CN106931899A - Three-dimensional shape scanning system for inhibiting noise of laser spots and improving stability - Google Patents

Three-dimensional shape scanning system for inhibiting noise of laser spots and improving stability Download PDF

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Publication number
CN106931899A
CN106931899A CN201610946431.6A CN201610946431A CN106931899A CN 106931899 A CN106931899 A CN 106931899A CN 201610946431 A CN201610946431 A CN 201610946431A CN 106931899 A CN106931899 A CN 106931899A
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irradiation area
scanning system
dimensional appearance
trend
bearing
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CN201610946431.6A
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CN106931899B (en
Inventor
蔡政廷
翁義龙
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Chroma ATE Inc
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Chroma ATE Inc
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

A three-dimensional profile scanning system for suppressing noise of laser spots and improving stability comprises a line light source, a rotating mirror and an image capturing device. The line light source provides a line beam. The rotating mirror reflects the line beam to the surface to be measured so as to form an irradiation area on the surface to be measured. The rotating mirror rotates to enable the irradiation areas to swing, and the irradiation areas at different moments are mutually overlapped, so that the effect of blurring light spots is achieved. The image acquisition device is used for acquiring an image of an irradiation area on the surface to be measured and calculating the three-dimensional morphology. The three-dimensional topography scanning system can swing along with time because the irradiation area that the line beam formed on the surface to be measured, and the irradiation area of different moments overlaps each other, therefore even if the line beam can form facula on the surface to be measured, the facula can also blur because of the irradiation area of swing.

Description

A kind of three-dimensional appearance scanning system for suppressing laser facula noise improving stability
Technical field
The invention relates to a kind of three-dimensional appearance scanning system.
Background technology
3-D scanning technology is the outward appearance (or geometry) of object analysis, and the signal that it is scanned can carry out three-dimensional reconstruction Calculate, to draw the digital information of actual object.Triangle telemetry is one kind of 3-D scanning technology, and it utilizes light source to irradiate one Object, then the beam information on object is obtained by image capture unit.Because of light beam and image capture unit on light source, object A triangle is formed, therefore this kind of technology is referred to as triangle telemetry.
In some range of triangle systems, laser can be as light source irradiating determinand.Because laser has high directivity, height Same tone, therefore the feature of determinand is relatively easy to identification.But because of the same tone high of laser, therefore easy shape on a rough surface Into hot spot (Speckle), it comes from laser and beats to rough surface the interference effect for being formed and being scattered between light, and then generation is not advised Speckle pattern then.These hot spots are likely to result in image interference so that subsequent analysis data produce false judgment.
The content of the invention
This exposure provides a kind of three-dimensional appearance scanning system, comprising line source, revolving mirror and image capture unit.Line source Line beam is provided.Line beam is reflexed to tested surface by revolving mirror, with forming irradiation area on tested surface.Revolving mirror rotates and causes Irradiation area swings, and irradiation area in the same time does not overlap each other.Image capture unit is used to capture the irradiation on tested surface The image in region.
In some embodiments, the irradiation area on tested surface has bearing of trend.Revolving mirror rotates and causes irradiated region Domain essence swings along bearing of trend.
In some embodiments, the irradiation area on tested surface has bearing of trend.Irradiation area is along bearing of trend With the first length, first length of the amplitude of oscillation that irradiation area swings less than irradiation area.
In some embodiments, the irradiation area on tested surface has bearing of trend.Irradiation area is along bearing of trend With the first length, and image capture unit is in having a capture region on tested surface, and capture region has the along bearing of trend Two length, the second length is less than the first length.
In some embodiments, revolving mirror has speed, and image capture unit has capture frequency, rotary frequency Rate is equal to capture frequency.
In some embodiments, revolving mirror has speed, and image capture unit has capture frequency, rotary frequency Rate is more than capture frequency.
In some embodiments, revolving mirror includes speculum and rotating mechanism.Speculum has rotary shaft, rotary shaft reality Matter is located at the center of speculum.Rotating mechanism connects speculum so that speculum is rotated along rotary shaft.
In some embodiments, line source includes spot light and lens pillar.Spot light provides the first light beam.Column is saturating It is Line beam that mirror is used to the first light distortion.
In some embodiments, Line beam is laser beam.
In the above-described embodiment, three-dimensional appearance scanning system because Line beam can be with the irradiation area formed on tested surface Time flutter, and irradiation area in the same time does not overlap each other, even if therefore Line beam can form hot spot, light on tested surface Spot also can the obfuscation because of the irradiation area of swing.
Brief description of the drawings
Fig. 1 is the stereogram of the three-dimensional appearance scanning system of an embodiment of the present invention;
Fig. 2A is the schematic diagram of the image of irradiation area;
Fig. 2 B be revolving mirror when not rotating irradiation area along line segment B-B ' intensity map;
And Fig. 2 C for when revolving mirror rotates irradiation area along line segment B-B ' intensity map;
Fig. 3 is the top view of the irradiation area of Fig. 1;
Fig. 4 is the position of the irradiation area of Fig. 1 and the timing diagram of the capture of image capture unit;
Fig. 5 is the structural representation of the line source of Fig. 1.
Specific embodiment
Hereinafter a plurality of implementation methods of the invention will be disclosed with accompanying drawing, it is as clearly stated, thin in many practices Section will be explained in the following description.It should be appreciated, however, that the details in these practices is not applied to limit the present invention. That is, in some embodiments of the present invention, the details in these practices is non-essential.Additionally, for the sake of simplifying accompanying drawing, Some known usual structures will be illustrated in the way of simple signal in the accompanying drawings with element.
Fig. 1 is the stereogram of the three-dimensional appearance scanning system of an embodiment of the present invention.Three-dimensional appearance scanning system is included Line source 110, revolving mirror 120 and image capture unit 130.Line source 110 provides Line beam 112.Revolving mirror 120 is by Line beam 112 reflex to tested surface 910, with formation irradiation area A on tested surface 910.Revolving mirror 120 rotates and causes irradiation area A pendulum It is dynamic, and irradiation area A in the same time does not overlap each other.Image capture unit 130 is used to capture the irradiation area on tested surface 910 The image of A.For the sake of clarity, three moment are schematically illustrated in Fig. 1, that is, revolving mirror 120 is rotated to three kinds of angles, and In three irradiation areas of formation on tested surface 910.
In some embodiments, tested surface 910 can be the surface of a platform 900.But in other implementations, One determinand (not illustrating) is placed on platform 900, and three-dimensional appearance scanning system is used to scan the three-dimensional appearance of determinand.If Three-dimensional appearance scanning system scans determinand, then tested surface is the table that determinand (with platform 900) is irradiated to by Line beam 112 Face.If the surface of three-dimensional appearance scanning system scanning platform 900, tested surface 910 is irradiated to for platform 900 by Line beam 112 Surface.Herein for the sake of clarity, citing of the surface being irradiated to by Line beam 112 using platform 900 as tested surface 910.
By the three-dimensional appearance scanning system of present embodiment, the hot spot (Speckle) as produced by line source 110 can quilt Obfuscation, to reduce erroneous judgement situation produced when subsequent images are analyzed.Specifically, line source 110 provides Line beam 112, Line beam 112 is that fechtable irradiation area A is anti-in linear irradiation area A, image capture unit 130 is formed on platform 900 The characteristic information that should go out.If relatively moving (such as platform 900 is moved) between platform 900 and three-dimensional appearance scanning system, according to The different places that region A exposes to platform 900 are penetrated, image capture unit 130 can obtain the global feature on the surface of platform 900 whereby Information.In the present embodiment, three-dimensional appearance scanning system is because Line beam 112 is in the irradiation area A meetings formed on tested surface 910 Swing over time, and irradiation area A in the same time does not overlap each other, even if therefore the meeting shape on tested surface 910 of Line beam 112 Into hot spot, hot spot can be moved because of the irradiation area A for swinging, and hot spot on irradiation area A everywhere has different distribution maps Case, this two kinds of factors cause hot spot obfuscation when irradiation area A swings, and suppress or eliminate hot spot whereby and subsequent images are analyzed Influence.
For example, refer to the embodiment explanation of Fig. 2A to Fig. 2 C.Fig. 2A is the signal of the image I ' of irradiation area A ' Figure, Fig. 2 B be revolving mirror when not rotating irradiation area A ' along line segment B-B ' intensity map, and Fig. 2 C for revolving mirror rotate when Irradiation area A ' along line segment B-B ' intensity map.The irradiation area A ' that determinand (not illustrating) is plane is shown in Fig. 2A. If determinand has the surface of different height, irradiation area A ' will deform, that is, the position of irradiation area A ' each points can be with The surface characteristics (as height) of determinand and offset, the table of determinand can be calculated by the side-play amount for analyzing irradiation area A ' each points Region feature.When revolving mirror does not rotate, hot spot has obvious brightness, therefore is produced in the intensity map of Fig. 2 B multiple high Peak.When side-play amount (such as the taking the center of gravity of brightness distribution curve) at this is analyzed, these summits turn into noise so that analysis Offset location it is inaccurate.But when revolving mirror rotates, hot spot is blurred, the brightness distribution curve of Fig. 2 C is smoother, Therefore the offset location of analysis is more accurate.By described above, provable revolving mirror rotation can make hot spot obfuscation, whereby Obtain accurate analyze data.
Then please with reference to Fig. 1 and Fig. 3, wherein Fig. 3 is the top view of the irradiation area A of Fig. 1.In present embodiment In, revolving mirror 120 rotates with the time, therefore Line beam 112 in do not formed on tested surface 910 in the same time irradiation area A1, A2 ..., An (hereinafter referred to as A1~An).Irradiation area A1~An on tested surface 910 has a bearing of trend D (or more Speak by the book, be the length bearing of trend of irradiation area A1~An), revolving mirror 120 rotates and causes irradiation area A1~An essence Swung along bearing of trend D.
Herein, " essence " be modify it is any can slight variations relation, but this slight variations can't change Become its essence (in addition, " essence " mentioned in this article all using above-mentioned explanation, therefore can just be repeated no more).For example, " rotation Tilting mirror 120 rotates and causes that irradiation area A1~An essence swings along bearing of trend D ", this description is revolved except representing revolving mirror 120 Turn to cause that irradiation area A1~An swings outer along bearing of trend D really, as long as the purpose for improving hot spot, irradiation area can be reached The orientation of A1~An can be slightly not parallel with bearing of trend D.
Because irradiation area A1~An also and then swings with the hot spot on time flutter, therefore each irradiation area A1~An, So that hot spot obfuscation.Consequently, it is possible in image acquired by image capture unit 130, the information of hot spot just can be suppressed.Again Add, because irradiation area A1~An essence swings along bearing of trend D, therefore while obfuscation hot spot, irradiation area A1~ An remains to keep the precision of scanning direction S (i.e. essence extends vertically the direction of direction D).
Refer to Fig. 3.Each irradiation area A1~An has length L1, irradiation area A1~An pendulum along bearing of trend D Length L1 of the dynamic amplitude of oscillation Δ less than irradiation area A1~An.In other words, an overlay region can be formed between irradiation area A1~An Domain O, is represented with site in figure 3.In some embodiments, no matter how irradiation area A1~An swings, irradiation area A1 ~An all parts are located in the O of overlapping region.For example, the length L1 of irradiation area A1~An can be about 100 millimeters, and the amplitude of oscillation Δ is for about 10 millimeters, therefore the length L2 of overlapping region O is for about 80 millimeters, but the present invention is not limited with above-mentioned numerical value.
In some embodiments, the image capture unit 130 of Fig. 1 on tested surface 910 have a capture region I.Take As region I has a length L3 along bearing of trend D.Length L1s of the length L3 of capture region I less than irradiation area A1~An. In addition, the length L3 of capture region I can be substantially equal to or the length L2 less than overlapping region O.For above-mentioned example, capture The length L3 of region I can be substantially equal to or less than 80 millimeters, but the present invention is not limited with above-mentioned numerical value.In other words, capture Region I can be located in the O of overlapping region in the opposite end of bearing of trend D, and thus image capture unit 130 just will not be got Image outside the O of overlapping region, therefore can avoid capturing the scintigraphic images produced because irradiation area A1~An swings.
Then please with reference to Fig. 1 and Fig. 4, positions and image capture unit 130 of the wherein Fig. 4 for the irradiation area A of Fig. 1 Capture timing diagram.In fig. 4, line segment 202 represents the position of irradiation area A.In some embodiments, revolving mirror 120 With speed, and image capture unit 130 has a capture frequency.For example, in fig. 4, revolving mirror 120 was in one second Inside have rotated five times, therefore speed is for about 5Hz.And image capture unit 130 in time T1 and T2 respectively taken once as, and Time T1 is about in 0.38 second, therefore capture frequency is for about (1 second/0.38 second)=about 2.6Hz, but the present invention is not with above-mentioned Numerical value is limited.On the other hand, image capture unit 130 is in the image acquired by time T1 to time T2 (time for exposure), comprising Irradiation area A (or hot spot) reaches the effect of hot spot obfuscation whereby by the accumulated change of position P1 to position P2.Therefore, if The speed of revolving mirror 120 is equal to the capture frequency of image capture unit 130, and acquired image can be included by position P1 in place All change in location of P1 ' (that is, revolving mirror 120 rotates once) are put, if the speed of revolving mirror 120 is more than image capture The capture frequency of device 130, that is, image capture unit 130 is during a capture, the rotation of revolving mirror 120 is more than once, The change in location that acquired image is included is more.When revolving mirror 120 rotate it is faster, then hot spot swing speed it is also faster, its mould The degree of gelatinization also just becomes apparent from.
Fig. 5 is refer to, it is the structural representation of the line source 110 of Fig. 1.In some embodiments, line source 110 is wrapped Containing spot light 114 and lens pillar 116.Spot light 114 provides the first light beam 115.Lens pillar 116 is used to the first light beam 115 are deformed into Line beam 112.Herein, the substantial non-linear of luminous point of the first light beam 115 that spot light 114 is provided, example Such as it is circular, ellipse.Spot light 114 for example can be laser.The lens curved surface of lens pillar 116 bends in single axial, because The first light beam 115 can be made the deformation (such as being spread after restraining) of single axial for this so that the first light beam 115 is changed into Line beam 112.But the structure of above-mentioned line source 110 is merely illustrative, and it is not used to the limitation present invention.Usual skill of the invention, Can be according to actual demand, the composition structure of elasticity design line source 110.
Then Fig. 1 is gone back to.In some embodiments, revolving mirror 120 includes speculum 122 and rotating mechanism 124.Instead Mirror 122 is penetrated with rotary shaft 123, the essence of rotary shaft 123 is positioned at the center of speculum 122.Rotating mechanism 124 connects speculum 122 so that speculum 122 is rotated along rotary shaft 123.Rotating mechanism 124 can be for example stepper motor or magnet, using machinery Power or magnetic force order about speculum 122 and rotate.
Summary, the three-dimensional appearance scanning system of each implementation method of the invention is because Line beam is in the photograph formed on tested surface Penetrating region can swing over time, and irradiation area in the same time does not overlap each other, even if therefore Line beam can be on tested surface Hot spot is formed, hot spot can also be blurred because of the irradiation area for swinging.Consequently, it is possible to can be not required to additionally increase diffuser plate disappear Except hot spot.
Although the present invention is disclosed above with implementation method, so it is not limited to the present invention, any to be familiar with this skill Person, without departing from the spirit and scope of the present invention, when can be used for a variety of modifications and variations, therefore protection scope of the present invention is worked as It is defined depending on the scope of which is defined in the appended claims.

Claims (9)

1. a kind of three-dimensional appearance scanning system, it is characterised in that include:
One line source a, there is provided Line beam;
One revolving mirror, a tested surface is reflexed to by the Line beam, with an irradiation area is formed on the tested surface, the wherein rotation Mirror rotates and causes that the irradiation area swings, and the irradiation area in the same time does not overlap each other;And
One image capture unit, is used to capture the image of the irradiation area on the tested surface.
2. three-dimensional appearance scanning system according to claim 1, it is characterised in that the irradiation area tool on the tested surface There is a bearing of trend, the revolving mirror rotates and causes that irradiation area essence swings along the bearing of trend.
3. three-dimensional appearance scanning system according to claim 1, it is characterised in that the irradiation area tool on the tested surface There is a bearing of trend, the irradiation area has one first length along the bearing of trend, the amplitude of oscillation that the irradiation area swings is less than First length of the irradiation area.
4. three-dimensional appearance scanning system according to claim 1, it is characterised in that the irradiation area tool on the tested surface There is a bearing of trend, the irradiation area has one first length along the bearing of trend, and the image capture unit is to be measured in this There is a capture region, the capture region has one second length along the bearing of trend on face, second length less than this One length.
5. three-dimensional appearance scanning system according to claim 1, it is characterised in that the revolving mirror has a speed, And the image capture unit has a capture frequency, the speed is equal to the capture frequency.
6. three-dimensional appearance scanning system according to claim 1, it is characterised in that the revolving mirror has a speed, And the image capture unit has a capture frequency, the speed is more than the capture frequency.
7. three-dimensional appearance scanning system according to claim 1, it is characterised in that the revolving mirror is included:
One speculum, with a rotary shaft, the rotary shaft is substantially positioned at the center of the speculum;And
One rotating mechanism, connects the speculum so that the speculum is rotated along the rotary shaft.
8. three-dimensional appearance scanning system according to claim 1, it is characterised in that the line source is included:
One spot light, there is provided one first light beam;And
One lens pillar, it is the Line beam to be used to first light distortion.
9. three-dimensional appearance scanning system according to claim 1, it is characterised in that the Line beam is laser beam.
CN201610946431.6A 2015-12-31 2016-10-26 Three-dimensional shape scanning system for inhibiting noise of laser spots and improving stability Expired - Fee Related CN106931899B (en)

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TW104144714A TWI596359B (en) 2015-12-31 2015-12-31 Three-dimensional profile scanning system for suppressing laser speckle noise and improving stability
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CN109425995A (en) * 2017-08-24 2019-03-05 陈致晓 Laser illumination system and its laser facula removing method

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CN109425995A (en) * 2017-08-24 2019-03-05 陈致晓 Laser illumination system and its laser facula removing method
CN107816952A (en) * 2017-10-27 2018-03-20 长江三峡勘测研究院有限公司(武汉) A kind of method that successively excavation project obtains overall 3-dimensional image
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TW201723530A (en) 2017-07-01
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