CN106916331A - The polymer coating of plasma polymerization - Google Patents

The polymer coating of plasma polymerization Download PDF

Info

Publication number
CN106916331A
CN106916331A CN201610837103.2A CN201610837103A CN106916331A CN 106916331 A CN106916331 A CN 106916331A CN 201610837103 A CN201610837103 A CN 201610837103A CN 106916331 A CN106916331 A CN 106916331A
Authority
CN
China
Prior art keywords
electricity
electro
coating
plasma
optical package
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610837103.2A
Other languages
Chinese (zh)
Inventor
蒂莫西·冯韦尔讷
罗德尼·爱德华·史密斯
马克·罗布森·汉弗莱斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semblant Global Ltd
Semblant Ltd
Original Assignee
Semblant Global Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semblant Global Ltd filed Critical Semblant Global Ltd
Publication of CN106916331A publication Critical patent/CN106916331A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/12Chemical modification
    • C08J7/16Chemical modification with polymerisable compounds
    • C08J7/18Chemical modification with polymerisable compounds using wave energy or particle radiation
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J3/00Processes of treating or compounding macromolecular substances
    • C08J3/28Treatment by wave energy or particle radiation
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/282Applying non-metallic protective coatings for inhibiting the corrosion of the circuit, e.g. for preserving the solderability
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/284Applying non-metallic protective coatings for encapsulating mounted components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09818Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
    • H05K2201/09872Insulating conformal coating

Abstract

The application is related to the polymer coating of plasma polymerization.A kind of electricity or electro-optical package include the base material comprising insulating materials, there are multiple propagation tracks at least one surface of base material, be connected at least one electricity or electrooptic block of at least one propagation track and the polymer of the plasma polymerization comprising at least one surface, multiple propagation tracks and at least one electricity or electrooptic block that base material is completely covered it is continuous coated.

Description

The polymer coating of plasma polymerization
It is on 02 21st, 2011 that the application is the applying date, Application No. 201180010785.5, entitled " wait from The divisional application of the application of the polymer coating of daughter polymerization ".
The polymer coating of the plasma polymerization the present invention relates to be used to coat electricity and electro-optical package and part, and relate to And the method for the coating.
Background
Conformal coating is used many years in electronic equipment industry, for protecting electrical component (electrical Assembly) from operation during environmental exposure.Conformal coating is that the protectiveness consistent with the profile of PCB and its part is clear Thin, the flexible layer of paint.Conformal coating protect a circuit from eroding chemical (for example salt, solvent, gasoline, oil, acid and Environmental contaminants), humidity/condensation, vibration, electric leakage, electromigration and dendritic growth.Current conformal coating be typically 25 to 200 μ m-thicks and it is normally based on epoxy resin, acrylic resin or organic siliconresin.These materials are all as must be answered It is deposited with the liquid being then solidificated on component.Recently, expensive Parylene also already functions as conformal coating.It is poly- Paraxylene is deposited usually using the widely known conventional chemical vapor technology of those skilled in the art.
In the presence of many shortcomings being associated with current conformal coating.Technical requirements for depositing coating will by it The contact that component is connected to other devices is blanked before coating, to prevent conformal coating from covering contact.It is applied Contact will not be able to be electrically connected to other devices because conformal coating is thick and insulation.
If additionally, requiring reprocessing electrical component, then it is extremely difficult and high cost to remove current conformal coating 's.In the case where not being previously removed, in the absence of the possibility that solder or welding pass through coating.Further, since generally using In the liquid technology for depositing these conformal coatings, there is the tendency for forming defect such as bubble in coating.The reduction of these defects The protective value of conformal coating.The other problem of prior art conformal coating is, due to the liquid used during coating Body technique, it is difficult to be deposited on coating below the part on component.
Summary of the invention
Present inventor has surprisingly discovered that, the polymer of plasma polymerization can be used in electrical component and electro-optical package Excellent conformal coating is formed on (electro-optical assembly).These coatings are not only continuously and substantially It is flawless, and they are also overcome on existing cated problem discussed above.Additionally, plasma of the invention is poly- The polymer coating of conjunction is easy to be deposited on device and is relatively cheap.
Therefore, the present invention provides electricity or electro-optical package, and the electricity or electro-optical package include the base material comprising insulating materials, exist Multiple propagation tracks at least one surface of the base material, at least one electricity or electric light that are connected at least one propagation track Part and comprising at least one surface of the base material, the multiple propagation track and at least one electricity is completely covered Or the polymer of the plasma polymerization of electrooptic block is continuous coated.
In one embodiment, the polymer of the plasma polymerization is the hydrocarbon or halogenated hydrocarbons of plasma polymerization.
In one embodiment, the polymer of the plasma polymerization is the fluorohydrocarbon of plasma polymerization.
In one embodiment, the fluorohydrocarbon of the plasma polymerization is selected from following by plasma polymerization Obtained by one or more precursor compound:Perfluoro alkane, perfluoroolefine, perfluoroalkynes, fluoric ether, fluoroolefin, Fluoroalkynes, fluoro acrylic ester, fluoroester, fluoric silane, fluorochloroparaffins, perhaloalkenes, fluorine chlorine alkynes, fluorine chloracrylic acid Ester, fluorine chlorine ester and chlorofluorosilane.
In one embodiment, at least one electricity or electrooptic block are electric parts, and at least one conduction Rail is conductor rail.
In one embodiment, the electric part is connected at least one conduction by least one conjugate Rail, and described continuous coated at least one conjugate is completely covered.
In one embodiment, at least one conjugate is soldered joint, welding point, wire bond joint, leads Electric adhint, crimping or press-fitting joint.
In one embodiment, at least one conjugate is soldered joint, welding point or wire bond joint.
In one embodiment, at least one electricity or electrooptic block are electrooptic blocks, and described at least one passes Guide rail is conductor rail or guide-lighting rail.
In one embodiment, the multiple propagation track also includes at least one external contact devices, and described continuous Coating is completely covered at least one external contact devices.
In one embodiment, at least one external contact devices are electric contact pieces.
In one embodiment, at least one external contact devices are light contacts.
In one embodiment, the electricity or electro-optical package also include being connected to the light part of guide-lighting rail.
In one embodiment, the electricity or electro-optical package also include the first other continuous coated and optional second Other is continuous coated, described first it is other it is continuous coated comprising be completely covered it is described it is continuous coated it is foregoing wait from The polymer of daughter polymerization, described second it is other it is continuous coated comprising be completely covered the described first other coating such as preceding institute The polymer of the plasma polymerization stated.
In one embodiment, the electricity or electro-optical package also include the institute of the polymer for being deposited on plasma polymerization Electrically or optically part is at least to state continuous coated at least a portion and the base material, the multiple propagation track and described at least one The coating of epoxy resin, acrylic resin, organic siliconresin or Parylene between a part.
In one embodiment, the electricity or electro-optical package also include surface modification coating, the surface modification coating Comprising being deposited between at least one surface of (a) continuous coated and (b) described base material and the multiple propagation track Halogenated hydrocarbon polymer, wherein the surface modification coating covers at least a portion of the multiple propagation track, and it is described at least One electricity or electrooptic block are connected at least one propagation track by the surface modification coating.
In one embodiment, the soldered joint, the welding point or surface described in wire bond fitting abutment are repaiied Decorations coating.
In one embodiment, the electricity or electro-optical package are printed circuit board (PCB)s.The present invention also provide it is a kind of include with Under method:A () provides electricity or electro-optical package, the electricity or electro-optical package include the base material comprising insulating materials, are present in institute State the multiple propagation tracks at least one surface of base material and be connected at least one electricity or electric light of at least one propagation track Part;(b) deposited by plasma-polymerization it is continuous coated, it is described continuous coated comprising the base material is completely covered The polymer at least one surface, the multiple propagation track and at least one electricity or electrooptic block.
In one embodiment, the deposition for being carried out by plasma-polymerization includes that plasma polymerization is for example preceding One or more described precursor compound.
The present invention also provides electricity or electro-optical package as obtained by method as defined above.
The present invention is also provided by the continuous coated electricity being completely covered of the polymer comprising plasma polymerization or electric light portion Part.
In one embodiment, the invention provides a kind of method, including (a) makes electricity or electric light group as defined above Part experiences plasma removal process so that described continuous coated and when it is present, described first it is other continuous coated and Obtained by described second other continuous coated and/or described surface modification coating is removed, and then (b) is optionally reprocessed Electricity or electro-optical package, and then (c) deposits the continuous coated of replacement, the replacement optionally by plasma-polymerization It is continuous coated comprising at least one surface, the multiple propagation track and described at least one that the base material is completely covered The polymer of electricity or electrooptic block.
The present invention is also provided includes following method:A () makes electricity or electro-optical package experience plasma as defined above Remove technique so that continuous coated to be removed, and then (b) optionally reprocesses the electricity or electro-optical package, and then (c) appoints Selection of land deposits the continuous coated of replacement by plasma-polymerization, the replacement it is continuous coated described comprising being completely covered The polymer at least one surface, the multiple propagation track and at least one electricity or electrooptic block of base material.
In one embodiment, the invention provides a kind of method, including by electricity as defined above or electric light group Part described continuous coated and when it is present, described first other continuous coated and described second is other continuous coated And/or the surface modification coating carries out solder, with the shape between other electricity or electrooptic block and at least one propagation track Into soldered joint, wherein soldered joint adjoining is described continuous coated and when it is present, the described first other company Continuous coating and the second other continuous coated and/or described surface modification coating.
The present invention is also provided includes following method:Carried out by electricity as defined above or the continuous coated of electro-optical package Solder, forms soldered joint, the soldered joint between other electricity or electrooptic block and at least one propagation track Adjoining is continuous coated.
The present invention is also provided includes following method:A () makes to include that following electric or electro-optical package experience plasma is removed Technique is gone so that the surface modification coating is removed:Base material comprising insulating materials, be present in the base material at least one Multiple propagation tracks at surface, the surface modification comprising at least one of halogenated hydrocarbon polymer for covering the multiple propagation track Coating (surface-finish coating) and at least one propagation track is connected to extremely by the surface modification coating Few an electricity or electrooptic block;Then (b) deposited by plasma-polymerization it is continuous coated, it is described continuous coated to include At least one surface of the base material, the multiple propagation track and at least one electricity or electrooptic block is completely covered Polymer as defined above.
The present invention is also provided includes following method:A () makes to include that following electric or electro-optical package experience plasma is removed Technique is gone so that the surface modification coating is removed:Base material comprising insulating materials, be present in the base material at least one Multiple propagation tracks at surface and the surface comprising at least one of halogenated hydrocarbon polymer for covering the multiple propagation track are repaiied Decorations coating, then electricity or electrooptic block are connected at least one propagation track by (b), and then (c) is heavy by plasma-polymerization Product is continuous coated, described continuous coated comprising at least one surface, the multiple propagation track that the base material is completely covered With described at least one electricity or the polymer as defined above of electrooptic block.
The present invention also provides the electricity of the conformal coating with the polymer comprising plasma polymerization as defined above Or electro-optical package.
The present invention also provides the polymer of plasma polymerization as defined above as the guarantor for electricity or electro-optical package The purposes of the coating of shape.
The present invention also provides a kind of method for conformally coating electricity or electro-optical package, and the method includes passing through plasma Body-polymerization deposits polymer as defined above.
Brief description
Figure 1A shows the result of the X-ray photoelectron spectroscopic analysis of the fluoropolymer of plasma polymerization.
Figure 1B shows the result of the X-ray photoelectron spectroscopic analysis of the fluoropolymer obtained by standard polymerization techniques.
Fig. 2A shows the electron microscope image of the fluoropolymer coating of plasma polymerization of the invention and the painting The smooth physical property of layer.
Fig. 2 B show the electron microscope image of the PTFE coatings deposited by standard polymerization techniques, and it has wherein fibril The clearly visible structure of dimension.
Fig. 3 to Fig. 7 shows the electrical component of some implementation methods.
Fig. 8 shows the electro-optical package of some implementation methods.
Fig. 9 shows the electric part of some implementation methods.
Figure 10 shows the example of the equipment that can be used for the polymer coating to form plasma polymerization of the invention.
Figure 11 A, Figure 11 B and Figure 11 C are the flow charts of some implementation methods of display methods.
The detailed description of invention
The present invention relates to electricity and electro-optical package.Electrical component generally includes at least one electric part.Electro-optical package is generally included At least one electrooptic block, and can also optionally include at least one electric part.Electricity or electro-optical package are preferably printing electricity Road plate.
The continuous coated polymer comprising plasma polymerization of the invention.It is of the invention continuous coated to prevent to electricity Or the environmental damage of electro-optical package.Environmental damage generally by due at ambient or elevated temperatures constituent of atomsphere (such as oxygen, SO2、H2S and/or NO2) and/or the corrosion of moisture cause.In addition, it is of the invention it is continuous coated can continue protection electricity and electric light Component, compared to the current conformal coating that may be degraded due to temperature higher, using more on electricity and electro-optical package Temperature range high.
Continuous coated preferably conformal coating of the invention.
The polymer of plasma polymerization is the unique category of polymer that can not be prepared by traditional polymerization.Deng The polymer of gas ions polymerization has highly unordered structure and typically highly cross-linked, comprising random branch and retains Reactive moieties.Therefore the polymer of plasma polymerization is different from by tradition well known by persons skilled in the art in chemistry Polymer prepared by polymerization.These chemistry and physics difference is well-known and description is in such as Plasma Polymer Films,Hynek Biederman,Imperial College Press 2004。
The polymer of plasma polymerization can be obtained typically by the plasma-polymerization technology that following article is defined in more detail .
The polymer of plasma polymerization is typically hydrocarbon, halogenated hydrocarbons, silicone, siloxanes, silane, the silicon of plasma polymerization Azane or stannane.
The hydrocarbon of plasma polymerization typically optionally includes straight chain and/or side chain the polymer of annulus.Institute Annulus preferably alicyclic ring or aromatic ring are stated, more preferably aromatic ring.Preferably, the hydrocarbon of plasma polymerization is not comprising any Annulus.Preferably, the hydrocarbon of plasma polymerization is the polymer of side chain.
Typically optionally straight chain and/or side chain the polymerization comprising annulus of the halogenated hydrocarbons of plasma polymerization Thing.The annulus is preferably alicyclic ring or aromatic ring, more preferably aromatic ring.Preferably, the halogenated hydrocarbons of plasma polymerization is not Comprising any annulus.Preferably, the halogenated hydrocarbons of plasma polymerization is the polymer of side chain.
The hydrocarbon and halogenated hydrocarbons of the plasma polymerization including aromatic fractions are respectively the aromatic hydrocarbon and virtue of plasma polymerization Race's halogenated hydrocarbons (such as aromatics fluorohydrocarbon).The polystyrene of example including plasma polymerization and plasma polymerization it is poly- to two Toluene.The Parylene of particularly preferred plasma polymerization.The Parylene of plasma polymerization can be unsubstituted Or be substituted by one or more substituents.Preferred substitution base includes halogen.And fluorine is most preferred.By one or more halogen The Parylene of plain atom substitution is halo Parylene.It is fluorine by the Parylene that one or more fluorine atoms replace For Parylene.Unsubstituted Parylene is most preferred.
The hydrocarbon of plasma polymerization is optionally comprising the hetero atom selected from N, O, Si and P.It is preferable, however, that plasma The hydrocarbon of polymerization does not include N, O, Si and P hetero atom.
The halogenated hydrocarbons of plasma polymerization is optionally comprising the hetero atom selected from N, O, Si and P.It is preferable, however, that wait from The halogenated hydrocarbons of daughter polymerization does not include N, O, Si and P hetero atom.
The hydrocarbon of oxygen containing plasma polymerization preferably includes carbonyl moiety, more preferably ester and/or amide moieties.It is preferred that The hydrocarbon polymer of the oxygen containing plasma polymerization of classification is the acrylate polymer of plasma polymerization.
The halogenated hydrocarbons of oxygen containing plasma polymerization preferably includes carbonyl moiety, more preferably ester and/or amide moieties. The halogenated hydrocarbon polymer of the oxygen containing plasma polymerization of preferred classes is the haloacrylic acid ester polymer of plasma polymerization, The fluoro acrylic ester polymer of such as plasma polymerization.
The hydrocarbon of nitrogenous plasma polymerization preferably includes nitro, amine, acid amides, imidazoles, diazole, triazole and/or tetrazolium Part.
The halogenated hydrocarbons of nitrogenous plasma polymerization preferably comprising nitro, amine, acid amides, imidazoles, diazole, triazole and/or Tetrazolium part.
The silicone of plasma polymerization, siloxanes, silane and silazane are optionally replaced by one or more fluorine atoms.So And, silicone, siloxanes, silane and silazane are preferably unsubstituted.Preferred silazane is HMDS.
Preferably, the polymer of plasma polymerization is the halogenated hydrocarbons of plasma polymerization, and more preferably plasma gathers The fluorohydrocarbon of conjunction.Most preferably, the polymer of plasma polymerization is side chain and not comprising heteroatomic plasma polymerization Fluorohydrocarbon.
As used herein, term halo is preferably fluoro, chloro, bromo and iodo.Fluoro and chloro be it is preferred, And fluoro is most preferred.There is halogen identical to look like.
Component of the invention can be prepared by via plasma polymerization deposition polymer.Plasma-polymerization leads to It is often the effective technology for depositing thin film coatings.Generally, plasma-polymerization provides the coating of fine quality, because polymerization Reaction is in situ to be occurred.Therefore, the polymer of plasma polymerization be typically deposited in small recess, below part and Pass through in some cases in the through hole that common Liquid coating techniques will be unreachable to.
Additionally, being formed in situ for polymer can provide good adhesion to the surface of application coating, because polymer is logical Often reacted with surface during depositing.Therefore, in some cases, the polymer of plasma polymerization can be deposited over other On the material that conformal coating can not be deposited thereon.
The additional advantage of plasma-polymerization technology of the invention is not need dried/cured coating after deposition. Prior art for coating needs dried/cured step, and this causes to form cure/dry defect on the surface of the coating.Deng Gas ions-polymerization avoids the formation of cure/dry defect.
Plasma-deposited to be carried out in the reactor for producing gaseous plasma, gaseous plasma includes ionization Gas ion, electronics, atom and/or neutral substance.Reactor can include room, vacuum system and one or more energy Source, but can be to use the reactor for being configured to any suitable type for producing gaseous plasma.Energy source can include matching somebody with somebody It is set to any suitable device that one or more gas is changed into gaseous plasma.Preferably, energy source includes heating Device, radio frequency (RF) generator and/or microwave generator.
In some embodiments, electrically or optically component can be placed in the room of reactor, and vacuum system can be used for Room is evacuated to 10-3Pressure in the range of to 10mbar.Then one or more gas can be pumped in entering the room, and energy Amount source can produce the gaseous plasma of stabilization.One or more precursor compound may then act as gas and/or liquid Body is introduced into the gaseous plasma in room.When being introduced into gaseous plasma, precursor compound can be ionized And/or decompose to produce a series of active materials in the plasma, the active material polymerization produces polymer coating.
The fluorohydrocarbon of plasma polymerization is preferably one kind of the hydrocarbon material comprising fluorine atom by plasma polymerization Or various precursor compounds and obtain.The preferred hydrocarbon material comprising fluorine atom is perfluoro alkane, perfluoroolefine, perfluor alkynes Hydrocarbon, fluoric ether, fluoroolefin, fluoroalkynes.Example includes C3F6And C4F8
Other preferred precursor compounds are fluorochloroparaffins, perhaloalkenes and fluorine chlorine alkynes.Example includes C2F3Cl and C2F4Cl2
The Parylene of plasma polymerization is preferably by two pairs of sub- dimethylbenzene of plasma-polymerization, sub- dimethylbenzene Or dimethylbenzene can be obtained.
The definite property of the polymer coating of plasma polymerization and composition generally depend on one in following condition or It is multiple:(i) selected plasma gas;(ii) the specific precursor compound for being used;(iii) precursor compound Amount (it can be determined by combining the pressure of precursor compound with flow);(iv) ratio of precursor compound;(v) The order of precursor compound;(vi) plasma pressure;(vii) plasma driving frequency;(viii) pulse width timing; (ix) coating time;(x) plasma power (including peak value and/or average plasma power);(xi) room electrode arrangement; And/or (xii) introduces the preparation of component.
Generally, plasma driving frequency is 1kHz to 1GHz.Generally, plasma power is 500 to 10000W.It is logical Often, mass flow is 5 to 2000sccm.Generally, operating pressure is 10 to 500 millitorrs.Generally, coating time is 10 seconds to 20 points Clock.
Pulsed plasma system can also be used.
However, as technical staff is readily apparent that, preferred condition will depend on the size and geometry of plasma chamber. Therefore, depending on the specific plasma chamber being being used, technical staff's modification operating condition is probably beneficial.
Continuous coated surface be able to can be controlled by carefully selecting presoma and plasma process conditions.Depend on Specific plasma polymer, surface can be hydrophilic or hydrophobic.
Hydrophobic coating preferably shows the water contact angle more than 90 degree and more preferably larger than 105 degree.Hydrophobic coating Preferably displaying is less than 35 dynes/cm and even more preferably less than the surface energy of 30 dynes/cm.In some cases, it is continuous coated Hydrophobic nature be probably high expectations because they will reduce the possibility damaged by moisture of component.
However, in some cases, hydrophilic coating is probably desired.If for example, other coating or label (such as bar code) will be applied to continuous coated, then hydrophilic coating is probably desired.Being generally easier to will be other Coating adheres to hydrophilic coating.Hydrophilic coating preferably shows the water contact less than 70 degree and even more preferably less than 55 degree Angle.Hydrophilic coating preferably shows more than 45 dynes/cm and the most preferably more than surface energy of 50 dynes/cm.
As used herein, " continuous " means that coating is substantially flawless.Possible defect is included in coating Hole, crack and rupture.It is continuous coated to use the polymer of plasma polymerization being formed in situ on electricity or electro-optical package To realize.Using plasma polymerisation process described below, can on all surface contacted with plasma gas shape Into continuous coated.When high-aspect-ratio part is coated for example generally in part present on electronics or electro-optical package, this can be Specific advantage.Pendant (underhang) is can also allow for using plasma-polymerization method to be also covered by the coating.
It is continuous coated generally have 1nm to 10 μm, preferably 1nm to 5 μm, more preferably 5nm to 500nm, more preferably Average value-the average thickness of 100nm to 300nm and more preferably 150nm to 250nm e.g., from about 200nm.Continuous coated thickness Can be substantially homogeneous or can change from point to points.It is continuous coated to be deposited as in specific implementation method So that it is consistent with the three-dimensional surface of base material, propagation track and part.
Continuous coated at least one surface that base material is completely covered, multiple propagation tracks and at least one electricity or electrooptic block. Preferably, the expose portion at least one surface of coating encapsulation base material, multiple propagation tracks and at least one electricity or electrooptic block. Therefore, it is continuous coated to can be preferred that conformal coating.Conformal coating can conformally coat at least one table of base material Face, multiple propagation tracks and at least one electricity or electrooptic block.In order to avoid feeling uncertain, mention coating as discussed below and cover completely Cover other articles, it is intended that with equivalent as defined above.
It is probably in some cases larger electric or electricity completely by the region of the electricity of continuous coated covering or electro-optical package The remainder of a part for optical assembly, the larger electricity or electro-optical package can be not coated with.
The electricity and/or optical property of the continuous coated component that can be applied to it cause the change of minimum.For example, component In the induction coefficient of circuit only coated may minimally influence.In some cases, compared to usually considerably changing Become circuit property other conformal coatings, this can be it is highly advantageous, this may be needed in design component consider by The property of the change of the component that other coatings are caused.In some cases, coating of the invention can eliminate the requirement.
If for electricity or electro-optical package, it is necessary to very highly protective from environment, then the polymerization of plasma polymerization The other continuous coated of thing can be used in initial continuous coated top.Therefore, electricity or electro-optical package can also include Comprising the polymer that continuous coated plasma polymerization as defined above is completely covered first is other continuous coated, and Optional comprising the polymer that the first other continuous coated plasma polymerization as defined above is completely covered second Other is continuous coated.If it is desired, it is possible to using plasma polymerization as defined above polymer also in addition It is the continuous coated such as the 3rd to the tenth continuous coated.For the polymerization of each other continuous coated plasma polymerization Thing can be independently with initial continuous coated plasma polymerization polymer it is identical or different.Each is other continuous Coating for depositing continuous coated method generally by depositing.Initial continuous coated and any in addition continuous coated Definite property can be selected as improving or optimizing the performance required for the component of coating.For example, it may be possible to be it is desirable that, having High hydrophobicity coating as coating is most gone up, to realize good resistance to moisture resistance.
The coating of plasma polymerization of the invention can be also used for the existing electricity to being coated by another conformal coating Or electro-optical package provides extra environmental protection.In the case where water-fast external skin is needed, this can be favourable.Therefore, Electricity or electro-optical package can also include the polymer for being deposited on plasma polymerization continuous coated at least a portion and base material, Epoxy resin, acrylic resin, organosilicon between multiple propagation tracks and at least one electricity or at least a portion of electrooptic block The coating of resin or Parylene.In some embodiments, Parylene coating can be by chemical vapor deposition side Method is deposited.
Therefore, electricity or electro-optical package can include the base material comprising insulating materials, exist at least one surface of base material Multiple propagation tracks, be connected at least one propagation track at least one electricity or electrooptic block, at least a portion of base material Epoxy resin, acrylic resin, (it can be deposited the coating of organic siliconresin or Parylene by conventional chemical vapor Method is deposited) and comprising at least one surface, multiple propagation tracks, at least one electricity or the electrooptic block that base material is completely covered With the company of the polymer of the plasma polymerization of the coating of epoxy resin, acrylic resin, organic siliconresin or Parylene Continuous coating.
Preferably, the coating of epoxy resin, acrylic resin, organic siliconresin or Parylene is conformal coating. Such arrangement can be by making to include at least one that is deposited on base material, multiple propagation tracks and at least one electricity or electrooptic block The electricity or electro-optical package experience of the coating of epoxy resin, acrylic resin, organic siliconresin or Parylene on point are herein It is prepared by the painting method of description.
The continuous coated electricity or electro-optical package being also applied to halogenated hydrocarbons surface modification coating, such as WO 2008/ Described in 102113 (its content is incorporated herein by reference).Therefore, electricity or electro-optical package can include comprising being deposited on A () is continuous coated and surface modification of halogenated hydrocarbon polymer between at least one surface of (b) base material and multiple propagation tracks is applied At least a portion of the multiple propagation tracks of layer, wherein surface modification coating covering, and at least one electricity or electrooptic block pass through surface Modified coatings are connected at least one propagation track.Preferably, surface modification coating include fluorinated hydrocarbon polymer, more preferably wait from The fluorinated hydrocarbon polymer of daughter polymerization.
Electricity or electro-optical package can also include the base material comprising insulating materials, exist it is many at least one surface of base material Individual propagation track, at least one electricity or electrooptic block that are connected at least one propagation track, comprising being deposited on multiple propagation tracks extremely The surface modification coating of the halogenated hydrocarbon polymer in a few part and comprising at least one surface, the multiple that base material is completely covered Propagation track, at least one electricity or electrooptic block and surface modification coating plasma polymerization polymer it is continuous coated, its In at least one electricity or electrooptic block at least one propagation track is connected to by surface modification coating.
Preferably, electricity or electrooptic block are connected at least one biography via soldered joint, welding point or wire bond joint Guide rail, and soldered joint, welding point or wire bond fitting abutment surface modified coatings.
When component includes the coating of surface modification coating or epoxy resin, acrylic resin or organic siliconresin, component Can be by making the component of the coating with appropriate surface modification coating or epoxy resin, acrylic resin or organic siliconresin Painting method as described above is experienced to prepare.Similarly, in addition continuous coated generally by coating as described above Method is deposited.
The additional advantage of the coating of plasma polymerization is, in some cases, they can easily by wait from Daughter removes technique to remove.Plasma removal process can include plasma etching coating with exposed to following electricity or The surface of electro-optical package.Coating can have the thickness of about 200nm.Electricity or electric light are applied to using method known in the art The thickness of traditional conformal coating of component is generally between 25 and 200 μm.Current guarantor is removed using plasma etching The coating of shape can be time-consuming and high cost, because to remove the material of large volume.Therefore, electric or electricity as defined above Optical assembly can experience plasma removal process.The plasma removal process is usually removed essentially all of continuous painting Layer.When it is present, it will be usually removed essentially all of other continuous coated and/or surface modification coating.Plasma Technique is removed to generally include for electricity or electro-optical package to be put into plasma chamber, and coating chemically and/or is physically impacted in introducing Surface reactant gas plasma removing material and little by little be etched back to initial on following surface.
The technique can be quick and inexpensive and therefore be favourable.Then, the electricity of coating is removed from it Or electro-optical package can be reworked, this is typically by the other part of addition or replaces existing part.Selectively, such as Connector of the fruit between propagation track and part is damaged in use, then can reprocess the connector.
Complete after reprocessing, the continuous coated of the replacement comprising polymer can be optionally by plasma-polymerization To deposit, the coating is completely covered at least one surface, multiple propagation tracks and at least one electricity or the electrooptic block of base material.Cause This, in some cases, the electricity or electro-optical package of damage can easily be repaired.
The additional advantage of the coating of plasma polymerization is that it can remove coating before reprocessing.This Because, in some cases, it can be possible to solder can be carried out by coating.In some cases, it is also possible to can be by electricity Or the primary coat of electro-optical package is with when it is present, the first other coating and the second other coating and/or surface modification are applied Layer carries out solder, and soldered joint is formed between other electricity or electrooptic block and at least one propagation track.Solder Joint can abut continuous coated with when it is present, the first other coating and the second other coating and/or surface modification are applied Layer.
Other application includes removing surface modification coating as described above by plasma removal process, then Deposit plasma-polymerization polymer as described above.Another application includes being removed by plasma removal process Surface modification coating as described above, is then connected to propagation track by electricity or electrooptic block, and then deposition as retouched above The plasma-polymerization polymer stated.
Electricity or electro-optical package can include it being conductor rail or guide-lighting rail (optically conductive track) Multiple propagation tracks.
Conductor rail generally includes any suitable conductive material.Preferably, conductor rail includes gold, tungsten, copper, silver, aluminium, partly leads The doped region of body base material, conducting polymer and/or electrically conductive ink.It is highly preferred that conductor rail includes gold, tungsten, copper, silver or aluminium.
The suitable shape of propagation track and configuration can be selected for discussed specific group by those skilled in the art Part.
Generally, conductor rail attaches to the surface of base material along the whole length of base material.Selectively, conductor rail can be two Base material is attached at individual or more point.For example, conductor rail can at two or more points, but not be along the whole of base material Individual length line attaches to base material.
Conductor rail is formed on base material usually using any suitable method well known by persons skilled in the art.It is excellent in one kind In the method for choosing, conductor rail is formed on base material using " subtracting " technology.Generally, in the method, metal level (for example, Copper Foil, Aluminium foil etc.) surface of base material is bound to, and the unnecessary portion of metal level is then removed, leave required propagation track.Metal level Unnecessary portion generally by chemical etching or photoetch, mill come from base material remove.In the selectable preferred side of one kind In method, propagation track is formed on base material using " addition " technology, for example such as, plating, the deposition using reverse mask and/or appoint What geometrically controlled depositing operation.Selectively, base material can be silicon chip or chip, and it generally has doped region conduct Propagation track.
Guide-lighting rail generally includes any suitable optical material.Preferably, guide-lighting rail is fiber waveguide, and it is generally included wherein The change of refractive index is for propagating light transmitting material of the electromagnetic radiation by required path.Waveguide can for example by by covering Or boundary layer is applied to light transmitting material to produce, wherein covering or boundary layer are made up of the material of different refractivity.May be selected Ground, waveguide can be by adulterating or changing light transmitting material to produce the region with variable refractive index to produce.Therefore, waveguide Can be independent part or the part being integrated into base material.Typical light transmitting material is glass, doped-glass and plastics.
Multiple propagation tracks can include the mixing of only conductor rail, only guide-lighting rail or conductor rail and guide-lighting rail.It is more than when existing During one conductor rail, each rail can be made and/or be of similar shape by identical material as defined above, or can Selectively, can have various rail materials and/or rail shape.When there is more than one guide-lighting rail, each rail can It is made and/or is of similar shape with by identical material as defined above, or selectively, can has various Rail material and/or rail shape.
Multiple propagation tracks can also include at least one external contact devices.It is continuous coated to be preferably completely covered at least one Individual external contact devices.
The definite property of external contact devices can depend on needing the component of contact and the property of device.Suitably connect Contact element can routinely be selected by those skilled in the art.Generally, external contact devices are electrically or optically contact (optical contact).External contact devices can be a part for multiple propagation tracks.Selectively, external contact devices can be electricity or Light connects are in the other part of at least one propagation track.
The coating of plasma polymerization can be allowed in (a) external contact devices, preferably electric contact piece (electrical Contact electrical connection) is formed between the corresponding contact on (b) external device (ED), it is continuous coated without removing in advance.Together Sample ground, the coating of plasma-polymerization can be allowed in (a) external contact devices, preferably light contact and (b) external device (ED) On corresponding contact between form light connects, it is continuous coated without removing in advance.Therefore, in any case, in shape Into before the coating of plasma polymerization, can be not required to cover the external contact devices of component.In some cases, this can be Favourable, because covering for external contact devices is probably time-consuming and high cost.
Electricity or electro-optical package can include including the base material of insulating materials.Base material generally includes to prevent base material from electricity Or any suitable insulating materials of the short circuit of electro-optical package.Therefore, in electrical component, base material is preferably electric insulation 's.In electro-optical package, base material is preferably electric insulation and light insulation.
Base material preferably includes epoxy laminate material, synthetic resin-bound paper, epoxy resin bonding glass fabric (ERBGH), composite epoxy material (CEM), PTFE (Teflon) or other polymers material, phenolic aldehyde cotton paper, silicon, glass, ceramics, Paper, cardboard, the material based on natural and/or synthesis timber and/or other suitable fabrics.Base material also optionally includes resistance Combustion agent material, usual fire retardant 2 (FR-2) and/or fire retardant 4 (FR-4).Base material can include single-layer insulation material or multi-layer phase Same or different insulating materials.Base material can be by any one printed circuit board (PCB) being made in material listed above (PCB) plate.
Electricity or electro-optical package include at least one electricity or electrooptic block.
Electric part can be any suitable circuit element of electrical component.Preferably, electric part be resistor, capacitor, Transistor, diode, amplifier, antenna or oscillator.Any suitable quantity and/or the electric part of combination can be connected to electric group Part.
Electric part is preferably connected to conductor rail via conjugate (bond).Conjugate is preferably soldered joint (solder joint), welding point, wire bond joint, conductive adhesion joint, crimping or press-fitting joint.For forming conjugate Suitable solder, welding, wire bond, conductive adhesion and press-fitting technology are well known by persons skilled in the art.It is highly preferred that with reference to Thing is soldered joint, welding point or wire bond joint, and most preferably soldered joint.
Electrooptic block can be for example in active switch, wave filter, adjuster, amplifier and electromagnetism letter in switchable element Number, i.e., the part that optical signal is controlled electrically.Selectively, electrooptic block can be that electromagnetic signal, i.e. optical signal are converted into electricity Subsignal and the part that vice versa, such as optical transmitting set, photo-detector and detector array.Therefore, electrooptic block is preferably It is light emitting diode (LED), laser/led, photodiode, phototransistor, photomultiplier or photo-resistor.
As technical staff is readily apparent that, electrooptic block can have electric input/output and light input/output.Electricity input/defeated Go out preferably can be connected to conductor rail via conjugate as defined above.Light input/output can preferably via combination Thing is connected to guide-lighting rail.
Component can also optionally include light part.Light part can be passive component.Passive component can include, example Such as, coupler, shunt, Y shape shunt, star couplet, fiber and photoswitch.Light part is it is generally preferred to via conjugate It is connected to guide-lighting rail.Light part and conjugate (when it is present) are generally completely by continuous coated covering.
Light connects can be realized by active or passive mechanical structure, aligned portions on active or passive mechanical feature optical Part and propagation track and mechanically these are held in position in.Selectively, light connects can be using optionally with institute Selection/adhesive of controlled refractive index formed.Selectively, light connects can be melted in by by part and propagation track Come together to produce.Selectively, the refractive index of material can be changed for example, by adulterating new material, to produce new connection. Selectively, the in situ addition of suitable material can be employed, to produce new optics geometry.
In one preferred embodiment, electrical component includes the base material comprising insulating materials, has at least the one of base material Multiple conductor rails at individual surface, at least one conductor rail is preferably connected to by least one conjugate as defined above At least one electric part and comprising at least one surface, multiple conductor rails, at least one electric part that base material is completely covered With, when it is present, the fluoropolymer of the plasma polymerization of at least one conjugate it is continuous coated.It is highly preferred that conductive Rail includes at least one external contact devices, and it is typically at least one electric contact piece, and at least one external contact devices are also It is completely covered by continuous coated.
Another preferred embodiment in, printed circuit board (PCB) include the base material comprising insulating materials, there is base material Multiple conductor rails at least one surface, by least one soldered joint, welding point or wire bond joint be connected to At least one electric part of a few conductor rail and comprising at least one surface of base material, multiple conductor rails, extremely is completely covered The fluoropolymer of a few electric part and the plasma polymerization of at least one soldered joint, welding point or wire bond joint It is continuous coated.
Another preferred embodiment in, printed circuit board (PCB) include the base material comprising insulating materials, there is base material Multiple conductor rails including at least one external contact devices at least one surface, by least one soldered joint, Welding point or wire bond joint are connected at least one electric part of at least one conductor rail and comprising base material is completely covered At least one surface, multiple conductor rails, at least one external contact devices, at least one electric part and at least one solder connect Head, the fluoropolymer of the plasma polymerization of welding point or wire bond joint it is continuous coated.
The polymer coating of continuous plasma polymerization can be used for coating electricity or electrooptic block.Therefore, electricity or electric light Part can be by the continuous coated complete of the polymer comprising the plasma polymerization as described by above for electricity or electro-optical package All standing.The part of the coating can be prepared by making part experience painting method as described above.Plasma polymerization Polymer coating can be that electricity or electrooptic block provide fabulous environmental protection, and therefore can be with the case of high level part It is particularly useful.It is preferred embodiment to be completely covered by the continuous coated of the fluoropolymer comprising plasma polymerization Electric part.
The electricity or electrooptic block of coating can be connected at least one propagation track of electrically or optically component, without removing in advance It is continuous coated, generally connected by solder or wire bond in the case of electric part.In this case, essentially all of company Continuous coating can keep perfect, and provide the environmental protection after installing.Selectively, before installing in assembly, apply Layer can be removed by plasma removal process.
In some embodiments, the polymer of plasma polymerization as described above can be used for conformally coating Electricity or electro-optical package or electricity or electrooptic block.
Each aspect of the present invention is described referring now to the implementation method shown in accompanying drawing and reference implementation example, in accompanying drawing In, identical reference numeral refers to identical or similar part.
Description of Drawings
Figure 1A shows the result of the X-ray photoelectron spectroscopic analysis of the fluoropolymer of plasma polymerization.This shows The fluoropolymer of gas ions polymerization includes a high proportion of CF3, CF and C-CF parts, show the branched of height and crosslinking.Figure 1B The fluoropolymer obtained by standard polymerization techniques, i.e., the result of the X-ray photoelectron spectroscopic analysis of commercially available PTFE are shown. This shows the fluoropolymer by standard polymerization techniques acquisition mainly comprising CF2Part and the CF of negligible ratio3, CF and C- CF parts, show very low branched and crosslinking.Described in embodiment 1 by its method for obtaining these results.
Fig. 2A shows the electron microscope image of the fluoropolymer coating of plasma polymerization of the invention and the painting The smooth physical property of layer.Fig. 2 B show the electron microscope image of the PTFE coatings deposited by standard polymerization techniques, its tool There is the clearly visible structure of its fibril.
Fig. 3 shows electrical component, and the electrical component includes the base material 1 comprising insulating materials, there is at least one surface of base material 1 Multiple propagation tracks 2 at place, the electric part 3 for being connected at least one propagation track 2 and comprising being completely covered at least one of base material 1 Continuous coated the 4 of the polymer of the plasma polymerization on surface, multiple propagation tracks 2 and electric part 3.
Fig. 4 shows electrical component, and the electrical component includes the base material 1 comprising insulating materials, there is at least one surface of base material 1 Multiple propagation tracks 2 at place, the electric part 3 that at least one propagation track 2 is connected to by conjugate 5 and comprising base material is completely covered The polymer of the plasma polymerization of 1 at least one surface, multiple propagation tracks 2, electric part 3 and conjugate 5 it is continuous coated 4。
Fig. 5 shows electrical component, and the electrical component includes the base material 1 comprising insulating materials, there is at least one surface of base material 1 Multiple propagation tracks 2 at place, the electric part 3 for being connected at least one propagation track 2, comprising at least one table that base material 1 is completely covered The polymer of the plasma polymerization in face, multiple propagation track 2 and electric part 3 continuous coated 4 and it is continuous comprising being completely covered The first other continuous coated 7 of the polymer of the plasma polymerization of coating 4.
Fig. 6 shows electrical component, and the electrical component includes the base material 1 comprising insulating materials, there is at least one surface of base material 1 Multiple propagation tracks 2 at place, the electric part 3 for being connected at least one propagation track 2 and comprising being completely covered at least one of base material 1 The polymer of the plasma polymerization on surface, multiple propagation track 2 and electric part 3 continuous coated 4 and be deposited on continuous coated 4 At least a portion and at least a portion of base material 1, multiple propagation track 2 and electric part 3 between epoxy resin, acrylic resin Or the coating 8 of organic siliconresin.
Fig. 7 shows electrical component, and the electrical component includes the base material 1 comprising insulating materials, there is at least one surface of base material 1 Multiple propagation tracks 2 at place, the electric part 3 that at least one propagation track 2 is connected to by conjugate 5, comprising base material 1 is completely covered Continuous coated the 4 of the polymer of the plasma polymerization of at least one surface, multiple propagation track 2, electric part 3 and conjugate 5 with And the surface modification comprising the halogenated hydrocarbons being deposited between at least one surface of continuous coated 4 and base material 1 and multiple propagation tracks 2 Coating 6.Electric part 3 is connected to propagation track 2 by surface modification coating 6 via the conjugate 5 of abutment surface modified coatings 5.
Fig. 8 shows electro-optical package, and the electro-optical package includes the base material 1 comprising insulating materials, has at least one of base material 1 Multiple propagation tracks 17 at surface, 18, be connected to the electrooptic block 19 of at least one propagation track 17,18 and comprising being completely covered The continuous painting of the polymer of the plasma polymerization at least one surface of base material 1, multiple propagation tracks 17,18 and electrooptic block 19 Layer 4.Propagation track 17 is guide-lighting rail, such as optical fiber.Propagation track 18 is conductor rail.The refractive index in the region of coating 20 is mutual by light Connector 21 is controlled.
Fig. 9 is shown by the continuous coated electric part 15 being completely covered of the polymer 16 comprising plasma polymerization.
Figure 10 shows the example of the equipment that can be used for the polymer coating to form plasma polymerization of the invention.At this In example, reactor 9 has the room 10 for being connected to vacuum system 11 and energy source 12.Precursor compound is by plasma electricity From and/or be decomposed to form active material 13, then active material 13 reacts to form continuous plasma at the surface of component 14 The polymer coating of body polymerization.
Figure 11 A, Figure 11 B and Figure 11 C are the flow charts of some implementation methods for showing method as described above.
Embodiment
The XPS analysis of the fluorohydrocarbon of 1-plasma polymerization of embodiment
Epoxy laminate product substrate is coated with the fluorohydrocarbon of plasma polymerization.The laminated product is cut to produce about 1cm Square sample size and be introduced into the sample room of Thermo-Scientific ESCALAB 250X ray photoelectron spectrometers.
Room is evacuated to 10-10The operating pressure of support, and sample is then transferred to analysis room.Homogeneous X-ray beam is incident on On surface, and collect and analyze by the photoelectron of electromagnetic radiation.
Bandwidth signals scanning is carried out to capture all elements on surface, and then carries out the other high-resolution at C1s peaks Scan to determine the fine structure at peak and the chemical constitution of sample.
Result shows in figure ia.
The preparation of the component of embodiment 2-coating
1 to 10 applicator assembly is being tested using the presoma and plasma-polymerization condition shown in table 1 below.
Table 1
3-plasma removal process of embodiment
The electrical component that the fluorohydrocarbon of plasma polymerization will be already coated with introduces plasma chamber.Room is evacuated to 250 The operating pressure of millitorr, and oxygen is introduced with the flow of 2500sccm.Allow gas flow through room, continue 30 seconds, and then with The frequency of 40kHz and the power open plasma generator of 3kW.Make component exposed to plasma active, continue 5 minutes Time period, afterwards, turn off plasma generator, and room is recovered to atmospheric pressure.
Component is removed from plasma chamber, and plasma polymer coating is confirmed using Bruker FTIR spectrometers Removing.Show that fluoropolymer has been completely removed in the absence of the flexible peaks of the C-F for characterizing at 1250nm.

Claims (10)

1. a kind of electricity or electro-optical package, including the base material comprising insulating materials, be present at least one surface of the base material Multiple propagation tracks, be connected at least one electricity or electrooptic block of at least one propagation track and comprising the base is completely covered The plasma polymerization at least one surface, the multiple propagation track and at least one electricity or electrooptic block of material Polymer it is continuous coated.
2. it is according to claim 1 electricity or electro-optical package, wherein the polymer of the plasma polymerization is plasma The hydrocarbon or halogenated hydrocarbons of polymerization.
3. according to claim 1 or claim 2 electricity or electro-optical package, wherein the polymer of the plasma polymerization It is the fluorohydrocarbon of plasma polymerization.
4. it is according to any one of the preceding claims electricity or electro-optical package, wherein the fluorohydrocarbon of the plasma polymerization It is as obtained by plasma polymerization is selected from one or more following precursor compound:Perfluoro alkane, perfluoroolefine, Perfluoroalkynes, fluoric ether, fluoroolefin, fluoroalkynes, fluoro acrylic ester, fluoroester, fluoric silane, fluorochloroparaffins, fluorine Chloro-alkenes, fluorine chlorine alkynes, fluorine chloropropene acid esters, fluorine chlorine ester and chlorofluorosilane.
5. it is according to any one of the preceding claims electricity or electro-optical package, wherein it is described at least one electricity or electrooptic block It is electric part, and at least one propagation track is conductor rail.
6. it is according to claim 5 electricity or electro-optical package, wherein the electric part is connected to by least one conjugate At least one propagation track, and described continuous coated at least one conjugate is completely covered.
7. it is according to claim 6 electricity or electro-optical package, wherein at least one conjugate be soldered joint, welding Joint, wire bond joint, conductive adhesion joint, crimping or press-fitting joint.
8. it is according to claim 7 electricity or electro-optical package, wherein at least one conjugate be soldered joint, welding Joint or wire bond joint.
9. according to any one Claims 1-4 electricity or electro-optical package, wherein it is described at least one electricity or electrooptic block be Electrooptic block, and at least one propagation track is conductor rail or guide-lighting rail.
10. it is according to any one of the preceding claims electricity or electro-optical package, wherein the multiple propagation track also include extremely Few external contact devices, and described continuous coated at least one external contact devices are completely covered.
CN201610837103.2A 2010-02-23 2011-02-21 The polymer coating of plasma polymerization Pending CN106916331A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB1003067.4A GB201003067D0 (en) 2010-02-23 2010-02-23 Plasma-polymerized polymer coating
GB1003067.4 2010-02-23
CN2011800107855A CN102791779A (en) 2010-02-23 2011-02-21 Plasma-polymerized polymer coating

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN2011800107855A Division CN102791779A (en) 2010-02-23 2011-02-21 Plasma-polymerized polymer coating

Publications (1)

Publication Number Publication Date
CN106916331A true CN106916331A (en) 2017-07-04

Family

ID=42114258

Family Applications (2)

Application Number Title Priority Date Filing Date
CN2011800107855A Pending CN102791779A (en) 2010-02-23 2011-02-21 Plasma-polymerized polymer coating
CN201610837103.2A Pending CN106916331A (en) 2010-02-23 2011-02-21 The polymer coating of plasma polymerization

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN2011800107855A Pending CN102791779A (en) 2010-02-23 2011-02-21 Plasma-polymerized polymer coating

Country Status (8)

Country Link
EP (1) EP2539392A1 (en)
JP (1) JP6085480B2 (en)
KR (1) KR101778820B1 (en)
CN (2) CN102791779A (en)
BR (1) BR112012021172A2 (en)
GB (1) GB201003067D0 (en)
TW (1) TWI547221B (en)
WO (1) WO2011104500A1 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019037444A1 (en) * 2017-08-23 2019-02-28 江苏菲沃泰纳米科技有限公司 Preparation method for organosilicon nano-protective coating having modulation structure
WO2019037446A1 (en) * 2017-08-23 2019-02-28 江苏菲沃泰纳米科技有限公司 Preparation method for high insulation nano-protective coating having modulation structure
WO2019037447A1 (en) * 2017-08-23 2019-02-28 江苏菲沃泰纳米科技有限公司 Preparation method for high insulation hard nano-protective coating having composite structure
CN109686672A (en) * 2017-10-18 2019-04-26 上海稷以科技有限公司 The method of protective layer and the product of surface formation matcoveredn are formed in body surface
WO2021017663A1 (en) * 2019-07-26 2021-02-04 江苏菲沃泰纳米科技有限公司 Waterproof nano-membrane, preparation method therefor, application thereof and product
WO2021249156A1 (en) * 2020-06-09 2021-12-16 江苏菲沃泰纳米科技股份有限公司 Protective coating and preparation method therefor
US11389825B2 (en) 2017-08-23 2022-07-19 Jiangsu Favored Nanotechnology Co., LTD Methods for preparing nano-protective coating with a modulation structure

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5693515B2 (en) * 2012-01-10 2015-04-01 エイチズィーオー・インコーポレーテッド Electronic device with internal water-resistant coating
PL2822705T3 (en) * 2012-03-06 2017-04-28 Semblant Limited Coated electrical assembly
GB2510213A (en) * 2012-08-13 2014-07-30 Europlasma Nv Forming a protective polymer coating on a component
US9340443B2 (en) 2012-12-13 2016-05-17 Corning Incorporated Bulk annealing of glass sheets
TWI617437B (en) 2012-12-13 2018-03-11 康寧公司 Facilitated processing for controlling bonding between sheet and carrier
US10014177B2 (en) 2012-12-13 2018-07-03 Corning Incorporated Methods for processing electronic devices
US10086584B2 (en) 2012-12-13 2018-10-02 Corning Incorporated Glass articles and methods for controlled bonding of glass sheets with carriers
GB201305500D0 (en) * 2013-03-26 2013-05-08 Semblant Ltd Coated electrical assembly
US10510576B2 (en) 2013-10-14 2019-12-17 Corning Incorporated Carrier-bonding methods and articles for semiconductor and interposer processing
CN103701963B (en) * 2013-12-30 2017-05-10 惠州Tcl移动通信有限公司 Waterproof treatment method for mobile terminal and mobile terminal
SG11201608442TA (en) 2014-04-09 2016-11-29 Corning Inc Device modified substrate article and methods for making
CN104320920B (en) * 2014-10-13 2017-05-10 北京卫星制造厂 Electronic product coating method based on low internal stress
EP3297824A1 (en) 2015-05-19 2018-03-28 Corning Incorporated Articles and methods for bonding sheets with carriers
AU2016275277A1 (en) * 2015-06-09 2018-02-01 P2I Ltd Coating
GB2539231B (en) * 2015-06-10 2017-08-23 Semblant Ltd Coated electrical assembly
WO2016209897A1 (en) 2015-06-26 2016-12-29 Corning Incorporated Methods and articles including a sheet and a carrier
GB201601221D0 (en) * 2016-01-22 2016-03-09 Semblant Ltd Coated electrical assembly
JP6750252B2 (en) * 2016-02-29 2020-09-02 日亜化学工業株式会社 Method for manufacturing light emitting device
TW201825623A (en) 2016-08-30 2018-07-16 美商康寧公司 Siloxane plasma polymers for sheet bonding
TWI810161B (en) 2016-08-31 2023-08-01 美商康寧公司 Articles of controllably bonded sheets and methods for making same
GB201621177D0 (en) * 2016-12-13 2017-01-25 Semblant Ltd Protective coating
CN110730995A (en) * 2017-07-03 2020-01-24 阿维科斯公司 Solid electrolyte capacitor comprising a nanocoating
US10770238B2 (en) 2017-07-03 2020-09-08 Avx Corporation Solid electrolytic capacitor assembly with hydrophobic coatings
WO2019118660A1 (en) 2017-12-15 2019-06-20 Corning Incorporated Method for treating a substrate and method for making articles comprising bonded sheets
CN109686802A (en) * 2018-11-09 2019-04-26 惠州凯珑光电有限公司 A kind of packaging technology of electronic component and mould group
KR102362271B1 (en) * 2019-10-16 2022-02-14 이정훈 Protective coating composition for circuit boards

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050150685A1 (en) * 2001-03-26 2005-07-14 Infineon Technologies Ag Configuration having an electronic device electrically connected to a printed circuit board
CN1770340A (en) * 2004-11-05 2006-05-10 力毅国际有限公司 Insulation structure of electronic element and forming method thereof
GB2462824A (en) * 2008-08-18 2010-02-24 Crombie 123 Ltd Printed circuit board encapsulation
CN101682998A (en) * 2007-02-19 2010-03-24 克龙比123有限公司 Printed circuit boards

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63311793A (en) * 1987-06-12 1988-12-20 Sumitomo Electric Ind Ltd Manufacture of flexible wiring board
JPS6489389A (en) * 1987-09-29 1989-04-03 Sumitomo Electric Industries Manufacture of flexible printed wiring board
JPH06244316A (en) * 1993-02-19 1994-09-02 Sony Corp Semiconductor device, manufacturing method and manufacturing apparatus
FR2726151B1 (en) * 1994-10-25 1996-11-29 Europ Composants Electron METHOD AND DEVICE FOR HERMETIC PROTECTION OF ELECTRONIC CIRCUIT
AU2009283992B2 (en) * 2008-08-18 2014-06-12 Semblant Limited Halo-hydrocarbon polymer coating

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050150685A1 (en) * 2001-03-26 2005-07-14 Infineon Technologies Ag Configuration having an electronic device electrically connected to a printed circuit board
CN1770340A (en) * 2004-11-05 2006-05-10 力毅国际有限公司 Insulation structure of electronic element and forming method thereof
CN101682998A (en) * 2007-02-19 2010-03-24 克龙比123有限公司 Printed circuit boards
GB2462824A (en) * 2008-08-18 2010-02-24 Crombie 123 Ltd Printed circuit board encapsulation

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
赵化侨: "《等离子体化学与工艺》", 28 February 1993, 中国科学技术大学出版社 *
陈杰瑢: "《低温等离子体体化学及其应用》", 31 July 2001, 科学技术出版社 *

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019037444A1 (en) * 2017-08-23 2019-02-28 江苏菲沃泰纳米科技有限公司 Preparation method for organosilicon nano-protective coating having modulation structure
WO2019037446A1 (en) * 2017-08-23 2019-02-28 江苏菲沃泰纳米科技有限公司 Preparation method for high insulation nano-protective coating having modulation structure
WO2019037447A1 (en) * 2017-08-23 2019-02-28 江苏菲沃泰纳米科技有限公司 Preparation method for high insulation hard nano-protective coating having composite structure
US11389825B2 (en) 2017-08-23 2022-07-19 Jiangsu Favored Nanotechnology Co., LTD Methods for preparing nano-protective coating with a modulation structure
CN109686672A (en) * 2017-10-18 2019-04-26 上海稷以科技有限公司 The method of protective layer and the product of surface formation matcoveredn are formed in body surface
WO2021017663A1 (en) * 2019-07-26 2021-02-04 江苏菲沃泰纳米科技有限公司 Waterproof nano-membrane, preparation method therefor, application thereof and product
WO2021249156A1 (en) * 2020-06-09 2021-12-16 江苏菲沃泰纳米科技股份有限公司 Protective coating and preparation method therefor

Also Published As

Publication number Publication date
TWI547221B (en) 2016-08-21
GB201003067D0 (en) 2010-04-07
JP6085480B2 (en) 2017-02-22
WO2011104500A1 (en) 2011-09-01
JP2013527973A (en) 2013-07-04
KR20120129993A (en) 2012-11-28
BR112012021172A2 (en) 2016-05-17
CN102791779A (en) 2012-11-21
EP2539392A1 (en) 2013-01-02
KR101778820B1 (en) 2017-09-14
TW201204203A (en) 2012-01-16

Similar Documents

Publication Publication Date Title
CN106916331A (en) The polymer coating of plasma polymerization
US8995146B2 (en) Electrical assembly and method
KR102046130B1 (en) Coated electrical assembly
TWI557272B (en) Method for reducing creep corrosion
Shi Recent advances in polymer thin films prepared by plasma polymerization synthesis, structural characterization, properties and applications
RU2717842C2 (en) Coated electrical assembly
WO2012158953A2 (en) Coated electronic devices and associated methods
CN108026386A (en) Coating
WO2019175586A1 (en) Method of forming a protected connection and connector comprising said connection
US10457836B2 (en) Polysiloxane films and methods of making polysiloxane films
KR20220123679A (en) laminate

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20170704

WD01 Invention patent application deemed withdrawn after publication