CN1090094A - Impulse preionization laser discharging device - Google Patents
Impulse preionization laser discharging device Download PDFInfo
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- CN1090094A CN1090094A CN 93112355 CN93112355A CN1090094A CN 1090094 A CN1090094 A CN 1090094A CN 93112355 CN93112355 CN 93112355 CN 93112355 A CN93112355 A CN 93112355A CN 1090094 A CN1090094 A CN 1090094A
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- anode
- apportion
- discharging device
- multitube
- impulse preionization
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Abstract
The present invention is a kind of impulse preionization laser discharging device.Mainly be applicable to gas laser.Constituted by electrode system that contains apportion anode and multitube negative electrode and the discharge circuit that contains impulse preionization loop and direct current main discharge circuit.Have simple in structurely relatively, both can save injecting power, can obtain the advantage of the even discharge of large volume simultaneously again.
Description
The present invention is a kind of impulse preionization laser discharging device, is applicable to gas laser.
Prior art, patent EP0446072A2, JP62-24943 and JP63-110780 possess one group of main discharge electrode and one group or several groups of pre-arcing electrode systems.Produce ultraviolet light with pre-arcing electrode and sparkover preionizationization carry out in the main discharge district.This complex structure that will possess main discharge electrode and two electrode systems of pre-arcing electrode, and ultraviolet light photo is a little less than the electron density that produces.The Russian has delivered two kinds of designs in CLEO ' 90 meetings.A kind of design is one group of pin-plate electrode system, passes through this simultaneously to pin-plate electrode with repetitive frequency pulsed high pressure and direct voltage.Respectively as impulse preionization and main discharge.The shortcoming of this scheme is pin-plate electrode complex structure, debug difficulties.His another kind of design is that pre-ionization electrode is tabular, and main discharge electrode is pin and tubulose, and high voltage pulse passes through different electrodes with direct voltage, acts on region of discharge.Two dielectric plates that are positioned at the pre-ionization electrode place are kept apart pulsed electrode and DC electrode, make pulsed electrode not influence direct-current discharge.Pulse voltage realizes impulse preionization by the dielectric plate coupling in region of discharge.The shortcoming of this electric discharge device is that the requirement dielectric plate is high temperature resistant, and arc resistant is ablated, so its manufacturing process is difficult, is difficult to obtain.
Purpose of the present invention is the shortcoming that overcomes above-mentioned several electric discharge devices, with simple relatively electrode structure, requires low circuit to realize the impulse preionization discharge to component pressure, thereby obtains the even laser discharge device of large volume.
Laser discharge device of the present invention is made of one group of electrode system and corresponding discharge circuit.
Electrode system contains apportion anode 7 and multitube negative electrode 2.The positive plate that apportion anode 7 is made up of the copper bar of polylith parallelization constitutes perpendicular to airflow direction, leaves the gap between the adjacent copper bar, and this gap is generally 5～10mm.The metal tube that is called cathode tube that multitube negative electrode 2 is about φ 6～φ 12 by many external diameters is arranged in parallel and constitutes.When operating air pressure＜50 torrs, the number N of cathode tube＞2.When operating air pressure＞50 torrs, N＞3.Because it is bigger to be positioned at the cathode tube current density at multitube cathode arrangement two ends, and arc discharge takes place easily, so the distance of the cathode tube at multitube cathode arrangement two ends and anode is bigger than distance between the anode and cathode of center, to reduce its discharging current.Owing to the influence of air-flow, near the discharge current density the airflow downstream is greater than the current density of upstream in addition, and the distance that increases near cathode tube in downstream and apportion anode can reduce current density, thereby reduces this harmful effect of air-flow.For near the current density that reduces to be positioned at the cathode tube current density at multitube cathode arrangement two ends and reduce the airflow downstream can also use inductance network 9 to realize.Capacitor C
PAnd the numerical value of the equivalent inductance in the contact A point of inductance network 9 and the multitube negative electrode 2 between every cathode tube is chosen as 0～100 μ H.Wherein the equivalent inductance value that preferably links to each other with cathode tube that is positioned at multitube cathode arrangement two ends and airflow downstream cathode tube is big, and it is zero that mid portion can directly be got inductance value.When adopting the method for adjusting inductance, inductance is not zero entirely.Also can and transfer two kinds of methods of inductance to use simultaneously with the regulate yin-yang die opening.Also have training wall 3, anodized insulation substrate 4, electric insulation layer 5 and water-cooled metal pipe 6 in the electrode system, as shown in Figure 1.
Discharge circuit comprises impulse preionization loop and direct-current discharge loop.The impulse preionization loop, an end that is the pulse power 1 is by capacitance C
PBe connected to multitube negative electrode 2 with inductance network 9, the other end is by coupling capacitance C
KDirectly be connected to apportion anode 7.Perhaps pass through by water-cooled metal pipe 6, apportion anode 7 and electric insulation layer 5 and coupling capacitance C
KBe connected on the apportion anode after the equivalent capacity that constitutes.Award the high voltage pulse of repetition rate when the pulse power 1 after, produce abundant voltage between the anode and cathode.End by DC power supply 8 passes through steady resistance R
K, filter inductance L
KBe connected on the apportion anode 7, the other end of DC power supply 8 is by choke induction L
DBe connected on the multitube negative electrode 2 with inductance network 9, then formed the direct current main discharge circuit.
Advantage of the present invention is, electrode structure is simpler than the structure described in the prior art, thus because of the dielectric plate technological requirement that does not need monoblock low.The present invention has not only obtained large volume, non-self-maintained discharge uniformly but also reduced the electrical power that consumes (when only consuming former self-maintained discharge on steady resistance 1/14th of consumed power) on steady resistance, can also select the suitable dc voltage value between the male-female, and the size of regulating the direct current injecting power with the size of regulating impulse injecting power.
Description of drawings: Fig. 1 is the impulse preionization laser discharging device schematic diagram.1 is airflow direction among the figure, and v is an air velocity, R
KBe steady resistance, C
KBe coupling capacitance, L
KBe filter inductance, C
PBe capacitance, L
DBe choke induction, L
1～L
4, L
P1～L
P5Constitute inductance network 9.
Embodiment: as shown in Figure 1 structure and circuit are used to the CO that flows over
2In the laser.Apportion anode 7 is by 73 block length H=60mm among Fig. 1, and wide is the copper bar of 15mm, and the gap is that 5mm forms a line abreast, and the copper pipe that multitube negative electrode 2 is φ 6 by 5 external diameters is arranged along airflow direction, distance h between the anode and cathode
1, h
2, h
3, h
4, h
5Ultimate range difference △ h
Max＜H/5.In order to adjust the CURRENT DISTRIBUTION of region of discharge, we have also used inductance network 9 to reduce the inhomogeneities of current density simultaneously.Choose L
1, L
2, L
P3Be zero, L
P1, L
P2, L
P4, L
P5Be ∞, i.e. open circuit.Peak impulse voltage 7KV～20KV, pulse duration＜0.2 μ s.Electric discharge device of the present invention is at crossing current CO
2Obtained the large volume discharge in the laser evenly, the result that photoelectric conversion efficiency is higher than self-maintained discharge.
Claims (6)
1, a kind of impulse preionization laser discharging device contains electrode system and discharge circuit, it is characterized in that electrode system contains apportion anode (7) and multitube negative electrode (2), and its corresponding discharge circuit comprises impulse preionization loop and direct current main discharge circuit.
2,, it is characterized in that the impulse preionization loop is that an end of the pulse power (1) is by capacitance C according to the described a kind of impulse preionization laser discharging device of claim 1
PAnd inductance network (9) is connected to multitube negative electrode (2), and the other end of the pulse power (1) is by coupling capacitance C
KDirectly be connected to apportion anode (7); Perhaps the other end of the pulse power (1) is by coupling capacitance C
KWith by water-cooled metal pipe (6), be connected to again on the apportion anode (7) after the equivalent capacity that apportion anode (7) and electric insulation layer (5) are constituted.
3,, it is characterized in that apportion anode (7) is to be made of perpendicular to airflow direction forms a line abreast the polylith copper bar, leaves the gap between the adjacent copper bar according to the described a kind of impulse preionization laser discharging device of claim 1.
4,, it is characterized in that multitube negative electrode (2) is to be arranged in parallel and to constitute along airflow direction by many metal tubes according to the described a kind of impulse preionization laser discharging device of claim 1.
5, according to the described a kind of impulse preionization laser discharging device of claim 1, it is characterized in that anode-cathode distance between apportion anode (7) and the multitube negative electrode (2) in the spacing on the center less than the spacing on the end positions.
6,, it is characterized in that the direct current main discharge circuit is by steady resistance R by an end of DC power supply (8) according to the described a kind of impulse preionization laser discharging device of claim 1
K, filter inductance L
KBe connected on the apportion anode (7), the other end of DC power supply (8) is by choke induction L
DAnd inductance network (9) is connected on the multitube negative electrode (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 93112355 CN1031024C (en) | 1993-03-04 | 1993-03-04 | Impulse preionization laser discharging device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 93112355 CN1031024C (en) | 1993-03-04 | 1993-03-04 | Impulse preionization laser discharging device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1090094A true CN1090094A (en) | 1994-07-27 |
| CN1031024C CN1031024C (en) | 1996-02-14 |
Family
ID=4989973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 93112355 Expired - Fee Related CN1031024C (en) | 1993-03-04 | 1993-03-04 | Impulse preionization laser discharging device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1031024C (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1063873C (en) * | 1995-07-12 | 2001-03-28 | 中国科学院上海光学精密机械研究所 | Two-pulse pre-ionization discharger for lateral flow gas laser |
| CN1324771C (en) * | 2004-12-23 | 2007-07-04 | 中国科学院电子学研究所 | Pump arrangement in long pulse for transverse energized carbon-dioxide laser |
| CN103915747A (en) * | 2014-03-26 | 2014-07-09 | 中国科学院长春光学精密机械与物理研究所 | Large-energy pulse discharging device |
| CN106953225A (en) * | 2016-01-06 | 2017-07-14 | 北京礡德恒激光科技有限公司 | A kind of lath electric discharge preionization transversely-excited atmosphere-pressure laser |
-
1993
- 1993-03-04 CN CN 93112355 patent/CN1031024C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1063873C (en) * | 1995-07-12 | 2001-03-28 | 中国科学院上海光学精密机械研究所 | Two-pulse pre-ionization discharger for lateral flow gas laser |
| CN1324771C (en) * | 2004-12-23 | 2007-07-04 | 中国科学院电子学研究所 | Pump arrangement in long pulse for transverse energized carbon-dioxide laser |
| CN103915747A (en) * | 2014-03-26 | 2014-07-09 | 中国科学院长春光学精密机械与物理研究所 | Large-energy pulse discharging device |
| CN106953225A (en) * | 2016-01-06 | 2017-07-14 | 北京礡德恒激光科技有限公司 | A kind of lath electric discharge preionization transversely-excited atmosphere-pressure laser |
| CN106953225B (en) * | 2016-01-06 | 2019-10-08 | 北京礴德恒激光科技有限公司 | A kind of lath electric discharge preionization transversely-excited atmosphere-pressure laser |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1031024C (en) | 1996-02-14 |
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