CN106931899B - Three-dimensional shape scanning system for inhibiting noise of laser spots and improving stability - Google Patents
Three-dimensional shape scanning system for inhibiting noise of laser spots and improving stability Download PDFInfo
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- CN106931899B CN106931899B CN201610946431.6A CN201610946431A CN106931899B CN 106931899 B CN106931899 B CN 106931899B CN 201610946431 A CN201610946431 A CN 201610946431A CN 106931899 B CN106931899 B CN 106931899B
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- irradiation area
- scanning system
- dimensional appearance
- extending direction
- line beam
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- 230000002401 inhibitory effect Effects 0.000 title description 2
- 230000010355 oscillation Effects 0.000 claims description 4
- 230000000694 effects Effects 0.000 abstract description 3
- 238000012876 topography Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Abstract
A three-dimensional profile scanning system for suppressing noise of laser spots and improving stability comprises a line light source, a rotating mirror and an image capturing device. The line light source provides a line beam. The rotating mirror reflects the line beam to the surface to be measured so as to form an irradiation area on the surface to be measured. The rotating mirror rotates to enable the irradiation areas to swing, and the irradiation areas at different moments are mutually overlapped, so that the effect of blurring light spots is achieved. The image acquisition device is used for acquiring an image of an irradiation area on the surface to be measured and calculating the three-dimensional morphology. The three-dimensional topography scanning system can swing along with time because the irradiation area that the line beam formed on the surface to be measured, and the irradiation area of different moments overlaps each other, therefore even if the line beam can form facula on the surface to be measured, the facula can also blur because of the irradiation area of swing.
Description
Technical field
The invention relates to a kind of three-dimensional appearance scanning systems.
Background technique
3-D scanning technology is the appearance (or geometry) of object analysis, and the signal scanned will do it three-dimensional reconstruction
It calculates, to obtain the digital information of actual object.Triangle telemetry is one kind of 3-D scanning technology, utilizes light source irradiation one
Object, then the beam information on object is obtained by image capture unit.Because of the light beam and image capture unit on light source, object
A triangle is formed, therefore such technology is known as triangle telemetry.
In some range of triangle systems, laser can be used as light source to irradiate determinand.Because laser has high directivity, height
Same tone, therefore the feature of determinand is relatively convenient for identifying.However because of the high same tone of laser, therefore it is easy shape on a rough surface
At hot spot (Speckle), the interference effect formed between scattering light is beaten to rough surface from laser, and then is generated and do not advised
Speckle pattern then.These hot spots are likely to result in image interference, so that subsequent analysis data generate false judgment.
Summary of the invention
This exposure provides a kind of three-dimensional appearance scanning system, includes linear light source, revolving mirror and image capture unit.Linear light source
Line beam is provided.Line beam is reflexed to tested surface by revolving mirror, in forming irradiation area on tested surface.Revolving mirror rotate so that
Irradiation area is swung, and the irradiation area of different moments overlaps each other.Image capture unit is to capture the irradiation on tested surface
The image in region.
In some embodiments, the irradiation area on tested surface has extending direction.Revolving mirror rotates so that irradiated region
Domain essence is swung along extending direction.
In some embodiments, the irradiation area on tested surface has extending direction.Irradiation area is along extending direction
With the first length, the amplitude of oscillation that irradiation area is swung is less than the first length of irradiation area.
In some embodiments, the irradiation area on tested surface has extending direction.Irradiation area is along extending direction
With the first length, and image capture unit is in having a capture region on tested surface, and capture region has the along extending direction
Two length, the second length is less than the first length.
In some embodiments, revolving mirror has speed, and image capture unit has capture frequency, rotary frequency
Rate is equal to capture frequency.
In some embodiments, revolving mirror has speed, and image capture unit has capture frequency, rotary frequency
Rate is greater than capture frequency.
In some embodiments, revolving mirror includes reflecting mirror and rotating mechanism.Reflecting mirror has rotary shaft, and rotary shaft is real
Matter is located at the center of reflecting mirror.Rotating mechanism connects reflecting mirror, so that reflecting mirror is rotated along rotary shaft.
In some embodiments, linear light source includes point light source and cylindrical lenses.Point light source provides the first light beam.Column is saturating
Mirror is to be Line beam by the first light distortion.
In some embodiments, Line beam is laser beam.
In the above-described embodiment, three-dimensional appearance scanning system is because Line beam can be in the irradiation area formed on tested surface
Time flutter, and the irradiation area of different moments overlaps each other, therefore even if Line beam can form hot spot, light on tested surface
Spot can be also blurred because of the irradiation area of swing.
Detailed description of the invention
Fig. 1 is the perspective view of the three-dimensional appearance scanning system of an embodiment of the present invention；
Fig. 2A is the schematic diagram of the image of irradiation area；
Intensity map of the irradiation area along line segment B-B ' when Fig. 2 B does not rotate for revolving mirror；
And Fig. 2 C be revolving mirror rotate when irradiation area along line segment B-B ' intensity map；
Fig. 3 is the top view of the irradiation area of Fig. 1；
Fig. 4 is the timing diagram of the position of the irradiation area of Fig. 1 and the capture of image capture unit；
Fig. 5 is the structural schematic diagram of the linear light source of Fig. 1.
Specific embodiment
A plurality of embodiments of the invention will be disclosed with attached drawing below, it is as clearly stated, thin in many practices
Section will be explained in the following description.It should be appreciated, however, that the details in these practices is not applied to limit the present invention.?
That is details in these practices is non-essential in some embodiments of the present invention.In addition, for the sake of simplifying attached drawing,
Some known usual structures will be painted in a manner of simply illustrating in the accompanying drawings with element.
Fig. 1 is the perspective view of the three-dimensional appearance scanning system of an embodiment of the present invention.Three-dimensional appearance scanning system includes
Linear light source 110, revolving mirror 120 and image capture unit 130.Linear light source 110 provides Line beam 112.Revolving mirror 120 is by Line beam
112 reflex to tested surface 910, in formation irradiation area A on tested surface 910.Revolving mirror 120 rotates so that irradiation area A is put
It is dynamic, and the irradiation area A of different moments overlaps each other.Image capture unit 130 is to capture the irradiation area on tested surface 910
The image of A.For the sake of clarity, three moment are schematically painted in Fig. 1, that is, revolving mirror 120 is rotated to three kinds of angles, and
In three irradiation areas of formation on tested surface 910.
In some embodiments, tested surface 910 can be the surface of a platform 900.However in other implementations,
One determinand (not being painted) can be placed on platform 900, and three-dimensional appearance of the three-dimensional appearance scanning system to scan determinand.If
Three-dimensional appearance scanning system scans determinand, then tested surface is the table that determinand (with platform 900) is irradiated to by Line beam 112
Face.If the surface of three-dimensional appearance scanning system scanning platform 900, tested surface 910 is that platform 900 is irradiated to by Line beam 112
Surface.Herein for the sake of clarity, using the surface that platform 900 is irradiated to by Line beam 112 as the citing of tested surface 910.
By the three-dimensional appearance scanning system of present embodiment, the hot spot as caused by linear light source 110 (Speckle) can quilt
Blurring, generated erroneous judgement situation when reducing subsequent images analysis.Specifically, linear light source 110 provides Line beam 112,
Line beam 112 is that fechtable irradiation area A is anti-in forming linear irradiation area A, image capture unit 130 on platform 900
The characteristic information that should go out.If relative movement (such as platform 900 is mobile) between platform 900 and three-dimensional appearance scanning system, according to
The different places that region A exposes to platform 900 are penetrated, image capture unit 130 can obtain the global feature on 900 surface of platform whereby
Information.In the present embodiment, three-dimensional appearance scanning system is because Line beam 112 is in the irradiation area A meeting formed on tested surface 910
As the irradiation area A of time flutter, and different moments overlaps each other, therefore even if the meeting of Line beam 112 shape on tested surface 910
At hot spot, hot spot can be moved because of the irradiation area A of swing, and the hot spot on irradiation area A everywhere has different distributions figure
Case, this two kinds of factors cause hot spot to be blurred when irradiation area A is swung, and suppress or eliminate hot spot whereby and analyze subsequent images
Influence.
For example, the embodiment explanation of A to Fig. 2 C referring to figure 2..Fig. 2A is the signal of the image I ' of irradiation area A '
Figure, Fig. 2 B be revolving mirror when not rotating irradiation area A ' along line segment B-B ' intensity map, and when Fig. 2 C is that revolving mirror rotates
Intensity map of the irradiation area A ' along line segment B-B '.Show that determinand (not being painted) is the irradiation area A ' of plane in Fig. 2A.
If determinand has the surface of different height, irradiation area A ' will be deformed, that is, the position of irradiation area A ' each point can be with
The surface characteristics (as height) of determinand and deviate, the table of determinand can be calculated by the offset of analysis irradiation area A ' each point
Region feature.When revolving mirror does not rotate, hot spot has apparent brightness, therefore generates in the intensity map of Fig. 2 B multiple high
Peak.When analyzing offset (such as center of gravity for taking brightness distribution curve) at this, these summits become noise, so that analysis
Offset location inaccuracy.However when revolving mirror rotation, hot spot is blurred, and the brightness distribution curve of Fig. 2 C is smoother,
Therefore the offset location of analysis is more accurate.By above description, provable revolving mirror rotation can be such that hot spot is blurred, whereby
Obtain accurate analysis data.
Then please with reference to Fig. 1 and Fig. 3, wherein Fig. 3 is the top view of the irradiation area A of Fig. 1.In present embodiment
In, revolving mirror 120 rotates at any time, therefore Line beam 112 formed on tested surface 910 in different moments irradiation area A1,
A2 ..., An (hereinafter referred to as A1~An).Irradiation area A1~An on tested surface 910 has an extending direction D (or more
Speak by the book, be the length extending direction of irradiation area A1~An), revolving mirror 120 rotates so that irradiation area A1~An essence
It is swung along extending direction D.
Herein, " essence " be to modify it is any can slight variations relationship, but this slight variations can't change
Become its essence (in addition, " essence " mentioned in this article all can be using above-mentioned explanation, therefore just repeating no more).For example, " rotation
Tilting mirror 120 rotates so that irradiation area A1~An essence is swung along extending direction D ", this description is revolved in addition to representing revolving mirror 120
Turn so that irradiation area A1~An is really outer along extending direction D swing, as long as can achieve the purpose that improve hot spot, irradiation area
The orientation of A1~An can be slightly not parallel with extending direction D.
Because irradiation area A1~An is swung at any time, therefore the hot spot on each irradiation area A1~An is also and then swung,
So that hot spot is blurred.In this way, which the information of hot spot can be suppressed in image acquired by image capture unit 130.Again
In addition because irradiation area A1~An essence is along extending direction D swing, therefore while being blurred hot spot, irradiation area A1~
An is still able to maintain the precision in (the i.e. substantive direction for extending vertically direction D) scanning direction S.
Referring to figure 3..Each irradiation area A1~An has length L1, irradiation area A1~An pendulum along extending direction D
Dynamic amplitude of oscillation Δ is less than the length L1 of irradiation area A1~An.In other words, it will form an overlay region between irradiation area A1~An
Domain O, is indicated in Fig. 3 with site.In some embodiments, no matter how irradiation area A1~An swings, irradiation area A1
~An is all partially located in the O of overlapping region.For example, the length L1 of irradiation area A1~An can be about 100 millimeters, and the amplitude of oscillation
Δ is about 10 millimeters, therefore the length L2 of overlapping region O is about 80 millimeters, however the present invention is not limited with above-mentioned numerical value.
In some embodiments, the image capture unit 130 of Fig. 1 on tested surface 910 have a capture region I.It takes
As region I has a length L3 along extending direction D.The length L3 of capture region I is less than the length L1 of irradiation area A1~An.
In addition, the length L3 of capture region I can be substantially equal to or the length L2 less than overlapping region O.For above-mentioned example, capture
The length L3 of region I can be substantially equal to or less than 80 millimeters, however the present invention is not limited with above-mentioned numerical value.In other words, capture
Region I can be located in the O of overlapping region in the opposite end of extending direction D, and thus image capture unit 130 just will not be got
Image outside the O of overlapping region, therefore can avoid capturing the scintigraphic images generated because irradiation area A1~An is swung.
Then please with reference to Fig. 1 and Fig. 4, position and the image capture unit 130 that wherein Fig. 4 is the irradiation area A of Fig. 1
Capture timing diagram.In Fig. 4, line segment 202 indicates the position of irradiation area A.In some embodiments, revolving mirror 120
With speed, and image capture unit 130 has a capture frequency.For example, in Fig. 4,120 Yu Yimiao of revolving mirror
It inside has rotated five times, therefore speed is about 5Hz.And image capture unit 130 has respectively taken primary picture in time T1 and T2, and
Time T1 is about in 0.38 second, therefore capture frequency is about (1 second/0.38 second)=about 2.6Hz, however the present invention is not with above-mentioned
Numerical value is limited.On the other hand, the image acquired by time T1 to time T2 (time for exposure) of image capture unit 130 includes
Irradiation area A (or hot spot), to the accumulated change of position P2, achievees the effect that hot spot is blurred by position P1 whereby.Therefore, if
The speed of revolving mirror 120 be equal to image capture unit 130 capture frequency, acquired image may include by position P1 in place
All change in location of P1 ' (that is, revolving mirror 120 rotates once) are set, if the speed of revolving mirror 120 is greater than image capture
The capture frequency of device 130, that is, image capture unit 130, during a capture, the rotation of revolving mirror 120 is greater than once,
The change in location that acquired image includes is more.When the rotation of revolving mirror 120 is faster, then the speed that hot spot is swung is also faster, mould
The degree of gelatinization also just becomes apparent from.
It referring to figure 5., is the structural schematic diagram of the linear light source 110 of Fig. 1.In some embodiments, linear light source 110 wraps
Containing point light source 114 and cylindrical lenses 116.Point light source 114 provides the first light beam 115.Cylindrical lenses 116 are to by the first light beam
115 are deformed into Line beam 112.Herein, the luminous point of the first light beam 115 provided by point light source 114 is substantially non-linear, example
For example round, ellipse.Point light source 114 may be, for example, laser.The lens curved surface of cylindrical lenses 116 is bent in single axial, because
First light beam 115 can be made the deformation (such as spreading after convergence) of single axial by this, so that the first light beam 115 becomes Line beam
112.However the structure of above-mentioned linear light source 110 is merely illustrative, is not intended to limit the invention.Usual skill of the invention,
Can be according to actual demand, the composed structure of elasticity design linear light source 110.
Then Fig. 1 is gone back to.In some embodiments, revolving mirror 120 includes reflecting mirror 122 and rotating mechanism 124.Instead
Mirror 122 is penetrated with rotary shaft 123,123 essence of rotary shaft is located at the center of reflecting mirror 122.Rotating mechanism 124 connects reflecting mirror
122, so that reflecting mirror 122 is rotated along rotary shaft 123.Rotating mechanism 124 may be, for example, stepper motor or magnet, utilize machinery
Power or magnetic force drive reflecting mirror 122 to rotate.
In summary, the three-dimensional appearance scanning system of each embodiment of the present invention is because Line beam is in the photograph formed on tested surface
Penetrating region can be with time flutter, and the irradiation area of different moments overlaps each other, therefore even if Line beam can be on tested surface
Hot spot is formed, hot spot can be also blurred because of the irradiation area of swing.In this way, can be not required to additionally increase diffuser plate to disappear
Except hot spot.
Although the present invention is disclosed above with embodiment, however, it is not to limit the invention, any to be familiar with this skill
Person, without departing from the spirit and scope of the present invention, when can be used for a variety of modifications and variations, therefore protection scope of the present invention is worked as
Subject to the scope of which is defined in the appended claims.
Claims (9)
1. a kind of three-dimensional appearance scanning system, characterized by comprising:
One linear light source provides a Line beam；
The Line beam is reflexed to a tested surface by one revolving mirror, in forming an irradiation area on the tested surface, the wherein rotation
Mirror rotates so that the irradiation area is swung, and the irradiation area of different moments forms an overlapping region, and the irradiated region
Domain is positioned partially at except the overlapping region；And
One image capture unit, to capture the image of the irradiation area on the tested surface.
2. three-dimensional appearance scanning system according to claim 1, which is characterized in that the irradiation area tool on the tested surface
There is an extending direction, which rotates so that irradiation area essence is swung along the extending direction.
3. three-dimensional appearance scanning system according to claim 1, which is characterized in that the irradiation area tool on the tested surface
There is an extending direction, which has one first length along the extending direction, and the amplitude of oscillation which swings is less than
First length of the irradiation area.
4. three-dimensional appearance scanning system according to claim 1, which is characterized in that the irradiation area tool on the tested surface
There is an extending direction, which has one first length along the extending direction, and the image capture unit is to be measured in this
There is a capture region on face, which has one second length along the extending direction, second length be less than this
One length.
5. three-dimensional appearance scanning system according to claim 1, which is characterized in that the revolving mirror has a speed,
And the image capture unit has a capture frequency, which is equal to the capture frequency.
6. three-dimensional appearance scanning system according to claim 1, which is characterized in that the revolving mirror has a speed,
And the image capture unit has a capture frequency, which is greater than the capture frequency.
7. three-dimensional appearance scanning system according to claim 1, which is characterized in that the revolving mirror includes:
One reflecting mirror, has a rotary shaft, which is substantially located at the center of the reflecting mirror；And
One rotating mechanism connects the reflecting mirror, so that the reflecting mirror is rotated along the rotary shaft.
8. three-dimensional appearance scanning system according to claim 1, which is characterized in that the linear light source includes:
One point light source provides one first light beam；And
One cylindrical lenses, to be the Line beam by first light distortion.
9. three-dimensional appearance scanning system according to claim 1, which is characterized in that the Line beam is laser beam.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW104144714A TWI596359B (en) | 2015-12-31 | 2015-12-31 | Three-dimensional profile scanning system for suppressing laser speckle noise and improving stability |
| TW104144714 | 2015-12-31 |
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| Publication Number | Publication Date |
|---|---|
| CN106931899A CN106931899A (en) | 2017-07-07 |
| CN106931899B true CN106931899B (en) | 2019-07-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610946431.6A Expired - Fee Related CN106931899B (en) | 2015-12-31 | 2016-10-26 | Three-dimensional shape scanning system for inhibiting noise of laser spots and improving stability |
Country Status (2)
| Country | Link |
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| CN (1) | CN106931899B (en) |
| TW (1) | TWI596359B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109425995A (en) * | 2017-08-24 | 2019-03-05 | 陈致晓 | Laser illumination system and its laser facula removing method |
| CN107816952B (en) * | 2017-10-27 | 2023-11-17 | 长江三峡勘测研究院有限公司（武汉） | Method for obtaining whole three-dimensional image by layer-by-layer excavation engineering |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3879131A (en) * | 1974-02-06 | 1975-04-22 | Bell Telephone Labor Inc | Photomask inspection by real time diffraction pattern analysis |
| US4748335A (en) * | 1985-04-19 | 1988-05-31 | Siscan Systems, Inc. | Method and aparatus for determining surface profiles |
| CN2325758Y (en) * | 1997-07-09 | 1999-06-23 | 北京医科大学口腔医学院 | Laser scanning data acquisition device |
| CN1241255A (en) * | 1997-09-30 | 2000-01-12 | 株式会社珀蒂奥 | Three-dimensional shape measurement device and three-dimensional engraver using said measurement device |
| CN101598855A (en) * | 2008-06-02 | 2009-12-09 | 深圳市科创数字显示技术有限公司 | Laser projection imaging system |
| CN102016696A (en) * | 2007-12-13 | 2011-04-13 | 石井房雄 | Speckle reduction method |
| CN102428402A (en) * | 2009-05-21 | 2012-04-25 | 伊斯曼柯达公司 | Projection with lenslet arrangement on speckle reduction element |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011099816A (en) * | 2009-11-09 | 2011-05-19 | Sony Corp | Condenser lens and three-dimensional distance measuring device |
| CN102788573B (en) * | 2012-08-07 | 2014-07-30 | 深圳供电局有限公司 | Acquisition device for line-structure photo-fixation projection image |
| TWM491158U (en) * | 2014-06-17 | 2014-12-01 | Univ Nat Cheng Kung | Multiple light sources photoluminescent fluorescence capturing device |
| TWM492012U (en) * | 2014-08-19 | 2014-12-11 | 國立臺灣科技大學 | Multifunctional 3D scanning and printing apparatus |
-
2015
- 2015-12-31 TW TW104144714A patent/TWI596359B/en active
-
2016
- 2016-10-26 CN CN201610946431.6A patent/CN106931899B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3879131A (en) * | 1974-02-06 | 1975-04-22 | Bell Telephone Labor Inc | Photomask inspection by real time diffraction pattern analysis |
| US4748335A (en) * | 1985-04-19 | 1988-05-31 | Siscan Systems, Inc. | Method and aparatus for determining surface profiles |
| CN2325758Y (en) * | 1997-07-09 | 1999-06-23 | 北京医科大学口腔医学院 | Laser scanning data acquisition device |
| CN1241255A (en) * | 1997-09-30 | 2000-01-12 | 株式会社珀蒂奥 | Three-dimensional shape measurement device and three-dimensional engraver using said measurement device |
| CN102016696A (en) * | 2007-12-13 | 2011-04-13 | 石井房雄 | Speckle reduction method |
| CN101598855A (en) * | 2008-06-02 | 2009-12-09 | 深圳市科创数字显示技术有限公司 | Laser projection imaging system |
| CN102428402A (en) * | 2009-05-21 | 2012-04-25 | 伊斯曼柯达公司 | Projection with lenslet arrangement on speckle reduction element |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201723530A (en) | 2017-07-01 |
| TWI596359B (en) | 2017-08-21 |
| CN106931899A (en) | 2017-07-07 |
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