JPS5538993A - Device for intermittent heat vapor deposition on formed body - Google Patents
Device for intermittent heat vapor deposition on formed bodyInfo
- Publication number
- JPS5538993A JPS5538993A JP10288379A JP10288379A JPS5538993A JP S5538993 A JPS5538993 A JP S5538993A JP 10288379 A JP10288379 A JP 10288379A JP 10288379 A JP10288379 A JP 10288379A JP S5538993 A JPS5538993 A JP S5538993A
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- formed body
- intermittent heat
- heat vapor
- intermittent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19782839747 DE2839747A1 (en) | 1978-09-13 | 1978-09-13 | Vacuum vapour deposition appts. - includes inner sealable chamber contg. evaporator boats, and suitable for coating plastics, metal or glass substrates with metals |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5538993A true JPS5538993A (en) | 1980-03-18 |
Family
ID=6049297
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10288379A Pending JPS5538993A (en) | 1978-09-13 | 1979-08-14 | Device for intermittent heat vapor deposition on formed body |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS5538993A (en) |
DE (1) | DE2839747A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58101130A (en) * | 1981-12-09 | 1983-06-16 | Matsushita Electric Ind Co Ltd | Dielectric composition |
US6281273B1 (en) | 1999-06-24 | 2001-08-28 | Toho Chemical Industry Co., Ltd. | Method of preparing heating type paving material as well as composition for heating type paving material to be used for the method |
KR20020016007A (en) * | 2000-08-24 | 2002-03-04 | 신현준 | electrode for boat fixture |
-
1978
- 1978-09-13 DE DE19782839747 patent/DE2839747A1/en not_active Withdrawn
-
1979
- 1979-08-14 JP JP10288379A patent/JPS5538993A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58101130A (en) * | 1981-12-09 | 1983-06-16 | Matsushita Electric Ind Co Ltd | Dielectric composition |
JPH0326225B2 (en) * | 1981-12-09 | 1991-04-10 | Matsushita Electric Ind Co Ltd | |
US6281273B1 (en) | 1999-06-24 | 2001-08-28 | Toho Chemical Industry Co., Ltd. | Method of preparing heating type paving material as well as composition for heating type paving material to be used for the method |
KR20020016007A (en) * | 2000-08-24 | 2002-03-04 | 신현준 | electrode for boat fixture |
Also Published As
Publication number | Publication date |
---|---|
DE2839747A1 (en) | 1980-04-03 |
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