CN106918851A - A kind of superhard optical glass film layer of hydrophobic oleophobic anti-soil - Google Patents
A kind of superhard optical glass film layer of hydrophobic oleophobic anti-soil Download PDFInfo
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- CN106918851A CN106918851A CN201710281335.9A CN201710281335A CN106918851A CN 106918851 A CN106918851 A CN 106918851A CN 201710281335 A CN201710281335 A CN 201710281335A CN 106918851 A CN106918851 A CN 106918851A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/18—Coatings for keeping optical surfaces clean, e.g. hydrophobic or photo-catalytic films
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Abstract
The invention belongs to optical glass field, and in particular to a kind of optical glass film layer of hydrophobic oleophobic anti-soil.The optical glass film layer is followed successively by basalis, dielectric layer, transition zone, hydrophobic layer;Wherein basalis is glass;Dielectric layer is the silicon oxide layer and zirconia layer for alternateing, and adjacent with basalis is silicon oxide layer;Transition zone is made up of transition zone A and transition zone B;Wherein transition zone A is fluoride, and transition zone B is silica or titanium oxide, and that adjacent with hydrophobic layer is transition zone B;Hydrophobic layer is the silane-based compound containing fluorinated groups, is also the outermost layer of the optical glass film layer.The present invention on the premise of glass substrate surface influence reflection and influence definition is ensured, improves the hydrophobic of glass baseplate, oleophobic and antifouling property by using special hydrophobic oleophobic anti-pollution layer.
Description
Technical field
The invention belongs to optical glass field, and in particular to a kind of optical glass film layer of hydrophobic oleophobic anti-soil.
Background technology
It is mobile phone touch, vehicle-mounted touch screen, portable flat board touch screen computer, vehicle-mounted with the fast development of optoelectronic information industry
The products such as camera lens, external reflective mirror more and more enter people and live.It is exactly must have to prevent that it has several general character index requests
Water, grease-proof, dust-proof and scratch-resistant ability.
The present invention it aided in by plated film vacuum heat deposition, high power RF source ion, special counterdie is combined and technique
And the utilization of high performance water proof compound material, it is achieved thereby that above-mentioned functions, its more similar conventional products, performance is more outstanding
With it is excellent.
The content of the invention
It is an object of the invention to provide a kind of optical glass film layer of hydrophobic oleophobic anti-soil, the present invention is by using special
Hydrophobic oleophobic anti-pollution layer, ensure glass substrate surface influence reflection and influence definition on the premise of, improve glass
The hydrophobic of base material, oleophobic and antifouling property.
To achieve the above object, the present invention is adopted the following technical scheme that:
A kind of optical glass film layer of hydrophobic oleophobic anti-soil, is followed successively by basalis, dielectric layer, transition zone, hydrophobic layer;Wherein substrate
Layer is glass;Dielectric layer is the silicon oxide layer and zirconia layer for alternateing, and adjacent with basalis is silicon oxide layer;Transition zone
It is made up of transition zone A and transition zone B;Wherein transition zone A is fluoride, and transition zone B is silica or titanium oxide, with hydrophobic layer phase
That adjacent is transition zone B;Hydrophobic layer is the silane-based compound containing fluorinated groups, is also the outermost layer of the optical glass film layer.
Wherein fluoride is specially the one kind in magnesium fluoride, lanthanum fluoride, aluminum fluoride and cerium fluoride.
Wherein the silane-based compound containing fluorinated groups is specially perfluor carbonic ester or perfluorinated polyether compound.
Wherein silicon oxide layer thickness is 5-40nm, and zirconia layer thickness is 15-70nm, and transition zone A thickness is 80-100nm,
Transition zone B thickness is 5-40nm, and hydrophobic layer thickness is 20-50nm.
The optical glass film layer has 9 ± 2 layers in addition to basalis.
The optical glass film layer has 9 layers in addition to basalis, is followed successively by silicon oxide layer 1, zirconia layer 2, oxidation
Silicon layer 3, zirconia layer 4, silicon oxide layer 5, zirconia layer 6, transition zone A-7, transition zone B-8, hydrophobic layer 9.
Wherein the thickness of silicon oxide layer 1 is 25-40nm, and the thickness of silicon oxide layer 3 is 25-40nm, the thickness of silicon oxide layer 5
It is 5-25nm.
Wherein the thickness of zirconia layer 2 is 10-30nm, and the thickness of zirconia layer 4 is 50-70nm, the thickness of zirconia layer 6
It is 50-70nm.
The optical glass film layer is more than 118 ° with the contact angle of water;Its abrasion-resistant ability is the 3-5 of common hydrophobic membrane
Times;Film layer is more than 110 ° with the contact angle of glycerine oil droplet.
The silicon oxide layer and zirconia layer for wherein alternateing:Entered under vacuum conditions using the coating machine containing ion gun
Row plated film, initial vacuum is 3.0 × 10-3Pa, temperature is 150 DEG C;The accelerating potential of ion gun is 1000V, and plate voltage is
900V, neutralization electric current is 150A;
Transition zone A ion gun plating conditions:The accelerating potential of ion gun is 300V, and plate voltage is 300V, neutralizes electric current and is
160A;
Transition zone B ion gun plating conditions:Ion gun accelerating potential is 500V, and plate voltage is 300V, and neutralization electric current is 150A;
Hydrophobic layer is to use vacuum evaporation technology:Start in the 1-2min of sputtering transition zone B, pre- hot dip material 10-20 seconds, voltage
2-4V;Prevapourising 30-60 seconds, voltage 6-7V;Evaporation 100-200 seconds, voltage 6-8V.Remarkable advantage of the invention is:
1. counterdie combines material molecule finer and close using whole energetic ion assisted deposition technique.That it changes " the hole of film layer
Hole structure " is " column structure ", changes and refined molecular structure, improves the compactness of film layer, so as to improve film
Wipe resistance energy;Anti-wear performance is from 2000 times common liftings to more than 10000 times.
2. the present invention uses brand-new waterproof coating materials, and hydrophobic water droplet angle is up to more than 118 degree;The oil droplet angle of oleophobic
It is more than 110 degree.
3. the obtained optical film of the present invention uses special media layer material and construction so that film layer has in visible region
Preferable transmissivity, relatively low reflectivity, wherein visible region transmissivity close to 99%,.Therefore its with Water-proof and oil-proof fat,
While dust reduction capability, film layer is still clear high saturating.
Brief description of the drawings
Fig. 1 is the structural representation of optical glass film layer obtained in embodiment 1:
1- silicon oxide layers, 2- zirconia layers, 3- silicon oxide layers, 4- zirconia layers, 5- silicon oxide layers, 6- zirconia layers, 7- fluorinations
Lanthanum, 8- silica, 9- perfluor carbonic esters.
Fig. 2 is the transmitted light spectrogram of optical glass film layer obtained in embodiment 1.
Fig. 3 is the reflectance spectrum figure of optical glass film layer obtained in embodiment 1.
Specific embodiment
For further disclosure is of the invention rather than limitation, below in conjunction with example, the present invention is described in further detail.
Film-forming apparatus:Speeded GENER-1300 type coating machines using light, it mainly includes film-thickness monitoring, ion gun, vacuum
Room and vapo(u)rization system are constituted.Film thickness monitoring system is divided into light-operated and brilliant control two parts, wherein brilliant control employs the INFCON of import
Controller, is to measure film quality thickness using the change of quartz crystal frequency of oscillation.Ion gun is using Chinese Academy of Sciences north
The Kaufman ion source that capital Institute For Space Studies are developed, ion energy is controlled by adjusting plate voltage and ion beam current, is improved
The consistency of deposition film, improves optically and mechanically performance.Vacuum chamber leans on Japanese Edward's mechanical pump and diffusion pumping system mutual
Coordinate to obtain the vacuum of requirement of experiment, vacuum is measured with thermocouple compound vacuum gauge.
Plated film actual conditions is:The silicon oxide layer and zirconia layer for wherein alternateing:Using the plated film containing ion gun
Machine carries out plated film under vacuum conditions, and initial vacuum is 3.0 × 10-3Pa, temperature is 150 DEG C;The accelerating potential of ion gun is
1000V, plate voltage is 900V, and neutralization electric current is 150A;
Transition zone A ion gun plating conditions:The accelerating potential of ion gun is 300V, and plate voltage is 300V, neutralizes electric current and is
160A;
Transition zone B ion gun plating conditions:Ion gun accelerating potential is 500V, and plate voltage is 300V, and neutralization electric current is 150A;
Hydrophobic layer is to use vacuum evaporation technology:Start in the 1-2min of sputtering transition zone B, pre- hot dip material 10-20 seconds, voltage
2-4V;Prevapourising 30-60 seconds, voltage 6-7V;Evaporation 100-200 seconds, voltage 6-8V.
Embodiment 1
A kind of optical glass film layer of described hydrophobic oleophobic anti-soil has 9 layers in addition to basalis, be followed successively by silicon oxide layer 1,
Zirconia layer 2, silicon oxide layer 3, zirconia layer 4, silicon oxide layer 5, zirconia layer 6, lanthanum fluoride layer 7, silicon oxide layer 8, perfluorocarbon
Acid esters layer 9.Wherein except basalis is glass, the thickness of silicon oxide layer 1 is 35.24nm, and the thickness of zirconia layer 2 is
19.11nm, the thickness of silicon oxide layer 3 is 37.94nm, and the thickness of zirconia layer 4 is 67.62nm, and the thickness of silicon oxide layer 5 is
8.0nm, the thickness of zirconia layer 6 is 51.0nm, and the thickness of lanthanum fluoride layer 7 is 90.5nm, and the thickness of silicon oxide layer 8 is
20.56nm, the thickness of perfluor basis 9 is 32.5nm.
Embodiment 2
A kind of optical glass film layer of described hydrophobic oleophobic anti-soil has 9 layers in addition to basalis, be followed successively by silicon oxide layer 1,
Zirconia layer 2, silicon oxide layer 3, zirconia layer 4, silicon oxide layer 5, zirconia layer 6, lanthanum fluoride layer 7, silicon oxide layer 8, perfluorocarbon
Acid esters layer 9.Wherein except basalis is glass, the thickness of silicon oxide layer 1 is 35.24nm, and the thickness of zirconia layer 2 is
19.11nm, the thickness of silicon oxide layer 3 is 37.94nm, and the thickness of zirconia layer 4 is 67.62nm, and the thickness of silicon oxide layer 5 is
8.0nm, the thickness of zirconia layer 6 is 51.0nm, and the thickness of lanthanum fluoride layer 7 is 81.7nm, and the thickness of silicon oxide layer 8 is
18.46nm, the thickness of perfluor basis 9 is 43.8nm.
Embodiment 3
A kind of optical glass film layer of described hydrophobic oleophobic anti-soil has 7 layers in addition to basalis, be followed successively by silicon oxide layer 1,
Zirconia layer 2, silicon oxide layer 3, zirconia layer 4, lanthanum fluoride layer 5, titanium oxide layer 6, perfluorinated polyether compound layer 7.Wherein remove
Basalis is glass, and the thickness of silicon oxide layer 1 is 14.8nm, and the thickness of zirconia layer 2 is 445.7nm, the thickness of silicon oxide layer 3
It is 23.2nm to spend, and the thickness of zirconia layer 4 is 64.7nm, and the thickness of lanthanum fluoride layer 5 is 93.4nm, and the thickness of titanium oxide layer 6 is
29.46nm, the thickness of perfluor basis 7 is 35.8nm.
Embodiment 4
A kind of optical glass film layer of described hydrophobic oleophobic anti-soil has 7 layers in addition to basalis, be followed successively by silicon oxide layer 1,
Zirconia layer 2, silicon oxide layer 3, zirconia layer 4, magnesium fluoride layer 5, silicon oxide layer 6, perfluorinated polyether compound layer 7.Wherein remove
Basalis is glass, and the thickness of silicon oxide layer 1 is 14.8nm, and the thickness of zirconia layer 2 is 47.7nm, the thickness of silicon oxide layer 3
It is 23.2nm to spend, and the thickness of zirconia layer 4 is 64.7nm, and the thickness of magnesium fluoride layer 5 is 83.2nm, and the thickness of silicon oxide layer 6 is
28.77nm, perfluorinated polyether compound layer 7 is 46.1nm.
Performance test:
What embodiment 1 was obtained film layer is 118.1 degree with the contact angle of water, is 110.1 degree with droplets contact angle;Nothing after finger touch
Fingerprint is remaining;
What embodiment 2 was obtained film layer is 118.3 degree with the contact angle of water, is 110.2 degree with droplets contact angle;Nothing after finger touch
Fingerprint is remaining;
What embodiment 3 was obtained film layer is 119.0 with the contact angle of water, is 110.7 degree with droplets contact angle;Aphalangia after finger touch
Line is remaining;
What embodiment 4 was obtained film layer is 119.3 with the contact angle of water, is 110.4 degree with droplets contact angle;Aphalangia after finger touch
Line is remaining;
The performance test of the optical thin film obtained by each embodiment is as follows:
The foregoing is only presently preferred embodiments of the present invention, all impartial changes done according to scope of the present invention patent with repair
Decorations, should all belong to covering scope of the invention.
Claims (10)
1. a kind of optical glass film layer of hydrophobic oleophobic anti-soil, it is characterised in that:Be followed successively by basalis, dielectric layer, transition zone, dredge
Water layer;Wherein basalis is glass;Dielectric layer is the silicon oxide layer and zirconia layer for alternateing, and adjacent with basalis is oxygen
SiClx layer;Transition zone is made up of transition zone A and transition zone B;Wherein transition zone A is fluoride, and transition zone B is silica or oxidation
Titanium, adjacent with hydrophobic layer is transition zone B;Hydrophobic layer is the silane-based compound containing fluorinated groups, is also the optical glass
The outermost layer of film layer.
2. the optical glass film layer of a kind of hydrophobic oleophobic anti-soil according to claim 1, it is characterised in that:
Fluoride is specially the one kind in magnesium fluoride, lanthanum fluoride, aluminum fluoride and cerium fluoride.
3. the optical glass film layer of a kind of hydrophobic oleophobic anti-soil according to claim 1, it is characterised in that:Containing fluorinated groups
Silane-based compound be specially perfluor carbonic ester or perfluorinated polyether compound.
4. the optical glass film layer of a kind of hydrophobic oleophobic anti-soil according to claim 1, it is characterised in that:Wherein silica
Thickness degree is 5-40nm, and zirconia layer thickness is 15-70nm, and transition zone A thickness is 80-100nm, and transition zone B thickness is 5-
40nm, hydrophobic layer thickness is 20-50nm.
5. the optical glass film layer of a kind of hydrophobic oleophobic anti-soil according to claim 1, it is characterised in that:The optical film
Layer has 9 ± 2 layers.
6. the optical glass film layer of a kind of hydrophobic oleophobic anti-soil according to claim 5, it is characterised in that:The optical film
Layer have 9 layers, be followed successively by silicon oxide layer 1, zirconia layer 2, silicon oxide layer 3, zirconia layer 4, silicon oxide layer 5, zirconia layer 6,
Transition zone A-7, transition zone B-8, hydrophobic layer 9.
7. the optical glass film layer of a kind of hydrophobic oleophobic anti-soil according to claim 6, it is characterised in that:Wherein silica
The thickness of layer 1 is 25-40nm, and the thickness of silicon oxide layer 3 is 25-40nm, and the thickness of silicon oxide layer 5 is 5-25nm.
8. the optical glass film layer of a kind of hydrophobic oleophobic anti-soil according to claim 6, it is characterised in that:Wherein zirconium oxide
The thickness of layer 2 is 10-30nm, and the thickness of zirconia layer 4 is 50-70nm, and the thickness of zirconia layer 6 is 50-70nm.
9. the optical glass film layer of a kind of hydrophobic oleophobic anti-soil according to claim 1, it is characterised in that:The optics glass
Glass film layer is more than 118 degree with the contact angle of water, is more than 110 degree with the contact angle of oil droplet.
10. a kind of a kind of method of the optical glass film layer of the hydrophobic oleophobic anti-soil prepared as described in claim 1-9, its feature
It is:
The silicon oxide layer and zirconia layer for wherein alternateing:Plated under vacuum conditions using the coating machine containing ion gun
Film, initial vacuum is 3.0 × 10-3Pa, temperature is 150 DEG C;The accelerating potential of ion gun is 1000V, and plate voltage is 900V,
Neutralization electric current is 150A;
Transition zone A ion gun plating conditions:The accelerating potential of ion gun is 300V, and plate voltage is 300V, neutralizes electric current and is
160A;
Transition zone B ion gun plating conditions:Ion gun accelerating potential is 500V, and plate voltage is 300V, and neutralization electric current is 150A;
Hydrophobic layer is to use vacuum evaporation technology:Start in the 1-2min of sputtering transition zone B, pre- hot dip material 10-20 seconds, voltage
2-4V;Prevapourising 30-60 seconds, voltage 6-7V;Evaporation 100-200 seconds, voltage 6-8V.
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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EP3942357A4 (en) * | 2019-03-19 | 2022-12-14 | Signet Armorlite, Inc. | Anti-soiling coating for an ophthalmic lens |
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CN205539779U (en) * | 2016-01-13 | 2016-08-31 | 江苏康美达光学有限公司 | Antibiotic grease proofing dirty chameleon glass block |
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Publication number | Priority date | Publication date | Assignee | Title |
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JPS60214302A (en) * | 1984-04-11 | 1985-10-26 | Seiko Epson Corp | High refractive index plastic lens |
CN103226211A (en) * | 2012-01-31 | 2013-07-31 | 株式会社拓普康 | Optical substrate |
CN104903756A (en) * | 2012-09-28 | 2015-09-09 | 株式会社尼康依视路 | Optical component and method for producing same |
CN104020517A (en) * | 2014-05-21 | 2014-09-03 | 利达光电股份有限公司 | Superhard reflection-eliminating waterproof oil resistant film |
CN204398427U (en) * | 2014-11-28 | 2015-06-17 | 苏州力合光电薄膜科技有限公司 | Coated glass substrate and there is the mobile phone of this coated glass substrate |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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EP3942357A4 (en) * | 2019-03-19 | 2022-12-14 | Signet Armorlite, Inc. | Anti-soiling coating for an ophthalmic lens |
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Application publication date: 20170704 |