CN106926111A - A kind of pleasure boat piece and processing method for processing silicon ring - Google Patents
A kind of pleasure boat piece and processing method for processing silicon ring Download PDFInfo
- Publication number
- CN106926111A CN106926111A CN201510992119.6A CN201510992119A CN106926111A CN 106926111 A CN106926111 A CN 106926111A CN 201510992119 A CN201510992119 A CN 201510992119A CN 106926111 A CN106926111 A CN 106926111A
- Authority
- CN
- China
- Prior art keywords
- silicon ring
- pleasure boat
- boat piece
- silicon
- inner circle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
Abstract
The invention discloses a kind of pleasure boat piece and processing method for processing silicon ring.The pleasure boat piece includes body and is arranged on body to be used for the inner circle for carrying silicon ring, and polishing cloth is posted in the inwall of the inner circle.Comprised the following steps using the method for pleasure boat piece processing silicon ring：(1) the silicon ring after corrosion is placed in the inner circle of pleasure boat piece and silicon ring is polished, external diameter surface while polishing to silicon ring front surface to silicon ring is polished, by the removal amount for adjusting the rotational velocity of pleasure boat piece to adjust external diameter surface；(2) after twin polishing, silicon ring is cleaned using acid or alkali.The present invention is processed using the pleasure boat piece after improving to silicon ring, improves the surface quality of silicon ring.Specifically, the part inner circle that silicon ring is put in pleasure boat piece of the invention sticks polishing cloth, and external diameter surface is polished while upper and lower surface is polished, and required surface can be reached by adjusting the rotational velocity of pleasure boat piece.
Description
Technical field
The present invention relates to a kind of pleasure boat piece and processing method for processing silicon ring, belong to semiconductor material technology
Field.
Background technology
, it is necessary to the interlayer insulating film of formation on silicon wafer typically when semiconductor integrated circuit is manufactured
(SiO2) perform etching technique.In order to be performed etching to the silicon chip with insulating barrier, plasma etching is used
Device.In the plasma etching device, etching gas by be arranged at silicon electrode plate through pore direction
Silicon chip simultaneously applies high frequency voltage simultaneously, so as to be generated between plasma etching silicon electrode plate and silicon chip
Plasma, the action of plasma is in silicon chip, so as to realize the etching to silicon chip surface insulating barrier.At this
During, silicon chip is placed on slide holder (silicon parts).Due to technique or the difference of die size, slide glass
The structure of platform (silicon parts) is also different, is referred to as silicon ring.
In plasma etching silicon chip, carrying the silicon ring of silicon chip can also be subject to the corrasion of plasma,
If the surface of silicon ring is present if damage, various impurity can be produced in etching process, to silicon chip to be etched
Cause to stain, influence the yield of final products, therefore it is polished surface to generally require the surface of silicon ring.Silicon ring
Overall structure generally uses machining center completion, obtains perfect using corrosion and cmp method afterwards
Surface.But the external diameter surface of silicon ring is not contacted with polishing cloth in polishing process, therefore chemical machine can not be carried out
Tool is polished, and influences the surface quality of silicon ring.
The content of the invention
It is an object of the invention to provide a kind of pleasure boat piece for processing silicon ring, can be same using the pleasure boat piece
When polishing silicon ring front surface and external diameter surface.
Another object of the present invention is to provide a kind of method that silicon ring is processed using the pleasure boat piece, the method
Simple and easy to apply, efficiency is higher, substantially reduces external diameter surface process time.
To achieve the above object, the present invention uses following technical scheme：
A kind of pleasure boat piece for processing silicon ring, the pleasure boat piece includes body and is arranged on body to be used to carry
The inner circle of silicon ring, polishing cloth is posted in the inwall of the inner circle.
Preferably, the inner circle of several different sizes is provided with the pleasure boat piece, for carrying different size
Silicon ring.The material of the pleasure boat piece is metal, PVC or resin.
A kind of method that silicon ring is processed using the pleasure boat piece, is comprised the following steps：
(1) the silicon ring after corrosion is placed in the inner circle of pleasure boat piece and silicon ring is polished, to the positive table of silicon ring
External diameter surface while mirror polish to silicon ring is polished, and is adjusted by adjusting the rotational velocity of pleasure boat piece
The removal amount of external diameter surface；
(2) after twin polishing, silicon ring is cleaned using acid or alkali.
Preferably, the rotational velocity of the pleasure boat piece is 1-100 revs/min, and polishing time is 1min-2h.It is described
The external diameter surface removal amount of silicon ring is 1-100 μm.
The advantage of the invention is that：
The present invention is processed using the pleasure boat piece after improving to silicon ring, improves the surface quality of silicon ring.Specifically
For, the part inner circle that the present invention puts silicon ring in pleasure boat piece sticks polishing cloth, in upper and lower surface polishing
External diameter surface is polished simultaneously, and can be reached by adjusting the rotational velocity of pleasure boat piece required
Surface.
The present invention particularly improves silicon ring surface quality aspect very useful in the processing of silicon ring.The present invention can be with
It is used in the silicon ring processing technology of commercial any diameter.
Brief description of the drawings
Fig. 1 is the structural representation of pleasure boat piece of the invention.
Specific embodiment
Below in conjunction with drawings and Examples, the invention will be further described, but the present invention is not limited thereto.
As shown in figure 1, the present invention is for processing the pleasure boat piece of silicon ring including body 1 and being arranged on body 1
Inner circle 3 for carrying several different sizes of the silicon ring 2 of different size, posts on the inwall of the inner circle 3
Polishing cloth 4.Used as pleasure boat piece, its material is metal, PVC or resin.
Use the method for above-mentioned pleasure boat piece processing silicon ring for：
(1) the silicon ring after corrosion is placed in the inner circle of pleasure boat piece and silicon ring is polished, to the positive table of silicon ring
External diameter surface while mirror polish to silicon ring is polished, and is adjusted by adjusting the rotational velocity of pleasure boat piece
The removal amount of external diameter surface；Preferably, the rotational velocity of pleasure boat piece is 1-100 revs/min, and polishing time is
1min-2h, the external diameter surface removal amount of silicon ring is 1-100 μm；
(2) after twin polishing, silicon ring is cleaned using acid or alkali using conventional method.
Embodiment
Using pleasure boat piece of the invention and processing method, it is polished on Twp-sided polishing machine, is used after polishing
Vernier caliper measurement goes dangerous amount, and the smart rugosity of external diameter surface is measured using roughmeter.Test result is as follows：
| Rotational velocity (rev/min) | 0 | 3 | 6 |
| Removal amount (μm) | 0 | 5.4 | 12.2 |
| Roughness (μm) | 1.141 | 0.53 | 0.116 |
| Surface condition | Erosional surface | Minute surface | Minute surface |
As can be seen from the results, using the pleasure boat piece in the present invention, the external diameter of silicon ring can be polished,
The removal amount of polishing can be adjusted by adjusting rotational velocity, so as to obtain high-quality silicon ring product.
Claims (6)
1. a kind of pleasure boat piece for processing silicon ring, it is characterised in that the pleasure boat piece includes body and is arranged on
It is used to carry the inner circle of silicon ring on body, polishing cloth is posted in the inwall of the inner circle.
2. pleasure boat piece according to claim 1, it is characterised in that be provided with the pleasure boat piece several
The inner circle of different size, the silicon ring for carrying different size.
3. pleasure boat piece according to claim 1, it is characterised in that the material of the pleasure boat piece be metal,
PVC or resin.
4. the method that the pleasure boat piece described in a kind of use claim 1 processes silicon ring, it is characterised in that including
Following steps：
(1) the silicon ring after corrosion is placed in the inner circle of pleasure boat piece and silicon ring is polished, to the positive table of silicon ring
External diameter surface while mirror polish to silicon ring is polished, and is adjusted by adjusting the rotational velocity of pleasure boat piece
The removal amount of external diameter surface；
(2) after twin polishing, silicon ring is cleaned using acid or alkali.
5. method according to claim 4, it is characterised in that the rotational velocity of the pleasure boat piece is 1-100
Rev/min, polishing time is 1min-2h.
6. method according to claim 4, it is characterised in that the external diameter surface removal amount of the silicon ring
It is 1-100 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510992119.6A CN106926111A (en) | 2015-12-24 | 2015-12-24 | A kind of pleasure boat piece and processing method for processing silicon ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510992119.6A CN106926111A (en) | 2015-12-24 | 2015-12-24 | A kind of pleasure boat piece and processing method for processing silicon ring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106926111A true CN106926111A (en) | 2017-07-07 |
Family
ID=59457168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510992119.6A Pending CN106926111A (en) | 2015-12-24 | 2015-12-24 | A kind of pleasure boat piece and processing method for processing silicon ring |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106926111A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109926908A (en) * | 2017-12-15 | 2019-06-25 | 有研半导体材料有限公司 | A kind of processing method of silicon ring |
| CN111318961A (en) * | 2018-12-13 | 2020-06-23 | 有研半导体材料有限公司 | Method for processing silicon ring |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202428296U (en) * | 2011-12-06 | 2012-09-12 | 有研半导体材料股份有限公司 | Loose wheel sheet for polishing silicon wafer |
| CN202964416U (en) * | 2012-11-16 | 2013-06-05 | 有研半导体材料股份有限公司 | Disk trimming device for trimming large disk of double-surface polishing machine |
| CN203804287U (en) * | 2014-05-12 | 2014-09-03 | 赣州鑫磊稀土新材料有限公司 | Knife capable of processing inner and outer cylindrical faces at same time |
| CN204053778U (en) * | 2014-08-15 | 2014-12-31 | 安徽省巢湖市宏顺机械铸造有限公司 | Single station wheel hub inside and outside circle sander |
| JP2015041643A (en) * | 2013-08-20 | 2015-03-02 | 信越半導体株式会社 | Double-sided polishing method for wafer |
-
2015
- 2015-12-24 CN CN201510992119.6A patent/CN106926111A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202428296U (en) * | 2011-12-06 | 2012-09-12 | 有研半导体材料股份有限公司 | Loose wheel sheet for polishing silicon wafer |
| CN202964416U (en) * | 2012-11-16 | 2013-06-05 | 有研半导体材料股份有限公司 | Disk trimming device for trimming large disk of double-surface polishing machine |
| JP2015041643A (en) * | 2013-08-20 | 2015-03-02 | 信越半導体株式会社 | Double-sided polishing method for wafer |
| CN203804287U (en) * | 2014-05-12 | 2014-09-03 | 赣州鑫磊稀土新材料有限公司 | Knife capable of processing inner and outer cylindrical faces at same time |
| CN204053778U (en) * | 2014-08-15 | 2014-12-31 | 安徽省巢湖市宏顺机械铸造有限公司 | Single station wheel hub inside and outside circle sander |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109926908A (en) * | 2017-12-15 | 2019-06-25 | 有研半导体材料有限公司 | A kind of processing method of silicon ring |
| CN111318961A (en) * | 2018-12-13 | 2020-06-23 | 有研半导体材料有限公司 | Method for processing silicon ring |
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|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170707 |