TW201723530A - Three-dimensional profile scanning system for suppressing laser speckle noise and improving stability - Google Patents
Three-dimensional profile scanning system for suppressing laser speckle noise and improving stability Download PDFInfo
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Abstract
Description
本發明是有關於一種三維形貌掃描系統。 The present invention is directed to a three dimensional topography scanning system.
三維掃描技術係分析物體之外觀(或幾何形狀)，其掃描到的訊號會進行三維重建計算，以得出實際物體的數位資訊。三角測距法為三維掃描技術的一種，其利用光源照射一物體，再藉由影像擷取裝置得到物體上之光束資訊。因光源、物體上的光束與影像擷取裝置形成一三角形，因此此種技術稱為三角測距法。 The 3D scanning technology analyzes the appearance (or geometry) of an object, and the scanned signal is subjected to 3D reconstruction calculation to obtain digital information of the actual object. The triangulation method is a kind of three-dimensional scanning technology, which uses a light source to illuminate an object, and then obtains beam information on the object by the image capturing device. Since the light source, the beam on the object and the image capturing device form a triangle, this technique is called a triangulation method.
在一些三角測距系統上，雷射可作為光源以照射待測物。因雷射具有高指向性、高同調性，因此待測物的特徵較便於識別。然而因雷射的高同調性，因此容易在粗糙表面上形成光斑(Speckle)，其來自於雷射打至粗糙表面形成散射光之間的干涉效應，進而產生不規則的斑點圖形。這些光斑可能會造成影像干擾，使得後續分析數據產生錯誤判斷。 On some triangulation systems, the laser can act as a light source to illuminate the object under test. Because the laser has high directivity and high homology, the characteristics of the object to be tested are easier to identify. However, due to the high homology of the laser, it is easy to form a speckle on the rough surface, which comes from the interference effect between the laser hitting the rough surface and forming the scattered light, thereby generating an irregular speckle pattern. These spots may cause image interference, which may cause misjudgment of subsequent analysis data.
本揭露提供一種三維形貌掃描系統，包含線光源、旋轉鏡與影像擷取裝置。線光源提供線光束。旋轉鏡將線光束反射至待測面，以於待測面上形成照射區域。旋轉鏡旋轉使得照射區域擺動，且不同時刻之照射區域互相重疊。影像擷取裝置用以擷取待測面上之照射區域的影像。 The present disclosure provides a three-dimensional topography scanning system including a line source, a rotating mirror, and an image capturing device. Line sources provide line beams. The rotating mirror reflects the line beam to the surface to be measured to form an illuminated area on the surface to be tested. The rotation of the rotating mirror causes the illumination area to oscillate, and the illumination areas at different times overlap each other. The image capturing device is used to capture an image of the illuminated area on the surface to be tested.
在上述實施方式中，三維形貌掃描系統因線光束於待測面上形成之照射區域會隨著時間擺動，且不同時刻之照射區域互相重疊，因此即使線光束會在待測面上形成光斑，光斑亦會因擺動之照射區域而模糊化。 In the above embodiment, the three-dimensional topography scanning system oscillates over time due to the illumination region formed by the line beam on the surface to be measured, and the illumination regions at different times overlap each other, so that even the line beam will form a spot on the surface to be tested. The spot will also be blurred by the illuminated area of the swing.
110‧‧‧線光源 110‧‧‧Line light source
112‧‧‧線光束 112‧‧‧Line beam
114‧‧‧點光源 114‧‧‧ point light source
115‧‧‧第一光束 115‧‧‧First beam
116‧‧‧柱狀透鏡 116‧‧‧ lenticular lens
120‧‧‧旋轉鏡 120‧‧‧Rotating mirror
900‧‧‧平台 900‧‧‧ platform
910‧‧‧待測面 910‧‧‧To be tested
D‧‧‧延伸方向 D‧‧‧ Extension direction
△‧‧‧擺幅 △‧‧‧ swing
I‧‧‧取像區域 I‧‧‧Image capture area
I’‧‧‧影像 I’‧‧‧ images
122‧‧‧反射鏡 122‧‧‧Mirror
123‧‧‧旋轉軸 123‧‧‧Rotary axis
124‧‧‧旋轉機構 124‧‧‧Rotating mechanism
130‧‧‧影像擷取裝置 130‧‧‧Image capture device
202、B-B’‧‧‧線段 202, B-B’‧‧‧ segment
A、A’、A1、A2、An‧‧‧照射區域 A, A’, A1, A2, An‧‧‧ illuminated areas
L1、L2、L3‧‧‧長度 L1, L2, L3‧‧‧ length
O‧‧‧重疊區域 O‧‧‧Overlapping area
P1、P1’、P2‧‧‧位置 P1, P1’, P2‧‧‧ position
S‧‧‧掃描方向 S‧‧‧ scan direction
T1、T2‧‧‧時間 T1, T2‧‧‧ time
第1圖為本發明一實施方式之三維形貌掃描系統的立體圖。 1 is a perspective view of a three-dimensional topography scanning system according to an embodiment of the present invention.
第2A圖為照射區域的影像之示意圖。 Figure 2A is a schematic illustration of an image of an illuminated area.
第2B圖為旋轉鏡未旋轉時照射區域沿線段B-B’的亮度分佈圖。 Fig. 2B is a graph showing the luminance distribution of the illumination region along the line segment B-B' when the rotating mirror is not rotated.
而第2C圖為旋轉鏡旋轉時照射區域沿線段B-B’的亮度分佈圖。 On the other hand, Fig. 2C is a luminance distribution diagram of the illumination region along the line segment B-B' when the rotating mirror is rotated.
第3圖為第1圖之照射區域之俯視圖。 Fig. 3 is a plan view of the irradiation area of Fig. 1.
第4圖為第1圖之照射區域之位置與影像擷取裝置之取像的時序圖。 Fig. 4 is a timing chart of the position of the irradiation area of Fig. 1 and the image capturing by the image capturing device.
第5圖為第1圖之線光源的結構示意圖。 Fig. 5 is a schematic view showing the structure of the line source of Fig. 1.
以下將以圖式揭露本發明的複數個實施方式，為明確說明起見，許多實務上的細節將在以下敘述中一併說明。然而，應瞭解到，這些實務上的細節不應用以限制本發明。也就是說，在本發明部分實施方式中，這些實務上的細節是非必要的。此外，為簡化圖式起見，一些習知慣用的結構與元件在圖式中將以簡單示意的方式繪示之。 The embodiments of the present invention are disclosed in the following drawings, and for the purpose of clarity However, it should be understood that these practical details are not intended to limit the invention. That is, in some embodiments of the invention, these practical details are not necessary. In addition, some of the conventional structures and elements are shown in the drawings in a simplified schematic manner in order to simplify the drawings.
第1圖為本發明一實施方式之三維形貌掃描系統的立體圖。三維形貌掃描系統包含線光源110、旋轉鏡120與影像擷取裝置130。線光源110提供線光束112。旋轉鏡120將線光束112反射至待測面910，以於待測面910上形成照射區域A。旋轉鏡120旋轉使得照射區域A擺動，且不同時刻之照射區域A互相重疊。影像擷取裝置130用以擷取待測面910上之照射區域A的影像。為了清楚起見，在第1圖中示意性繪示三個時刻，亦即旋轉鏡120旋轉至三種角度，而於待測面910上形成三個照射區域。 1 is a perspective view of a three-dimensional topography scanning system according to an embodiment of the present invention. The three-dimensional topography scanning system includes a line light source 110, a rotating mirror 120, and an image capturing device 130. Line source 110 provides a line beam 112. The rotating mirror 120 reflects the line beam 112 to the surface to be tested 910 to form an irradiation area A on the surface 910 to be tested. The rotating mirror 120 is rotated such that the irradiation area A is swung, and the irradiation areas A at different times overlap each other. The image capturing device 130 is configured to capture an image of the illuminated area A on the surface 910 to be tested. For the sake of clarity, three moments are schematically illustrated in FIG. 1, that is, the rotating mirror 120 is rotated to three angles, and three illumination areas are formed on the surface 910 to be tested.
在一些實施方式中，待測面910可為一平台900之表面。然而在其他的實施方式中，一待測物(未繪示)可置於平台900上，而三維形貌掃描系統用以掃描待測物之立體外觀。若三維形貌掃描系統掃描待測物，則待測面為待測物(與平台900)被線光束112照射到之表面。若三維形貌掃描系統掃描平台900之表面，則待測面910為平台900被線光束112照射 到之表面。在此為了清楚起見，以平台900被線光束112照射到之表面作為待測面910之舉例。 In some embodiments, the surface to be tested 910 can be the surface of a platform 900. However, in other embodiments, a test object (not shown) can be placed on the platform 900, and the three-dimensional topography scanning system is used to scan the stereoscopic appearance of the object to be tested. If the three-dimensional topography scanning system scans the object to be tested, the surface to be tested is the surface to which the object to be tested (and the platform 900) is irradiated by the line beam 112. If the three-dimensional topography scanning system scans the surface of the platform 900, the surface 910 to be tested is the platform 900 illuminated by the line beam 112. To the surface. For the sake of clarity, the surface on which the platform 900 is illuminated by the line beam 112 is taken as an example of the surface 910 to be tested.
藉由本實施方式之三維形貌掃描系統，由線光源110所產生的光斑(Speckle)可被模糊化，以減少後續影像分析時所產生的誤判情形。具體而言，線光源110提供線光束112，線光束112於平台900上形成線形之照射區域A，影像擷取裝置130即可擷取該照射區域A反應出的特徵資訊。若平台900與三維形貌掃描系統之間相對移動(例如平台900移動)，則照射區域A照射至平台900的不同地方，藉此影像擷取裝置130可取得平台900表面的整體特徵資訊。在本實施方式中，三維形貌掃描系統因線光束112於待測面910上形成之照射區域A會隨著時間擺動，且不同時刻之照射區域A互相重疊，因此即使線光束112會在待測面910上形成光斑，光斑會因擺動之照射區域A而移動，且照射區域A上各處之光斑具有不同的分佈圖案，此兩種因素在照射區域A擺動時造成光斑模糊化，藉此抑制或消除光斑對後續影像分析的影響。 With the three-dimensional topography scanning system of the present embodiment, the speckle generated by the line source 110 can be blurred to reduce the misjudgment caused by subsequent image analysis. Specifically, the line light source 110 provides a line beam 112, and the line beam 112 forms a linear illumination area A on the platform 900, and the image capturing device 130 can capture the characteristic information reflected by the illumination area A. If the platform 900 and the three-dimensional topography scanning system move relative to each other (for example, the platform 900 moves), the illumination area A is irradiated to different places of the platform 900, whereby the image capturing device 130 can obtain the overall feature information of the surface of the platform 900. In the present embodiment, the three-dimensional topography scanning system oscillates over time due to the illumination area A formed by the line beam 112 on the surface to be tested 910, and the illumination areas A at different times overlap each other, so even if the line beam 112 is to be treated A light spot is formed on the measuring surface 910, and the light spot moves due to the oscillating irradiation area A, and the light spots on the irradiation area A have different distribution patterns, and the two factors cause the light spot to be blurred when the irradiation area A is swung, thereby Inhibit or eliminate the effect of the spot on subsequent image analysis.
舉例而言，請參照第2A圖至第2C圖之實施例說明。第2A圖為照射區域A’的影像I’之示意圖，第2B圖為旋轉鏡未旋轉時照射區域A’沿線段B-B’的亮度分佈圖，而第2C圖為旋轉鏡旋轉時照射區域A’沿線段B-B’的亮度分佈圖。第2A圖中顯示待測物(未繪示)為平面之照射區域A’。若待測物具有不同高度之表面，則照射區域A’便會變形，亦即照射區域A’各點的位置會隨待測物之表面特徵(如高度)而偏移，藉由分析照射區域A’各點的偏移量可推算待測物之表面特徵。當旋轉鏡 未旋轉時，光斑具有明顯的亮度，因此在第2B圖之亮度分佈圖中產生多個高峰。當分析該處的偏移量(例如取亮度分佈曲線之重心)時，這些高峰會成為雜訊，使得分析之偏移量位置不準確。然而當旋轉鏡旋轉時，光斑被模糊化，第2C圖之亮度分佈曲線較平滑，因此分析之偏移量位置較為準確。藉由上述說明，可證明旋轉鏡旋轉可使光斑模糊化，藉此得到較準確之分析數據。 For example, please refer to the embodiment of FIGS. 2A to 2C for explanation. 2A is a schematic view of the image I′ of the irradiation area A′, FIG. 2B is a brightness distribution diagram of the irradiation area A′ along the line segment B-B′ when the rotating mirror is not rotated, and FIG. 2C is an irradiation area when the rotating mirror rotates. A' brightness distribution along line B-B'. Fig. 2A shows an object to be tested (not shown) as a planar illumination area A'. If the object to be tested has surfaces of different heights, the irradiation area A' will be deformed, that is, the position of each point of the irradiation area A' will be shifted with the surface features (such as height) of the object to be tested, by analyzing the irradiation area. The offset of each point of A' can estimate the surface features of the object to be tested. Rotating mirror When not rotated, the spot has a noticeable brightness, so a plurality of peaks are generated in the luminance profile of FIG. 2B. When analyzing the offset at this point (for example, taking the center of gravity of the luminance distribution curve), these peaks become noise, making the position of the offset of the analysis inaccurate. However, when the rotating mirror rotates, the spot is blurred, and the brightness distribution curve of FIG. 2C is smoother, so the offset position of the analysis is more accurate. From the above description, it can be proved that the rotation of the rotating mirror can blur the spot, thereby obtaining more accurate analysis data.
接著請一併參照第1圖與第3圖，其中第3圖為第1圖之照射區域A之俯視圖。在本實施方式中，旋轉鏡120隨時間旋轉，因此線光束112於不同時刻在待測面910上形成照射區域A1、A2、...、An(以下簡稱為A1~An)。待測面910上之照射區域A1~An具有一延伸方向D(或者更精確地說，為照射區域A1~An之長度延伸方向)，旋轉鏡120旋轉使得照射區域A1~An實質沿延伸方向D擺動。 Next, please refer to FIG. 1 and FIG. 3 together, and FIG. 3 is a plan view of the irradiation area A of FIG. In the present embodiment, the rotating mirror 120 rotates with time, and thus the line beam 112 forms the irradiation areas A1, A2, ..., An (hereinafter abbreviated as A1 to An) on the surface 910 to be tested at different timings. The irradiation areas A1 to An on the surface to be tested 910 have an extending direction D (or more precisely, the length extending direction of the irradiation areas A1 to An), and the rotating mirror 120 is rotated so that the irradiation areas A1 to An substantially extend along the extending direction D. swing.
在本文中，「實質」係用以修飾任何可些微變化的關係，但這種些微變化並不會改變其本質(另外，本文所提到之「實質」皆可應用上述解釋，因此便不再贅述)。舉例來說，「旋轉鏡120旋轉使得照射區域A1~An實質沿延伸方向D擺動」，此一描述除了代表旋轉鏡120旋轉使得照射區域A1~An確實沿延伸方向D擺動外，只要能夠達到改善光斑的目的，照射區域A1~An之排列方向可與延伸方向D略為不平行。 In this context, "substance" is used to modify any relationship that can be slightly changed, but such slight changes do not change its nature (in addition, the "substance" mentioned in this article can apply the above explanation, so it is no longer Brief description). For example, "the rotating mirror 120 is rotated such that the irradiation regions A1 to An are substantially swung in the extending direction D." This description is not only representative of the rotation of the rotating mirror 120, but also the irradiation regions A1 to An are actually swung in the extending direction D as long as the improvement can be achieved. For the purpose of the spot, the arrangement direction of the irradiation areas A1 to An may be slightly parallel to the extending direction D.
因照射區域A1~An隨時間擺動，因此每一照射區域A1~An上之光斑亦跟著擺動，使得光斑模糊化。如此一來，影像擷取裝置130所取得之影像中，光斑的資訊便可被抑制。 再加上，因照射區域A1~An實質沿延伸方向D擺動，因此在模糊化光斑的同時，照射區域A1~An仍能保持掃描方向S(即實質垂直延伸方向D之方向)的精度。 Since the irradiation areas A1 to An oscillate with time, the light spot on each of the irradiation areas A1 to An also oscillates, so that the light spots are blurred. In this way, the information of the spot can be suppressed in the image acquired by the image capturing device 130. Further, since the irradiation areas A1 to An are substantially swung in the extending direction D, the irradiation areas A1 to An can maintain the accuracy of the scanning direction S (that is, the direction of the substantially vertical extending direction D) while blurring the spots.
請參照第3圖。每一照射區域A1~An沿著延伸方向D具有長度L1，照射區域A1~An擺動的擺幅△小於照射區域A1~An之長度L1。換言之，照射區域A1~An之間會形成一重疊區域O，在第3圖中以網點表示。在一些實施方式中，不論照射區域A1~An如何擺動，照射區域A1~An皆部分位於重疊區域O中。舉例而言，照射區域A1~An之長度L1可為約100毫米，而擺幅△為約10毫米，因此重疊區域O之長度L2為約80毫米，然而本發明不以上述之數值為限。 Please refer to Figure 3. Each of the irradiation regions A1 to An has a length L1 along the extending direction D, and the swing Δ of the irradiation regions A1 to An is smaller than the length L1 of the irradiation regions A1 to An. In other words, an overlapping area O is formed between the irradiation areas A1 to An, and is represented by a halftone dot in FIG. In some embodiments, regardless of how the illumination regions A1 to An are swung, the illumination regions A1 to An are partially located in the overlap region O. For example, the length L1 of the irradiation areas A1 to An may be about 100 mm, and the swing width Δ is about 10 mm, so the length L2 of the overlapping area O is about 80 mm, but the present invention is not limited to the above numerical values.
在一些實施方式中，第1圖之影像擷取裝置130於待測面910上具有一取像區域I。取像區域I沿著延伸方向D具有一長度L3。取像區域I之長度L3小於照射區域A1~An之長度L1。另外，取像區域I之長度L3可實質等於或小於重疊區域O之長度L2。以上述之例子而言，取像區域I之長度L3可實質等於或小於80毫米，然而本發明不以上述之數值為限。換言之，取像區域I於延伸方向D的相對兩端可位於重疊區域O中，如此一來影像擷取裝置130便不會取到重疊區域O外的影像，因此可避免擷取因照射區域A1~An擺動而產生之閃爍影像。 In some embodiments, the image capturing device 130 of FIG. 1 has an image capturing area I on the surface 910 to be tested. The image capturing area I has a length L3 along the extending direction D. The length L3 of the image capturing area I is smaller than the length L1 of the irradiation areas A1 to An. In addition, the length L3 of the image capturing area I may be substantially equal to or smaller than the length L2 of the overlapping area O. In the above example, the length L3 of the image capturing area I may be substantially equal to or less than 80 mm, but the present invention is not limited to the above numerical values. In other words, the opposite ends of the image capturing area I in the extending direction D can be located in the overlapping area O, so that the image capturing device 130 does not capture the image outside the overlapping area O, so that the capturing area A1 can be avoided. ~An flashing image produced by the swing.
接著請一併參照第1圖與第4圖，其中第4圖為第1圖之照射區域A之位置與影像擷取裝置130之取像的時序圖。在第4圖中，線段202表示照射區域A之位置。在一些實施方式中，旋轉鏡120具有旋轉頻率，且影像擷取裝置130具有一取 像頻率。舉例而言，在第4圖中，旋轉鏡120於一秒內旋轉了五次，因此旋轉頻率為約5Hz。而影像擷取裝置130於時間T1與T2各取了一次像，而時間T1大約於0.38秒，因此取像頻率為約(1秒/0.38秒)=約2.6Hz，然而本發明不以上述之數值為限。另一方面，影像擷取裝置130於時間T1到時間T2(曝光時間)所取得的影像，包含照射區域A(或光斑)由位置P1到位置P2的累積變化，藉此達到光斑模糊化的效果。因此，若旋轉鏡120之旋轉頻率等於影像擷取裝置130之取像頻率，所取得影像可包含由位置P1到位置P1’(亦即旋轉鏡120旋轉一次)的所有位置變化，若旋轉鏡120之旋轉頻率大於影像擷取裝置130之取像頻率，也就是影像擷取裝置130在一次取像期間，旋轉鏡120旋轉大於一次，所取得影像包含的位置變化越多。當旋轉鏡120旋轉越快，則光斑擺動的速度也越快，其模糊化的程度也就更明顯。 Next, please refer to FIG. 1 and FIG. 4 together. FIG. 4 is a timing chart of the position of the irradiation area A in FIG. 1 and the image capturing device 130. In Fig. 4, the line segment 202 indicates the position of the irradiation area A. In some embodiments, the rotating mirror 120 has a rotation frequency, and the image capturing device 130 has a Like frequency. For example, in Figure 4, the rotating mirror 120 is rotated five times in one second, so the rotational frequency is about 5 Hz. The image capturing device 130 takes an image once at times T1 and T2, and the time T1 is about 0.38 seconds, so the image capturing frequency is about (1 second / 0.38 seconds) = about 2.6 Hz, but the present invention does not The value is limited. On the other hand, the image captured by the image capturing device 130 from time T1 to time T2 (exposure time) includes the cumulative change of the illumination area A (or the spot) from the position P1 to the position P2, thereby achieving the effect of blurring the spot. . Therefore, if the rotation frequency of the rotating mirror 120 is equal to the image capturing frequency of the image capturing device 130, the acquired image may include all positional changes from the position P1 to the position P1' (ie, the rotating mirror 120 rotates once), if the rotating mirror 120 The rotation frequency is greater than the image capturing frequency of the image capturing device 130, that is, the image capturing device 130 rotates the mirror 120 more than once during one image capturing, and the position of the captured image includes more changes. As the rotating mirror 120 rotates faster, the speed at which the spot oscillates is also faster, and the degree of blurring is more pronounced.
請參照第5圖，其為第1圖之線光源110的結構示意圖。在一些實施方式中，線光源110包含點光源114與柱狀透鏡116。點光源114提供第一光束115。柱狀透鏡116用以將第一光束115變形為線光束112。在本文中，點光源114所提供之第一光束115的光點實質上非線形，例如為圓形、楕圓形。點光源114例如可為雷射。柱狀透鏡116之透鏡曲面呈單一軸向彎曲，因此可將第一光束115作單一軸向的變形(例如收斂後擴散)，使得第一光束115變為線光束112。然而上述之線光源110的結構僅為示例，並非用以限制本發明。本發明之通常知識者，可依實際需求，彈性設計線光源110的組成結構。 Please refer to FIG. 5 , which is a schematic structural view of the line source 110 of FIG. 1 . In some embodiments, line source 110 includes point source 114 and lenticular lens 116. Point source 114 provides a first beam 115. The lenticular lens 116 is used to deform the first beam 115 into a line beam 112. Herein, the spot of the first beam 115 provided by the point source 114 is substantially non-linear, such as circular, rounded. The point source 114 can be, for example, a laser. The lens surface of the lenticular lens 116 is curved in a single direction, so that the first beam 115 can be deformed in a single axial direction (for example, after convergence), so that the first beam 115 becomes the line beam 112. However, the above structure of the line source 110 is merely an example and is not intended to limit the present invention. The general knowledge of the present invention can flexibly design the composition of the line source 110 according to actual needs.
接著請回到第1圖。在一些實施方式中，旋轉鏡120包含反射鏡122與旋轉機構124。反射鏡122具有旋轉軸123，旋轉軸123實質位於反射鏡122之中心。旋轉機構124連接反射鏡122，使得反射鏡122沿著旋轉軸123轉動。旋轉機構124例如可為步進馬達或磁鐵，利用機械力或磁力驅使反射鏡122轉動。 Then please return to Figure 1. In some embodiments, the rotating mirror 120 includes a mirror 122 and a rotating mechanism 124. The mirror 122 has a rotating shaft 123 that is substantially at the center of the mirror 122. The rotating mechanism 124 is coupled to the mirror 122 such that the mirror 122 rotates along the rotating shaft 123. The rotating mechanism 124 can be, for example, a stepping motor or a magnet, and the mirror 122 is driven to rotate by mechanical force or magnetic force.
綜合上述，本發明各實施方式之三維形貌掃描系統因線光束於待測面上形成之照射區域會隨著時間擺動，且不同時刻之照射區域互相重疊，因此即使線光束會在待測面上形成光斑，光斑亦會因擺動之照射區域而被模糊化。如此一來，可不需額外增加擴散板來消除光斑。 In summary, the three-dimensional topography scanning system of the embodiments of the present invention oscillates over time due to the illumination region formed by the line beam on the surface to be measured, and the illumination regions at different times overlap each other, so that even the line beam will be on the surface to be tested. A spot is formed on the spot, and the spot is also blurred by the oscillating area. In this way, it is possible to eliminate the flare without adding an additional diffusion plate.
雖然本發明已以實施方式揭露如上，然其並非用以限定本發明，任何熟習此技藝者，在不脫離本發明之精神和範圍內，當可作各種之更動與潤飾，因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and the present invention can be modified and modified without departing from the spirit and scope of the present invention. The scope is subject to the definition of the scope of the patent application attached.
110‧‧‧線光源 110‧‧‧Line light source
112‧‧‧線光束 112‧‧‧Line beam
120‧‧‧旋轉鏡 120‧‧‧Rotating mirror
122‧‧‧反射鏡 122‧‧‧Mirror
123‧‧‧旋轉軸 123‧‧‧Rotary axis
124‧‧‧旋轉機構 124‧‧‧Rotating mechanism
130‧‧‧影像擷取裝置 130‧‧‧Image capture device
900‧‧‧平台 900‧‧‧ platform
910‧‧‧待測面 910‧‧‧To be tested
A、A1、An‧‧‧照射區域 A, A1, An‧‧‧ illuminated areas
I‧‧‧取像區域 I‧‧‧Image capture area
O‧‧‧重疊區域 O‧‧‧Overlapping area
Claims (9)
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| Application Number | Priority Date | Filing Date | Title |
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| TW104144714A TWI596359B (en) | 2015-12-31 | 2015-12-31 | Three-dimensional profile scanning system for suppressing laser speckle noise and improving stability |
| CN201610946431.6A CN106931899B (en) | 2015-12-31 | 2016-10-26 | Three-dimensional shape scanning system for inhibiting noise of laser spots and improving stability |
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| TW104144714A TWI596359B (en) | 2015-12-31 | 2015-12-31 | Three-dimensional profile scanning system for suppressing laser speckle noise and improving stability |
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| TW201723530A true TW201723530A (en) | 2017-07-01 |
| TWI596359B TWI596359B (en) | 2017-08-21 |
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| CN109425995A (en) * | 2017-08-24 | 2019-03-05 | 陈致晓 | Laser illumination system and its laser facula removing method |
| CN107816952B (en) * | 2017-10-27 | 2023-11-17 | 长江三峡勘测研究院有限公司（武汉） | Method for obtaining whole three-dimensional image by layer-by-layer excavation engineering |
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| US3879131A (en) * | 1974-02-06 | 1975-04-22 | Bell Telephone Labor Inc | Photomask inspection by real time diffraction pattern analysis |
| US4748335A (en) * | 1985-04-19 | 1988-05-31 | Siscan Systems, Inc. | Method and aparatus for determining surface profiles |
| CN2325758Y (en) * | 1997-07-09 | 1999-06-23 | 北京医科大学口腔医学院 | Laser scanning data acquisition device |
| JPH11108633A (en) * | 1997-09-30 | 1999-04-23 | Peteio:Kk | Three-dimensional shape measuring device and three-dimensional engraving device using the same |
| US7706048B2 (en) * | 2003-11-01 | 2010-04-27 | Silicon Quest Kabushiki-Kaisha | Speckle reduction method |
| CN101598855A (en) * | 2008-06-02 | 2009-12-09 | 深圳市科创数字显示技术有限公司 | Laser projection imaging system |
| US8172404B2 (en) * | 2009-05-21 | 2012-05-08 | Eastman Kodak Company | Projection with lenslet arrangement on speckle reduction element |
| JP2011099816A (en) * | 2009-11-09 | 2011-05-19 | Sony Corp | Condenser lens and three-dimensional distance measuring device |
| CN102788573B (en) * | 2012-08-07 | 2014-07-30 | 深圳供电局有限公司 | Acquisition device for line-structure photo-fixation projection image |
| TWM491158U (en) * | 2014-06-17 | 2014-12-01 | Univ Nat Cheng Kung | Multiple light sources photoluminescent fluorescence capturing device |
| TWM492012U (en) * | 2014-08-19 | 2014-12-11 | 國立臺灣科技大學 | Multifunctional 3D scanning and printing apparatus |
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