KR20020016007A - electrode for boat fixture - Google Patents

electrode for boat fixture Download PDF

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Publication number
KR20020016007A
KR20020016007A KR1020000049079A KR20000049079A KR20020016007A KR 20020016007 A KR20020016007 A KR 20020016007A KR 1020000049079 A KR1020000049079 A KR 1020000049079A KR 20000049079 A KR20000049079 A KR 20000049079A KR 20020016007 A KR20020016007 A KR 20020016007A
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KR
South Korea
Prior art keywords
electrode
boat
fixing
fixture
grooves
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KR1020000049079A
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Korean (ko)
Inventor
정우철
김광일
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신현준
재단법인 포항산업과학연구원
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Priority to KR1020000049079A priority Critical patent/KR20020016007A/en
Publication of KR20020016007A publication Critical patent/KR20020016007A/en

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Furnace Details (AREA)

Abstract

PURPOSE: An electrode for fixing a boat is provided which prevents damage of the boat due to thermal expansion and contraction by elastically fixing the boat using elastic members equipped at a boat fixture of an electrode. CONSTITUTION: The electrode for fixing a boat comprises an electrode bar(100) at the upper end of which a plural grooves are formed; a fixture(111) which is fixed to the upper part of both ends of the electrode bar(100) with a gap adjusting bolt, and to the lower part of which a plurality of grooves are formed; elastic members(112) each of which are inserted into a plurality of grooves formed at the upper part of the electrode bar(100) and at the lower part of the fixture(111); electrode parts(113) which are elastically supported to the end part of the elastic members(112), contacted with both ends of the boat, and to which an electric current is supplied; and a cooling pipe(114) which is equipped at the surroundings of the electrode bar(100) and the fixture(111) so as to cool a heat generated at the electrode bar(100) and the fixture(111), and through which cooling water flows, wherein the electrode parts(113) are in a cylindrical roll shape so that the boat countervails a lengthwise displacement generated by thermal expansion or contraction, and the elastic members(112) is a coil spring.

Description

보트 고정용 전극{electrode for boat fixture}Electrode for boat fixture

본 발명은 보트 고정용 전극에 관한 것으로, 보다 상세하게는, Al(알루미늄) 등을 증착하기 위하여, 사용되는 BN이 코팅된 흑연 보트의 사용시 열팽창으로 인한 파손을 최소화하기 위하여 흑연 보트의 열팽창에 따른 길이의 변화를 상쇄할 수 있으며 지속적으로 전류를 공급할 수 있는 기능을 지니는 보트 고정용 전극에 관한 것이다.The present invention relates to a boat fixing electrode, and more particularly, to deposit Al (aluminum) and the like, in accordance with the thermal expansion of the graphite boat in order to minimize the damage caused by thermal expansion when using the BN-coated graphite boat The present invention relates to a boat fixing electrode capable of offsetting a change in length and having a function of continuously supplying current.

일반적인 증착기는, Al (알루미늄)증착용으로 사용되는 BN이 코팅된 흑연보트를 사용할 때, 이 흑연보트를 고정하기 위하여 금속재질의 전극 봉에 볼트 등으로 압착하여 고정한 후에, 수 A(암페어) 정도의 전류를 인가하여 발열시키고, 보트 안에 담겨진 Al(알루미늄) 등의 금속재료가 용융되어 증착되는 구조이다.In general, a vapor deposition machine uses a BN-coated graphite boat used for Al (aluminum) deposition, in order to fix the graphite boat by pressing a bolt or the like on a metal electrode rod and then fixing it by a few amperes (Amps). Heat is applied by applying a current, and a metal material such as Al (aluminum) contained in the boat is melted and deposited.

이러한 증착기에 사용되는 흑연 보트(boat)는 바닥이 약 2∼3mm 정도의 두께로 형성되고, 약 3∼4cm 정도의 길이를 가진다. 이와 같이, 흑연으로 된 구조물은 인가되는 전류에 의하여 발열하면서 열팽창에 의하여 길이가 증가된다.The graphite boat used in such a vapor deposition machine has a thickness of about 2 to 3 mm at the bottom and a length of about 3 to 4 cm. As such, the structure made of graphite is increased in length by thermal expansion while generating heat by an applied current.

이러한 증착기에서의 가열온도는 약 1300∼1600℃ 정도로, 이 열팽창에 의한 변위가 상당한 양이 된다. 이와 같이, 일반적으로 사용되는 텅스텐 재질의 보트는 열팽창에 의한 길이의 증가가 보트 재질이 휘어지는 것으로 상쇄되지만, 흑연으로 된 보트의 경우 재질의 특성상 연성이 부족하여 열팽창에 의하여 취약한 부분이 갈라져 버리는 단점이 있어, 보트의 수명에 직접적인 영향이 있다.The heating temperature in such a vapor deposition machine is about 1300-1600 degreeC, and the displacement by this thermal expansion becomes a considerable quantity. As described above, although the tungsten boat is generally used, the increase in the length due to thermal expansion is offset by the bending of the boat material. However, in the case of the graphite boat, the weakness due to the thermal expansion is broken due to the lack of ductility. There is a direct impact on the life of the boat.

따라서, 기존의 텅스텐 재질로 된 보트의 수명을 보완하기 위하여, TiB2.BN 및 BN 이 코팅된 흑연재질의 보트가 많이 사용된다. 이와 같이, 재질을 변경하면, 보트의 수명을 증가할 수 있지만 사용되는 전극봉에 장착되어 열팽창 및 수축이 반복하는 동안 스트레스에 의해 쉽게 파손되는 문제점이 있었다.Therefore, in order to supplement the life of the boat made of a conventional tungsten material, a boat made of graphite coated with TiB 2 .BN and BN is frequently used. As such, if the material is changed, the life of the boat may be increased, but there is a problem in that the electrode is used to be easily damaged by stress during repeated thermal expansion and contraction.

이와 같은 보트를 고정하기 위한 종래의 전극의 구조가 도 1에 도시되어 있다.The structure of a conventional electrode for fixing such a boat is shown in FIG.

도시된 바와 같이, 전극봉(10)의 양측 상단에는 고정용 홈(10a)이 형성되고, 이 고정용 홈(10a)의 상단에는 나사 결합되어 승강됨으로 보트(20)를 고정하기 위한 고정용 볼트(11)가 마련된다. 그리고, 상기 전극봉(10)의 고정용 홈(10a)에는 보트(20)의 양단이 끼워지고, 고정용 홈(10a)에 끼워진 보트(20)의 양단 상부에는 고정용 스페이서(12)가 마련된다.As shown, fixing grooves 10a are formed at both upper ends of the electrode rod 10, and fixing bolts for fixing the boat 20 by being screwed up and lowered at the upper ends of the fixing grooves 10a ( 11) is provided. In addition, both ends of the boat 20 are fitted into the fixing groove 10a of the electrode rod 10, and fixing spacers 12 are provided at both upper ends of the boat 20 fitted into the fixing groove 10a. .

즉, 보트(20)는 양단이 고정용 홈(10a)에 끼워지고, 양단의 상부에 고정용 스페이서(12)가 올려진 상태에서 전극봉(10)의 양단에 나사 체결되는 고정용 볼트(11)에 의해 고정되는 것이다.That is, the boat 20 is fixed to the fixing bolt 11 is screwed to both ends of the electrode rod 10 in the state that both ends are fitted into the fixing groove (10a), the fixing spacer 12 is raised on the upper end of both ends It is fixed by.

이와 같이 구성된 전극봉(10)에 일반적으로 많이 사용되는 흑연재질로 된 보트(20)가 고정되면, 상기 고정용 볼트(11)에 의해 보트(20)의 양단이 완전히 고정되기 때문에 보트(20)가 열에 의해 팽창과 수축을 반복하면 보트(20) 내부에 스트레스가 작용되어 쉽게 파손되는 문제점이 있었다.When the boat 20 made of graphite material, which is generally used in the electrode rod 10 configured as described above, is fixed, both ends of the boat 20 are completely fixed by the fixing bolt 11 so that the boat 20 is fixed. Repeated expansion and contraction by heat, there is a problem that the stress is applied to the boat 20 easily damaged.

따라서, 본 발명은 상기와 같은 문제점을 해결하기 위한 것으로, 전극의 보트 고정부에 탄성부재를 마련하여 보트를 탄력적으로 고정함으로써, 열의 팽창과 수축에 의해 보트가 파손되는 것을 방지하도록 한 보트 고정용 전극을 제공하는데 그 목적이 있다.Accordingly, the present invention is to solve the above problems, by providing an elastic member to the boat fixing portion of the electrode to elastically secure the boat, boat fixing for preventing the boat from being damaged by the expansion and contraction of heat The purpose is to provide an electrode.

도 1은 종래의 보트 고정용 전극의 구조를 보인 구성도,1 is a configuration diagram showing a structure of a conventional boat fixing electrode,

도 2는 본 발명에 따른 보트 고정용 전극의 구조를 개략적으로 보인 구성도,Figure 2 is a schematic view showing the structure of the boat fixing electrode according to the present invention,

* 도면의 주요 부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings

100; 전극봉 100a,111a; 홈100; Electrode rods 100a and 111a; home

110; 고정용 볼트 111; 고정부110; Fixing bolt 111; Fixture

112; 탄력부재 113; 전극부112; Elastic member 113; Electrode part

114; 냉각파이프 120; 보트114; Cooling pipe 120; boat

상기한 바와 같은 목적을 달성하기 위한 본 발명에 따른 보트 고정용 전극은, 상단에 복수의 홈이 형성된 전극봉과; 상기 전극봉 양단의 상부에 고정용 볼트로 고정되고, 하부에 다수의 홈이 형성된 고정부와; 상기 전극봉 상부와 고정부의 하부에 형성된 다수의 홈에 각각 끼워지는 탄력부재와; 상기 탄력부재의 단부에 탄력 지지되고 보트의 양단을 접촉되는 원통형 전극부와; 그리고 상기 전극봉과 고정부의 주변에 마련되어 상기 전극봉과 고정부에 발생되는 열을 냉각시키고, 냉각수가 흐르는 냉각파이프를 포함하는 것을 특징으로 한다.Boat fixing electrode according to the present invention for achieving the above object, the electrode rod formed with a plurality of grooves on the top; A fixing part fixed to an upper part of both ends of the electrode with a fixing bolt and having a plurality of grooves formed at a lower part thereof; An elastic member fitted to each of a plurality of grooves formed at an upper portion of the electrode and a lower portion of the fixing part; A cylindrical electrode part elastically supported at an end of the elastic member and in contact with both ends of the boat; And a cooling pipe provided around the electrode and the fixing part to cool the heat generated in the electrode and the fixing part, and flowing a cooling water.

이하, 첨부된 도면을 참조하여 본 발명에 따른 보트 고정용 전극의 구성 및 작용을 보다 상세하게 설명하기로 한다.Hereinafter, the configuration and operation of the boat fixing electrode according to the present invention with reference to the accompanying drawings will be described in more detail.

도 2는 본 발명에 따른 보트 고정용 전극을 간략하게 보인 구성도이다.2 is a schematic view showing a boat fixing electrode according to the present invention.

도시된 바와 같이, 본 고안에 따른 보트 고정용 전극은, 전극봉(100)과, 전극봉(100) 양단의 상부에 고정용 볼트(110)로 고정되는 고정부(111)와, 상기 전극봉(100) 상단과 고정부(111)의 하단에 형성된 홈(100a)(111a)에 탄력부재(112)에 의해 탄력 지지되며 전류가 공급되는 전극부(113)와, 상기 전극봉(100)과 고정부(111)의 외부에 마련되어 전극봉(100)과 고정부(111)에 발생되는 열을 냉각시키기 위한 냉각수가 흐르는 냉각파이프(114)를 포함하고 있다.As shown, the boat fixing electrode according to the present invention, the electrode rod 100, the fixing portion 111 fixed to the fixing bolt 110 on the upper ends of the electrode rod 100 and the electrode rod 100 The electrode part 113 is elastically supported by the elastic member 112 and is supplied to the grooves 100a and 111a formed at the upper end and the lower end of the fixing part 111, and the electrode rod 100 and the fixing part 111. It is provided on the outside of the) and includes a cooling pipe 114 through which a cooling water for cooling the heat generated in the electrode rod 100 and the fixing portion 111.

전극봉(100)의 상단 일측에는 복수의 홈(100a)이 형성되고, 복수의 홈(100a)에는 탄력부재(112)가 끼워져 있다. 그리고, 탄력부재(112)의 상단에는 전류가 공급되는 전극부(113)가 탄력 지지된다. 여기에서, 전극부(113)는 보트(120)가 열 팽창이나 수축에 의해 발생되는 길이 방향의 변위가 상쇄할 수 있도록 원통형의 롤인 것이 바람직하다.A plurality of grooves 100a are formed on one side of the upper end of the electrode rod 100, and the elastic member 112 is fitted in the plurality of grooves 100a. In addition, the upper end of the elastic member 112, the electrode portion 113 to which the current is supplied is elastically supported. Here, the electrode portion 113 is preferably a cylindrical roll so that the boat 120 can cancel the longitudinal displacement caused by thermal expansion or contraction.

상기 전극봉(100)의 상단 타측에는 고정용 볼트(110)에 의해 고정부(111)가 고정되는데, 전극봉(100) 상단과 고정부(111) 사이에 보트(120)의 양단이 끼워질 수 있도록 소정 간격으로 형성되도록 고정되는 것이다.The fixing part 111 is fixed to the other end of the electrode bar 100 by the fixing bolt 110, so that both ends of the boat 120 may be fitted between the electrode bar 100 and the fixing part 111. It is fixed to be formed at a predetermined interval.

그리고, 고정부(111)의 저면에는 전극봉(100) 상단에 형성된 복수의 홈(100a)과 대향하는 위치에 다른 복수의 홈(111a)이 형성되고, 복수의 홈(111a)에도 탄력부재(112)가 각각 끼워져 전극부(113)를 탄력 지지하고 있다.In addition, a plurality of grooves 111a are formed at a bottom surface of the fixing part 111 to face a plurality of grooves 100a formed at the upper end of the electrode rod 100, and the elastic member 112 is also formed in the plurality of grooves 111a. Are respectively inserted to elastically support the electrode portion 113.

이와 같이, 전극봉(100) 상단과 고정부(111) 저면에 탄력부재(112)에 의해 탄력 지지되는 전극부(113) 사이에 보트(120)의 양단이 끼워져 고정된다. 그리고, 고정부(111)를 고정하는 고정용 볼트(110)를 조임으로써, 보트(120)를 고정하는 것이다.As described above, both ends of the boat 120 are inserted and fixed between the upper end of the electrode rod 100 and the bottom of the fixing part 111 by the elastic member 112 that is elastically supported by the elastic member 112. And the boat 120 is fixed by tightening the fixing bolt 110 which fixes the fixing part 111. FIG.

그리고, 전극봉(100)과 고정부(111)의 주변에는 냉각수가 흐르는 냉각 파이프(114)가 설치되어, 전극에서 발생되는 열을 냉각하여 전극이 일정온도이상으로 상승되는 것을 방지한다.In addition, a cooling pipe 114 through which cooling water flows is installed around the electrode 100 and the fixing part 111 to cool the heat generated from the electrode to prevent the electrode from rising above a predetermined temperature.

이상에서 설명한 바와 같이, 본 발명에 따르면, 종래의 고정용 볼트에 전극을 고정하는 전극에 비해, 흑연재질로 된 보트의 열팽창에 의해 발생되는 길이방향의 변위를 상쇄시킬 수 있으므로, 증착공정에 사용되는 흑연보트의 사용시간을 현저하게 증가시킬 수 있으며, 공정의 안정화 및 보트의 교체 시간을 감소 할 수 있으며, 보트 파손에 의한 제품의 불량을 감소시킬 수 있다.As described above, according to the present invention, since the displacement in the longitudinal direction caused by thermal expansion of the boat made of graphite material can be canceled, compared to the electrode for fixing the electrode to the conventional fixing bolt, it is used in the deposition process. The usage time of the graphite boat can be significantly increased, the process stabilization and boat replacement time can be reduced, and the failure of the product due to the boat breakage can be reduced.

Claims (3)

상단에 복수의 홈이 형성된 전극봉과;An electrode rod having a plurality of grooves formed at an upper end thereof; 상기 전극봉 양단의 상부에 간격조정용 볼트로 고정되고, 하부에 다수의 홈이 형성된 고정부와;A fixing part fixed to the upper part of the both ends of the electrode with a gap adjusting bolt and having a plurality of grooves formed at a lower part thereof; 상기 전극봉 상부와 고정부의 하부에 형성된 다수의 홈에 각각 끼워지는 탄력부재와;An elastic member fitted to each of a plurality of grooves formed at an upper portion of the electrode and a lower portion of the fixing part; 상기 탄력부재의 단부에 탄력 지지되고 보트의 양단을 접촉되며 전류가 공급되는 전극부와; 그리고An electrode part elastically supported at an end of the elastic member and in contact with both ends of the boat and supplied with current; And 상기 전극봉과 고정부의 주변에 마련되어 상기 전극봉과 고정부에 발생되는 열을 냉각시키고, 냉각수가 흐르는 냉각파이프를 포함하는 것을 특징으로 하는 보트 고정용 전극.The boat fixing electrode is provided around the electrode and the fixing portion to cool the heat generated in the electrode and the fixing portion, characterized in that it comprises a cooling pipe flowing cooling water. 제1항에 있어서, 상기 전극부는 상기 보트가 열 팽창이나 수축에 의해 발생되는 길이 방향의 변위가 상쇄할 수 있도록 원통형의 롤인 것을 특징으로 하는 보트 고정용 전극.The boat fixing electrode according to claim 1, wherein the electrode portion is a cylindrical roll so that the displacement in the longitudinal direction caused by thermal expansion or contraction of the boat is canceled out. 제1항에 있어서, 상기 탄력부재는 코일 스프링인 것을 특징으로 하는 보트고정용 전극.The boat fixing electrode of claim 1, wherein the elastic member is a coil spring.
KR1020000049079A 2000-08-24 2000-08-24 electrode for boat fixture KR20020016007A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101362812B1 (en) * 2008-02-11 2014-02-14 (주)소슬 Apparatus for supporting substrate and apparatus for treating substrate having the same
CN106947945A (en) * 2017-05-11 2017-07-14 成都西沃克真空科技有限公司 One kind resistance steaming device steams platform with many steric hindrances of Shockproof type

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5538993A (en) * 1978-09-13 1980-03-18 Kempten Elektroschmelz Gmbh Device for intermittent heat vapor deposition on formed body
JPH05339728A (en) * 1992-06-10 1993-12-21 Shinko Seiki Co Ltd Support for work for vacuum film formation
JPH09157836A (en) * 1995-11-30 1997-06-17 Matsushita Electric Ind Co Ltd Vaporization source for vacuum deposition device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5538993A (en) * 1978-09-13 1980-03-18 Kempten Elektroschmelz Gmbh Device for intermittent heat vapor deposition on formed body
JPH05339728A (en) * 1992-06-10 1993-12-21 Shinko Seiki Co Ltd Support for work for vacuum film formation
JPH09157836A (en) * 1995-11-30 1997-06-17 Matsushita Electric Ind Co Ltd Vaporization source for vacuum deposition device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101362812B1 (en) * 2008-02-11 2014-02-14 (주)소슬 Apparatus for supporting substrate and apparatus for treating substrate having the same
CN106947945A (en) * 2017-05-11 2017-07-14 成都西沃克真空科技有限公司 One kind resistance steaming device steams platform with many steric hindrances of Shockproof type

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