CN106916331A - The polymer coating of plasma polymerization - Google Patents
The polymer coating of plasma polymerization Download PDFInfo
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- CN106916331A CN106916331A CN201610837103.2A CN201610837103A CN106916331A CN 106916331 A CN106916331 A CN 106916331A CN 201610837103 A CN201610837103 A CN 201610837103A CN 106916331 A CN106916331 A CN 106916331A
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- optical package
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/12—Chemical modification
- C08J7/16—Chemical modification with polymerisable compounds
- C08J7/18—Chemical modification with polymerisable compounds using wave energy or particle radiation
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J3/00—Processes of treating or compounding macromolecular substances
- C08J3/28—Treatment by wave energy or particle radiation
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/282—Applying non-metallic protective coatings for inhibiting the corrosion of the circuit, e.g. for preserving the solderability
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/284—Applying non-metallic protective coatings for encapsulating mounted components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
- H05K2201/09872—Insulating conformal coating
Abstract
The application is related to the polymer coating of plasma polymerization.A kind of electricity or electro-optical package include the base material comprising insulating materials, there are multiple propagation tracks at least one surface of base material, be connected at least one electricity or electrooptic block of at least one propagation track and the polymer of the plasma polymerization comprising at least one surface, multiple propagation tracks and at least one electricity or electrooptic block that base material is completely covered it is continuous coated.
Description
It is on 02 21st, 2011 that the application is the applying date, Application No. 201180010785.5, entitled " wait from
The divisional application of the application of the polymer coating of daughter polymerization ".
The polymer coating of the plasma polymerization the present invention relates to be used to coat electricity and electro-optical package and part, and relate to
And the method for the coating.
Background
Conformal coating is used many years in electronic equipment industry, for protecting electrical component (electrical
Assembly) from operation during environmental exposure.Conformal coating is that the protectiveness consistent with the profile of PCB and its part is clear
Thin, the flexible layer of paint.Conformal coating protect a circuit from eroding chemical (for example salt, solvent, gasoline, oil, acid and
Environmental contaminants), humidity/condensation, vibration, electric leakage, electromigration and dendritic growth.Current conformal coating be typically 25 to
200 μ m-thicks and it is normally based on epoxy resin, acrylic resin or organic siliconresin.These materials are all as must be answered
It is deposited with the liquid being then solidificated on component.Recently, expensive Parylene also already functions as conformal coating.It is poly-
Paraxylene is deposited usually using the widely known conventional chemical vapor technology of those skilled in the art.
In the presence of many shortcomings being associated with current conformal coating.Technical requirements for depositing coating will by it
The contact that component is connected to other devices is blanked before coating, to prevent conformal coating from covering contact.It is applied
Contact will not be able to be electrically connected to other devices because conformal coating is thick and insulation.
If additionally, requiring reprocessing electrical component, then it is extremely difficult and high cost to remove current conformal coating
's.In the case where not being previously removed, in the absence of the possibility that solder or welding pass through coating.Further, since generally using
In the liquid technology for depositing these conformal coatings, there is the tendency for forming defect such as bubble in coating.The reduction of these defects
The protective value of conformal coating.The other problem of prior art conformal coating is, due to the liquid used during coating
Body technique, it is difficult to be deposited on coating below the part on component.
Summary of the invention
Present inventor has surprisingly discovered that, the polymer of plasma polymerization can be used in electrical component and electro-optical package
Excellent conformal coating is formed on (electro-optical assembly).These coatings are not only continuously and substantially
It is flawless, and they are also overcome on existing cated problem discussed above.Additionally, plasma of the invention is poly-
The polymer coating of conjunction is easy to be deposited on device and is relatively cheap.
Therefore, the present invention provides electricity or electro-optical package, and the electricity or electro-optical package include the base material comprising insulating materials, exist
Multiple propagation tracks at least one surface of the base material, at least one electricity or electric light that are connected at least one propagation track
Part and comprising at least one surface of the base material, the multiple propagation track and at least one electricity is completely covered
Or the polymer of the plasma polymerization of electrooptic block is continuous coated.
In one embodiment, the polymer of the plasma polymerization is the hydrocarbon or halogenated hydrocarbons of plasma polymerization.
In one embodiment, the polymer of the plasma polymerization is the fluorohydrocarbon of plasma polymerization.
In one embodiment, the fluorohydrocarbon of the plasma polymerization is selected from following by plasma polymerization
Obtained by one or more precursor compound:Perfluoro alkane, perfluoroolefine, perfluoroalkynes, fluoric ether, fluoroolefin,
Fluoroalkynes, fluoro acrylic ester, fluoroester, fluoric silane, fluorochloroparaffins, perhaloalkenes, fluorine chlorine alkynes, fluorine chloracrylic acid
Ester, fluorine chlorine ester and chlorofluorosilane.
In one embodiment, at least one electricity or electrooptic block are electric parts, and at least one conduction
Rail is conductor rail.
In one embodiment, the electric part is connected at least one conduction by least one conjugate
Rail, and described continuous coated at least one conjugate is completely covered.
In one embodiment, at least one conjugate is soldered joint, welding point, wire bond joint, leads
Electric adhint, crimping or press-fitting joint.
In one embodiment, at least one conjugate is soldered joint, welding point or wire bond joint.
In one embodiment, at least one electricity or electrooptic block are electrooptic blocks, and described at least one passes
Guide rail is conductor rail or guide-lighting rail.
In one embodiment, the multiple propagation track also includes at least one external contact devices, and described continuous
Coating is completely covered at least one external contact devices.
In one embodiment, at least one external contact devices are electric contact pieces.
In one embodiment, at least one external contact devices are light contacts.
In one embodiment, the electricity or electro-optical package also include being connected to the light part of guide-lighting rail.
In one embodiment, the electricity or electro-optical package also include the first other continuous coated and optional second
Other is continuous coated, described first it is other it is continuous coated comprising be completely covered it is described it is continuous coated it is foregoing wait from
The polymer of daughter polymerization, described second it is other it is continuous coated comprising be completely covered the described first other coating such as preceding institute
The polymer of the plasma polymerization stated.
In one embodiment, the electricity or electro-optical package also include the institute of the polymer for being deposited on plasma polymerization
Electrically or optically part is at least to state continuous coated at least a portion and the base material, the multiple propagation track and described at least one
The coating of epoxy resin, acrylic resin, organic siliconresin or Parylene between a part.
In one embodiment, the electricity or electro-optical package also include surface modification coating, the surface modification coating
Comprising being deposited between at least one surface of (a) continuous coated and (b) described base material and the multiple propagation track
Halogenated hydrocarbon polymer, wherein the surface modification coating covers at least a portion of the multiple propagation track, and it is described at least
One electricity or electrooptic block are connected at least one propagation track by the surface modification coating.
In one embodiment, the soldered joint, the welding point or surface described in wire bond fitting abutment are repaiied
Decorations coating.
In one embodiment, the electricity or electro-optical package are printed circuit board (PCB)s.The present invention also provide it is a kind of include with
Under method:A () provides electricity or electro-optical package, the electricity or electro-optical package include the base material comprising insulating materials, are present in institute
State the multiple propagation tracks at least one surface of base material and be connected at least one electricity or electric light of at least one propagation track
Part;(b) deposited by plasma-polymerization it is continuous coated, it is described continuous coated comprising the base material is completely covered
The polymer at least one surface, the multiple propagation track and at least one electricity or electrooptic block.
In one embodiment, the deposition for being carried out by plasma-polymerization includes that plasma polymerization is for example preceding
One or more described precursor compound.
The present invention also provides electricity or electro-optical package as obtained by method as defined above.
The present invention is also provided by the continuous coated electricity being completely covered of the polymer comprising plasma polymerization or electric light portion
Part.
In one embodiment, the invention provides a kind of method, including (a) makes electricity or electric light group as defined above
Part experiences plasma removal process so that described continuous coated and when it is present, described first it is other continuous coated and
Obtained by described second other continuous coated and/or described surface modification coating is removed, and then (b) is optionally reprocessed
Electricity or electro-optical package, and then (c) deposits the continuous coated of replacement, the replacement optionally by plasma-polymerization
It is continuous coated comprising at least one surface, the multiple propagation track and described at least one that the base material is completely covered
The polymer of electricity or electrooptic block.
The present invention is also provided includes following method:A () makes electricity or electro-optical package experience plasma as defined above
Remove technique so that continuous coated to be removed, and then (b) optionally reprocesses the electricity or electro-optical package, and then (c) appoints
Selection of land deposits the continuous coated of replacement by plasma-polymerization, the replacement it is continuous coated described comprising being completely covered
The polymer at least one surface, the multiple propagation track and at least one electricity or electrooptic block of base material.
In one embodiment, the invention provides a kind of method, including by electricity as defined above or electric light group
Part described continuous coated and when it is present, described first other continuous coated and described second is other continuous coated
And/or the surface modification coating carries out solder, with the shape between other electricity or electrooptic block and at least one propagation track
Into soldered joint, wherein soldered joint adjoining is described continuous coated and when it is present, the described first other company
Continuous coating and the second other continuous coated and/or described surface modification coating.
The present invention is also provided includes following method:Carried out by electricity as defined above or the continuous coated of electro-optical package
Solder, forms soldered joint, the soldered joint between other electricity or electrooptic block and at least one propagation track
Adjoining is continuous coated.
The present invention is also provided includes following method:A () makes to include that following electric or electro-optical package experience plasma is removed
Technique is gone so that the surface modification coating is removed:Base material comprising insulating materials, be present in the base material at least one
Multiple propagation tracks at surface, the surface modification comprising at least one of halogenated hydrocarbon polymer for covering the multiple propagation track
Coating (surface-finish coating) and at least one propagation track is connected to extremely by the surface modification coating
Few an electricity or electrooptic block;Then (b) deposited by plasma-polymerization it is continuous coated, it is described continuous coated to include
At least one surface of the base material, the multiple propagation track and at least one electricity or electrooptic block is completely covered
Polymer as defined above.
The present invention is also provided includes following method:A () makes to include that following electric or electro-optical package experience plasma is removed
Technique is gone so that the surface modification coating is removed:Base material comprising insulating materials, be present in the base material at least one
Multiple propagation tracks at surface and the surface comprising at least one of halogenated hydrocarbon polymer for covering the multiple propagation track are repaiied
Decorations coating, then electricity or electrooptic block are connected at least one propagation track by (b), and then (c) is heavy by plasma-polymerization
Product is continuous coated, described continuous coated comprising at least one surface, the multiple propagation track that the base material is completely covered
With described at least one electricity or the polymer as defined above of electrooptic block.
The present invention also provides the electricity of the conformal coating with the polymer comprising plasma polymerization as defined above
Or electro-optical package.
The present invention also provides the polymer of plasma polymerization as defined above as the guarantor for electricity or electro-optical package
The purposes of the coating of shape.
The present invention also provides a kind of method for conformally coating electricity or electro-optical package, and the method includes passing through plasma
Body-polymerization deposits polymer as defined above.
Brief description
Figure 1A shows the result of the X-ray photoelectron spectroscopic analysis of the fluoropolymer of plasma polymerization.
Figure 1B shows the result of the X-ray photoelectron spectroscopic analysis of the fluoropolymer obtained by standard polymerization techniques.
Fig. 2A shows the electron microscope image of the fluoropolymer coating of plasma polymerization of the invention and the painting
The smooth physical property of layer.
Fig. 2 B show the electron microscope image of the PTFE coatings deposited by standard polymerization techniques, and it has wherein fibril
The clearly visible structure of dimension.
Fig. 3 to Fig. 7 shows the electrical component of some implementation methods.
Fig. 8 shows the electro-optical package of some implementation methods.
Fig. 9 shows the electric part of some implementation methods.
Figure 10 shows the example of the equipment that can be used for the polymer coating to form plasma polymerization of the invention.
Figure 11 A, Figure 11 B and Figure 11 C are the flow charts of some implementation methods of display methods.
The detailed description of invention
The present invention relates to electricity and electro-optical package.Electrical component generally includes at least one electric part.Electro-optical package is generally included
At least one electrooptic block, and can also optionally include at least one electric part.Electricity or electro-optical package are preferably printing electricity
Road plate.
The continuous coated polymer comprising plasma polymerization of the invention.It is of the invention continuous coated to prevent to electricity
Or the environmental damage of electro-optical package.Environmental damage generally by due at ambient or elevated temperatures constituent of atomsphere (such as oxygen,
SO2、H2S and/or NO2) and/or the corrosion of moisture cause.In addition, it is of the invention it is continuous coated can continue protection electricity and electric light
Component, compared to the current conformal coating that may be degraded due to temperature higher, using more on electricity and electro-optical package
Temperature range high.
Continuous coated preferably conformal coating of the invention.
The polymer of plasma polymerization is the unique category of polymer that can not be prepared by traditional polymerization.Deng
The polymer of gas ions polymerization has highly unordered structure and typically highly cross-linked, comprising random branch and retains
Reactive moieties.Therefore the polymer of plasma polymerization is different from by tradition well known by persons skilled in the art in chemistry
Polymer prepared by polymerization.These chemistry and physics difference is well-known and description is in such as Plasma
Polymer Films,Hynek Biederman,Imperial College Press 2004。
The polymer of plasma polymerization can be obtained typically by the plasma-polymerization technology that following article is defined in more detail
.
The polymer of plasma polymerization is typically hydrocarbon, halogenated hydrocarbons, silicone, siloxanes, silane, the silicon of plasma polymerization
Azane or stannane.
The hydrocarbon of plasma polymerization typically optionally includes straight chain and/or side chain the polymer of annulus.Institute
Annulus preferably alicyclic ring or aromatic ring are stated, more preferably aromatic ring.Preferably, the hydrocarbon of plasma polymerization is not comprising any
Annulus.Preferably, the hydrocarbon of plasma polymerization is the polymer of side chain.
Typically optionally straight chain and/or side chain the polymerization comprising annulus of the halogenated hydrocarbons of plasma polymerization
Thing.The annulus is preferably alicyclic ring or aromatic ring, more preferably aromatic ring.Preferably, the halogenated hydrocarbons of plasma polymerization is not
Comprising any annulus.Preferably, the halogenated hydrocarbons of plasma polymerization is the polymer of side chain.
The hydrocarbon and halogenated hydrocarbons of the plasma polymerization including aromatic fractions are respectively the aromatic hydrocarbon and virtue of plasma polymerization
Race's halogenated hydrocarbons (such as aromatics fluorohydrocarbon).The polystyrene of example including plasma polymerization and plasma polymerization it is poly- to two
Toluene.The Parylene of particularly preferred plasma polymerization.The Parylene of plasma polymerization can be unsubstituted
Or be substituted by one or more substituents.Preferred substitution base includes halogen.And fluorine is most preferred.By one or more halogen
The Parylene of plain atom substitution is halo Parylene.It is fluorine by the Parylene that one or more fluorine atoms replace
For Parylene.Unsubstituted Parylene is most preferred.
The hydrocarbon of plasma polymerization is optionally comprising the hetero atom selected from N, O, Si and P.It is preferable, however, that plasma
The hydrocarbon of polymerization does not include N, O, Si and P hetero atom.
The halogenated hydrocarbons of plasma polymerization is optionally comprising the hetero atom selected from N, O, Si and P.It is preferable, however, that wait from
The halogenated hydrocarbons of daughter polymerization does not include N, O, Si and P hetero atom.
The hydrocarbon of oxygen containing plasma polymerization preferably includes carbonyl moiety, more preferably ester and/or amide moieties.It is preferred that
The hydrocarbon polymer of the oxygen containing plasma polymerization of classification is the acrylate polymer of plasma polymerization.
The halogenated hydrocarbons of oxygen containing plasma polymerization preferably includes carbonyl moiety, more preferably ester and/or amide moieties.
The halogenated hydrocarbon polymer of the oxygen containing plasma polymerization of preferred classes is the haloacrylic acid ester polymer of plasma polymerization,
The fluoro acrylic ester polymer of such as plasma polymerization.
The hydrocarbon of nitrogenous plasma polymerization preferably includes nitro, amine, acid amides, imidazoles, diazole, triazole and/or tetrazolium
Part.
The halogenated hydrocarbons of nitrogenous plasma polymerization preferably comprising nitro, amine, acid amides, imidazoles, diazole, triazole and/or
Tetrazolium part.
The silicone of plasma polymerization, siloxanes, silane and silazane are optionally replaced by one or more fluorine atoms.So
And, silicone, siloxanes, silane and silazane are preferably unsubstituted.Preferred silazane is HMDS.
Preferably, the polymer of plasma polymerization is the halogenated hydrocarbons of plasma polymerization, and more preferably plasma gathers
The fluorohydrocarbon of conjunction.Most preferably, the polymer of plasma polymerization is side chain and not comprising heteroatomic plasma polymerization
Fluorohydrocarbon.
As used herein, term halo is preferably fluoro, chloro, bromo and iodo.Fluoro and chloro be it is preferred,
And fluoro is most preferred.There is halogen identical to look like.
Component of the invention can be prepared by via plasma polymerization deposition polymer.Plasma-polymerization leads to
It is often the effective technology for depositing thin film coatings.Generally, plasma-polymerization provides the coating of fine quality, because polymerization
Reaction is in situ to be occurred.Therefore, the polymer of plasma polymerization be typically deposited in small recess, below part and
Pass through in some cases in the through hole that common Liquid coating techniques will be unreachable to.
Additionally, being formed in situ for polymer can provide good adhesion to the surface of application coating, because polymer is logical
Often reacted with surface during depositing.Therefore, in some cases, the polymer of plasma polymerization can be deposited over other
On the material that conformal coating can not be deposited thereon.
The additional advantage of plasma-polymerization technology of the invention is not need dried/cured coating after deposition.
Prior art for coating needs dried/cured step, and this causes to form cure/dry defect on the surface of the coating.Deng
Gas ions-polymerization avoids the formation of cure/dry defect.
Plasma-deposited to be carried out in the reactor for producing gaseous plasma, gaseous plasma includes ionization
Gas ion, electronics, atom and/or neutral substance.Reactor can include room, vacuum system and one or more energy
Source, but can be to use the reactor for being configured to any suitable type for producing gaseous plasma.Energy source can include matching somebody with somebody
It is set to any suitable device that one or more gas is changed into gaseous plasma.Preferably, energy source includes heating
Device, radio frequency (RF) generator and/or microwave generator.
In some embodiments, electrically or optically component can be placed in the room of reactor, and vacuum system can be used for
Room is evacuated to 10-3Pressure in the range of to 10mbar.Then one or more gas can be pumped in entering the room, and energy
Amount source can produce the gaseous plasma of stabilization.One or more precursor compound may then act as gas and/or liquid
Body is introduced into the gaseous plasma in room.When being introduced into gaseous plasma, precursor compound can be ionized
And/or decompose to produce a series of active materials in the plasma, the active material polymerization produces polymer coating.
The fluorohydrocarbon of plasma polymerization is preferably one kind of the hydrocarbon material comprising fluorine atom by plasma polymerization
Or various precursor compounds and obtain.The preferred hydrocarbon material comprising fluorine atom is perfluoro alkane, perfluoroolefine, perfluor alkynes
Hydrocarbon, fluoric ether, fluoroolefin, fluoroalkynes.Example includes C3F6And C4F8。
Other preferred precursor compounds are fluorochloroparaffins, perhaloalkenes and fluorine chlorine alkynes.Example includes C2F3Cl and
C2F4Cl2。
The Parylene of plasma polymerization is preferably by two pairs of sub- dimethylbenzene of plasma-polymerization, sub- dimethylbenzene
Or dimethylbenzene can be obtained.
The definite property of the polymer coating of plasma polymerization and composition generally depend on one in following condition or
It is multiple:(i) selected plasma gas;(ii) the specific precursor compound for being used;(iii) precursor compound
Amount (it can be determined by combining the pressure of precursor compound with flow);(iv) ratio of precursor compound;(v)
The order of precursor compound;(vi) plasma pressure;(vii) plasma driving frequency;(viii) pulse width timing;
(ix) coating time;(x) plasma power (including peak value and/or average plasma power);(xi) room electrode arrangement;
And/or (xii) introduces the preparation of component.
Generally, plasma driving frequency is 1kHz to 1GHz.Generally, plasma power is 500 to 10000W.It is logical
Often, mass flow is 5 to 2000sccm.Generally, operating pressure is 10 to 500 millitorrs.Generally, coating time is 10 seconds to 20 points
Clock.
Pulsed plasma system can also be used.
However, as technical staff is readily apparent that, preferred condition will depend on the size and geometry of plasma chamber.
Therefore, depending on the specific plasma chamber being being used, technical staff's modification operating condition is probably beneficial.
Continuous coated surface be able to can be controlled by carefully selecting presoma and plasma process conditions.Depend on
Specific plasma polymer, surface can be hydrophilic or hydrophobic.
Hydrophobic coating preferably shows the water contact angle more than 90 degree and more preferably larger than 105 degree.Hydrophobic coating
Preferably displaying is less than 35 dynes/cm and even more preferably less than the surface energy of 30 dynes/cm.In some cases, it is continuous coated
Hydrophobic nature be probably high expectations because they will reduce the possibility damaged by moisture of component.
However, in some cases, hydrophilic coating is probably desired.If for example, other coating or label
(such as bar code) will be applied to continuous coated, then hydrophilic coating is probably desired.Being generally easier to will be other
Coating adheres to hydrophilic coating.Hydrophilic coating preferably shows the water contact less than 70 degree and even more preferably less than 55 degree
Angle.Hydrophilic coating preferably shows more than 45 dynes/cm and the most preferably more than surface energy of 50 dynes/cm.
As used herein, " continuous " means that coating is substantially flawless.Possible defect is included in coating
Hole, crack and rupture.It is continuous coated to use the polymer of plasma polymerization being formed in situ on electricity or electro-optical package
To realize.Using plasma polymerisation process described below, can on all surface contacted with plasma gas shape
Into continuous coated.When high-aspect-ratio part is coated for example generally in part present on electronics or electro-optical package, this can be
Specific advantage.Pendant (underhang) is can also allow for using plasma-polymerization method to be also covered by the coating.
It is continuous coated generally have 1nm to 10 μm, preferably 1nm to 5 μm, more preferably 5nm to 500nm, more preferably
Average value-the average thickness of 100nm to 300nm and more preferably 150nm to 250nm e.g., from about 200nm.Continuous coated thickness
Can be substantially homogeneous or can change from point to points.It is continuous coated to be deposited as in specific implementation method
So that it is consistent with the three-dimensional surface of base material, propagation track and part.
Continuous coated at least one surface that base material is completely covered, multiple propagation tracks and at least one electricity or electrooptic block.
Preferably, the expose portion at least one surface of coating encapsulation base material, multiple propagation tracks and at least one electricity or electrooptic block.
Therefore, it is continuous coated to can be preferred that conformal coating.Conformal coating can conformally coat at least one table of base material
Face, multiple propagation tracks and at least one electricity or electrooptic block.In order to avoid feeling uncertain, mention coating as discussed below and cover completely
Cover other articles, it is intended that with equivalent as defined above.
It is probably in some cases larger electric or electricity completely by the region of the electricity of continuous coated covering or electro-optical package
The remainder of a part for optical assembly, the larger electricity or electro-optical package can be not coated with.
The electricity and/or optical property of the continuous coated component that can be applied to it cause the change of minimum.For example, component
In the induction coefficient of circuit only coated may minimally influence.In some cases, compared to usually considerably changing
Become circuit property other conformal coatings, this can be it is highly advantageous, this may be needed in design component consider by
The property of the change of the component that other coatings are caused.In some cases, coating of the invention can eliminate the requirement.
If for electricity or electro-optical package, it is necessary to very highly protective from environment, then the polymerization of plasma polymerization
The other continuous coated of thing can be used in initial continuous coated top.Therefore, electricity or electro-optical package can also include
Comprising the polymer that continuous coated plasma polymerization as defined above is completely covered first is other continuous coated, and
Optional comprising the polymer that the first other continuous coated plasma polymerization as defined above is completely covered second
Other is continuous coated.If it is desired, it is possible to using plasma polymerization as defined above polymer also in addition
It is the continuous coated such as the 3rd to the tenth continuous coated.For the polymerization of each other continuous coated plasma polymerization
Thing can be independently with initial continuous coated plasma polymerization polymer it is identical or different.Each is other continuous
Coating for depositing continuous coated method generally by depositing.Initial continuous coated and any in addition continuous coated
Definite property can be selected as improving or optimizing the performance required for the component of coating.For example, it may be possible to be it is desirable that, having
High hydrophobicity coating as coating is most gone up, to realize good resistance to moisture resistance.
The coating of plasma polymerization of the invention can be also used for the existing electricity to being coated by another conformal coating
Or electro-optical package provides extra environmental protection.In the case where water-fast external skin is needed, this can be favourable.Therefore,
Electricity or electro-optical package can also include the polymer for being deposited on plasma polymerization continuous coated at least a portion and base material,
Epoxy resin, acrylic resin, organosilicon between multiple propagation tracks and at least one electricity or at least a portion of electrooptic block
The coating of resin or Parylene.In some embodiments, Parylene coating can be by chemical vapor deposition side
Method is deposited.
Therefore, electricity or electro-optical package can include the base material comprising insulating materials, exist at least one surface of base material
Multiple propagation tracks, be connected at least one propagation track at least one electricity or electrooptic block, at least a portion of base material
Epoxy resin, acrylic resin, (it can be deposited the coating of organic siliconresin or Parylene by conventional chemical vapor
Method is deposited) and comprising at least one surface, multiple propagation tracks, at least one electricity or the electrooptic block that base material is completely covered
With the company of the polymer of the plasma polymerization of the coating of epoxy resin, acrylic resin, organic siliconresin or Parylene
Continuous coating.
Preferably, the coating of epoxy resin, acrylic resin, organic siliconresin or Parylene is conformal coating.
Such arrangement can be by making to include at least one that is deposited on base material, multiple propagation tracks and at least one electricity or electrooptic block
The electricity or electro-optical package experience of the coating of epoxy resin, acrylic resin, organic siliconresin or Parylene on point are herein
It is prepared by the painting method of description.
The continuous coated electricity or electro-optical package being also applied to halogenated hydrocarbons surface modification coating, such as WO 2008/
Described in 102113 (its content is incorporated herein by reference).Therefore, electricity or electro-optical package can include comprising being deposited on
A () is continuous coated and surface modification of halogenated hydrocarbon polymer between at least one surface of (b) base material and multiple propagation tracks is applied
At least a portion of the multiple propagation tracks of layer, wherein surface modification coating covering, and at least one electricity or electrooptic block pass through surface
Modified coatings are connected at least one propagation track.Preferably, surface modification coating include fluorinated hydrocarbon polymer, more preferably wait from
The fluorinated hydrocarbon polymer of daughter polymerization.
Electricity or electro-optical package can also include the base material comprising insulating materials, exist it is many at least one surface of base material
Individual propagation track, at least one electricity or electrooptic block that are connected at least one propagation track, comprising being deposited on multiple propagation tracks extremely
The surface modification coating of the halogenated hydrocarbon polymer in a few part and comprising at least one surface, the multiple that base material is completely covered
Propagation track, at least one electricity or electrooptic block and surface modification coating plasma polymerization polymer it is continuous coated, its
In at least one electricity or electrooptic block at least one propagation track is connected to by surface modification coating.
Preferably, electricity or electrooptic block are connected at least one biography via soldered joint, welding point or wire bond joint
Guide rail, and soldered joint, welding point or wire bond fitting abutment surface modified coatings.
When component includes the coating of surface modification coating or epoxy resin, acrylic resin or organic siliconresin, component
Can be by making the component of the coating with appropriate surface modification coating or epoxy resin, acrylic resin or organic siliconresin
Painting method as described above is experienced to prepare.Similarly, in addition continuous coated generally by coating as described above
Method is deposited.
The additional advantage of the coating of plasma polymerization is, in some cases, they can easily by wait from
Daughter removes technique to remove.Plasma removal process can include plasma etching coating with exposed to following electricity or
The surface of electro-optical package.Coating can have the thickness of about 200nm.Electricity or electric light are applied to using method known in the art
The thickness of traditional conformal coating of component is generally between 25 and 200 μm.Current guarantor is removed using plasma etching
The coating of shape can be time-consuming and high cost, because to remove the material of large volume.Therefore, electric or electricity as defined above
Optical assembly can experience plasma removal process.The plasma removal process is usually removed essentially all of continuous painting
Layer.When it is present, it will be usually removed essentially all of other continuous coated and/or surface modification coating.Plasma
Technique is removed to generally include for electricity or electro-optical package to be put into plasma chamber, and coating chemically and/or is physically impacted in introducing
Surface reactant gas plasma removing material and little by little be etched back to initial on following surface.
The technique can be quick and inexpensive and therefore be favourable.Then, the electricity of coating is removed from it
Or electro-optical package can be reworked, this is typically by the other part of addition or replaces existing part.Selectively, such as
Connector of the fruit between propagation track and part is damaged in use, then can reprocess the connector.
Complete after reprocessing, the continuous coated of the replacement comprising polymer can be optionally by plasma-polymerization
To deposit, the coating is completely covered at least one surface, multiple propagation tracks and at least one electricity or the electrooptic block of base material.Cause
This, in some cases, the electricity or electro-optical package of damage can easily be repaired.
The additional advantage of the coating of plasma polymerization is that it can remove coating before reprocessing.This
Because, in some cases, it can be possible to solder can be carried out by coating.In some cases, it is also possible to can be by electricity
Or the primary coat of electro-optical package is with when it is present, the first other coating and the second other coating and/or surface modification are applied
Layer carries out solder, and soldered joint is formed between other electricity or electrooptic block and at least one propagation track.Solder
Joint can abut continuous coated with when it is present, the first other coating and the second other coating and/or surface modification are applied
Layer.
Other application includes removing surface modification coating as described above by plasma removal process, then
Deposit plasma-polymerization polymer as described above.Another application includes being removed by plasma removal process
Surface modification coating as described above, is then connected to propagation track by electricity or electrooptic block, and then deposition as retouched above
The plasma-polymerization polymer stated.
Electricity or electro-optical package can include it being conductor rail or guide-lighting rail (optically conductive track)
Multiple propagation tracks.
Conductor rail generally includes any suitable conductive material.Preferably, conductor rail includes gold, tungsten, copper, silver, aluminium, partly leads
The doped region of body base material, conducting polymer and/or electrically conductive ink.It is highly preferred that conductor rail includes gold, tungsten, copper, silver or aluminium.
The suitable shape of propagation track and configuration can be selected for discussed specific group by those skilled in the art
Part.
Generally, conductor rail attaches to the surface of base material along the whole length of base material.Selectively, conductor rail can be two
Base material is attached at individual or more point.For example, conductor rail can at two or more points, but not be along the whole of base material
Individual length line attaches to base material.
Conductor rail is formed on base material usually using any suitable method well known by persons skilled in the art.It is excellent in one kind
In the method for choosing, conductor rail is formed on base material using " subtracting " technology.Generally, in the method, metal level (for example, Copper Foil,
Aluminium foil etc.) surface of base material is bound to, and the unnecessary portion of metal level is then removed, leave required propagation track.Metal level
Unnecessary portion generally by chemical etching or photoetch, mill come from base material remove.In the selectable preferred side of one kind
In method, propagation track is formed on base material using " addition " technology, for example such as, plating, the deposition using reverse mask and/or appoint
What geometrically controlled depositing operation.Selectively, base material can be silicon chip or chip, and it generally has doped region conduct
Propagation track.
Guide-lighting rail generally includes any suitable optical material.Preferably, guide-lighting rail is fiber waveguide, and it is generally included wherein
The change of refractive index is for propagating light transmitting material of the electromagnetic radiation by required path.Waveguide can for example by by covering
Or boundary layer is applied to light transmitting material to produce, wherein covering or boundary layer are made up of the material of different refractivity.May be selected
Ground, waveguide can be by adulterating or changing light transmitting material to produce the region with variable refractive index to produce.Therefore, waveguide
Can be independent part or the part being integrated into base material.Typical light transmitting material is glass, doped-glass and plastics.
Multiple propagation tracks can include the mixing of only conductor rail, only guide-lighting rail or conductor rail and guide-lighting rail.It is more than when existing
During one conductor rail, each rail can be made and/or be of similar shape by identical material as defined above, or can
Selectively, can have various rail materials and/or rail shape.When there is more than one guide-lighting rail, each rail can
It is made and/or is of similar shape with by identical material as defined above, or selectively, can has various
Rail material and/or rail shape.
Multiple propagation tracks can also include at least one external contact devices.It is continuous coated to be preferably completely covered at least one
Individual external contact devices.
The definite property of external contact devices can depend on needing the component of contact and the property of device.Suitably connect
Contact element can routinely be selected by those skilled in the art.Generally, external contact devices are electrically or optically contact (optical
contact).External contact devices can be a part for multiple propagation tracks.Selectively, external contact devices can be electricity or
Light connects are in the other part of at least one propagation track.
The coating of plasma polymerization can be allowed in (a) external contact devices, preferably electric contact piece (electrical
Contact electrical connection) is formed between the corresponding contact on (b) external device (ED), it is continuous coated without removing in advance.Together
Sample ground, the coating of plasma-polymerization can be allowed in (a) external contact devices, preferably light contact and (b) external device (ED)
On corresponding contact between form light connects, it is continuous coated without removing in advance.Therefore, in any case, in shape
Into before the coating of plasma polymerization, can be not required to cover the external contact devices of component.In some cases, this can be
Favourable, because covering for external contact devices is probably time-consuming and high cost.
Electricity or electro-optical package can include including the base material of insulating materials.Base material generally includes to prevent base material from electricity
Or any suitable insulating materials of the short circuit of electro-optical package.Therefore, in electrical component, base material is preferably electric insulation
's.In electro-optical package, base material is preferably electric insulation and light insulation.
Base material preferably includes epoxy laminate material, synthetic resin-bound paper, epoxy resin bonding glass fabric
(ERBGH), composite epoxy material (CEM), PTFE (Teflon) or other polymers material, phenolic aldehyde cotton paper, silicon, glass, ceramics,
Paper, cardboard, the material based on natural and/or synthesis timber and/or other suitable fabrics.Base material also optionally includes resistance
Combustion agent material, usual fire retardant 2 (FR-2) and/or fire retardant 4 (FR-4).Base material can include single-layer insulation material or multi-layer phase
Same or different insulating materials.Base material can be by any one printed circuit board (PCB) being made in material listed above
(PCB) plate.
Electricity or electro-optical package include at least one electricity or electrooptic block.
Electric part can be any suitable circuit element of electrical component.Preferably, electric part be resistor, capacitor,
Transistor, diode, amplifier, antenna or oscillator.Any suitable quantity and/or the electric part of combination can be connected to electric group
Part.
Electric part is preferably connected to conductor rail via conjugate (bond).Conjugate is preferably soldered joint
(solder joint), welding point, wire bond joint, conductive adhesion joint, crimping or press-fitting joint.For forming conjugate
Suitable solder, welding, wire bond, conductive adhesion and press-fitting technology are well known by persons skilled in the art.It is highly preferred that with reference to
Thing is soldered joint, welding point or wire bond joint, and most preferably soldered joint.
Electrooptic block can be for example in active switch, wave filter, adjuster, amplifier and electromagnetism letter in switchable element
Number, i.e., the part that optical signal is controlled electrically.Selectively, electrooptic block can be that electromagnetic signal, i.e. optical signal are converted into electricity
Subsignal and the part that vice versa, such as optical transmitting set, photo-detector and detector array.Therefore, electrooptic block is preferably
It is light emitting diode (LED), laser/led, photodiode, phototransistor, photomultiplier or photo-resistor.
As technical staff is readily apparent that, electrooptic block can have electric input/output and light input/output.Electricity input/defeated
Go out preferably can be connected to conductor rail via conjugate as defined above.Light input/output can preferably via combination
Thing is connected to guide-lighting rail.
Component can also optionally include light part.Light part can be passive component.Passive component can include, example
Such as, coupler, shunt, Y shape shunt, star couplet, fiber and photoswitch.Light part is it is generally preferred to via conjugate
It is connected to guide-lighting rail.Light part and conjugate (when it is present) are generally completely by continuous coated covering.
Light connects can be realized by active or passive mechanical structure, aligned portions on active or passive mechanical feature optical
Part and propagation track and mechanically these are held in position in.Selectively, light connects can be using optionally with institute
Selection/adhesive of controlled refractive index formed.Selectively, light connects can be melted in by by part and propagation track
Come together to produce.Selectively, the refractive index of material can be changed for example, by adulterating new material, to produce new connection.
Selectively, the in situ addition of suitable material can be employed, to produce new optics geometry.
In one preferred embodiment, electrical component includes the base material comprising insulating materials, has at least the one of base material
Multiple conductor rails at individual surface, at least one conductor rail is preferably connected to by least one conjugate as defined above
At least one electric part and comprising at least one surface, multiple conductor rails, at least one electric part that base material is completely covered
With, when it is present, the fluoropolymer of the plasma polymerization of at least one conjugate it is continuous coated.It is highly preferred that conductive
Rail includes at least one external contact devices, and it is typically at least one electric contact piece, and at least one external contact devices are also
It is completely covered by continuous coated.
Another preferred embodiment in, printed circuit board (PCB) include the base material comprising insulating materials, there is base material
Multiple conductor rails at least one surface, by least one soldered joint, welding point or wire bond joint be connected to
At least one electric part of a few conductor rail and comprising at least one surface of base material, multiple conductor rails, extremely is completely covered
The fluoropolymer of a few electric part and the plasma polymerization of at least one soldered joint, welding point or wire bond joint
It is continuous coated.
Another preferred embodiment in, printed circuit board (PCB) include the base material comprising insulating materials, there is base material
Multiple conductor rails including at least one external contact devices at least one surface, by least one soldered joint,
Welding point or wire bond joint are connected at least one electric part of at least one conductor rail and comprising base material is completely covered
At least one surface, multiple conductor rails, at least one external contact devices, at least one electric part and at least one solder connect
Head, the fluoropolymer of the plasma polymerization of welding point or wire bond joint it is continuous coated.
The polymer coating of continuous plasma polymerization can be used for coating electricity or electrooptic block.Therefore, electricity or electric light
Part can be by the continuous coated complete of the polymer comprising the plasma polymerization as described by above for electricity or electro-optical package
All standing.The part of the coating can be prepared by making part experience painting method as described above.Plasma polymerization
Polymer coating can be that electricity or electrooptic block provide fabulous environmental protection, and therefore can be with the case of high level part
It is particularly useful.It is preferred embodiment to be completely covered by the continuous coated of the fluoropolymer comprising plasma polymerization
Electric part.
The electricity or electrooptic block of coating can be connected at least one propagation track of electrically or optically component, without removing in advance
It is continuous coated, generally connected by solder or wire bond in the case of electric part.In this case, essentially all of company
Continuous coating can keep perfect, and provide the environmental protection after installing.Selectively, before installing in assembly, apply
Layer can be removed by plasma removal process.
In some embodiments, the polymer of plasma polymerization as described above can be used for conformally coating
Electricity or electro-optical package or electricity or electrooptic block.
Each aspect of the present invention is described referring now to the implementation method shown in accompanying drawing and reference implementation example, in accompanying drawing
In, identical reference numeral refers to identical or similar part.
Description of Drawings
Figure 1A shows the result of the X-ray photoelectron spectroscopic analysis of the fluoropolymer of plasma polymerization.This shows
The fluoropolymer of gas ions polymerization includes a high proportion of CF3, CF and C-CF parts, show the branched of height and crosslinking.Figure 1B
The fluoropolymer obtained by standard polymerization techniques, i.e., the result of the X-ray photoelectron spectroscopic analysis of commercially available PTFE are shown.
This shows the fluoropolymer by standard polymerization techniques acquisition mainly comprising CF2Part and the CF of negligible ratio3, CF and C-
CF parts, show very low branched and crosslinking.Described in embodiment 1 by its method for obtaining these results.
Fig. 2A shows the electron microscope image of the fluoropolymer coating of plasma polymerization of the invention and the painting
The smooth physical property of layer.Fig. 2 B show the electron microscope image of the PTFE coatings deposited by standard polymerization techniques, its tool
There is the clearly visible structure of its fibril.
Fig. 3 shows electrical component, and the electrical component includes the base material 1 comprising insulating materials, there is at least one surface of base material 1
Multiple propagation tracks 2 at place, the electric part 3 for being connected at least one propagation track 2 and comprising being completely covered at least one of base material 1
Continuous coated the 4 of the polymer of the plasma polymerization on surface, multiple propagation tracks 2 and electric part 3.
Fig. 4 shows electrical component, and the electrical component includes the base material 1 comprising insulating materials, there is at least one surface of base material 1
Multiple propagation tracks 2 at place, the electric part 3 that at least one propagation track 2 is connected to by conjugate 5 and comprising base material is completely covered
The polymer of the plasma polymerization of 1 at least one surface, multiple propagation tracks 2, electric part 3 and conjugate 5 it is continuous coated
4。
Fig. 5 shows electrical component, and the electrical component includes the base material 1 comprising insulating materials, there is at least one surface of base material 1
Multiple propagation tracks 2 at place, the electric part 3 for being connected at least one propagation track 2, comprising at least one table that base material 1 is completely covered
The polymer of the plasma polymerization in face, multiple propagation track 2 and electric part 3 continuous coated 4 and it is continuous comprising being completely covered
The first other continuous coated 7 of the polymer of the plasma polymerization of coating 4.
Fig. 6 shows electrical component, and the electrical component includes the base material 1 comprising insulating materials, there is at least one surface of base material 1
Multiple propagation tracks 2 at place, the electric part 3 for being connected at least one propagation track 2 and comprising being completely covered at least one of base material 1
The polymer of the plasma polymerization on surface, multiple propagation track 2 and electric part 3 continuous coated 4 and be deposited on continuous coated 4
At least a portion and at least a portion of base material 1, multiple propagation track 2 and electric part 3 between epoxy resin, acrylic resin
Or the coating 8 of organic siliconresin.
Fig. 7 shows electrical component, and the electrical component includes the base material 1 comprising insulating materials, there is at least one surface of base material 1
Multiple propagation tracks 2 at place, the electric part 3 that at least one propagation track 2 is connected to by conjugate 5, comprising base material 1 is completely covered
Continuous coated the 4 of the polymer of the plasma polymerization of at least one surface, multiple propagation track 2, electric part 3 and conjugate 5 with
And the surface modification comprising the halogenated hydrocarbons being deposited between at least one surface of continuous coated 4 and base material 1 and multiple propagation tracks 2
Coating 6.Electric part 3 is connected to propagation track 2 by surface modification coating 6 via the conjugate 5 of abutment surface modified coatings 5.
Fig. 8 shows electro-optical package, and the electro-optical package includes the base material 1 comprising insulating materials, has at least one of base material 1
Multiple propagation tracks 17 at surface, 18, be connected to the electrooptic block 19 of at least one propagation track 17,18 and comprising being completely covered
The continuous painting of the polymer of the plasma polymerization at least one surface of base material 1, multiple propagation tracks 17,18 and electrooptic block 19
Layer 4.Propagation track 17 is guide-lighting rail, such as optical fiber.Propagation track 18 is conductor rail.The refractive index in the region of coating 20 is mutual by light
Connector 21 is controlled.
Fig. 9 is shown by the continuous coated electric part 15 being completely covered of the polymer 16 comprising plasma polymerization.
Figure 10 shows the example of the equipment that can be used for the polymer coating to form plasma polymerization of the invention.At this
In example, reactor 9 has the room 10 for being connected to vacuum system 11 and energy source 12.Precursor compound is by plasma electricity
From and/or be decomposed to form active material 13, then active material 13 reacts to form continuous plasma at the surface of component 14
The polymer coating of body polymerization.
Figure 11 A, Figure 11 B and Figure 11 C are the flow charts of some implementation methods for showing method as described above.
Embodiment
The XPS analysis of the fluorohydrocarbon of 1-plasma polymerization of embodiment
Epoxy laminate product substrate is coated with the fluorohydrocarbon of plasma polymerization.The laminated product is cut to produce about 1cm
Square sample size and be introduced into the sample room of Thermo-Scientific ESCALAB 250X ray photoelectron spectrometers.
Room is evacuated to 10-10The operating pressure of support, and sample is then transferred to analysis room.Homogeneous X-ray beam is incident on
On surface, and collect and analyze by the photoelectron of electromagnetic radiation.
Bandwidth signals scanning is carried out to capture all elements on surface, and then carries out the other high-resolution at C1s peaks
Scan to determine the fine structure at peak and the chemical constitution of sample.
Result shows in figure ia.
The preparation of the component of embodiment 2-coating
1 to 10 applicator assembly is being tested using the presoma and plasma-polymerization condition shown in table 1 below.
Table 1
3-plasma removal process of embodiment
The electrical component that the fluorohydrocarbon of plasma polymerization will be already coated with introduces plasma chamber.Room is evacuated to 250
The operating pressure of millitorr, and oxygen is introduced with the flow of 2500sccm.Allow gas flow through room, continue 30 seconds, and then with
The frequency of 40kHz and the power open plasma generator of 3kW.Make component exposed to plasma active, continue 5 minutes
Time period, afterwards, turn off plasma generator, and room is recovered to atmospheric pressure.
Component is removed from plasma chamber, and plasma polymer coating is confirmed using Bruker FTIR spectrometers
Removing.Show that fluoropolymer has been completely removed in the absence of the flexible peaks of the C-F for characterizing at 1250nm.
Claims (10)
1. a kind of electricity or electro-optical package, including the base material comprising insulating materials, be present at least one surface of the base material
Multiple propagation tracks, be connected at least one electricity or electrooptic block of at least one propagation track and comprising the base is completely covered
The plasma polymerization at least one surface, the multiple propagation track and at least one electricity or electrooptic block of material
Polymer it is continuous coated.
2. it is according to claim 1 electricity or electro-optical package, wherein the polymer of the plasma polymerization is plasma
The hydrocarbon or halogenated hydrocarbons of polymerization.
3. according to claim 1 or claim 2 electricity or electro-optical package, wherein the polymer of the plasma polymerization
It is the fluorohydrocarbon of plasma polymerization.
4. it is according to any one of the preceding claims electricity or electro-optical package, wherein the fluorohydrocarbon of the plasma polymerization
It is as obtained by plasma polymerization is selected from one or more following precursor compound:Perfluoro alkane, perfluoroolefine,
Perfluoroalkynes, fluoric ether, fluoroolefin, fluoroalkynes, fluoro acrylic ester, fluoroester, fluoric silane, fluorochloroparaffins, fluorine
Chloro-alkenes, fluorine chlorine alkynes, fluorine chloropropene acid esters, fluorine chlorine ester and chlorofluorosilane.
5. it is according to any one of the preceding claims electricity or electro-optical package, wherein it is described at least one electricity or electrooptic block
It is electric part, and at least one propagation track is conductor rail.
6. it is according to claim 5 electricity or electro-optical package, wherein the electric part is connected to by least one conjugate
At least one propagation track, and described continuous coated at least one conjugate is completely covered.
7. it is according to claim 6 electricity or electro-optical package, wherein at least one conjugate be soldered joint, welding
Joint, wire bond joint, conductive adhesion joint, crimping or press-fitting joint.
8. it is according to claim 7 electricity or electro-optical package, wherein at least one conjugate be soldered joint, welding
Joint or wire bond joint.
9. according to any one Claims 1-4 electricity or electro-optical package, wherein it is described at least one electricity or electrooptic block be
Electrooptic block, and at least one propagation track is conductor rail or guide-lighting rail.
10. it is according to any one of the preceding claims electricity or electro-optical package, wherein the multiple propagation track also include extremely
Few external contact devices, and described continuous coated at least one external contact devices are completely covered.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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GBGB1003067.4A GB201003067D0 (en) | 2010-02-23 | 2010-02-23 | Plasma-polymerized polymer coating |
GB1003067.4 | 2010-02-23 | ||
CN2011800107855A CN102791779A (en) | 2010-02-23 | 2011-02-21 | Plasma-polymerized polymer coating |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN2011800107855A Division CN102791779A (en) | 2010-02-23 | 2011-02-21 | Plasma-polymerized polymer coating |
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CN106916331A true CN106916331A (en) | 2017-07-04 |
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CN2011800107855A Pending CN102791779A (en) | 2010-02-23 | 2011-02-21 | Plasma-polymerized polymer coating |
CN201610837103.2A Pending CN106916331A (en) | 2010-02-23 | 2011-02-21 | The polymer coating of plasma polymerization |
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EP (1) | EP2539392A1 (en) |
JP (1) | JP6085480B2 (en) |
KR (1) | KR101778820B1 (en) |
CN (2) | CN102791779A (en) |
BR (1) | BR112012021172A2 (en) |
GB (1) | GB201003067D0 (en) |
TW (1) | TWI547221B (en) |
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2010
- 2010-02-23 GB GBGB1003067.4A patent/GB201003067D0/en not_active Ceased
-
2011
- 2011-02-21 BR BR112012021172A patent/BR112012021172A2/en not_active Application Discontinuation
- 2011-02-21 CN CN2011800107855A patent/CN102791779A/en active Pending
- 2011-02-21 CN CN201610837103.2A patent/CN106916331A/en active Pending
- 2011-02-21 WO PCT/GB2011/000238 patent/WO2011104500A1/en active Application Filing
- 2011-02-21 KR KR1020127024623A patent/KR101778820B1/en active IP Right Grant
- 2011-02-21 EP EP11705228A patent/EP2539392A1/en not_active Withdrawn
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Cited By (7)
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WO2019037444A1 (en) * | 2017-08-23 | 2019-02-28 | 江苏菲沃泰纳米科技有限公司 | Preparation method for organosilicon nano-protective coating having modulation structure |
WO2019037446A1 (en) * | 2017-08-23 | 2019-02-28 | 江苏菲沃泰纳米科技有限公司 | Preparation method for high insulation nano-protective coating having modulation structure |
WO2019037447A1 (en) * | 2017-08-23 | 2019-02-28 | 江苏菲沃泰纳米科技有限公司 | Preparation method for high insulation hard nano-protective coating having composite structure |
US11389825B2 (en) | 2017-08-23 | 2022-07-19 | Jiangsu Favored Nanotechnology Co., LTD | Methods for preparing nano-protective coating with a modulation structure |
CN109686672A (en) * | 2017-10-18 | 2019-04-26 | 上海稷以科技有限公司 | The method of protective layer and the product of surface formation matcoveredn are formed in body surface |
WO2021017663A1 (en) * | 2019-07-26 | 2021-02-04 | 江苏菲沃泰纳米科技有限公司 | Waterproof nano-membrane, preparation method therefor, application thereof and product |
WO2021249156A1 (en) * | 2020-06-09 | 2021-12-16 | 江苏菲沃泰纳米科技股份有限公司 | Protective coating and preparation method therefor |
Also Published As
Publication number | Publication date |
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TWI547221B (en) | 2016-08-21 |
GB201003067D0 (en) | 2010-04-07 |
JP6085480B2 (en) | 2017-02-22 |
WO2011104500A1 (en) | 2011-09-01 |
JP2013527973A (en) | 2013-07-04 |
KR20120129993A (en) | 2012-11-28 |
BR112012021172A2 (en) | 2016-05-17 |
CN102791779A (en) | 2012-11-21 |
EP2539392A1 (en) | 2013-01-02 |
KR101778820B1 (en) | 2017-09-14 |
TW201204203A (en) | 2012-01-16 |
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