CN217741972U - Plasma generator electrode and plasma generator system - Google Patents
Plasma generator electrode and plasma generator system Download PDFInfo
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- CN217741972U CN217741972U CN202221435605.XU CN202221435605U CN217741972U CN 217741972 U CN217741972 U CN 217741972U CN 202221435605 U CN202221435605 U CN 202221435605U CN 217741972 U CN217741972 U CN 217741972U
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- 239000011521 glass Substances 0.000 claims abstract description 95
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 claims description 3
- 229920005372 Plexiglas® Polymers 0.000 claims description 3
- 210000002381 plasma Anatomy 0.000 description 89
- 239000007789 gas Substances 0.000 description 30
- 239000000463 material Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000007599 discharging Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000009832 plasma treatment Methods 0.000 description 3
- 230000003014 reinforcing effect Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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Abstract
A plasma generator electrode and a plasma generator system, the plasma generator electrode comprises a first glass tube, a plurality of second glass tubes, and an end electrode, a second electrode, a third electrode and a fourth electrode which are sequentially arranged at intervals; the end part electrode, the second electrode and the third electrode are positioned in the first glass tube, the side surfaces of the end part electrode, the second electrode and the third electrode are respectively attached to the first glass tube, and the fourth electrode is positioned outside the first glass tube; the central axis of the second glass tube is parallel to the central axis of the first glass tube, and the second glass tube penetrates through the second electrode and the third electrode; a needle-shaped first electrode is arranged in the second glass tube, and one end of each of the first electrodes is inserted into the end electrode in an extending manner and is electrically connected with the end electrode; an air inlet valve is arranged on the pipe wall of the first glass pipe between the end part electrode and the second electrode. The utility model discloses can effectively reduce atmospheric pressure plasma fluidic device's cost and volume, enlarge its application scenario and application.
Description
Technical Field
The utility model relates to a plasma generator electrode and plasma generator system especially relate to a plasma jet array generator electrode and include plasma jet array generator electrode's plasma generator system, belong to plasma equipment manufacturing technical field.
Background
In daily life and industrial production, the properties of many materials cannot meet the use requirements of people, so that the surface treatment of the materials is needed to change some properties of the materials. Plasma surface modification technology is one of the research hotspots. Electrons, ions and neutral particles with certain energy distribution exist in the plasma, and the sum of positive charges and negative charges of free electrons and ions is completely counteracted, so that the neutral charge is presented macroscopically. The low-temperature plasma processing technology has the advantages of easy operation, high processing speed, good processing effect, less environmental pollution, lower cost and the like, so the plasma surface processing technology is more and more concerned by people.
The atmospheric pressure plasma jet can generate non-equilibrium discharge plasma under the atmospheric pressure condition, and has important scientific research significance and wide practical application prospect in the fields of material surface treatment, biomedical engineering, sewage treatment, environmental protection and the like. However, the conventional atmospheric pressure plasma jet device generally adopts a single-pole discharge structure, and has the problems of small plasma processing area and the like, and the plasma jet array can solve the problem of small processing area to some extent.
Patent document CN112888133A proposes a structure-adjustable needle-ring electrode structure and a plasma jet device of a ring-ring electrode structure. Linhawaian et al used a needle-ring electrode type plasma jet device in the "plasma jet rapid modification promoted surface charge decay" consisting of a solid copper rod and a three-way quartz glass tube. Jae Young Kim in "Intense Plasma Emission From Atmospheric-pressure laser Jet Array by Jet-to-Jet Coupling" describes a three-dimensional cylindrical Plasma Jet Array using a ring-plate electrode structure, the device uses 7 small diameter quartz glass tubes (1 mm in inside diameter and 2mm in outside diameter) surrounding a middle large diameter quartz glass tube (2 mm in inside diameter and 3mm in outside diameter), and the central tube port plane protrudes 1mm From the peripheral glass tube port plane, and winds copper strips at a position 10mm From the end of the glass tube as a charged electrode, and separates Indium Tin Oxide (ITO) glass From the end of the quartz tube by 25 mm as a ground electrode, the device can make Coupling between jets in the Array to generate high-intensity Plasma Jet. The electrode of the current plasma jet array mainly relates to a needle-ring electrode structure, a ring-plate electrode structure and other single types, is difficult to meet the requirements of various discharge forms and various discharge applications, and is not suitable for flexible application in various fields, so that a multifunctional plasma jet array generator electrode needs to be designed.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that it is not enough to prior art to provide a plasma generator electrode and plasma generator system, through providing the plasma generator electrode including a plurality of not isostructure electrodes, its cost and volume that can effectively reduce atmospheric pressure plasma fluidic device have realized discharging in open gas environment and have produced low temperature plasma efflux, enlarged atmospheric pressure plasma fluidic array's application scenario and application, reduced plasma treatment cost and have the reinforcing effect of discharging.
The utility model discloses the technical problem that solve is realized through following technical scheme:
the utility model provides a plasma generator electrode, which comprises a first glass tube, a plurality of second glass tubes, and a tip electrode, a second electrode, a third electrode and a fourth electrode which are arranged at intervals in sequence; the end part electrode, the second electrode and the third electrode are positioned in the first glass tube, the side surfaces of the end part electrode, the second electrode and the third electrode are respectively attached to the first glass tube, and the fourth electrode is positioned outside the first glass tube; the central axis of the second glass tube is parallel to the central axis of the first glass tube, and the second glass tube penetrates through the second electrode and the third electrode; a needle-shaped first electrode is arranged in the second glass tube, and one end of each of the first electrodes is inserted into the end electrode in an extending manner and is electrically connected with the end electrode; and an air inlet valve is arranged on the pipe wall of the first glass pipe between the end part electrode and the second electrode.
Preferably, the plurality of second glass tubes are arranged in a straight line, a ring shape or a rectangular shape.
In order to facilitate a user to observe the discharge condition, the first glass tube is an organic glass tube, and in order to prevent the discharge from breaking down, the second glass tube is a quartz glass tube.
In order to facilitate changing the position of the first electrode, one end of the first electrode is detachably inserted into the tip electrode.
In order to avoid the gas from being excited into plasma before entering the second glass tube, the plasma generator electrode further comprises an insulating layer, the insulating layer is attached to the lower surface of the second electrode, and the second glass tube penetrates through the insulating layer.
Preferably, the tip electrode, the first electrode, the second electrode, the third electrode and the fourth electrode are copper electrodes.
In order to ensure personal safety, one of the end electrode, the first electrode, the second electrode, the third electrode and the fourth electrode is a grounding electrode.
In order to be electrically connected with a power supply, the plasma generator electrode further includes a plurality of connection terminals configured to electrically connect the tip electrode, the second electrode, the third electrode, and the fourth electrode with the power supply, respectively. Preferably, the connection terminal is a screw.
The utility model also provides a plasma generator system, plasma generator system includes plasma generator electrode, flowmeter, air supply and at least one power, the plasma generator electrode be as above plasma generator electrode.
To sum up, the utility model provides a plasma generator electrode including a plurality of not isostructure electrodes, its cost and the volume that can effectively reduce atmospheric pressure plasma fluidic device have realized discharging in open gas environment and have produced low temperature plasma efflux, have enlarged the application scenario and the application of atmospheric pressure plasma efflux array, have reduced plasma treatment cost and have the reinforcing effect of discharging.
The technical solution of the present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
Drawings
FIG. 1 is a schematic structural diagram of a plasma generator electrode according to the present invention;
fig. 2 is a block diagram of a plasma generator system according to the present invention.
Detailed Description
FIG. 1 is a schematic structural diagram of a plasma generator electrode according to the present invention; fig. 2 is a block diagram of a plasma generator system according to the present invention. As shown in fig. 1 and 2, the present invention provides a plasma generator electrode (plasma jet array generator electrode) 100, which includes a first glass tube 150 and an end electrode 160, a second electrode 120, a third electrode 130 and a fourth electrode 140 that are sequentially disposed at intervals. Wherein, for the safety of the user and ensuring that the user does not get an electric shock, the end electrode 160, the second electrode 120 and the third electrode 130 are positioned in the first glass tube 150; to facilitate handling of the material placed thereon, the fourth electrode 140 is located outside the first glass tube 150, and the fourth electrode 140 is preferably a flat plate electrode.
It should be noted that, the user can adjust the relative position of the fourth electrode 140 and the first glass tube 150 according to the object to be processed and the actual situation of the jet discharge, so as to optimize the effect of the object to be processed.
Illustratively, the end electrode 160, the second electrode 120, and the third electrode 130 are all cylindrical, and the side surfaces thereof are attached to the first glass tube 150. The end electrode 160 seals one end of the first glass tube 150.
The plasma generator electrode 100 further includes a plurality of second glass tubes 170, the central axes of the second glass tubes 170 are parallel to the central axis of the first glass tube 150, and the second glass tubes 170 penetrate the second electrode 120 and the third electrode 130. In other words, the second electrode 120 and the third electrode 130 are correspondingly provided with through holes, and the second glass tube 170 passes through the through holes.
The present invention does not limit the arrangement of the second glass tubes 170, and the skilled in the art can select and design the glass tubes according to the actual requirement. For example, the plurality of second glass tubes 170 may be arranged in a line, a ring, a rectangle, or the like. That is, the plurality of second glass tubes 170 are arranged in a straight line, a ring shape, a rectangle shape, etc. in cross section as viewed along the central axis direction of the second glass tube 170.
It should be noted that the present invention is not limited to the materials of the second glass tube 170 and the first glass tube 150, and those skilled in the art can select and replace them as needed. Preferably, the first glass tube 150 is a plexiglass tube because the plexiglass tube has a transparent characteristic, which is convenient for a user to observe the discharge condition; the second glass tube 170 is a quartz glass tube because the quartz glass tube has high temperature resistance and is not easily broken down by discharge. In addition, a ceramic tube or the like may be used instead of the second glass tube 170.
The second glass tube 170 has a needle-shaped first electrode 110 disposed therein, and one end of the plurality of first electrodes 110 is inserted into the end electrode 160 and electrically connected to the end electrode 160. Preferably, the first electrode 110 is located at the central axis of the second glass tube 170. For convenience of use, one end of the first electrode 110 is detachably inserted into the tip electrode 160. For example, the end electrode 160 is opened with a plurality of connection holes (not shown), the diameter of the connection holes is slightly smaller than the diameter of the first electrode 110, and the connection holes are connected with the first electrode 110 in an interference manner.
The material of the end electrode 160, the first electrode 110, the second electrode 120, the third electrode 130 and the fourth electrode 140 includes, but is not limited to, copper.
An air inlet valve 180 is disposed on the wall of the first glass tube 150 between the end electrode 160 and the second electrode 120. The gas for generating a plasma jet enters the first glass tube 150 through the gas inlet valve 180.
The second glass tube 170 is open at both ends, that is, the second glass tube 170 communicates the space of the first glass tube 150 between the end electrode 160 and the second electrode 120 with the external space, and the gas in the discharge gas source 400 flows to the outside through the second glass tube 170 after entering the space of the second glass tube 170 between the end electrode 160 and the second electrode 120.
For electrical connection with the power supply 200, the plasma generator electrode further includes four connection terminals configured to electrically connect the tip electrode 150, the second electrode 120, the third electrode 130, and the fourth electrode 140, respectively, with the power supply 200.
Specifically, the connection terminals include a first connection terminal 111, a second connection terminal 121, a third connection terminal 131, and a fourth connection terminal 141. The first electrode 110 is electrically connected to the first connection terminal 111, the second electrode 120 is electrically connected to the second connection terminal 121, the third electrode 130 is electrically connected to the third connection terminal 131, and the fourth electrode 140 is electrically connected to the fourth connection terminal 141.
Illustratively, the first connection terminal 111 is located at a position where the end electrode 160 is attached to the first glass tube 150, the first connection terminal 111 penetrates through the first glass tube 150, and one end is electrically connected to the end electrode 160 so as to be electrically connected to the first electrode 110, and the other end protrudes out of the outer surface of the first glass tube 150; the second connection terminal 121 is located at a position where the second electrode 120 is attached to the first glass tube 150, the second connection terminal 121 penetrates through the first glass tube 150, and one end of the second connection terminal is electrically connected to the second electrode 120, and the other end of the second connection terminal protrudes out of the outer surface of the first glass tube 150; the third connection terminal 131 is located at a position where the third electrode 130 is attached to the first glass tube 150, the third connection terminal 131 penetrates through the first glass tube 150, and one end of the third connection terminal is electrically connected to the third electrode 130, and the other end of the third connection terminal protrudes out of the outer surface of the first glass tube 150. The fourth connection terminal 141 is disposed on the fourth electrode 140.
The connection terminal may be a screw or the like used in the related art.
The user may electrically connect the connection terminal to the power supply 200 through, for example, a wire 201 or the like.
It should be noted that the present invention is not limited to the connection mode between the power source 200 and the plasma generator electrode 100, and those skilled in the art can select other schemes in the prior art to realize the electrical connection between the power source 200 and the plasma generator electrode 100 according to the needs.
The present invention also provides a plasma generator system, as shown in fig. 2, which may include a plasma generator electrode 100, a power supply 200, a flow meter 300, and a gas source 400.
The power supply 200 is used to provide electrical energy for generating a plasma jet, which may take the form of direct current, alternating current, pulses, and the like. For example, the power supply 200 may supply a discharge high voltage of 1kV or more, and the discharge high voltage may be several kV to several tens kV as needed for discharge.
A user may connect two or more of the plasma generator electrodes 100 to the power supply 200 as desired. It should be noted that, in order to ensure personal safety, any one of the first electrode 110, the second electrode 120, the third electrode 130 and the fourth electrode 140 may be configured as a ground electrode.
The gas source 400 is used to provide a gas for generating a plasma jet, which is preferably an inert gas or nitrogen, etc. The reason for selecting the inert gas or the nitrogen is that the electric field intensity required for the ionization of the inert gas or the nitrogen is low; the air outside the second glass tube 170 does not discharge because it does not reach the discharge breakdown voltage. By controlling the type of gas, the discharge between the different electrodes can be selectively controlled.
The flow meter 300 is used to measure the flow rate of the gas provided by the gas source 400.
The air inlet valve 180 may be in communication with an air supply 400 via a flow meter 300. The user may control the air intake valve 180 based on the air flow measured by the flow meter 300 to achieve the desired air flow.
The operation of the present invention will be described with reference to specific examples.
In the case where the number of power supplies is one, for example, when a user selects to generate plasma using the first electrode 110 and the second electrode 120, one end of the power supply 200 is connected to the first connection terminal 111 by a wire, and the other end thereof is connected to the second connection terminal 121 by a wire. The gas source 400 supplies gas to the plasma generator system. The gas flows to the outside through the second glass tube 170 after entering the space of the second glass tube 170 between the end electrode 160 and the second electrode 120.
At this time, the gas located in the second glass tube 170 is excited into plasma due to a voltage difference between the first electrode 110 and the second electrode 120, and is delivered to the vicinity of the fourth electrode 140.
When the user selects to generate plasma using the first electrode 110 and the third electrode 130, one end of the power supply 200 may be connected to the first connection terminal 111 through a wire, and the other end thereof may be connected to the third connection terminal 131 through a wire (at this time, the wire between the second connection terminal 121 and the power supply 200 is removed).
At this time, the gas located in the second glass tube 170 is excited into plasma due to a voltage difference between the first electrode 110 and the third electrode 130, and is delivered to the vicinity of the fourth electrode 140.
When the user selects to generate plasma using the first electrode 110 and the fourth electrode 140, one end of the power supply 200 may be connected to the first connection terminal 111 through a wire, and the other end thereof may be connected to the fourth connection terminal 141 through a wire.
At this time, the gas located in the second glass tube 170 and the gas delivered to the vicinity of the fourth electrode 140 are excited into plasma due to a voltage difference between the first electrode 110 and the fourth electrode 140.
When the user selects to generate plasma using the second electrode 120 and the fourth electrode 140, one end of the power supply 200 may be connected to the second connection terminal 121 through a wire, and the other end thereof may be connected to the fourth connection terminal 141 through a wire.
At this time, the gas located in the second glass tube 170 and the gas delivered to the vicinity of the fourth electrode 140 are excited into plasma due to a voltage difference between the second electrode 120 and the fourth electrode 140.
When the user selects to generate plasma using the third electrode 130 and the fourth electrode 140, one end of the power supply 200 may be connected to the third connection terminal 131 through a wire, and the other end thereof may be connected to the fourth connection terminal 141 through a wire.
At this time, the gas located in the second glass tube 170 and the gas delivered to the vicinity of the fourth electrode 140 are excited into plasma due to a voltage difference between the third electrode 130 and the fourth electrode 140.
When the user selects to generate plasma using the third electrode 130 and the second electrode 120, one end of the power supply 200 may be connected to the third connection terminal 131 through a wire, and the other end thereof may be connected to the second connection terminal 121 through a wire.
At this time, the gas located in the second glass tube 170 is excited into plasma due to a voltage difference between the third electrode 130 and the second electrode 120, and is delivered to the vicinity of the fourth electrode 140.
Therefore, the user can use different electrode combinations to generate plasma by changing the connection mode of the lead, and compared with the prior art, the combined discharge can be realized.
In addition, since the first electrode 110 is detachably connected to the end electrode 160, a user can adjust the arrangement of the first electrode 110 as required, for example, a plurality of first electrodes 110 are arranged in a straight line, a ring or a rectangle, or even only one first electrode 110 is used, so as to change the type of the plasma jet, so as to realize the forms of a single jet, a one-dimensional jet array, a two-dimensional jet array, and the like.
It should be added that, in order to avoid the gas being excited into plasma before entering the second glass tube 170, the plasma generator electrode 100 further includes an insulating layer 190, the insulating layer 190 is attached to the lower surface of the second electrode 120, at this time, the second glass tube 170 penetrates through the insulating layer 190, and the shape of the insulating layer 190 corresponds to the shape of the second electrode 120.
Although the number of power supplies is described as one example, the present invention is not limited to the number of power supplies. For example, the plasma generator electrode 100 may also be connected to two or more power sources simultaneously.
Illustratively, when the plasma generator electrode 100 is simultaneously connected with two power sources, one end of one ac power source may be connected to the third connection terminal 131 through a wire, and the other end thereof may be connected to the fourth connection terminal 141 through a wire; while one end of one pulse power source is connected to the second connection terminal 121 through a wire and the other end thereof is connected to the first connection terminal 111 through a wire. At this time, the gas located in the second glass tube 170 and the gas delivered to the vicinity of the fourth electrode 140 are excited into plasma by the high voltage applied by the ac power source, and the gas located in the second glass tube 170 is excited into plasma by the high voltage applied by the pulse power source. When the two plasmas are superposed, the discharge effect is enhanced.
Note that when the plasma generator electrode 100 is used with a single power supply, it is preferable that the upper end of the first electrode 110 (the end opposite to the end where the tip electrode 160 is inserted) extends beyond the upper surface of the third electrode 130 (the surface close to the fourth electrode 140) by a distance of 10mm; when the plasma generator electrode 100 is used with a plurality of (two or more) power sources, the upper end of the first electrode 110 preferably extends beyond the upper surface of the second electrode 120 (the surface close to the fourth electrode 140) by a distance of 5mm or less, and more preferably the upper end of the first electrode 110 does not exceed the upper surface of the second electrode 120. By controlling the length of the first electrode 110, the interaction between the plurality of power sources when generating the plasma jet can be reduced.
To sum up, the utility model discloses a provide the plasma generator electrode including a plurality of not isostructure electrodes, its cost and the volume that can effectively reduce atmospheric pressure plasma fluidic device have realized discharging in open gas environment and have produced the low temperature plasma efflux, have enlarged atmospheric pressure plasma efflux array's application scenario and application, have reduced plasma treatment cost and have the reinforcing effect of discharging.
Claims (10)
1. The plasma generator electrode is characterized by comprising a first glass tube, a plurality of second glass tubes, and an end electrode, a second electrode, a third electrode and a fourth electrode which are sequentially arranged at intervals; the end part electrode, the second electrode and the third electrode are positioned in the first glass tube, the side surfaces of the end part electrode, the second electrode and the third electrode are respectively attached to the first glass tube, and the fourth electrode is positioned outside the first glass tube; the central axis of the second glass tube is parallel to the central axis of the first glass tube, and the second glass tube penetrates through the second electrode and the third electrode; a needle-shaped first electrode is arranged in the second glass tube, and one end of each of the first electrodes is inserted into the end electrode in an extending manner and is electrically connected with the end electrode; and the first glass tube is positioned on the tube wall between the end part electrode and the second electrode and is provided with an air inlet valve.
2. The plasma generator electrode of claim 1, wherein the plurality of second glass tubes are arranged in a line, a ring, or a rectangle.
3. The plasma generator electrode of claim 1, wherein the first glass tube is a plexiglass tube and the second glass tube is a quartz glass tube.
4. The plasma generator electrode of claim 1, wherein one end of the first electrode is removably inserted into the tip electrode.
5. The plasma generator electrode according to claim 1, further comprising an insulating layer attached to a lower surface of the second electrode, wherein the second glass tube penetrates the insulating layer.
6. The plasma generator electrode of claim 1, wherein the tip electrode, the first electrode, the second electrode, the third electrode, and the fourth electrode are copper electrodes.
7. The plasma generator electrode of claim 6, wherein one of the end electrode, the first electrode, the second electrode, the third electrode, and the fourth electrode is a ground electrode.
8. The plasma generator electrode according to claim 1, further comprising a plurality of connection terminals configured to electrically connect the tip electrode, the second electrode, the third electrode, and the fourth electrode, respectively, with a power supply.
9. The plasma generator electrode according to claim 8, wherein the connection terminal is a screw.
10. A plasma generator system, characterized in that it comprises a plasma generator electrode, a flow meter, a gas source and at least one power supply, the plasma generator electrode being a plasma generator electrode according to any of claims 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221435605.XU CN217741972U (en) | 2022-06-09 | 2022-06-09 | Plasma generator electrode and plasma generator system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221435605.XU CN217741972U (en) | 2022-06-09 | 2022-06-09 | Plasma generator electrode and plasma generator system |
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| Publication Number | Publication Date |
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| CN217741972U true CN217741972U (en) | 2022-11-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202221435605.XU Expired - Fee Related CN217741972U (en) | 2022-06-09 | 2022-06-09 | Plasma generator electrode and plasma generator system |
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| Country | Link |
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2022
- 2022-06-09 CN CN202221435605.XU patent/CN217741972U/en not_active Expired - Fee Related
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