CN106935525A - Full-automatic general solar wafer detection platform - Google Patents
Full-automatic general solar wafer detection platform Download PDFInfo
- Publication number
- CN106935525A CN106935525A CN201511018169.0A CN201511018169A CN106935525A CN 106935525 A CN106935525 A CN 106935525A CN 201511018169 A CN201511018169 A CN 201511018169A CN 106935525 A CN106935525 A CN 106935525A
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- platform
- module
- wafer
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- chip
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67271—Sorting devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Abstract
The present invention provides a kind of full-automatic general solar wafer detection platform, including control unit, apparatus body, stacked wafer feed mechanism, wafer transport mechanism, measurement module, slice receiving mechanism of slice, control module and signal processing module.Chip is sent to belt conveyor by stacked wafer feed mechanism automatically, drives chip to enter measurement module by belt conveyor, it is measured after, chip automatic sorting is entered the different platforms that take up by control module according to measurement result.The platform has automatic charging, conveying and simple thin-graded function, and can carry out Function Extension, can just realize detecting function accordingly by the measurement module of configuration needs.Compared with prior art, with configuration flexibility and alternative higher, while the construction cycle of new architecture can be made shorter, exploitation and production cost are lower, and later maintenance is more convenient.
Description
Technical field
The present invention relates to solar wafer detection platform, more particularly, to a kind of full automatic general solar wafer inspection platform.
Background technology
Chip is the carrier of solar battery sheet, and the quality of wafer quality directly determines the height of solar battery sheet conversion efficiency,
Therefore, solar energy production producer needs to carry out the chip for producing the detection of multiple parameters.With the further fierce of market competition and
The development of solar energy industry technology level, the detection to chip requires more and more higher.
Existing wafer manufacture producer is usually faced with client new detection requirement, and intra-company lacks corresponding testing equipment,
Or the insufficiency face of existing sorter, lacking part measurement function, current universal solution is to use manual detection
Or a multi-functional sorter is purchased in addition.But the method using manual detection can increase human cost, not only measuring speed is slow,
And fallout ratio and loss is increased because of the influence of human factor.And also do not provide possess unifunctional in the market
Screening installation, a multi-functional sorter is purchased in addition can then cause the waste of function and resource.
The content of the invention
It is an object of the invention to provide a kind of full-automatic general detection platform for solar wafer, emphasis is detected or bad and real-time
Sorting parameter, or certain detection function that supplement existing equipment lacks, user can be according to the demand of itself selection measurement functions
With the quantity of measuring unit, and Function Extension can be carried out.
Full-automatic general solar wafer detection platform provided by the present invention includes：On control unit, apparatus body, stacked wafer
Material mechanism, wafer transport mechanism, measurement module, slice receiving mechanism of slice, control module and signal processing module；
Described control unit includes sensor and actuator module, controller module and power module：
Sensor and actuator module include stroke limit sensor, Wafer probe sensor, stepper motor, cylinder, magnetic valve,
Wherein stroke limit sensor is used for the position zero of stepper motor, and Wafer probe sensor is used to detect the location of chip,
Stepper motor, cylinder, magnetic valve is used to drive the machinery of chip feed mechanism, wafer transport mechanism, and sorting slice receiving mechanism of slice
Action；
Controller module includes microprocessor unit, communication module, LED display interface, digital input and output modules, stepping electricity
Machine driver, wherein microprocessor unit send control instruction, coordinate the work of each module, and communication module is completed and host computer
Communication, digital input and output modules complete various kinds of sensors, the transform electric work between magnetic valve and microprocessor unit,
Stepper motor driver is used to produce the drive signal that can be acted with Driving Stepping Motor；Device module processed is entered according to modular thought
Row design, is divided into different circuit boards, and can be configured according to difference in functionality demand flexible combination according to difference in functionality；
The stacked wafer feed mechanism includes the jacking mechanism of stacked wafer jack-up, by the wafer grabbing in film magazine and is discharged into
Acetabula device on conveyer belt, drives slide unit of sucker transmission chip etc.；
The wafer transport mechanism is driven by motor by synchronous pulley, and belt is flat belt, and belt speed is adjustable, according to measurement
The processing speed of module adjusts the speed of service of belt；
The measurement module is located in the middle of two sections of belts of wafer transport mechanism, can freely be matched somebody with somebody according to the demand of user
Put, the measurement function that can be selected includes：Thickness, electricity model, resistivity, outward appearance, stria, hidden split；
The slice receiving mechanism of slice be divided into the qualified platform that takes up, chip jacking mechanism, unqualified take up platform and other pieces take up platform；Close
Lattice piece takes up platform with elevating mechanism, is judged as qualified slice, thin piece and eventually enters into qualified film magazine, often under a piece of lifting platform
The certain position of drop；Chip jacking mechanism will pass through the unqualified chip jack-up for judging area according to the instruction of control unit, and feeding is not
Qualified film magazine；Other piece receiving can primary recipients have little time treatment or slice, thin piece undetermined.
Further, full-automatic general solar wafer detection platform provided by the present invention can install expansion platform additional in tail end, institute
Stating expansion platform includes platform body, conveyor module and the non-qualified platform that takes up, former full-automatic general solar wafer detection platform
Qualified take up platform mounted in expansion platform tail end.Expansion platform does not possess feeding function, and it is qualified that last process is sorted out
Piece flows into general extension platform, can further be detected and sorted.Carrying out multiple Function Extension in this way just can be real
Existing multi-functional sorting.
Full-automatic general solar wafer detection platform provided by the present invention has automatic charging, conveying and simple thin-graded function,
And Function Extension can be carried out when having new detection demand, user can be single according to the demand of itself selection measurement function and measurement
The quantity of unit, can just realize detecting function accordingly by the measurement module of configuration needs.Compared with prior art, with more
Configuration flexibility high and alternative, while can cause that the construction cycle of new architecture is shorter, exploitation and production cost are lower,
Later maintenance is more convenient, and is particularly well-suited to need the solar wafer Sheng Guang producers of newly-increased a certain or several detection functions.
Brief description of the drawings
Fig. 1 is the mono functional module figure of full-automatic general solar wafer detection platform provided by the present invention.
Fig. 2 is the structural representation of full-automatic general solar wafer detection platform provided by the present invention.
Fig. 3 is the expansion platform module map of full-automatic general solar wafer detection platform provided by the present invention.
Specific embodiment
It is to make the above objects, features and advantages of the present invention understandable in detail, below with reference to accompanying drawing to specific implementation of the invention
Mode elaborates.
Fig. 1 is the mono functional module figure of full-automatic general solar wafer detection platform provided by the present invention, brilliant for solar energy
All parameter measurements and sorting of piece.Platform includes apparatus body 01, stacked wafer feed mechanism 02, conveyor module 03, survey
Amount module 04, non-qualified receiving platform 05, qualified receiving platform 06, control module 07 and signal processing module 08.
Fig. 2 is the structural representation of full-automatic general solar wafer detection platform provided by the present invention.As shown in Fig. 2 heap
Folded feeding structure 02 includes chip loading lifting mechanism 11, feeding sucker 13 and transports the feeding manipulator 12 of chip.Start to survey
During amount, to be measured one folded chip is put into hair film magazine, after pressing ACK button, loading lifting mechanism 11 under the drive of motor on
Rise, sensor 31 is housed on feeding sucker 13, after sensor 31 detects chip, loading lifting mechanism 11 stops, on
Material sucker 13 is down moved under the drive of cylinder, picks up chip, and feeding manipulator 12 is moved and for chip to be sent to belt conveyor
20。
Conveyor module 03 includes two sections of independent belt conveyors 19 and belt conveyor 20, is driven by different motors, and speed keeps
It is consistent and adjustable.After be put into chip on belt conveyor 20 by feeding manipulator 12, driven by belt conveyor 20 and enter measurement module
14。
There is a sensor 32 front end of measurement module 14, and chip is detected into starting collection after detection zone after 32
Data, transfer data to signal processing module 08, and by data processing, system can provide measurement to the chip in measured region
As a result, judge it is qualified, unqualified or other.
When chip reaches the top of sensor 33, control module 07 can control jacking mechanism 18 according to signal processing results, such as
Fruit is qualified, and cylinder not jack-up, chip flows into the qualified platform 17 that takes up；If being non-qualified, control of the cylinder in magnetic valve
The lower jack-up of system, sends chip into non-qualified receiving can 16, so as to realize sorting function.
Fig. 3 is full-automatic general solar wafer detection platform provided by the present invention by the multifunction module figure after extension,
Multiple detection Function Extensions can be carried out on the basis of General Main platform 40.
Sort out qualified of the main platform 40 of general-purpose platform flows directly into expansion platform 41 carries out second Function detection, from
Two qualified of the outflow of expansion platform 41 is directly entered the 3rd expansion platform 42 and carries out Function detection and sorting, last qualified
Piece is into the qualified platform 06 that takes up.
In sum, the present invention has automatic charging and simple sorting function, and user can be by configuring different measurement module realities
The measurement function of now needing.
Claims (2)
1. a kind of full-automatic general solar wafer detection platform, it is characterised in that：It is brilliant including control unit, apparatus body, stacking
Piece feed mechanism, wafer transport mechanism, measurement module, slice receiving mechanism of slice, control module and signal processing module；
Described control unit includes sensor and actuator module, controller module and power module；Sensor and actuator module
Including stroke limit sensor, Wafer probe sensor, stepper motor, cylinder, magnetic valve；Controller module includes microprocessor
Device unit, communication module, LED display interface, digital input and output modules, stepper motor driver；
The stacked wafer feed mechanism is included the jacking mechanism of stacked wafer jack-up；
The wafer transport mechanism is driven by motor by synchronous pulley, and belt is flat belt, and belt speed is adjustable；
The measurement module is located in the middle of two sections of belts of wafer transport mechanism, can freely be configured according to the demand of user；It is described to take up
Mechanism be divided into the qualified platform that takes up, chip jacking mechanism, unqualified take up platform and other pieces take up platform.
2. full-automatic general solar wafer detection platform as claimed in claim 1, it is characterised in that：The function of platform can expand
Exhibition, also including expansion platform, the expansion platform includes platform body, conveyor module and the non-qualified platform that takes up, the extension
Platform is installed at the rear end of general-purpose platform, and the qualified platform that takes up of former full-automatic general solar wafer detection platform is flat mounted in extension
The tail end of platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511018169.0A CN106935525A (en) | 2015-12-29 | 2015-12-29 | Full-automatic general solar wafer detection platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511018169.0A CN106935525A (en) | 2015-12-29 | 2015-12-29 | Full-automatic general solar wafer detection platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106935525A true CN106935525A (en) | 2017-07-07 |
Family
ID=59442296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201511018169.0A Pending CN106935525A (en) | 2015-12-29 | 2015-12-29 | Full-automatic general solar wafer detection platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106935525A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107591342A (en) * | 2017-10-23 | 2018-01-16 | 常州亿晶光电科技有限公司 | It is automatic to survey sheet resistance equipment |
| CN108438903A (en) * | 2018-03-22 | 2018-08-24 | 昆山国显光电有限公司 | A kind of base plate processing system |
-
2015
- 2015-12-29 CN CN201511018169.0A patent/CN106935525A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107591342A (en) * | 2017-10-23 | 2018-01-16 | 常州亿晶光电科技有限公司 | It is automatic to survey sheet resistance equipment |
| WO2019080508A1 (en) * | 2017-10-23 | 2019-05-02 | 常州亿晶光电科技有限公司 | Device for automatically testing sheet resistance |
| CN108438903A (en) * | 2018-03-22 | 2018-08-24 | 昆山国显光电有限公司 | A kind of base plate processing system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170707 |
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| WD01 | Invention patent application deemed withdrawn after publication |