet " with structure；

Second, existing time, main double discharge excitation modes, the secondary electric discharge for realizing preionization is typically quilt once with property The electric discharge transients of dynamic moment, it is impossible to active, dynamic, precise control preionization intensity；

3rd, although simple and practical, the initial electricity produced such as existing preionization technique is for example ultraviolet, corona, dielectric impedance Sub- density not enough, is only capable of manufacturing the middle low power device of MW magnitudes；And Gw, Tw magnitude device need to use electronics Beam maintains preionization, and additional electron beam generating device technical sophistication, volume and weight are big, high cost；Lack one at present Kind is simple and easy to do can to produce large volume, preionization method, technology and the device of high initiating electron density；

4th, existing ultraviolet preionization method, preionized discharge region " general ", ultraviolet light " unrestrained ", the effect of preionization Rate is not high, and extra brokenness decomposes CO₂Gas；

So far also without a kind of compact conformation, with low cost, the continuous, discharging structure of pulsed mode is taken into account, is not had Discharge mode more effectively more compound than secondary, main double electric discharges.Obviously, existing TEA-CO₂Laser is in crucial electric discharge knot Structure, electric excitation method thereof, need to have innovated in preionization mode.

To sum up analyze, existing SLAB-CO₂、TEA-CO₂Device all can not break through the technology that restriction further develops Bottleneck, however no matter scientific research or produce reality, all CO of new generation in the urgent need to a kind of higher performance₂Laser.

In order to realize the further development of prior art, it is desirable to provide a kind of new laser, discharging structure, electricity are met Innovation on energisation mode, preionization mode.

The content of the invention

In order to meet the innovation on the discharging structure, electric excitation mode and preionization mode of existing laser, further improve The performance of existing laser, breaks through the technical bottleneck that restriction further develops, and proposes that a kind of lath electric discharge preionization laterally swashs Encourage atmosphere laser, abbreviation SLAB-TEA lasers.

A kind of lath (SLAB) electric discharge preionization transverse excitation atmosphere (TEA) laser that the present invention is provided, it improves it It is in the laser includes：Vertical section two ends are provided with optical resonator in vacuum chamber, once set from top to bottom Vertical section be boss, specular set TEA main discharges upper/lower electrode (1) and (2), and gas disturbance fill Put (12)；The TEA main discharges bottom electrode (2) include be located at the TEA main discharges bottom electrode (2) longitudinal direction, Vertical end TEA main discharge electrodes, stage casing TEA main discharge electrodes and the position for being located at transition connecting plate (2-5) homonymy The stage casing SLAB between the end and stage casing TEA main discharge electrodes or between two stage casing TEA main discharge electrodes is put Electrode (3)；The pre- electricity of SLAB is provided between the stage casing TEA main discharge electrodes and the end TEA main discharge electrodes From electric discharge spacing support chip (5)；Put between the TEA main discharges upper/lower electrode (1) and (2) two ends provided with TEA master Electric spacing support bar (4).

Further, the TEA main discharges Top electrode (1) includes discharge face (1-1) on supporting surface and TEA main discharges； Discharge face is included by vertically vertically through the air-flow via-hole array (1-3) of the upper discharge face (1-1) on TEA main discharges The electron discharge face being separated into.

Further, the end TEA main discharge electrodes cross section is that specular is set respectively by two two transverse arm length Correspond high equal " F " font of equal and vertical direction；The stage casing TEA main discharge electrodes cross section is length and width Two equal transverse arms, its vertical face is from top to bottom as under the first transverse arm of the ground plane (2-7) of SLAB electric discharge preionization Second transverse arm is provided with the boss (2-9) of auxiliary positioning hole (2-10)；The cross section of the SLAB sparking electrodes (3) is " king " font, longitudinal section vertical direction is shorter, horizontal longer " T " font；" F ", " king " and " dry " It is that rectangle vertical section is circular support chip that font sets cross section between each two-arm of second transverse arm of number respectively from top to bottom (5)。

Further, the height of both described " F " shape and " dry " font is equal, and both two transverse arms are respectively It is arranged in same level, wide equal and its respective end is on same vertical curve；" king " font from upper Down the first transverse arm and " F ", the lower surface of unidirectional first transverse arm of " dry " font of number are in same level On face, and the height of the transverse arm is less than the height of first transverse arm of " F " and " dry ", its 3rd transverse arm bottom surface Connect preionization excitation power supply.

Further, the top of described " king " font SLAB discharge blocks is longitudinally provided with trapezoidal groove；In the SLAB It is flat with the groove with being provided with diameter parallel on the inside of 3rd transverse arm of the order from top to bottom of the discharge block of " king " font Capable cooling water channel (3-3)；The SLAB discharge blocks vertical section is " T " font anyhow dimerous, the horizontal stroke Partial downside is provided with the circular support platform for having auxiliary positioning hole (3-10) for being divided into axisymmetrical setting with the vertical part (3-9)；The perpendicular segment axis is provided with abutting joint via hole (3-4)；The bottom of the vertical portion be provided with it is described Two electric power connection interfaces (3-5) of diameter parallel.

Further, the second transverse arm inner side longitudinal direction is provided with cold from top to bottom for described " F " and " dry " font TEA discharge electrodes But water channel (2-4)；Butt Assembling hole (2-3) is respectively equipped with the electric discharge ridge axis below the vertical boss of face from top to bottom； Bottom is connected with transition connecting plate (2-5).

Further, the first transverse arm cross section of " F " and " dry " font TEA electric discharges ridge from top to bottom is trapezoidal；Its " king " Font SLAB discharge blocks the first transverse arm from top to bottom and the second transverse arm cross section are trapezoidal.

Further, the SLAB sparking electrodes indulge end face for vertical or inclined setting or are not provided with boss (3-9) Reeded plane is set at the top of horizontal end face.

Further, in the middle of the TEA main discharges spacing support bar (4) it is thick cylinder, two ends are screwed Thin cylinder.

Further, by TEA main discharge electrodes and SLAB sparking electrodes constitute it is adjacent two electric discharge ridge between interval Gap (2-13), the ground plane (2-7) of SLAB electric discharge preionization between (2-12), adjacent two transverse arm, TEA main discharges Area (8), air-flow via-hole array (1-3) form the gas medium cooling duct through whole compound discharging structure from bottom to top (9), and because the stop of TEA main discharges Top electrode (1) forms the Three-dimensional Flow of gas medium.

With immediate prior art ratio, the present invention has following excellent effect：

1st, the compound discharging structures of SLAB-TEA are brief, compact in the laser that the present invention is provided, cold by gas working dielectric But passage will construct separate SLAB electric discharge preionization area, TEA main discharges area and be closely connected, in the mistake of gas ionization The electric discharge relevance of dynamic substantially product space is set up in journey, is easy to mould the main discharge plasma of large volume ideal form Body.

2nd, the laser that provides of the present invention is discharged preionization using SLAB, lath discharge channel only as preionized discharge, The passage of gas flowing, therefore preionization spacing d₀Compared to traditional lath electric discharge spacing constriction several times to ten several times, SLAB Electric discharge preionization can realize uniform and stable electric discharge under very high air pressure, excite sufficient amount of initiating electron density, Main discharge is conducive to produce higher laser power.

3rd, the SLAB for the laser that the present invention is provided discharges preionization hard constraints in ad hoc lath discharge channel, phase " general " electric discharge and " unrestrained " than the preionization method such as ultraviolet, corona are excited, and the validity of preionization is higher, does not produce Non-essential gas medium is decomposed, it is possible to provide higher initiating electron density；The preionization method injected compared to electron beam, In the case of initiating electron density is analogous, preionization technique is more brief, and cost is less expensive.

4th, in the technical scheme that provides of the present invention SLAB electric discharges preionization can active, dynamic, precise control preionization it is strong Degree, preionization is " flexibility ", decomposes CO to inexcessive brokenness₂Molecule, both can guarantee that based on electric discharge provide enough Initiating electron density, ensure that " freshness " for participating in main discharge gas medium, such preionized discharge just can be with It is continuous, lasting " hot " or " fire in a stove before fuel is added on duty " is provided for main discharge, is conducive to improving the reliability of main discharge Property.

5th, the laser middle plate strip discharge block that the present invention is provided is arranged in the interval of the adjacent two electric discharges ridge of bottom electrode, convex ridge It is inserted in gap and under lower discharge face, on the one hand this structure can avoid the influence of main discharge to greatest extent； On the other hand, there is certain guide effect to gas flowing, the air-flow that guiding carries initiating electron is blowed in main discharge area Heart district domain, is conducive to improving the stability of main discharge.

6th, impedance Z is externally presented in the overall electric structure of SLAB electric discharges preionization in the laser that the present invention is provided₀, inherently shake Swing frequency f₀Two static electric parameters, it is easy to match the excitation power of feed-in preionized discharge.

7th, SLAB-TEA is combined in discharging structure provided with gas working dielectric cooling (displacement) in the laser that the present invention is provided Gap 2-13, SLAB electric discharge preionization between interval 2-12, adjacent two transverse arm between passage, adjacent two ridge connects Ground 2-7, TEA main discharge area 8, air-flow via-hole array 1-3 are formed through entirely compound discharging structure from bottom to top, and Because the Three-dimensional Flow that the stop of TEA main discharges Top electrode 1 forms gas medium cooling (displacement) has technicalization generation Significance；Three-dimensional Flow is conducive to being homogenized initiating electron density, improves the uniformity of main discharge；Portion gas is with most short Path traversal main discharge area, can strengthen the cooling and displacement of discharge gas medium, be conducive to the repetition of raising main discharge frequently Rate, so as to improve the repetition of output laser.

8th, SLAB-TEA is combined the convenient change main discharge space D of discharging structure in the laser that the present invention is provided₀, it is easy to and Hold continuous, two kinds of working methods of pulse；During pulsed operation, SLAB electric discharge preionization realizes that the one-level of low energy is excited, and builds The initiating electron of vertical certain density, then use two grades of traditional TEA technologies completion high-energy to excite, it is secondary, main pair and puts Electricity provides once " just electric discharge " again, with " first, secondary, main " three discharge types, improves the performance of usual TEA electric discharges, The laser pulse of the bigger energy of output.

9th, the compound discharging structure for the SLAB-TEA lasers that the present invention is provided can be easily by upper discharge face and lower discharge face It is set to optical guide plane, main discharge space D₀It is set to 1.5≤D₀＜ 6mm, are exactly a kind of new " SLAB lasers ", Due to increasing operating air pressure at double, the laser power continuously exported is greatly improved with the quadratic relationship of air pressure, keeps bloom Tens to hundreds of kw can be improved while beam quality；Before holding and tradition SLAB laser identical laser power densities Put, the spot diameter of operating point can increase to several mm, and its Rayleigh range (depth of focus) can then increase to tens to thousands of Mm, can by the thickness of laser processing of materials from about 20mm lifted to tens, hundreds of even thousands of millimeters, break through laser Manufacture advanced technology should not process the bottlenecks of thick material, significantly the application field of expanded laser light processing.

10th, in the compound discharging structure for the SLAB-TEA lasers that the present invention is provided, upper discharge face is by air-flow via-hole array Multiple electron discharge faces arranged side by side are separated into, the upper top surface of each electric discharge ridge is also partitioned into many height provided with gap and put by lower discharge face Electric face, whole TEA main discharges area is that the subspace gain region of electric discharge is alternate with the non-gain region of the fillet not discharged side by side, is increased Beneficial area is wide rather than gain region is narrow, laser gain is had the characteristic of period profile in the transverse direction of electrode, is beneficial to eliminate other High-order mode, the laser beam output of extraction high power high-quality.

11st, the SLAB-TEA that the present invention is provided is combined in discharging structure, and SLAB preionization inputs multichannel using single supply Discharge and uniformly encourage simultaneously, TEA main discharges input multiple sub-electrodes arranged side by side electric discharge simultaneously uniformly excitation using single supply, because And device can be made to array type, multiple compound discharging structure series and parallel connect, and to realize and improve device by gain volume scaling The power output of part.

Figure of description

Fig. 1 is SLAB-TEA laser schematic diagrames；

Fig. 2 is TEA main discharge Top electrode schematic diagrames：

(a) it is discharge face schematic diagram；(b) it is end view；

Fig. 3 is TEA main discharge bottom electrode schematic diagrames；

(a) it is end view；(b) it is electric discharge ridge side view；

Fig. 4 is SLAB sparking electrode schematic diagrames

(a) it is electric discharge ridge end view drawing；(b) it is electric discharge ridge side schematic view；

Fig. 5 is TEA main discharge spacing support bar schematic diagrames；

Fig. 6 is SLAB preionized discharge spacing support member schematic diagrames；

(a) support chip front elevation；(b) support chip side schematic view；

Fig. 7 is that SLAB-TEA is combined discharging structure schematic diagram；

Fig. 8 is SLAB sparking electrode close-up schematic views；

Fig. 9 is that embodiment is combined discharging structure schematic diagram with SLAB-TEA；

Figure 10 is compound discharging structure series connection schematic diagram；

Figure 11 is that SLAB discharge blocks are "convex" shaped partial schematic diagram.

Wherein, 1-TEA main discharges Top electrode, 2-TEA main discharges bottom electrode, 3-SLAB sparking electrodes, 4-TEA Main discharge spacing support bar, 5-SLAB preionized discharge spacing support chip, 6- are combined discharging structure, 7-SLAB Electric discharge preionization area, 8-TEA main discharges area, 9- gas working dielectrics cooling duct, 10-SLAB electric discharge matchings Inductive bank, 11- optical resonators, 12- gases disturbance device, The upper discharge faces of 1-1-TEA main discharges, 1-2-upper supporting table terrace, 1-3-air-flow via-hole array, The water-cooled road of the cooling water of 1-4-auxiliary mounting hole, 1-5-connection outer loop, 2-1-electric discharge ridge, 2-2-lower discharge face, 2-3-Butt Assembling hole, the water-cooled road of the cooling water of 2-4- connection outer loops, 2-5-excessively connecting plate, 2-6-lower supporting table terrace, 2-7-SLAB electric discharge preionization ground plane, 2-8-concave station terrace, 2-9-circular support platform, 2-10-auxiliary positioning hole, 2-11-mounting hole, Gap, 3-1-SLAB between interval, 2-13 between 2-12-adjacent two ridge-adjacent two transverse arm are put Electric block, 3-2-convex ridge, 3-3 cooling water channels, 3-4-abutting joint via hole, 3-5-power supply connect Mouth, 3-6-trapezoidal groove, 3-7-SLAB electric discharge preionization connect excitation power supply face, 3-8-step surface, 3-9-circular support platform, 3-10-auxiliary positioning hole.

Embodiment

For the clearly detailed technical scheme for describing this explanation, lath electric discharge preionization is stated with reference to the drawings and specific embodiments The design feature of transversely-excited atmosphere-pressure laser, the gentle body running type of cooling of energisation mode.

The present invention proposes a kind of lath (SLAB) electric discharge preionization transverse excitation atmosphere (TEA) laser, referred to as SLAB-TEA lasers, as shown in figure 1, vertical section two ends are provided with optical resonator, from top to bottom one in vacuum chamber The vertical section of secondary setting is boss, and TEA main discharges Top electrode 1 and bottom electrode 2 that specular is set, and gas are disturbed Dynamic device 12；The TEA main discharges bottom electrode 2 include being located at the longitudinal direction of the TEA main discharges bottom electrode 2, set vertically In the end TEA main discharge electrodes of transition connecting plate 2-5 homonymies, stage casing TEA main discharge electrodes and positioned at the end The stage casing SLAB sparking electrodes 3 between the TEA main discharge electrodes of stage casing or between two stage casing TEA main discharge electrodes；It is described SLAB preionized discharge spacing support chip 5 is provided between stage casing TEA main discharge electrodes and the end TEA main discharge electrodes； TEA main discharge spacing support bar 4 is provided between the TEA main discharges Top electrode 1 and the two ends of bottom electrode 2.

TEA main discharges Top electrode 1 as shown in Fig. 2 TEA main discharge Top electrode schematic diagrames (b) discharge face front view, The cuboid for being shaped as carrying boss of Top electrode 1, length L₁It is set to 180mm≤L₁＜ 1000mm, thickness h₁If For 10mm≤h₁＜ 30mm, the Top electrode is provided with the upper discharge face 1-1 of TEA main discharges, and left and right end is symmetrically arranged Upper supporting table terrace 1-2, vertically vertically through the air-flow via-hole array 1-3 of the upper discharge face, positioned at upper supporting table terrace The water-cooled road 1-5 of auxiliary mounting hole 1-4 and connection outer loop cooling water on 1-2.

Wherein, the upper discharge face 1-1 of TEA main discharges is centrally positioned in the bottom surface of Top electrode 1, its width W₁It is set to 100mm≤W₁＜ 800mm；Air-flow via-hole array 1-3 is arranged in the range of discharge face 1-1, is along its length Longitudinal direction is into two row's above spaced sets, and second of preferred scheme is between air-flow via-hole array is laterally waited along its width Away from setting, upper discharge face 1-1 is separated into a plurality of electron discharge face arranged side by side, air-flow through-hole diameter φ₁It is set to 1mm ＜ φ₁ ＜ 6mm, hole center spacing d₁It is set to 3mm≤d₁＜ 10mm, spacing between rows and rows d₂It is set to 20mm≤d₂＜ 100mm。

Electricity on the upper supporting table terrace 1-2 that mutation is sunk, such as Fig. 2 TEA main discharges is symmetrical arranged in the both sides of Top electrode 1 Shown in figure (a) in the schematic diagram of pole, real segment a represents the upper supporting table terrace that mutation is sunk, its width W₂It is set to 20mm≤W₂＜ 60mm；Second preferred scheme is that upper supporting table terrace 1-2 gradual changes are sunk, such as Fig. 2 TEA main discharges Shown in figure (a) in Top electrode schematic diagram, phantom line segments a ' represents the upper supporting table terrace that mutation is sunk, submergence depth h₁ It is set to 5mm≤h₁＜ 50mm.Auxiliary mounting hole 1-4 is equidistantly symmetrical arranged in the outer part positioned at upper supporting table terrace 1-2； Bad cooling water channel is followed in the end face of Top electrode 1 with outside provided with a plurality of water-cooled road 1-5 to be connected, the water-cooled road and TEA Air-flow via-hole array in the upper discharge face of main discharge Top electrode be arranged in parallel, identical with the quantity in electron discharge face；In setting The outside TEA main discharge excitation power supplies of upper top surface connection of electrode 1, make discharge face 1-1 connect main discharge power supply.

The electrode end surface schematic diagram that the mutation of supporting table terrace is sunk under such as Fig. 3 TEA main discharge bottom electrode schematic diagrames (a), The TEA main discharges bottom electrode 2, bottom electrode 2 is shaped as cuboid, is indulged by the electric discharge ridge 2-1 of a plurality of equal length Constituted to parallel combinations, the length of bottom electrode and the equal length of Top electrode；Complete bottom electrode 2 at least includes cross section One or more can be set in respectively three of " F ", " king " and " dry " type electric discharge ridges, wherein stage casing " dry " type；TEA Lower discharge face 2-2 provided with TEA main discharges, Butt Assembling hole 2-3, connection outer loop cooling in main discharge bottom electrode The water-cooled road 2-4 of water, excessive connecting plate 2-5, lower supporting table terrace 2-6.

Wherein, electric discharge ridge 2-1 height h₂It is equal to be set to 26mm≤h₂＜ 140mm；Two transverse arms of " dry " type ridge, The length n of one transverse arm of " F " type ridge₁It is equal to be set to 5mm≤n₁＜ 40mm, thickness h₃It is equal to be set to 8mm≤h₃ ＜ 20mm；The upper top surface width W of " dry " type ridge₃It is set to 30mm≤W₃＜ 200mm, the upper top surface width of " F " type It is set to W₃/ 3 or W₃/ 2, the upper top surface of each vallate is electron discharge face, and the parallel contour electron discharge face being set up in parallel constitutes TEA The lower discharge face 2-2 of main discharge；Every " F " type ridge is in length direction without transverse arm end retraction length W₅Be set to 20mm≤ W₅＜ 60mm, width h₅It is set to 5mm≤h₅＜ 10mm, second transverse arm of " F " and " dry " type is to be arranged at side Circular support platform 2-9, be provided with auxiliary positioning hole 2-10, in terms of vertical end face, the circle on circular support platform There is certain distance on the left of support platform and TEA main discharge electrodes.

Figure (b) electric discharge ridge side view in TEA main discharge bottom electrode schematic diagrames as shown in Figure 3, whole piece ridge side is in " π " shape being made up of horizontal two beam, a horizontal lower section is to be placed equidistant below a thin groove, proximate recesses provided with auxiliary Positioning hole 2-10 circular support platform 2-9, Butt Assembling hole 2-3 is helped to be arranged on the axis of two vertical lines, number is extremely It is few two；The lower surface of two vertical lines connects excessive connecting plate 2-5 respectively, a horizontal lower surface slot milling, and excessive Connecting plate 2-5 connections publicly, make lower discharge face 2-2 connections publicly；

As shown in Figure 8, it is the interval 2-12 distance values between the partial enlarged drawing of (a) figure in Fig. 3, adjacent two ridge d₃It is equal to be set to 10mm≤d₃There is gap 2-13, its value d between ＜ 50mm, adjacent two transverse arm₄It is equal to be set to 1mm ＜ d₄＜ 6mm, set the gap d 4 between adjacent two transverse arm equal to the upper discharge face of TEA main discharge Top electrodes here The diameter phi 1 of air-flow through hole, it is clear that d4 is the spacing between lower each electron discharge faces of discharge face 2-2.

The side end face of electric discharge ridge 2-1 ridge transverse arms is usually arranged as vertical plane, and the first of " F " and " dry " font electric discharge ridge is horizontal Arm, is to be provided with width W along its length close to lower discharge face 2-2 side on this vertical plane₄For 2mm≤W₄ The ground plane 2-7 of ＜ 5mm narrow bar TEA electric discharge preionization, the unilateral length of the first transverse arm is h₄, its value is set to 1mm≤h₄＜ 3mm, form concave station terrace 2-8, between the first transverse arm and the second transverse arm between the first transverse arm and the second transverse arm Distance be d₅It is set to 2mm≤d₅＜ 5mm, set the circular support platform 2-9 equal with air-flow through-hole diameter diameter φ 2 is set to the ＜ 10mm of 6mm≤φ 2, the i.e. length of the second transverse arm for φ 2, provided with certain at circular support Platform center Aperture and the auxiliary positioning hole 2-10 of depth, the quantity of platform are identical with discharging gap quantity, wherein, SLAB electric discharges are pre- The ground plane 2-7 of ionization is parallel with circular support platform 2-9 top surface contour in same plane.Another preferred scheme For the part for the ridge 2-1 ridge transverse arms that discharge to be set to tilt to the inclined-plane of certain angle, SLAB is set to put with identical principle The ground plane 2-1 of electric preionization width, groove 2-8 width, diameter 2-9 and the auxiliary positioning hole of circular support platform 2-10.In the opposite side of two horizontal male arms of " F " type ridge, sink relative to the second preferred scheme gradual change that top surface sinks Depth h₅With the gradual change submergence depth h of TEA main discharge Top electrodes₁It is equal, it is symmetricly set in the lower branch of the both sides of bottom electrode 2 Support step surface 2-6 width W₅It is equal with the width W2 of the upper supporting table terrace of Top electrode, it is outer on each step surface Side is provided with mounting hole 2-11.

In second preferred scheme, bottom electrode 2 is laterally arranged side by side group in the width direction by the electric discharge ridge 2-1 of a plurality of equal length Close and constitute, the length L in the first preferred scheme₂The width of bottom electrode 2 is set to, the top surface of every electric discharge ridge is electron discharge Face, multiple electron discharge faces laterally constitute lower discharge face 2-2 side by side, while the air-flow via-hole array 1-3 correspondences of Top electrode 1 Ground along its it is transversely arranged set.

As Fig. 4 SLAB sparking electrode figures (a) electric discharge ridge end view shown in, the SLAB sparking electrodes 3 by More than two SLAB discharge blocks 3-1 are constituted, and each piece can individually connect an external drive power supply, also can polylith connection it is same One excitation power supply；Every piece of " king " font SLAB discharge blocks 3-1 length and the Top electrode of TEA discharge electrodes and lower electricity The equal length of pole, base width W₆It is set to 10mm ＜ W₆＜ 25mm, height h₆It is set to 15mm ＜ h₆＜ 60mm, The SLAB discharge blocks are provided with convex ridge 3-2, cooling water channel 3-3, abutting joint via hole 3-4, electric power connection interface 3-5；The high h of convex ridge 3-2₇It is set to 10mm≤h₇＜ 30mm, wide W₇It is set to 2mm≤W₇＜ 6mm, on its top edge Length direction is provided with trapezoidal groove 3-6, groove depth h₈It is set to 2mm≤h₈＜ 5mm, the wide W of trapezoidal waist₈With convex ridge 3-2's Equal width is 2mm≤W₈＜ 6mm, cross section is trapezoidal upper slightly wide lower slightly narrow；Convex ridge 3-2 include the first transverse arm and Groove in the middle of second transverse arm and two transverse arms, wherein the side of the first transverse arm, which is set to SLAB electric discharge preionization, connects excitation Voltage plane 3-7, the width W of the first transverse arm₉Than the width W of the ground plane of SLAB discharge electrode bottom electrodes₄Short about 1mm, The unilateral length h of first transverse arm₉With the unilateral length h of the first transverse arm of TEA discharge electrodes bottom electrode " F " type electrode₄Equal Step surface 3-8, then at a distance of discharge face 3-7 intervals d6=d5 distances on this face, provided with least two and 2-9 identicals Diameter phi 3 is set to the ＜ 10mm of 6mm≤φ 3 circular support platform 3-9, and identical auxiliary positioning hole 3-10.It is described SLAB electric discharge preionization connect excitation power supply face 3-7 it is parallel with platform 3-9 top surface contour and be in same plane.The In two preferred schemes, a part for correspondence electric discharge ridge 2-1 ridge transverse arms is set to tilt the outer of the inclined-plane of certain angle both transverse arm When end is divided into inclined-plane, correspondingly convex ridge 3-2 two end face outsides are also configured as the inclined-plane of reversed dip certain angle, together Reason sets same top surface trapezoidal groove, connects excitation power supply face, subsidence trough, circular support platform and auxiliary positioning hole.

" king " font SLAB discharge blocks preferred scheme described above is " convex " that top is longitudinally provided with trapezoidal groove Font mutation is sunk or bilateral gradual change sinking or one-side gradient sinking discharge block；Or/and, the SLAB sparking electrodes are The "convex" shaped mutation that there is equal two transverse arm one side of the top provided with trapezoidal groove is sunk or one-side gradient sinking discharge block. If distance is narrower between two TEA main discharge electrodes, its SLAB discharge block can be the vertical plane of the equal un-grooved in two ends.

TEA main discharge spacing support bar 4 as shown in Figure 5, is the thick insulating materials cylindrical type bar of two detail section, two Head is threaded, and the TEA main discharges spacing that the height of the support bar is as needed is set.

SLAB preionized discharge spacing support chip 5 as shown in Figure 6, is the circular ring type thin slice of insulating materials, such as Fig. 6 In shown in (a) figure, thickness h₁₀It is set to 0.1mm≤h₁₀＜ 1.5mm, outside diameter d₈More than circular support platform 2-9 With 3-9 diameter about 0.5mm, diameter of bore d₉It is identical with auxiliary positioning hole 2-10 and 3-10 diameter, thickness h₁₀ Gap between with SLAB discharge blocks connecing perturbed surface with the ground plane of TEA main discharges pole is equal.

SLAB-TEA as shown in Figure 7 is combined discharging structure 6, by TEA main discharges Top electrode 1, TEA main discharges Bottom electrode 2, TEA main discharge spacing support bar 4, SLAB preionized discharge spacing support chip 5, SLAB sparking electrodes 3rd, the TEA main discharges area that the SLAB electric discharge preionization area of lath discharge channel composition, electron discharge area Space Coupling are constituted 8th, gas working dielectric cooling duct 9 and SLAB electric discharge matching inductive banks 10.

With D in compound discharging structure₀Used extremely by Top electrode 1 and bottom electrode 2 for the TEA main discharges area 8 of main discharge spacing Few 4 support member bars 4 connection support is constituted, support bar 4 be arranged on mounting hole 1-4 on supporting table terrace 1-2 with Between mounting hole 2-11 on lower supporting table terrace 2-6, it is integrally formed, is above put with the screwed two ends fastening of support bar Electric face 1-1 is parallel with lower discharge face 2-2；According to the height of TEA main discharges spacing setting 4, the electric discharge of main discharge is determined Space D₀, the electric discharge spacing can be according to different output laser mode determinations：When continuously output laser, 1.5≤D is set₀ ＜ 6mm；When pulse exports laser, 6mm≤D is set₀＜ 500mm；Due to upper discharge face 1-1 and lower discharge face 2-2 Special construction, specifically, TEA main discharges area 8 is put by many height in upper discharge face 1-1, lower discharge face 2-2 The strip electron discharge area that electric face is constituted side by side is constituted in Space Coupling form, and parallel relative electron discharge face is constituted up and down Multiple electron discharge areas, referred to as gain amplification region；And the gap 2-13 centers pair between air-flow via-hole array 1-3 and two transverse arms Together, discharging condition is destroyed, the multiple width on the one hand formed between them are d₄Space be the non-gain region do not discharged, Interweave from the horizontal gain amplification region in main discharge area 8 and non-gain region in terms of electric discharge angle, form period profile.On the other hand again Formed from the gap 2-13 between gap 2-12 of the lower section of bottom electrode 2 through adjacent two ridge, adjacent two transverse arm and With d₀For the lath discharge channel of spacing, with beeline vertically through main discharge area 8, then through air-flow via-hole array 1-3 Top electrode 1 is flowed out, the gas working dielectric cooling duct for passing through whole compound discharging structure from bottom to top is formed.

As shown in figure 8, SLAB sparking electrodes 3 are included among bottom electrode 2, " king " font SLAB discharge blocks 3-1 It is inserted in the interval 2-12 between " F " and " dry " font or two " dry " font discharge electrode 2-1 so that convex ridge 3-2 Among the gap 2-13 at the interval for assigning into two transverse arms, the discharge space of symmetrical SLAB preionization is formed.In electric discharge When the side end face of ridge 2-1 transverse arms, convex ridge 3-2 two transverse arm side end faces are set to the situation of vertical plane, SLAB is set to put Electric meets voltage plane 3-7 than the ground connection discharge face lower slightly 1mm of 2-7 that SLAB discharges, and hides under TEA main discharges Under discharge face 2-2, influence of the main discharge to preionized discharge is avoided to greatest extent.

SLAB electric discharge preionization ground plane end circular support platform 2-9, auxiliary positioning hole 2-10 respectively with SLAB The circular support platform 3-9 for connecing excitation power supply face end, auxiliary positioning hole the 3-10 alignment of electric discharge preionization, will by pilot pin SLAB preionized discharge spacing support chip 5 is positioned between two circular support platforms, the electric discharge spacing d of SLAB preionization₀ Just completely by the thickness h of SLAB preionized discharge spacing support chip 5₁₀It is determined that, both d₀=h_10,h₁₀Value is 0.1mm ≤h₁₀＜ 1.5mm.A plurality of SLAB discharge channels arranged side by side constitute the SLAB electric discharge preionization area 7 of linear array type, each Bar SLAB discharge channels are respectively provided with the good electrical characteristics of uniformity；Butt Assembling hole 2-3 is passed through using many fastening screws Above-mentioned each part is fastenedly connected with abutting joint via hole 3-4 and is integral, the preionization of compound discharging structure 6 is constituted Region of discharge.In this obvious structure, the end face for the ridge 2-1 transverse arms that discharge and corresponding convex ridge 3-2 two transverse arm sides When face is set to vertical plane, the discharge channel of SLAB preionization is perpendicular towards main discharge area 8, and is set to incline During the inclined-plane of oblique certain angle, direction also correspondingly tilts certain angle, direction of the preionized discharge passage to main discharge area It can be arranged as required in 0 ° of -90 ° of scope.

It is provided with the corresponding discharge electrode main body of groove location between every convex ridge 3-2 the first transverse arm and the second transverse arm With inductance connecting hole, each sparking electrode two ends connect a matching inductance respectively, and the other end of inductance is connected to nearby to be put In electric ridge 2-1 ridge (can clamping, welding, nut crimping etc.), set every SLAB discharge channel have it is identical LC (inductance capacitance) parallel resonance electric parameter, multiple inductor combinations constitute SLAB electric discharge matching inductive banks 10, make The SLAB preionized discharges structure of linear array type is overall to be externally presented impedance Z₀, natural mode shape f₀Two Static Electro ginsengs Amount.

Optical resonator 11 as shown in Figure 1, two hysteroscopes are separately positioned on the compound discharging structures 6 of SLAB-TEA and grown Two ends in direction are spent, positive and negative branch unstable cavity, Huo Zheping, recessed unstable cavity is may be configured as.

Gas disturbance device 12 as shown in Figure 1, is provided in the strip that SLAB-TEA is combined the lower section of discharging structure 6 Type gas disturb impeller, using vacuum insulation type magnetic couple electric drive, during rotation forced draft from be spaced 2-12 and Gap 2-13 blows the charged particle that SLAB electric discharge preionization area 7 is produced with a certain special angle in the range of 0 ° -90 ° TEA main discharges area 8 is delivered to, and the resistance through upper discharge face 1-1 behind the region of TEA main discharges area 8 is passed through with beeline Touch block is hit, and a portion is along upper discharge face 1-1 formation two-dimensional flows, from two sides (including two ends) of compound discharging structure Outflow, then conducting through air-flow via-hole array 1-3 acts on and flows Top electrode 1 from whole in One-Dimensional flows mode another part The top outflow of compound discharging structure, constitutes complete gas working dielectric cooling duct 9, realizes Three-dimensional Flow form Gas cooling (displacement), is conducive to blowing charged particle to the central area in main discharge area 8.

The present invention proposes that its course of work of SLAB-TEA lasers is：SLAB-TEA is combined discharging structure 6 and entered first The SLAB electric discharge preionization of the lasting degree of ionization controllable precise of row, by the control of preionization degree in proper states, makes SLAB Electric discharge preionization area 7 produces substantial amounts of charged particle；Flow perturbation device produces air-flow, by being spaced 2-12, gap The charged particle that 2-13 produces preionization concentrates the central area for blowing to main discharge area 8, and air-flow wears pre- electricity with beeline Three-dimensional Flow is formed from the stop through upper discharge face 1-1 behind area 8, the live gas medium of mixing charged particle diffuses diffusion It is that imminent TEA main discharges create enough initiating electron density " hot " full of whole main discharge area；TEA After main discharge occurs, the gas medium for participating in electric discharge is final complete in Three-dimensional Flow mode from gas working dielectric cooling duct 9 Into cooling (displacement), the compound discharging structure of outflow.The laser that the present invention is provided ensures under large volume high pressure conditions The reliability uniformity of main discharge, realizes the main discharge ionization of high laser gain.

In the Paschen principle of gas discharge, equal air pressure spacing accumulates pd breakdown potential in the electric discharge of parallel strip electrode gas Pressure value Vs is identical, and when both spacing d values reduction holding pd products equal with the multiple that air pressure p increases are constant, same punctures The gas of the ionizable high pressures of voltage Vs.The electric discharge spacing of SLAB preionization in the present embodiment takes d₀=it is 0.5mm, The air pressure for being then higher by 4 times than 2mm spacing realizes the electric discharge of stable and uniform.

It can be seen from the physical process of hyperbar uniform glow discharge, as long as there is the initiating electron density of abundance, pressed crossing A uniform snowslide can form the plasma of Uniform Discharge under electricity, and this snowslide time is about 0.1 μ s, is far below To the development time of erratic process.Therefore, as long as sufficiently high initiating electron density can be provided, TEA lasers are just The gas discharge of high laser gain can be realized under the conditions of wide spacing large volume is anticyclonic.

Embodiment 1

The schematic diagram of the TEA main discharge bottom electrodes of SLAB-TEA lasers as described in Figure 9, " F " type electric discharge extremely mirror As being symmetrical arranged, its convex ridge comprising the first transverse arm and the second transverse arm tilts certain angle." dry " font electrode contains two The convex ridge 3-2 of transverse arm is mutation sinking type ridge perpendicular to the ground, and SLAB discharge blocks should be set with " F " type TEA electrode pairs The one side put is reversed dip convex ridge corresponding with the convex ridge inclined plane of " F " font electrode, should with " dry " font electrode pair The one side of setting is plane perpendicular to the ground, and no convex ridge sets, is provided with " dry " font the second transverse arm of sparking electrode auxiliary Mounting hole 2-10 cylindrical support platform 2-9 is helped to fix circular support piece, it is ensured that " dry " font TEA main discharges electricity Pole and the electric discharge spacing of SLAB discharge blocks.

As shown in figure 11, the horizontal end view drawing of SLAB discharge blocks is "convex" shaped, or one side is inclined plane or bilateral to incline Inclined-plane, its top is trapezoidal groove；

Or the horizontal end face of SLAB discharge blocks is the unilateral "convex" shaped for carrying two equal transverse arms, and itself or single side face are to incline Inclined-plane or its two sided are inclined plane, and its top is trapezoidal groove.

Embodiment 2

A kind of pulse exports SLAB-TEA lasers, and length L1 takes 360mm, and thickness is h1=15mm TEA In main discharge Top electrode 1,3 exhaust stream via-hole array 1-3, a diameter of φ 1=5mm of air-flow through hole, hole center are set Spacing is d1=8mm, spacing d2=40mm between row and row, and width is by the 3 exhaust stream via-hole array W1=165mm upper discharge face is divided into 4 sub- discharge faces, and 4 are provided with the upper supporting table terrace that gradual change is sunk Auxiliary mounting hole 1-4, the water-cooled road 1-5 of 4 connection outer loop cooling waters is set corresponding to 4 discharge faces.

Length is that L2=360mm sets " F " and " dry " type electric discharge ridge, and every electric discharge ridge sets one and connects outside follow The water-cooled road 2-4 of ring cooling water is right for W5=20mm lower supporting table terrace 2-6 settings four in lower electric discharge ridge width Distribution 2-3 is hinged with, lower supporting table terrace 2-6 gradual changes are sunk, the upper top surface width W3=50mm of " dry " type electric discharge ridge, The transverse arm length n1=15mm of " F " type electric discharge ridge, thickness is h3=15mm, the width of two retraction along its length H5=15mm, the first transverse arm is that the ground plane 2-7 of SLAB electric discharge preionization width is W4=5mm, the first transverse arm Unilateral length be h4=2mm, the height d5 of the concave station terrace in the middle of the first transverse arm and the second transverse arm is 2mm, recessed The lower section of step surface sets a diameter of φ 2=8mm circular support platform 2-9；Thus the lower discharge face set, adjacent two Spacing 2-13 distance values between interval 2-12 distance values d3=35mm between ridge, adjacent two transverse arm are d4=5mm, With the equal diameters of air-flow through hole.

SLAB sparking electrodes 3 be provided with 3 block length L3=360mm, width w6=30mm SLAB discharge blocks, One abutting joint via hole 3-4 of every piece of setting, provided with 2 electric power connection interfaces, the wide W7=4mm of convex ridge for the ridge that discharges, Its top is provided with trapezoidal groove 3-6 along its length, and the wide W8=1.5mm of trapezoidal waist, the SLAB of the lateral surface of convex ridge two is put The width for meeting excitation power supply face 3-7 of electric preionization is W9=4mm, the position of the circular support piece of the SLAB discharge blocks Put identical with the position for the chi chung circular support piece that discharges.

In SLAB-TEA composite construction, the thickness h 10=0.5mm of the SLAB preionized discharges spacing support chip, The electric discharge spacing of SLAB preionization is d0=0.5mm, and main discharge space D 0 is set to 10mm.

It follows that main discharge region volume is 5.94 liters in the present embodiment, voltage V=32Kv, voltage are set P=75kpa, obtains peak power 3Mw pulsed laser output, pulse recurrence frequency 1kHz.

Embodiment 3

A kind of continuous output SLAB-TEA lasers, length L1 takes 360mm, and thickness is h1=15mm TEA In main discharge Top electrode 1,3 exhaust stream via-hole array 1-3, a diameter of φ 1=5mm of air-flow through hole, hole center are set Spacing is d1=8mm, spacing d2=40mm between row and row, and width is by the 3 exhaust stream via-hole array W1=165mm upper discharge face is divided into 4 sub- discharge faces, and 4 are provided with the upper supporting table terrace that gradual change is sunk Auxiliary mounting hole 1-4, the water-cooled road 1-5 of 4 connection outer loop cooling waters is set corresponding to 4 discharge faces.

Length is that L2=360mm sets " F " and " dry " type electric discharge ridge, and every electric discharge ridge sets one and connects outside follow The water-cooled road 2-4 of ring cooling water is right for W5=20mm lower supporting table terrace 2-6 settings four in lower electric discharge ridge width Distribution 2-3 is hinged with, lower supporting table terrace 2-6 gradual changes are sunk, the upper top surface width W3=50mm of " dry " type electric discharge ridge, The transverse arm length n1=15mm of " F " type electric discharge ridge, thickness is h3=15mm, the width of two retraction along its length H5=15mm, close to the side of lower discharge face along its length provided with SLAB electric discharge preionization of the width for W4=5mm Ground plane 2-7, sinking certain depth h4=2mm below the ground plane, form concave station terrace, the height of concave station terrace Degree d5 is 2mm, and a diameter of φ 2=8mm circular support platform 2-9 is set in the lower section of concave station terrace；Thus set Lower discharge face, the interval 2-12 distance values d3=35mm between adjacent two ridge, the spacing 2-13 between adjacent two transverse arm Distance values are d4=5mm, the equal diameters with air-flow through hole.

In SLAB-TEA composite construction, the thickness h 10=0.5mm of the SLAB preionized discharges spacing support chip, The electric discharge spacing of SLAB preionization is d0=0.5mm, and main discharge space D 0 is set to 2mm.

It follows that main discharge region volume is 5.94 liters in the present embodiment, swashed using 30kw, 81.36MHz radio frequency Encourage, when atmospheric pressure p=40kpa is set, obtain mean power 3kw continuous laser output.

Embodiment 4

As shown in Figure 10, the compound discharging structures 6 of two SLAB-TEA are connected in the present embodiment, between series connection Away from 2mm is set to, forms three-stage and be combined discharging structure, total laser gain length 108mm, the long 156mm of optical resonator, When v=35kv, p=100kpa are set, reliable TEA main discharges can be realized.

Finally it should be noted that：Above example is only to the technical scheme that illustrates the application rather than to its protection domain Limitation, although the application is described in detail with reference to above-described embodiment, those of ordinary skill in the art should Understand：Those skilled in the art, which to read, still the embodiment of application can be carried out after the application a variety of changes, repaiies Change or equivalent, but these changes, modification or equivalent, applying for pending claims Within.

Claims

The preionization transversely-excited atmosphere-pressure laser 1. a kind of lath discharges, it is characterised in that the laser includes： Vertical section two ends are provided with optical resonator in vacuum chamber, and the vertical section once set from top to bottom is boss, specular The TEA main discharges upper/lower electrode (1) of setting and (2), and gas disturbance device (12)；Under the TEA main discharges Electrode (2) include be located at the TEA main discharges bottom electrode (2) longitudinal direction, vertically be located at transition connecting plate (2-5) The end TEA main discharge electrodes of homonymy, stage casing TEA main discharge electrodes and positioned at the end and stage casing TEA main discharges The stage casing SLAB sparking electrodes (3) between electrode or between two stage casing TEA main discharge electrodes；The stage casing TEA master is put SLAB preionized discharge spacing support chips (5) are provided between electrode and the end TEA main discharge electrodes；The TEA TEA main discharge spacing support bars (4) are provided between main discharge upper/lower electrode (1) and (2) two ends.
2. laser according to claim 1, it is characterised in that the TEA main discharges Top electrode (1) includes Discharge face (1-1) on supporting surface and TEA main discharges；Discharge face is included by vertically vertically through institute on the TEA main discharges State the electron discharge face that the air-flow via-hole array (1-3) of discharge face (1-1) is separated into.
3. laser according to claim 1, it is characterised in that the end TEA main discharge electrodes cross section Set for specular and correspond high equal " F " font of equal and vertical direction by two two transverse arm length respectively； The stage casing TEA main discharge electrodes cross section is as broad as long two transverse arm, and its vertical face is discharged as SLAB from top to bottom The second transverse arm under first transverse arm of the ground plane (2-7) of preionization is provided with the boss (2-9) of auxiliary positioning hole (2-10)； The cross section of the SLAB sparking electrodes (3) is " king " font, longitudinal section vertical direction is shorter, transverse direction is longer " T " Font；" F ", " king " and " dry " font set cross-section between each two-arm of second transverse arm of number respectively from top to bottom Face is that rectangle vertical section is circular support chip (5).
4. laser according to claim 3, it is characterised in that " F " shape and " dry " font two The height of person is equal, and both two transverse arms are respectively arranged in same level, wide equal and its respective end is same On one vertical curve；The first transverse arms and " F " of number from top to bottom of " king " font, " dry " font it is same The lower surface of first transverse arm in direction is in same level, and the height of the transverse arm is less than " F's " and " dry " The height of first transverse arm, its 3rd transverse arm bottom surface connection preionization excitation power supply.
5. laser according to claim 4, it is characterised in that " king " the font SLAB discharge blocks Top is longitudinally provided with trapezoidal groove；In in the 3rd transverse arm of the order from top to bottom of the discharge block of the SLAB " king " font Side, with being provided with the cooling water channel (3-3) parallel with the groove at diameter parallel；The SLAB discharge blocks vertical section is Anyhow " T " font dimerous, the downside of the transverse part point is provided with is divided into axisymmetrical setting with the vertical part There is the circular support platform (3-9) in auxiliary positioning hole (3-10)；The perpendicular segment axis is provided with abutting joint via hole (3-4)；The bottom of the vertical portion is provided with two electric power connection interfaces (3-5) with the diameter parallel.
6. laser according to claim 4, it is characterised in that " F " and " dry " font the TEA electric discharges The second transverse arm inner side longitudinal direction is provided with cooling water channel (2-4) from top to bottom for pole；Electric discharge below the vertical boss of face from top to bottom Butt Assembling hole (2-3) is respectively equipped with ridge axis；Bottom is connected with transition connecting plate (2-5).
7. laser according to claim 4, it is characterised in that " F " and " dry " font TEA discharge ridge by First transverse arm cross section of top to bottm is trapezoidal；The first transverse arm and of its " king " font SLAB discharge block from top to bottom Two transverse arm cross sections are trapezoidal.
8. laser according to claim 4, it is characterised in that it is vertical that the SLAB sparking electrodes, which indulge end face, It is inclined setting or be not provided with setting reeded plane at the top of the horizontal end face of boss (3-9).
9. laser according to claim 1, it is characterised in that the TEA main discharges spacing support bar (4) Centre is thick cylinder, and two ends are screwed thin cylinder.
10. laser according to claim 1, it is characterised in that discharged by TEA main discharge electrodes and SLAB The gap (2-13) between interval (2-12), adjacent two transverse arm between the adjacent two electric discharges ridge that electrode is constituted, SLAB electric discharges The ground plane (2-7) of preionization, TEA main discharges area (8), air-flow via-hole array (1-3) are formed through whole multiple from bottom to top The gas medium cooling duct (9) of discharging structure is closed, and is situated between because the stop of TEA main discharges Top electrode (1) forms gas The Three-dimensional Flow of matter.