CN1129992C - Needle bar electrode pulse preionization transverse flow carbon dioxide laser discharge cavity - Google Patents
Needle bar electrode pulse preionization transverse flow carbon dioxide laser discharge cavity Download PDFInfo
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- CN1129992C CN1129992C CN 00125893 CN00125893A CN1129992C CN 1129992 C CN1129992 C CN 1129992C CN 00125893 CN00125893 CN 00125893 CN 00125893 A CN00125893 A CN 00125893A CN 1129992 C CN1129992 C CN 1129992C
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- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 title abstract description 6
- 239000001569 carbon dioxide Substances 0.000 title abstract description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 title abstract description 3
- 239000007788 liquid Substances 0.000 claims abstract description 46
- 239000000126 substance Substances 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 claims description 10
- 239000000243 solution Substances 0.000 claims description 10
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 claims description 9
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims description 7
- 239000012212 insulator Substances 0.000 claims description 5
- 239000000565 sealant Substances 0.000 claims description 5
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 238000009413 insulation Methods 0.000 claims description 4
- 229910000027 potassium carbonate Inorganic materials 0.000 claims description 4
- 238000011144 upstream manufacturing Methods 0.000 claims description 4
- 239000008151 electrolyte solution Substances 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 238000003780 insertion Methods 0.000 claims description 2
- 229910000029 sodium carbonate Inorganic materials 0.000 claims description 2
- 238000002347 injection Methods 0.000 abstract 1
- 239000007924 injection Substances 0.000 abstract 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
- 239000010949 copper Substances 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 6
- 229910001369 Brass Inorganic materials 0.000 description 3
- 239000010951 brass Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 235000011181 potassium carbonates Nutrition 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000012774 insulation material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- -1 as shown in Figure 3 Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- HXGWMCJZLNWEBC-UHFFFAOYSA-K lithium citrate tetrahydrate Chemical compound [Li+].[Li+].[Li+].O.O.O.O.[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O HXGWMCJZLNWEBC-UHFFFAOYSA-K 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 229940072033 potash Drugs 0.000 description 1
- 235000015320 potassium carbonate Nutrition 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Abstract
The needle bar electrode pulse preionization transverse flow carbon dioxide laser discharge cavity has anode comprising row of mutually insulated anode bars embedded in insulating board. The pre-ionization electrode is composed of pulse pre-ionization needles which are arranged in a row corresponding to the anode strips one by one. The cathode is composed of cathode needles which are arranged in one or more rows corresponding to the anode strips and the pulse preionization needles one by one. The needles of the cathode needle and the pulse preionization needle point to the anode strip. The tail part is inserted into a liquid groove filled with flowing liquid. The tail ends of the two needles are connected with the two binding posts by a liquid resistor. The laser has the characteristics of large injection power and high output laser power.
Description
Technical field
The present invention is a kind of needle-strip electrode pulse pre-ionization crossflow CO 2 (CO
2) laser discharge cavity, be used for improving crossing current CO
2The ratio of performance to price of laser.
Background technology
High power transverse flow CO
2Laser obtains extensive use in industries such as iron and steel, oil, automobile makings.Its major advantage is its continuously output and repetition pulse power output height, average power generally kilowatt-myriawatt between, also can obtain more high power and export.From first crossing current CO
2Laser is born so far over more than thirty year, scientist is devoted to the improvement of discharge electrode structure always, constantly seeking to obtain in the unit activation volume more electrical power injects, under the situation of electrical efficiency basically identical (usually between 10%~20%), thereby obtain higher laser power output.Crossing current CO
2The market price of laser is often proportional with its power.Because the cost of electrode structure is compared with the price of whole laser, only account for less ratio, but the improved success of electrode structure obtains the increase of laser output power at double sometimes, or seals the raising of running life continuously, makes the ratio of performance to price of this device obtain to increase substantially.
Formerly in the technology 1, Shanghai Optics and Precision Mechanics institute, Chinese Academy of Sciences provides a kind of pulse preionizing tube-strip electron in patent ZL89106601.2.Mainly form by water-cooled copper negative electrode, strip-like copper anode, DC power supply, steady resistance, preionization pin, the pulse power, capacitance and DC filtering inductance etc.It can guarantee under laser is high at operating air pressure and gas flow rate the is big condition, obtain stable uniform glow discharge, though the power output of laser and working life are than the improve that had in its front, but owing to the restriction that is subjected on the discharge electrode structure, the power output that is difficult to accomplish to improve significantly again laser.Formerly in the technology 2, patent ZL99252127.0 provides a kind of carbon dioxide laser of macro-energy wide pulse width, though the power output of laser is greatly improved, wanting to improve injecting power and laser output power is the comparison difficulty again.
Summary of the invention
The objective of the invention is to overcome the deficiency of technology formerly, further increase crossing current CO
2The electrical power of laser is injected, thereby obtains higher laser power output, and a kind of novel needle-strip electrode pulse pre-ionization crossflow CO is provided
2Laser discharge cavity.
The discharge cavity of needle-strip electrode pulse pre-ionization crossflow CO 2 laser of the present invention, as shown in Figure 1.Be included in discharge cavity 16 and be built-in with mobile gas laser working substance 1601, the optical resonator 11 that constitutes by resonant cavity chamber mirror 1101, the course of discharge μ in the discharge cavity 16 and the vertical mutually x that is orthogonal of three directions of optical axis O of gas laser working substance 1601 flow direction υ and optical resonator 11, y, the z direction.In the discharge cavity 16, place gas laser material 1601 that anode strap 801 on the insulation board 802 that being embedded in of the mutually insulated that forms a line be made of high-temperature insulation material is arranged.Place the impulse preionization pin 7 that forms a line of gas laser working substance 1601 flow direction υ upstreams one by one accordingly with anode strap 801.
Impulse preionization electrode terminal 3 links with the current-limiting resistance 9 that is connected on the anode strap 801 by coupling capacitance 4, preionization power supply 5, capacitance 6, constitutes the impulse preionization loop.Cathode terminal 1 links with the current-limiting resistance 9 that is connected on the anode strap 801 by DC power supply 12 and filter inductance 10, constitutes main discharge circuit.
Negative electrodes in the discharge cavity of the present invention 16 are to be lined up row and constituted by the cathode needle 13 of needle-like.Concrete formation be have cathode needle 13 corresponding one by one with anode strap 801 with impulse preionization pin 7 and with the impulse preionization pin 7 parallel row of lining up that form a line.The syringe needle of cathode needle 13 and impulse preionization pin 7 points on the anode strap 801 middle shaft position along its length.In the liquid bath 201 on the afterbody insertion insulator 2 of cathode needle 13 and impulse preionization pin 7.Said cathode terminal 1 is to place liquid bath 201 bottoms of inserting cathode needle 13.Said impulse preionization electrode terminal 3 is to place liquid bath 201 bottoms of inserting pulse pre-ionization pin 7.Liquid bath 201 on the insulator 2 has inlet 202 and liquid outlet 203, and liquid bath is equipped with mobile carbonate liquid 1501 for 201 li.As shown in Figure 3.201 mouthfuls of liquid baths, sealant 14 is arranged around cathode needle 13 and the impulse preionization pin 7.Sealant 14 prevents that on the one hand liquid from flowing out, and two pins are fixed.In the carbonate liquid 1501 of 201 li of liquid baths, constitute liquid resistance 1502 connections by carbonate liquid 1501 between cathode needle 13 and the cathode terminal 1 and between impulse preionization pin 7 and the impulse preionization electrode terminal 3.As shown in Figure 1 and Figure 2.
201 li liquid that are equipped with 1501 of said liquid bath are solution of potassium carbonate, or the sodium carbonate electrolyte solution, or other weak acid solutions, or weak caustic solution.
Said columns n 〉=1 of lining up the cathode needle 13 of row.
Needle-strip electrode pulse pre-ionization crossflow CO 2 laser discharge cavity electrode structure of the present invention such as above-mentioned shown in Figure 1.Gas flow direction, anode and cathode course of discharge and three quadratures of optical resonator direction of beam propagation in gas discharge chamber.Said cathode terminal 1 is made of electric conductors such as copper, aluminium.Said insulator 2 is made of heatproof insulating material; Said impulse preionization electrode terminal 3 is made of electric conductors such as copper, aluminium, and said impulse preionization power supply 5 has coupling capacitance 4 and capacitance 6.Said impulse preionization pin 7 is by the red copper of Φ 1~2mm, or brass or tungsten pin formation, impulse preionization pin 7 is in the upstream of gas glow discharge, said anode strap 801 is by brass, or the red copper bar constitutes, and the length of every anode strap 801 is 40~60mm, its width is between 10~20mm, interval between each anode strap 801 is between 3~6mm, and anode strap 801 is embedded on the insulation board 802, forms a line to form same plane.The resistance value of the current-limiting resistance 9 that said anode strap 801 connects is generally got between 1k Ω~10k Ω.DC power supply 12 has the high frequency choke coil as filter inductance 10.The optical resonator 11 direction O as shown in Figure 1 that constitutes by resonant cavity chamber mirror 1101.Gas laser working substance 1601 flow directions are shown in arrow υ among Fig. 1 in the discharge cavity 16, and perpendicular to the direction of course of discharge μ and beam propagation optical axis O, gas laser working substance 1601 is a mist, and flow velocity is generally between 20~70 meter per seconds.But cathode needle 13 is by the stainless steel red copper of Φ 2~4mm, or electrode material such as brass is made.Impulse preionization pin 7, cathode needle 13 form one-to-one relationship with anode strap 8, and the columns n of cathode needle 13 can be made of row or multiple row, and the distance between row and the row is between 5~15mm.Multiple row needle-discharging injecting electric power is better than single-row pin in general, but the complexity of structure strengthens.Impulse preionization pin 7 and cathode needle 13 constitute one deck sealant 14 by sealing ring or fluid sealant its afterbody are fixed in the liquid bath 201.When liquid 1501 was solution of potassium carbonate, the resistance value of its liquid resistance 1502 was decided by the concentration of solution of potassium carbonate and the distance between cathode needle 13 and the cathode terminal 1.Said liquid resistance 1502 is to be made of flowing liquid, as shown in Figure 3, liquid bath 201 has inlet 202 and liquid outlet 203, and just the liquid 1501 of 201 li of liquid baths flows, so liquid resistance 1502 plays the double action of current-limiting resistance and cooling electrode.
The syringe needle of impulse preionization pin 7 and cathode needle 13 points to anode strap 801, and is equidistant between impulse preionization pin 7 and cathode needle 13 both needle tip and the anode strap 801, and the two usually between 20mm~80mm, depends on the CO that flows over apart from d
2Laser mixture pressure P (generally is CO
2, N
2, mists such as He, CO), the Pd value is a relative value generally speaking, is generally Pd<3000mmmmHg (≈ 400mmkpa).Impulse preionization pin 7 and cathode needle 13 tail ends are immersed in the liquid, if liquid is potash (K
2CO
3) during solution, the concentration of solution 1501 adds 0.05g → 0.5g in every liter of running water approximately, concentration value has determined the equivalent current-limiting resistance value of each preionization pulse pin 7 and each cathode needle 13, K
2CO
3Solution makes it be in flow regime by circulating cooling system, and paired pulses preionization pin 7 and cathode needle 13 play cooling effect simultaneously.Between impulse preionization pin 7 and cathode needle 13 and electrode terminal 3 and 1 apart from scalable, be equivalent to and regulate current-limiting resistance value size.
Discharge loop such as above-mentioned and shown in Figure 1, each anode strap 801 is connected with current-limiting resistance 9, and resistance value is about 1~10k Ω.The impulse preionization loop provides the repetition pulse of repetition rate 3~10kHz by coupling capacitance 4 and capacitance 6, pulse duration is between 100~500 nanoseconds, peak impulse voltage is between 3~6kV, impulse preionization gas laser working substance 1601 flow direction υ upstreams in region of discharge provide the gas laser working substance 1601 of the required preionized discharge in main discharge district, flow to the downstream, for main discharge provides initial electronics and ion.Main discharge circuit is by DC power supply 12, provide anode strap 801 positive high voltages (in thousands of volt magnitudes) by filter inductance 10 and current-limiting resistance 9, provide cathode needle 13 negative voltages by cathode terminal 1 and liquid resistance 1502 simultaneously, then produce main discharge between cathode needle 13 and the anode strap 801, form the main discharge district of uniform glow discharge.
Advantage of the present invention: pipe-strip electrode structure that patent ZL89106601.2 and ZL99252127.0 are adopted in the present invention and the technology is formerly compared, and adopts the electrical power of discharge cavity region of discharge that structure is injected of the present invention obviously to increase, and increases nearly 1.5 times.Thereby the output laser power has also improved 1.5 times.
Description of drawings:
Fig. 1 is needle-strip electrode pulse pre-ionization crossflow CO of the present invention
2The schematic diagram of laterally analysing and observe of laser discharge cavity structure.
Fig. 2 is Fig. 1 negative electrode and impulse preionization pin 7 cross-sectional schematic in the A-A direction.
Fig. 3 is Fig. 1 negative electrode and impulse preionization pin 7 in the cross-sectional schematic of B-B direction during when the columns n of cathode needle 13=3.
Fig. 4 is the part schematic perspective view of impulse preionization pin 7 of the present invention and three row cathode needles, 13 arrangement architectures.
Embodiment:
Structure as shown in Figure 1 is at the five kilowatts of crossing currents CO of Shanghai Optics and Precision Mechanics institute, Chinese Academy of Sciences
2Implement on the laser.The CO of present embodiment
2Laser adopts twin shaft flow fan (8000 rev/mins of rotating speeds), two discharge channels, ∏ type folding chamber.Region of discharge as shown in Figure 1 divides inside and outside both sides.Anode strap 801 length are 50mm, and the width of anode strap 801 is 15mm, and the space is 5mm between 801 of anode straps and the bar, and anode strap 801 is embedded in high-temperature insulation material and constitutes among the insulation board 802, is arranged in conplane row.Each region of discharge has 57 anode straps 801, and the length of effectively discharging is 1140mm.With each anode strap 801 be one to one: impulse preionization pin 7 is made for Φ 1mm red copper pin, the columns n of cathode needle 13=3, as shown in Figure 3, Figure 4, every cathode needle 13 is a Φ 3mm stainless pin, the length that impulse preionization pin 7 and cathode needle 13 enter region of discharge is 10mm, being spaced apart 10mm between every row pin, is K as the liquid 1501 of liquid resistance 1502
2CO
3Solution, its concentration are 0.15 grams per liter water, and impulse preionization pin 7 as shown in Figure 1 and cathode needle 13 syringe needles just in time point on the anode strap 801 middle shaft position along its length.
The flow velocity of gas laser working substance 1601 is under the 60 meter per second situations in region of discharge, and cathode needle 13 syringe needles are 50mm to anode strap 801 planes apart from d, and the operating air pressure of large volume uniform glow discharge is up to 105mmHg (14kPa).When preferable operating air pressure (80mmHg), the electrical power of injecting region of discharge is up to 86kW, and the laser Output optical power is up to 9.5kW, exceeds 1.5 times than pipe-strip electrode preionized discharge structure in the technology formerly.
Claims (3)
1. needle-strip electrode pulse pre-ionization crossflow CO 2 laser discharge cavity comprises:
<1〉is built-in with mobile gas laser working substance (1601) at discharge cavity (16), optical resonator (11) by resonant cavity chamber mirror (1101) formation, the interior electric discharge between electrodes direction of discharge cavity (16) (μ) and gas laser working substance (1601) flow direction (υ) and the vertical mutually x that is orthogonal of optical resonator (11) optical axis (O) three directions, y, the z direction;
<2〉in the discharge cavity (16), place gas laser working substance (1601) that the anode strap (801) on the insulation board (802) of being embedded in of the mutually insulated that forms a line is arranged, place the impulse preionization pin (7) that forms a line of gas laser working substance (1601) flow direction upstream one by one accordingly with anode strap (801);
<3〉impulse preionization electrode terminal (3) is by coupling capacitance (4), preionization power supply (5), capacitance (6) links and constitutes the impulse preionization loop with being connected current-limiting resistance (9) on the anode strap (801), and cathode terminal (1) is by DC power supply (12) and filter inductance (10) and be connected current-limiting resistance (9) on the anode strap (801) the formation main discharge circuit that links; It is characterized in that:
<4〉have corresponding one by one with impulse preionization pin (7) and the parallel cathode needle (13) of lining up row with the pulse pre-ionization pin (7) that forms a line with anode strap (801);
<5〉syringe needle of cathode needle (13) and impulse preionization pin (7) points to anode strap (801) along its length on the position of axis, in the liquid bath (201) on the afterbody insertion insulator (2) of cathode needle (13) and impulse preionization pin (7);
<6〉said impulse preionization electrode terminal (3) is to place liquid bath (201) bottom of inserting impulse preionization pin (7), and said cathode terminal (1) is to place liquid bath (201) bottom of inserting cathode needle (13);
<7〉liquid bath (201) on the insulator (2) has inlet (202) and liquid outlet (203), mobile carbonate liquid (1501) is equipped with in liquid bath (201) lining, around liquid bath (201) mouthful cathode needle (13) and impulse preionization pin (7) sealant (14) is arranged;
<8〉in the carbonate liquid (1501) of liquid bath (201) lining, constitute liquid resistance (1502) connection by carbonate liquid (1501) between cathode needle (13) and the cathode terminal (1) and between impulse preionization pin (7) and the impulse preionization electrode terminal (3).
2. needle-strip electrode pulse pre-ionization crossflow CO 2 laser discharge cavity according to claim 1 is characterized in that the carbonate liquid (1501) of said liquid bath (201) lining is solution of potassium carbonate, or the sodium carbonate electrolyte solution.
3. needle-strip electrode pulse pre-ionization crossflow CO 2 laser discharge cavity according to claim 1 is characterized in that said columns n 〉=1 of lining up the cathode needle (13) of row.
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CN 00125893 CN1129992C (en) | 2000-10-31 | 2000-10-31 | Needle bar electrode pulse preionization transverse flow carbon dioxide laser discharge cavity |
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CN 00125893 CN1129992C (en) | 2000-10-31 | 2000-10-31 | Needle bar electrode pulse preionization transverse flow carbon dioxide laser discharge cavity |
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CN1129992C true CN1129992C (en) | 2003-12-03 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102130411B (en) * | 2010-01-20 | 2012-11-14 | 杭州中科新松光电有限公司 | Modularized CO2 laser discharge box |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102025094B (en) * | 2009-09-23 | 2012-06-06 | 中国科学院电子学研究所 | Transverse discharge device for pulsed gas laser |
CN103915747A (en) * | 2014-03-26 | 2014-07-09 | 中国科学院长春光学精密机械与物理研究所 | Large-energy pulse discharging device |
CN106953225B (en) * | 2016-01-06 | 2019-10-08 | 北京礴德恒激光科技有限公司 | A kind of lath electric discharge preionization transversely-excited atmosphere-pressure laser |
CN108933377B (en) * | 2018-07-19 | 2020-01-10 | 中国科学院长春光学精密机械与物理研究所 | Pulse CO2Laser discharge cavity |
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2000
- 2000-10-31 CN CN 00125893 patent/CN1129992C/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102130411B (en) * | 2010-01-20 | 2012-11-14 | 杭州中科新松光电有限公司 | Modularized CO2 laser discharge box |
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