JPH05339728A - Support for work for vacuum film formation - Google Patents

Abstract

PURPOSE:To improve the support so as not to be adversely affected by a high temp. and the powder of a material for vapor deposition. CONSTITUTION:The support 11 consisting of a support body 12 which has a cylindrical part 12a provided with an inside hole 16 to be fitted therein with a part of a work 1 and is provided with a slit 17 long in the axial direction penetrating the peripheral wall of this cylindrical part, a cover 13 which is formed to a cylindrical shape fitting to cover the outer periphery of the cylindrical part of the support body and is fixed to the support body and a spring member 14 which has a base part 14a held to a holding part 19 formed between the outer periphery of the cylindrical part of the support body 12, and the cover 13, extends from this base part into the slit 17 and is so formed as to projectingly the middle of the part 14b extending into the slit 17 toward the inside hole 16 side and to project this part into the inside hole 16, is produced.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a supporting tool which can easily attach / detach a processing object to / from a supporting tool for supporting the processing object in a vacuum film forming apparatus.

[0002]

2. Description of the Related Art A conventional support of this type is shown in FIG. In this support, when the supported portion of the object to be processed 1 is inserted into the inner hole 7 of the holder body 2, the object to be processed 1 is predetermined by the reaction force from the steel ball 3 elastically slightly protruding into the inner hole 7. It is fixed in a supported state. The configuration in which the steel ball 3 is elastically projected is, as shown in an enlarged view in FIG. 3C, a steel ball receiver 4, a compression coil spring 5, a pressure adjusting screw 6,
It is composed of these housing parts 8.

[0003]

When a vacuum film forming process is carried out, a large number of processed products supported by a support device revolve in the vacuum chamber while rotating on their own axis. The object 1 and the supporting tool are exposed to a vacuum film forming atmosphere. Since the vacuum film forming process is performed in a batch system and the support is repeatedly used, a period of heating and film forming in a vacuum state and a period of cooling to atmospheric pressure are repeated. When the above-mentioned conventional support tool is used, the first processed product 1
Can be easily and surely installed, but the removal of the product may be slightly smooth, and the second or subsequent installation of the processed article 1 may cause slippage of the steel balls 3 or vapor deposition material powder with each repetition. There is a problem in that the degree of clogging increases, which makes it almost impossible to perform the attachment, which should be easily performed, and renders it unusable. When the steel ball 3 and the spring 5 are taken out to repair the problem, there is also a problem that the adjusting screw 6 is burned and the repair is difficult. For this reason, the present situation is that a bolt is used as a set screw instead of the fixing action of the steel ball 3 described above. This requires the rotation of the bolt, which is troublesome. Therefore,
There is a need for a support in which many treatment objects are supported one by one and the set screw does not need to be rotated during the removing operation. The reason why the support shown in FIG. 3 causes the above-mentioned problem is that the steel ball 3 always receives the pressing force of the spring and rotates smoothly, but the support used in the vacuum film forming process Can not be used with lubricating oil,
Further, the vapor deposition material powder may enter every corner due to the pressure change where the vacuum and the atmospheric pressure alternate, and the vapor deposition material powder may be exposed to a high temperature. The present invention aims to solve the above problems.

[0004]

A support for a vacuum film-forming processed product according to the present invention has a cylindrical portion having an inner hole into which a part of the processed product is fitted, and penetrates a peripheral wall of the cylindrical portion. A support main body having a long slit in the axial direction, a cover formed in a tubular shape and fitted to cover the outer periphery of the cylindrical portion of the support main body, and fixed to the main body; A base portion held by a holding portion formed between the outer periphery of the portion and the cover and extending from the base portion into the slit and extending into the slit, the midway portion of the portion is convexly curved toward the inner hole side. And a spring member formed so as to project into the inner hole.

[0005]

When a part of the object to be treated is inserted into the inner hole of the support body, a part of the spring member protruding into the inner structure is pushed against the elastic force and inserted into the slit side.
The inserted processed product is supported by the elastic reaction force of the spring member. Since this supporting force is directly transmitted from the spring member, there is no steel ball receiver or steel ball that transmits the spring force unlike the one using a conventional steel ball, so there is no need for its smooth displacement or rotation, It is possible to eliminate the adverse effects of burn-in and vapor deposition material powder.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described with reference to FIGS. The illustrated support tool 11 includes a support tool body 12, a cover 13, a spring member 14, and the like.

The support body 12 has a cylindrical portion 12a extending from one end of a support shaft 12b. Cylindrical part 12a
The inner hole 16 is formed to have an inner diameter into which a part of the object to be treated 1 is inserted, and two slits 17 are formed at two locations on the peripheral wall along the axial direction of the cylindrical portion 12a. Cylindrical part 12a
A groove 19 is formed on the outer peripheral surface on the tip end side of the slit 17 corresponding to the shape of the base portion of the spring member 14 described later. In this case, the groove 19 is composed of a portion that extends a little linearly along the axial direction from each tip side of the slit 17, and a half circumferential portion that extends along the circumferential direction so as to connect these tips.

The cover 13 is in the shape of a cylindrical container that is just fitted to the cylindrical portion 12a of the support body 12, and has a hole 18 on the bottom side thereof for receiving the support shaft 12b. Reference numeral 15 in the drawing is a set screw.

The spring member 14 is formed by bending a spring wire material, and comprises a base portion 14a and an in-slit extension portion 14b. The base portion 14a is composed of a semi-circular portion so as to match the groove 19 and a portion bent from one end of the semi-circular portion to the other in the direction along the axis. Are formed so as to face each other in a convex shape. By fitting the base portion 14a of the spring member 14 into the groove 19, the slit inner extended portion 14b is located in the slit 17 and a part of the spring member 14 projects into the inner hole 16 in a convex shape. In this state, the cover 13 is attached as shown in the figure, and is fixed by the set screw 15.

FIG. 2 shows a state in which a bush-shaped member 20 used when the shaft portion of the object to be processed 1 is thin is used.
Reference numeral 0 has an inner hole 21 that fits the thin shaft portion of the object to be processed 1 and a slit 22 that substantially corresponds to the slit 17. Member 20
May be inserted in the inner hole 16 in advance so that both slits coincide with each other.

The support 11 having the above-described structure is provided with the spring member 1 by inserting a predetermined shaft of the object 1 into the inner hole 16.
It is supported by the support 11 by the reaction force of 4. According to a practical test, the operating conditions are a heating temperature of 450 ° C to 800 ° C,
One film forming process is a heating and heating time of 2 hours, a film forming time of 1 hour, and a cooling time of 3 hours. When the number of times of use exceeds 30, the spring action of the spring member 14 is performed. Is sufficient and no other problems have occurred, and the test is ongoing.

In the above embodiment, the half circumference of the groove 19 may be annular, and the slit 17 and the spring 14 may be formed.
Although the slit inner portion 14b has two sets, it may have one set.

[0013]

As described above, according to the present invention, it is possible to provide a support for a vacuum film-forming processed product, which allows the processed product to be easily attached and detached and can be repeatedly used without any trouble. Therefore, by using this support tool, the work efficiency of the attachment / detachment work of the object to be processed in the vacuum film forming process, which conventionally takes time and labor, is improved.

[Brief description of drawings]

1 shows an embodiment of the present invention, (a) is a vertical sectional side view, (b) is an AA sectional view, and (c) is a BB sectional view.

FIG. 2 is a vertical cross-sectional side view showing a usage state for different processed products of the same embodiment.

FIG. 3 shows an example of a conventional support tool, (a) is a vertical side view, (b) is a front view, and (c) is a partially enlarged view of (a).

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Processing object 11 Support tool 12 Support tool main body 13 Cover 14 Spring member 16 Inner hole 17 Slit 19 Holding part (groove)

Claims (1)

[Claims] 1. A support tool main body having a tubular portion having an inner hole into which a part of a processed material is fitted and having an axially long slit penetrating a peripheral wall of the tubular portion, and the support tool main body. The cover is fixed to the main body in a tubular shape that fits so as to cover the outer periphery of the tubular portion of the, and is held by the holding portion formed between the outer periphery of the tubular portion of the support body and the cover. A spring member formed so as to have a base portion extended to the inside of the slit from the base portion and to extend in the slit, and the middle portion of the portion that is convexly curved toward the inner hole side and protrudes into the inner hole. A featured tool for supporting vacuum film formation.