CN106920767A - A kind of mask plate is fitted and separator with sample - Google Patents
A kind of mask plate is fitted and separator with sample Download PDFInfo
- Publication number
- CN106920767A CN106920767A CN201710196782.4A CN201710196782A CN106920767A CN 106920767 A CN106920767 A CN 106920767A CN 201710196782 A CN201710196782 A CN 201710196782A CN 106920767 A CN106920767 A CN 106920767A
- Authority
- CN
- China
- Prior art keywords
- sample
- casing
- mask plate
- case
- supporting plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/682—Mask-wafer alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Toys (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
The invention discloses fitting and separator for a kind of mask plate and sample, it includes casing, case, magnetic force unit and supporting plate, and the supporting plate is provided with spring, and the case is combined located at the bottom of casing, and case with casing；In case, the spring in supporting plate is connected the supporting plate with casing.The present invention sets the structure of posting using being set in casing on magnetic force unit, on the supporting plate setting spring and case, by the ferromagnetism of mask plate, adsorbed by magnetic force unit makes mask plate and sample laminating vertically be realized under the restriction of posting and is separated with the pressing of spring.The scuffing that mask plate and sample room occur side-friction and cause is avoided, operation more fast and easily advantage high with laminating precision.
Description
Technical field
The present invention relates to fitting and separator for electronic technology field, especially a kind of mask plate and sample.
Background technology
With the progress and the development of semiconductor fabrication process of science and technology, the area of semiconductor chip is less and less, city
To the required precision of semiconductor devices also more and more higher, the precision of semiconductor devices how is lifted, reduce semiconductor devices
Product defects, improves the yield rate of product, as the important process problem that semiconductor devices production circle is badly in need of solving.Hot evaporation and
Photoetching process is indispensable process in whole semiconductor fabrication processes.Either hot evaporation or photoetching process, existing skill
The technique of art is all, using the method for contact mask, mask plate to be directly placed on sample to be processed, and sample is added
Work treatment.Traditional way is that mask plate is fitted on sample with tweezers, and mask plate is slided by mask plate and sample by tweezers
Product align, and after sample is machined, also need to be separated mask plate with sample with tweezers.The problem of presence will be covered with tweezers
Film version and sample laminating, the process alignd and be separate, can make occur horizontal cut between mask plate and sample unavoidably, cause product
The corresponding defect of generation, while also causing certain abrasion to mask plate.The mask plate for particularly directly being contacted with semiconductor layer,
Substantial amounts of cut can be remained in semiconductor surface after so operating, have a strong impact on the mobility of semiconductor devices, reduce product
The qualification rate for going out.
The content of the invention
A kind of mask plate that the present invention is provided in view of the shortcomings of the prior art is fitted and separator with sample, this hair
It is bright magnetic force unit to be set using in upper box, the structure of setting posting on spring and case is set on the supporting plate, by
The ferromagnetism of mask plate, adsorbed by magnetic force unit makes mask plate and sample be hung down in the restriction lower edge of posting with the pressing of spring
Nogata is to realization laminating and separates.The scuffing that mask plate occurs side-friction and causes with sample room is avoided, with laminating essence
Accuracy is high, operation more fast and easily advantage.
Realizing the concrete technical scheme of the object of the invention is：
A kind of mask plate is fitted and separator with sample, is characterized in that the device includes：
One top surface is provided with the rectangular box that switch base, bottom surface are provided with metal holder, and metal holder is provided with spring base；
One suitable for reading to be provided with the rectangle case that interface, lower mouth are provided with the inversed taper platform of posting；
One magnetic force unit being made up of solenoid, plain conductor, battery and button switch, and plain conductor is by solenoid, electricity
Electrically connected between pond and button switch；
One corner is provided with the supporting plate of spring；
The case is combined located at the bottom of casing, and the interface of case with the periphery of metal holder on casing；
In case, the spring in supporting plate is connected the supporting plate with the spring base of metal holder on casing；
On the switch base of casing, solenoid, plain conductor and battery are located in casing the button switch of the magnetic force unit,
And solenoidal axis points to top surface and the bottom surface of casing；
Described solenoidal axis overlaps with the geometrical axis of upper box；The face extensions of described metal holder are in top box
The periphery of external side.
The present invention sets using magnetic force unit is set in casing, on the supporting plate and posting is set on spring and case
Structure, by the ferromagnetism of mask plate, adsorbed by magnetic force unit makes mask plate and sample in posting with the pressing of spring
Laminating is vertically realized under restriction and is separated.The scuffing that mask plate occurs side-friction and causes with sample room is avoided,
It is high with laminating precision, operation more fast and easily advantage.
Brief description of the drawings
Fig. 1 is structural representation of the invention；
Fig. 2 is the use state schematic diagram of mask plate and supporting plate absorption；
Fig. 3 is the laminating of mask plate and sample or separate use state schematic diagram.
Specific embodiment
Refering to Fig. 1, the present invention includes：
One top surface is provided with the rectangular box 1 that switch base 11, bottom surface is provided with metal holder 12, and metal holder 12 is provided with
Spring base 13；
One suitable for reading to be provided with the rectangle case 2 that interface 22, lower mouth are provided with the inversed taper platform of posting 21；
One magnetic force unit 3 being made up of solenoid 31, plain conductor 32, battery 33 and button switch 34, and plain conductor 32
Solenoid 31, battery 33 and button switch 34 are electrically connected；
One corner is provided with the supporting plate 4 of spring 41；
The case 2 is combined located at the bottom of casing 1, and the interface 22 of case 2 with the periphery of metal holder 12 on casing 1；
In case 2, the spring 41 in supporting plate 4 connects the supporting plate 4 with the spring base 13 of metal holder 12 on casing 1
Connect；
The button switch 34 of the magnetic force unit 3 is located on the switch base 11 of casing 1, solenoid 31, plain conductor 32 and battery
33 in the casing 1, and the axis of solenoid 31 points to top surface and the bottom surface of casing 1.
The axis of described solenoid 31 overlaps with the geometrical axis of upper box 1.
The face extensions of described metal holder 12 are in the periphery in the outside of upper box 1.
Embodiment
Refering to Fig. 3, the present invention for mask plate 5 and sample 6 laminating and separate, be ready to the mask plate 5 to be fitted and
Sample 6, and processing mask plate 5 and the profile of sample 6 be engaged with the shape of posting 21 on case 2.
A) when, mask plate is fitted with sample
Refering to Fig. 1-3, mask plate 5 is placed on fixed platform first, places this invention into the top of mask plate 5, and made
The alignment mask of posting 21 version 5 on case 2, is exerted a force by casing of the present invention 1 and down press, and makes the smoothly embedded case 2 of mask plate 5
On posting 21 in, and fitted with supporting plate 4.
Release the button switch 34, solenoid 31 is powered and produces magnetic force, and the magnetic force that solenoid 31 is produced compresses spring 41, will
Mask plate 5 is adsorbed in supporting plate 4, and upward displacement is produced in case 2 together with supporting plate 4.
Sample 6 is placed on fixed platform again, places this invention into the top of sample 6, and make the positioning on case 2
Frame 21 is directed at sample 6, is exerted a force by casing of the present invention 1 and down press, and makes in the posting 21 on the stable embedded case 2 of sample 6, this
When, X button switch 34, the power-off magnetic force of solenoid 31 disappears, and spring 41 recovers deformation, and the elastic force of spring 41 connects supporting plate 4
Pushed down on mask plate 5, make supporting plate 4 that downward displacement is produced in the case 2, until sample 6, mask plate 5 and supporting plate 4 according to
Secondary laminating；The present invention is moved away from fixed platform, sample 6 aligns with mask plate 5 and stays on the stationary platform, completes sample 6 and cover
The successfully laminating of film version 5.
B) when, mask plate is separated with sample
Refering to Fig. 1-3, first by it is processed into mask plate 5 be placed on fixed platform with sample 6, place this invention into
The top of mask plate 5 and sample 6, and make the alignment mask of posting 21 version 5 and sample 6 on case 2, switch 34 of releasing the button,
Solenoid 31 is powered and produces magnetic force, and the magnetic force that solenoid 31 is produced compresses spring 41, mask plate 5 is adsorbed in supporting plate 4,
And make mask plate 5 that upward displacement is produced in case 2 together with supporting plate 4, now, sample 6 is just individually stayed on the stationary platform,
The present invention is moved away from fixed platform, the sample 6 being detained on the stationary platform is done into corresponding preservation, complete sample 6 and mask plate 5
Successfully separate.
C), the technique effect produced by the present invention
Refering to Fig. 1-3, during use of the invention so that mask plate 5 and sample 6 fit and separation process is all in sample
6 complete with the direction of the relative vertical movement of mask plate 5, simultaneously as the profile of sample 6 and mask plate 5 be all finishing and
Into, and with case 2 on the precision-fit of posting 21, so, mask plate 5 is higher with the precision that sample 6 is fitted, and overcomes completely
Present situation that traditional handicraft need to can be calibrated by transverse shifting, it is to avoid side-friction between mask plate 5 and sample 6 and make
Into scuffing, the operation for making is more efficient and convenient.
Refering to Fig. 3, for the sample 6 of different specification size, as long as making the mask plate 5 and posting 21 of correspondingly-sized,
Can implement to the laminating of different specification size mask plate 5 and sample 6 and separate.
Refering to Fig. 1, to reduce friction of the supporting plate 4 to the periphery of posting 21 of case 2, it is ensured that the precision of posting 21,
Case 2 is made inversed taper platform shape by the present invention so that supporting plate 4 in case 2 during vertical operation with the posting 21 of case 2 without connecing
Touch, to extend the service life of posting 21.
Claims (3)
1. a kind of mask plate and sample are fitted and separator, it is characterised in that it includes：
One top surface is provided with switch base（11）, bottom surface be provided with metal holder（12）Rectangular box（1）, and metal holder
（12）It is provided with spring base（13）；
One suitable for reading to be provided with interface（22）, lower mouth be provided with posting（21）Inversed taper platform rectangle case（2）；
One by solenoid（31）, plain conductor（32）, battery（33）And button switch（34）The magnetic force unit of composition（3）, and
Plain conductor（32）By solenoid（31）, battery（33）And button switch（34）Electrical connection；
One corner is provided with spring（41）Supporting plate（4）；
The case（2）Located at casing（1）Bottom, and case（2）Interface（22）With casing（1）Upper metal holder（12）
Periphery combine；
The supporting plate（4）Located at case（2）It is interior, supporting plate（4）On spring（41）With casing（1）Upper metal holder（12）
Spring base（13）Connection；
The magnetic force unit（3）Button switch（34）Located at casing（1）Switch base（11）On, solenoid（31）, metal leads
Line（32）And battery（33）Located at casing（1）It is interior, and solenoid（31）Axis point to casing（1）Top surface and bottom surface.
2. a kind of mask plate according to claim 1 and sample are fitted and separator, it is characterised in that solenoid
（31）Axis and upper box（1）Geometrical axis overlap.
3. a kind of mask plate according to claim 1 and sample are fitted and separator, it is characterised in that metal is fixed
Frame（12）Face extensions are in casing（1）Outer periphery.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710196782.4A CN106920767B (en) | 2017-03-29 | 2017-03-29 | Attaching and separating device for mask and sample |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710196782.4A CN106920767B (en) | 2017-03-29 | 2017-03-29 | Attaching and separating device for mask and sample |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106920767A true CN106920767A (en) | 2017-07-04 |
| CN106920767B CN106920767B (en) | 2023-06-09 |
Family
ID=59461125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710196782.4A Active CN106920767B (en) | 2017-03-29 | 2017-03-29 | Attaching and separating device for mask and sample |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106920767B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110129721A (en) * | 2019-04-26 | 2019-08-16 | 华东师范大学 | A kind of thermal evaporation plating diaphragm substrate for ferromagnetism mask plate |
| CN110164808A (en) * | 2019-05-15 | 2019-08-23 | 云谷（固安）科技有限公司 | The handling device and method for carrying of mask plate |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008047458A1 (en) * | 2006-10-17 | 2008-04-24 | Optnics Precision Co., Ltd. | Wafer alignment apparatus using metal mask |
| CN201439178U (en) * | 2009-07-20 | 2010-04-21 | 格兰达技术（深圳）有限公司 | Phase mask supporting platform device of phase mask edge chamfering and smoothing machine |
| CN103116428A (en) * | 2013-01-30 | 2013-05-22 | 无锡力合光电传感技术有限公司 | Device, usage method and application for fixing masking film plate on substrate |
| CN103995434A (en) * | 2014-06-12 | 2014-08-20 | 上海华力微电子有限公司 | Mask dust collection device |
| CN206672909U (en) * | 2017-03-29 | 2017-11-24 | 华东师范大学 | A kind of mask plate and sample be bonded and separator |
-
2017
- 2017-03-29 CN CN201710196782.4A patent/CN106920767B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008047458A1 (en) * | 2006-10-17 | 2008-04-24 | Optnics Precision Co., Ltd. | Wafer alignment apparatus using metal mask |
| CN201439178U (en) * | 2009-07-20 | 2010-04-21 | 格兰达技术（深圳）有限公司 | Phase mask supporting platform device of phase mask edge chamfering and smoothing machine |
| CN103116428A (en) * | 2013-01-30 | 2013-05-22 | 无锡力合光电传感技术有限公司 | Device, usage method and application for fixing masking film plate on substrate |
| CN103995434A (en) * | 2014-06-12 | 2014-08-20 | 上海华力微电子有限公司 | Mask dust collection device |
| CN206672909U (en) * | 2017-03-29 | 2017-11-24 | 华东师范大学 | A kind of mask plate and sample be bonded and separator |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110129721A (en) * | 2019-04-26 | 2019-08-16 | 华东师范大学 | A kind of thermal evaporation plating diaphragm substrate for ferromagnetism mask plate |
| CN110164808A (en) * | 2019-05-15 | 2019-08-23 | 云谷（固安）科技有限公司 | The handling device and method for carrying of mask plate |
| CN110164808B (en) * | 2019-05-15 | 2022-03-25 | 云谷（固安）科技有限公司 | Mask plate conveying device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106920767B (en) | 2023-06-09 |
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