JPS5538993A - Device for intermittent heat vapor deposition on formed body - Google Patents

Device for intermittent heat vapor deposition on formed body

Info

Publication number
JPS5538993A
JPS5538993A JP10288379A JP10288379A JPS5538993A JP S5538993 A JPS5538993 A JP S5538993A JP 10288379 A JP10288379 A JP 10288379A JP 10288379 A JP10288379 A JP 10288379A JP S5538993 A JPS5538993 A JP S5538993A
Authority
JP
Japan
Prior art keywords
vapor deposition
formed body
intermittent heat
heat vapor
intermittent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10288379A
Other languages
Japanese (ja)
Inventor
Do Rudone Andore
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektroschmelzwerk Kempten GmbH
Original Assignee
Elektroschmelzwerk Kempten GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektroschmelzwerk Kempten GmbH filed Critical Elektroschmelzwerk Kempten GmbH
Publication of JPS5538993A publication Critical patent/JPS5538993A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP10288379A 1978-09-13 1979-08-14 Device for intermittent heat vapor deposition on formed body Pending JPS5538993A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19782839747 DE2839747A1 (en) 1978-09-13 1978-09-13 Vacuum vapour deposition appts. - includes inner sealable chamber contg. evaporator boats, and suitable for coating plastics, metal or glass substrates with metals

Publications (1)

Publication Number Publication Date
JPS5538993A true JPS5538993A (en) 1980-03-18

Family

ID=6049297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10288379A Pending JPS5538993A (en) 1978-09-13 1979-08-14 Device for intermittent heat vapor deposition on formed body

Country Status (2)

Country Link
JP (1) JPS5538993A (en)
DE (1) DE2839747A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58101130A (en) * 1981-12-09 1983-06-16 Matsushita Electric Ind Co Ltd Dielectric composition
US6281273B1 (en) 1999-06-24 2001-08-28 Toho Chemical Industry Co., Ltd. Method of preparing heating type paving material as well as composition for heating type paving material to be used for the method
KR20020016007A (en) * 2000-08-24 2002-03-04 신현준 electrode for boat fixture

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58101130A (en) * 1981-12-09 1983-06-16 Matsushita Electric Ind Co Ltd Dielectric composition
JPH0326225B2 (en) * 1981-12-09 1991-04-10 Matsushita Electric Ind Co Ltd
US6281273B1 (en) 1999-06-24 2001-08-28 Toho Chemical Industry Co., Ltd. Method of preparing heating type paving material as well as composition for heating type paving material to be used for the method
KR20020016007A (en) * 2000-08-24 2002-03-04 신현준 electrode for boat fixture

Also Published As

Publication number Publication date
DE2839747A1 (en) 1980-04-03

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