CN106947945A - One kind resistance steaming device steams platform with many steric hindrances of Shockproof type - Google Patents
One kind resistance steaming device steams platform with many steric hindrances of Shockproof type Download PDFInfo
- Publication number
- CN106947945A CN106947945A CN201710330718.0A CN201710330718A CN106947945A CN 106947945 A CN106947945 A CN 106947945A CN 201710330718 A CN201710330718 A CN 201710330718A CN 106947945 A CN106947945 A CN 106947945A
- Authority
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- China
- Prior art keywords
- electrode
- disk
- electrode disk
- steaming device
- evaporation boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010025 steaming Methods 0.000 title claims abstract description 29
- 238000001704 evaporation Methods 0.000 claims abstract description 45
- 230000008020 evaporation Effects 0.000 claims abstract description 44
- 230000002787 reinforcement Effects 0.000 claims description 19
- 229910000639 Spring steel Inorganic materials 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 238000009434 installation Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 210000002435 tendon Anatomy 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Thermotherapy And Cooling Therapy Devices (AREA)
Abstract
The invention discloses one kind resistance steaming device platform is steamed with many steric hindrances of Shockproof type, mainly by electrode disk (1), the evaporation boat (7) for being arranged in electrode disk (1) and being electrically connected with electrode disk (1), what is corresponded setting with evaporation boat (7) and electrically connected with evaporation boat (7) constitutes from electrode ear (3).The resistance steaming plate of the present invention is provided with multiple evaporation boats, the resistance steaming plate can place a variety of targets simultaneously, different targets can be heated by the position for changing resistance steaming plate, the present invention solves a formula resistance steaming plate well can not be while place a variety of targets, the problem of with that continuously can not be heated to different targets, so as to effectively reduce the workload of operator, the operating efficiency of resistance steaming device is improved well.
Description
Technical field
Platform is steamed with resistance the present invention relates to one kind resistance steaming device, a kind of many steric hindrances of resistance steaming device Shockproof type is specifically referred to and steams platform.
Background technology
Resistance evaporation film makes its surface component be evaporated with atomic group or ionic species generally by heating target, and
And the atomic group or ion of target is deposited in substrate surface, by film forming procedure, (scatterplot-island structure-fan walks structure-layer
Shape grows) form film.It is to hinder the component for being used to heat target in steaming device that platform is steamed in resistance, and the resistances used at present steam platform for one more
Platform is steamed in formula resistance, and platform is steamed in this resistance to be heated to a kind of target, when being heated to different targets, then needs to evaporation
Boat reapposes the target that need to be heated after being cleared up, and continuously different targets can not be heated, largely
Reduce the operating efficiency of resistance steaming device.
Therefore, a variety of targets can be placed simultaneously by improving one kind, the resistance that continuously can be heated again to different targets
It is the task of top priority to steam platform.
The content of the invention
Can not be while place a variety of targets it is an object of the invention to overcome existing resistance to steam platform, therefore can not be continuously right
The defect that different targets is heated steams platform there is provided many steric hindrances of one kind resistance steaming device Shockproof type.
The purpose of the present invention passes through following technical proposals reality：One kind resistance steaming device steams platforms with many steric hindrances of Shockproof type, mainly by
Electrode disk, the evaporation boat for being arranged in electrode disk and being electrically connected with electrode disk is corresponded with evaporation boat and set and and evaporation boat
What is electrically connected constitutes from electrode ear；It is described that the elastic parts being connected with electrode disk is additionally provided with from electrode ear；The electrode
Disk is provided with multiple evaporation boats.
The electrode disk is provided with reinforcement.
The elastic parts includes the felt pad being connected with from electrode ear, is arranged on the installing plate on felt pad, and
One end is connected with installing plate and one end is connected with installing plate, the other end is connected with reinforcement and electrode disk respectively
Elastic component.
The electrode disk is provided with the mounting groove coordinated one by one with evaporation boat, and one end of the evaporation boat passes through electrode briquetting
It is connected in electrode disk, its other end is from electrode briquetting by being connected to from electrode ear.
Electrode briquetting mounting hole, reinforcement mounting hole and elastic component mounting hole are respectively arranged with the electrode disk, it is described
Reinforcement mounting hole is provided with the through hole corresponding with the elastic component mounting hole in electrode disk.
The electrode disk is steel disk.
The elastic component is spring steel plate.
The present invention has advantages below and beneficial effect compared with prior art：
(1) electrode disk of the invention is provided with multiple evaporation boats, and therefore, the present invention can place a variety of targets simultaneously, and lead to
Crossing rotating electrode disk can heat to different targets, and the present invention solves a formula resistance steaming plate well can not be while place
A variety of targets, and the problem of continuously can not be heated to different targets, so as to improve the operating efficiency of resistance steaming device, have
The workload for reducing operator of effect.
(2) present invention is being provided with elastic parts between electrode ear and resistance steaming plate, and the elastic parts can make from electrode ear
Quickly reset, it is therefore prevented that evaporation boat occurs deforming or be broken after heated, so as to effectively raise the use longevity of evaporation boat
Life.
(3) present invention's has the low advantage of simple in construction, reasonable in design and production cost.
Brief description of the drawings
Fig. 1 is top view of the invention.
Fig. 2 is sectional view of the invention.
Fig. 3 is the structural representation of the electrode disk of the present invention.
In above-mentioned accompanying drawing, the corresponding component names of reference are as follows：
1-electrode disk, 2-felt pad, 3-from electrode ear, 4-installing plate, 5-from electrode briquetting, 6-electrode briquetting,
7-evaporation boat, 8-elastic component, 9-reinforcement, 101-mounting groove, 102-electrode briquetting mounting hole, 103-groove is installed,
104-elastic component mounting hole, 105-reinforcement mounting hole, 106-slotted eye.
Embodiment
The present invention is described in further detail with reference to embodiment, but embodiments of the present invention are not limited to
This.
Embodiment
As shown in Figures 1 to 3, platform is steamed with many steric hindrances of Shockproof type the invention discloses one kind resistance steaming device, mainly by electrode disk 1,
The evaporation boat 7 for being arranged in electrode disk 1 and being electrically connected with electrode disk 1, corresponds with evaporation boat 7 and sets and electric with evaporation boat 7
What is connected constitutes from electrode ear 3.Wherein, the electrode disk 1 is as shown in figure 1, the present invention is provided with six evaporation boats in electrode disk 1
7.Meanwhile, as shown in Figure 1, 2, elastic parts, the elastic parts such as Fig. 1 are provided between electrode ear 3 and electrode disk 1 described
Shown, it includes felt pad 2, installing plate 4, and elastic component 8.
During implementation, electrode disk 1 of the present invention preferentially employs the strong steel disk of high temperature resistant, electric conductivity to realize, this
Electrode disk 1 is provided in round by invention, as shown in Figures 1 to 3, and the installation coordinated one by one with evaporation boat 7 is provided with electrode disk 1
Groove 101, the quantity of the mounting groove 101 can be adjusted according to the quantity of evaporation boat 7.Multiple electrodes are also provided with electrode disk 1
Briquetting mounting hole 102, elastic component mounting hole 104 and reinforcement mounting hole 105.It is additionally provided with the electrode disk 1 for installing electricity
The installation groove 103 of pole input lever, the slotted eye 106 for being used for installing fixing screws, the groove are provided with the bottom of the installation groove 103
Hole 106 is used to install the screw that electrode input lever is fixed.Described evaporation boat 7 preferentially employs resistant to elevated temperatures tungsten boat,
The evaporation boat 7 is arranged in the mounting groove 101 of electrode disk 1, and one end of evaporation boat 7 is connected to electrode disk 1 by electrode briquetting 6
On, itself and the other end is then engaged by being connected to from electrode briquetting 5 with electrode disk 1 from electrode ear 3, electrode briquetting 6 leads to
The screw being engaged with the electrode briquetting mounting hole 102 in electrode disk 1 is crossed to be fixed in electrode disk 1, it is equally logical from electrode briquetting 5
Cross screw to be fixed on from electrode ear 3, be so easy to the installation or replacing of evaporation boat 7.
Long-term its hardness that works at high temperature of the electrode disk 1 is easily reduced, after preventing that the hardness of electrode disk 1 from reducing
Whole resistance is set to steam the problem of platform is deformed, the present invention is provided with a plurality of reinforcement 9 in the bottom of electrode disk 1, and the reinforcement 9 leads to
The screw being connected with the screw thread of reinforcement mounting hole 105 of electrode disk 1 is crossed to be fixed in electrode disk 1.The present invention of reinforcement 9
Six preferentially are set to, this six are linked together, and the quantity of reinforcement 9 can be adjusted as needed, are set on the reinforcement 9
Put be additionally provided with the center hole being used in combination with the mounting groove 103 of electrode disk 1, and the reinforcement 9 with electrode disk 1
The corresponding through hole of elastic component mounting hole 104.Outside electrode input lever is then arranged on electrode after the through hole on reinforcement 9
On the mounting groove 103 of disk 1, and outside electrode input lever is fixed on after the slotted eye 106 on mounting groove 103 by screw
In mounting groove 103.
It is described to be connected from electrode ear 3 with from the clamping element in electrode exterior introducing device, and introduce and fill from electrode exterior
The clamping element put can make the position from electrode ear 3 change when clamping from electrode ear 3, if from electrode when clamping element opens
Ear 3 can not reset in time, and deforming or being broken just easily occur in the evaporation boat 7 being connected with from electrode ear 3.The present invention is in order to prevent
Evaporation boat 7 is deformed or is broken, and elastic parts is being provided between electrode ear 3 and electrode disk 1.The elastic parts can be from electrode
When clamping element in outside introducing device opens, make quickly to reset from electrode ear 3, go out so as to be effectively prevented evaporation boat 7
Now deform or be broken.
As shown in Figure 1, 2, it includes felt pad 2, installing plate 4, and elastic component 8 to the elastic parts.Wherein, it is described
Felt pad 2 preferentially employs the felt pad that ceramic material is made, and the felt pad 2 is fixedly installed on from electrode ear 3 by screw
Bottom, installing plate 4 is then fixedly installed on felt pad 2 by screw.Present invention employs the peace that metal material is made for installing plate 4
Plate is filled, the installing plate 4 is then used to install elastic component 8, and elastic component 8 is arranged on installing plate 4 by screw, and the elastic component 8
One end by screw be arranged on installing plate 4 on, and the other end by after the through hole in strengthening tendons 9 with the elasticity in electrode disk 1
The screw that part mounting hole 104 is threadedly coupled is fixedly installed on reinforcement 9.Preferential employ of the present invention of elastic component 8 has
Stronger elastic spring steel plate is made, described to prolong electrode disk 1 from electrode ear 3 and the connection end of elastic component 8 is swung up and down.Should
Elastic component 8 can when being opened from the clamping element of electrode exterior introducing device, the elasticity having by elastic component 8 make with from electrode
The evaporation boat 7 that ear 3 is connected quickly resets, so as to prevent evaporation boat 7 to be deformed after heated, and effectively improves
The service life of evaporation boat 7.
During present invention specific implementation, outside input electrode stem is arranged on electrode disk 1 after the through hole on reinforcement 9
On mounting groove 103, different targets is individually positioned in six evaporation boats 7 on many steric hindrance steaming devices, and will be connected from electrode ear 3
It is connected on from the clamping element of electrode exterior introducing device, power-on, evaporation boat 7 obtains electric, and evaporation boat 7 starts to add target
Heat；When the evaporator stops operating, elastic parts then can quickly make to reset from electrode ear 3, i.e., elastic parts can quickly make
Evaporation boat 7 quickly resets, so as to be deformed after preventing evaporation boat 7 heated well.
When the target in the evaporation boat 7 that people need to steam many steric hindrances the other positions on platform is heated, only need to rotate
Electrode disk 1, makes the clamping being connected to from electrode ear 3 from electrode exterior introducing device corresponding with the evaporation boat 7 of required heating
On part, it just can realize and the target that need to be evaporated is evaporated, it is not necessary to reappose required target after closing resistance steaming device.So as to
The present invention is set to realize the advantage to different target laser heatings, existing formula resistance steaming plate is solved well can not be simultaneously
The problem of placing a variety of targets, and continuously can not be heated to different targets, effectively reduces the workload of operator,
The operating efficiency of resistance steaming device is improved well.
As described above, the present invention just can be realized well.
Claims (7)
1. one kind resistance steaming device steams platform with many steric hindrances of Shockproof type, mainly by electrode disk (1), it is arranged in electrode disk (1) and and electrode
The evaporation boat (7) of disk (1) electrical connection, corresponded with evaporation boat (7) set and electrically connect with evaporation boat (7) from electrode ear
(3) constitute；Characterized in that, described be additionally provided with the elastic parts being connected with electrode disk (1) from electrode ear (3)；It is described
Electrode disk (1) is provided with multiple evaporation boats (7).
2. a kind of resistance steaming device according to claim 1 steams platform with many steric hindrances of Shockproof type, it is characterised in that：The electrode disk
(1) it is provided with reinforcement (9).
3. a kind of resistance steaming device according to claim 2 steams platform with many steric hindrances of Shockproof type, it is characterised in that：The elastic parts
Including the felt pad (2) being connected with from electrode ear (3), the installing plate (4) on felt pad (2), and one end and peace are arranged on
Dress plate (4) is connected, the elastic component (8) that the other end is connected with reinforcement (9) and electrode disk (1) respectively.
4. a kind of resistance steaming device according to any one of claims 1 to 3 steams platform with many steric hindrances of Shockproof type, it is characterised in that：Institute
State electrode disk (1) and be provided with the mounting groove (101) coordinated one by one with evaporation boat (7), one end of the evaporation boat (7) passes through electrode
Briquetting (6) is connected in electrode disk (1), its other end from electrode briquetting (5) by being connected to from electrode ear (3).
5. a kind of resistance steaming device according to claim 4 steams platform with many steric hindrances of Shockproof type, it is characterised in that：The electrode disk
(1) electrode briquetting mounting hole (102), reinforcement mounting hole (105) and elastic component mounting hole (104) are respectively arranged with, it is described
Reinforcement (9) is provided with the through hole corresponding with the elastic component mounting hole (104) in electrode disk (1).
6. a kind of resistance steaming device according to claim 5 steams platform with many steric hindrances of Shockproof type, it is characterised in that：The electrode disk
(1) it is steel disk.
7. a kind of resistance steaming device according to claim 6 steams platform with many steric hindrances of Shockproof type, it is characterised in that：The elastic component
(8) it is spring steel plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710330718.0A CN106947945A (en) | 2017-05-11 | 2017-05-11 | One kind resistance steaming device steams platform with many steric hindrances of Shockproof type |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710330718.0A CN106947945A (en) | 2017-05-11 | 2017-05-11 | One kind resistance steaming device steams platform with many steric hindrances of Shockproof type |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106947945A true CN106947945A (en) | 2017-07-14 |
Family
ID=59479589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710330718.0A Pending CN106947945A (en) | 2017-05-11 | 2017-05-11 | One kind resistance steaming device steams platform with many steric hindrances of Shockproof type |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106947945A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107267923A (en) * | 2017-08-15 | 2017-10-20 | 佛山市南海区晶鼎泰机械设备有限公司 | A kind of primary and secondary crucible device that composition metal film layer is deposited |
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