CN106918597A

CN106918597A - Film quality detection method and film quality detecting system

Info

Publication number: CN106918597A
Application number: CN201510993892.4A
Authority: CN
Inventors: 张健; 冯礼; 秦庆旺; 冯治国; 卢继兵; 韩英魁; 朱强
Original assignee: China Banknote Printing and Minting Corp; Institute of Printing Science and Technology Peoples Bank of China
Current assignee: China Banknote Printing Technology Research Institute Co ltd; China Banknote Printing and Minting Group Co Ltd
Priority date: 2015-12-25
Filing date: 2015-12-25
Publication date: 2017-07-04
Anticipated expiration: 2035-12-25
Also published as: CN106918597B

Abstract

The present invention proposes a kind of film quality detection method and a kind of film quality detecting system, wherein, film quality detection method includes：According to the sense command for receiving, the selection target imaging mode in default various imaging modes；The view data of multiple positions of film to be detected is gathered using target imaging mode；The attribute of the view data of each position in multiple positions, determines whether the quality of film to be detected at each position is qualified, so that whether the quality for determining film to be detected is qualified.By technical scheme, can automatically for user selects suitable film quality detection mode, so as to improve the efficiency and quality of thin film testing.

Description

Film quality detection method and film quality detecting system

Technical field

The present invention relates to technical field of quality detection, in particular to a kind of film quality detection side Method and a kind of film quality detecting system.

Background technology

In the related art, having a variety of methods can detect film quality, and it is thin that these methods are applicable Film species and application scenarios are variant.At present, typically voluntarily selected to use by user which kind of method for Thin film testing quality, however, this selection has very big subjectivity and uncertainty, easily occurs The problems such as detection error.

Therefore a kind of new technical scheme is needed, can automatically for user selects suitable film quality inspection Survey mode.

The content of the invention

The present invention is based on above mentioned problem, it is proposed that a kind of new technical scheme, can automatically be use Family selects suitable film quality detection mode.

In view of this, an aspect of of the present present invention proposes a kind of film quality detection method, for film Quality detecting system, including：According to the sense command for receiving, in default various imaging modes Selection target imaging mode, wherein, the sense command includes the periodicity collection to film to be detected Order or the film to be detected is carried out according to trigger signal the order of data acquisition；Use the mesh Mark imaging mode gathers the view data of multiple positions of the film to be detected；According in multiple positions Each position view data attribute, setting shape, setting range value, image high level template and Low value template, the threshold range after data conversion is carried out, determine film to be detected at each position Whether quality is qualified, so that whether the quality for determining the film to be detected is qualified；Wherein, it is described many Planting imaging mode includes：First imaging mode, a reflection for narrowband region of the film to be detected Light or transmitted light, by the spectrum groupware after lens focus into the film quality detecting system, point The light of different wave length is spatially separated after light, project one of the film quality detecting system or One group of face battle array gray scale camera；Second imaging mode, a mirror for narrowband region of the film to be detected Face reflected light, by one or one group of gray scale after lens focus into the film quality detecting system Or colored line-scan digital camera；3rd imaging mode, a narrowband region of the film to be detected it is unrestrained anti- Light is penetrated, by one or one group of gray scale or coloured silk after lens focus into the film quality detecting system Colo(u)r streak array camera；4th imaging mode, a transmitted light for narrowband region of the film to be detected, One or one group of gray scale or colored linear array by entering the film quality detecting system after lens focus Camera；Wherein, various imaging modes obtain the different optics spy of the film to be detected respectively Levy image.

In the technical scheme, various imaging modes can be in systems preset, to receive inspection When surveying order, selection selects to be applied to the sense command suitable for the imaging mode of the sense command Film quality detection mode, so that whether the quality that film is judged according to testing result qualified.Its In, when film quality is detected, periodic IMAQ can be carried out, it is also possible to receiving every time Data are acquired during to trigger signal.By the technical scheme, can automatically for user selects to close Suitable film quality detection mode, so as to improve the reliability of film quality testing result, improves The efficiency and quality of thin film testing.Wherein, the film described in the technical program includes but is not limited to liquid Brilliant film, holographic dealuminzation safety line, light-variation film, plastic sheeting, paper, cloth, calligraphy and painting etc..

In the above-mentioned technical solutions, it is preferable that in the light spectrum image-forming mode, it is described to be detected thin The reflected light or transmitted light of one narrowband region of film, by the lens focus of film quality detecting system Afterwards into the spectrum groupware of film quality detecting system, the light of different wave length is spatially separated after light splitting, Project the face battle array gray scale camera of film quality detecting system.

In the technical scheme, spectra collection system is comprising mainly comprising spectrum groupware and face battle array gray scale phase There is optical lens machine, spectrum groupware front end.The reflected light of one narrowband region of film to be detected is saturating Light is penetrated, by entering spectrum groupware after lens focus, the light of different wave length is spatially separated after light splitting, Project the collecting unit of face battle array gray scale camera.Each width two dimensional image that face battle array gray scale camera is collected One spectral information of narrowband region of correspondence, the transverse direction of image transverse direction correspondence film to be detected, per a line Information of the narrowband region in the row corresponding wavelength is represented, correspondence different spectral wavelengths in image longitudinal direction are each Row represent the spectral evolution information of one piece of subregion of narrowband region, and image pixel value size represents certain The intensity of wavelength.

In the above-mentioned technical solutions, it is preferable that described to gather to be detected using the target imaging mode The view data of multiple positions of film, specifically includes：Using corresponding with the target imaging mode The view data of the whole breadth width of film to be detected described in image and data collector multi collect, with Gather the full width image data of the film to be detected；Or using corresponding with the target imaging mode Image and data collector multi collect described in film to be detected part breadth width view data, Wherein, described image data acquisition unit is static in the width or carries out back and forth movement.

In the technical scheme, can be gathered using different IMAQ means according to the actual requirements View data, specifically, can both gather the full width image data of film, it is also possible to gather film Part breadth width view data, wherein, in gatherer process, can be by mobile image number Image data acquiring is carried out to static film according to collector, it is also possible to allow the image acquisition device of static state Image data acquiring is carried out to mobile film.That is, the typical method of spectra collection includes two Kind：One be film along lengthwise movement, spectra collection system is maintained static, or (when spectra collection arrowband Width be less than thin-film width when) spectra collection system transverse reciprocating movement；Two is that film is maintained static, Spectra collection system moves one or many in one direction, completes the spectral information collection of entire film. Additionally, system can gather spectral information according to actual conditions and needs by special exercise mode.Pass through Technical scheme, diversified IMAQ means can more fit user to detection film Demand, improve the reliability of film quality testing result, be easy to lifted detection efficiency, reduce inspection Survey cost.

In the above-mentioned technical solutions, it is preferable that the corresponding described image data of different imaging modes Attribute is different, wherein, the attribute of the corresponding described image data of the light spectrum image-forming mode includes：Institute Dominant wavelength, the half-wave of stating view data are wide, peak strength, energy integral, the master of certain range of wavelengths Wavelength, certain range of wavelengths half-wave is wide, certain range of wavelengths peak strength, certain range of wavelengths Energy integral, CIE XYZ values, CIE L^*a^*b^*Value, CIE h_abWithValue, and the reflection The attribute of imaging mode and the corresponding described image data of the transmission imaging mode include it is following at least it One or its combination：View data color low value scope high, low value view data template high, figure line number, Figure line integrity degree, figure line similarity.

In the technical scheme, light spectrum image-forming mode, catoptric imaging mode and transmission imaging mode are right There should be respective view data attribute, wherein, the corresponding view data attribute of light spectrum image-forming mode includes But it is not limited to the dominant wavelength of view data, half-wave wide, peak strength, energy integral, certain wavelength zone Between dominant wavelength, certain range of wavelengths half-wave is wide, certain range of wavelengths peak strength, certain ripple Interval energy integral, CIE XYZ values, CIE L long^*a^*b^*Value, CIE h_abWithIt is worth, CIE is Color system, CIE XYZ, CIE L^*a^*b^*、CIE h_ab、It is its different color space, and Catoptric imaging mode and the corresponding view data attribute of transmission imaging mode include but is not limited to it is following at least One or a combination set of：View data color low value scope high, low value view data template high, figure line Number, figure line integrity degree, figure line similarity.By the technical scheme, can be by various view data Attribute judges that film quality diversified judgment basis can cause film quality testing result It is more accurate comprehensive, so as to improve the quality and efficiency of thin film testing.

In the above-mentioned technical solutions, it is preferable that the matter for determining the film to be detected at each position Whether amount is qualified, specifically includes：The attribute of the view data according to each position, by default Defective value computing formula calculates the defect value of each position, for according to described each position The defect value determine whether the quality of film described to be detected at described each position qualified, The default defective value computing formula is：

Wherein, i represents width when gathering described image data, and j represents collection described image number According to length direction, w_nScope be [0,1], represent n-th at described each position towards picture number According to defect weight coefficient, the scope of Blobn (i, j) is [0,255], is represented at described each position N-th towards view data defective value, and TotolBlob (i, j) represents described at described each position Defect value.

In the technical scheme, propose that the detection of film can be calculated by presetting defective value computing formula The defective value of position, so that the residing scope according to the size of defective value defective value in other words is thin to judge Whether film quality meets the requirements, so that film quality testing result is more accurate comprehensive, carries The quality and efficiency of thin film testing are risen.

In the above-mentioned technical solutions, it is preferable that the film to be detected at described each position of determination Before whether quality is qualified, also include：The image of each position according in the multiple position The attribute of data, determines the qualified data space and unqualified data space of described image data；According to The qualified data space sets quality discrimination condition with the line of demarcation of the unqualified data space, with For according to the quality discrimination condition, determining whether the quality of the film to be detected is qualified；And root According to the attribute of described image data, the qualified data space and the unqualified data space, it is determined that The Blobn (i, j) of described image data.

In the technical scheme, in the test position by presetting defective value computing formula calculating film During defective value, qualified data space and unqualified data space can be gone out according to view data Attribute transposition, Such that it is able to determine whether that defective value is located in qualified data space or positioned at number of non-compliances according to sky It is interior, draw film quality testing result.By the technical scheme, the qualified data space of division with Unqualified data space can cause to judge the scope of defective value more accurate, so that thin Film quality testing result is more accurate comprehensive, improves the quality and efficiency of thin film testing.

Another aspect of the present invention proposes a kind of film quality detecting system, including：Imaging mode is selected Unit is selected, according to the sense command for receiving, the selection target imaging in default various imaging modes Mode, wherein, the sense command is included to the periodicity acquisition of film to be detected or according to tactile Signalling carries out the order of data acquisition to the film to be detected；Image data acquiring unit, uses The target imaging mode gathers the view data of multiple positions of the film to be detected；Quality discrimination Unit, the attribute of the view data of each position in multiple positions, setting shape, setting model Enclose value, image high level template and low value template, carry out the threshold range after data conversion, determine each Whether the quality of the film to be detected at position is qualified, so that the quality for determining the film to be detected is It is no qualified；Wherein, various imaging modes include：First imaging mode, the film to be detected A narrowband region reflected light or transmitted light, by after lens focus into the film quality examine The spectrum groupware of examining system, the light of different wave length is spatially separated after light splitting, projects the film One of quality detecting system or one group of face battle array gray scale camera；Second imaging mode is described to be detected thin One specular light of narrowband region of film, by being detected into the film quality after lens focus One of system or one group of gray scale or colored line-scan digital camera；3rd imaging mode, the film to be detected A narrowband region diffuse, by entering the film quality detecting system after lens focus One or one group of gray scale or colored line-scan digital camera；4th imaging mode, the one of the film to be detected The transmitted light of bar narrowband region, one by entering the film quality detecting system after lens focus Or one group of gray scale or colored line-scan digital camera；Wherein, various imaging modes obtain described to be checked respectively Survey the different optical signature image of film.

In the above-mentioned technical solutions, it is preferable that described image data acquisition unit includes：First collection Unit, using to be checked described in image and data collector multi collect corresponding with the target imaging mode The view data of the whole breadth width of film is surveyed, to gather the full width image of the film to be detected Data；And/or second collecting unit, adopted using view data corresponding with the target imaging mode The view data of the part breadth width of film to be detected described in storage multi collect, wherein, the figure As data acquisition unit is static in the width or carries out back and forth movement.

In the above-mentioned technical solutions, it is preferable that the quality discrimination unit specifically for：According to described The attribute of the view data of each position, described each position is calculated by default defective value computing formula Defect value, so that the defect value according to each position determines described each position Whether the quality for putting the film described to be detected at place is qualified, and the default defective value computing formula is：

In the above-mentioned technical solutions, it is preferable that also include：Criterion setting unit, described true Before whether the quality of the film to be detected at fixed each position is qualified, according in the multiple position The attribute of the view data of each position, determine the qualified data space of described image data with not Qualified data space, and according to the line of demarcation of the qualified data space and the unqualified data space Quality discrimination condition is set, for according to the quality discrimination condition, determining the film to be detected Whether quality is qualified；And defective value determining unit, attribute, the conjunction according to described image data Lattice data space and the unqualified data space, determine the Blobn (i, j) of described image data.

Can automatically be user's suitable film quality detection mode of selection by above technical scheme, So as to improve the reliability of film quality testing result, the efficiency and quality of thin film testing are improved.

Brief description of the drawings

Fig. 1 shows the flow chart of film quality detection method according to an embodiment of the invention；

Fig. 2 shows the block diagram of film quality detecting system according to an embodiment of the invention；

Fig. 3 shows that the structure of film quality detecting system according to another embodiment of the invention is shown It is intended to；

Fig. 4 shows the schematic diagram of each imaging system in Fig. 3；

Fig. 5 shows the linear light sorurce structure chart of spectrum imaging system；

Fig. 6 shows the imaging effect schematic diagram of spectrum imaging system.

Specific embodiment

In order to be more clearly understood that the above objects, features and advantages of the present invention, with reference to attached Figure and specific embodiment are further described in detail to the present invention.It should be noted that not In the case of conflict, the feature in embodiments herein and embodiment can be mutually combined.

Many details are elaborated in the following description in order to fully understand the present invention, but, The present invention can also be different from other modes described here to implement using other, therefore, the present invention Protection domain do not limited by following public specific embodiment.

Fig. 1 shows the flow chart of film quality detection method according to an embodiment of the invention.

As shown in figure 1, film quality detection method according to an embodiment of the invention, for thin Film quality amount detection systems, including：

Step 102, according to the sense command for receiving, mesh is selected in default various imaging modes Mark imaging mode, wherein, the sense command include to the periodicity acquisition of film to be detected or The order of data acquisition is carried out to the film to be detected according to trigger signal；

Step 104, multiple positions of the film to be detected are gathered using the target imaging mode View data；

Step 106, the attribute of the view data of each position in multiple positions, setting shape, Setting range value, image high level template and low value template, the threshold range after data conversion is carried out, really Whether the quality of the film to be detected at fixed each position is qualified, for determining the film to be detected Whether quality is qualified.

Wherein, various imaging modes include：First imaging mode, the one of the film to be detected The reflected light or transmitted light of bar narrowband region, system is detected by entering the film quality after lens focus The spectrum groupware of system, the light of different wave length is spatially separated after light splitting, projects the film quality One of detecting system or one group of face battle array gray scale camera；Second imaging mode, the film to be detected One specular light of narrowband region, by entering the film quality detecting system after lens focus One or one group of gray scale or colored line-scan digital camera；3rd imaging mode, the one of the film to be detected Bar narrowband region diffuses, by after lens focus into the one of the film quality detecting system Individual or one group of gray scale or colored line-scan digital camera；4th imaging mode, of the film to be detected is narrow The transmitted light of region, one or one by entering the film quality detecting system after lens focus Group gray scale or colored line-scan digital camera；Wherein, various imaging modes obtain described to be detected thin respectively The different optical signature image of film.

In the above-mentioned technical solutions, it is preferable that step 104 is specifically included：Using with target imaging side The view data of the whole breadth width of the corresponding image and data collector multi collect film to be detected of formula, To gather the full width image data of film to be detected；Or use image corresponding with target imaging mode The view data of the part breadth width of data acquisition unit multi collect film to be detected, wherein, image Data acquisition unit is static in width or carries out back and forth movement.

In the above-mentioned technical solutions, it is preferable that the attribute of the corresponding view data of different imaging modes Difference, wherein, the attribute of the corresponding view data of light spectrum image-forming mode includes：The main ripple of view data Length, half-wave wide, peak strength, energy integral, CIE XYZ values, CIE L^*a^*b^*Value, CIE h_ab WithValue, and the attribute of catoptric imaging mode and the corresponding view data of transmission imaging mode includes At least one of or its combination：View data color low value scope high, low value view data template high, Figure line number, figure line integrity degree, figure line similarity.

In the above-mentioned technical solutions, it is preferable that step 106 is specifically included：According to the figure of each position As the attribute of data, the defect value of each position is calculated by presetting defective value computing formula, with Whether the quality for determining the film to be detected at each position according to the defect value of each position closes Lattice, presetting defective value computing formula is：

Wherein, i represents width when gathering view data, and j represents the length of collection view data Direction, w_nScope be [0,1], represent n-th at each position towards view data defect weight system Number, the scope of Blobn (i, j) is [0,255], represents n-th at each position towards view data Defective value, TotolBlob (i, j) represents the defect value at each position.

In the above-mentioned technical solutions, it is preferable that before step 106, also include：According to multiple positions The attribute of the view data of each position in putting, determines the qualified data space of view data and does not conform to Lattice data space；Quality discrimination is set with the line of demarcation of unqualified data space according to qualified data space Condition, for according to quality discrimination condition, determining whether the quality of film to be detected is qualified；And root According to the attribute of view data, qualified data space and unqualified data space, view data is determined Blobn (i, j).

Fig. 2 shows the block diagram of film quality detecting system according to an embodiment of the invention.

As shown in Fig. 2 film quality detecting system 200 according to an embodiment of the invention, bag Include：Imaging mode select unit 202, according to the sense command for receiving, in default various imagings Selection target imaging mode in mode, wherein, sense command includes adopting the periodicity of film to be detected The order of data acquisition is ordered or film to be detected is carried out according to trigger signal to collection；Image data acquiring Unit 204, the view data of multiple positions of film to be detected is gathered using target imaging mode；Matter Amount judgement unit 206, the attribute of the view data of each position in multiple positions, setting shape Shape, setting range value, image high level template and low value template, the threshold range after data conversion is carried out, Determine whether the quality of film to be detected at each position is qualified, for determining the film to be detected Quality it is whether qualified.

In the above-mentioned technical solutions, it is preferable that image data acquiring unit 204 includes：First collection Unit 2042, it is to be detected using image and data collector multi collect corresponding with target imaging mode The view data of the whole breadth width of film, to gather the full width image data of film to be detected； And/or second collecting unit 2044, it is many using image and data collector corresponding with target imaging mode The view data of the part breadth width of secondary collection film to be detected, wherein, image and data collector exists Width is static or carries out back and forth movement.

In the above-mentioned technical solutions, it is preferable that the attribute of the corresponding view data of different imaging modes Difference, wherein, the attribute of the corresponding view data of light spectrum image-forming mode includes：The main ripple of view data Length, half-wave wide, peak strength, energy integral, the dominant wavelength of certain range of wavelengths, certain wavelength zone Between half-wave is wide, certain range of wavelengths peak strength, the energy integral of certain range of wavelengths, CIE XYZ values, CIE L*a*b* values, CIE hab and C*ab values, and catoptric imaging mode and transmission The attribute of the corresponding view data of imaging mode includes at least one of or its combination：View data face Color low value scope high, low value view data template high, figure line number, figure line integrity degree, figure line are similar Degree.

In the above-mentioned technical solutions, it is preferable that quality discrimination unit 206 specifically for：According to each The attribute of the view data of position, the synthesis that each position is calculated by presetting defective value computing formula lacks Value is fallen into, for determining the matter of the film to be detected at each position according to the defect value of each position Whether amount is qualified, and default defective value computing formula is：

In the above-mentioned technical solutions, it is preferable that also include：Criterion setting unit 208, true Each before whether the quality of the film to be detected at fixed each position is qualified, in multiple positions The attribute of the view data of position, determines the qualified data space and unqualified data space of view data, And quality discrimination condition is set with the line of demarcation of unqualified data space according to qualified data space, for According to quality discrimination condition, determine whether the quality of film to be detected is qualified；And defective value determines list Unit 210, attribute, qualified data space and unqualified data space according to view data, it is determined that figure As the Blobn (i, j) of data.

Fig. 3 shows that the structure of film quality detecting system according to another embodiment of the invention is shown It is intended to.

As shown in figure 3, film quality detecting system according to another embodiment of the invention, is used for Detection liquid crystal film, holographic dealuminzation safety line, light-variation film, plastic sheeting, paper, cloth, word The quality of picture etc., including：Roller, kinetic control system, spectra collection and processing subsystem, reflection IMAQ and processing subsystem, transmission image acquisition and processing subsystem, quality status stamp subsystem, Graphical analysis main station system and rear process product processing system.

The film quality detecting system can be with automatic detection film product quality, and comprising two kinds of detection sides Method：

Method one：The spectrum picture and surface image of operating film are gathered, at digital picture Reason carries out Automatic quality inspection judgement to them, determines whether product quality is qualified, and product is obtained in time Test result, to carry out quality status stamp online, or testing result data message is stored, or will Testing result data information transfer give rear operation, subsequent handling according to testing result carry out overall calcellation, The treatment such as local calcellation, defect mending.Wherein, testing result includes：It is overall whether qualified, local Quality status stamp of the lengthwise position of defect and lateral attitude or detecting system etc..

Method two：Detected object can be fixed on flat board or two ends and fix, and image acquisition device is in fortune Scanning Detction object in dynamic, obtains view data, is analyzed detection, its specific processing method and side It is identical described in method one.

In addition, the object of film quality detecting system detection can be view picture film product, it is also possible to It is several film products, can also be the ribbon product of incision.

The film quality detecting system mainly comprising the moving parts such as kinetic control system and roller, at least A set of spectra collection processing subsystem, at least a set of reflected image collection and processing subsystem or transmission plot As collection and processing subsystem, graphical analysis main station system.And quality status stamp subsystem can also be included System, the quality status stamp subsystem can be connected with rear process product processing system.

Each IMAQ can gather image with processing subsystem according to fixed frequency (or cycle), or logical Cross the trigger signal collection image of kinetic control system, the frequency (or cycle) and product of trigger signal The speed of service is proportionally related.Each collection is entered with processing subsystem by embedded circuit board or computer Row analysis and treatment.This be the basic breadth of thin film testing of film quality detecting system for 0.2m to 1m, Certainly, also can detect subdivision cut after narrower film or broader film, the speed of service be less than Or equal to 150m/min.

Fig. 4 shows the schematic diagram of each imaging system in Fig. 3.

As shown in figure 4, spectrum imaging system can gather the spectral quality information of film.Light source 1 is sent out The light penetrated has frequency range wider, and spectral line is smoothed, and light source 1 can be white light source, ultraviolet light One in source, infrared light supply three, or two, the combination of three, the highest luminance of light source 1 Area is 1200mm*30mm, and uniformity of illuminance is more than or equal to 95%, and focal length is 200mm, burnt Away from that can adjust as needed, total thang-kng amount is 68000lm, and peak value thang-kng amount is 100000lm, continuously Power is 500W to the maximum under mode of operation, light source power can dynamically, step-less adjustment, trigger Working mould Peak power is 3000W under formula, and the switch periods for triggering pattern are most short up to 0.1ms.

Luminous component uses multiple LED (Light Emitting Diode, light emitting diode) arrangement group Into all being alternately arranged with ultraviolet LED, be staggered using white light LEDs, or white light LEDs Or it is arranged in parallel, or white light LEDs are alternately arranged with infrared LED, are staggered or arranged in parallel, Or ultraviolet LED, white light LEDs and infrared LED are alternately arranged, are staggered or arranged in parallel.Line As shown in figure 5, LED is fixed in light source bottom plate, prismatic optical element is covered property light-source structure On LED, the light for sending is set to pool the linear light of high intensity, wherein, input path can be equipped with depolarized Device.

As shown in figure 4, spectrum groupware collection is by the spectrum after film reflector (can also be transmission) Data.Under the imaging mode that roller drives film, the focusing surface of optical system can be that film departs from Hanging position after roller, it is also possible on roller.Under catoptric imaging pattern, light source incidence angle is 0 to 15 °, it is possible to use 1 to 3 light source irradiates from incidence angles degree, spectra collection system Angle of reflection is 0 to 15 °.Under transmission imaging pattern, light source incidence angle is -15 ° to+15 °, can be with Using 1 to 3 light source from incidence angles degree irradiate, into spectrum acquisition system light with Normal angle is -15 ° to+15 °.Spectrum groupware front end is equipped with a camera lens, and the camera lens is to white light All have it is good the slit of light-splitting device is entered by the light after camera lens by property, by after slit, The light of the different wave length device that is split spatially uniformly is launched, the spectral resolution highest after expansion Up to 1nm, minimum 20nm.The face battle array gray scale camera collection spectroscopic data of rear end, face battle array gray scale Camera has the spectral response curve of continuously smooth.

Reflection photoimaging systems can be the method for reflection shown in Fig. 4, it is also possible to be placed in light source 1 thin The opposite side of film, acquisition of transmission spectrum.Light source 1 is 0 degree to 80 degree with the angular range of normal. When light source 1 and normal angle are for 0 degree or close to 0 degree, semi-transparent semi-reflecting prism imaging is used.Point Spectral region after optical assembly light splitting is 200nm to 1000nm.

Reflection photoimaging systems are used to gather the reflected light image of film.Light source 2 is white light source, purple One in outer light source, infrared light supply three, or two, the combination of three, the model of incident angle It is 0 to 90 degree to enclose, and when incidence angle is 0 degree, can be used and uses semi-transparent semi-reflecting prism imaging.Root According to needs, polarization optics can be equipped with input path.Camera 2 is the linear array of colored or gray scale Camera or face battle array gray scale camera.The optical axis of camera 2 can overlap with normal, or other random angles Degree.As needed, the front end of camera 2 can be equipped with polarization optics, realize polarization imaging effect.

Again as shown in figure 4, transmission photoimaging systems are used to gather the transmitted light images of film.Light source 3 It is in white light source, ultraviolet source, infrared light supply three, or two, the combination of three, The incident angle of light source 3 can be an angle between vertical incidence, or 0 degree to 90 degree. The optical axis of camera 3 can overlap with normal, or other are arbitrarily angled.As needed, camera 3 Front end can be equipped with polarization optics, realize polarization imaging effect.

As shown in fig. 6, spectra collection system includes spectrum groupware and face battle array gray scale camera comprising main, There is optical lens spectrum groupware front end.The reflected light or transmitted light of one narrowband region of film to be detected, By entering spectrum groupware after lens focus, the light of different wave length is spatially separated after light splitting, projection To the collecting unit of face battle array gray scale camera.Each width two dimensional image correspondence that face battle array gray scale camera is collected One spectral information of narrowband region, the transverse direction of image transverse direction correspondence film to be detected, represents per a line In the information of the row corresponding wavelength, image is longitudinal to correspond to different spectral wavelengths, each row generation to narrowband region The spectral evolution information of one piece of subregion of table narrowband region, image pixel value size represents certain wavelength Intensity.

Specifically, the camera of light spectrum image-forming is a digital camera for face battle array, and each row of camera are right Answer the spectral evolution curve of a fritter film.Reference object transverse direction physical size is Width, camera point Resolution is N pixels, then horizontal spectral resolution is Width/Npixel, and system Width is to the maximum 1m, Npixel are 2048 to the maximum, and transverse spatial resolution is 0.49mm to the maximum, also can be by setting The individual pixel of adjacent n (=2,3,4 ...) is merged, and obtains relatively low resolution ratio.System is normal Under working condition, transverse spatial resolution is 0.49mm to 49mm.Under particular job state, 1 to 20 point, tracking, analysis, the spectral characteristic of detection film can arbitrarily be selected.Face battle array gray scale Camera longitudinal direction pixel resolution is 1088 to the maximum, also can obtain more low resolution by potting gum. The spectral evolution of each row a certain piece of reference object of correspondence of image, the spectrum maximum of expansion can be included 300 to 1200nm wave-length coverages, also dependent on needing to gather a part of spectrum, such as 380 to 780nm wave-length coverages.From the data for collecting, a number of point is chosen, wavelength resolution is 0.5~10nm, is typically no less than 40 points, is calculated for spectrum and detected.In particular job state Under, 1 to 40 spectroscopic data of point, the spectrum for tracking, analyzing, detecting film may be selected Characteristic.

Spectrum imaging system can gather the spectrum of whole breadth width range, in product motion simultaneously, System frequently gathers spectrum picture, realizes interruption or continuous full duration spectra collection；Or can adopt Collect the spectrum of part breadth width range, in product motion simultaneously, system frequently gathers spectrum picture, Realize the spectra collection of interruption or continuous partial width；Or collecting part breadth width range Spectrum, product motion simultaneously, spectrum imaging system is reciprocated in width, and system is frequent Collection spectrum picture, realizes width multiposition, the spectra collection of length direction interval location；Or Person gathers the spectrum picture of diverse location using many set spectrum groupware and cameras, processes respectively or enters Reprocessed after the splicing of row spectrum picture.

The spectrum imaging system time for exposure is Ex_time, and system running speed is v, direct of travel light Spectral resolution is v/Ex_time, and system maximal rate is v=150m/min, system minimum exposure time It is Ex_time=1ms, now corresponding direct of travel resolution ratio is 2.5mm, can be also transported by reducing Scanning frequency degree obtains direct of travel resolution ratio higher, or the increase time for exposure reduces direct of travel resolution ratio. Under system continuous exposure working condition, direct of travel spectral resolution is 2.5mm to 100mm.

System can be with interval exposure, and interval time is Ex_skip, and the time range is 0s to 10s.

In addition, spectral detection scope is 200nm to 1000nm, according to the feature of detection object, bag Containing two kinds of detection methods of unimodal spectrum and multimodal spectrum：

(1) unimodal spectrum

System automatically analyze obtain film each laterally the dominant wavelength of thin block, half-wave be wide, spectral intensity Whether the spectral targets such as (reflectivity), subsection integral energy, detection spectrum is qualified, and spectral detection is patrolled Collect graph of a relation as shown in table 1.Meanwhile, the value that each index exceedes parameter area is calculated, obtain defective value.

Table 1

Measured value	Parameter area	Individual event test result
			Dominant wavelength/nm	[Peak_low,Peak_high]	It is qualified/unqualified
Half-wave is wide/nm	[Wave_min,Wave_max]	It is qualified/unqualified
			Intensity	[Strength_min,Strength_max]	It is qualified/unqualified
Subsection integral energy	1st section of energy [Ei_min, Ei_max] (i=1 ..., n)	It is qualified/unqualified

Wherein, Peak_low and Peak_high are respectively dominant wavelength low value threshold value and dominant wavelength high level threshold Value；Wave_min and Wave_max are respectively half-wave low value threshold value wide and half-wave high level threshold value wide； Strength_min and Strength_max are respectively intensity low value threshold value and intensity high level threshold value； Ei_min and Ei_max are respectively energy integral low value and energy integral high level.

The scope of each index can manually set, or by the spectral image data of analysis product from Dynamic generation.The spectral information for referring to network analysis certain amount qualified products is automatically generated, its spectrum is obtained Data space 1；The spectral information of certain amount substandard product is analyzed, its spectroscopic data space is obtained 2；Calculate the segmentation boundary line in spectroscopic data space 1 and spectroscopic data space 2, it is as qualified with do not conform to The detection threshold value of lattice.Except qualified/unqualified determination methods shown in table 1, unqualified degree can be with Multiple grades are subdivided into, " qualified/unqualified " of " individual event test result " can be subdivided into table 1 " qualified/slight unqualified/general unqualified/serious unqualified ".

For the product comprising several, the width and width of the first width original position, each width can be manually specified Between distance etc., system carries out spectral detection according to specified parameter.Or system automatically analyzes the effective portion of comparing The spectrum and the spectrum of compartment for dividing, obtain the first width original position, the width of each width and width spacing From etc. data.

Additionally, also spectroscopic data can be converted into CIE XYZ values, CIE L^*a^*b^*Value, CIE h_abWithValue, according to the qualified data area of automatic study generation, or the qualified data model being manually specified Enclose, qualified/unqualified detection is carried out in dependent color spaces (coordinate system).

(2) multimodal spectrum

Multiple unimodal spectrum can be obtained by decoupling, each unimodal foregoing unimodal spectrum of spectral reference Method is analyzed detection, energy integral, centre wavelength, the main ripple of com-parison and analysis each unimodal spectrum The parameter indexs such as intensity long, carry out comprehensive analysis.

In addition, during reflected image detection is carried out, can be by reflected image color low value high The Indexs measures such as scope, low value image template high, figure line number, figure line integrity degree, figure line similarity Whether reflected image is qualified.The scope of each index can manually set, or by analyzing qualified product The spectral image data of product is automatically generated.

During transmission image detection is carried out, can by transmission image color low value scope high, The Indexs measure reflectograms such as low value image template high, figure line number, figure line integrity degree, figure line similarity Seem no qualified.The scope of each index can manually set, or by analyzing the light of qualified products Spectrum view data is automatically generated.

Graphical analysis main website collect spectra collection processing subsystem, reflected image collection with processing subsystem, They are transformed into consistent image resolution ratio by transmission image acquisition and the detection information of processing subsystem, Picture position alignment is carried out, and picture position is aligned with physical location, obtain the testing result of product Information.The defect value of certain picture position (i, j), is the fusion of multiple images defect numerical value, As shown in formula (1).

Wherein, i represents width when gathering view data, and j represents the length of collection view data Direction, w_nScope be [0,1], represent n-th at each position towards view data defect weight system Number, the scope of Blobn (i, j) is [0,255], represents n-th at each position towards view data Defective value, wherein, 0 represents no defect, and 255 represent the defect of most serious. TotolBlob (i, j) represents the defect value at each position.

Specifically, each can be calculated compared to the scaling of artwork by imaging parameters, defect map The lateral resolution of defect point is bx mm/pixel, then i-th point of corresponding lateral attitude is i*bx mm.Figure cycle, gait of march are adopted by direct of travel, defect map can compared to the scaling of artwork The longitudinal frame for being calculated each defect point is by mm/pixel, then j-th point of corresponding horizontal stroke It is j*bx mm to position.When one or more detections are unqualified, position (i, j) is to be judged to not It is qualified.

Alternatively, it is also possible to divide specifications parameter according to the transverse direction and longitudinal direction of view data and product, will scheme Image position and subdivision unit are matched, and i (width position) is corresponded into the subdivision such as width, root Unit, the subdivision units such as section are corresponded to by j (direct of travel position).Analysis main website judges certain position Put product it is unqualified when, relevant information is carried out into display storage；Or quality status stamp subsystem is notified, hold Row flaw labeling；Or quality information is passed into rear process product processing system, subsequently to faulty goods Processed.

Technical scheme is described in detail above in association with accompanying drawing, by technical scheme, Can automatically for user selects suitable film quality detection mode, so as to improve film quality detection The reliability of result, improves the efficiency and quality of thin film testing.

The preferred embodiments of the present invention are the foregoing is only, is not intended to limit the invention, for For those skilled in the art, the present invention can have various modifications and variations.It is all in essence of the invention Within god and principle, any modification, equivalent substitution and improvements made etc. should be included in the present invention Protection domain within.

Claims

1. a kind of film quality detection method, for film quality detecting system, it is characterised in that Including：

According to the sense command for receiving, the selection target imaging mode in default various imaging modes, Wherein, the sense command is included to the periodicity acquisition of film to be detected or according to trigger signal The order of data acquisition is carried out to the film to be detected；

The view data of multiple positions of the film to be detected is gathered using the target imaging mode；

The attribute of the view data of each position in multiple positions, setting shape, setting range Value, image high level template and low value template, the threshold range after data conversion is carried out, determine each position Whether the quality for putting the film to be detected at place qualified, for determine the film to be detected quality whether It is qualified；

Wherein, various imaging modes include：

First imaging mode, the reflected light or transmitted light of a narrowband region of the film to be detected, By the spectrum groupware after lens focus into the film quality detecting system, different wave length after light splitting Light it is spatially separated, project one of the film quality detecting system or one group of face battle array gray scale Camera；

Second imaging mode a, specular light for narrowband region of the film to be detected passes through Into one of the film quality detecting system or one group of gray scale or colored line-scan digital camera after lens focus；

3rd imaging mode a, narrowband region of the film to be detected diffuses, by mirror Head enters one or one group of gray scale or colored line-scan digital camera of the film quality detecting system after focusing on；

4th imaging mode, a transmitted light for narrowband region of the film to be detected, by camera lens Into one of the film quality detecting system or one group of gray scale or colored line-scan digital camera after focusing；

Wherein, various imaging modes obtain the different optical signature of the film to be detected respectively Image.

2. film quality detection method according to claim 1, it is characterised in that described to make The view data of multiple positions of the film to be detected is gathered with the target imaging mode, specific bag Include：

Using to be detected described in image and data collector multi collect corresponding with the target imaging mode The view data of the whole breadth width of film, to gather the full width image number of the film to be detected According to；Or

Using to be detected described in image and data collector multi collect corresponding with the target imaging mode The view data of the part breadth width of film, wherein, described image data acquisition unit is in the width Direction is static or carries out back and forth movement.

3. film quality detection method according to claim 2, it is characterised in that different The attribute of the corresponding described image data of imaging mode is different, wherein,

The attribute of the corresponding described image data of the light spectrum image-forming mode includes：

The dominant wavelength of described image data, half-wave are wide, peak strength, energy integral, certain wavelength zone Between dominant wavelength, certain range of wavelengths half-wave is wide, certain range of wavelengths peak strength, certain ripple Interval energy integral, CIE XYZ values, CIE L long^*a^*b^*Value, CIE h_abWithValue, and

The attribute bag of the catoptric imaging mode and the corresponding described image data of the transmission imaging mode Include at least one of or its combination：

View data color low value scope high, low value view data template high, figure line number, figure line are complete Whole degree, figure line similarity.

4. film quality detection method according to claim 3, it is characterised in that it is described really Whether the quality of the film to be detected at fixed each position is qualified, specifically includes：

The attribute of the view data according to each position, is calculated by default defective value computing formula The defect value of each position, so that the defect value according to each position is true Whether the quality of the film described to be detected at fixed described each position is qualified, the default defective value meter Calculating formula is：

T o t o l B l o b (i, j) = \underset{n}{Σ} B l o b n (i, j) * w_{n}

5. film quality detection method according to any one of claim 1 to 4, its feature It is before whether the quality of the film to be detected at described each position of determination is qualified, also to include：

The attribute of the view data of each position according in the multiple position, determines the figure As the qualified data space and unqualified data space of data；

Quality discrimination is set with the line of demarcation of the unqualified data space according to the qualified data space Condition, for according to the quality discrimination condition, determining whether the quality of the film to be detected is qualified； And

Attribute, the qualified data space and the unqualified data space according to described image data, Determine the Blobn (i, j) of described image data.

6. a kind of film quality detecting system, it is characterised in that including：

Imaging mode select unit, according to the sense command for receiving, in default various imaging modes Middle selection target imaging mode, wherein, the sense command includes adopting the periodicity of film to be detected The order of data acquisition is ordered or the film to be detected is carried out according to trigger signal to collection；

Image data acquiring unit, many of the film to be detected are gathered using the target imaging mode The view data of individual position；

Quality discrimination unit, the attribute of the view data of each position in multiple positions, setting Shape, setting range value, image high level template and low value template, carry out the threshold value model after data conversion Enclose, determine whether the quality of film to be detected at each position is qualified, it is described to be detected for determining Whether the quality of film is qualified；

Wherein, various imaging modes include：

7. film quality detecting system according to claim 6, it is characterised in that the figure As data acquisition unit includes：

First collecting unit, it is multiple using image and data collector corresponding with the target imaging mode The view data of the whole breadth width of the film to be detected is gathered, to gather the film to be detected Full width image data；And/or

Second collecting unit, it is multiple using image and data collector corresponding with the target imaging mode The view data of the part breadth width of the film to be detected is gathered, wherein, described image data are adopted Storage is static in the width or carries out back and forth movement.

8. film quality detecting system according to claim 7, it is characterised in that different The attribute of the corresponding described image data of imaging mode is different, wherein,

9. film quality detecting system according to claim 8, it is characterised in that the matter Amount judgement unit specifically for：

T o t o l B l o b (i, j) = \underset{n}{Σ} B l o b n (i, j) * w_{n}

10. the film quality detecting system according to any one of claim 6 to 9, its feature It is also to include：

Criterion setting unit, whether the quality of the film to be detected at described each position of determination Before qualified, the attribute of the view data of each position according in the multiple position, it is determined that The qualified data space of described image data and unqualified data space, and it is empty according to the qualified data Between quality discrimination condition is set with the line of demarcation of the unqualified data space, for according to the quality Criterion, determines whether the quality of the film to be detected is qualified；And

Defective value determining unit, attribute, the qualified data space and institute according to described image data Unqualified data space is stated, the Blobn (i, j) of described image data is determined.